CN101495756B - 使用电机校正压力变化的系统和方法 - Google Patents

使用电机校正压力变化的系统和方法 Download PDF

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Publication number
CN101495756B
CN101495756B CN2006800450740A CN200680045074A CN101495756B CN 101495756 B CN101495756 B CN 101495756B CN 2006800450740 A CN2006800450740 A CN 2006800450740A CN 200680045074 A CN200680045074 A CN 200680045074A CN 101495756 B CN101495756 B CN 101495756B
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CN
China
Prior art keywords
pressure
valve
distributor chamber
pump
volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN2006800450740A
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English (en)
Chinese (zh)
Other versions
CN101495756A (zh
Inventor
G·贡内拉
J·切德罗内
R·A·扎格尔斯
R·F·麦克洛克林
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Entegris Inc
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Entegris Inc
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Publication date
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Publication of CN101495756A publication Critical patent/CN101495756A/zh
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
CN2006800450740A 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法 Expired - Fee Related CN101495756B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US74168105P 2005-12-02 2005-12-02
US60/741,681 2005-12-02
PCT/US2006/045176 WO2007067359A2 (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2012101516051A Division CN102705213A (zh) 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法

Publications (2)

Publication Number Publication Date
CN101495756A CN101495756A (zh) 2009-07-29
CN101495756B true CN101495756B (zh) 2012-07-04

Family

ID=38123375

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2012101516051A Pending CN102705213A (zh) 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法
CN2006800450740A Expired - Fee Related CN101495756B (zh) 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN2012101516051A Pending CN102705213A (zh) 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法

Country Status (5)

Country Link
JP (2) JP5355091B2 (ko)
KR (1) KR101243524B1 (ko)
CN (2) CN102705213A (ko)
TW (1) TWI443482B (ko)
WO (1) WO2007067359A2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9297374B2 (en) 2010-10-20 2016-03-29 Entegris, Inc. Method and system for pump priming
US9354637B2 (en) 2010-02-26 2016-05-31 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
CN101155992B (zh) 2004-11-23 2013-02-20 恩特格里公司 用于可变原位置分配系统的系统和方法
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
KR101364385B1 (ko) 2005-12-02 2014-02-17 엔테그리스, 아이엔씨. 펌프 제어기를 인터페이스시키는 ｉ/ｏ 시스템, 방법 및디바이스
CN101356372B (zh) 2005-12-02 2012-07-04 恩特格里公司 用于在泵中进行压力补偿的系统和方法
WO2007067342A2 (en) 2005-12-02 2007-06-14 Entegris, Inc. System and method for valve sequencing in a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
US7897196B2 (en) 2005-12-05 2011-03-01 Entegris, Inc. Error volume system and method for a pump
TWI402423B (zh) * 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
DE602007004546D1 (de) 2006-09-28 2010-03-18 Tyco Healthcare Tragbares Wundtherapiesystem
TWI545669B (zh) * 2010-06-28 2016-08-11 恩特葛瑞斯公司 具有智慧型控制器之可客製化分配系統
GB201015656D0 (en) 2010-09-20 2010-10-27 Smith & Nephew Pressure control apparatus
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
SG11201609910XA (en) * 2014-05-28 2016-12-29 Entegris Inc Anti-backlash mechanism for motor-driven components in precision systems and applications
JP6991067B2 (ja) 2014-12-22 2022-01-12 スミス アンド ネフュー ピーエルシー 陰圧閉鎖療法の装置および方法
EP3904681A3 (en) * 2016-04-19 2021-12-22 ClearMotion, Inc. Active hydraulic ripple cancelation methods and systems
WO2023084687A1 (ja) 2021-11-11 2023-05-19 旭サナック株式会社 液体噴射装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001020417A1 (en) * 1999-09-17 2001-03-22 Rosemount Inc. Improved interface for managing process calibrators
TW466301B (en) * 1999-10-18 2001-12-01 Integrated Designs L P Method and apparatus for dispensing fluids
CN1590761A (zh) * 1998-11-23 2005-03-09 米利波尔公司 用于精密泵设备的泵调节器

Family Cites Families (13)

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Publication number Priority date Publication date Assignee Title
US4131393A (en) * 1977-01-21 1978-12-26 Altex Scientific, Inc. Fluid pump mechanism
JPS5573563A (en) * 1978-11-29 1980-06-03 Ricoh Co Ltd Ink feed pump of ink jet printer
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
JPH04167916A (ja) * 1990-10-30 1992-06-16 Sumitomo Metal Ind Ltd スプレー用給水圧力制御装置
JP3822362B2 (ja) * 1998-07-10 2006-09-20 株式会社スギノマシン 液体加圧装置
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
JP4531328B2 (ja) * 2002-05-31 2010-08-25 株式会社タクミナ 定量搬送装置
JP3792624B2 (ja) * 2002-08-08 2006-07-05 核燃料サイクル開発機構 粗大結晶粒組織を有する高温クリープ強度に優れたフェライト系酸化物分散強化型鋼の製造方法
JP3861060B2 (ja) * 2003-01-31 2006-12-20 日機装株式会社 無脈動ポンプ
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7443483B2 (en) * 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
JP5059821B2 (ja) * 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 光ディスク装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1590761A (zh) * 1998-11-23 2005-03-09 米利波尔公司 用于精密泵设备的泵调节器
WO2001020417A1 (en) * 1999-09-17 2001-03-22 Rosemount Inc. Improved interface for managing process calibrators
US6330517B1 (en) * 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
TW466301B (en) * 1999-10-18 2001-12-01 Integrated Designs L P Method and apparatus for dispensing fluids
US6478547B1 (en) * 1999-10-18 2002-11-12 Integrated Designs L.P. Method and apparatus for dispensing fluids

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9354637B2 (en) 2010-02-26 2016-05-31 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
US9297374B2 (en) 2010-10-20 2016-03-29 Entegris, Inc. Method and system for pump priming

Also Published As

Publication number Publication date
JP2009527674A (ja) 2009-07-30
KR101243524B1 (ko) 2013-03-20
CN101495756A (zh) 2009-07-29
JP5524269B2 (ja) 2014-06-18
JP2012154337A (ja) 2012-08-16
KR20080071582A (ko) 2008-08-04
TW200732872A (en) 2007-09-01
JP5355091B2 (ja) 2013-11-27
WO2007067359A2 (en) 2007-06-14
TWI443482B (zh) 2014-07-01
WO2007067359A3 (en) 2009-04-23
CN102705213A (zh) 2012-10-03

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Granted publication date: 20120704

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CF01 Termination of patent right due to non-payment of annual fee