CN101494166A - Apparatus and method for processing plate-like object by wet process - Google Patents
Apparatus and method for processing plate-like object by wet process Download PDFInfo
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- CN101494166A CN101494166A CNA2009100797022A CN200910079702A CN101494166A CN 101494166 A CN101494166 A CN 101494166A CN A2009100797022 A CNA2009100797022 A CN A2009100797022A CN 200910079702 A CN200910079702 A CN 200910079702A CN 101494166 A CN101494166 A CN 101494166A
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- intermediate layer
- pan
- liquids recovery
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Abstract
The invention relates to a device and a method for treating disks with wet technique. comprising a carrier for carrying disks and causing the disks to rotate. A distributor is positioned above the carrier which is used for distributing the liquid on at least one surface of the disks, and an annular liquid collector is arranged on the peripheral of the carrier; the carrier is located near the collar extension of the annular liquid collector; the annular liquid collector is provided with an internal layer, an external layer and at least one intermediate layer, a fixed segment and an elevating segment are respectively positioned on the external layer and the intermediate layer, the fixed segment of the external layer is connected with the fixed segment of the intermediate layer, the fixed segment of the intermediate layer and the internal layer are connected with the fixed frame together and the elevating segment of the intermediate layer is connected with the elevating mechanism. The device and the method for treating the disks with wet technique can change the relative axial position of the annular cavity and the wafer by the intermediate layer which can be elevated up and down in the liquid collector so as to cause the liquid of different technologies to flow into different annular cavities, thus realizing the separate recycle of technology liquids after the technologies are finished.
Description
Technical field
The present invention relates to the processing equipment and the processing method of pan, be specifically related to a kind of device with the wet treatment pan.
Background technology
Described herein wafer is represented polytype pan, for example semiconductor wafer, CD or flat-panel monitor.
In the prior art, handle pan device widespread usage in the field.Be in the U. S. application of US1663023 for example, disclose a kind of device that is used for wet process tabular base material in the patent No..In this patent,, make wafer liquid capture ring in different operation stages aim at different annular compartments, thereby realize separate collection different liquids by driving the oscilaltion of carrier and liquid capture ring.In technical process, because carrier generally all is to drive wafer at high speed rotating, and at different operation stages, carrier and liquid capture ring also will be realized moving up and down.So just the structure of carrier is had higher requirement, cause the reliability and stability of this device to be difficult to satisfy.
In the patent No. is in the U. S. application of US6792959, discloses a kind of device that is used for wet process tabular base material.In this patent, chip carrier is only done high speed rotating.By the oscilaltion of annular compartment, realize the separate collection of different liquids.Annular compartment by pipeline with the liquids recovery of collecting or drain, annular compartment oscilaltion, pipeline also can be followed annular compartment oscilaltion together, have so promptly shortened the life-span of pipeline, and because the guiding structural more complicated of pipeline, also influenced the reliability and stability of this device.
Summary of the invention
But one of purpose of the present invention is the position to axial that changes annular compartment and wafer by the intermediate layer of the oscilaltion in the liquids recovery device, makes different liquids flow into different annular compartments, thereby realizes separately reclaiming liquid after the technology.
Two of purpose of the present invention provides a kind of structure, avoids the intermediate layer ovfl of liquid along the liquids recovery device by this structure.
Three of purpose of the present invention provides a kind of structure, the upper end of realizing outer liquid recover by this structure is detachable, can make the simple in structure of liquids recovery ring like this under the prerequisite of avoiding leaking, processing and manufacturing has easily made things convenient for again installing inner maintenance.
For achieving the above object, technical scheme of the present invention is to adopt a kind of device with the wet treatment pan, comprise and be used to the carrier that carries pan and make its rotation, above described carrier, be provided with distributor, described distributor is used for liquid is distributed at least one surface of described pan, periphery at described carrier is provided with annular liquid collector, described carrier is positioned near the collar extension of annular liquid collector, described annular liquid collector is provided with internal layer, skin and at least one intermediate layer, described internal layer, space between skin and the intermediate layer is the liquids recovery chamber, on described skin and intermediate layer, be respectively equipped with canned paragraph and dropping section, described outer field canned paragraph is connected with the canned paragraph in an intermediate layer, the canned paragraph in described intermediate layer also is connected on the fixed frame with described internal layer, the dropping section in described intermediate layer also is connected with elevating mechanism, and the oscilaltion of the dropping section in described intermediate layer is to be used for the liquid after the technology is assigned to different liquids recovery chambers.
Preferably, the internal layer in the described liquid header, skin and intermediate layer are the housing of concentric setting, and described housing also is set to concentric with described carrier.
Preferably, the collar extension diameter in described intermediate layer is greater than the diameter of described pan, and the collar extension in described intermediate layer is positioned at the upper end of the dropping section in described intermediate layer.
Preferably, between the canned paragraph in described skin and intermediate layer and dropping section, be provided with connecting ring, the cross section of described connecting ring is inverted U-shaped, the connecting ring in described inverted U-shaped cross section and described skin and the dropping section rigidity in intermediate layer and being connected of sealing, the U-shaped openend of the connecting ring in described inverted U-shaped cross section is withheld on the canned paragraph in described skin and intermediate layer.
Preferably, described elevating mechanism comprises the drive source of the dropping section oscilaltion that drives described intermediate layer, described drive source is connected with a guide rod, on described guide rod, outer guide sleeve is installed, the outside of fairlead in described outer guide sleeve is sleeved on, be set with described guide rod in described in the fairlead, an end of described interior fairlead is fixed on the described fixed frame other end of described guide rod and the connecting ring rigidity in inverted U-shaped cross section and being connected of sealing.
Preferably, described annular liquid collector constitutes at least two liquids recovery chambers between internal layer, intermediate layer, skin.
Preferably, on the sidewall of described liquids recovery chamber, be provided with a steam vent at least, be provided with an outage at least in the bottom of described liquids recovery chamber.
A kind of method with the wet treatment pan comprises the step of following processing pan:
S1: pan is fixed on carrying pan and making on the carrier of its rotation;
S2: at least one surface that will be used for the liquid that pan carries out technology is distributed in described pan by distributor;
S3: by the liquids recovery of ring-type liquids recovery device after with technology among the S2, but in described ring-type liquids recovery device, be provided with the intermediate layer of oscilaltion, by the oscilaltion in described intermediate layer, it is indoor that the liquids recovery device can be recovered to different recycling cavities with different types of process liquid;
S4: by the steam vent on the described recovery chamber sidewall gas that produces in the pan processing procedure is discharged, the liquid that produces in the pan processing procedure is discharged by the steam vent of described recovery cavity bottom.
Preferably, annular liquid collector described in the S2 is set to comprise the structure with internal layer, skin and at least one intermediate layer, described skin and intermediate layer are set to have the structure of canned paragraph and dropping section respectively, described outer field canned paragraph is connected with the canned paragraph in an intermediate layer, the canned paragraph in described intermediate layer is connected on the fixed frame with described internal layer again, the dropping section in described intermediate layer is connected with elevating mechanism again.
Preferably, drive a guide rod, described guide rod is connected with the dropping section in described intermediate layer, drive the dropping section oscilaltion in described intermediate layer again by described guide rod by the drive source in the described elevating mechanism.
Advantage of the present invention and beneficial effect are: the device and method that utilizes wet treatment pan of the present invention, but because the intermediate layer oscilaltion of ring-type liquids recovery device, thereby changed the position to axial of annular compartment and wafer, dissimilar process liquids are flowed in the different annular compartments, thereby realize separately reclaiming different process liquid.Avoid process liquid along the skin of liquids recovery ring and the ovfl problem in intermediate layer by the structure of the U-shaped openend of the connecting ring in inverted U-shaped cross section being withheld on the canned paragraph in outer and intermediate layer simultaneously.By with the skin of ring-type liquids recovery device with the intermediate layer is divided into canned paragraph and this structure of dropping section realizes the detachable of outer field liquids recovery ring, under the prerequisite of avoiding leaking, can make the simple in structure of liquids recovery ring like this, processing and manufacturing has easily made things convenient for again installing inner maintenance.
Description of drawings
Fig. 1 is the structural representation after liquids recovery device of the present invention intermediate layer dropping section descends;
Fig. 2 is the structural representation after liquids recovery device of the present invention intermediate layer dropping section rises;
Fig. 3 is a liquids recovery device interlayer structure schematic diagram of the present invention;
Fig. 4 is the driving mechanism structure schematic diagram that drives liquids recovery device intermediate layer among the present invention.
Among the figure: the device of 1, handling pan; 2, carrier; 3, distributor; 4, ring-type liquids recovery device; 5, fixed frame; 6, internal layer; 7, intermediate layer; The canned paragraph in 7-1, intermediate layer; The dropping section in 7-2, intermediate layer; 8, skin; 8-1, outer field canned paragraph; 8-2, outer field dropping section; 9, connecting ring; 10, first chamber; 11, second chamber; 12, first steam vent; 13, second steam vent; 14, first outage; 15, second outage; 16, drive source; 17, guide rod; 18, outer guide sleeve; 19, interior fairlead; A, laminar flow air intake; W, wafer; W
1, wafer first aspect; W
2, wafer second aspect; L
1, carrier moves up and down; L
2, the intermediate layer dropping section move up and down; Rotatablely moving of RC, carrier.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is further described.Following examples only are used for technical scheme of the present invention more clearly is described, and can not limit protection scope of the present invention with this.
To shown in Figure 4, the concrete technical scheme of implementing of the present invention is as accompanying drawing 1:
Embodiment 1
A kind of device 1 with the wet treatment pan, with the wafer example wherein with described pan, promptly comprise the carrier 2 that is used for bearing wafer and makes its rotation, above described carrier 2, be provided with liquid distributor 3, the process liquid that described liquid distributor 3 is used for wafer being carried out technology is distributed at least one surface of described wafer, the liquid header 4 of annular is installed in the periphery of described carrier 2, described carrier 2 is positioned near the collar extension of ring-shaped liquid gatherer 4, the liquid header 4 of described annular is provided with internal layer 6, skin 8 and at least one intermediate layer 7, described internal layer 6, space between skin 8 and at least one intermediate layer 7 is at least two liquids recovery chambers, described outer 8 with intermediate layer 7 on be respectively equipped with canned paragraph 8-1,7-1 and dropping section 8-2,7-2, described outer field canned paragraph 8-1 is connected with the canned paragraph 7-1 in an intermediate layer, the canned paragraph 7-1 in described intermediate layer also is connected on the fixed frame 5 with described internal layer 6, the dropping section 7-2 in described intermediate layer also is connected with elevating mechanism, and the oscilaltion of the dropping section in described intermediate layer is to be used for the liquid after the technology is assigned to different liquids recovery chambers.Be provided with canned paragraph and liftable section at described skin, described liftable section is detachable, can make the simple in structure of liquids recovery ring like this under the prerequisite of avoiding leaking, and processing and manufacturing has easily made things convenient for again installing inner maintenance.
On the basis of embodiment 1, the housing in concentric garden is made in internal layer 6 in the described ring-shaped liquid gatherer 4, skin 8 and at least one intermediate layer 7, the epimere part toe-in of described housing is tapered, and to make described housing and described carrier 2 also be concentric.
On the basis of embodiment 2, make the diameter of the collar extension diameter in described intermediate layer 7 greater than described wafer, the collar extension in described intermediate layer 7 is arranged on the upper end of the dropping section 7-2 in described intermediate layer.
On the basis of embodiment 3, described outer 8 and the canned paragraph 7-1 in intermediate layer and dropping section 8-2,7-2 between be provided with connecting ring 9, the cross section of described connecting ring 9 is inverted U-shaped, being connected of dropping section 8-2,7-2 rigidity and the sealing in the connecting ring 9 in described inverted U-shaped cross section and described skin and intermediate layer, the U-shaped openend of the connecting ring 9 in described inverted U-shaped cross section is withheld on canned paragraph 8-1, the 7-1 in described skin and intermediate layer.Between described outer field canned paragraph 8-1 and liftable section 8-2, be provided with connecting ring 9, the cross section of described connecting ring 9 is inverted U-shaped, the connecting ring 9 in described inverted U-shaped cross section and the movable sections 8-2 rigidity in described intermediate layer and being connected of sealing, the U-shaped openend of the connecting ring 9 in described inverted U-shaped cross section are withheld on described outer field canned paragraph 8-1.Between described outer field canned paragraph and liftable section, be provided with connecting ring 9, the cross section of described connecting ring 9 is inverted U-shaped, the connecting ring 9 in described inverted U cross section is with described outer field liftable section rigidity and be tightly connected, and the U-shaped openend of the connecting ring 9 in described inverted U-shaped cross section is withheld on described outer field canned paragraph 8-1.
On the basis of embodiment 1, described elevating mechanism comprises the drive source 16 of the dropping section 7-2 oscilaltion that drives described intermediate layer, described drive source 16 is connected with a guide rod 17, on described guide rod 17, outer guide sleeve 18 is installed, the outside of fairlead 19 in described outer guide sleeve 18 is sleeved on, be set with described guide rod 16 in described in the fairlead 19, described interior fairlead 19 1 ends are fixed on the described fixed frame 5 connecting ring 9 rigidity in described guide rod 17 inverted U-shaped cross sections and the connection of sealing.Constitute at least two liquids recovery chambers between internal layer 6 in described annular liquid collector 4, the intermediate layer 7, outer 8, as first chamber 10 and second chamber 11, on the sidewall of described liquids recovery chamber, be provided with a steam vent at least, as first steam vent 12 and second steam vent 13, at least be provided with an outage in the bottom in described liquids recovery chamber, as first outage 14 and second outage 15.
The invention still further relates to a kind of method with the wet treatment pan, this method comprises the step of following processing pan:
The first step: wafer is fixed on bearing wafer and makes on the carrier 2 of its rotation;
Second step: at least one surface that will be used for the process liquid that wafer carries out technology is distributed in described wafer by distributor 3;
The 3rd the step: by ring-type liquids recovery device 4 with the liquids recovery after the technology among the S2, but in described ring-type liquids recovery device 4, be provided with the intermediate layer 7 of oscilaltion, by the oscilaltion in described intermediate layer 7, the liquids recovery device can be recovered to different types of process liquid in the different recycling cavities;
The 4th step: by the steam vent on the described recovery chamber sidewall gas that produces in the wafer processing procedure is discharged, the liquid that produces in the wafer processing procedure is discharged by the steam vent of described recovery cavity bottom.
In method of the present invention, the annular liquid collector described in the S2 4 is set to comprise have internal layer 6, outer 8 and the structure at least one intermediate layer 7.Be set to have the structure of canned paragraph 8-1,7-1 and dropping section 8-2,7-2 with described outer 8 respectively with intermediate layer 7, described outer field canned paragraph 8-1 is connected with the canned paragraph 7-1 in an intermediate layer, the canned paragraph 7-1 in described intermediate layer is connected on the fixed frame 5 with described internal layer 6 again, the dropping section 7-2 in described intermediate layer is connected with elevating mechanism again.
In method of the present invention, drive a guide rod 17 by the drive source in the described elevating mechanism 16, described guide rod 17 is connected with the dropping section 7-2 in described intermediate layer, drive the dropping section 7-2 oscilaltion in described intermediate layer again by described guide rod 17.
The present invention with the operation principle of the device and method of wet treatment wafer is: carrier 2 is used for keeping and the rotation wafer, this carrier 2 also has with respect to the moving both vertically of liquids recovery device 4, and this device also provides the possibility of using certain parts (arm end effector) that wafer is placed on the carrier 2 or removing from carrier 2.
One liquid distributor 3 that is used for processed wafer is installed at least in the upper end of this device, selects for use different liquids to use different distributors, to avoid the soup cross pollution.This liquid distributor will be used for the process liquid that wafer carries out technology is distributed at least one surface of wafer;
Lifting device is used for along axis oscilaltion intermediate layer 7 liquids recovery rings, thereby changes the axial distance of intermediate layer 7 liquids recovery rings and carrier 2, realizes the separate collection of different liquids.
Steam vent, each layer liquids recovery chamber all has a steam vent, is used for the gas of collection liquids recovery chamber interior separately.Each liquids recovery chamber all contains at least one steam vent.
Outage, the liquid that is used for the liquids recovery chamber interior is reclaimed is derived, and is used for liquids recovery or drains.Each liquids recovery chamber contains an outage at least.
Show the device 1 of handling pan as Fig. 1, it comprises rotatable carrier 2, is used for keeping and rotating a wafer W.Wafer has the first side W
1With the second side W
2This carrier be connected in one the device (not shown), by this device can realize carrier around its axis rotatablely move and optionally along its axis moving up and down with respect to liquids recovery device 4.Distributor 3 is used for liquid is distributed in the first side W of wafer W
1On.
One ring-type liquids recovery device 4 is installed on the fixed frame 5, and along the circumferential direction around carrier 2.It comprises outermost layer 8 liquids recovery rings, at least one intermediate layer 7 liquids recovery rings (only illustrating one among the figure) and innermost layer 6 liquids recovery rings.Three layers of liquids recovery ring concentrically with respect to one another and concentric with carrier 2.Three layers of liquids recovery ring form three circuluses to inner opening.Wherein, the opening diameter that intermediate layer liquids recovery ring forms is a bit larger tham the external diameter of carrier 2, has so both guaranteed to reclaim liquid and can not flow out along the gap, does not interfere with carrier in the time of guaranteeing lifting intermediate layer liquids recovery ring again.Three layers of liquids recovery ring are divided into liquids recovery first chamber 10 and liquids recovery second chamber 11 (quantity of liquids recovery chamber is relevant with the quantity of intermediate layer liquids recovery ring) with liquids recovery device 4.
Fig. 3 is an intermediate layer liquids recovery ring structure schematic diagram, comprises the dropping section 7-2 in liquids recovery ring intermediate layer and the canned paragraph 7-1 in liquids recovery ring intermediate layer.Wherein the canned paragraph 7-1 in intermediate layer and liquids recovery ring are outermost links together with liquids recovery ring innermost layer 6.Outermost layer 8 and outermost canned paragraph 8-1 are ring-type, outermost layer 8 be connected annular 9 for being rigidly connected.Outermost layer 8 by connecting ring 9 be installed in outermost canned paragraph 8-1 on, the cross section of connecting ring 9 is an inverted U.The dropping section 7-2 relative motion vertically in intermediate layer.This structure can realize that purpose one of the present invention can solve the dropping section 7-2 in the canned paragraph 7-1 in intermediate layer and intermediate layer again owing to the slit that exists relative motion to exist, different liquids can be revealed and the problem of cross pollution along the slit, thereby has realized purpose two of the present invention.
Fig. 4 is the lifting device structural representation of liftable intermediate layer dropping section 7-2.The liquids recovery ring in each intermediate layer 7 all has 1～4 lifting device, and the lifting device of different intermediate layers 7 liquids recovery rings is independently of one another.Lifting device is made up of drive source 16 (can be cylinder or motor), outer guide sleeve 18, interior fairlead 19 and guide rod 17.Guide rod 17 is driven by drive source 16, guide rod 17 and outer guide sleeve 18 be connected annular 9 for being rigidly connected.The internal layer 6 of interior fairlead 19 and fixed frame 5 and liquids recovery ring is for being rigidly connected.Fixed drive source 16 drive leaders 17 and outer guide sleeve 18 move up and down with respect to interior fairlead 19, the dropping section 7-2 in intermediate layer that realizes liftable liquids recovery ring is with respect to the relative motion up and down of the canned paragraph 7-1 in liquids recovery ring intermediate layer, thereby realizes purpose one of the present invention.Outer guide sleeve 18 can realize that with interior fairlead 19 the dropping section 7-2 in liquids recovery ring liftable intermediate layer is with respect to the up and down relative motion of liquids recovery ring with respect to the canned paragraph 7-1 in liquids recovery ring intermediate layer, thereby realize purpose one of the present invention, can avoid again withdrawal liquid along guide rod 17 and fixedly the slit trickle between the canned paragraph 7-1 in intermediate layer reclaim chamber, cause drive source etc. caused corrosion.
The outermost layer 8 of liquids recovery ring is divided into three parts in Fig. 1: at the outermost canned paragraph 8-1 of liquids recovery ring, the outermost dropping section 8-2 of liquids recovery ring and connecting ring 9.Wherein, outer field canned paragraph 8-1 and outer field dropping section 8-2 are circulus, and connecting ring 9 also is an annular, and its cross section is the inverted U structure.9 is that rigid seal is connected with the lower end of 8-2, is installed on the 8-1 then.Can also on 8-1 and 8-2, optionally add cartridge screw with fixing (chatting shown in the line among the figure) in case of necessity along circumference.This demountable structure has promptly been simplified the structure of liquids recovery ring outermost layer 8, is convenient to processing and manufacturing, can keep in repair installing inner structure (carrier 2 etc.) very easily again.This is the 3rd purpose of the present invention.
In Fig. 1 and Fig. 2, A is a laminar winds, provides to purify air in technical process, avoids in the technical process particle to the pollution of wafer.In Fig. 1, carry out technology for using the I process liquid, in technical process, laminar flow gas is collected by first steam vent, 12 holes and is discharged.Released liquor is by first outage, 14 trickles, first chamber 10, reclaims or drains.After this step process is finished, drive drive source 16 (shown in Figure 4), the dropping section 7-2 that drives liquids recovery ring intermediate layer rises, and at this moment distributor provides chemical medicine company II, and laminar flow gas is collected by second steam vent 13 and discharged.Released liquor is by second outage, 15 trickles, second chamber 11, reclaims or drains.
The above only is a preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the technology of the present invention principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1, a kind of device with the wet treatment pan, comprise and be used to the carrier that carries pan and make its rotation, it is characterized in that, above described carrier, be provided with distributor, described distributor is used for liquid is distributed at least one surface of described pan, periphery at described carrier is provided with annular liquid collector, described carrier is positioned near the collar extension of annular liquid collector, described annular liquid collector is provided with internal layer, skin and at least one intermediate layer, described internal layer, space between skin and the intermediate layer is the liquids recovery chamber, on described skin and intermediate layer, be respectively equipped with canned paragraph and dropping section, described outer field canned paragraph is connected with the canned paragraph in an intermediate layer, the canned paragraph in described intermediate layer also is connected on the fixed frame with described internal layer, the dropping section in described intermediate layer also is connected with elevating mechanism, and the oscilaltion of the dropping section in described intermediate layer is to be used for the process liquid after the technology is recovered to different liquids recovery chambers.
2, the device with the wet treatment pan as claimed in claim 1 it is characterized in that the internal layer in the described liquid header, skin and intermediate layer are the housing of concentric setting, and described housing is set to also with described carrier concentric.
3, the device with the wet treatment pan as claimed in claim 2 is characterized in that the collar extension diameter in described intermediate layer is greater than the diameter of described pan, and the collar extension in described intermediate layer is positioned at the upper end of the dropping section in described intermediate layer.
4, the device with the wet treatment pan as claimed in claim 3, it is characterized in that, between the canned paragraph in described skin and intermediate layer and dropping section, be provided with connecting ring, the cross section of described connecting ring is inverted U-shaped, the connecting ring in described inverted U-shaped cross section and described skin and the dropping section rigidity in intermediate layer and being connected of sealing, the U-shaped openend of the connecting ring in described inverted U-shaped cross section is withheld on the canned paragraph in described skin and intermediate layer.
5, the device with the wet treatment pan as claimed in claim 1, it is characterized in that, described elevating mechanism comprises the drive source of the dropping section oscilaltion that drives described intermediate layer, described drive source is connected with a guide rod, on described guide rod, outer guide sleeve is installed, the outside of fairlead in described outer guide sleeve is sleeved on, in described, be set with described guide rod in the fairlead, an end of fairlead is fixed on the described fixed frame other end of described guide rod and the connecting ring rigidity in described inverted U-shaped cross section and being connected of sealing in described.
6, as claim 4 or 5 described devices, it is characterized in that described annular liquid collector constitutes at least two liquids recovery chambers between internal layer, intermediate layer, skin with the wet treatment pan.
7, the device with the wet treatment pan as claimed in claim 6 is characterized in that, is provided with a steam vent on the sidewall of described liquids recovery chamber at least, is provided with an outage at least in the bottom of described liquids recovery chamber.
8, a kind of method with the wet treatment pan is characterized in that, comprises the step of following processing pan:
S1: pan is fixed on carrying pan and making on the carrier of its rotation;
S2: at least one surface that will be used for the liquid that pan carries out technology is distributed in described pan by distributor;
S3: by the liquids recovery of ring-type liquids recovery device after with technology among the S2, but in described ring-type liquids recovery device, be provided with the intermediate layer of oscilaltion, by the oscilaltion in described intermediate layer, it is indoor that the liquids recovery device can be recovered to different recycling cavities with different types of process liquid;
S4: by the steam vent on the described recovery chamber sidewall gas that produces in the pan processing procedure is discharged, the liquid that produces in the pan processing procedure is discharged by the steam vent of described recovery cavity bottom.
9, the method with the wet treatment pan as claimed in claim 8, it is characterized in that, annular liquid collector described in the S2 is set to comprise the structure with internal layer, skin and at least one intermediate layer, described skin and intermediate layer are set to have the structure of canned paragraph and dropping section respectively, described outer field canned paragraph is connected with the canned paragraph in an intermediate layer, the canned paragraph in described intermediate layer is connected on the fixed frame with described internal layer again, the dropping section in described intermediate layer is connected with elevating mechanism again.
10, the method with the wet treatment pan as claimed in claim 9, it is characterized in that, drive a guide rod by the drive source in the described elevating mechanism, described guide rod is connected with the dropping section in described intermediate layer, drive the dropping section oscilaltion in described intermediate layer again by described guide rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100797022A CN101494166A (en) | 2009-03-06 | 2009-03-06 | Apparatus and method for processing plate-like object by wet process |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100797022A CN101494166A (en) | 2009-03-06 | 2009-03-06 | Apparatus and method for processing plate-like object by wet process |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108022854A (en) * | 2016-11-03 | 2018-05-11 | 锡宬国际有限公司 | The fluid collection device of single-wafer spin etch cleaning machine |
| CN109701943A (en) * | 2019-01-22 | 2019-05-03 | 上海提牛机电设备有限公司 | A kind of wafer cleaning basin |
-
2009
- 2009-03-06 CN CNA2009100797022A patent/CN101494166A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108022854A (en) * | 2016-11-03 | 2018-05-11 | 锡宬国际有限公司 | The fluid collection device of single-wafer spin etch cleaning machine |
| CN109701943A (en) * | 2019-01-22 | 2019-05-03 | 上海提牛机电设备有限公司 | A kind of wafer cleaning basin |
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Open date: 20090729 |