CN101482405B - Curve example substrate coating thickness measuring method and sample clamping tool - Google Patents

Abstract

The invention discloses a method for measuring the thickness of the substrate coat of curved surface sample and the sample chucking tool thereof. The method comprises: chucking the curved surface sample by a special curved surface sample chucking tool; adjusting the position and the front and rear inclination angle of the sample installing plate, and adjusting the left and right inclination angleof the rotating mechanism of the curved surface sample chucking tool to enable the grinding ball to contact with the measured curved surface of the curved surface sample; grinding the two different points with same curvature radius on the measured curved surface of the curved surface sample adopting the same method with the plane sample to obtain two ellipse grinding cracks with different sizes; measuring the dimension of the major axis on the grinding crack film/base combination point and the coat surface, and using the calculating formula t=<(E+B)>2+<r22>2-<E>2+<r12>2 developed in the invention to obtain the coat thickness and error range thereof. Applying the sample chucking tool designed in the invention can measure the coat thickness of curved surface sample accurately by the currentplane sample coat thickness measuring equipment in ball milling method, and has the advantages of convenient operation and low measuring cost.

Description

The measuring method of curved surface sample substrate coating thickness and sample replacer

Technical field

The present invention relates to a kind of curved surface sample substrate coating thickness measurement method and curved surface sample replacer, be applied to drill bit based on ball-milling method, the measurement of coating thickness on the curved surface samples such as watchcase, tested coating thickness is from 0.1 μ m to 100 μ m.

Background technology

There is ball-milling method to survey the equipment of coating thickness in the market,, can only carries out the test of planar sample coating thickness, do not consider curved surface sample coatings thickness measuring, as shown in Figure 1 as the Switzerland Calotest-of CSM company coating (coating) thickness tester.This device comprises base, and it is by screw and sample holder guide plate, sample installing plate, electric machine support, connections such as bearing bridge.The sample installing plate can be directly used in the mounting plane sample, but be not suitable for installing the curved surface sample it is carried out the ball milling test.

Planar sample is fixed on the sample installing plate, and the grinding ball is placed on the narrow neck of dumbbell axle, contacts with sample surfaces.Grinding spherical surface scribbles abrasive pastes, when the dumbbell axle rotates, drive the rotation of grinding ball, behind the certain hour, the grinding ball grinds circular hole by self gravitation at sample surfaces, at microscopically, distinguishes and read matrix, the diameter of coating surface can inquire the value of coating thickness easily by set form.

If the curved surface sample is installed it is carried out the ball milling test on the sample installing plate of existing apparatus, and adopt above planar sample coating computing method to measure the curved surface substrate coating thickness, then the gained error will be very big, can accurately not react the real thickness of curved surface sample coatings

Summary of the invention

The objective of the invention is to utilize the equipment of existing ball-milling method lining face sample coatings thickness, a kind of measuring method and sample replacer of curved surface sample substrate coating thickness is provided.

For reaching above purpose, the present invention takes following technical scheme to be achieved:

A kind of measuring method of curved surface sample substrate coating thickness comprises the steps:

The first step is connected the base plate of a special-purpose curved surface sample replacer on the sample installing plate of planar sample coating thickness measurement device, and base plate is provided with the be installed left rotation and right rotation mechanism of piece of carry sample, and the curved surface sample is installed in sample and is installed in the straight trough of piece;

Second step, regulate the position and the inclination angle, front and back of sample installing plate, and regulate the inclination angle, the left and right sides of curved surface sample replacer rotating mechanism, make the grinding ball can touch the tested curved surface of curved surface sample a bit;

The 3rd step, starter motor, the same method of employing and planar sample is carried out grinding to the tested surface points of curved surface sample, a polishing scratch of winning;

The 4th step repeated for second step, and the method in the 3rd step makes the grinding ball can touch the tested curved surface of curved surface sample and first another point that radius-of-curvature is identical; Get second polishing scratch after the grinding;

In the 5th step, two different polishing scratch that obtain after the grinding are two oval polishing scratch at microscopically, are respectively 2r at the major axis of film/basic junction and coating surface ₁₁, 2r ₂₁And 2r ₁₂, 2r ₂₂, then coating thickness t calculates with following formula:

$t=\sqrt{{(E+B)}^2+{r_{22}}^2}-\sqrt{{\mathrm{<figure-callout\; id="2"\; label="E"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">E</figure-callout>}}^2+{{\mathrm{<figure-callout\; id="12"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{12}}^2}---\left(1\right)$

In the formula (1):

$E=\frac{A\sqrt{B^2{D}^2-(B^2-A^2)({\mathrm{<figure-callout\; id="2"\; label="D"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">D</figure-callout>}}^2+{{\mathrm{<figure-callout\; id="11"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{11}}^2-{{\mathrm{<figure-callout\; id="12"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{12}}^2)}-\mathrm{ABD}}{(B^2-A^2)}---\left(2\right)$

$D=\frac{B^2-A^2+r_{22}^2+{{\mathrm{<figure-callout\; id="11"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{11}}^2-{{\mathrm{<figure-callout\; id="12"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{12}}^2-{r_{21}}^2}{2A}---\left(3\right)$

In formula (1)～formula (3):

$A=\sqrt{R^2-{{\mathrm{<figure-callout\; id="11"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{11}}^2}-\sqrt{R^2-{r_{21}}^2}$

$B=\sqrt{R^2-{{\mathrm{<figure-callout\; id="12"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{12}}^2}-\sqrt{R^2-{r_{22}}^2}$

Wherein R is the radius of grinding ball 7.

Curved surface sample replacer of the present invention, it is characterized in that, comprise base plate, this base plate is installed on the sample installing plate of planar sample coating thickness measurement device when carrying out the thickness measure of curved surface sample coatings, base plate is provided with the be installed left rotation and right rotation mechanism of piece of carry sample, and the curved surface sample is installed in sample and is installed in the straight trough of piece.

In the such scheme, described left rotation and right rotation mechanism comprises the piece support that is installed that sample is installed piece, is connected with base plate, piece support and the sample piece that is installed that is installed is hinged and fastening with the piece gib screw that is installed, by the adjusting piece gib screw that is installed, the sample piece that is installed makes curved surface sample left-right rotation with the hinge form.

Method of testing of the present invention and sample replacer have the following advantages:

1, designed curved surface sample replacer, can make the curved surface measured position adjust to the position of grinding ball, thereby finished the polishing scratch experiment by this instrument translation or rotation; Provided curved surface thickness of sample computing formula; Can obtain to be obtained by the polishing scratch size enquiry form of coating thickness easily according to this formula, measuring error is very little, can react the real thickness of curved surface sample coatings accurately.

2, owing to designed the special-purpose curved surface sample replacer that can on existing apparatus, use, the present invention not only can lining face sample on the thickness of coating, also can be applied to drill bit, the measurement of coating thickness on the curved surface samples such as watchcase, tested coating thickness from 0.1 μ m to 100 μ m.This is that other device institute with principle is irrealizable at present.

3, utilize the equipment of existing ball-milling method lining face sample coatings thickness to measure curved surface sample coatings thickness accurately, easy to operate, the measurement cost is low.

Description of drawings

Fig. 1 is the device of existing a kind of ball-milling method measurement plane sample coatings thickness.

Among the figure: 1, base; 2, levelling bolt; 3, sample holder guide plate; 4, set screw; 5, dumbbell axle; 6, planar sample; 7, grinding ball; 8, sample installing plate; 9, bearing bridge; 10, shaft coupling; 11, electric machine support; 12, motor; 13, set screw support.

Fig. 2 is the structural drawing of the curved surface sample replacer of employing the inventive method.

Fig. 3 is the side view of Fig. 2.

Among Fig. 2, Fig. 3: 14, curved surface sample; 15, the sample piece that is installed; 16, the screw that is installed; 17, the piece support that is installed; 18, the piece gib screw that is installed; 19, base plate gib screw; 20, base plate.

Two the different big or small polishing scratch of Fig. 4 for adopting curved surface sample replacer of the present invention on curved surface, to grind.Wherein Fig. 4 a is little polishing scratch track; Fig. 4 b is big polishing scratch track.

Fig. 5 measures the relation of curved surface thickness of sample sum of errors sample radius-of-curvature for adopting planar sample coating thickness measurement method.

Embodiment

As shown in Figure 1, the device of existing a kind of ball-milling method measurement plane sample coatings thickness is established levelling bolt 2 on four angles of base 1, be connected with base by screw thread, is used for the leveling base.On base, loosening screw can be along the gathering sill mobile example installing plate 8 and base 1 relative seesawing of guide plate by screw retention for sample holder guide plate 3.Sample holder guide plate 3 is provided with set screw support 13, establishes sample tilt adjustment screw 4 on this support, and its front end contacts with sample installing plate 8, and sample installing plate and sample holder guide plate are hinged, and set screw 4 is rotated before and after can making the sample installing plate.The diameter of grinding ball 7 does not wait from 20-40mm, is positioned on the narrow neck of dumbbell axle 5, contacts with sample 6 surfaces.Dumbbell axle 5 is connected with bearing bridge 9 by bearing, and input end is connected with elasticity shaft joint 10.Shaft coupling 10 is connected with 12 in motor.Motor 12 is a DC speed-reducing.

As Fig. 2, shown in Figure 3,6 of planar samples need sample installing plate 8 to be installed, and the curved surface sample is installed then need adopt special frock, and curved surface sample replacer of the present invention comprises the sample piece 15 that is installed, and it is hinged with the piece support 17 that is installed.Tested curved surface sample 14 is fixed in the top straight trough of the piece 15 that is installed by the screw 16 that is installed.The piece support 17 of being installed connects base plates 20, by gib screw replacer is connected with sample installing plate 8 among Fig. 1.Be installed piece 15 and the piece gib screw 18 of being installed of fixture block support 17, sample constitutes the sample rotating mechanisms, by the rotation piece gib screw 18 that is installed, makes sample piece 15 left-right rotation on a large scale that is installed with the hinge form.

Curved surface sample replacer is fixed on Fig. 1 device sample installing plate 8 when using, by base plate gib screw 20, piece gib screw 18 is installed, adjust its position and left and right rotation angles, in conjunction with sample tilt adjustment screw 4 and 3 motions of sample holder guide plate, can be positioned over the measured position of tested curved surface sample 14 under the grinding ball 7.When measurement plane sample 6, this curved surface sample replacer takes down, and this instrument is installed when surveying curved surface sample 14.

A kind of measuring method of the curved surface sample coatings thickness based on Fig. 2, Fig. 3 curved surface sample replacer comprises the steps:

The first step, the base plate 20 of a special-purpose curved surface sample replacer is connected on the sample installing plate 8 of planar sample coating thickness measurement device, base plate 20 is provided with the be installed left rotation and right rotation mechanism of piece 15 of carry sample, and curved surface sample 14 is installed in sample and is installed in the straight trough of piece 15;

Second step, regulate the position and the inclination angle, front and back of sample installing plate 8, and regulate the inclination angle, the left and right sides of curved surface sample replacer rotating mechanism, make grinding ball 7 can touch curved surface sample 14 tested curved surface a bit;

In the 3rd step, starter motor 12 adopts with the same method of planar sample the tested curved surface of curved surface sample 14 is carried out grinding, a polishing scratch of winning;

The 4th step repeated for second step, and the method in the 3rd step makes grinding ball 7 can touch another point of the tested curved surface of curved surface sample 14; Get second polishing scratch after the grinding;

The 5th step obtained two different polishing scratch by ball milling experiment, was two oval polishing scratch at microscopically, film/basic junction (interior) and coating surface (outside) major axis be respectively 2r ₁₁, 2r ₂₁And 2r ₁₂, 2r ₂₂, as shown in Figure 4, wherein the following footnote 1,2 of first of 2r is represented little, the big outer major axis of polishing scratch respectively; Second following footnote 1,2 represented first grinding points, second grinding points respectively.

Then coating thickness t can calculate with following formula:

$t=\sqrt{{(E+B)}^2+{r_{22}}^2}-\sqrt{{\mathrm{<figure-callout\; id="2"\; label="E"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">E</figure-callout>}}^2+{{\mathrm{<figure-callout\; id="12"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{12}}^2}---\left(1\right)$

In the formula (1):

$E=\frac{A\sqrt{B^2{D}^2-(B^2-A^2)({\mathrm{<figure-callout\; id="2"\; label="D"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">D</figure-callout>}}^2+{{\mathrm{<figure-callout\; id="11"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{11}}^2-{{\mathrm{<figure-callout\; id="12"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{12}}^2)}-\mathrm{ABD}}{(B^2-A^2)}---\left(2\right)$

$D=\frac{B^2-A^2+r_{22}^2+{{\mathrm{<figure-callout\; id="11"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{11}}^2-{{\mathrm{<figure-callout\; id="12"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{12}}^2-{r_{21}}^2}{2A}---\left(3\right)$

In formula (1)～formula (3):

$A=\sqrt{R^2-{{\mathrm{<figure-callout\; id="11"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{11}}^2}-\sqrt{R^2-{r_{21}}^2}$

$B=\sqrt{R^2-{{\mathrm{<figure-callout\; id="12"\; label="r"\; filenames="H2009100209251E00011.png"\; state="\{\{state\}\}">r</figure-callout>}}_{12}}^2}-\sqrt{R^2-{r_{22}}^2}$

Wherein R is the radius of grinding ball 7.Grinding ball 7 adopts diameter 30mm steel balls, when the thicker Time of coating can be the ball of 20mm with diameter, otherwise, then adopt the steel ball of diameter 40mm.

According to above formula, can calculate the t of corresponding different polishing scratch, and make corresponding form by repeatedly experiment, after measuring the size of a certain polishing scratch, can find the coating thickness value fast.

It is very big adopting the error of planar sample Model Calculation curved surface substrate coating thickness.With diameter 2R is the curved surface sample of the steel ball grinding different curvature radius of 30mm, if curved surface sample actual coating thickness t _TrueBe 1 μ m, polishing scratch is in the roundlet radius r of film/basic junction ₁Be 0.2mm, then use the curved surface sample coatings thickness t of planar sample Model Calculation _MeasureAnd relative error (t _True-t _Measure)/t _True* 100% with the logarithm log (R of curved surface sample radius-of-curvature/grinding radius of a ball _a/ R) relation can be represented with Fig. 5.Find out easily when the sample radius of curvature R by Fig. 5 _aComparable or than the grinding radius of a ball hour, planar sample model gained thickness error is difficult to accept with grinding radius of a ball R.

And adopt the inventive method and replacer, and for 1 μ m coating, Measurement Resolution can reach 0.01 μ m, and measuring accuracy is better than 0.04 μ m.

Claims (4)

1. the measuring method of a curved surface sample substrate coating thickness is characterized in that, comprises the steps:

The first step is connected the base plate of a special-purpose curved surface sample replacer on the sample installing plate of planar sample coating thickness measurement device, and base plate is provided with the be installed left rotation and right rotation mechanism of piece of carry sample, and the curved surface sample is installed in sample and is installed in the straight trough of piece;

Second step, regulate the position and the inclination angle, front and back of sample installing plate, and regulate the inclination angle, the left and right sides of left rotation and right rotation mechanism, make the grinding ball can touch the tested curved surface of curved surface sample a bit;

The 3rd step, starter motor, the same method for grinding of employing and planar sample carries out grinding to the tested surface points of curved surface sample, a polishing scratch of winning;

The 4th step repeated for second step, and the method in the 3rd step makes the grinding ball can touch the tested curved surface of curved surface sample and first another point that radius-of-curvature is identical; Get second polishing scratch after the grinding;

In the 5th step, two different polishing scratch that obtain after the grinding are two oval polishing scratch at microscopically, are respectively 2r at the major axis of film/basic junction and coating surface ₁₁, 2r ₂₁And 2r ₁₂, 2r ₂₂, then coating thickness t calculates with following formula:

In the formula (1):

In formula (1)～formula (3):

Wherein R is the radius of grinding ball.

2. the measuring method of curved surface sample substrate coating thickness as claimed in claim 1, it is characterized in that, described left rotation and right rotation mechanism comprises the piece support that is installed that sample is installed piece, is connected with base plate, piece support and the sample piece that is installed that is installed is hinged and fastening with the piece gib screw that is installed, by the adjusting piece gib screw that is installed, the sample piece that is installed makes curved surface sample left-right rotation with the hinge form.

3. press the sample replacer of the measuring method design of claim 1 curved surface sample substrate coating thickness, it is characterized in that, comprise base plate, this base plate is installed on the sample installing plate of planar sample coating thickness measurement device when carrying out the thickness measure of curved surface sample coatings, base plate is provided with the be installed left rotation and right rotation mechanism of piece of carry sample, and the curved surface sample is installed in sample and is installed in the straight trough of piece.

As described in the claim 3 by the sample replacer of the measuring method design of claim 1 curved surface sample substrate coating thickness, it is characterized in that, described left rotation and right rotation mechanism comprises the piece support that is installed that sample is installed piece, is connected with base plate, piece support and the sample piece that is installed that is installed is hinged and fastening with the piece gib screw that is installed, by the adjusting piece gib screw that is installed, the sample piece that is installed makes curved surface sample left-right rotation with the hinge form.

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