CN109352431B

CN109352431B - Ultrasonic vibration grinding removal amount in-place detection device

Info

Publication number: CN109352431B
Application number: CN201811082946.1A
Authority: CN
Inventors: 叶卉; 姜晨; 汪中厚
Original assignee: University of Shanghai for Science and Technology
Current assignee: University of Shanghai for Science and Technology
Priority date: 2018-09-17
Filing date: 2018-09-17
Publication date: 2020-04-21
Anticipated expiration: 2038-09-17
Also published as: CN109352431A

Abstract

The invention relates to an ultrasonic vibration grinding removal amount on-site detection device which comprises a base, a Y-axis moving mechanism, an X-axis moving mechanism and a tiltable measuring mechanism, wherein a triangular and rectangular combined sliding guide rail is arranged on the upper surface of the base, the triangular and rectangular combined sliding guide rail is connected with the Y-axis moving mechanism in a matching manner, a Y-axis moving platform of the Y-axis moving mechanism is in sliding contact with the triangular and rectangular combined sliding guide rail through a triangular and rectangular combined sliding chute, the X-axis moving mechanism is connected to the upper surface of the Y-axis moving platform, and the front end of an X-axis sliding rod of the X-axis moving mechanism is connected with the tiltable measuring mechanism. The invention has simple structure and simple and convenient operation, can realize the multi-degree-of-freedom movement of the measuring head screw rod and obtain high-precision measurement effect, and can effectively realize the on-site detection of the processing removal amount of workpieces with different shapes, sizes and thicknesses; and the accuracy and flexibility of the grinding removal amount measurement can be effectively improved, and the measurement precision and efficiency are improved.

Description

Ultrasonic vibration grinding removal amount in-place detection device

Technical Field

The invention relates to an on-line detection device for machining removal amount, in particular to an on-line detection device for ultrasonic vibration grinding removal amount, and belongs to the technical field of grinding machining.

Background

Ultrasonic vibration grinding is a composite processing method utilizing ultrasonic vibration and grinding wheel grinding, and compared with common grinding, the ultrasonic vibration grinding can obtain higher processing precision and processing efficiency. Therefore, ultrasonic vibration grinding is widely used for machining hard and brittle materials such as glass and ceramics, which is effective in reducing machining time and cost. Efficient machining is an important characteristic of ultrasonic vibration grinding, and in order to determine good machining parameters and conditions to obtain high material removal efficiency, the influence of different grinding parameters and conditions on the material removal rate must be analyzed, so that the actual grinding machining removal amount of the material needs to be evaluated. In addition, in order to obtain an ultrasonically vibrating grinding element with high surface/subsurface quality, it is necessary to completely eliminate the subsurface damage of several microns to nearly a hundred microns depth introduced by the prior machining during the lapping stage, and to ensure that sufficient surface material is ground away, it is also necessary to have a more accurate assessment of the actual amount of grinding. From the above, it is important to quantitatively evaluate the ultrasonic vibration grinding removal amount of the element from the viewpoint of evaluating the machining removal efficiency or obtaining the low subsurface damage element. The removal amount of the grinding processing is generally in a micron order, so that higher requirements are put on the requirements of the precision and the resolution of the detection device. The existing machining removal amount detection technology mostly depends on off-line detection, namely after the component is machined, the component is taken out of a grinding fixture and placed under an optical meter or a microscope for thickness detection and evaluation, or placed on a balance for component mass weighing, and the actual removal amount of the component is calculated by using the thickness difference or mass difference before and after the component is machined. When the material removal amount does not meet the requirement or needs to be processed again, the element needs to be placed on the machine tool clamp again for secondary or multiple times of processing, the process of re-clamping and fixing the element needs to consume certain time, and positioning errors of the element are easily caused, so that the manufacturing precision of the element is influenced. Therefore, in consideration of the defects and shortcomings of the existing offline removal amount detection technology, it is very important to realize the in-situ detection of the grinding removal amount. Therefore, it is necessary to provide an ultrasonic vibration grinding removal amount on-site detection device, which can avoid errors caused by positioning reference deviation during off-line detection and can realize flexible detection of workpieces with different shapes and sizes and different positions on the surface of the workpieces, and the device is required to have a simple structure and simple and convenient operation, and can realize high-precision detection of the ultrasonic vibration grinding removal amount.

Disclosure of Invention

The invention aims to provide an ultrasonic vibration grinding removal amount in-place detection device which is suitable for in-place detection of workpieces with different shapes, sizes and thicknesses and ensures the flexibility and accuracy of processing removal amount measurement.

In order to achieve the purpose, the technical scheme of the invention is as follows: an ultrasonic vibration grinding removal amount on-site detection device comprises a base, a Y-axis moving mechanism, an X-axis moving mechanism and a tiltable measuring mechanism, the upper surface of the base is provided with a triangular and rectangular combined sliding guide rail, the front end and the rear end of the upper part of the base are respectively provided with a front baffle and a rear baffle, the triangular and rectangular combined sliding guide rail is connected with a Y-axis moving mechanism in a matching way, the Y-axis moving mechanism consists of a Y-axis moving platform, a Y-axis driving knob and a ball screw, a triangular and rectangular combined chute is processed at the bottom of the Y-axis moving platform, the Y-axis moving platform and the upper surface of the base realize sliding contact with the triangular and rectangular combined sliding guide rail through the triangular and rectangular combined chute, the Y-axis driving knob is arranged on a front baffle plate of the base, the inner end part of the Y-axis moving platform is connected with a ball screw, and the ball screw is driven to rotate by manually rotating a Y-axis driving knob, so that the Y-axis moving platform moves along a combined triangular and rectangular combined sliding guide rail; the Y-axis moving platform is connected with an X-axis moving mechanism, the X-axis moving mechanism consists of an X-axis sliding chute, an X-axis sliding rod, a driving gear, a turntable gear, a driving motor, a fixed connecting rod and a movable connecting rod, the driving gear and the turntable gear are both arranged on the Y-axis moving platform, the driving gear is connected with the driving motor and driven by the driving motor to realize rotary motion, and the driving gear is meshed with the turntable gear; the center of the turntable gear is connected with the inner end of a fixed connecting rod, the outer end of the fixed connecting rod is connected with the edge of the turntable gear and is connected with the tail end of an X-axis sliding rod through a movable connecting rod, and the head end of the X-axis sliding rod is provided with a buckle sliding chute; the X-axis sliding rod is horizontally placed in the X-axis sliding chute, the X-axis sliding chute is horizontally fixed on the Y-axis moving platform, the driving motor is meshed with the gear to realize the rotation of the turntable gear, and the X-axis sliding rod is driven to feed along the X-axis sliding chute; the front end of the X-axis slide bar is connected with a tiltable measuring mechanism, the tiltable measuring mechanism consists of a micrometer screw, a tilting gear and a spring buckle, and the micrometer screw comprises a measuring head screw, a thickness measuring knob, thickness measuring scales and a handle; the spring buckle comprises an arc-shaped rack and a spring; the center of the inclined gear is hinged with the head end of the X-axis sliding rod, and the inclined gear is fixedly connected with the screw micrometer through being fixedly connected with the middle section of the screw micrometer handle; the spring buckle is arranged in a buckle sliding groove at the head end of the X-axis sliding rod, an arc-shaped rack in the spring buckle is connected with the spring, and the arc-shaped rack is driven by the expansion and contraction of the spring to realize horizontal feeding along the buckle sliding groove at the head end of the X-axis sliding rod; the arc-shaped rack is meshed with the inclined gear to realize the fixation of the inclination angle of the measuring head screw.

Furthermore, the side edge of the base is provided with uniform Y-axis displacement scale marks; a Y-axis displacement pointer is arranged at the end part of the Y-axis moving platform; an X-axis displacement pointer is arranged on the upper surface of the tail end of the X-axis sliding rod; the X-axis sliding groove is provided with uniform X-axis displacement scale marks; the inclined gear is marked with uniform inclined angle scale marks; and an inclination pointer is arranged in the middle of the arc-shaped rack in the spring buckle.

Furthermore, the turntable gear, the fixed connecting rod, the movable connecting rod and the X-axis sliding rod are connected through pins.

Furthermore, the upper and lower positions of a measuring head screw in the micrometer screw are adjustable, the relative thickness of a point to be measured is obtained by utilizing the local contact of the end part of the measuring head screw and a workpiece, and the on-site detection of the machining removal amount of the workpiece is realized by recording the thickness difference of the same position before and after the workpiece is machined.

Furthermore, the ultrasonic vibration grinding removal in-place detection device realizes high-precision and multi-degree-of-freedom motion of feeding, inclined rotation and vertical feeding of the measuring head screw rod on the horizontal plane in two directions through the Y-axis moving mechanism, the X-axis moving mechanism and the inclinable measuring mechanism, and is used for measuring large-caliber workpieces and non-planar workpieces.

The invention has the beneficial effects that:

the invention has simple structure and simple and convenient operation, can realize the multi-degree-of-freedom movement of the measuring head screw rod and obtain high-precision measurement effect, and can effectively realize the on-site detection of the processing removal amount of workpieces with different shapes, sizes and thicknesses; and the accuracy and flexibility of the grinding removal amount measurement can be effectively improved, and the measurement precision and efficiency are improved. In addition, the present invention is also applicable to the in-situ detection of the amount of removed workpiece in other various processing modes including ultrasonic vibration grinding processing.

Drawings

FIG. 1 is a schematic view of the overall structure of the ultrasonic vibration grinding removal amount in-situ detection device of the present invention;

FIG. 2 is a schematic view of a structure for measuring a planar workpiece according to the present invention;

FIG. 3 is a schematic view of a wedge workpiece configuration of the present invention;

FIG. 4 is a schematic view of a partial structure of the tiltable measuring mechanism of the present invention;

FIG. 5 is a schematic diagram of a spherical/aspherical workpiece according to the present invention;

code numbers of the main components in the figures:

1-base, 2-triangle and rectangle combined sliding guide rail, 3-front baffle, 4-rear baffle, 5-Y axis moving platform, 5-a-Y axis displacement pointer, 6-Y axis driving knob, 7-ball screw, 8-triangle and rectangle combined sliding groove, 9-X axis sliding groove, 10-X axis sliding rod, 10-a-X axis displacement pointer, 11-driving gear, 12-turntable gear, 13-driving motor, 14-fixed connecting rod, 15-movable connecting rod, 16-buckle sliding chute, 17-screw micrometer, 17-a-measuring head screw rod, 17-b-thickness measuring knob, 17-c-thickness measuring scale, 17-d-handle, 18-inclined gear, 19-spring buckle, 19-a-arc rack, 19-a-inclination angle pointer, 19-b-spring, 20-workpiece, 21-grinding working table and the like.

Detailed Description

The invention is further described with reference to the following figures and examples.

As shown in fig. 1 to 5, the ultrasonic vibration grinding removal amount on-site detection device of the present invention is composed of a base 1, a triangular and rectangular combined sliding guide rail 2, a front baffle 3, a rear baffle 4, a Y-axis moving platform 5, a Y-axis driving knob 6, a ball screw 7, a triangular and rectangular combined chute 8, an X-axis chute 9, an X-axis slide bar 10, a driving gear 11, a turntable gear 12, a driving motor 13, a fixed link 14, a movable link 15, a snap-in chute 16, a screw micrometer 17, an inclined gear 18, a spring snap 19, and the like.

The upper surface of the base 1 is provided with a triangular and rectangular combined sliding guide rail 2, the front end and the rear end of the upper part of the base 1 are respectively provided with a front baffle 3 and a rear baffle 4, and the side edge of the base 1 is provided with uniform Y-axis displacement scale marks. The triangular and rectangular combined sliding guide rail 2 is connected with a Y-axis moving mechanism in a matching manner, the Y-axis moving mechanism consists of a Y-axis moving platform 5, a Y-axis driving knob 6 and a ball screw 7, a triangular and rectangular combined chute 8 is processed at the bottom of the Y-axis moving platform 5, the Y-axis moving platform 5 and the upper surface of the base 1 are in sliding contact with the triangular and rectangular combined sliding guide rail 2 through the triangular and rectangular combined chute 8, and a Y-axis displacement pointer 5-a is arranged at the end part of the Y-axis moving platform 5; the Y-axis driving knob 6 is installed on the front baffle 3, the inner end portion of the Y-axis driving knob is connected with the ball screw 7, and the Y-axis moving platform 5 moves along the triangular and rectangular combined sliding guide rail 2 by manually rotating the Y-axis driving knob 6 to drive the ball screw 7 to rotate. An X-axis moving mechanism is arranged on the Y-axis moving platform 5 and consists of an X-axis sliding chute 9, an X-axis sliding rod 10, a driving gear 11, a turntable gear 12, a driving motor 13, a fixed connecting rod 14 and a movable connecting rod 15, the driving gear 11 and the turntable gear 12 are both arranged on the Y-axis moving platform 5, the driving gear 11 is connected with the driving motor 13 and driven by the driving motor 13 to realize rotary motion, and the driving gear 11 is in meshed contact with the turntable gear 12; the outer end of the fixed connecting rod 14 is connected with the edge of the turntable gear 12, and the inner end of the fixed connecting rod is connected with the center of the turntable gear 12; one end of a movable connecting rod 15 is connected with the outer end of a fixed connecting rod 14, the other end of the movable connecting rod is connected with the tail end of an X-axis sliding rod 10, an X-axis displacement pointer 10-a is arranged on the upper surface of the tail end of the X-axis sliding rod 10, and a buckle sliding groove 16 with a certain depth is arranged at the head end of the X-axis sliding rod 10; the X-axis sliding rod 10 is horizontally placed in the X-axis sliding chute 9, the X-axis sliding chute 9 is horizontally and fixedly connected to the Y-axis moving platform 5 through a screw, and uniform X-axis displacement scale marks are arranged on the X-axis sliding chute 9; the turntable gear 12, the fixed connecting rod 14, the movable connecting rod 15 and the X-axis sliding rod 10 are connected through pins, the rotation of the turntable gear 12 is realized through the meshing of the driving motor 13 and the gears, and the X-axis sliding rod 10 is driven to feed along the X-axis sliding chute 9. The front end of the X-axis slide bar 10 is connected with a tiltable measuring mechanism, the tiltable measuring mechanism consists of a micrometer screw 17, a tilt gear 18 and a spring buckle 19, and the micrometer screw 17 comprises a measuring head screw 17-a, a thickness measuring knob 17-b, a thickness measuring scale 17-c and a handle 17-d. The spring catch 19 comprises an arc-shaped rack 19-a and a spring 19-b. The center of the inclined gear 18 is hinged with the head end of the X-axis slide bar 10 and is fixedly connected with the middle section of a screw micrometer handle 17-d; the inclined gear 18 is marked with uniform inclined angle scale marks; the spring buckle 19 is arranged in a buckle sliding groove 16 at the head end of the X-axis sliding rod 10, an inclination angle pointer 19-a-a is arranged in the middle of an arc-shaped rack 19-a in the spring buckle 19, and a spring 19-b in the spring buckle 19 can drive the arc-shaped rack 19-a to horizontally stretch along the buckle sliding groove 16 at the head end of the X-axis sliding rod 10; the arc-shaped rack 19-a can be in meshed contact with the inclined gear 18 to realize the fixation of the inclination angle of the measuring head screw 17-a.

The invention realizes the feeding of the measuring head screw 17-a along the Y direction by manually rotating the Y-axis driving knob 6 and utilizing the rotation of the ball screw 7; the driving gear 11 and the turntable gear 12 are driven to rotate by the driving motor 13, and the X-axis slide bar 10 and the measuring head screw 17-a are controlled to feed along the X direction by utilizing a link mechanism; the inclination of the measuring head screw 17-a is completed by the inclined gear 18, and the fixing of the measuring head screw 17-a is realized by the engagement of the arc-shaped rack 19-a and the inclined gear 18.

The invention can flexibly adjust the position of the measuring head screw 17-a in the micrometer screw 17 according to the requirement, obtain the relative thickness of the point to be measured by utilizing the local contact of the end part of the measuring head screw 17-a and the workpiece 20, and realize the in-situ detection of the workpiece processing removal amount by recording the thickness difference of the same position before and after the workpiece processing.

The invention can realize the high-precision and multi-degree-of-freedom movement of the measuring head screw 17-a in two directions on the horizontal plane, the inclined rotation and the vertical feeding, so that the invention can be suitable for the measurement of large-caliber workpieces and non-planar workpieces, such as wedge-shaped workpieces, spherical surfaces/non-spherical surfaces.

According to the measurement principle of the device, thickness measurement is carried out on the same point of the surface of a workpiece before and after grinding, the thickness difference measured twice is defined as the actual material removal amount of the workpiece, the thickness measurement is carried out by using a probe screw 17-a on a screw micrometer 17 to contact a position to be measured on the surface of the workpiece 20 and reading thickness measurement scales 17-c to obtain a thickness value of the workpiece, the measurement accuracy can reach micron level, taking the planar workpiece machining removal amount as an example, ① is provided with a detection device and is adjusted to zero before the probe screw 17-a begins to measure, the probe screw 17-a is in a state of contracting to the highest point, the detection device is placed on the side surface of a grinding workbench 21 and is close to the workpiece 20 to be measured, the probe screw 17-a is positioned at an initial position, the axis of the probe screw 17-a is vertical to the surface of the grinding workbench 21, namely is placed at an X630, the Y-0 and is recorded at an inclination angle W0, coordinates are recorded as a point (0,0,0, 0 is recorded as a point), the coordinate is recorded as a ②③④ - ② is used for the unprocessed workpiece 20, the adjustment of the screw 17-a screw 17 is adjusted to be moved to reach a position of a required by a rotary spindle 21, the workpiece to be moved to a rotary spindle of a rotary spindle 21, the rotary spindle of a rotary spindle, the probe spindle 17-17, the rotary spindle, the probe spindle, the rotary spindle 17-17 a is prepared for the rotary spindle 17, the rotary spindle 17 is read the rotary spindle 17, the rotary spindle 17 a, the rotary spindle 17, the rotary spindle 17 a, the rotary spindle 17 is prepared for the rotary spindle 17, the rotary spindle 17 is moved to move the rotary spindle 17 a, the rotary spindle 17, the rotary spindle 17 a, the rotary spindle 17 a, the rotary spindle 17, the rotary spindle 17 a, the rotary spindle 17, the rotary spindle 17 a, the rotary spindle 17 a, the rotary spindle 17, the rotary spindle, the rotary.

In the above steps, when the Y-direction feeding of the probe screw 17-a needs to be realized, the Y-axis driving knob 6 is manually adjusted, the knob 6 is directly connected with the ball screw 7, the Y-axis moving platform 5 can be directly driven to feed along the guide rail 2 by rotating the Y-axis driving knob 6, and the Y-axis moving platform 5 drives the X-axis chute 9, the X-axis slide bar 10 and the micrometer screw 17 at the head end of the Y-axis moving platform to realize the Y-axis feeding. The Y-axis moving platform 5 and the upper surface of the base 1 are in sliding contact with the triangular and rectangular combined sliding guide rail 2 through the triangular and rectangular combined sliding groove 8. And a Y-axis displacement pointer 5-a is arranged at the end part of the Y-axis moving platform 5, uniform Y-axis displacement scale marks are marked on the side edge of the base 1, and the feeding amount of the measuring head screw 17-a along the Y direction is recorded by reading the number of indications of the Y-axis displacement scale corresponding to the Y-axis displacement pointer 5-a. The grip portion of the Y-axis drive knob 6 is knurled to increase friction. The triangular guide rail has the characteristic of high guiding precision, the working surface of the triangular guide rail can play the roles of bearing and guiding at the same time, the gap can be automatically compensated, the guiding property is good, the rectangular guide rail is good in manufacturability, and the manufacturing and the inspection are convenient.

In the above steps, when the X-direction feeding of the probe screw 17-a needs to be realized, the driving motor 13 is started, the motor 13 is connected with the driving gear 11, the driving gear 11 is engaged with the turntable gear 12 through the gear teeth, so that the motor 13 drives the driving gear 11 and the turntable gear 12 to perform the rotation motion, wherein the reference circle of the driving gear 11 is smaller than the reference circle of the turntable gear 12, and the turntable gear 12 performs the deceleration rotation. The turntable gear 12 is connected with a fixed connecting rod 14, the inner end of the connecting rod is connected with the center of the turntable gear 12, the outer end of the connecting rod is connected with the outer edge of the turntable gear 12, and the connecting rod rotates along with the rotation of the turntable gear 12. The outer end of the fixed connecting rod 14 is connected with the rotating end of the movable connecting rod 15, and the horizontal sliding end at the other end of the movable connecting rod 15 is arranged in the X-axis sliding groove 9 and connected with the tail end of the X-axis sliding rod 10. Wherein, the turntable gear 12, the fixed link 14, the movable link 15 and the X-axis sliding rod 10 are all connected through pins. Therefore, when the driving motor 13 drives the driving gear 11, the rotary table gear 12 and the fixed link 14 to rotate, the horizontal sliding end of the movable link 15 will drive the X-axis slide bar 10 and the micrometer screw 17 at the head end thereof to realize X-direction feeding. After the desired position is reached, the motor 13 is stopped, i.e. the X-axis slide bar 10 is stopped from being fed in the X-direction. An X-axis displacement pointer 10-a is arranged at the tail end of the X-axis slide bar 10, uniform X-axis scale values are marked on the X-axis slide bar 10, and the feeding amount of the measuring head screw 17-a along the X direction is recorded by reading the number of the X-axis displacement scale readings corresponding to the X-axis displacement pointer 10-a.

As shown in fig. 3, a structural schematic diagram for realizing the removal amount measurement of the wedge-shaped workpiece according to the present invention is shown, and since the wedge-shaped workpiece has a certain inclination angle, when the thickness of the wedge-shaped workpiece is measured, not only the probe screw 17-a needs to be moved to X, Y to a desired position, but also the end surface of the screw 17-a needs to be inclined to be parallel to a point to be measured, and then a thickness test is performed, the specific steps are that after the ① - ③ steps are performed, a step needs to be added, the probe screw 17-a is adjusted to the desired inclination angle, that is, the inclined gear 18 is adjusted to drive the probe screw 17-a to incline by adjusting the inclined gear 18, and after the desired angle is reached, the inclined gear 18 is fixed by the spring buckle 19, and the inclination angle reading corresponding to the inclined gear 18 at this time is recorded as W1, the coordinates of the probe screw 17-a are (X1, Y1, W1), and then a step ④ is performed, and a thickness test is performed on the positions (X1, Y1, W1) of the unprocessed workpiece 20, and at this time, the thickness reading H632 is recorded on the grinding scale 17-19, and the grinding height of the workpiece 17-19 is recorded again, and the workpiece surface of the workpiece is recorded as H-9H.

Fig. 4 shows a schematic structural diagram of the tiltable measuring mechanism of the present invention, wherein the end of the spring catch 19 is provided with a segment of arc-shaped rack 19-a, the arc-shaped rack 19-a can be engaged with the tilt gear 18 through gear teeth, the arc-shaped rack 19-a is connected with the spring 19-b, and the arc-shaped rack and the spring are both arranged in the catch slide groove 16 at the head end of the X-axis slide bar 10. In the initial state, the spring 19-b is in a free extension state, namely the arc-shaped rack 19-a and the inclined gear 18 are in a meshing state, at the moment, the inclined gear 18 cannot rotate, and the micrometer caliper 17 is fixed at a specified angle; when the inclination angle needs to be adjusted, the arc-shaped rack 19-a is manually shifted to slide backwards along the buckle sliding groove 16, at this time, the spring 19-b is in a contraction state, the arc-shaped rack 19-a is separated from the inclined gear 18, and the inclined gear 18 is in a rotatable state (fig. 4 shows that the arc-shaped rack 19-a is separated from the inclined gear 18); at the moment, the inclination angle of the inclined gear is freely adjusted, the arc-shaped rack 19-a is loosened when the inclined gear reaches a required angle, the spring 19-b freely extends forwards along the buckle sliding groove 16, the arc-shaped rack 19-a can be meshed with the inclined gear 18 again, the inclination angle indication number on the inclined gear 18 corresponding to the inclination angle pointer 19-a-a in the middle of the arc-shaped rack 19-a at the moment is recorded, the actual inclination angle value of the measuring head screw 17-a is obtained, and the fixing of the measuring head screw 17-a is realized.

As shown in FIG. 5, the only difference between the steps of the structure schematic diagram for measuring the removal amount of the spherical/aspherical workpiece in the invention and the measurement process of the wedge-shaped workpiece is that when the inclination angle of the bevel gear 18 is adjusted, the end face of the screw 17-a is ensured to be inclined to be tangent with the point to be measured on the surface of the workpiece 20, and then contact measurement is carried out.

Claims

1. The utility model provides an ultrasonic vibration grinding removal amount is detection device in situ, includes base, Y axle moving mechanism, X axle moving mechanism, inclinable measuring mechanism, its characterized in that: base (1) upper surface is equipped with triangle-shaped and rectangle combination sliding guide (2), and baffle (3) and backplate (4) before base upper portion front and back end is equipped with respectively, triangle-shaped and rectangle combination sliding guide (2) go up the cooperation and connect Y axle moving mechanism, Y axle moving mechanism comprises Y axle moving platform (5), Y axle drive knob (6) and ball (7), and processing has triangle-shaped and rectangle combination spout (8) Y axle moving platform (5) bottom, realizes sliding contact through triangle-shaped and rectangle combination spout (8) and triangle-shaped and rectangle combination sliding guide (2) between Y axle moving platform (5) and base (1) upper surface, and Y axle drive knob (6) is installed before the base on baffle (3), and its inner end links to each other with ball (7), thereby it is rotatory to realize along triangle-shaped and rectangle combination sliding guide (2) that Y axle moving platform (5) are along triangle-shaped and rectangle combination sliding guide (6) drive ball (7) through manual rotation Y axle drive knob (6) drive ball (7) are The rectangular combined sliding guide rail (2) moves; the X-axis moving mechanism is connected to the Y-axis moving platform (5) and consists of an X-axis sliding groove (9), an X-axis sliding rod (10), a driving gear (11), a turntable gear (12), a driving motor (13), a fixed connecting rod (14) and a movable connecting rod (15), the driving gear (11) and the turntable gear (12) are both arranged on the Y-axis moving platform (5), the driving gear (11) is connected with the driving motor (13) and driven by the driving motor (13) to realize rotary motion, and the driving gear (11) is meshed with the turntable gear (12); the center of the turntable gear (12) is connected with the inner end of a fixed connecting rod (14), the outer end of the fixed connecting rod (14) is connected with the edge of the turntable gear (12) and is connected with the tail end of an X-axis slide rod (10) through a movable connecting rod (15), and the head end of the X-axis slide rod (10) is provided with a buckle sliding chute (16); the X-axis sliding rod (10) is horizontally arranged in the X-axis sliding chute (9), and the X-axis sliding chute (9) is horizontally fixed on the Y-axis moving platform (5); the rotation of a turntable gear (12) is realized by the meshing of a driving motor (13) and a gear, and an X-axis sliding rod (10) is driven to feed along an X-axis sliding groove (9); the front end of the X-axis sliding rod (10) is connected with an inclinable measuring mechanism, the inclinable measuring mechanism consists of a micrometer screw (17), an inclined gear (18) and a spring buckle (19), and the micrometer screw (17) comprises a measuring head screw (17-a), a thickness measuring knob (17-b), a thickness measuring scale (17-c) and a micrometer screw handle (17-d); the spring buckle (19) comprises an arc-shaped rack (19-a) and a spring (19-b); the center of the inclined gear (18) is hinged with the head end of the X-axis sliding rod (10), and the inclined gear (18) is fixedly connected with the micrometer screw (17) by being fixedly connected with the middle section of a micrometer screw handle (17-d); the spring buckle (19) is arranged in a buckle sliding groove (16) at the head end of the X-axis sliding rod (10), an arc-shaped rack (19-a) in the spring buckle (19) is connected with a spring (19-b), and the spring (19-b) stretches and retracts to drive the arc-shaped rack (19-a) to horizontally feed along the buckle sliding groove (16) at the head end of the X-axis sliding rod (10); the arc-shaped rack (19-a) is meshed and connected with the inclined gear (18) to realize the fixation of the inclination angle of the measuring head screw (17-a).

2. The ultrasonic vibration grinding removal amount in-place detection device according to claim 1, characterized in that: the side edge of the base is provided with uniform Y-axis displacement scale marks; a Y-axis displacement pointer (5-a) is arranged at the end part of the Y-axis moving platform; an X-axis displacement pointer (10-a) is arranged on the upper surface of the tail end of the X-axis sliding rod (10); the X-axis sliding groove (9) is provided with uniform X-axis displacement scale marks; the inclined gear (18) is marked with uniform inclined angle scale marks; an inclination angle pointer (19-a-a) is arranged in the middle of an arc-shaped rack (19-a) in the spring buckle (19).

3. The ultrasonic vibration grinding removal amount in-place detection device according to claim 1, characterized in that: the turntable gear (12), the fixed connecting rod (14), the movable connecting rod (15) and the X-axis sliding rod (10) are connected through pins.

4. The ultrasonic vibration grinding removal amount in-place detection device according to claim 1, characterized in that: the upper and lower positions of a measuring head screw rod (17-a) in the micrometer screw (17) are adjustable, the relative thickness of a point to be measured is obtained by utilizing the local contact of the end part of the measuring head screw rod (17-a) and a workpiece (20), and the in-situ detection of the workpiece machining removal amount is realized by recording the thickness difference of the same position before and after the workpiece is machined.

5. The ultrasonic vibration grinding removal amount in-place detection device according to claim 1, characterized in that: the ultrasonic vibration grinding removal in-place detection device realizes high-precision and multi-degree-of-freedom motion of feeding, inclined rotation and vertical feeding of a measuring head screw (17-a) in two directions on a horizontal plane through a Y-axis moving mechanism, an X-axis moving mechanism and an inclinable measuring mechanism, and is used for measuring large-caliber workpieces and non-planar workpieces.