CN101458941A - Optical information recording medium and manufacturing method thereof - Google Patents

Optical information recording medium and manufacturing method thereof Download PDF

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Publication number
CN101458941A
CN101458941A CNA2008101840330A CN200810184033A CN101458941A CN 101458941 A CN101458941 A CN 101458941A CN A2008101840330 A CNA2008101840330 A CN A2008101840330A CN 200810184033 A CN200810184033 A CN 200810184033A CN 101458941 A CN101458941 A CN 101458941A
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Prior art keywords
information recording
optical information
recording media
protective seam
substrate
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CN101458941B (en
Inventor
原风美
大津毅
松田勋
加藤真悟
佐藤昌司
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Taiyo Yuden Co Ltd
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Taiyo Yuden Co Ltd
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Abstract

The invention provides an optical information recording medium and a manufacturing method thereof. The optical information recording medium at least has an optical reflective layer and a protective layer in turn on a substrate. And the optical information recording medium prevents abnormal discharges when a sputtering method is utilized to form the protective layer, prevents a protective film on an interface of the substrate from being stripped, and doesn't have defects caused by abnormal discharges. The invention obtains the optical information recording medium. The optical information recording medium at least has the optical reflective layer for reflecting laser, an optical recording layer comprising light-absorbing substance which adsorbs the laser, the protective layer comprising inorganic material, and an optical transparency layer in turn on the main surface of a disc-shaped substrate, wherein a helical groove is formed on one of the main surfaces of the disc-shaped substrate. Moreover, the sputtering method is utilized to form the protective layer. An area where the protective layer is arranged is made wider than an area where the reflective layer is arranged, and made narrower than an area where the optical transparency layer is arranged, thereby the abnormal discharges and the stripping of the protective film can be prevented.

Description

Optical information recording media and manufacture method thereof
Technical field
The present invention relates to a kind of optical information recording media and manufacture method thereof, more particularly, the present invention relates to a kind of the have optical information recording media of protective seam and the manufacture method of using the optical information recording media of sputtering method.
Background technology
In recent years, optical information recording media is owing to writing down high meticulous image data gradually, so more and more require its information recording density height.Therefore, near the recordable optical information recording media of the short wavelength laser of (for example about 405nm) a kind of 360~450nm that uses short wavelength side has been proposed, for example Blu-ray Disc (being designated hereinafter simply as " BD-R ").This optical information recording media uses azo in its optical recording layer be that pigment or flower cyanines are organic pigment compounds such as pigment, this organic pigment compound decomposes by absorption laser or is rotten, change of optical property under the record regenerating wavelength of acquisition laser is used as degree of modulation, can write down and regenerate whereby.
Such optical information recording media, be on surface, to have formed guiding groove (to be also referred to as pre-groove at light incident side, be designated hereinafter simply as " groove ") resin substrate on overlapped to form reflection layer, optical recording layer successively, and the photic zone that is formed by translucent resin is being set, and form diameter and the thickness identical with CD-R or DVD ± R on this optical recording layer.And, in order to protect optical recording layer, the protective seam that the inorganic material by light transmission constitutes is being set between described optical recording layer and described photic zone.
Optical recording layer is that the manufacturing sequence of the BD-R of organic pigment is; in the formation of resin substrate use the sputtering method in the vacuum to form optical reflection film on the surface of groove; temporarily be fetched in the atmosphere then; utilize method of spin coating to make the organic pigment film forming; then; utilize the sputtering method in the vacuum to form diaphragm once more, attach the light transmission thin slice at last and form BD-R.In addition, when optical recording layer was inorganic material, by adopting the method for carrying out conveyance and continuous sputter in a vacuum, need not be fetched into can be with reflection layer, optical recording layer and protective seam lamination in the atmosphere.
Employed sputter equipment is for example as shown in Figure 5 during the film forming of reflection layer etc., use the base plate supports device 2 and the target pressing plate 6 of optical information recording media, to be configured to as the substrate 1 of the carrier of object being treated with the target 5 of gold, aluminium etc. in opposite directions, when using high-frequency sputtering to carry out film forming, for not with the substrate or the target conducting of institute's sputter, and base plate supports device 2 and target pressing plate 6 are used the resin material of insulativity.
And, when the substrate 1 of optical information recording media is set, in order to cover the film forming side of substrate 1, and mask 3 and outer mask 4 in heart portion and the peripheral part configuration therein, its mask material uses hardware or alloy components usually.
Fig. 6 represents other examples of base plate supports device, generally uses same interior mask 3 and outer mask 4.
The use sputtering method is provided with protective seam formed reflection layer on substrate after again, is not limited to described BD-R, also can carry out in other optical information recording medias.
For example; record in the patent documentation 1; in the regeneration tailored version CD that reflection layer and protective seam is set on being provided with the discoid synthetic resin system substrate of concavo-convex information and forms, when utilizing sputter that reflection layer is set, cover with the inner periphery portion and the peripheral edge portion of shade with substrate.
In addition; record in the patent documentation 2; at least successively formed on light-transmitting substrate in the optical information recording media of the pigment recording layer that contains dye material, the reflection horizon of containing metal and protective seam, methods such as use sputtering method make the reflection horizon cover on the recording layer and formation reflection horizon.
In addition, record in the patent documentation 3, in having the double deck type optical information recording media of the recording layer that contains organic pigment, reflection layer is not contacted with the protective seam that contains element sulphur, and record and use sputtering method to form this protective seam.
[patent documentation 1] Japanese patent laid-open 4-14634 communique
[patent documentation 2] Japanese patent laid-open 11-134714 communique
[patent documentation 3] Jap.P. spy opens the 2005-267670 communique
In the optical information recording media of being put down in writing in the patent documentation 1 and 2, all are the formation steps that sputtering method only are used for reflection layer, and protective seam forms by rotary coating uv-hardening resin on this reflection layer, therefore do not have problems.But; in the manufacture process of BD-R mentioned above; when after having formed reflection layer and optical recording layer, utilizing sputtering method to form protective seam once more, if mask contacts with established metallic reflection layer with outer mask in described, then conducting and produce paradoxical discharge sometimes.Occurred following problem in this case: the peripheral end face of reflection layer becomes zigzag, perhaps can produce the thunder shape spark tracking that extends from the inside all side of the outer circumference end of optical reflection film etc. under some situation.
In the optical information recording media of being put down in writing in the patent documentation 3, though the form illustration of protective seam multiple, there is no record about concrete mode of covering etc.Simultaneously, there is no any explanation about this class problem.
Summary of the invention
The object of the present invention is to provide a kind of optical information recording media and manufacture method thereof; this optical information recording media has protective seam on the upper strata that is formed at the reflection layer on the substrate; and solve the described problem when utilizing sputtering method to form described protective seam; prevent the generation of paradoxical discharge, do not have defective.
The inventor etc. have carried out making great efforts research repeatedly in order to realize described purpose; found that; by when utilizing sputtering method to form protective seam; use can be avoided the mask that contacts with the reflection layer of film forming; and make the zone of protective seam broader, can solve described problem than the zone that reflection layer is being set.
Yet; though zone that can be by making protective seam is than the broader generation that prevents paradoxical discharge in the zone of reflection layer; but this moment; protective seam can directly contact with substrate; the protective seam that is formed by inorganic material and the adherence of resin system substrate are poor, have therefore produced the protective seam problem from peeling off at the interface easily.
Therefore; the inventor etc. further study the back and find; by making the zone that protective seam is being set broader than the zone that reflection layer is being set; and photic zone is arranged to protective mulch and part with a part of adherence of substrate is set, can solve described paradoxical discharge and peel off this two problems.
The present invention finishes according to these opinions, and it thes contents are as follows.
[1] a kind of optical information recording media; it is provided with substrate at least, be arranged on reflection layer on one of them interarea of this substrate, be arranged on optical recording layer on the upper surface of this reflection layer, be arranged on the protective seam on the upper surface of this optical recording layer and be arranged on photic zone on the upper surface of this protective seam, and described optical information recording media is characterised in that:
Described protective seam is to utilize sputtering method and the layer that forms, and the zone that is provided with this protective seam is configured to than being provided with the regional wide of described reflection layer, and covers the end of described reflection layer directly or indirectly.
[2] according to the optical information recording media of described [1], it is characterized in that: described photic zone covers described protective seam, and is set to continuously till the outer circumference end of described substrate.
[3] according to the optical information recording media of described [1], it is characterized in that: described photic zone is provided with continuously with the outer circumference end above described substrate, and is configured to cover the edge part of described outer circumference end.
[4] a kind of manufacture method of optical information recording media; it is made according to each optical information recording media in described [1]~[3], and the manufacture method of described optical information recording media is characterised in that: interior all ends of employed outer mask are positioned at the outer circumferential side of the position suitable with the peripheral end of described reflection layer setting area when utilizing sputtering method to form described protective seam.
[5] a kind of manufacture method of optical information recording media; it is made according to each optical information recording media in described [1]~[3], and the manufacture method of described optical information recording media is characterised in that: when utilizing sputtering method to form described protective seam employed in the peripheral end of mask be positioned at all sides of the position suitable with all ends of described reflection layer setting area.
[6] a kind of manufacture method of optical information recording media; it is made according to each optical information recording media in described [1]~[3]; the manufacture method of described optical information recording media is characterised in that: interior all ends of employed outer mask are positioned at the suitable position of outer circumference end with described reflection layer setting area when utilizing sputtering method to form described protective seam; and near the thickness the interior terminal part of this mask is along with increase away from the position suitable with the outer circumference end of this reflection layer continuous or interimly.
[effect of invention]
Among the present invention, when utilizing sputtering method to form protective seam, form broadlyer than the zone of established reflection layer by the zone that makes protective seam, mask contacts with reflection layer with outer mask in can preventing, thereby can not produce paradoxical discharge.
Description of drawings
Fig. 1 is the part amplification sectional view of the inner structure of expression optical information recording media of the present invention.
Fig. 2 (A)~(C) is the synoptic diagram of the outer peripheral edges of expression optical information recording media of the present invention.
Fig. 3 is the synoptic diagram of a form of expression outer mask used in the present invention.
Fig. 4 is the synoptic diagram of other forms of expression outer mask used in the present invention.
Fig. 5 is the synoptic diagram of an example of expression sputter equipment.
Fig. 6 is the synoptic diagram of other examples of expression base plate supports device.
[explanation of symbol]
1 substrate
2 base plate supports devices
Mask in 3
4 outer masks
5 targets
6 target pressing plates
10 optical information recording medias
11 substrates
12 grooves
13 reflection layers
14 optical recording layers
15 protective seams
16 adhesive layers
17 photic zones
Embodiment
Below, with reference to graphic, optical information recording media of the present invention is described.
Fig. 1 represents an example of optical information recording media of the present invention, is about at thickness on one of them interarea of circular substrate 11 of 1.1mm to have formed spiral groove 12.In the formation of this substrate 11 on the interarea of spiral groove 12, long-pending successively the reflection layer 13 of reflector laser is being set layeredly, for example containing the protective seam 15 that forms by the optical recording layer 14 of the light absorption material that organic pigment constituted that absorbs laser, by inorganic material, optionally and the photic zone 17 that the tack coat 16 of setting and thickness are about 0.1mm.
In the present invention, described protective seam 15 is to utilize sputtering method and the layer that forms, and the zone that this protective seam is being set is to form more largo to cover the side of interior all sides in zone of described reflection layer 13 and the side of outer circumferential side are being set.And, described photic zone 17 be form broader and the side of interior all sides of protective seam 15 and the side of outer circumferential side covered than the zone that protective seam 15 is being set.So, protective seam 15 forms narrower slightly than the euphotic zone that forms above it.Particularly preferably be, the outer circumference end of photic zone 17 is to form with the peripheral end face of substrate 11 or the edge part adherence of circumferential lateral surface.By constituting by this way, can prevent protective seam 15 peeling off at the interface from substrate 11.
In addition,, also the outer circumference end of photic zone 17 is attached at the outer circumference end of substrate 11, therefore can obtains roughly the same effect even be under the laminar situation at photic zone 17.
Fig. 2 (A), (B) and (C) be expression for clear and definite described formation of the present invention, and confirm result's the synoptic diagram in cross section of the outer circumference end of described optical information recording media 10 with microscope.
Optical information recording media of the present invention preferably, shown in Fig. 2 (A), described photic zone 17 is set to till the outer peripheral edges of disc wafer 11 of optical information recording media 10 continuously.According to such optical information recording media 10; protective seam 15 covers the end face of reflection layer 13 and optical recording layer 14; and photic zone 17 is set in protective mulch 15 till the outer circumference end of substrate 11 continuously, the discharge in the time of therefore can preventing to form protective seam 15.And, can prevent peeling off of protective seam 15 effectively.Photic zone 17 expressions in this example are by the formed situation of laminar resin.Wherein, omitted the diagram that photic zone 17 is bonded in the adhesive layer 16 on the upper surface of protective seam 15.
And in the form shown in Fig. 2 (B), the situation that protective seam 15 covers the reflection layers 13 and the end face of optical recording layer 14 is identical, is that with the difference of described Fig. 2 (A) outer circumference end of protective seam 15 is formed into till the outer circumference end of substrate 11.And be expressed as follows situation: photic zone 17 is with the outer circumference end that surpasses protective seam 15 and the mode protruded on the circumferential lateral surface of substrate 11 and till being formed into the edge part of circumferential lateral surface.
And the difference of the form of form shown in Fig. 2 (C) and above explanation is that optical recording layer 14 covers the end face of reflection layer 13, and extends to form till the outer circumference end of substrate 11.Protective seam 15 forms the upper surface that covers optical recording layer 14, and photic zone 17 is similarly to form with Fig. 2 (B).In addition, though the outer circumference end position of the optical recording layer 14 of this form extends to till the outer circumference end of substrate 11, the difference of its generation type is to control by the rotating speed of rotary coating and time.
By adopting the formation of Fig. 2 (B) or Fig. 2 (C), under the situation till the outer circumference end that protective seam 15 is set to substrate 11, also can prevent to peel off, also can prevent the discharge when sputter forms protective seam 15 simultaneously.While the formation of the photic zone 17 in these forms is by adjusting rotating speed and the aqueous resin of time rotary coating forms.
Below, the layer that constitutes optical information recording media 11 of the present invention is elaborated one by one.
(substrate)
Among the present invention, described substrate 11 can at random select to use existing various materials as baseplate material.Specifically can enumerate: polycarbonate, acrylic resins such as polymethylmethacrylate, vinyl chloride-based resins such as Polyvinylchloride, vinyl chloride copolymer, epoxy resin, amorphous polyolefin, vibrin, metals such as aluminium, glass etc. also can optionally and also be used these materials.In the described material, consider preferred thermoplastic resin, special optimization polycarbonate from aspects such as mouldability, moisture-proof, dimensional stability and cheapnesss.
Use under the situation of these resins, preferably utilize methods such as ejection formation that substrate 11 is made specific shape, for example, circular if CD is then made.And the thickness of described substrate 11 preferably is set as the scope of 0.9~1.1mm.And, be not limited thereto, for example, also can use uv-hardening resin, be coated on the base station and make film the sclerosis and used.
In the present invention, described spiral groove 12 preferably, in the employed mould of the ejection formation of described substrate 11, configuration has been implemented the template that is called as pressing mold with the spiral helicine convex microfabrication of described groove 12 opposite pattern to an interarea, forms simultaneously when the ejection formation of described substrate 11.
(reflection layer)
Reflection layer 13 of the present invention makes the record of data and/or the laser-bounce of regeneration usefulness, be for give the reflectivity of raising to laser, the improvement recording function and be arranged between substrate 11 and the optical recording layer 14 layer, for example be utilize vapour deposition method, ion plating, sputtering method etc. and be formed on described substrate 11 formation on the surface of groove 12.Wherein, consider preferred especially sputtering method from the aspect of production, cost.
Constitute the material of described reflection layer 13, so long as the optical reflection film of common CD the preferred material that uses get final product, the preferred metal film that uses Au, Al, Ag, Cu or Pd etc., the alloy film of these metals or in these metals, added the alloy film of micro constitutent.
(optical recording layer)
Described optical recording layer 14 preferably contains by the light absorption material that organic pigment constituted that absorbs laser.Wherein, preferably utilize laser radiation to form the news hole and the pigment type optical recording layer of record data.The preferred phthalocyanine dye of described organic pigment, flower cyanines pigment, azo are pigment etc., for example preferably, colored cyanines pigment shown in azopigment shown in the Chemical formula 1 or the Chemical formula 2 is dissolved in for example TFP (TetraFluoroPropanol with bonding agent etc., tetrafluoropropanol) in the equal solvent, the preparation coating fluid.Then, across described reflection layer, use this coating fluid of coating such as method of spin coating or silk screen print method and form film after, drying is about 30 minutes under 80 ℃ temperature for example, forms described optical recording layer 14 thus.
[changing 1]
Figure A200810184033D00091
(in the formula, A and A ' expression contain one or more mutually the same or different heterocycles that are selected from the heteroatoms in nitrogen-atoms, oxygen atom, sulphur atom, selenium atom and the tellurium atom and form.R 21To R 24Independent respectively expression hydrogen atom or substituting group.Y 21, Y 22Expression is selected from the mutually the same or different heteroatoms in the 16th family's element of the periodic table of elements.)
[changing 2]
Figure A200810184033D00092
(in the formula, Φ +And φ represents indolenine ring residue, benzo indolenine ring residue or dibenzo indolenine ring residue respectively, and L represents to be used for forming the concatenating group of list or two carbocyanines pigments.X -The expression negative ion, m is 0 or 1 integer.)
(protective seam)
In the present invention, described protective seam 15 is in order to adjust recording characteristic etc. or to improve cohesiveness or protection optical recording layer 14 etc., and is formed between described optical recording layer 14 and the aftermentioned photic zone 17, is to utilize sputtering method and form by SiO on optical recording layer 14 2, ZnS-SiO 2, Nb 2O 5-Al 2O 3Etc. formed hyaline membrane.
In this case invention, when desire forms protective seam 15, formed the described reflection layer 13 that comprises metal film or alloy film.Therefore, at least one is the mask that does not contact with the reflection layer 13 of film forming in mask 3 and the outer mask 4 in employed in the time of must making sputter.
Below, the concrete example of employed mask is described.
The mask of the 1st example is to form: the dead area of employed outer mask 4 and interior mask 3 was bigger when the dead area of employed outer mask 4 and interior mask 3 was than formation reflection layer 13 when forming protective seam 15.
In other words; employed outer mask 4 when forming protective seam 15; all ends are compared with the position suitable with the peripheral end in the zone, reflection horizon of film forming and are positioned at outer circumferential side in it; and; when forming protective seam 15 employed in mask, its peripheral end is compared with the position suitable with interior all ends in the zone, reflection horizon of film forming and is positioned at all sides.
For example; all diameters are under the situation of the outer mask 4 of 118.0mm, interior mask 3 that outer circumference diameter is 34.0mm and film forming in reflection layer 13 is to use; the interior week of employed outer mask 4 during with respect to formation reflection layer 13; and the diameter of establishing 1mm interior week of employed outer mask 4 is poor when forming protective seam 15; making shaded areas is the above scope of distance center 119.0mm, can avoid effectively thus and the contacting of optical reflection film.Fig. 3 represents the example of this outer mask 4.In addition, interior all diameters of outer mask 4 are made as under the situation of 118.5mm, may be when making the reflection horizon be offset slightly because of substrate or device core shift to form or because the membrane stack on the mask is long-pending contacts with optical reflection film 13.
When forming protective seam 15 employed in mask 3 also identical, to its periphery when forming reflection layer 13 employed in mask 3 peripheries and to establish the diameter of 1mm poor, its periphery is made as 33.0mm, can avoid effectively thus and the contacting of optical reflection film 13.
The 2nd example is the interior week end of mask 4 outside or the outer circumference end of interior mask 3, is provided with all end thickness with the substrate-side of mask 3,4 to be whittled into skewed or stair-stepping mode and to make the part of the thickness attenuation of each mask.By being arranged to this kind shape, optical reflection film 13 can not contact with mask 3,4 and can form protective seam 15.Simultaneously, also can realize not producing paradoxical discharge.
Fig. 4 represents the example of described outer mask 4.As shown in the figure, interior all diameters of outer mask 4 are example as above, is 118.0mm, and interior all ends of outer mask 4 are to be positioned at and the suitable position of peripheral end of the reflection layer of film forming.And, in interior all end side of this mask 4, be to be arranged to its thickness increase obliquely towards periphery, the formed space of this rake has been avoided and the contacting of the optical reflection film 13 of film forming effectively.
The situation of interior mask 3 is also identical, no matter is to be provided with towards the inclination of middle body or end difference is set in its outer circumference end, all can avoid effectively and the contacting of optical reflection film 13.
In addition; among Fig. 4; when forming protective seam 15 employed mask 3,4 illustrations all distolateral example that is contacting with substrate-side with inclination; but in the present invention; for employed mask 3,4 is not contacted with established reflection layer 13, as long as the thickness of substrate-side that makes mask is along with increasing away from the formation zone of reflection layer.
(adhesive layer)
Among the present invention, adhesive layer 16 is in order to improve the layer arbitrarily that described protective seam 15 forms with the adherence of following laminar hyaline layer 17.
This kind adhesive layer 16 preferably is that transparent reaction hardening resin in addition or UV cured property transparent resin are as major component with epoxy; utilize methods such as method of spin coating or silk screen print method and be coated on the described protective seam 15 and/or after aftermentioned thickness is about on the lower surface of laminar photic zone 17 of 0.1mm; utilize adhesive layer 16 that the protective seam 15 of described substrate 11 is engaged with described laminar photic zone 17, obtain the discoid optical information recording media that thickness is about 1.2mm.
(photic zone)
In the present invention, described photic zone 17 preferably contains transparent resin.More particularly, preferably use, perhaps utilize method of spin coating to be coated with these resins and form photic zone 17 by the good formed thin slice of resin of for example light transmission such as polycarbonate resin, acrylic resin.
Fig. 2 (A)~(C) is illustrated as described, and described photic zone 17 forms broader than the zone that has formed the described protective seam 15 that is formed by inorganic material, thus, can prevent protective seam 15 the peeling off at the interface at substrate 11 that is formed by inorganic material.
Particularly preferably be, photic zone 17 preferably is set to till the outer peripheral edges of optical information recording media continuously, can prevent the deterioration under the hot and humid environment thus effectively.
And, for the thickness of described photic zone 17 and since normally constitute near the wavelength of irradiation 400nm~420nm laser and in described optical recording layer 14 record data and/or from described optical recording layer 14 sense data, therefore usually preferred 0.1mm.
[embodiment]
Below, the manufacture method according to the embodiment shown in Fig. 2 (C) further is specifically described the present invention.
The manufacturing of<substrate 〉
On glass master, utilize method of spin coating, form the photoresistance film with specific thickness coating photoresist (emulsion) respectively, the laser of use cutter sweep exposes and becomes after the specific exposure width dimensions, on the glass master that is obtained, drip developer solution, carry out development treatment, the groove 12 corresponding concavo-convex photoresistance patterns of the substrate 11 of formation and discoid optical information recording media.
Then, on this glass master, utilize electroplating processes and nickel is separated out, and it is peeled off, contouring is become disc-shape and obtains pressing mold.
Then, this pressing mold is installed in the die cavity of device for injection moulding, injects polycarbonate resin in die cavity, the major diameter that obtains therein to have on the interarea spiral groove 12 is the substrate 11 of 120mm.
The formation of<reflection layer 〉
Formed on the interarea of spiral groove 12 in one of them of described substrate 11, utilize sputter equipment, all diameters are the outer mask 4 of 118.0mm and the outer circumference diameter interior mask 3 as 34.0mm in using, and use the Ag alloy that consists of " Ag-0.65Cu-1.0In (wt%) " as target material, 10 -2Make argon gas become plasma under the air pressure about torr (holder), make Ar +Ionic bombardment target and carry out sputter.In the zone of the radius 17mm to 59mm of distance circle disk center, forming thickness is the reflection layer 14 of the homogeneous thickness of 100nm.
The formation of<optical recording layer 〉
On the upper surface of the substrate 11 that has formed described reflection horizon 13, in the zone of the radius 18mm to 60mm of distance circle disk center, forming thickness is the optical recording layer 14 of 60nm.Specifically, be that the colored cyanines pigment shown in azopigment shown in the Chemical formula 1 or the Chemical formula 2 for example is dissolved in TFP (tetrafluoropropanol) equal solvent and the preparation coating fluid with bonding agent etc.Then, this coating fluid utilized method of spin coating and be coated on the described reflection layer, form film after, under 80 ℃ temperature dry 30 minutes, form optical recording layer 14 thus.
The formation of<protective seam 〉
Then, on the substrate that has formed this optical recording layer 14, utilize sputter equipment, all diameters are as the outer mask 4 of 119.0mm and the diameter interior mask 3 as 33.0mm, 10 in using -2Make argon gas become plasma under the air pressure about torr, make Ar +Ionic bombardment ZnS-SiO 2And carry out sputter.By this sputter, having formed thickness in the zone of the radius 16.5mm to 60mm of distance circle disk center is the diaphragm 15 of 25nm.In the film forming procedure of diaphragm 15, do not produce paradoxical discharge.In addition, the outer mask 4 that forms this protective seam 15 is to use picture to have the outer mask 4 of rake as shown in Figure 4 in interior all sides.
<euphotic formation 〉
Further; on the substrate that has formed protective seam 15; arrive in the zone of side of substrate 11 in the periphery of the zone of the radius 9mm to 60mm that exceeds distance circle disk center, protective mulch 15 and interior week and outside side; utilize after the method for spin coating coating acrylic resin; irradiation ultraviolet radiation hardens, and forming thickness is the photic zone 17 of 0.1mm.By finishing these steps, and obtained the discoid optical information recording media 10 that thickness is about 1.2mm.
The optical information recording media 10 that is obtained there is no apparent bad, and electrical characteristics are also as designed, and no abnormal.
(comparative example)
In embodiment 1, all diameters as the interior mask 3 of 34.0mm, in addition, obtained optical information recording media 10 as the outer mask 4 of 118.0mm and diameter similarly to Example 1 in protective seam 15 used.In the film forming procedure of diaphragm 15, can see the generation of paradoxical discharge.The optical information recording media that is obtained is through confirming, the most peripheral part of reflection layer is along the side face indentation, also can see badly in appearance, and shake (jitter) worsens or recording sensitivity worsens.
In addition, the illustrated formation and the explanation of action etc. are not limited to each and record and narrate among example of the present invention or the embodiment, can be in the scope that does not depart from purport of the present invention in addition various changes.

Claims (6)

1. optical information recording media; it is provided with substrate at least, be arranged on reflection layer on one of them interarea of this substrate, be arranged on optical recording layer on the upper surface of this reflection layer, be arranged on the protective seam on the upper surface of this optical recording layer and be arranged on photic zone on the upper surface of this protective seam, and described optical information recording media is characterised in that:
Described protective seam is to utilize sputtering method and the layer that forms, and the zone that is provided with this protective seam is configured to than being provided with the regional wide of described reflection layer, and covers the end of described reflection layer directly or indirectly.
2. optical information recording media according to claim 1 is characterized in that: described photic zone covers described protective seam, and is set to continuously till the outer circumference end of described substrate.
3. optical information recording media according to claim 1 is characterized in that: described photic zone is provided with continuously with the outer circumference end above described substrate, and is configured to cover the edge part of described outer circumference end.
4. the manufacture method of an optical information recording media; it is made according to each described optical information recording media in the claim 1 to 3, and the manufacture method of described optical information recording media is characterised in that: interior all ends of employed outer mask are positioned at the outer circumferential side of the position suitable with the peripheral end of described reflection layer setting area when utilizing sputtering method to form described protective seam.
5. the manufacture method of an optical information recording media; it is made according to each described optical information recording media in the claim 1 to 3, and the manufacture method of described optical information recording media is characterised in that: when utilizing sputtering method to form described protective seam employed in the peripheral end of mask be positioned at all sides of the position suitable with all ends of described reflection layer setting area.
6. the manufacture method of an optical information recording media; it is made according to each described optical information recording media in the claim 1 to 3; the manufacture method of described optical information recording media is characterised in that: interior all ends of employed outer mask are positioned at the suitable position of outer circumference end with described reflection layer setting area when utilizing sputtering method to form described protective seam; and near the thickness the interior terminal part of this mask is along with increase away from the position suitable with the outer circumference end of this reflection layer continuous or interimly.
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CN105225675B (en) * 2015-05-01 2017-11-24 优贝克科技股份有限公司 Record disc with different material

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