CN101449150B - Inspection head supporting structure in surface inspecting apparatus - Google Patents
Inspection head supporting structure in surface inspecting apparatus Download PDFInfo
- Publication number
- CN101449150B CN101449150B CN2007800183566A CN200780018356A CN101449150B CN 101449150 B CN101449150 B CN 101449150B CN 2007800183566 A CN2007800183566 A CN 2007800183566A CN 200780018356 A CN200780018356 A CN 200780018356A CN 101449150 B CN101449150 B CN 101449150B
- Authority
- CN
- China
- Prior art keywords
- inspection
- inspection head
- bearing
- assembly
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
A pair of angular contact bearings are provided between a bearing house and a head supporting cylinder of an inspection head, and a spacer and a bearing ring are arranged between the outer rings of the bearings. The spacer and the spring bearing ring are urged to the outer ring side by a coil spring. An o-ring is arranged between the spacer and the outer ring of the bearing, and the outer circumference is adhered to the inner circumference of the bearing house. The outer rings are bundled by a step inside the bearing house and an end cap screwed into the inspection head. The bearing housing and a main shaft section are permitted to be integrally taken out from the bearing by removing the end cap. The inspection head is provided with a head main body attached to a drive mechanism, and a supporting section which is removably arranged to the head main body and supports a mirror.
Description
Technical field
The present invention relates to the inspection head supporting structure in a kind of surface inspecting apparatus; Thereby this surface inspecting apparatus is checked the surface of inspection object to inspection object examination light from the inspection head, perhaps the present invention relates to a kind of surface inspecting apparatus that the surface condition of inspection object is checked.
Background technology
For the equipment of the interior perimeter surface of inspection tubular inspection object, known surface inspecting apparatus at the inspection head that makes the quill shaft shape under the situation of its axis rotation, along the axial inspection head that drives out of inspection head.This surface inspecting apparatus will check that head inserts the inside of inspection object; Use the laser beam of the light that conducts a survey from the periphery irradiation of inspection head; From one end to the other side the interior perimeter surface of inspection object is carried out step-scan vertically; Receive the reflected light corresponding to scanning of self-check object through inspection head, and confirm the situation of the interior perimeter surface of inspection object, for example whether have (for example referring to patent documentations 1) such as defectives based on the catoptrical light quantity that is received.
In addition; For the surface of checking object (for example; The inside surface of tubular object) equipment, above-mentioned surface inspecting apparatus makes the axle shape inspection head that is provided with the light path modifier endways when its axis rotates through driving mechanism, makes this inspection head along its axial-movement.Simultaneously; This surface inspecting apparatus changes the light path that incides the inner inspection light of inspection head along axis through the light path modifier; Inside surface to the hole applies the reformed inspection light of light path, and detects the situation of inside surface based on also inciding the light quantity of the inner light of inspection head once more from the inside surface reflection.In this surface inspecting apparatus, the inspection head structure becomes to comprise the unit of said light path modifier.Thereby, when the light path modifier is defiled, remove whole inspection head from driving mechanism, clean the light path modifier then.In addition, when the light path modifier is impaired, perhaps when being necessary to make the light path modifier that is arranged to cooperate to check the inside surface of bellmouth, change whole inspection head with the degree of tilt of bellmouth.
Patent documentation 1:JP11-A-281582
Summary of the invention
The problem that the present invention is to be solved
In above-mentioned surface inspecting apparatus,, be necessary to quicken to check the rotation of head in order to improve checking efficiency.But, when quickening the rotation of inspection head, need more high precision for the vibration in the rotation of inspection head.In order to realize said needs, the inspection head supporting structure must have suitable precision.In addition, when in order to keep in repair and to check and in the inspection head, occur when removing the installation check head or changing the inspection head being necessary to make the operation of an inspection centering when eccentric.Taking time when carrying out said operation the checking efficiency possible deviation.
In addition, when removing whole inspection head from driving mechanism and will check that head is installed in the driving mechanism once more, except removing the operation with the installation check head, also must check centering once more with driving mechanism.Thereby, consume the long activity duration.In addition, when changing the light path modifier, changing the inspection head also is a cost problem.
An object of the present invention is to provide a kind of inspection head supporting structure, it can improve the vibration precision in the inspection head rotation, and can alleviate or eliminates the burden that removes with the installation check head or change a centering operation when checking.In addition, another object of the present invention provides a kind of surface inspecting apparatus, and it can easily clean and change the light path modifier with low cost.
The means of dealing with problems
Inspection head supporting structure according to an aspect of the present invention is applied to surface inspecting apparatus; Said surface inspecting apparatus makes inspection head outer circumferential inspection object examination light from said inspection head under the situation of its axis rotation; Reception is from the reflected light of said inspection object to the reflection of said inspection head; And based on said catoptrical light quantity and to checking on the surface of said inspection object; Wherein said inspection head comprises the main shaft part that the tubular shafts of hollow holds the department of assembly and extend to this inspection end side from this bearing department of assembly, and said inspection head supporting structure comprises: be arranged in the back shaft in the bearing department of assembly of said inspection coaxially; Pair of bearings, said pair of bearings along axial each interval one distance of said inspection head be arranged between interior week of periphery and said bearing department of assembly of said back shaft, and can apply radial load and unidirectional axial load respectively; A plurality of inner ring restraint devices, each inner ring restraint device is limited in the axial constant position that is positioned at said back shaft top with each inner ring of said pair of bearings; The first pressure preload parts and the second pressure preload parts that are tubular or annular shape, they are being arranged side by side between the outer ring of said pair of bearings with respect to the mode that said inspection head moves vertically; Spring assembly, this spring assembly are arranged between the said first pressure preload parts and the second pressure preload parts, and each spring assembly promotes each pressure preload parts towards each outer ring of said pair of bearings; Be arranged in the resilient material ring between the outer ring of one of the said first pressure preload parts and said bearing, the periphery of this resilient material ring contacts with said bearing department of assembly in interior week; And a plurality of outer rings restraint device; Each outer ring restraint device is through being arranged in first restrictions in the said bearing department of assembly and being arranged in said second restrictions of checking the base end part of head removably; Limit each outer ring of said pair of bearings vertically from the outside; Wherein, said inspection head structure becomes, and includes under the situation of said bearing department of assembly and said main shaft part at said inspection head; Through removing said second restrictions, can take out said inspection head vertically towards said end side from the top of said pair of bearings from said inspection head.Thus, can address the above problem.
According to supporting construction of the present invention, when the first and second pressure preload parts were promoted by spring assembly, the outer ring of said pair of bearings was axially outwards promoted, thereby applies preload pressure to each bearing.By this way, can be through reducing the loosening vibration precision of inspection head in rotation that improve in the bearing.When being necessary to remove inspection; Can be through removing second restrictions of outer ring restraint device and take out the bearing department of assembly vertically towards end side from the top of bearing from the inspection head; Comprise under the state of its bearing department of assembly and main shaft part at the inspection head, remove the inspection head integratedly.So, will check head when being installed to bearing, only must be assembled on the periphery of bearing through the bearing department of assembly that will check head, second restrictions of outer ring restraint device is installed on the base end part of inspection.There is no need main shaft part is separated with the bearing department of assembly.Owing to can under the situation that does not remove bearing department of assembly and main shaft part, remove the inspection head in such a manner, therefore needn't after being installed to the bearing department of assembly on the bearing, between bearing department of assembly and main shaft part, carry out the centering operation from the bearing one.Thereby, can reduce or eliminate in dismounting or the burden of the centering operation when changing inspection.In addition, the power through spring assembly closely contacts resilient material ring and the interior week of bearing department of assembly and the outer ring of one of bearing, can between these surface in contacts, apply friction force.Thus, even increase acceleration or the retarded velocity in the rotation of inspection head, between the outer ring of bearing department of assembly and bearing, also can produce slip hardly.Thereby, through suppressing because the inside surface wearing and tearing of the bearing department of assembly that causes of sliding and suppress the temporary transient variation of the vibration precision in the rotation, the height vibration precision in can keeping for a long time rotating.
In one aspect of the invention, a plurality of spring members can circumferentially being arranged between the said pressure preload parts with equal intervals along said inspection head as said spring assembly.Through circumferentially promoting pressure preload parts, can apply preload pressure equably to bearing with sharing mode with a plurality of spring members edge.Thereby, can suppress because the verticity variation that the imbalance of preload pressure load causes.
In one aspect of the invention, can be furnished with O shape ring as said resilient material ring.Can encircle as the resilient material ring with the O shape that low cost easily obtains through using, can easily implement said supporting construction with low cost as seal member.
In one aspect of the invention, the tolerance on fit between the bearing department of assembly of the outer ring of said bearing and said inspection head can be located in the loose fit scope.Through tolerance on fit being located in the loose fit scope, can more easily remove the bearing department of assembly from bearing.Even tolerance on fit in the loose fit scope, because the resilient material ring closely contacts with the bearing department of assembly, therefore in the bearing department of assembly, can not produce radially yet and become flexible, thereby the vibration precision in the rotation can variation.
In one aspect of the invention, the bearing department of assembly of said inspection head can form and can not dismantle the integrative-structure of said bearing department of assembly from said main shaft part.Owing to can remove bearing department of assembly and main shaft part integratedly from bearing as stated,, also can remove the inspection head not difficultly even therefore in advance bearing department of assembly and main shaft part are formed non-detachable integrative-structure.In addition,, can eliminate between bearing department of assembly and main shaft part, producing eccentric possibility through these parts are integrally formed structure, thus the vibration deterioration in accuracy in can preventing in advance to rotate.
Surface inspecting apparatus according to a further aspect of the invention makes a shape inspection head when its axis rotates, make said inspection head along said axial-movement through drive unit; Wherein the end at said axle shape inspection head is provided with the light path modifier; This surface inspecting apparatus changes the light path that incides the inner inspection light of said inspection head along said axis through said light path modifier simultaneously; To the reformed inspection light of inspection object irradiation light path; Detect the surface condition of said inspection object based on also being incided the light quantity of the inspection light in the said inspection head once more by said inspection object reflection; Wherein said inspection head comprises the head main body that attaches to drive unit, and is located on the said head main body removably and keeps the maintaining part of said light path modifier.Thus, the problems referred to above have been solved.
According to this surface inspecting apparatus, the inspection head is formed by the head main body that attaches to drive unit and these two parts of maintaining part that keep the light path modifier, and maintaining part can remove and can be installed to the head main body from head main body.Thus, when changing the light path modifier, when keeping not touching the head main body that attaches to drive unit, can only remove and change maintaining part.
In addition, in another aspect of this invention in, said maintaining part can be arranged in the end side of said inspection head according to limited manner.Because the maintaining part that will remove and install like this is arranged in the end side of said inspection head with limited manner, so can maintaining part be manufactured than short-form, and can change parts with the low cost manufacturing.
In addition, in another aspect of this invention in, said inspection head can comprise the insertion section that is inserted in the said inspection object, and said maintaining part can more be extended towards said drive mechanism side than said insertion section.
Thus, removable maintaining part is more extended towards said drive unit side than said insertion section.Thereby, when preparation in advance when having the maintaining part of different length, for example can immediately maintaining part be replaced by the maintaining part with appropriate length according to the degree of depth in interior week in examine hole.In addition, because the junction surface between head main body and the maintaining part need be such as the removable structure of screw, so the junction surface need be thicker than other part.But according to this aspect, owing to maintaining part is more extended towards the drive unit side than the insertion section, so bonding station is positioned at the outside of insertion section.Thereby, owing in the insertion section, there is not the junction surface, can more very thin form be processed in the insertion section, thereby the inspection head with very thin end can manufacture the inside that can check aperture.
In addition; Said maintaining part can comprise outer tubular bodies and interior tubular bodies; Said outer tubular bodies can remove also from said head main body can be installed to said head main body; Tubular bodies keeps said light path modifier in said, and can be outside said the inside of tubular bodies remove and can be installed to said outside the inside of tubular bodies.Since can be further with the interior tubular bodies that keeps light path to change parts from can removing from the outer tubular bodies that head main body removes, so tubular bodies in when changing light path and change parts, only must changing, thereby can change with low cost.
In addition; In another aspect of this invention; The distal closed of said outer tubular bodies is provided with transducer hole on the tubular side surface of tubular bodies outside said, the both ends open of said interior tubular bodies; In said, be provided with transducer hole on the tubular side surface of tubular bodies; In said transducer hole, be equipped with semi-opaque feature, and on the inside surface of said tubular side surface, can be provided with a plurality of slits, slit is tilted with respect to said transducer hole symmetry and with respect to the axis of tubular bodies in said at a predetermined angle.
In aspect this; Can with for example as the rectangle of mirror or circular light path change parts insert in the slit of tubular bodies; Its two ends are clipped between the said slit; And make the angle of slit and the degree of tilt in hole match through slit is made for, and the angle that can be easily light path be changed parts remain predetermined angular with the object that conducts a survey.In addition, because the both ends open of interior tubular bodies, so even in light path change parts are installed to, after the slit of tubular bodies, also can easily approachingly be changed two inner spaces of interior tubular bodies that parts are divided by light path.Thus, whole when uneven when interior tubular bodies, can for example adjust the position and the volume of bonding agent in the back space that light path changes parts, thus light path is changed parts be installed to outside before the tubular bodies, easily adjust said balance.In addition, when defiled in the surface of light path change parts, can easily wipe stain.In addition, because interior tubular bodies is inserted in the outer tubular bodies of distal closed, therefore can not see the space of passing through adjustment balances such as bonding agent therein, thereby outward appearance can be not impaired from exterior visual ground.Because interior tubular bodies is provided with transducer hole with outer tubular bodies, so light path can be passed these transducer hole and examination object by the altered inspection light of light path change parts.But,, therefore prevented the inside of entering inspection heads such as dust because semi-opaque feature is assembled in the transducer hole of interior tubular bodies.
The invention effect
According to above-mentioned supporting construction, the pair of bearings that the inspection epicranium can bear radial load and unidirectional axial load rotatably supports, and each that in addition can be in these bearings applies preload pressure.Thus, can be through reducing the loosening vibration precision of inspection head in rotation that improve of bearing.Because the inspection head can remove and be installed to bearing from bearing integratedly; Therefore after under the situation of bearing department of assembly that does not remove the inspection head and main shaft part, being installed to the bearing department of assembly above the bearing, needn't between bearing department of assembly and main shaft part, carry out the centering operation.Thereby, can alleviate or eliminate the burden of centering operation when removing with the installation check head or changing inspection.In addition, the power through spring assembly closely contacts resilient material ring and the interior week of bearing department of assembly and the outer ring of one of bearing, thereby between these surface in contacts, applies friction force.Thus, even increase acceleration or the retarded velocity in the rotation of inspection head, between the outer ring of bearing department of assembly and bearing, also can produce slip hardly.By this way, through suppressing because the inside surface wearing and tearing of the bearing department of assembly that causes of sliding and suppress the temporary transient variation of the vibration precision in the rotation, the height vibration precision in can keeping for a long time rotating.In addition, through increasing rotary acceleration or retarded velocity and reducing the required time of inspection thus, can improve checking efficiency.In addition; According to above-mentioned surface inspecting apparatus; Owing to can remove the maintaining part of light path modifier from the head main body the inspection head and can this maintaining part be installed to said head main body; Therefore when changing the light path modifier, can only remove and change maintaining part, and not remove the head main body that attaches to drive unit.Thus, can easily clean and change the light path modifier with low cost.
Description of drawings
Fig. 1 is the figure of the schematic structure of the surface inspecting apparatus in the expression first embodiment of the invention.
Fig. 2 is the cut-open view that expression is assembled in the inspection head supporting structure in the surface inspecting apparatus of Fig. 1.
Fig. 3 is the figure of the schematic structure of the surface inspecting apparatus in the expression second embodiment of the invention.
Fig. 4 is the enlarged drawing of inspection head shown in Figure 3.
Fig. 5 A is the cut-open view of whole maintaining part.
Fig. 5 B is the cut-open view of outer tubular bodies.
Fig. 5 C is the cut-open view of interior tubular bodies.
Fig. 6 is the figure of the inspection head of the surface inspecting apparatus in the expression third embodiment of the invention.
Embodiment
Fig. 1 representes the schematic structure of the surface inspecting apparatus in the first embodiment of the invention.Surface inspecting apparatus 1 is to be suitable for device that perimeter surface 100a in the tubular that is provided with of inspection object 100 is checked, comprises the inspection body 2 that is used to check and is used to carry out the control module 3 that controls and handle the measurement result of inspection body 2 etc. to inspection body 2.In addition, inspection body 2 comprises: as the detecting unit 5 of pick-up unit, this detecting unit is used for checking that to 100 projections of inspection object light also receive the reflected light of self-check object 100; And driver element 6, this driver element is used to make detecting unit 5 operation in a predefined manner.
Detecting unit 5 comprises: with the laser diode 11 (following will be called LD) of the light source of the light that conducts a survey; Photodetector 12 (following will be called PD), it receives the reflected light of self-check object 100, and the corresponding curtage signal of the catoptrical light quantity of output and time per unit (catoptrical intensity); Light projector optical fiber 13, it will guide towards inspection object 100 from the inspection light of LD 11 projections; Receive light optical fiber 14, the reflected light of its object of self-check in the future 100 is to PD 12 guiding; These optical fiber 13,14 are remained the maintenance pipe 15 of harness state; And the axle shape inspection of hollow 16, this inspection head the outside that keeps pipe 15 with keep pipe 15 coaxial arrangement.Inspection 16 also through supporting construction shown in Figure 27 in the outside that keeps pipe 15 by rotatably support.To describe the details of supporting construction 7 after a while.
Return Fig. 1; End keeping pipe 15 is furnished with lens 17; These lens are along axis AX direction (following will the being called axially) projection of inspection the 16 inspection light by the light beam formula of light projector optical fiber 13 guiding, and will along inspection 16 axially with the reflected light of inspection light backpropagation to assembled by light optical fiber 14.Terminal part (right part among Fig. 1) in inspection 16 is fixed with the mirror 18 as the light path modifier, and relatively is furnished with light-transmissive window 16a at the periphery and the mirror 18 of inspection 16.Mirror 18 will be changed into towards light-transmissive window 16a from the light path of the inspection light of lens 17 projection, and change from light-transmissive window 16a along the direction of propagating towards lens 17 and to incide the inner catoptrical light path of inspection 16.
Front end (right-hand member among Fig. 1) at base portion 31 locates to be furnished with the 31a of wall portion, and the 31a of wall portion is provided with and checks 16 coaxial through hole 31b.Exemplar 37 attaches to through hole 31b.Exemplar 37 is arranged for the sample of the operational circumstances of confirming surface inspecting apparatus 1, and heart line is provided with and checks 16 coaxial through hole 37a therein.Through hole 37a has can supply to check 16 internal diameters that pass, and inspection 16 is passed through hole 37a and driven out and get into the inside of inspection object 100.
Below with description control unit 3.Control module 3 comprises: as the arithmetic processing unit 60 of computing unit, it is managed the checking process that surface inspecting apparatus 1 is carried out, the measurement result of detecting unit 5 is handled, or the like; Operation control unit 61, its indication according to arithmetic processing unit 60 is controlled the operation of each unit in the detecting unit 5; Signal processing unit 62, its output signal to PD 12 is carried out predetermined process; Be used for input block 63 to arithmetic processing unit 60 input user indications; Be used for appearing the output unit 64 of the check result handled by arithmetic processing unit 60 etc. to the user; And storage unit 65, be used for storing the computer program treating to carry out, measurement data etc. at arithmetic processing unit 60.Arithmetic processing unit 60, input block 63, output unit 64 and storage unit 65 can adopt the general purpose computing device such as personal computer to constitute.In this case, input block 63 is provided with the input media such as keyboard and mouse, and output unit 64 is monitor apparatus.Can set up output unit to output unit 64 such as printer.For storage unit 65, can use the memory storage that can preserve its content such as harddisk storage device or semiconductor memory.Operation control unit 61 may be implemented as hardware control circuit or computer unit with signal processing unit 62.
Under the situation that the surface of inner peripheral surface 100a of inspection object 100 is checked, arithmetic processing unit 60, operation control unit 61 and signal processing unit 62 will be operated respectively as follows.It should be noted that in this case inspection object 100 and inspection 16 coaxial arrangement.When the inspection beginning, arithmetic processing unit 60 carries out the inner peripheral surface 100a of inspection object 100 is checked required operation according to indicate operation control unit 61 to begin from the indication of input block 63.The operation control unit 61 that receives this indication makes LD 11 with the predetermined strength irradiation, and controls the operation of motor 35 and 41 simultaneously as follows, makes to check that 16 move vertically and rotate around axis AX with constant speed.In addition, operation control unit 61 is controlled the operation of motor 54 as follows, makes inspection light focus on the inner peripheral surface 100a as the examine surface.Control through these, inner peripheral surface 100a is from one end to the other side scanned with inspection light.It should be noted that for driving out vertically inspection 16, can go out inspection 16, perhaps make inspection 16 move off and on the revolution preset space length with constant-speed drive.
With the above-mentioned scanning of inner peripheral surface 100a explicitly, guide the output signal of PD 12 into signal processing unit 62 in succession.Signal processing unit 62 is carried out essential ASH; Output signal with to the PD in the arithmetic processing unit 60 12 is handled; Further handled simulating signal is carried out modulus (A/D) conversion, and the digital signal that is obtained is exported to arithmetic processing unit 60 as reflected light signal with predetermined figure place.For the signal Processing of carrying out by arithmetic processing unit 60, can suitably use various processing, comprise non-linear amplified output signals with the processing of expansion, and remove the processing of noise component from the output signal by the catoptrical light and shade difference of PD 12 detections.Also can suitably make up FFT, inverse fourier transform etc.In addition, through being used as sampling clock signal, change and carry out the A/D that is undertaken by signal processing unit 62 from the pulse train of rotary encoder 43 outputs.By this way, be created on the tone and the relevant digital signal of light income that rotates through predetermined angular period P D 12 in inspection 16, and from signal processing unit 62 these digital signals of output.
Receive from the arithmetic processing unit of the reflected light signal of signal processing unit 62 60 with the signal storage of being obtained in storage unit 65.In addition, arithmetic processing unit 60 is stored in reflected light signal in the storage unit 65 generates the inner peripheral surface 100a of inspection object 100 with planar fashion the two dimensional image of amplification through utilization.This two dimensional image is corresponding with the image that inner peripheral surface 100a is extended in the plane that the two-dimensional quadrature coordinate system limits, and that wherein for example will check object 100 circumferentially is made as the x direction, with check 16 axially be made as the y direction of principal axis.In addition, can be through the original image that obtains from reflected light signal be carried out edge treated, dualization processing etc., and generate when in arithmetic processing unit 60, generating two dimensional image will defective to be detected etc. the two dimensional image of reinforcement.Then, arithmetic processing unit 60 is through handling to confirm on inner peripheral surface 100a, whether there is defective above tolerance range etc. with predetermined algorithm to the acquisition image, and will confirm that the result exports to output unit 64.
Fig. 2 representes to be used to check the details of 16 supporting construction 7.It should be noted that in Fig. 2 the right part of inspection 16 is corresponding to the terminal part of supporting construction 7, the left part is corresponding to the base end part of supporting construction 7.Supporting construction 7 adopt the stay pipe 8 that is arranged between above-mentioned maintenance pipe 15 and the inspection 16 as coaxial arrangement at a back shaft of checking in 16.Stay pipe 8 is supported by sliding part 33, and keeps the inside of pipe 15 with the mode insert head stay pipe 8 that can move vertically.It should be noted that and in Fig. 2, omitted keeping the demonstration of pipe 15.In addition, inspection 16 has head main body 16A and the structure that combines at the mirror housing 16B that the end of head main body 16A can be installed vertically removably.Head main body 16A is provided with the hollow tubular bear box 16b as the bearing department of assembly, and the main shaft part 16c that extends towards the end side (the right-hand member side Fig. 2) of inspection 16 from bear box 16b.Bear box 16b also is used as the part of supporting construction 7.Bear box 16b forms can not be from the integrative-structure of main shaft part 16c dismounting.For example, through forming head main body 16A from single tubular material cut bear box 16b and main shaft part 16c.Main shaft part 16c forms has the diameter littler than bear box 16b, thereby can insert the inside of inspection object 100.It should be noted that mirror housing 16B comprises the coaxial outer tube 16d that is fixed in the end of main shaft part 16c, and keep pipe 16e through the mirror of for example bonding fixation on coaxial interior week of being fixed in outer tube 16d.Mirror 18 attaches to mirror and keeps pipe 16e.But as long as mirror 18 can attach to the terminal part of inspection 16, mirror housing 16B just can be integral with head main body 16A and as the part of main shaft part 16c.
Between the interior week of the bear box 16b of the periphery of a stay pipe 8 and inspection 16, be furnished with pair of bearings 20A, 20B, this is spaced apart from each other to bearing vertically.Bearing 20A, 20B are the angular contact type ball bearings that can bear radial load and unidirectional axial load respectively.Bearing 20A, 20B assemble on the periphery of stay pipe 8 to the end as follows, make corresponding outer ring 20o back surface (on surface) than the heavy wall side against each other.The corresponding outer ring 20o of bearing 20A, 20B and the tolerance on fit between the bear box 16b are located in the loose fit scope, make inspection 16 can be easily remove and can be easily mounted to bearing 20A, 20B from bearing 20A, 20B.
On the periphery of a stay pipe 8, be provided with stage portion 8a, and be positioned at the inspection 16 base end side bearing 20A inner ring 20i through packing ring 21 against stage portion 8a.Between the inner ring 20i of bearing 20A, 20B, on the periphery of a stay pipe 8, be equipped with sleeve 22, and through the collar 23 retainer nut 24 be screwed in the inspection 16 at the end side of the inner ring 20i of bearing 20B.By this way, the corresponding inner ring 20i of bearing 20A, 20B is limited in the axial constant position of a stay pipe 8 upper edges inspection 16.That is to say that the combination of stage portion 8a, packing ring 21, sleeve 22, the collar 23 and retainer nut 24 is as the inner ring restraint device.
On the periphery of sleeve 22, be furnished with distance piece 25 that is used as the first pressure preload parts and the spring shaft carrier ring 26 that is used as the second pressure preload parts, this distance piece and spring shaft carrier ring are along inspection 16 axially is arranged side by side.Distance piece 25 and spring shaft carrier ring 26 can be with respect to sleeve 22 rotations, and can move vertically with respect to the bear box 16b of inspection 16.Circumferential (sense of rotation) along inspection 16 between distance piece 25 and spring shaft carrier ring 26 is furnished with a plurality of volute springs 27 with equal intervals.Although in Fig. 2, only show two volute springs 27, in this embodiment along circumferentially being furnished with eight volute springs 27 with equal intervals.But the quantity of volute spring 27 can be arbitrarily.Volute spring 27 has identical structure.20o promotes distance piece 25 towards the outer ring with circumferential uniform force by these volute springs 27 with spring shaft carrier ring 26.These volute springs 27 are as spring assembly.
O shape ring 28 as the resilient material ring is installed on the end relative with outer ring 20o of distance piece 25.O shape ring 28 be arranged to respectively with the back side of the outer ring 20o of bearing 20B with check contacting in interior week of a bear box 16b of 16.In addition, be provided with stage portion 16f in bear box 16b inside, and stage portion 16f is from the outer ring 20o of end side at the axial limit bearing 20B of inspection 16 as first restrictions.Locate to be furnished with end cap 29 at the base end side (left end side among Fig. 2) of bear box 16b as second restrictions.End cap 29 was screwed in the interior week of bear box 16b.The outer ring 20o of bearing 20A by end cap 29 from base end side the axial restraint along inspection 16.That is to say that stage portion 16f and end cap 29 are as the outer ring restraint device.The rotating disc 43a that it should be noted that rotary encoder 43 attaches to end cap 29.In addition, the belt wheel 42a one of gear train 42 and rotatably attaching on the periphery of base end side of bear box 16b.
Outer ring 20o by stage portion 16f and end cap 29 from the outside axial restraint, and under this state volute spring 27 by suitably compression.20o promotes distance piece 25 towards the outer ring by the repulsive force of volute spring 27 opposing compressions with spring shaft carrier ring 26.By this way, the back side of the base end side of spring shaft carrier ring 26 backup outer ring 20o, and apply preload pressure to bearing 20A.On the other hand, be installed in O shape ring 28 on the distance piece 25 by the power of volute spring 27 and the back side of the base end side of backup outer ring 20o, and apply preload pressure to bearing 20B.In addition, to compression, O shape ring 28 is along inspection 16 is radially expanded thus by the mechanical axis of volute spring 27 for O shape ring 28.By this way, O shape ring 28 closely contacts with bear box 16b's in interior week, and between the two, applies suitable friction force.
According to above-mentioned supporting construction 7, use angular contact bearing as the bearing 20A, the 20B that rotatably support inspection 16, the power through volute spring 27 applies preload pressure to bearing 20A, 20B.Thus, compare, can reduce becoming flexible among bearing 20A, the 20B, can improve the vibration precision in inspection 16 rotation with the situation of using general deep trouth ball bearing.In addition, owing to, therefore can apply preload pressure to bearing 20A, 20B equably along circumferentially being furnished with a plurality of volute spring 27 as spring assembly with equal spacing.
When being necessary to remove inspection 16, bear box 16b that can be through making inspection 16 is with respect to the direction rotation of end cap 29 along loosening screw, takes out inspection 16 from the periphery of bearing 20A, 20B towards end side.By this way, can once remove head main body 16A or the whole inspection 16 of inspection 16.When installation check head 16, also can be through being bolted in wherein on the periphery of bear box 16b being inserted bearing 20A, 20B and with end cap 29, and the head main body 16A of one-step installation inspection 16 or whole inspection 16.After bear box 16b is installed, needn't between bear box 16b and its main shaft part 16c, carry out the centering operation.In addition, outer ring 20o and the tolerance on fit between the bear box 16b of bearing 20A, 20B is located in the loose fit scope, can easily removes inspection 16 from bearing 20A, 20B.In addition; Because distance piece 25 is provided with closely contacting in interior week of O shape ring 28 and O shape ring 28 and bear box 16b; Even therefore bearing 20A, 20B are being assemblied in the structure among the bear box 16b with loose fit; In bear box 16b, can not produce radially yet and become flexible, thereby the vibration precision in the rotation can variation.
In addition; Because O shape ring 28 closely contacts with bear box 16b with the outer ring 20o of bearing 20B; Therefore and between them, apply friction force, even when the acceleration in inspection 16 rotation or retarded velocity increase, outer ring 20o also can be with respect to bear box 16b along circumferentially slip.Thereby, can not produce because the slip between outer ring 20o and the bear box 16b makes the inside surface of bear box 16b wear and tear.Thus, the temporary transient variation of the vibration precision in also can suppressing to rotate, thereby the vibration of the height in can keeping for a long time rotating precision.The advantage that also has is, increases rotary acceleration and retarded velocity and can improve checking efficiency through reducing the required time of inspection.
The present invention is not limited to above-mentioned embodiment, and can implement by various forms.For example, in the above-described embodiment, distance piece 25 can be along left and right directions to arrange in a zigzag with spring shaft carrier ring 26.The first pressure preload parts and the second pressure preload parts are not limited to the shape of distance piece and spring shaft carrier ring.As long as they have tubular or annular shape and are arranged side by side between the outer ring of bearing with the mode that can move vertically, then can suitably revise them.In the above-described embodiment, use angular contact type ball bearing for bearing, but bearing is not limited to this type.As long as bearing has the structure that can bear radial load and unidirectional axial load, just can check the vibration precision of head in rotation and improve through axially applying preload pressure along it and eliminating becoming flexible in the bearing thus.As embodiment, can use taper roll bearing.
Spring assembly is not limited to volute spring, can use the various spring assemblies such as disc spring or sheet spring.The resilient material ring is not limited to O shape ring, as long as it has annular shape and is then can suitably change it at the parts of elastic deformation in the contacting in interior week of its whole periphery and inspection.
The integrative-structure of bearing department of assembly and main shaft part can suitably change, as long as needn't after the installation check head, carry out the centering operation to the two.For example, can be through with bearing department of assembly and main shaft part solder joints, after joint in bearing department of assembly and the main shaft part at least any cut or grinding so that the center of the two is aligned with each other, and bearing department of assembly and main shaft part are integral.Even through such as the removable coupling device of bolt with the bearing department of assembly during with the main shaft part joint; Also can after to the two centering, be provided with such as the anti-locking apparatus of the off-centre of register pin; Thereby eliminated possibility eccentric between the two, made bearing department of assembly and main shaft part form non-detachable basically integrative-structure.In addition; Form demountable structure even work as bearing department of assembly and main shaft part; As long as can be under the situation of not dismantling bearing department of assembly and main shaft part; Along inspection head axially take out the bearing department of assembly towards end side from bearing, also just needn't be when the installation check head dissembling inspection head, bearing department of assembly and main shaft part, can reduce or eliminate the burden of centering operation thus.
Inspection head supporting structure of the present invention can be applied to various forms of surface inspecting apparatus, as long as the inspection head is around its axis rotation.For example, supporting construction of the present invention can even be applied to not have the surface inspecting apparatus that makes an inspection mechanism that moves vertically.Inspection head or the shape that is used for examination light and receives catoptrical structure also are not limited to above-mentioned embodiment, can suitably revise.For example, supporting construction of the present invention even can be applied to wherein on the periphery of inspection head, to be provided with the surface inspecting apparatus of light-emitting component and photo detector.
Fig. 3 representes the schematic structure of the surface inspecting apparatus in the second embodiment of the invention.Surface inspecting apparatus 101 is to be suitable for device that the tubular inner peripheral surface 200a that is provided with of inspection object 200 is checked, and comprises the inspection body 102 that is used to check and be used to carry out to the control operation of inspection body 102 and handle the control module 103 of the measurement result etc. of inspection body 102.In addition, inspection body 102 comprises: detecting unit 105, this detecting unit are used for checking that to 200 projections of inspection object light and reception come the reflected light of self-check object 200; And driver element 106, this driver element is used to make detecting unit 105 operation in a predefined manner.
Detecting unit 105 comprises: the laser diode (LD) 111 of using the light source of the light that conducts a survey; Photodetector 112 (following will be called PD), it receives the reflected light of self-check object 200, and the electric signal of the corresponding curtage of the catoptrical light quantity of output and time per unit (catoptrical intensity); Light projector optical fiber 113, it will guide towards inspection object 200 from the inspection light of LD 111 irradiations; Receive light optical fiber 114, the reflected light of its object of self-check in the future 200 is to PD 112 guiding; These optical fiber 113,114 are remained the maintenance pipe 115 of bundle form; And the axle shape inspection of hollow 116, this inspection coaxial arrangement is in the outside that keeps pipe 115.It should be noted that after a while and will describe the details of inspection 116.End keeping pipe 115 is furnished with lens 117; These lens are along the inspection light that is beam shape of the axis AXa direction of inspection 116 (following will be called axis AXa direction) projection by 113 guiding of light projector optical fiber, and will focus on along the reflected light of the axis AXa direction of inspection 116 and the backpropagation of inspection light and receive on the light optical fiber 114.Terminal part (right part among Fig. 3) in inspection 116 is furnished with the mirror 118 as the light path modifier.
Driver element 106 comprises linear driving mechanism 130, rotary drive mechanism 140 and focus adjusting mechanism 150.Linear driving mechanism 130 is arranged to as the linear actuating device that inspection 116 is moved along its axis AXa direction.In order to realize this function, the sliding part 133 that linear driving mechanism 130 comprises base portion 131, be fixed on pair of guide rails 132 on the base portion 131, can move along guide rail 132, be arranged in the guide spiro rod 134 of sliding part 133 sides and the motor 135 that rotation drives guide spiro rod 134 abreast on the axis AXa direction of inspection 116 with the axis AXa of inspection 116.Sliding part 133 is as the device that supports whole detecting unit 105.That is to say that LD 111 and PD 112 are fixed in sliding part 133, and inspection 116 attaches to sliding part 133 through rotary drive mechanism 140.Keep pipe 115 to attach to sliding part 133 through focus adjusting mechanism 150.In addition, guide spiro rod 134 is screwed in the nut 136 that is fixed in sliding part 133.Therefore; Drive guide spiro rod 134 through motor 135 rotations; Sliding part 133 is moved on the axis AXa direction of inspection 116 along guide rail 132, and the whole detecting unit 105 that is supported by sliding part 133 is with moving along the axis AXa direction of inspection 116.Through using linear driving mechanism 130 to drive detecting unit 105, can change the irradiation position of inspection light on the inner peripheral surface 200a of inspection object 200 along the direction of the axis AXa of inspection 116.
Control module 103 comprises: as the arithmetic processing unit 160 of computing unit, it is managed the checking process that surface inspecting apparatus 101 carries out, measurement result is handled, or the like; Operation control unit 161, its indication according to arithmetic processing unit 160 is controlled the operation of each unit in the inspection body 102; Signal processing unit 162, its output signal to PD 112 is carried out predetermined process; Be used for input block 163 to arithmetic processing unit 160 input user indications; Be used for appearing the output unit 164 of the measurement result etc. of arithmetic processing unit 160 to the user; And storage unit 165, be used for storing the computer program treating to carry out, measurement data etc. at arithmetic processing unit 160.Arithmetic processing unit 160, input block 163, output unit 164 and storage unit 165 can adopt the general purpose computing device such as personal computer to constitute.In this case, input block 163 is provided with the input media such as keyboard and mouse, and output unit 164 is monitor apparatus.Can set up output unit to output unit 164 such as printer.For storage unit 165, can use the memory storage that can preserve its content such as harddisk storage device or semiconductor memory.Operation control unit 161 may be implemented as hardware control circuit or computer unit with signal processing unit 162.
Fig. 4 is the enlarged drawing of inspection 116.As stated, inspection 116 comprises: through with 142 attach to motor 141 head main body 170; And maintaining part 171, it is arranged in the end of head main body 170 removably and keeps mirror 118.
Head main body 170 comprises that being rotatably installed in maintenance through bearing 139 manages the maintenance pipe outside 172 around 115, and from keeping managing the hollow extension 173 that extend towards its end vertically outside 172.So that the mode that the external diameter of hollow extension 173 diminishes is excised its end, and excision portion is provided with threaded portion 173a.
Maintaining part 171 comprises: outer tubular bodies 175, and it can remove from the hollow extension 173 of head main body 170 and can be installed to this hollow extension; And interior tubular bodies 176, the inside of tubular bodies 175 outside its maintenance mirror 118 also can remove from the inside of outer tubular bodies 175 and can be installed to.Fig. 5 A is the cut-open view of whole maintaining part 171, and Fig. 5 B is the cut-open view of outer tubular bodies 175, and Fig. 5 C is the cut-open view of interior tubular bodies 176.
Outer tubular bodies 175 shown in Fig. 5 B is the closed tubular bodies of terminal 175a, and the tubular side surface of tubular bodies is provided with circular transducer hole 175b.In addition, the other end inside of tubular bodies 175 is provided with threaded portion 175c outside.
In the interior tubular bodies 176 shown in Fig. 5 C, its both ends open, and its tubular side surface be provided with diameter greater than outside the circular transducer hole 176a of diameter of transducer hole 175b of tubular bodies 175.For example will be assembled to such as the semi-opaque feature 176b of glass among the transducer hole 176a.In addition, be provided with a plurality of slit 176c with respect to transducer hole 176a symmetry in the both sides of the inside surface of interior tubular bodies 176, and said slit tilts at a predetermined angle with respect to axis AXa, mirror 118 is assembled among the slit 176c.
To describe the operation of this embodiment below.At first, surface inspecting apparatus 101 be arranged such that the inspection object 200 axis aim at axis AXa as shown in Figure 3.Tubular bodies 176 in the preparation is provided with the slit 176c that can arrange mirror 118 in the tubular bodies in this.Mirror 118 so that the angle that the light path of the inspection light of propagating along axis AXa changes arrange, make at a predetermined angle the inner peripheral surface 200a (inner peripheral surface 200a is in the parastate with 0 ° of angle tilt with respect to the axis AXa among Fig. 3) of the inspection object 200 that tilts with respect to axis AXa be examined the light vertical irradiation.Then, shown in Fig. 5 C, mirror 118 is arranged in slit 176c.Under the state that is being furnished with mirror 118, when the center of gravity of interior tubular bodies 176 is not positioned at axis AXa and goes up, through being used for fixing the position and the volume of the bonding agent of mirror 118 among the back space 176d that is adjusted at mirror 118, and adjust whole in the balance of tubular bodies 176.Thus, according to this embodiment because the both ends open of interior tubular bodies 176 and thereby can be near the back space 176d of interior tubular bodies 176, the balance of tubular bodies 176 in therefore can easily adjusting.
Then; Outside the front surface of outer tubular bodies 175 inserts interior tubular bodies 176 in the tubular bodies 175; And interior tubular bodies 176 is arranged such that the centrally aligned of transducer hole 176a of center and interior tubular bodies 176 of the transducer hole 175b of outer tubular bodies 175, thereby accomplish maintaining part 171.According to this embodiment,, therefore can not visually see therein the back space 176d that the balance of mirror 118 is adjusted through bonding agent etc., so can not diminish outward appearance from the outside because the terminal 175a of outer tubular bodies 175 is closed.
Then, be screwed in the threaded portion 173a at head main body 170 ends places, maintaining part 171 is fixed in the end of head main body 170 through threaded portion 175c with outer tubular bodies 175, as shown in Figure 4, thus accomplish inspection 116.In this case, owing to be the screw thread mount type, therefore can easily install.The maintaining part 171 that it should be noted that head main body 170 is used as the interior insertion section 181 of inside surface 200a that is inserted into inspection object 200 with hollow extension 173.
Then, the maintenance pipe of head main body 170 outside 172 is installed in the outside that keeps pipe 115, and carries out head main body 170 and the centering that keeps pipe 115 through the centering body (not shown) through bearing 139.Afterwards, when when input block shown in Figure 3 163 indication begins to operate, check required operation to the inner peripheral surface 200a that operation control unit 161 indications begin to carry out inspection object 200 from arithmetic processing unit 160.The operation control unit 161 that receives this indication makes LD111 shine with predetermined strength, and controls simultaneously the operation of motor 135 and 141 as follows, that is, make and check that 116 move and rotate around axis AXa with constant speed along axis AXa direction with constant speed.In addition, operation control unit 161 is controlled the operation of motor 154 as follows, makes inspection light focus on the inner peripheral surface 200a as the examine surface.Control through these; Inspection light passes lens 117 from LD 111 via light projector optical fiber 113; Propagate in hollow extension 173 along axis AXa afterwards; Mirror 118 through maintaining part 171 changes light path, passes semi-opaque feature 176b and process transducer hole 176a and transducer hole 175b, and from one end to the other side the mode with spiral scans inner peripheral surface 200a.It should be noted that when inspection inner peripheral surface 200a and since semi-opaque feature 176b be assembled among the transducer hole 176a of tubular bodies 176, therefore during checking dust etc. can not get into maintaining part 171 inside.
Then; Acting in the middle of the inspection light of inner peripheral surface 200a; By inner peripheral surface 200a reflection and the light that arrives transducer hole 175b passes semi-opaque feature 176b and through transducer hole 176a, and its light path changes and along axis AXa backpropagation in hollow extension 173 at Jing118Chu once more, and through lens 117; Incide and receive on the light optical fiber 114, and be directed into PD shown in Figure 3 112.Then, the light that is directed to PD 112 is sent to signal processing unit 162, is handled by arithmetic processing unit 160 from the reflected light signal of signal processing unit 162 outputs, and is shown by output unit 164 as two dimensional image.So, through the situation of this two dimensional image understanding inside surface.
When mirror in the checking process in this mode is defiled or when mirror is broken, perhaps when being necessary to check the inner peripheral surface 200a with different degree of tilt, being necessary cleaning or changing mirror.In this case, through making maintaining part 171, take out the threaded portion 175c of maintaining part 171 from the threaded portion 173a of head main body 170 with respect to head main body 170 rotations.Then, pull out interior tubular bodies 176 from outer tubular bodies 175.Afterwards, when mirror is defiled, carry out the cleaning such as the stain of wiping mirror.In this case, owing to the both ends open of interior tubular bodies 176, therefore can easily clean the surface of mirror.When mirror is broken, change mirror, perhaps interior tubular bodies 176 is replaced by tubular bodies 176 in another that is attached with new mirror.When inspection has the hole of different degree of tilt, it is replaced by interior tubular bodies 176, in this, among the slit 176c with the different angles setting of tubular bodies 176 mirror 118 is installed.And in this case, when the center of gravity of interior tubular bodies 176 is not positioned on the axis AXa, be necessary outside interior tubular bodies 176 is inserted, to adjust the balance adjustment before in the tubular bodies 175.But, because the front opening of interior tubular bodies 176, therefore can be easily near the back space surface 176d of mirror 118, thereby can easily adjust the balance of mirror 118.
Then; With with above-mentioned similar mode; Outside the front surface of outer tubular bodies 175 inserts interior tubular bodies 176 in the tubular bodies 175; And interior tubular bodies 176 is arranged such that the centrally aligned of transducer hole 176a of center and interior tubular bodies 176 of the transducer hole 175b of outer tubular bodies 175, thereby accomplish maintaining part 171.And in this case,, therefore can not visually see the back space surface of the mirror 118 that passes through adjustment balances such as bonding agent therein from the outside because the front surface of outer tubular bodies 175 is closed, therefore can not diminish outward appearance.
Then, be screwed among the threaded portion 173a that is located at head main body 170 ends, maintaining part 171 is fixed in head main body 170, thereby accomplish inspection 116 once more through threaded portion 175c with outer tubular bodies 175.In this case, made head main body 170 and rotary drive mechanism 140 centerings, therefore needn't adjust again.
As stated; According to this embodiment; Because the maintaining part 171 of mirror 118 can remove from the head main body 170 the inspection 116 and can be installed to head main body 170; So under the situation of changing mirror 118, can only remove and change maintaining part 171, and not remove the head main body 170 that attaches to rotary drive mechanism 140.Thus, can easily clean and change mirror 118 with low cost.
Next will describe the 3rd embodiment of surface inspecting apparatus of the present invention.Fig. 6 is the figure of the inspection 216 of surface inspecting apparatus of the present invention in expression the 3rd embodiment.It should be noted that because this embodiment and second embodiment are all identical except inspection 216, therefore omit description the parts outside the inspection 216.
Maintaining part 271 comprises outer tubular bodies 275 and interior tubular bodies 276, the hollow extension 273 that extends to drive mechanism side from outer tubular bodies 275 along axis AXa and the insertion section 280 that is arranged in the base end part of hollow extension 273 that is arranged in its end.Interior tubular bodies 276 have with second embodiment in the identical shape of interior tubular bodies 176.Outer tubular bodies 275 also have with second embodiment in outer tubular bodies 175 essentially identical shapes, but be with its difference, on the inner surface of open side, be not provided with the threaded portion.In addition, on the end of hollow extension 273, be not provided with the threaded portion, but be provided with so that the 273a of excision portion that the mode that extension 273 external diameters diminish is excised.The external diameter of the 273a of excision portion is almost equal with the internal diameter of outer tubular bodies 275.From the 273a of excision portion to the external diameter of the middle part 273b of the hollow extension 273 that drive mechanism side is extended with outside the external diameter of tubular bodies 275 equate.Then, under the situation outside interior tubular bodies 276 is arranged in the tubular bodies 275, with 275 assemblings of outer tubular bodies and be attached to the end of hollow extension 273, form the insertion section 281 that has homogeneous diameter on the whole.External diameter at the base end part place of hollow extension 273 becomes big.Be provided with the tapered portion 280a that diameter diminishes towards the direction of drive mechanism side from this edge gradually, and more be provided with threaded portion 280b in the place ahead, form insertion section 280 thus at it.
Head main body 220 is to comprise the tubular member that keeps pipe outside 272, the outside outside that keeps pipe 115 that is installed in through bearing 139 of this maintenance pipe.Its terminal heavy wall forms vertically; In heavy section 272a, on the interior week of cylindrical part, be provided with tapered portion 282a; The diameter of tapered portion 282a is along diminishing gradually from the direction of end towards drive mechanism side; More be provided with threaded portion 282b in the place ahead at it, be formed for receiving the acceptance division 282 of above-mentioned insertion section 280 thus.
In this embodiment, outer tubular bodies 275 does not form the removable structure such as internal thread with hollow extension 273, combines but through bonding agent etc. one in two cylindrical parts is assembled in another and with them simply.Thus, compare with their situation with the removable structure that is provided with threaded portion etc. at said part place wherein, they can be with thinner form manufacturing.Thus, can also check the inner peripheral surface of aperture so that the diameter of insertion section 281 is less.In addition, can compare with the insertion section 281 in being inserted into the inspection object, further extend to drive mechanism side with respect to the maintaining part 271 of head main body 220 dismounting.Therefore,, for example can maintaining part 271 be replaced by the maintaining part with appropriate length, can be applied to various holes quickly thus according to the degree of depth in hole in case preparation has the maintaining part 271 of different length in advance.In addition, owing to be provided with tapered portion 280a, 282a, therefore can easily make maintaining part 271 and head main body 220 centerings in the insertion section 280 of maintaining part 271 base end sides with at head main body 220 terminal acceptance divisions 282.
Above preferred implementation of the present invention is described, but the present invention is not limited to above-mentioned embodiment, and may be embodied as various forms.For example, can be provided with the threaded portion each other and maintaining part and head main body are engaged, be not limited to this but engage, and can be any form, as long as it can dismounting through making.In addition, the method that mirror is installed can not be that the such form of slit is set in the side surface of interior tubular bodies, and can for example be that the such form of holding member is set separately.In addition, the light path modifier is not limited to mirror, and can be prism etc.
Claims (5)
1. inspection head supporting structure that is applied to surface inspecting apparatus; Said surface inspecting apparatus makes inspection head outer circumferential inspection object examination light from said inspection head under the situation of its axis rotation; Reception is from the reflected light of said inspection object to the reflection of said inspection head; And based on said catoptrical light quantity and to checking on the surface of said inspection object; Wherein said inspection head comprises the main shaft part that the tubular shafts of hollow holds the department of assembly and extend to this inspection end side from this bearing department of assembly, and said inspection head supporting structure comprises:
Be arranged in the back shaft in the bearing department of assembly of said inspection head coaxially;
Pair of bearings, said pair of bearings be along between the interior week of the periphery that is arranged in said back shaft of said inspection head and said bearing department of assembly with axially being spaced apart from each other a distance, and can apply radial load and unidirectional axial load respectively;
A plurality of inner ring restraint devices, each inner ring restraint device is limited in the axial constant position that is positioned at said back shaft top with each inner ring of said pair of bearings;
The first pressure preload parts and the second pressure preload parts that are tubular or annular shape, they are being arranged side by side between the outer ring of said pair of bearings with respect to the mode that said inspection head moves vertically;
Spring assembly, this spring assembly are arranged between the said first pressure preload parts and the second pressure preload parts, and each spring assembly promotes each pressure preload parts towards each outer ring of said pair of bearings;
Be arranged in the resilient material ring between the outer ring of one of the said first pressure preload parts and said bearing, the periphery of this resilient material ring contacts with said bearing department of assembly in interior week; And
A plurality of outer rings restraint device, each outer ring restraint device be through being arranged in first restrictions in the said bearing department of assembly and being arranged in second restrictions of the base end part of said inspection head removably, each outer ring of limiting said pair of bearings from the outside vertically,
Wherein, Said inspection head structure becomes; Include under the situation of said bearing department of assembly and said main shaft part at said inspection head,, can take out said inspection head vertically towards said end side from the top of said pair of bearings through removing said second restrictions from said inspection head.
2. inspection head supporting structure according to claim 1, wherein, a plurality of spring members are as said spring assembly circumferentially being arranged between the said first pressure preload parts and the second pressure preload parts with equal intervals along said inspection head.
3. inspection head supporting structure according to claim 1 and 2 wherein, is furnished with O shape ring as said resilient material ring.
4. inspection head supporting structure according to claim 1 and 2, wherein, the tolerance on fit between the bearing department of assembly of the outer ring of said bearing and said inspection head is located in the loose fit scope.
5. inspection head supporting structure according to claim 1 and 2, wherein, the bearing department of assembly of said inspection head forms and can not dismantle the integrative-structure of said bearing department of assembly from said main shaft part.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006143399A JP4997367B2 (en) | 2006-05-23 | 2006-05-23 | Surface inspection device |
| JP2006143034A JP4923208B2 (en) | 2006-05-23 | 2006-05-23 | Support structure of inspection head in surface inspection equipment |
| JP143034/2006 | 2006-05-23 | ||
| JP143399/2006 | 2006-05-23 | ||
| PCT/JP2007/060040 WO2007135914A1 (en) | 2006-05-23 | 2007-05-16 | Inspection head supporting structure in surface inspecting apparatus, and surface inspecting apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105843693A Division CN102175694A (en) | 2006-05-23 | 2007-05-16 | Surface inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101449150A CN101449150A (en) | 2009-06-03 |
| CN101449150B true CN101449150B (en) | 2012-06-06 |
Family
ID=38849800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007800183566A Expired - Fee Related CN101449150B (en) | 2006-05-23 | 2007-05-16 | Inspection head supporting structure in surface inspecting apparatus |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4923208B2 (en) |
| CN (1) | CN101449150B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009128156A (en) * | 2007-11-22 | 2009-06-11 | Kirin Techno-System Co Ltd | Inspection head for surface inspection device and assembling method of inspection head |
| JP4923212B2 (en) * | 2007-11-22 | 2012-04-25 | キリンテクノシステム株式会社 | Inspection system for surface inspection equipment |
| EP2361563A4 (en) | 2008-09-11 | 2015-04-08 | Ntn Toyo Bearing Co Ltd | Remote control actuator |
| JP5388701B2 (en) * | 2009-05-29 | 2014-01-15 | Ｎｔｎ株式会社 | Remote control type actuator |
| WO2010137603A1 (en) | 2009-05-29 | 2010-12-02 | Ntn株式会社 | Remotely operated actuator |
| JP5538245B2 (en) * | 2011-01-05 | 2014-07-02 | 第一実業ビスウィル株式会社 | Appearance inspection device |
| CN104880410A (en) * | 2015-06-12 | 2015-09-02 | 上海良友（集团）有限公司 | Detection tube special for ecological microscopic grain storage image acquisition |
| CN110044238B (en) * | 2019-05-23 | 2023-12-01 | 洛阳普瑞森精密轴承有限公司 | Cross roller bearing play measuring instrument |
| JP6948747B2 (en) * | 2019-05-23 | 2021-10-13 | 長野オートメーション株式会社 | Inspection system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11239902A (en) * | 1998-02-26 | 1999-09-07 | Hitachi Via Mechanics Ltd | Spindle supporting device for machine tool |
| JP3887481B2 (en) * | 1998-03-26 | 2007-02-28 | 株式会社キリンテクノシステム | Surface inspection device |
| JP4339094B2 (en) * | 2003-12-02 | 2009-10-07 | キリンテクノシステム株式会社 | Surface inspection device |
-
2006
- 2006-05-23 JP JP2006143034A patent/JP4923208B2/en active Active
-
2007
- 2007-05-16 CN CN2007800183566A patent/CN101449150B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101449150A (en) | 2009-06-03 |
| JP4923208B2 (en) | 2012-04-25 |
| JP2007315798A (en) | 2007-12-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101449150B (en) | Inspection head supporting structure in surface inspecting apparatus | |
| CN102175694A (en) | Surface inspection device | |
| US5610751A (en) | Optical scanning device having a spherical exit window | |
| EP0289575B1 (en) | Ultra-precise machining and method applied to the execution of atypic revolution surfaces and to servo-control machining | |
| JP2016027320A (en) | Automatic screw dimensions measuring system | |
| JPH11281582A (en) | Surface inspection apparatus | |
| CN115727781A (en) | Real-time detection device and method for roundness and surface appearance of deep hole | |
| KR930017268A (en) | Remote Vortex and Ultrasonic Inspection System of Turbine Generator Support Ring | |
| CN103364254B (en) | The optical projection computed tomography (SPECT) system sample stationary installation that a kind of position is adjustable | |
| CN220259847U (en) | Focal distance adjusting device and laser processing device | |
| JP2010139432A (en) | Surface inspection device | |
| CN113340335B (en) | Automatic image detector | |
| JPH09327781A (en) | Laser beam irradiation head positioning device | |
| JP5265290B2 (en) | Surface inspection device | |
| EP1058111A3 (en) | Optical inspection system and method | |
| CN209400197U (en) | A kind of detection of dither axis, rotation-speed measuring device | |
| JP2005134208A (en) | Optical rotary encoder | |
| KR101983944B1 (en) | Chucking device of spindle for machining accuracy measurement | |
| CN219695541U (en) | Lens focusing device and lens focusing system | |
| JP2000186976A (en) | Eccentricity measuring method and eccentricity measuring device for optical lens | |
| CN2461694Y (en) | Mirror-rotating device for laser working | |
| JPH11281583A (en) | Surface inspection apparatus | |
| JP2009128156A (en) | Inspection head for surface inspection device and assembling method of inspection head | |
| JP4923209B2 (en) | Surface inspection device | |
| CN112834174A (en) | Lens optical quality detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: KTS OPTICS CORPORATION |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20110726 Address after: Kanagawa Applicant after: Kirin Techno System Co., Ltd. Address before: Kanagawa Applicant before: Kirin Techno System Co., Ltd. Co-applicant before: Kts Optics Corporation |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120606 Termination date: 20130516 |