CN209400197U - A kind of detection of dither axis, rotation-speed measuring device - Google Patents
A kind of detection of dither axis, rotation-speed measuring device Download PDFInfo
- Publication number
- CN209400197U CN209400197U CN201920117032.8U CN201920117032U CN209400197U CN 209400197 U CN209400197 U CN 209400197U CN 201920117032 U CN201920117032 U CN 201920117032U CN 209400197 U CN209400197 U CN 209400197U
- Authority
- CN
- China
- Prior art keywords
- detection
- axis
- reflective mirror
- rotation
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The utility model provides a kind of detection of dither axis, rotation-speed measuring device, including detection axis, light source emitter, image collecting device, has been process reflective mirror in detection axis.Dither axis detection, rotating speed measurement method and device provided by the utility model, using optical detecting method, local micro reflective mirror is directly processed in detection axis, processing technology is simple, the non-contact detection to axis may be implemented, the multiple installation before and after shaft detection is avoided, realizes highly sensitive dither axis telemetering.
Description
Technical field
The utility model relates to lathe detection technique fields, and in particular to a kind of detection of dither axis, rotation-speed measuring device.
Background technique
The manufacturing faucet of machine tool equipment, plays significant role in the construction of national economic modernization, with processing work
The variation of the industry market demand, lathe gradually develop to high-grade numerical control and multi-functional direction, thus drive the component of lathe
Requirement it is higher and higher.Especially in high-grade, digitally controlled machine tools processing, cutter group involves great expense, and cutter changing program is complicated,
And the stability of lathe shaft directly affects the machining accuracy and cutting-tool's used life of lathe, thus detects numerically-controlled machine tool in time
Shaft shake, for improve shaft service life, guarantee that machine finish is of great significance.On the other hand, for
The precise rotation of high-speed rotating shaft measures, and provides lossless, the glitch-free measurement method of one kind and is also of great significance.
It is in the prior art, general to be detected using vocal print or detect dither axis by the way of installation vibrating sensor in shaft,
Influence by the way of vocal print detection vulnerable to extraneous vibration, and by the way of installing vibrating sensor additional, for the small of axis
Shaking detection sensitivity is to be improved.
Patent No. 201610036855.9 discloses a kind of air spindle vibration precision measurement apparatus and its method, including
Vibration-isolating platform, braced frame, main shaft fixation kit, positive X to laser module, Z-direction laser module, Y-direction laser module, negative X to swash
Optical assembly, infrared rays survey component, lower rhombic prism component, upper rhombic prism component, prism of corner cube component；The utility model
Measurement method, including laser beam focusing step, measurement air spindle jerk value step, calculating eccentricity step, calculating circularity are missed
Poor step and calculating vibratory output step.Measuring device provided by the utility model, after needing to dismantle air spindle to be detected
It is mounted on main shaft fixed frame, detection method is complex, and it is inclined that installation is likely to occur in the repeated multiple times installation process of main shaft
The problem of difference and abrasion.
Summary of the invention
The utility model is to solve not high to the detection method sensitivity of dither axis in the prior art, needs to detect after dismantling
The problem of, a kind of detection of dither axis, rotation-speed measuring device are provided, it can be with holding shaft on former operating position, using high sensitivity
Remote mode, realize the non-contact detection to a variety of dither states of axis and the precise measurement to axis revolving speed, test method letter
Single, processing cost is low, can be according to spindle-type number and size, using different embodiments.
The utility model provides a kind of detection of dither axis, rotation-speed measuring device, including detection axis, further includes for by light source
Emit the light source emitter to detection axis, the image collecting device for receiving reflected light of the light source after detection axis reflects,
It is arranged in detection axis for light source to be reflexed to the reflective mirror of image collecting device.Directly it is machined on detection axis surface
Reflective mirror, light source emitter are directed at reflective mirror setting, it is not necessary to realize in the form of other reflecting parts are in conjunction with axis
Light reflection reduces the energy loss of reflected light, the imaging of image acquisition device flare；Processing method is simple, to axis
Part finishes out several small reflective mirrors.
The utility model provides a kind of detection of dither axis, rotation-speed measuring device, it is preferred that, it further include image procossing
Device, image processing apparatus is for analyzing reflected light signal, imaging position, imaging frequency and light source transmitting including flare
The flight time of flare is formed to imaging.By the processing that flare is imaged, the imaging of practical flare is obtained
Position, flight time and imaging frequency, and the dither state of detection axis is judged and calculated based on this.
The utility model provides a kind of detection of dither axis, rotation-speed measuring device, it is preferred that, reflective mirror center line
Angle is provided between the rotary shaft of detection axis, reflective mirror is uniformly arranged on the circumference of detection axis.In the table of detection axis
Face is processed relative to the inclined reflective mirror of rotary shaft, when detection axis is shaken, when the imaging position of flare, flight
Between changes will occur with imaging frequency, the dither state of axis, reflective mirror can be determined by the analysis to flare image
The dynamic balancing for not influencing detection axis is subject in face setting, and uniformly arrangement is a kind of holding to reflective mirror on the circumference of detection axis
Dynamically balanced mode, be provided with multiple reflective mirrors or detection axis distribution of weight it is uneven when, according to the distribution of weight meter of axis
Reflective mirror position is calculated, maintains the dynamic balancing of detection axis constant, the shape of reflective mirror also need not be identical.
The utility model provides a kind of detection of dither axis, rotation-speed measuring device, it is preferred that, reflective mirror and detection
The rotary shaft of axis is arranged in parallel, and at least two reflective mirrors along detection axis axial arranging are provided in detection axis.Reflective mirror
It is arranged in parallel with rotary shaft, reduces processing request, avoided generating destruction to rotating shaft surface, reduce as far as possible to rotary shaft itself
The influence of intensity.It only carries out that a reflective mirror is only arranged when tachometric survey.When carrying out shaking detection, in detection axis axial direction
When one reflective mirror is set, it is understood that there may be centered on reflective mirror or be parallel to the dither axis of reflective mirror, such case
Down cannot accurate detection axis dither state and deviation angle；It, can basis when detection axis axis sets up multiple reflective mirrors
The flight time difference of the flare of reflective mirror determines optical path difference, thus according to the setting position of optical path difference and reflective mirror
Determine degrees of offset of the detection axis relative to former rotary shaft；When mirror surface area is smaller, such as mirror surface area light source point face
When product is close, the shift state that detection axis is shaken up and down along former rotary shaft can be determined according to the quantity for collecting flare.
The utility model provides a kind of detection of dither axis, rotation-speed measuring device, it is preferred that, reflective mirror and detection
When the rotary shaft of axis is arranged in parallel, reflective mirror centroid is arranged in detection axis about axisymmetry.The area of reflective mirror
Small and do not generate destruction to detection axis, the practical dynamic balancing for detection axis influences very little, as advanced optimizing, reflective mirror
Face is symmetrical arranged, and the machining accuracy of reflective mirror is identical with processing stage, avoids having an impact the dynamic balancing of detection axis.
The utility model provides a kind of detection of dither axis, rotation-speed measuring device, it is preferred that, setting on the outside of detection axis
There is protective cover, axially upper and reflective mirror is correspondingly arranged on photosensitive window to protective cover.Protective cover can be to avoid external environment to inspection
It surveys axis to damage, photosensitive window corresponding with reflective mirror is offered on protective cover, on the one hand can play intuitive axis
On the other hand shaking detection can be detected when detection axis works normally, avoid the multiple disassembly and installation of detection axis, letter
Change testing procedure；Detection axis axial direction side is only arranged in photosensitive window on protective cover, and the symmetrically arranged other side is reflective
Mirror surface can simplify or be not provided with corresponding photosensitive window.
The utility model is in use, comprising the following steps:
S1, light source correction: when detection axis normal rotation, fixed light source emitter and image collector seated position make light
Source reaches reflective mirror, image acquisition device flare image by photosensitive window；
S2, hot spot calibration: when detection axis normal rotation, determine the imaging position of standard reflection hot spot, the flight time and at
Picture frequency rate；
S3, shaking detection: detection axis works after a certain period of time, and light source emitter and image collector seated position are fixed,
Acquire practical flare image；
S4, image procossing: according to practical flare image determine the imaging position of time reflex hot spot, the flight time and
Imaging frequency, so that it is determined that dither axis state；
When S5, detection axis non-jitter, image acquisition device flare image determines anti-according to flare image
The imaging frequency of hot spot is penetrated, so that it is determined that detection axis revolving speed；The transmitting light source for being used to form flare is continuous light source.It carries out
When dither axis detects, it is preferred to use light-pulse generator, by will pass through record and analyze in a manner of timestamp etc. flare imaging position,
Flight time and imaging frequency；When carrying out axis tachometric survey, to avoid the pulse spacing from being greater than axis rotation period, it is preferred to use continuous
Light source, using guaranteeing light source pulse interval no more than axis rotation period when light-pulse generator.
Dither axis detection, rotating speed measurement method and device provided by the utility model, are directly processed on detection axis surface
There is reflective mirror, reduces the energy loss of reflected light, the imaging of image acquisition device flare, processing method is simple, can
To realize the non-contact detection to a variety of dither states of axis and the precise measurement to axis revolving speed.
The utility model further provides the protective cover on the outside of detection axis, and axially upper and reflective mirror is correspondingly arranged thoughts
Light window can be detected when detection axis works, and avoided disassembly detection axis, simplified testing procedure, improve detection efficiency.
Detailed description of the invention
Fig. 1 is a kind of detection of dither axis, rotation-speed measuring device inclination reflective mirror detection schematic diagram；
Fig. 2 is a kind of detection of dither axis, the multiple inclination reflective mirror detection schematic diagrams of rotation-speed measuring device；
Fig. 3 is a kind of detection of dither axis, the parallel reflective mirror detection schematic diagram of rotation-speed measuring device；
Fig. 4 is a kind of detection of dither axis, rotary speed measuring device rotary speed instrumentation plan.
Appended drawing reference:
1, detection axis；2, light source emitter；3, image collecting device；4, reflective mirror；5, protective cover；6, photosensitive window
Mouthful.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.
Embodiment 1
As shown in Figure 1, a kind of dither axis detection, rotation-speed measuring device, including detection axis 1, light source emitter 2, image
Acquisition device 3 has been process reflective mirror 4 in detection axis 1, has set between 4 center line of reflective mirror and the rotary shaft of detection axis 1
It is equipped with angle, for the moment, reflective mirror 4 is arranged in detection axis mass center corresponding 1 surface perimeter of detection axis quality detection axis up and down
In two opposite side surfaces, protective cover 5 is provided on the outside of detection axis 1, protective cover 5 is correspondingly arranged on axial side with reflective mirror 4
There is photosensitive window 6, light source emitter 2 is directed at photosensitive window 6 and is arranged.Light source emitter 2 uses laser generator, and image is adopted
Acquisition means 3 use ccd image sensor or CCD camera.
The present embodiment in use, detection dither axis the following steps are included:
S1, light source correction: when 1 normal rotation of detection axis, 3 position of fixed light source emitter 2 and image collecting device makes
Light source reaches reflective mirror 4 by photosensitive window 6, and image collecting device 3 acquires flare image；
S2, hot spot calibration: when 1 normal rotation of detection axis, determine the imaging position of standard reflection hot spot, the flight time and at
Picture frequency rate；
S3, shaking detection: detection axis 1 works after a certain period of time, and light source emitter 2 and 3 position of image collecting device are solid
It is fixed, acquire practical flare image；
S4, image procossing: according to practical flare image determine the imaging position of time reflex hot spot, the flight time and
Imaging frequency, so that it is determined that dither axis state；
When S5, detection axis non-jitter, image acquisition device flare image determines anti-according to flare image
The imaging frequency of hot spot is penetrated, so that it is determined that detection axis revolving speed.
When detection axis 1 is along former rotary shaft downward shift, reflective mirror 4 deviates photosensitive window 6, is presented as flare image
Imaging frequency reduce；When detection axis 1 before and after light source emitter 2 in face of deviating, the position of 4 reflection point of reflective mirror is mobile,
The position of flare can change, and flight time and imaging frequency can also change, and be imaged according to practical flare
Position, flight time and imaging frequency data and standard reflection hot spot data comparison can determine the specific shake shape of detection axis 1
State；When detection axis 1 is deviated in face of light source emitter 2 or so, flare imaging position and imaging frequency can change；Inspection
When survey axis 1 moves in parallel before and after former rotary shaft, the flight time of flare and imaging frequency can change.
Embodiment 2
The present embodiment from embodiment 1 there are different reflective mirrors 4 to be arranged.
As shown in Fig. 2, a kind of dither axis detection, rotation-speed measuring device, including detection axis 1, light source emitter 2, image
Acquisition device 3 has been process reflective mirror 4 in detection axis 1, has set between 4 center line of reflective mirror and the rotary shaft of detection axis 1
It is equipped with angle, 3 reflective mirrors 4 are provided in detection axis 1, reflective mirror 4 is uniformly arranged on the circumference of detection axis, detection axis
For the moment, reflective mirror 4 is arranged on corresponding 1 surface perimeter of detection axis of detection axis mass center upper and lower quality, sets on the outside of detection axis 1
It is equipped with protective cover 5, is correspondingly arranged on photosensitive window 6 with reflective mirror 4 on the axial side of protective cover 5, light source emitter 2 is aligned
Photosensitive window 6 is arranged.Light source emitter 2 uses laser generator, and image collecting device 3 uses ccd image sensor or CCD
Camera.
The present embodiment in use, detection dither axis the following steps are included:
S1, light source correction: when 1 normal rotation of detection axis, 3 position of fixed light source emitter 2 and image collecting device makes
Light source reaches reflective mirror 4 by photosensitive window 6, and image collecting device 3 acquires flare image；
S2, hot spot calibration: when 1 normal rotation of detection axis, determine the imaging position of standard reflection hot spot, the flight time and at
Picture frequency rate；
S3, shaking detection: detection axis 1 works after a certain period of time, and light source emitter 2 and 3 position of image collecting device are solid
It is fixed, acquire practical flare image；
S4, image procossing: according to practical flare image determine the imaging position of time reflex hot spot, the flight time and
Imaging frequency, so that it is determined that dither axis state；
When S5, detection axis non-jitter, image acquisition device flare image determines anti-according to flare image
The imaging frequency of hot spot is penetrated, so that it is determined that detection axis revolving speed.
Embodiment 3
The present embodiment from embodiment 1 there are different reflective mirrors 4 to be arranged.
As shown in figure 3, a kind of dither axis detection, rotation-speed measuring device, including detection axis 1, light source emitter 2, image
Acquisition device 3 has been process reflective mirror 4 in detection axis 1, and reflective mirror 4 and the rotary shaft of detection axis 1 are arranged in parallel, and
4 centroid of reflective mirror is arranged in detection axis 1 about axisymmetry, and reflective mirror 4 is axially provided with 3 along detection axis 1 instead
Light microscopic face 4, protective cover 5 is provided on the outside of detection axis 1, and the axial upper side of protective cover 5 and reflective mirror 4 are correspondingly arranged on photosensitive window
Mouth 6, light source emitter 2 are directed at photosensitive window 6 and are arranged.Light source emitter 2 uses laser generator, image collecting device 3
It further include image processing apparatus, image processing apparatus is for analyzing flare using ccd image sensor or CCD camera
Imaging position, flight time, imaging frequency.
The present embodiment in use, detection dither axis the following steps are included:
S1, light source correction: when 1 normal rotation of detection axis, 3 position of fixed light source emitter 2 and image collecting device makes
Light source reaches reflective mirror 4 by photosensitive window 6, and image collecting device 3 acquires flare image；
S2, hot spot calibration: when 1 normal rotation of detection axis, determine the imaging position of standard reflection hot spot, the flight time and at
Picture frequency rate；
S3, shaking detection: detection axis 1 works after a certain period of time, and light source emitter 2 and 3 position of image collecting device are solid
It is fixed, acquire practical flare image；
S4, image procossing: according to practical flare image determine the imaging position of time reflex hot spot, the flight time and
Imaging frequency, so that it is determined that dither axis state.
When detection axis 1 is along former rotary shaft downward shift, reflective mirror 4 deviates photosensitive window 6, is presented as flare image
Imaging quantity reduce；When detection axis 1 before and after light source emitter 2 in face of deviating, three flares corresponding flight time
It can also change with imaging frequency, practical reflection point can be determined according to flight time determination, three reflection point lines are parallel
The distance of a mobile detection axis radius, i.e., intersect, intersection point can be identified as off center, then can determine offset with former rotary shaft
Angle；When detection axis 1 is deviated in face of light source emitter 2 or so, the imaging frequency of flare can change, according to three
The imaging frequency of flare and the revolving speed of detection axis 1 can determine the practical radius of turn of reflection point, by the rotation of three reflection points
Turn center be connected intersect with former rotary shaft, put can be identified as off center, then can determine deviation angle；Detection axis 1 is along original
When moving in parallel before and after rotary shaft, the flight time of flare and imaging frequency can change, can be according to the flight time
Variation with imaging frequency determines the distance moved in parallel.
Embodiment 4
The present embodiment has the different settings of reflective mirror 4 and test-purpose from embodiment 1.
As shown in figure 4, a kind of dither axis detection, rotation-speed measuring device, including detection axis 1, light source emitter 2, image
Acquisition device 3 has been process reflective mirror 4 in detection axis 1, and reflective mirror 4 and the rotary shaft of detection axis 1 are arranged in parallel, and
4 centroid of reflective mirror is arranged in detection axis 1 about axisymmetry, and reflective mirror 4 is axially provided with 1 along detection axis 1 instead
Light microscopic face 4 is provided with protective cover 5 on the outside of detection axis 1, and the axial upper and reflective mirror 4 of protective cover 5 is correspondingly arranged on photosensitive window 6,
Light source emitter 2 is directed at photosensitive window 6 and is arranged.Light source emitter 2 is adopted using the light source generator for emitting continuous light, image
Acquisition means 3 use ccd image sensor or CCD camera, further include image processing apparatus, image processing apparatus is for analyzing reflection
The imaging position of hot spot, flight time, imaging frequency.
The present embodiment in use, axis tachometric survey the following steps are included:
S1, light source correction: when 1 normal rotation of detection axis, 3 position of fixed light source emitter 2 and image collecting device makes
Light source reaches reflective mirror 4 by photosensitive window 6, and image collecting device 3 acquires flare image；
S2, tachometric survey: when 1 normal rotation of detection axis, 2 continuous illumination of light source emitter, image collecting device 3 is acquired
Flare image；
S3, image procossing: determining the imaging frequency of flare according to flare image, so that it is determined that 1 turn of detection axis
Speed.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its inventive concept is subject to equivalent substitution or change, should all cover the protection scope of the utility model it
It is interior.
Claims (9)
1. a kind of dither axis detection, rotation-speed measuring device, including detection axis (1), it is characterised in that: further include for sending out light source
Be incident upon the detection axis (1) light source emitter (2), for receive the light source through the detection axis (1) reflection after it is anti-
The image collecting device (3) of light is penetrated, is arranged on the detection axis (1) for the light source to be reflexed to described image acquisition dress
Set the reflective mirror of (3) and the image processing apparatus for analyzing the reflected light signal.
2. a kind of dither axis detection according to claim 1, rotation-speed measuring device, it is characterised in that: be equipped with described reflective
The detection axis (1) of mirror surface (4) is in dynamic equilibrium state in rotary state.
3. a kind of dither axis detection according to claim 2, rotation-speed measuring device, it is characterised in that: the reflective mirror
(4) angle is provided between center line and the rotary shaft of the detection axis (1).
4. a kind of dither axis detection according to claim 3, rotation-speed measuring device, it is characterised in that: the reflective mirror
(4) it uniformly arranges on the circumference of the detection axis (1).
5. a kind of dither axis detection according to claim 1, rotation-speed measuring device, it is characterised in that: the reflective mirror
(4) rotary shaft with the detection axis (1) is arranged in parallel, and is provided on the detection axis (1) and axially arranges along the detection axis (1)
The reflective mirror of at least two of cloth (4).
6. a kind of dither axis detection according to claim 5, rotation-speed measuring device, it is characterised in that: the reflective mirror
(4) centroid is arranged about the axisymmetry.
7. a kind of detection of dither axis described in any one of its, rotation-speed measuring device, feature exist according to claim 1~6
In: it is provided with protective cover (5) on the outside of the detection axis (1), is provided in protective cover (5) axial direction for light source emitter
(2) photosensitive window (6) that transmitting light and the reflected light through the reflective mirror (4) pass through.
8. a kind of detection of dither axis described in any one of its, rotation-speed measuring device, feature exist according to claim 1~6
In: the reflected light signal includes the received reflected light imaging position of described image acquisition device (3), imaging frequency and institute
Light source is stated to emit to the flight time of imaging.
9. a kind of dither axis detection according to claim 7, rotation-speed measuring device, it is characterised in that: the light source transmitting
Device (2) is oppositely arranged with the photosensitive window (6), described image acquisition device (3) be ccd image sensor or CCD camera,
For acquiring flare image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920117032.8U CN209400197U (en) | 2019-01-24 | 2019-01-24 | A kind of detection of dither axis, rotation-speed measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920117032.8U CN209400197U (en) | 2019-01-24 | 2019-01-24 | A kind of detection of dither axis, rotation-speed measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209400197U true CN209400197U (en) | 2019-09-17 |
Family
ID=67898969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920117032.8U Active CN209400197U (en) | 2019-01-24 | 2019-01-24 | A kind of detection of dither axis, rotation-speed measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209400197U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109764952A (en) * | 2019-01-24 | 2019-05-17 | 甘特科技(北京)有限公司 | A kind of detection of dither axis, rotating speed measurement method and device |
-
2019
- 2019-01-24 CN CN201920117032.8U patent/CN209400197U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109764952A (en) * | 2019-01-24 | 2019-05-17 | 甘特科技(北京)有限公司 | A kind of detection of dither axis, rotating speed measurement method and device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102005626B1 (en) | Optical detecting apparatus for detecting a degree of freedom error of a spindle and a detecting method thereof | |
| CN1644296B (en) | Laser machining apparatus | |
| CN109764952A (en) | A kind of detection of dither axis, rotating speed measurement method and device | |
| US4074104A (en) | Opto-electronic position sensing method | |
| US4583854A (en) | High resolution electronic automatic imaging and inspecting system | |
| CN108326636B (en) | The cutter dynamic balancing of ultraprecise fly cutter Milling Process measures adjustment device and method in machine | |
| US20070153296A1 (en) | Optical measuring device for measuring a cavity | |
| CN110230999A (en) | A kind of linear motion system five degree of freedom error synchronous measuring apparatus and method | |
| CN102735191B (en) | Device for determining verticality of honeycomb ceramics | |
| US5969817A (en) | Precision indexing angle measuring method and system for machine tools | |
| CA2091727A1 (en) | Method and an apparatus for sensing of wheel parameters in a wheel balancing machine | |
| CN113029036B (en) | Non-contact type object three-dimensional contour optical detection device and detection method | |
| CN209400197U (en) | A kind of detection of dither axis, rotation-speed measuring device | |
| US4222262A (en) | Hardness testing apparatus | |
| US6610992B1 (en) | Rotating beam method and system for measuring part edges and openings | |
| JPH032806Y2 (en) | ||
| US4600301A (en) | Spinning disk calibration method and apparatus for laser Doppler velocimeter | |
| CN101424568B (en) | Light measuring device and scanning optical system | |
| CN207540510U (en) | A kind of device for being used to detect lens centre deviation | |
| US11047675B2 (en) | Method and apparatus for inspection of spherical surfaces | |
| CN208012545U (en) | A kind of Spectral Confocal measuring device for drilling quality detection | |
| CN102346384B (en) | Method for regulating optimum focal plane for silicon chip and exposure device thereof | |
| CN110779686A (en) | Non-contact real-time precise adjusting and mounting method for coaxial optical lens | |
| US5359418A (en) | Photometric grinder and lathe gauge | |
| US10690600B1 (en) | Analyzer of technological surfaces |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |