CN101431209A - Blowing device for optical cavity output window of high power gas laser - Google Patents
Blowing device for optical cavity output window of high power gas laser Download PDFInfo
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- CN101431209A CN101431209A CNA200810051545XA CN200810051545A CN101431209A CN 101431209 A CN101431209 A CN 101431209A CN A200810051545X A CNA200810051545X A CN A200810051545XA CN 200810051545 A CN200810051545 A CN 200810051545A CN 101431209 A CN101431209 A CN 101431209A
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Abstract
The invention relates to a blower of a high-power gas laser optical resonator output window, which includes a gas inlet passage, a blowing nozzle and a gas guide shell. The gas inlet passage extends inwards from the outer surface of an output reflector base; the inlet of the blowing nozzle is communicated with the outlet of the gas inlet passage, and the outlet of the blowing nozzle points to the filming surface of an output mirror or an output reflector; and one end of the gas guide shell is fixedly connected with the output reflector base, while the other end is introduced into a sealed gas circulation annular laser cavity of the laser. The blower of the invention is combined with the output reflector base into a whole, the size is small, the structure is compact, the output mirror or the output reflector of the high-power gas laser optical resonator output window can be cooled down, and the service life of the surface filming layer of the output mirror or the output reflector is prolonged, so that a high-power gas laser equipment system can work for a long time stably and reliably, and the invention is applicable to various high-power gas lasers and pulsed gas lasers.
Description
Technical field
The present invention relates to a kind of high power gas laser, particularly a kind of blowning installation of high power gas laser optical resonator output window.
Background technology
The many employings under low laser power (several watts or tens watts of levels) situation of the outgoing mirror of common gas laser output window or output reflector are not cooled off or boiler water circulation cooling output window technology, because of the output energy that hangs down laser power laser pulse has only millijoule (MJ) or several joules (J) level, laser beam energy can not cause bigger destruction to the plated film (damage threshold on the unit are) of laser outgoing mirror or output reflector.The long-play work that the laser energy is reliable and stable.But under high power gas laser (several kilowatts or a few myriawatt level) situation, because of the output energy of laser pulse reaches tens joules (J) to hundred joules (J) so that higher, high repetition pulse can reach hundreds of Hz or thousands of Hz, the photon energy of laser beam acts on the outgoing mirror or output reflector plated film of output window of laser, make the plated film ablative degradation of eyeglass soon, so that make the impossible reliable and stable long-play work of high power gas laser, this is a more scabrous key problem in technology problem in high power gas laser (particularly pulsed gas laser) technology.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of outgoing mirror or output reflector that can cooling high power gas laser optical resonator output window, makes the blowning installation of the high power gas laser optical resonator output window that outgoing mirror or output reflector can long reliable and stable work.
In order to solve the problems of the technologies described above, the blowning installation of high power gas laser optical resonator output window of the present invention comprises inlet channel, blowing nozzle, gas flow guiding tube; Described inlet channel is extended internally by the outer surface of output reflection microscope base; The inlet of blowing nozzle communicates with the outlet of inlet channel, and the coated surface of outgoing mirror or output reflector is pointed in the outlet of blowing nozzle; One end of gas flow guiding tube is fixedlyed connected with the output reflection microscope base, the closed gas that the other end the leads to laser annular laser cavity that circulates.
Described inlet channel is made of air admission hole and ring-shaped air chamber; Air admission hole is opened on the outer surface of output reflection microscope base, ends at ring-shaped air chamber; The air inlet of blowing nozzle communicates with ring-shaped air chamber.
Have groove on the described output reflection microscope base, the ring-shaped air chamber capping is connected back looping air chamber with the butt welding of output reflection microscope base; Blowing nozzle is installed in the ring-shaped air chamber capping.
The opening part of described air admission hole is equipped with the loose joint of input gas, and the loose joint of input gas is connected with the air pump or the gas cylinder of external equipment by tracheae.
The blowning installation of high power gas laser optical resonator output window of the present invention is with after the high power gas laser main process equipment is connected, by air pump (or gas cylinder) and tracheae inlet channel is delivered in the refrigerating gas transmission, refrigerating gas is blown on the coatings on the outgoing mirror of laser optical resonant cavity output window or output reflection eyeglass surface through blowing nozzle again, realizes alleviating of the destruction of the HTHP photon energy of laser beam coatings.Then, gas is in the closed gas that the gas flow guiding tube flows into laser circulates annular laser cavity.
The blowning installation of high power gas laser optical resonator output window of the present invention can cooling high power gas laser output window outgoing mirror or output reflector, prolong the working life of outgoing mirror or output reflection eyeglass surface coating layer, make high power gas laser no longer change eyeglass, thereby make the reliable and stable work for a long time of high power gas laser device systems because of the destruction of outgoing mirror or output reflection eyeglass surface coating layer.In addition, owing to produce the dust particle of minute quantity residual in some small sputtering materials and the ring discharge chamber passage during laser discharge, during flowing, gas circulation is easy to be adsorbed on the coated surface of outgoing mirror or output reflector, installed the gas flow guiding tube additional and made the gas reverse flow, the output window of ring discharge chamber passage and optical resonator forms a mobile air chamber, make small sputtering material and dust particle be difficult to be adsorbed on outgoing mirror or output reflection eyeglass surface, realized purification the optical resonator output window by the gas flow guiding tube.The blowning installation of high power gas laser output window of the present invention and output reflection microscope base are combined into one, and little, the compact conformation of volume can be applicable in all kinds of high power gas lasers and the high power pulse gas laser.
Working media when the used refrigerating gas of the blowning installation of high power gas laser optical resonator output window of the present invention is the laser discharge, being present in closed gas circulates in the annular laser cavity, working gas when being also referred to as discharge, this gas is by several gas compositions, as TEA CO
2The working media of (pulse of transversely excited) laser is CO
2, N
2, three kinds of combination of gases of He form.Working media when discharging because of laser be saving in the passage of the ring discharge chamber of laser closed, need dispose air pump when the plated film of outgoing mirror or output reflector is carried out gas cooled and make gas finish circulation air blowing mode.If selecting the gas cylinder that working media is housed for use implements the plated film of outgoing mirror or output reflector is carried out gas cooled, need on the ring discharge chamber passage of configuration closed, to add and fill exhaust apparatus, the gas constant voltage stability of the working media when guaranteeing laser discharge in the passage of closed ring discharge chamber.
Description of drawings
The invention will be further described below in conjunction with the drawings and specific embodiments.
Fig. 1 is the front view of the blowning installation of high power gas laser optical resonator output window of the present invention.
Fig. 2 is the right view of the blowning installation of high power gas laser optical resonator output window of the present invention.
Embodiment
As depicted in figs. 1 and 2:
High power gas laser optical resonator output window comprises output reflection microscope base 01, output reflector gland 03, ring-shaped rubber sealing ring 09, output reflector 10, indium steel metal o-ring 11.Indium steel metal o-ring 11 is packed in the groove of output reflector gland 03, ring-shaped rubber sealing ring 09 is packed in the groove of output reflection microscope base 01, after ZnSe material and the output reflector 10 that is coated with deielectric-coating are packed in the groove of output reflection microscope base 01, with 6 soket head cap screws 04 output reflection microscope base 01 is connected with output reflector gland 03 and crimping firm.
The blowning installation of high power gas laser optical resonator output window of the present invention comprises inlet channel, blowing nozzle 07, gas flow guiding tube 05; Described inlet channel is extended internally by the outer surface of output reflection microscope base 01; The air inlet of blowing nozzle 07 communicates with the outlet of inlet channel, and the outlet of blowing nozzle 07 makes the trend of gas more help improving cooling effect by the certain angle sensing outgoing mirror or the coated surface of output reflector 10; One end of gas flow guiding tube 05 is connected with output reflection microscope base 01, the closed gas that the other end the leads to laser annular laser cavity that circulates.
Described inlet channel can be to be opened on output reflection microscope base 01 outer surface, the circular hole that outlet communicates with blowing nozzle 07.This circular hole opening part is equipped with input gas loose joint 02, and the loose joint 02 of input gas is connected with external equipment air pump or gas cylinder by appendix.
Described inlet channel can also be made of air admission hole 12 and ring-shaped air chamber 13; Air admission hole 12 is opened on the outer surface of output reflection microscope base 01, ends at ring-shaped air chamber 13; The air inlet of blowing nozzle 07 communicates with ring-shaped air chamber 13.Owing to be provided with ring-shaped air chamber 13, on output reflection microscope base 01, only need air admission hole 12 of processing, a plurality of blowing nozzle 07 is evenly distributed by circumference, refrigerating gas is cooled off the plated film of outgoing mirror or output reflector 10 equably.
Have groove on the output reflection microscope base 01, ring-shaped air chamber capping 06 is packed on output reflection microscope base 01 rim of the mouth, two annular opposite joints is carried out seal welding, looping air chamber 13.Blowing nozzle 07 is installed in the ring-shaped air chamber capping 06.Ring-shaped air chamber capping 06 and output reflection microscope base 01 select for use stainless steel material to make.
The opening part of air admission hole 12 is equipped with input gas loose joint 02, and the loose joint 02 of input gas is connected with external equipment air pump or gas cylinder by appendix.
Described blowing nozzle 07 is packed on ring-shaped air chamber capping 06 inner ring, and blowing nozzle 07 evenly distributes by circumference, and the surface of output reflector 10 is pointed in the outlet of blowing nozzle 07; To be with externally threaded gas flow guiding tube 05 to be connected and screw firmly with tapped ring-shaped air chamber capping 06.Gas flow guiding tube 05 is selected the aluminum barrel material for use, and blowing nozzle 07 is selected the copper tube material for use.
Described input gas loose joint 02 adds the opening of seal washer 08 back by inlet channel on screw thread and the output reflection microscope base 01 and is connected and screws firmly, imports gas loose joint 02 and selects the stainless steel material making for use.Input gas loose joint 02 external gas inlet tube and external equipment air pump or gas cylinder connect and compose gas cooled and purify the circulation circuit of high power gas laser output window blowning installation.
The blowning installation of the high power gas laser optical resonator output window that assembles cooperates the installing hole of output reflection microscope bases 01 to be fastened on the high stable optics support with 6 soket head cap screws, cooperates the output window of finishing optical resonator and the assembly and adjustment of blowning installation with the completely reflecting mirror of laser.
The blowning installation structure of described high power gas laser output window can be divided into two parts function, the one, constitute the output window of high power gas laser optical resonator by output reflection microscope base, output reflector gland, ring-shaped rubber sealing ring, output reflector and indium steel metal o-ring, its effect is a laser resonance and penetrate laser beam when being used for finishing laser excitation discharge with the completely reflecting mirror combination.The 2nd, constitute the blowning installation of high power gas laser gas cooled output window by inlet channel, blowing nozzle 07 and gas guide shell 05, its effect is that the plated film that configuration air pump (or gas cylinder) and tracheae are used for finishing outgoing mirror or output reflector cools off, and also plays the catharsis to the laser output window simultaneously.
The output window of gas air blowing cooling high power laser is one of basic key technology of laser technique, the present invention adopts the outgoing mirror or the output reflector of gas cooled high power gas laser optical resonator output window, be mainly used in the output window technology of high power gas laser technology and laser optical resonant cavity, the optical resonator that has solved high power gas laser is joined the operation work that attached laser main frame can be reliable and stable, can make the high-power high-quality laser energy of stable acquisition of superpower laser long period.The present invention is simple and compact for structure, the output window of Design of Mechanical Structure and laser optical resonant cavity is dissolved in one, component of machine processing is highly susceptible to realizing, solved the outgoing mirror of laser output window or output reflector useful life for a long time, thus make superpower laser can be for a long time steady operation reliably.
Claims (4)
1, a kind of blowning installation of high power gas laser optical resonator output window is characterized in that comprising inlet channel, blowing nozzle (07), gas flow guiding tube (05); Described inlet channel is extended internally by the outer surface of output reflection microscope base (01); The inlet of blowing nozzle (07) communicates with the outlet of inlet channel, and the coated surface of outgoing mirror or output reflector is pointed in the outlet of blowing nozzle (07); One end of gas flow guiding tube (05) is fixedlyed connected with output reflection microscope base (01), the closed gas that the other end the leads to laser annular laser cavity that circulates.
2, the blowning installation of high power gas laser optical resonator output window according to claim 1 is characterized in that inlet channel is made of air admission hole (12) and ring-shaped air chamber (13); Air admission hole (12) is opened on the outer surface of output reflection microscope base (01), ends at ring-shaped air chamber (13); The air inlet of blowing nozzle (07) communicates with ring-shaped air chamber (13).
3, the blowning installation of high power gas laser optical resonator output window according to claim 2, it is characterized in that having groove on the described output reflection microscope base (01), ring-shaped air chamber capping (06) is connected back looping air chamber (13) with output reflection microscope base (01) butt welding; Blowing nozzle (07) is installed in the ring-shaped air chamber capping (06).
4, the blowning installation of high power gas laser optical resonator output window according to claim 2, the opening part that it is characterized in that described air admission hole (12) is equipped with input gas loose joint (02), and input gas loose joint (02) is connected with the air pump or the gas cylinder of external equipment by tracheae.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810051545XA CN101431209B (en) | 2008-12-08 | 2008-12-08 | Blowing device for optical cavity output window of high power gas laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810051545XA CN101431209B (en) | 2008-12-08 | 2008-12-08 | Blowing device for optical cavity output window of high power gas laser |
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| Publication Number | Publication Date |
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| CN101431209A true CN101431209A (en) | 2009-05-13 |
| CN101431209B CN101431209B (en) | 2010-06-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200810051545XA Expired - Fee Related CN101431209B (en) | 2008-12-08 | 2008-12-08 | Blowing device for optical cavity output window of high power gas laser |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102082387A (en) * | 2010-12-30 | 2011-06-01 | 中国科学院长春光学精密机械与物理研究所 | Multi-layer air flow cooled output mirror device of laser |
| CN102496836A (en) * | 2011-12-09 | 2012-06-13 | 中国科学院长春光学精密机械与物理研究所 | Long-life operation guaranteeing device of gas laser |
| CN105071197A (en) * | 2015-08-14 | 2015-11-18 | 中国科学院理化技术研究所 | Apparatus for preventing damage of film optical device of laser |
| CN104280342B (en) * | 2013-07-12 | 2017-08-11 | 西门子公司 | The procedural interface of the process gas analyzer worked according to light transmission |
| CN108288817A (en) * | 2018-02-28 | 2018-07-17 | 河南羚锐制药股份有限公司 | A kind of carbon dioxide laser antihunt means |
| CN109249128A (en) * | 2018-10-22 | 2019-01-22 | 大族激光科技产业集团股份有限公司 | It blows and takes out dirt device and ceramic substrate laser boring method |
| CN113617750A (en) * | 2021-06-25 | 2021-11-09 | 北京空间机电研究所 | Device and method for actively removing volatile pollutants in space application laser |
| CN117154509A (en) * | 2023-09-11 | 2023-12-01 | 如东盛晖激光科技有限公司 | Carbon dioxide laser with lens cooling protection function |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86209434U (en) * | 1986-11-19 | 1987-07-22 | 成都电讯工程学院 | Non-water cooled gas laser |
| CN1075905C (en) * | 1997-09-30 | 2001-12-05 | 华中理工大学 | Pneumatic cooling electric exciting gas laser |
-
2008
- 2008-12-08 CN CN200810051545XA patent/CN101431209B/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102082387A (en) * | 2010-12-30 | 2011-06-01 | 中国科学院长春光学精密机械与物理研究所 | Multi-layer air flow cooled output mirror device of laser |
| CN102082387B (en) * | 2010-12-30 | 2012-06-13 | 中国科学院长春光学精密机械与物理研究所 | Multi-layer air flow cooled output mirror device of laser |
| CN102496836A (en) * | 2011-12-09 | 2012-06-13 | 中国科学院长春光学精密机械与物理研究所 | Long-life operation guaranteeing device of gas laser |
| CN104280342B (en) * | 2013-07-12 | 2017-08-11 | 西门子公司 | The procedural interface of the process gas analyzer worked according to light transmission |
| CN105071197A (en) * | 2015-08-14 | 2015-11-18 | 中国科学院理化技术研究所 | Apparatus for preventing damage of film optical device of laser |
| CN105071197B (en) * | 2015-08-14 | 2018-12-21 | 中国科学院理化技术研究所 | The device for preventing laser thin-film optical filters from damaging |
| CN108288817A (en) * | 2018-02-28 | 2018-07-17 | 河南羚锐制药股份有限公司 | A kind of carbon dioxide laser antihunt means |
| CN109249128A (en) * | 2018-10-22 | 2019-01-22 | 大族激光科技产业集团股份有限公司 | It blows and takes out dirt device and ceramic substrate laser boring method |
| CN113617750A (en) * | 2021-06-25 | 2021-11-09 | 北京空间机电研究所 | Device and method for actively removing volatile pollutants in space application laser |
| CN113617750B (en) * | 2021-06-25 | 2022-05-24 | 北京空间机电研究所 | Device and method for actively removing volatile pollutants in space application laser |
| CN117154509A (en) * | 2023-09-11 | 2023-12-01 | 如东盛晖激光科技有限公司 | Carbon dioxide laser with lens cooling protection function |
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|---|---|
| CN101431209B (en) | 2010-06-02 |
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Granted publication date: 20100602 Termination date: 20111208 |