CN102496836A - Long-life operation guaranteeing device of gas laser - Google Patents
Long-life operation guaranteeing device of gas laser Download PDFInfo
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- CN102496836A CN102496836A CN2011104090427A CN201110409042A CN102496836A CN 102496836 A CN102496836 A CN 102496836A CN 2011104090427 A CN2011104090427 A CN 2011104090427A CN 201110409042 A CN201110409042 A CN 201110409042A CN 102496836 A CN102496836 A CN 102496836A
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Abstract
The invention discloses a long-life operation guaranteeing device of a gas laser and relates to the field of gas lasers, and the device can be used for solving the problems that sputtering dust particles are generated in the discharge process of the existing laser, consequently the inner side of an output mirror is polluted by the sputtering dust particles, the light transmittance of the output mirror is reduced and finally the coated film on the inner side of the output mirror is damaged or the output mirror bursts. The device comprises an upper electrode, a lower electrode, a gas inlet pipe, a gas guide cylinder, a gas exhaust cylinder, a gas exhaust hose, a gas inlet hose, a reflecting mirror, an output mirror, a laser vacuum cavity, an axial-flow fan and gas filtering cloth; when the laser works, the gas in the vacuum cavity enters the gas inlet pipe from the gas inlet hose, and simultaneously the gas exhaust pipe discharges gas corresponding to the gas intake; the axial-flow fan blows the gas in the vacuum cavity into the gas guide cylinder; after the discharge sputtering dust particles in the gas are filtered by the gas filtering cloth, the gas is blown into the gas exhaust cylinder; and the gas exhaust cylinder blows the gas into a discharge area so that the gas on the inner side of the output mirror flows to the discharge area, thereby prolonging the service life of the output mirror.
Description
Technical field
The present invention relates to the gas laser field.
Background technology
During the gas laser operate as normal of pulsed discharge pump type is to be in glow discharge state; In discharge process, can produce a certain amount of sputter thing grit, in each discharge pulse process, gas all can take place because of discharge and expand in interelectrode gas; Understanding some gas side direction in outgoing mirror expands; This part gas that side direction expands in outgoing mirror can be transported to discharge sputter thing the outgoing mirror inboard and make it inboard attached to outgoing mirror, and the outgoing mirror inboard receives the light transmittance of outgoing mirror is descended, and the outgoing mirror loss increases and generates heat; Increase along with the laser works time; The inboard pollutant of outgoing mirror is more and more, and it is more and more serious to generate heat, and outgoing mirror inboard plated film damage or outgoing mirror are burst.On the other hand, the finite volume of gas laser vacuum chamber, and can make gas deterioration gradually during gas laser work discharge work, the output laser power of laser descends gradually after the gas deterioration.Therefore, the device that prevents that outgoing mirror from polluting and the gas in the laser vacuum vessel is upgraded must be set.Make the laser can the long-life reliably working, can improve the reliability of this type laser to a great extent.There is not to find the device identical through inquiry with the present invention.
Summary of the invention
The present invention produces sputter thing grit for solving existing laser in discharge process; Cause the outgoing mirror inboard to receive the light transmittance of outgoing mirror is descended; Finally cause the problem that the inboard plated film of outgoing mirror damages or outgoing mirror bursts, a kind of long-life operational support device of gas laser is provided.
A kind of long-life operational support device of gas laser; This device comprises top electrode, bottom electrode, air inlet pipe, gas cylinder, aiutage, exhaust hose, air induction hose, speculum, outgoing mirror and laser vacuum vessel; This device also comprises axial flow blower and gas filter cloth; Said top electrode and bottom electrode are placed in the laser vacuum vessel relatively, and the region of discharge of laser is formed in the space between top electrode 1 and the bottom electrode 2, and speculum is arranged on the outside rearward position of laser vacuum vessel; Outgoing mirror is arranged on the outside forward position of laser vacuum vessel; Speculum and outgoing mirror are formed laserresonator, and laserresonator is used for laser resonance, and laser is through exporting laser from outgoing mirror behind the resonance; Exhaust hose penetrates through the right side of laser vacuum vessel, and air induction hose penetrates through the left side of laser vacuum vessel and is communicated with air inlet pipe; Said air inlet pipe is placed between top electrode and the bottom electrode near the bottom electrode place, and a plurality of ventholes are set on the air inlet pipe; Set gradually axial flow blower and gas filter cloth in the said gas cylinder, gas cylinder is communicated with aiutage.
Operation principle of the present invention: gas laser of the present invention is when work; Fresh working gas in the laser vacuum vessel gets into the air inlet pipe from air induction hose; The direction of venthole is towards the direction of region of discharge, and fresh working gas flows out from venthole, flows into through the left side between top electrode and the bottom electrode; Flow out on right side between the utmost point and the bottom electrode from power on, and blast pipe is discharged and the corresponding gas of air inflow simultaneously.Said axial flow blower blows into the gas in the laser vacuum vessel in the gas cylinder, after process gas filtration cloth filters out the discharge sputter thing grit in the gas, is blown in the aiutage; Aiutage blows to region of discharge with these gases again; Make the inboard gas flow region of discharge of outgoing mirror, therefore, the discharge sputter thing in the region of discharge can't be attached to the outgoing mirror medial surface; The outgoing mirror inboard is protected, and has prolonged the useful life of outgoing mirror.
Beneficial effect of the present invention: laser operational support device preventing of the present invention the sputter thing grit that in discharge process, produces during the laser operate as normal inboard attached to outgoing mirror; Can not make the outgoing mirror inboard receive the light transmittance decline that sputter thing grit pollutes and make outgoing mirror; Damaging and bursting can not appear in the plated film of outgoing mirror of the present invention, has prolonged the useful life of outgoing mirror.
Description of drawings
Fig. 1 is the front view of the long-life operational support device of a kind of gas laser of the present invention;
Fig. 2 is the vertical view of the long-life operational support device of a kind of gas laser of the present invention;
Fig. 3 is the left view of the long-life operational support device of a kind of gas laser of the present invention.
Among the figure: 1, top electrode, 2, bottom electrode, 3, air inlet pipe, 4, axial flow blower, 5, gas filtration cloth 6, gas cylinder, 7, speculum, 8, exhaust hose, 9, aiutage, 10, outgoing mirror, 11, venthole, 12, air induction hose, 13, the vacuum laser chamber.
Embodiment
In conjunction with Fig. 1 to Fig. 3 this execution mode is described; A kind of long-life operational support device of gas laser; This device comprises: top electrode 1, bottom electrode 2, air inlet pipe 3, gas cylinder 6, aiutage 9, exhaust hose 8, air induction hose 12, speculum 7, outgoing mirror 10 and laser vacuum vessel 13, this device also comprise axial flow blower 4 and gas filter cloth 5, and said top electrode 1 is placed in the laser vacuum vessel 13 with bottom electrode 2 relatively; Space between top electrode 1 and the bottom electrode 2 is the region of discharge of laser; Speculum 7 is arranged on the rearward position of laser vacuum vessel 13 outsides, and outgoing mirror 10 is arranged on the forward position of laser vacuum vessel 13 outsides, and speculum 7 is formed laserresonators with outgoing mirror 10; Laserresonator is used for laser resonance, and laser is through exporting laser from outgoing mirror 10 behind the resonance; Exhaust hose 8 penetrates through the right side of laser vacuum vessel 13, and air induction hose 12 penetrates through the left side of laser vacuum vessel 13 and is communicated with air inlet pipe 3; Said air inlet pipe 3 is placed between top electrode 1 and the bottom electrode 2 near bottom electrode 2 places, and a plurality of ventholes 11 are set on the air inlet pipe 3; Set gradually axial flow blower 4 and gas filter cloth 5 in the said gas cylinder, said gas cylinder 6 is communicated with aiutage 9.
The described top electrode 1 of this execution mode can be processed into by stainless steel material with bottom electrode 2, and air inlet pipe 3 can be processed into by steel, and axial flow blower 4 can be made up of the eastern AFBOA812MB axial flow blower that rises the limited formula production of instrument and meter in Shanghai; Gas filtration cloth can be made up of the PPS filter felt that the Gus of Shanghai section dust-removal cloth-bag Co., Ltd produces; Gas cylinder 6 can be made up of steel, and speculum 7 can be processed by pure copper material, and exhaust hose 8 can be made up of the polyethylene pipe of diameter 8mm; Aiutage 9 can be processed by steel; Outgoing mirror 10 can be processed by the ZnS material, and venthole 11 can be in the hole that a sidetracking one of air inlet pipe 3 is arranged diameter 3mm, and the length of round equals the length of region of discharge; Air induction hose 12 can be made up of the polyethylene pipe of diameter 8mm, and vacuum laser chamber 13 can be processed by steel.
During laser works; Fresh working gas is got into from air inlet pipe 3, get into region of discharges, put gas behind the electricity constantly by exhaust hose 8 discharges from venthole 11; Therefore; Because region of discharge is mixed with certain live gas all the time, does not have gas discharge deterioration problem basically, laser can be by keeping long-lived reliability service.
Claims (3)
1. the long-life operational support device of a gas laser; This device comprises top electrode (1), bottom electrode (2), air inlet pipe (3), gas cylinder (6), aiutage (9), exhaust hose (8), air induction hose (12), speculum (7), outgoing mirror (10) and laser vacuum vessel (13); It is characterized in that; This device also comprises axial flow blower (4) and gas filter cloth (5); Said top electrode (1) and bottom electrode (2) are placed in the laser vacuum vessel (13) relatively, and the space between top electrode (1) and the bottom electrode (2) is the region of discharge of laser, and speculum (7) is arranged on the outside rearward position of laser vacuum vessel (13); Outgoing mirror (10) is arranged on the outside forward position of laser vacuum vessel (13); Speculum (7) is formed laserresonator with outgoing mirror (10), and exhaust hose (8) penetrates through the right side of laser vacuum vessel (13), and air induction hose (12) penetrates through the left side of laser vacuum vessel (13) and is communicated with air inlet pipe (3); Said air inlet pipe (3) is placed between top electrode (1) and the bottom electrode (2) and locates near bottom electrode (2), and a plurality of ventholes (11) are set on the air inlet pipe (3); Set gradually axial flow blower (4) and gas filter cloth (5) in the said gas cylinder, said gas cylinder (6) is communicated with aiutage (9).
2. the long-life operational support device of a kind of gas laser according to claim 1 is characterized in that, a side of said air inlet pipe (3) is provided with one and discharges pore (11), the diameter 3mm of said each venthole (11).
3. the long-life operational support device of a kind of gas laser according to claim 2 is characterized in that, the length of said venthole (11) is identical with the length of the region of discharge that top electrode (1) and bottom electrode (2) are formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104090427A CN102496836A (en) | 2011-12-09 | 2011-12-09 | Long-life operation guaranteeing device of gas laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104090427A CN102496836A (en) | 2011-12-09 | 2011-12-09 | Long-life operation guaranteeing device of gas laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102496836A true CN102496836A (en) | 2012-06-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011104090427A Pending CN102496836A (en) | 2011-12-09 | 2011-12-09 | Long-life operation guaranteeing device of gas laser |
Country Status (1)
| Country | Link |
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| CN (1) | CN102496836A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06132582A (en) * | 1992-10-15 | 1994-05-13 | Komatsu Ltd | Excimer laser system |
| JP2000357830A (en) * | 1999-06-14 | 2000-12-26 | Matsushita Electric Ind Co Ltd | Gas laser oscillation device |
| CN101431209A (en) * | 2008-12-08 | 2009-05-13 | 中国科学院长春光学精密机械与物理研究所 | Blowing device for optical cavity output window of high power gas laser |
-
2011
- 2011-12-09 CN CN2011104090427A patent/CN102496836A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06132582A (en) * | 1992-10-15 | 1994-05-13 | Komatsu Ltd | Excimer laser system |
| JP2000357830A (en) * | 1999-06-14 | 2000-12-26 | Matsushita Electric Ind Co Ltd | Gas laser oscillation device |
| CN101431209A (en) * | 2008-12-08 | 2009-05-13 | 中国科学院长春光学精密机械与物理研究所 | Blowing device for optical cavity output window of high power gas laser |
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Application publication date: 20120613 |