CN101424698A

CN101424698A - F-P acceleration sensor and its manufacturing method

Info

Publication number: CN101424698A
Application number: CNA2008103053823A
Authority: CN
Inventors: 冉曾令; 饶云江
Original assignee: Individual
Current assignee: Individual
Priority date: 2008-11-05
Filing date: 2008-11-05
Publication date: 2009-05-06

Abstract

The invention provides a fabry-perot acceleration transducer with high optical performance, which comprises an optic fiber or a slab guide, wherein the optic fiber or the slab guide is provided with a through hole type fabry-perot chamber provided with membranes. A method for producing the fabry-perot acceleration transducer adopts the technical proposal that laser provided with a maskplate is used for processing the through hole type fabry-perot chamber provided with membranes on the optic fiber or the slab guide, then the process of producing the fabry-perot acceleration transducer is completed. The invention adopts the laser processing technic, the sensor of which the two reflecting surfaces are plane has high reflectivity, and the optical performance of the sensor is excellent. The laser processing technic of the invention is suitable for any optic fiber or slab guide, the production efficiency is high, and mass production with high yield and repetitive rate can be realized; and besides, the laser processing technic of the invention can accurately cut the optic fiber or the slab guide, and the acceleration transducers with various measurement ranges can be easily produced.

Description

F-P acceleration sensor and manufacture method thereof

Technical field

The invention belongs to field of sensing technologies, particularly relate to a kind of F-P acceleration sensor and manufacture method thereof.

Technical background

In recent years, fast development along with fields such as biology, medical science, the energy, environment, space flight and aviation, military affairs, the microminiaturization of sensor, lightweight, low energy consumption, adverse environment resistant ability etc. have been proposed very urgent requirement, and the micro-nano sensor has become one of international great scientific and technological forward position focus.The fast development of laser micro-machining technology provides new technological means for studying micro-nano fiber senser element of new generation, therefore how using modern micro-nano process technology such as laser and realizes that on optical fiber the functional senser element of various micro-nanos is the important trend of following Fibre Optical Sensor development, also is a ten minutes forward position in the big field of sensor, great science problem.

All be based on the principle of electric parameter measurement based on the micro-nano sensor of MEMS, also there are problems aspect the adverse environment resistant ability, particularly be difficult to work under mal-conditions such as high temperature (more than 600 ℃), low temperature (below 60 ℃), strong electromagnetic, inflammable and explosive environment, thereby greatly limited the special applications of MEMS sensor, as space flight and aviation, the energy, chemical industry, biomedicine etc. at many key areas.In the extended familys of sensor, Fibre Optical Sensor has essential safety, be not subjected to electromagnetic interference (EMI), be convenient to networking and remote remote measurement, be suitable for series of advantages such as rugged surroundings, becomes one of mainstream development direction of new generation sensor technology gradually.

Optical fiber acceleration transducer has received great concern in recent years, and multiple optical fiber acceleration transducer has been arranged at present, such as: ring cavity interferometer accelerometer, bragg grating accelerometer, modular fiber optic F-P acceleration meter etc.These acceleration transducers all have common shortcoming to need other respective outer side edges exactly, as mass, crossbeam or spring etc., could constitute acceleration transducer, and size is bigger, be difficult to be used in the hot environment, and the making repeatability of sensor has much room for improvement.US6921894 discloses the fine F-P acceleration meter of a kind of low-light, by spring optical fiber and mass is coupled together, and has shortcomings such as repeatability is bad, temperature sensitivity is high, be unfavorable for the scale manufacturing, optical property is relatively poor.

Summary of the invention

Technical matters to be solved by this invention provides a kind of F-P acceleration sensor of good in optical property.

The present invention also will provide a kind of manufacture method of above-mentioned method P acceleration sensor, can mass, the method P acceleration sensor of the various ranges of manufacturing of high finished product rate and high-repetition-rate.

The technical scheme that technical solution problem of the present invention is adopted is: the method P acceleration sensor, comprise optical fiber or slab guide, and the through-hole type enamel amber chamber of band diaphragm is arranged in described optical fiber or the slab guide.

Further, also has mass on the described diaphragm.

Further, described mass is positioned at the upper end of described diaphragm.

Further, described mass is positioned at the middle part of described diaphragm.

Further, described mass is 2, lays respectively at the both sides of diaphragm.

Further, described diaphragm amasss long-pending longitudinal cross-section less than optical fiber or slab guide along the longitudinal cross-section of optical fiber or slab guide.

Further, the chamber length in described through-hole type enamel amber chamber is less than 200 microns.

Further, the longitdinal cross-section diagram of described diaphragm is apart from shape.

The manufacture method of method P acceleration sensor, this method is: go up with through-hole type enamel amber chamber of being with diaphragm of the Laser Processing of being with mask plate at described optical fiber or slab guide (5), just make the method P acceleration sensor.

Further, on described diaphragm, also be processed with mass.

The invention has the beneficial effects as follows: the present invention adopts laser processing technology, and two reflectings surface of sensor all are the planes, and reflecting properties is fine, and the optical property of sensor is extremely good; The present invention adopts laser processing technology that the optical fiber or the slab guide of any kind of all are suitable for, and the production efficiency height can be realized the manufacturing of mass, high finished product rate and high-repetition-rate; The laser processing technology that the present invention adopts can cut accurately to optical fiber or slab guide, is easy to make the acceleration transducer of various ranges.

Description of drawings

Fig. 1 is the front view of the F-P acceleration sensor of the embodiment of the invention 1;

Fig. 2 is the cut-open view of the F-P acceleration sensor of embodiment 2;

Fig. 3 is the A-A sectional view of Fig. 2;

Fig. 4 is the front view of the F-P acceleration sensor of the embodiment of the invention 3;

Fig. 5 is the cut-open view of Fig. 4;

Fig. 6 is the front view of the F-P acceleration sensor of the embodiment of the invention 4;

Fig. 7 is the cut-open view of Fig. 6;

Fig. 8 be the embodiment of the invention 5 F-P acceleration sensor front view;

Fig. 9 is the cut-open view of Fig. 8;

Figure 10 is that diaphragm 2 is not at the cut-open view of the embodiment of end face;

Figure 11 is the front view of the F-P acceleration sensor of the embodiment of the invention 6;

Figure 12 is the cut-open view of Figure 10;

Figure 13 is the reflected light spectrogram of the F-P acceleration sensor of the embodiment of the invention 1.

Embodiment

Embodiment 1:

On single mode silica fibre 1 face of cylinder, process the through-hole type enamel amber chamber 3 of a band diaphragm 2 and mass 4 with the Ultra-Violet Laser of band mask plate, just make optical fiber F-P acceleration sensor of the present invention, as shown in Figure 1, its reflected light spectrogram as shown in figure 13, the reflection strip contrast reaches more than the 20dB.

The sensor when work, experience positive acceleration to the right or during negative acceleration left, diaphragm 2 moves right when sensor, make that the chamber in enamel amber chamber 3 is long and become big, recording acceleration by long variation of test chamber; Experience positive acceleration left or during negative acceleration to the right, diaphragm 2 makes the chamber length in enamel amber chamber 3 diminish to left movement when acceleration transducer, recording acceleration by long variation of test chamber.

Embodiment 2:

On the basis of embodiment 1, utilize the laser of band mask plate that a part is removed in diaphragm 2 processing, as Fig. 2, figure shown in Figure 3, promptly diaphragm 2 along the longitudinal cross-section of optical fiber 1 long-pending longitudinal cross-section less than optical fiber 1 long-pending, just make the optical fiber F-P acceleration sensor.

Specific sensitivity is higher mutually with embodiment 1 for this acceleration transducer, and this is that root owing to diaphragm 2 narrows down and causes.

Embodiment 3:

Length with a band of the Ultra-Violet Laser processing diaphragm 2 of band mask plate on single mode silica fibre 1 face of cylinder is 45.6 microns through-hole type enamel amber chamber 3, and to have length be 100 microns mass 4, as shown in Figure 4 and Figure 5, just makes the optical fiber F-P acceleration sensor.

This acceleration transducer is compared with 2 with embodiment 1, not distortion of spectrum in the test process.

Embodiment 4:

It on single mode silica fibre 1 face of cylinder is 45.6 microns through-hole type enamel amber chamber 3 with the length of a band of the Ultra-Violet Laser processing diaphragm 2 of band mask plate, and to have length be 2 masses 4 of 100 microns, 2 masses 4 lay respectively at the both sides of diaphragm 2, as shown in Figure 6 and Figure 7, just make optical fiber F-P acceleration sensor of the present invention.

This acceleration transducer is compared with 2 with embodiment 1, not distortion of spectrum in the test process, and higher than the sensitivity of embodiment 3.

Embodiment 5:

In slab guide 5,,, just make F-P acceleration sensor of the present invention as Fig. 8 and shown in Figure 9 with the through-hole type enamel amber chamber 3 of a band of Ultra-Violet Laser processing diaphragm 2.

Also diaphragm 2 can not be processed at end face, as shown in figure 10.

Embodiment 6:

In slab guide 5,,, just make F-P acceleration sensor of the present invention as Figure 11 and shown in Figure 12 with the through-hole type enamel amber chamber 3 of Laser Processing band diaphragm 2 and mass 4.

The method that the

foregoing description

3 and 4 also can adopt embodiment narrows down the root of diaphragm 2, and transducer sensitivity can be higher like this; The shape and the thickness of above-mentioned diaphragm 2 are adjustable, and the shape of diaphragm 2 can be multiple shapes such as circle, rectangle or polygon, but preferably apart from shape (longitdinal cross-section diagram).

Claims

[claim 1] method P acceleration sensor comprises optical fiber (1) or slab guide (5), it is characterized in that: the through-hole type enamel amber chamber (3) that band diaphragm (2) is arranged in described optical fiber (1) or the slab guide (5).
[claim 2] method P acceleration sensor as claimed in claim 1 is characterized in that: described diaphragm (2) is gone up also has mass (4).
[claim 3] method P acceleration sensor as claimed in claim 2 is characterized in that: described mass (4) is positioned at the upper end of described diaphragm (2).
[claim 4] method P acceleration sensor as claimed in claim 2 is characterized in that: described mass (4) is positioned at the middle part of described diaphragm (2).
[claim 5] method P acceleration sensor as claimed in claim 2 is characterized in that: described mass (4) is 2, lays respectively at the both sides of diaphragm (2).
[claim 6] method P acceleration sensor as claimed in claim 1 is characterized in that: described diaphragm (2) amasss long-pending longitudinal cross-section less than optical fiber (1) or slab guide (5) along the longitudinal cross-section of optical fiber (1) or slab guide (5).
[claim 7] method P acceleration sensor as claimed in claim 1 is characterized in that: the chamber length in described through-hole type enamel amber chamber (3) is less than 200 microns.
[claim 8] method P acceleration sensor as claimed in claim 1 is characterized in that: the longitdinal cross-section diagram of described diaphragm (2) is apart from shape.
The manufacture method of [claim 9] method P acceleration sensor, it is characterized in that, this method is: go up with through-hole type enamel amber chamber (3) of being with diaphragm (2) of the Laser Processing of being with mask plate at described optical fiber (1) or slab guide (5), just make the method P acceleration sensor.
The manufacture method of [claim 10] method P acceleration sensor as claimed in claim 9 is characterized in that, also is processed with mass (4) on described diaphragm (2).