CN101055277A - Variable diameter micro optical fiber ring based optical micromechanical acceleration sensor and its method - Google Patents
Variable diameter micro optical fiber ring based optical micromechanical acceleration sensor and its method Download PDFInfo
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- CN101055277A CN101055277A CN 200710068643 CN200710068643A CN101055277A CN 101055277 A CN101055277 A CN 101055277A CN 200710068643 CN200710068643 CN 200710068643 CN 200710068643 A CN200710068643 A CN 200710068643A CN 101055277 A CN101055277 A CN 101055277A
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Abstract
The invention discloses a variable diameter microfiber ring based optical micromechanical acceleration sensor and method thereof, which uses diameter variable ring produced by a microfiber with a diameter of 1~25 micron drawed in a standard single-mode fiber by laser heating taper-drawing technique after removing the coated layer of fiber. The microfiber connected with the standard single-mode fiber through a graded taper transition area is disposed as a diameter variable ring, and the two microfiber of microfiber ring crossing are kept axially parallel, one of which is mounted on the movable mass block of sensing acceleration, while another is mounted on the silicon substrate. The input end of the standard single-mode fiber is connected with wide-spectrum light source, the output end is connected with the fiber spectrometer, and the sensing to acceleration is realized by using diameter variable microfiber ring as high-sensitivity sensing member. The invention is capable of improving measurement precision and stability of optical micromechanical acceleration sensor and increasing dynamic measurement range.
Description
Technical field
The present invention relates to a kind of optical micromechanical acceleration sensor and method thereof based on the little fiber optic loop of variable-diameter.
Background technology
Acceleration transducer is a kind ofly to utilize the known physical quantity that can survey to go sensing or measure the senser element of acceleration change indirectly, it in Aero-Space, the guidance of guided missile location, industry is made and fields such as vehicle erecting device all have a wide range of applications.Various acceleration transducers based on different sensing principles are arranged at present, in recent years along with the progress of micromachined technology, micro-machine acceleration transducer based on this technology has also obtained developing by leaps and bounds, micro-machine acceleration transducer has significant advantages such as integrated level height, volume be little, low in energy consumption than the acceleration transducer of routine, but most at present micro-machine acceleration transducers exist measuring accuracy low, measure the little shortcoming of dynamic range.For the measuring accuracy and the dynamic range that can improve micro-machine acceleration transducer, and in the precision measurement field its special advantages is arranged in conjunction with optics, therefore optical micromechanical (MOEMS) acceleration transducer that adopts optics to combine with micromechanical process becomes one of them important developing direction.
In existing report, mostly the optical fiber micro-machine acceleration transducer is to adopt ordinary optic fibre to measure the method that is caused the light intensity variation by extraneous acceleration change, yet the deficiency of luminous intensity measurement aspect antijamming capability restricted the practicability of this type of sensor, in order to solve the problem of luminous intensity measurement poor anti jamming capability, occurred adopting the ordinary optic fibre end face reflection to form the acceleration transducer in fabry-perot chamber, this optical resonance cavate acceleration transducer has replaced the measurement output intensity to measure the export resonance light frequency, but the technology difficulty of fiber end face plated film is bigger, and fiber end face depth of parallelism difference and coupling efficiency are low has all become insoluble problem; In the world in the current research to optical micromechanical acceleration sensor, adopted micromechanical process to make optical f abry-perot chamber, the acceleration transducer of this miniature optical resonant cavity formula all is better than fiber end face fabry-perot cavate on integrated level and coupling efficiency, but on the treatment process of micro-resonant cavity reflecting surface plated film and wall plane, chamber roughness, sizable difficulty is arranged, needed processing testing tool is also very expensive, and the dynamic range of this type of micro-resonant cavity sensor measurement is very little, is difficult to reach requirement of actual application.
Summary of the invention
The objective of the invention is to propose a kind of optical micromechanical acceleration sensor and method thereof that realizes high precision, wide-measuring range, high integration based on the little fiber optic loop of variable-diameter in order to solve problems of the prior art.
Optical micromechanical acceleration sensor based on the little fiber optic loop of variable-diameter has silicon base, on silicon base, be carved with circular groove, be placed with the variable little fiber optic loop of diameter in the circular groove, little fiber optic loop two ends are respectively by zone of transition and standard fiber input end, the standard fiber output terminal connects, the infall of little fiber optic loop is the fine loop coupling of low-light district, the low-light of two intersections fibre is an axially parallel in the coupled zone, top, the fine loop coupling of low-light district is provided with the acceleration sensing device, the acceleration sensing device has movable mass, movable mass links to each other with fixed mount through the elasticity micro-cantilever, a low-light fibre in the two low-light fibres in coupled zone is fixed on the movable mass, and another root low-light fibre is fixed on the silicon base.
The fine diameter of described low-light is 1～25 micron.The fine surface in contact of silicon base, movable mass and low-light is coated with magnesium fluoride film, and the thickness of magnesium fluoride film is the 0.3-1 micron.The fine ultraviolet glue of low-refraction that adopts of silicon base, movable mass and low-light in the fine loop coupling of the low-light district is fixed.
Optical micromechanical acceleration method for sensing based on the little fiber optic loop of variable-diameter: utilize diameter be 1～25 micron low-light fibre as senser element, realize sensing with little fiber optic loop looping micro-resonant cavity of variable-diameter; When light is propagated in the variable little fiber optic loop of diameter, low-light fibre at two axially parallels of the coupled zone of little fiber optic loop produces the evanescent wave coupling by near-field effect, make the fine ring of low-light form miniature optical ring resonator cavity, when chamber length is constant, the spectral signal that ring resonator output is stable; When the movable mass sensitivity of little fiber optic loop infall changes to extraneous axial acceleration, movable mass drives a low-light fibre and does axially-movable, the little fiber optic loop of the fine drive of the low-light of axially-movable produces to stretch in the substrate circular groove shrinks, thereby change the girth of little fiber optic loop, make the diameter of little fiber optic loop change, be chamber the changing of long hair of the ring resonator that constitutes of little fiber optic loop, this moment, the spectrum of ring resonator output changed thereupon; According to the variation sensing movable mass of spectrum the variation of responsive extraneous axial acceleration.
Beneficial effect of the present invention:
1) realized utilizing the little fiber optic loop of variable-diameter to replace the method for traditional optical resonator cavity sensing acceleration;
2) realized manufacturing technology that little fiber optic loop is combined with micromechanical process
3) measuring accuracy and the stability of optical micromechanical acceleration sensor have been improved;
4) increased the decline range of dynamic measurement of mechanical acceleration sensor of optical resonance.
Description of drawings
Fig. 1 utilizes the fine little fiber optic loop synoptic diagram that constitutes of low-light;
Fig. 2 is a single-mode fiber that utilize to remove coat, and the diameter range that processes by the high temperature drawing process is at the fine synoptic diagram of 1～25 micron low-light;
Fig. 3 is the fine loop coupling of a low-light district synoptic diagram;
Fig. 4 is the evanescent wave propagates synoptic diagram that is produced by near-field effect in the fine loop coupling of the low-light district;
Fig. 5 is based on the optical micromechanical acceleration sensor synoptic diagram of the little fiber optic loop of variable-diameter;
Fig. 6 is the microstructure synoptic diagram that utilizes micromechanical process to process;
Fig. 7 is the fine annular micro-resonant cavity principle schematic that constitutes of low-light;
Fig. 8 is based on the acceleration transducer sensing principle synoptic diagram of little fiber optic loop;
Fig. 9 is based on the acceleration transducer measuring system synoptic diagram of little fiber optic loop;
Among the figure: little fiber optic loop 1, the fine loop coupling of low-light district 2, standard fiber input end 3, standard fiber output terminal 4, zone of transition 5, low-light fibre 6, coupling light 7, coupled mode 8, movable mass 9, elasticity micro-cantilever 10, fixed frame 11, magnesium fluoride film 12, ultraviolet glue 13, silicon base 14, incident ray 15, emergent ray 16, sensing module 17, wide spectrum light source 18, fiber spectrometer 19.
Embodiment
Because existing micro photo-electro-mechanical acceleration transducer ubiquity complex process, difficulty of processing is big, measuring accuracy is low, the problem of the very difficult practicability of the little grade of dynamic range, in order to realize high precision, the measurement of great dynamic range, and reduce manufacture difficulty and cost, proposed to adopt the fine metering system that combines with micromechanical process of low-light, utilize the variable little fiber optic loop looping resonator cavity of diameter to replace the fabry-perot chamber of ordinary optic fibre end face or micromechanics as senser element, this low-light fibre is that the diameter that utilizes standard single-mode fiber to draw out is 1～25 micron thin optic fibre with ultra high quality factor and high precision, the ring resonator that little fiber optic loop constituted need not the inner cavity surface plated film, and technological requirement is not high; Light resonance in ring resonator is strengthened, and the spectral characteristic of output is stable; Can not only improve measuring accuracy by the output spectral line of measuring the fine annular resonant cavity of low-light, and very strong antijamming capability is arranged; The little fiber optic loop that adopts variable-diameter has improved the measurement dynamic range of system greatly as the long variable micro resonant cavity in chamber.
As shown in Figure 1, the low-light fibre is after removing overlay, draws awl by LASER HEATING, draws out 1～25 micron of one section diameter, the thin optic fibre with quality factor and high precision of superelevation in the standard single-mode fiber of 125 microns of diameters.
As shown in Figure 2, the conical transition zone by a gradual change links to each other between low-light fibre and the standard single-mode fiber.The fine part of low-light is placed to ring and is embedded in the substrate of applying low refractive index dielectric by micromechanical process.
As shown in Figure 3, the light of propagation being coupled in the coupled zone of little fiber optic loop, light is coupled into the fine propagation of another root low-light from the fine part of a low-light.
As shown in Figure 4, fine at the low-light of two axially parallels of the coupled zone of little fiber optic loop because near-field effect produces the evanescent wave coupling, the mode propagation in the coupled zone between two low-light fibres.
As shown in Figure 5, optical micromechanical acceleration sensor based on the little fiber optic loop of variable-diameter has silicon base 13, because the fine diameter of low-light is very thin, in order to prevent that fine 1 ring of the variable low-light of diameter from rupturing in motion process, therefore on silicon base, be carved with circular groove, and little fiber optic loop is embedded into carves in the good circular groove, little fiber optic loop two ends are respectively standard fiber input end 3, standard fiber output terminal 4, the infall of little fiber optic loop is the fine loop coupling of low-light district 2, the low-light of two intersections fibre is an axially parallel in the coupled zone, top, the fine loop coupling of low-light district is provided with the acceleration sensing device, the acceleration sensing device has movable mass 9, movable mass links to each other with fixed mount through elasticity micro-cantilever 10, a low-light fibre in the two low-light fibres in coupled zone is fixed on the movable mass, another root low-light fibre is fixed on the silicon base, with connect the fixed mount of movable mass and fixedly silicon base become one, movable mass can move along the axial direction of low-light fibre by elastic cantilever, thus the variation of the fine axial acceleration of sensing low-light.
As shown in Figure 6, in standard fiber, light only transmits in the very little optical fiber core diameter of diameter, and the core diameter periphery is the low covering of refractive index ratio core diameter; And in the low-light fibre, light transmits in the fine diameter range of whole low-light, and the fine surrounding air layer of low-light is covering.If low-light fine directly and the material higher than optical fibre refractivity contact, go in the material that luminous energy can be easy to be coupled to it contacts, cause the very fast decay of luminous energy.In measurement, in order to obtain the luminous energy of sufficient intensity, will prevent that luminous energy is coupled to it in the material of contact goes, we at first utilize photoetching, wet-etching technology to etch the movable mass of band micro-cantilever and fixing silicon base mechanism on silicon base, and are used for fixing the low-light fibre on mass and the silicon base and place the v shape groove and the circular groove of little fiber optic loop.All plate magnesium fluoride film at silicon base 13, movable mass 9 with the fine surface in contact of low-light then, the refractive index of magnesium fluoride is lower than the low-light fibre, thereby assurance luminous energy is propagated in the low-light fibre, can not be coupled in the material that is in contact with it and go, and the thickness of magnesium fluoride film is the 0.3-1 micron.Two low-light fibres 6 in the fine loop coupling of the low-light district 2 are fixed on silicon base 13, the movable mass 9 by the ultraviolet glue of low-refraction.
As shown in Figure 7, when light is propagated in the variable little fiber optic loop of diameter, low-light fibre at two axially parallels of the coupled zone of little fiber optic loop produces the evanescent wave coupling by near-field effect, the light of propagating in the low-light fibre of coupled zone partly is coupled into little fiber optic loop, and in little fiber optic loop continuous resonance, because incident ray constantly is coupled into little fiber optic loop in the coupled zone, make that harmonic light is constantly strengthened in the formed resonator cavity of little fiber optic loop, when the chamber of ring resonator length is constant, will the stable spectral signal of output
As shown in Figure 8, when the movable mass sensitivity of little fiber optic loop infall changes to extraneous axial acceleration, movable mass drives a low-light fibre and does axially-movable, the little fiber optic loop of the fine drive of the low-light of axially-movable produces to stretch in the substrate circular groove shrinks, thereby change the girth of little fiber optic loop, make the diameter of little fiber optic loop change, i.e. chamber the changing of long hair of the ring resonator that little fiber optic loop constituted, this moment, the spectrum of ring resonator output also changed thereupon; According to the variation sensing movable mass of spectrum the variation of responsive extraneous axial acceleration.
As shown in Figure 9, in the acceleration transducer measuring system of little fiber optic loop, the standard fiber input end is connected with wide spectrum light source by the SMA905 interface, incident light by standard fiber, zone of transition, enter into the low-light fibre and propagate, and in little fiber optic loop, form resonance; Whole sensing module is encapsulated in the same substrate; The output terminal of little fiber optic loop standard fiber is connected with fiber spectrometer by the SMA905 interface, the variation of fiber spectrometer scanning output spectrum line, thereby the variation of sensing axial acceleration.
Embodiment
With diameter is that 125 microns standard single-mode fiber is removed overlay, utilizes laser radiation heating single-mode fiber, and the one section diameter that draws out is 5 microns a low-light fibre, and it comprises standard fiber, zone of transition and low-light fibre.Method by photoetching, wet etching processes by flexible micro-cantilever and supports and have the movable mass of V-shaped groove and a fixed mount that is attached thereto, on fixing silicon base, also carve the structure of V-shaped groove and circular groove, and plate a layer thickness on the fine surface that contact of mass, silicon base and low-light be 0.5 micron magnesium fluoride film, the fixed mount of connection movable mass and fixedly silicon base be integrated on the same substrate.Two low-light fibres in the fine loop coupling of the low-light zone are axially parallel, and two low-light fibres in the assurance coupling regime have several microns overlapping, low-light fibre ultraviolet glue fixedly in the V-type groove of movable mass of utilizing low-refraction wherein, another root low-light fibre is fixed in the V-type groove on the silicon base with the same manner, simultaneously the fine loop section of low-light is embedded in the circular groove of substrate, and the encapsulation sensing module.The input end of standard single-mode fiber is connected with wide spectrum light source by the SMA905 joint, incident light by standard fiber, zone of transition, enter into the low-light fibre and propagate, the optical resonator that light circularizes the fine annular of low-light in the coupled zone of little fiber optic loop by near-field effect, moving after the fine axial acceleration of the responsive low-light of movable mass, it is long to change the ring resonator chamber, long according to different chambeies, export different spectrum.Standard fiber output terminal in the fine ring structure of low-light is connected with fiber spectrometer by the SMA905 joint, scans the variation of little fiber optic loop output spectrum, the situation of change of sensing low-light fibre axial acceleration in real time by spectrometer.
Claims (5)
1. optical micromechanical acceleration sensor based on the little fiber optic loop of variable-diameter, it is characterized in that having silicon base (13), on silicon base, be carved with circular groove, be placed with the variable little fiber optic loop (1) of diameter in the circular groove, little fiber optic loop two ends are respectively standard fiber input end (3), standard fiber output terminal (4), the infall of little fiber optic loop is the fine loop coupling district (2) of low-light, the low-light of two intersections fibre is an axially parallel in the coupled zone, top, the fine loop coupling of low-light district is provided with the acceleration sensing device, the acceleration sensing device has movable mass (9), movable mass links to each other with fixed mount through elasticity micro-cantilever (10), a low-light fibre in the two low-light fibres in coupled zone is fixed on the movable mass, and another root low-light fibre is fixed on the silicon base.
2. a kind of optical micromechanical acceleration sensor based on the little fiber optic loop of variable-diameter as claimed in claim 1 is characterized in that the fine diameter of described low-light is 1～25 micron.
3. a kind of optical micromechanical acceleration sensor as claimed in claim 1 based on the little fiber optic loop of variable-diameter, it is characterized in that described silicon base (13), movable mass (9) are coated with magnesium fluoride film with the fine surface in contact of low-light, the thickness of magnesium fluoride film is the 0.3-1 micron.
4. a kind of optical micromechanical acceleration sensor based on the little fiber optic loop of variable-diameter as claimed in claim 1 is characterized in that silicon base (13), the movable mass (9) in the fine loop coupling district of described low-light (2) fixed with the fine ultraviolet glue of low-refraction that adopts of low-light.
5. one kind is used the optical micromechanical acceleration method for sensing based on the little fiber optic loop of variable-diameter of sensor according to claim 1, it is characterized in that, utilize diameter be 1～25 micron low-light fibre as senser element, realize sensing with little fiber optic loop looping micro-resonant cavity of variable-diameter; When light is propagated in the variable little fiber optic loop of diameter, low-light fibre at two axially parallels of the coupled zone of little fiber optic loop produces the evanescent wave coupling by near-field effect, make the fine ring of low-light form miniature optical ring resonator cavity, when chamber length is constant, the spectral signal that ring resonator output is stable; When the movable mass sensitivity of little fiber optic loop infall changes to extraneous axial acceleration, movable mass drives a low-light fibre and does axially-movable, the little fiber optic loop of the fine drive of the low-light of axially-movable produces to stretch in the substrate circular groove shrinks, thereby change the girth of little fiber optic loop, make the diameter of little fiber optic loop change, be chamber the changing of long hair of the ring resonator that constitutes of little fiber optic loop, this moment, the spectrum of ring resonator output changed thereupon; According to the variation sensing movable mass of spectrum the variation of responsive extraneous axial acceleration.
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