CN101418431A - Multi-chamber vacuum coating film device - Google Patents
Multi-chamber vacuum coating film device Download PDFInfo
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- CN101418431A CN101418431A CNA2008101556620A CN200810155662A CN101418431A CN 101418431 A CN101418431 A CN 101418431A CN A2008101556620 A CNA2008101556620 A CN A2008101556620A CN 200810155662 A CN200810155662 A CN 200810155662A CN 101418431 A CN101418431 A CN 101418431A
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Abstract
The invention relates to a double-end multi-chamber vacuum coating device, which comprises coating chambers, a vacuum preparation chamber and a workpiece unwheeling, wherein a workpiece loading platform is arranged in the side part of the vacuum preparation chamber; two transporting tracks for the workpiece unwheeling are arranged in the vacuum preparation chamber; the left and the right ends of the vacuum preparation chamber are connected with at least one coating chamber respectively; circular tracks are arranged in the coating chambers and are butted with the transporting tracks for the workpiece unwheeling through a track switching mechanism; the workpiece loading platform is provided with a U-shaped transporting track of which the two ends intersect with the two transporting tracks for the workpiece unwheeling transversely, and the intersection part is provided with a track switching device and a track groove; a vacuum lock and a gate valve are arranged between the vacuum preparation chamber and the coating chambers and between the vacuum preparation chamber and the workpiece loading platform respectively; and the vacuum preparation chamber and the coating chambers are connected with a vacuum-pumping system. With the help of the vacuum preparation chamber in the middle, a stand-alone metronomic type vacuum coating can be achieved. The coating chambers are not exposed in the atmosphere in the production process; the production cycle is shortened; the production efficiency is improved; and the film quality is improved.
Description
Technical field
The present invention relates to a kind of vacuum coating system that workpiece is produced in enormous quantities, particularly a kind of multi-chamber vacuum coating film device of being suitable for.
Background technology
Be applied to the vacuum unit of small article plated films such as tubulose, sheet and column at present, mostly be that a coating chamber is joined a cover vacuum acquiring system and the unit vacuum coating film equipment formed.In process of production, work period mainly comprises the dress workpiece, vacuumizes, plated film, fills atmosphere, unloads five steps such as workpiece.Find out thus, in each work period, all will take out vacuum, fill primary air coating chamber, the plated film mode of this periodic, production efficiency also reduces and technique controlling difficulty increases greatly in the time of to energy dissipation.Vacuum state is the rete of preparation down, generally the base vacuum degree of plated film is had relatively high expectations, usually 10
-3More than the Pa order of magnitude.A stand-alone device is extracted into 10 from atmosphere
-3The vacuum state of the Pa order of magnitude need expend tens even dozens of minutes, accounts for half of whole work period, even also wants many.And the current consumption of vacuum acquiring system accounts for sizable ratio in the total current consumption of whole filming equipment.So the time that vacuumizes is long more, the work period of equipment is just long more, and energy consumption is just big more, efficient is just low more, unit cost workpiece is just high more.Coating chamber often exposes atmosphere repeatedly, and film coating environment has been caused pollution in various degree, and the repeated variation of technology operation, stability are reduced, and quality control has increased difficulty.
In the prior art, the Chinese patent of ZL200520130173.1, it discloses the shared portable vacuum coating system that switches the storehouse in a kind of a plurality of plated films storehouse, and the portable storehouse of switching needs to dock with each plated film storehouse respectively.Butt joint back work rest need take out from the top of coating chamber, exchanges with the work rest that switches in the storehouse then.Its weak point is: at first be that switching storehouse and plated film storehouse superpose up and down, height of least surpasses 6 meters, and inconvenient operation takes up room.And want in the switching storehouse to hold two secondary work rests, it is bulky, has increased the burden and the energy consumption that vacuumize.Work rest rises in coating chamber and exchanges and be not easy to realize switching the storehouse.
Summary of the invention
The technical problem to be solved in the present invention is at the deficiencies in the prior art, the multi-chamber vacuum coating film device that has proposed that a kind of energy consumption is low, efficient is high, improved film quality and realized easily.
The technical problem to be solved in the present invention is achieved through the following technical solutions, and a kind of multi-chamber vacuum coating film device is characterized in: comprise coating chamber, loadlock may and workpiece unwheeling,
The end of loadlock may is connected with a coating chamber at least, all is provided with circular orbit in each coating chamber, is used for the workpiece unwheeling and carries out the plated film operation at the coating chamber internal rotation;
Be provided with two workpiece unwheelings transhipment tracks in loadlock may side by side, dock with circular orbit in each coating chamber respectively by the track switching mechanism end of two workpiece unwheeling transhipment tracks;
All be provided with the vacuum lock and the family of power and influence between loadlock may and each coating chamber, loadlock may all is connected with pumped vacuum systems with each coating chamber, realizes carrying out under vacuum state between loadlock may and each coating chamber transmission of workpiece unwheeling.
The technical problem to be solved in the present invention can also come further to realize by the following technical programs, avris portion in loadlock may is provided with the work-handling platform, the work-handling platform is provided with " U " shape transporting rail, two workpiece unwheeling transhipment track transverse intersection in the two ends of " U " shape transporting rail and the loadlock may, be provided with change rail device and rail groove in the intersection, be provided with the vacuum lock and the family of power and influence between loadlock may and the work-handling platform.
The technical problem to be solved in the present invention can also come further to realize the symmetric two ends, the left and right sides that are arranged on loadlock may of described coating chamber by the following technical programs.
The present invention is mainly concerned with is the structure formation of combination of coating chamber, loadlock may, work-handling platform and the flow process control mode of work, by the intermediary loadlock may, can realize the vacuum plating of unit beat-type.Coating chamber does not expose atmosphere in process of production, and the coating process of the vacuum of preparatory vacuum chamber and two ends coating chamber can carry out simultaneously, and the cycle of operation of coating process is the work period of work piece production.The invention solves present unit filming equipment, existing coating chamber frequently exposes the problem that atmosphere, pumpdown time length etc. influence efficient and quality.
Compared with prior art, the present invention has following several useful effects: 1. shortened the production cycle, improved production efficiency, reduced energy consumption; 2. coating chamber has been stopped topsoil, has improved film quality; 3. simple in structure, easy to operate, floor space is little, is easy to promote the use of on a large scale.
Description of drawings
Fig. 1 is provided with the structural representation of two coating chambers for the present invention.
Fig. 2 connects the structural representation of four coating chambers for the loadlock may two ends.
Embodiment
A kind of multi-chamber vacuum coating film device, comprise coating chamber 2, loadlock may 1 and workpiece unwheeling 9, the end of loadlock may 1 is connected with a coating chamber 2 at least, all is provided with circular orbit 4 in each coating chamber 2, is used for workpiece unwheeling 9 and carries out the plated film operation at coating chamber 2 internal rotation; Dock with circular orbit 4 in each coating chamber respectively by the track switching mechanism 1 end that is provided with 3, two workpiece unwheelings transhipments of two workpiece unwheelings transhipment track track side by side in loadlock may; All be provided with vacuum lock 5 between loadlock may 1 and each coating chamber 2, loadlock may 1 all is connected with pumped vacuum systems 10 with each coating chamber, realizes carrying out under vacuum state between loadlock may 1 and each coating chamber transmission of workpiece unwheeling 9.
Avris portion in loadlock may is provided with work-handling platform 11, work-handling platform 11 is provided with " U " shape transporting rail, the two ends of " U " shape transporting rail and loadlock may 1 interior two workpiece unwheelings transhipment track, 3 transverse intersection, be provided with change rail device and rail groove 7 in the intersection, be provided with the family of power and influence 6 between loadlock may 1 and the work-handling platform 11.The described coating chamber 2 symmetric two ends, the left and right sides that are arranged on loadlock may 1.
The track switching mechanism comprises transporting rail and the change rail device that is provided with in the transporting rail intersection.
To film coating method of the present invention, flow process mode, do detailed explanation below in conjunction with accompanying drawing.As shown in Figure 1:
1. start, all is equipped with workpiece at loadlock may 1 in coating chamber 2.Empty workpiece unwheeling 9 is equipped with in " U " shape transporting rail position on the work-handling platform.Utilize pumped vacuum systems 10 to vacuumize, vacuum tightness reaches requirement and begins plated film.One of them coating chamber elder generation plated film waits until that the process time of the coating chamber of first plated film moves to about half, restarts another coating chamber plated film.
2. workpiece 8 are adorned in the workpiece unwheeling on work-handling platform 11 tracks 9.
3. the coating chamber plated film of first plated film finishes, and the vacuum lock 5 that is connected with this chamber is opened, and transports being connected of track 3 by the circular orbit in the track switching mechanism realization coating chamber with the workpiece unwheeling in the loadlock may 1.Workpiece 8 in the coating chamber 2 and 8 exchanges of the workpiece in the loadlock may 1, exchange finishes the vacuum lock 5 of this vacuum chamber connection closes, and this coating chamber begins plated film.
At the infall of two tracks in length and breadth, have and be convenient to the rail groove 7 that workpiece unwheeling 9 is passed through, can realize workpiece unwheeling 9 vertically, laterally pass through, and can not influence the stationarity of transmission.
4. loadlock may 1 charges into air, and the valve 6 that opens the door is realized being connected of track on workpiece unwheeling transhipment track 3 and the work-handling platform in the loadlock may 1 by becoming rail device and rail groove 7.Workpiece 8 on workpiece in the loadlock may 18 and the work-handling platform 11 is exchanged.Exchange finishes, and closes to finish the family of power and influence 6, and loadlock may 1 vacuumizes.Work-handling platform 11 unloads, adorns the operation of workpiece 8.The workpiece unwheeling 9 of dress finished piece(s) is in this wait.
5. another coating chamber 2 plated films finish, and the vacuum lock 5 that is connected with this coating chamber is opened, and transport being connected of track 3 by the circular orbit 4 that becomes in the rail device realization coating chamber with the workpiece unwheeling in the loadlock may 1.Workpiece 8 in the coating chamber 2 and 8 exchanges of the workpiece in the loadlock may 1, exchange finishes the vacuum lock 5 of this vacuum chamber connection closes, and this coating chamber begins plated film.
6. loadlock may 1 charges into air, repeats 4. to move.
From 3.-6. being a work period of ordinary production, next will be that coating chamber 2 plated films finish, exchange 3.-6. described work more than the repetition with the workpiece of loadlock may 1.
Will have the unwheeling of many cover workpiece to turn round on this film coating apparatus in the course of the work, like this at dress workpiece-vacuumize-plated film-fill atmosphere-unload workpiece in work period, the operation of other link is finished in the time of plated film fully.Production cycle is the time of coating process operation, and productive temp just equals the coating process working time of the quantity divided by coating chamber.
Shown in Figure 2, be to be equipped with 4 coating chambers at the two ends of loadlock may.The flow process of workpiece transfer is consistent with the situation of 2 coating chambers.Start and stop between each coating chamber are according to the priority ordering of flow process control, but must guarantee that the start-stop time of each coating chamber plated film has certain intervals each other, and preferably constant duration could guarantee the unobstructed of logistics corridor like this, improves plant efficiency to greatest extent.
The technical process of 4 coating chambers, in conjunction with the structure of 2 coating chambers, carry out following description:
7. workpiece 8 plated films of the 3rd coating chamber to packing into, plated film finish and this chamber being connected by the track 3 that becomes the rail device and realize that track 4 and loadlock may 1 in the coating chamber is interior.Workpiece 8 in the coating chamber 2 and 8 exchanges of the workpiece in the loadlock may 1, exchange finishes the vacuum lock 5 of these vacuum chamber 2 connections closes, these coating chamber 2 beginning plated films.Loadlock may 1 is filled air, repeats 4. to move.
8. the 2 pairs of workpiece of packing into 8 plated films of the 4th coating chamber, plated film finish and realize being connected of track 3 in track 3 and the loadlock may in the coating chamber by becoming the rail device.Workpiece 8 in the coating chamber and 8 exchanges of the workpiece in the loadlock may 1, exchange finishes the vacuum lock 5 of this coating chamber connection closes, and this coating chamber begins plated film.Loadlock may 1 is filled air, repeats 4. to move.
9. first coating chamber plated film finishes, and repeats action 3., repeats successively 3. then-9. everything, carries out the production of beat-type.
According to above invention, on two coating chamber bases, coating chamber efficient of every increase just improves n/2 (n represents the quantity of coating chamber, the quantity of 2 expression infrastructure device coating chambers), if supporting affiliated facility allows, coating chamber can be increased to 6,8 even more.
Claims (3)
1. multi-chamber vacuum coating film device is characterized in that: comprise coating chamber, loadlock may and workpiece unwheeling,
The end of loadlock may is connected with a coating chamber at least, all is provided with circular orbit in each coating chamber, is used for the workpiece unwheeling and carries out the plated film operation at the coating chamber internal rotation;
Be provided with two workpiece unwheelings transhipment tracks in loadlock may side by side, dock with circular orbit in each coating chamber respectively by the track switching mechanism end of two workpiece unwheeling transhipment tracks;
All be provided with vacuum lock between loadlock may and each coating chamber, loadlock may all is connected with pumped vacuum systems with each coating chamber, realizes carrying out under vacuum state between loadlock may and each coating chamber transmission of workpiece unwheeling.
2. both-end multi-chamber vacuum coating film device according to claim 1, it is characterized in that: the avris portion in loadlock may is provided with the work-handling platform, the work-handling platform is provided with " U " shape transporting rail, two workpiece unwheeling transhipment track transverse intersection in the two ends of " U " shape transporting rail and the loadlock may, be provided with change rail device and rail groove in the intersection, be provided with the family of power and influence between loadlock may and the work-handling platform.
3. both-end multi-chamber vacuum coating film device according to claim 1 is characterized in that: the symmetric two ends, the left and right sides that are arranged on loadlock may of described coating chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101556620A CN101418431B (en) | 2008-10-10 | 2008-10-10 | Multi-chamber vacuum coating film device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101556620A CN101418431B (en) | 2008-10-10 | 2008-10-10 | Multi-chamber vacuum coating film device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101418431A true CN101418431A (en) | 2009-04-29 |
| CN101418431B CN101418431B (en) | 2011-03-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101556620A Expired - Fee Related CN101418431B (en) | 2008-10-10 | 2008-10-10 | Multi-chamber vacuum coating film device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102181839A (en) * | 2011-06-03 | 2011-09-14 | 浙江大学 | Same end entrance-exit type continuous sputtering film plating device |
| CN105970174A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Fast vacuum magnetic-control sputter coating equipment and machining method thereof |
| CN107400856A (en) * | 2017-06-27 | 2017-11-28 | 樊召 | A kind of vacuum coating method based on composite evacuated coating machine |
| CN107447196A (en) * | 2017-06-27 | 2017-12-08 | 樊召 | A kind of film plating process based on composite evacuated coating machine |
| CN113061870A (en) * | 2021-04-02 | 2021-07-02 | 泸州韶光智造科技有限公司 | Continuous vacuum coating production line and method for optical thin film component |
-
2008
- 2008-10-10 CN CN2008101556620A patent/CN101418431B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102181839A (en) * | 2011-06-03 | 2011-09-14 | 浙江大学 | Same end entrance-exit type continuous sputtering film plating device |
| CN102181839B (en) * | 2011-06-03 | 2013-01-23 | 浙江大学 | Same end entrance-exit type continuous sputtering film plating device |
| CN105970174A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Fast vacuum magnetic-control sputter coating equipment and machining method thereof |
| CN107400856A (en) * | 2017-06-27 | 2017-11-28 | 樊召 | A kind of vacuum coating method based on composite evacuated coating machine |
| CN107447196A (en) * | 2017-06-27 | 2017-12-08 | 樊召 | A kind of film plating process based on composite evacuated coating machine |
| CN113061870A (en) * | 2021-04-02 | 2021-07-02 | 泸州韶光智造科技有限公司 | Continuous vacuum coating production line and method for optical thin film component |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101418431B (en) | 2011-03-16 |
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Address after: 222243 Haining Industrial and Trade Park, Xinpu District, Lianyungang City, Jiangsu Province Patentee after: Sunrise Oriental Holdings Co., Ltd. Address before: 222243 Haining Industrial and Trade Park, Xinpu District, Lianyungang City, Jiangsu Province Patentee before: Richu Dongfang Solar Energy Co., Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110316 Termination date: 20201010 |