CN101405208A - Tray stack transfer apparatus - Google Patents
Tray stack transfer apparatus Download PDFInfo
- Publication number
- CN101405208A CN101405208A CNA2007800103580A CN200780010358A CN101405208A CN 101405208 A CN101405208 A CN 101405208A CN A2007800103580 A CNA2007800103580 A CN A2007800103580A CN 200780010358 A CN200780010358 A CN 200780010358A CN 101405208 A CN101405208 A CN 101405208A
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- CN
- China
- Prior art keywords
- mentioned
- pallet
- transfer apparatus
- tray stack
- side edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G59/00—De-stacking of articles
- B65G59/10—De-stacking nested articles
- B65G59/105—De-stacking nested articles by means of reciprocating escapement-like mechanisms
- B65G59/106—De-stacking nested articles by means of reciprocating escapement-like mechanisms comprising lifting or gripping means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0235—Containers
- B65G2201/0258—Trays, totes or bins
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Stacking Of Articles And Auxiliary Devices (AREA)
- Pile Receivers (AREA)
- Packaging Frangible Articles (AREA)
- De-Stacking Of Articles (AREA)
Abstract
Provided is a tray stack transfer apparatus which can easily and surely hold stacked trays by a simple constitution and has a high versatility. The tray stack transfer apparatus is provided with a pressing body (16), which abuts to and presses the side end portion of tray stack (14), i.e., a stack of a plurality of trays (12), and has an elasticity that permits the side end portion (13) of each tray (12) to get into by a force when pressing. A pair of the pressing bodies (16) abut to a plurality of side end portions (13), and are arranged at the both sides of the tray stack (14). The pressing bodies (16) are board-like rubber members positioned on the sides of the tray stack (14).
Description
Technical field
The present invention relates to a kind of tray stack transfer apparatus, it is stacked and transfer, put to be used for that employed glass substrates such as Liquid Crystal Display (LCD) etc. are carried out the pallet of conveyance.
Background technology
For example, the employed glass substrate of Liquid Crystal Display (LCD) is to be divided into a plurality of glass substrates that each telltale is used from a large-scale glass substrate.With large-scale glass substrate or the glass substrate conveyance after cutting apart during, sometimes these substrates are put into the pallet of regulation and carried out conveyance to next treatment process.In this case, owing to use thin pallet, so carry out conveyance stacked under the stacked state of a plurality of pallets in order to improve conveyance efficient.
And, under the situation of glass substrate being taken out from undermost pallet in order to deliver to next operation by conveyance, as patent documentation 4 or shown in Figure 5, except undermost pallet 2a, by having a pair of side clamping plate 6 that keep pawl 4, support the side edge part 3 of each pallet 2 from both sides and lift the pallet 2 of top.Thus, the undermost pallet 2a of only stacked to some extent pallet 2 is left on the mounting table etc., and glass substrate is shifted into next operation.
And, as patent documentation 1～3 is disclosed, a kind of device has been proposed also, be positioned at the side of stacked pallet, by having used the mechanical positioning mechanism or the maintaining bodies such as link mechanism of bar or pawl, with the part of stacked pallet separate or lift.
Patent documentation 1: Japanese kokai publication hei 5-338804 communique
Patent documentation 2: Japanese kokai publication hei 6-255790 communique
Patent documentation 3: TOHKEMY 2003-252436 communique
Patent documentation 4: TOHKEMY 2004-186249 communique
In the structure shown in Figure 5 of above-mentioned prior art, as shown in Figure 6, side clamping plate 6 move to the side edge part 3 of each pallet 2 and engage from the normal place L of the end that descends is parallel, and lift each pallet 2.But, when the number of plies of pallet 2 increases, at pallet 2 when empty and when having taken in substrate etc., overall weight has bigger poor, and the scale error of having supported the amount of bow difference of holding components of device of pallet 2 or each pallet 2 is based on multilayer laminated accumulation, therefore tray position skew up and down minutely sometimes.
Therefore, in this device, shown in Fig. 6 (a) and (b), usually side clamping plate 6 can enter between the side edge part 3 of each pallet 2 and lift.But when taking in substrate on the pallet 2 of multilayer, shown in Fig. 6 (c), (d), the problem of generation is, the position between the side edge part 3 of each pallet 2 descends, and the maintenance pawl 4 of side clamping plate 6 can not insert between the side edge part 3 of each pallet 2.And, on the contrary, shown in Fig. 6 (e), (f), when pallet 2 is sky, the state of affairs between the side edge part 3 that side clamping plate 6 can not insert each pallet 2 by the situation of top, in this case, also can take place than normal place L in the position of side edge part 3 that also has a pallet 2.And, when the kind of pallet 2 changes, thickness not simultaneously, side clamping plate 6 also must be changed, the commonality of device is low.
In addition, also have above-mentioned same problem in patent documentation 1～3 disclosed device, complicated detent mechanism is set position, the cost of device is higher and man-hour and cost that safeguard are also higher.
Summary of the invention
The present invention carries out in view of above-mentioned prior art problems, and its purpose is to provide a kind of tray stack transfer apparatus, can with simple structure keep easily and reliably stacked pallet, and commonality is higher.
The present invention is a kind of tray stack transfer apparatus that the stacked trays that is stacked with a plurality of pallets is kept carrying out transfer, has pressing body, this pressing body butt also presses on each side edge part of above-mentioned stacked trays, and has the power when pushing and elasticity that above-mentioned side edge part can be absorbed in; This pressing body is striden a plurality of side edge parts and butt, and is positioned at the both sides of above-mentioned stacked trays and is provided with a pair of.
Above-mentioned pressing body is the side that will be positioned at above-mentioned stacked trays, step up the side edge part of stating a plurality of pallets and be connected with a plurality of elastomeric elements of the side edge part butt of above-mentioned a plurality of pallets and form.Above-mentioned pressing body is formed by tabular or block rubber components, soft resin, foamed rubber or foamed resin etc.
Above-mentioned pallet is set to take in to horizontality substrate, and is provided with a plurality of through-hole parts in the bottom surface; Above-mentioned pallet has a plurality of anchors, and this anchor is configured to, and can insert each through-hole part of the logical above-mentioned tray bottom of being moved into respectively, and supports aforesaid substrate by each horizontality ground, upper end; The length that each anchor has is to insert above-mentioned each through-hole part that leads to above-mentioned stacked trays stacked on this anchor projected direction along the vertical direction.
According to tray stack transfer apparatus of the present invention, can irrespectively reliably keep stacked pallet with position, the thickness of pallet, commonality is high.Thus, do not need the adjustment of trickle position, switch, help cost-cutting for the device of each pallet.
Description of drawings
Fig. 1 be expression one embodiment of the present invention tray stack transfer apparatus the block diagram of stacked pallet.
The summary lateral view of Fig. 2 state that to be expression keep the stacked trays of the tray stack transfer apparatus of one embodiment of the present invention.
Fig. 3 is the summary lateral view of each hold mode of stacked trays of pressing body of the tray stack transfer apparatus of expression one embodiment of the present invention.
Fig. 4 is the longitudinal diagram of move loading action of the tray stack transfer apparatus of expression one embodiment of the present invention.
Fig. 5 is the summary lateral view that the existing tray stack transfer apparatus of expression keeps the state of stacked trays.
Fig. 6 is the summary lateral view of each hold mode of the stacked trays of the existing tray stack transfer apparatus of expression.
Nomenclature:
10 tray stack transfer apparatus
12 pallets
13 side edge parts
14 stacked trays
15 bottoms
The 15a through-hole part
16 pressing bodies
20 glass substrates
22 bay-lifts
24 anchors
The specific embodiment
Below, an embodiment of tray stack transfer apparatus of the present invention is described according to Fig. 1～Fig. 4.The tray stack transfer apparatus 10 of present embodiment, be be used for the employed glass substrate of for example Liquid Crystal Display (LCD) is housed in pallet 12 and conveyance to the device of next operation, the device that be that the stacked trays 14 with stacked a plurality of pallets 12 lifts, conveyance or a part is separated.
The frame portion 17 of pallet 12 forms, for example from the side edge part of bottom 15 width dimensions about with 30mm along around be provided with, separate under the state of slight gap with putting at along continuous straight runs at the glass substrate on the bottom 15 20, around surround the glass substrate 20 that puts on bottom 15.
In frame portion 17, be provided with side edge part 13 in relative a pair of side or around the edge, this side edge part 13 is for example outstanding laterally for flange shape with horizontality with the width dimensions about 30mm.This side edge part 13 constitutes the section oblong.
The tray stack transfer apparatus 10 of present embodiment is used to take out the glass substrate 20 that this pallet 12 takes in and is transplanted on next operation.
The tray stack transfer apparatus 10 of present embodiment has pressing body 16 in the end of not shown maintaining body, and this pressing body 16 is soft elastic materials such as rubber, soft synthetic resin, foamed rubber or foamed resin.Pressing body 16 is, forms tabularly or block, is positioned at the both sides of stacked trays 14 and is provided with a pair ofly, and is set to, and is separated from one another or approaching by not shown maintaining body, but and oscilaltion.Pressing body 16 can fully obtain the friction with the side edge part 13 of each pallet 12, and has following elasticity: keeping the state lower compression distortion of pallet 12, and the side edge part 13 of each pallet 12 can be absorbed in the pressing body 16.And pressing body 16 is, is positioned at the side of stacked trays 14, and as shown in Figure 2, the side edge part of striding a plurality of pallets 12 is set continuously and with a plurality of elastomeric element 16a of the side edge part butt of these a plurality of pallets 12.
And this tray stack transfer apparatus 10 has bay-lift 22, and this bay-lift 22 is set to, and when the maintenance of removing a plurality of pallets 12 stacked on above-below direction, puts pallet 12 and liftable.And tray stack transfer apparatus 10 has a plurality of anchors 24, and this anchor 24 connects bay-lift 22 respectively on above-below direction, and inserts logical each through-hole part 15a that puts one or more pallets 12 on this bay-lift 22, and extends in vertical direction.
As Fig. 2, shown in Figure 3, the action of the tray stack transfer apparatus 10 of present embodiment is, make a pair of pressing body 16 from the side of stacked trays 14 and side edge part 13 butts of each pallet 12, and a pair of pressing body 16 is pressed into to the central side of stacked trays 14, be absorbed in pressing body 16 up to the side edge part 13 of pallet 12.Under this state, shown in Fig. 3 (a), be pressed reliably body 16 of the side edge part 13 of each pallet 12 keeps.Afterwards, when pressing body 16 rises,, lift the above stacked trays 14 of part that pressing body 16 is kept simultaneously by the maintaining body of pressing body 16 is installed.
At this, in substrate etc. is accommodated in each pallet 12 of stacked trays 14 and under the bigger situation of weight, shown in Fig. 2 (b), the position integral body that has a stacked trays 14 is than normal place L out-of-position situation downwards.In this case, shown in Fig. 3 (b), pressing body 16 is also can be with the offset of the side edge part 13 of pallet 12 irrelevant and carry out failure-free and keep.Equally, at pallet 12 when being empty, light, shown in Fig. 2 (c), even the position of pallet 12 is offset upward than normal place L, shown in Fig. 3 (c), pressing body 16 also can be reliably to pallet 12 keep, lift, conveyance.
Then, during glass substrate 20 in taking out pallet 12, keep the pallet 12 of the pallet 12a top of foot by the pressing body 16 of maintaining body.At this moment, the pallet 12a of foot becomes the body 16 of not being pressed and keeps and put state on bay-lift 22.Afterwards, when bay-lift 22 descended, as shown in Figure 4, the pallet 12a of foot also one descended.Then, along with the decline of bay-lift 22, each anchor 24 is inserted logical bay-lift 22 and is inserted in each through-hole part 15a of pallet 12a.When bay-lift 22 further descends, the upper end of each anchor 24 respectively be accommodated in pallet 12a in the back side of glass substrate 20 contact, along with the decline of bay-lift 22, by each anchor 24, this glass substrate 20 is relatively lifted by the bottom 15 from pallet 12a.Under this state, each anchor 24 becomes to be made glass substrate 20 be positioned at the relative top of pallet 12a and remains horizontal state at specified altitude.
And the glass substrate 20 that is remained horizontality by anchor 24 is by transport mechanisms such as absorption handles glass substrate 20 is taken off from each anchor 24, and conveyance to be to the position of regulation.
According to the tray stack transfer apparatus 10 of present embodiment, if having nothing to do and can pass through then can keep stacked trays 14 reliably in the position range of pressing body 16 maintenances at position, thickness with pallet 12.Therefore, even when the thickness of the degree of depth of pallet 12, thickness, side edge part 13 etc. changes, perhaps since the difference of the having or not of collecting article, kind and pallet 12 the position minor shifts is set, also can keep pallet 12 reliably.Thus, do not need the trickle position of holding device to adjust or switch the cost-cutting when also helping product to make for the device of every kind of pallet.
In addition, tray stack transfer apparatus of the present invention is not limited to above-mentioned embodiment, and pressing body also can be split under a plurality of states, keeps keeping a plurality of pallets with each pressing body, and the shape of pressing body, structure, material are not limit.
Claims (5)
1, a kind of tray stack transfer apparatus keeps and carries out transfer the stacked trays that is stacked with a plurality of pallets, it is characterized in that,
Have pressing body, this pressing body butt also presses on each side edge part of above-mentioned stacked trays, and has the power when pushing and elasticity that above-mentioned side edge part can be absorbed in;
This pressing body is striden a plurality of side edge parts and butt, and is positioned at the both sides of above-mentioned stacked trays and is provided with a pair of.
2, tray stack transfer apparatus as claimed in claim 1 is characterized in that,
Above-mentioned pressing body is to be positioned at the side of above-mentioned stacked trays and to step up the side edge part of stating a plurality of pallets and be connected with a plurality of elastomeric elements of the side edge part butt of above-mentioned a plurality of pallets and form.
3, tray stack transfer apparatus as claimed in claim 2 is characterized in that,
Above-mentioned elastomeric element is formed by the soft elastic material of rubber or synthetic resin.
4, tray stack transfer apparatus as claimed in claim 3 is characterized in that,
Above-mentioned elastomeric element is formed by foamed rubber or synthetic resin foam.
5, tray stack transfer apparatus as claimed in claim 2 is characterized in that,
Above-mentioned pallet be set to take in to horizontality substrate, and the bottom surface is provided with a plurality of through-hole parts;
Above-mentioned pallet has a plurality of anchors, and this anchor is configured to, and can insert each through-hole part of the logical above-mentioned tray bottom of being moved into respectively, and can support aforesaid substrate in horizontality ground by each upper end;
The length that each anchor has is, can insert along the vertical direction lead on this anchor projected direction above-mentioned each through-hole part of stacked above-mentioned stacked trays.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP088445/2006 | 2006-03-28 | ||
| JP2006088445A JP2007261738A (en) | 2006-03-28 | 2006-03-28 | Tray stacking transfer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101405208A true CN101405208A (en) | 2009-04-08 |
Family
ID=38609309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007800103580A Pending CN101405208A (en) | 2006-03-28 | 2007-03-27 | Tray stack transfer apparatus |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2007261738A (en) |
| KR (1) | KR20080099272A (en) |
| CN (1) | CN101405208A (en) |
| TW (1) | TW200746346A (en) |
| WO (1) | WO2007119530A1 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103112726A (en) * | 2013-03-11 | 2013-05-22 | 嘉诺资源再生技术（苏州）有限公司 | Automatic stacking foot placement machine |
| CN105383946A (en) * | 2015-12-07 | 2016-03-09 | 广东生和堂健康食品股份有限公司 | Automatic loading and unloading system for putting food in or taking food out of sterilization kettle |
| CN106363639A (en) * | 2016-10-26 | 2017-02-01 | 重庆大学 | Beacon taking-back and placing mechanism for intelligent snow sweeping robot |
| CN106429473A (en) * | 2016-10-13 | 2017-02-22 | 佛山市特福德自动化科技有限公司 | Clamping part capable of conveniently extracting objects from storehouse frame one by one |
| CN106711071A (en) * | 2015-11-13 | 2017-05-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Manipulator |
| CN107840153A (en) * | 2017-12-01 | 2018-03-27 | 昆山精讯电子技术有限公司 | A kind of panel storage device |
| CN110435999A (en) * | 2019-08-09 | 2019-11-12 | 苏州富强科技有限公司 | One kind being dialled spacing mechanism and dialled away from device |
| CN110668184A (en) * | 2019-10-27 | 2020-01-10 | 张肖 | Rack is used in glass production and processing |
| CN111170017A (en) * | 2020-03-09 | 2020-05-19 | 吉林工程技术师范学院 | Logistics turnover box separating device |
| CN111559609A (en) * | 2020-05-11 | 2020-08-21 | 杭州易灿网络科技有限公司 | Intelligent logistics distribution device capable of avoiding collision damage |
| CN111717674A (en) * | 2019-03-20 | 2020-09-29 | 日本电产三协株式会社 | Tray conveying device and panel conveying system |
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| KR101534023B1 (en) * | 2009-06-30 | 2015-07-09 | 주성엔지니어링(주) | Laminating System and Method |
| CN103896057B (en) * | 2014-04-16 | 2016-01-20 | 苏州博众精工科技有限公司 | A kind of Full-automatic blanking mechanism |
| JP6179729B2 (en) * | 2014-06-13 | 2017-08-16 | 株式会社ダイフク | Container lifting and lowering conveyor |
| JP6418397B2 (en) * | 2015-08-24 | 2018-11-07 | 株式会社ダイフク | Elevating and lowering device for article transport container |
| KR102332806B1 (en) * | 2016-06-28 | 2021-12-01 | 무라다기카이가부시끼가이샤 | Substrate carrier transport, sorting and loading/unloading |
| KR102332805B1 (en) * | 2016-06-28 | 2021-12-01 | 무라다기카이가부시끼가이샤 | Improved High Density Tec-Cell Carrier |
| KR102246502B1 (en) * | 2019-10-11 | 2021-04-29 | 주식회사 에스엠코어 | Stocker with tray merge function |
| TWI808748B (en) * | 2022-05-06 | 2023-07-11 | 四方自動化機械股份有限公司 | Wafer Tray Changer Mechanism |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2995939B2 (en) * | 1991-08-28 | 1999-12-27 | 松下電器産業株式会社 | Substrate supply device |
| JP3220568B2 (en) * | 1993-06-23 | 2001-10-22 | 日本テトラパック株式会社 | vending machine |
| JPH09290927A (en) * | 1996-04-25 | 1997-11-11 | Toyo Kanetsu Kk | Picking equipment |
| JP2001326272A (en) * | 2000-05-12 | 2001-11-22 | Meidensha Corp | Tray for conveying base plate |
| JP2002200141A (en) * | 2000-12-28 | 2002-07-16 | Yuyama Manufacturing Co Ltd | Drug sheet taking out device |
-
2006
- 2006-03-28 JP JP2006088445A patent/JP2007261738A/en active Pending
-
2007
- 2007-03-27 KR KR1020087020211A patent/KR20080099272A/en not_active Application Discontinuation
- 2007-03-27 WO PCT/JP2007/056463 patent/WO2007119530A1/en active Application Filing
- 2007-03-27 CN CNA2007800103580A patent/CN101405208A/en active Pending
- 2007-03-28 TW TW096110796A patent/TW200746346A/en unknown
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103112726B (en) * | 2013-03-11 | 2015-05-20 | 嘉诺资源再生技术（苏州）有限公司 | Automatic stacking foot placement machine |
| CN103112726A (en) * | 2013-03-11 | 2013-05-22 | 嘉诺资源再生技术（苏州）有限公司 | Automatic stacking foot placement machine |
| CN106711071A (en) * | 2015-11-13 | 2017-05-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Manipulator |
| CN105383946A (en) * | 2015-12-07 | 2016-03-09 | 广东生和堂健康食品股份有限公司 | Automatic loading and unloading system for putting food in or taking food out of sterilization kettle |
| CN105383946B (en) * | 2015-12-07 | 2018-10-02 | 广东生和堂健康食品股份有限公司 | A kind of automatic assembling and disassembling system of food disengaging sterilization axe |
| CN106429473A (en) * | 2016-10-13 | 2017-02-22 | 佛山市特福德自动化科技有限公司 | Clamping part capable of conveniently extracting objects from storehouse frame one by one |
| CN106429473B (en) * | 2016-10-13 | 2019-11-15 | 佛山市特福德自动化科技有限公司 | Convenient for the hold assembly detached piece by piece from storehouse frame |
| CN106363639A (en) * | 2016-10-26 | 2017-02-01 | 重庆大学 | Beacon taking-back and placing mechanism for intelligent snow sweeping robot |
| CN107840153A (en) * | 2017-12-01 | 2018-03-27 | 昆山精讯电子技术有限公司 | A kind of panel storage device |
| CN107840153B (en) * | 2017-12-01 | 2024-03-22 | 昆山精讯电子技术有限公司 | Panel strorage device |
| CN111717674A (en) * | 2019-03-20 | 2020-09-29 | 日本电产三协株式会社 | Tray conveying device and panel conveying system |
| CN110435999A (en) * | 2019-08-09 | 2019-11-12 | 苏州富强科技有限公司 | One kind being dialled spacing mechanism and dialled away from device |
| CN110668184A (en) * | 2019-10-27 | 2020-01-10 | 张肖 | Rack is used in glass production and processing |
| CN111170017A (en) * | 2020-03-09 | 2020-05-19 | 吉林工程技术师范学院 | Logistics turnover box separating device |
| CN111170017B (en) * | 2020-03-09 | 2021-05-18 | 吉林工程技术师范学院 | Logistics turnover box separating device |
| CN111559609A (en) * | 2020-05-11 | 2020-08-21 | 杭州易灿网络科技有限公司 | Intelligent logistics distribution device capable of avoiding collision damage |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007261738A (en) | 2007-10-11 |
| TW200746346A (en) | 2007-12-16 |
| KR20080099272A (en) | 2008-11-12 |
| WO2007119530A1 (en) | 2007-10-25 |
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