CN101403627A - Vertical straight line reference method and apparatus - Google Patents
Vertical straight line reference method and apparatus Download PDFInfo
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- CN101403627A CN101403627A CNA2008101375292A CN200810137529A CN101403627A CN 101403627 A CN101403627 A CN 101403627A CN A2008101375292 A CNA2008101375292 A CN A2008101375292A CN 200810137529 A CN200810137529 A CN 200810137529A CN 101403627 A CN101403627 A CN 101403627A
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- air
- solid phase
- guide
- upright post
- guide rail
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Abstract
A vertical beeline benchmark method and device belong to the technical field of precision instruments and measurement. A solid phase is introduced between the movable part and the fixation part of a totally closed vertical aerostatic slideway, which can keep synchronized movement with the movable part, and act on the corresponding aerostatic working surface of the fixation part in a soft friction manner with one side or two sides, the contact pressure is F2, the movable part is in an open or closed supporting state; in the condition that the gas film supporting force F1 is greater than the contact pressure F2, the F1 and F2 are parameter optimized, and the gas film supporting force and the contact pressure are adjusted correspondingly; and the solid phase in the device is arranged in the inside or outside of the gas film. Under the precondition of retaining the original precision of the aerostatic slideway, the invention significantly enhances the supporting stiffness and the anti-jamming capability of the aerostatic slideway, and improves the movement stability and the positioning stability.
Description
Technical field
The invention belongs to exact instrument and field of measuring technique, particularly a kind of vertical straight line reference method and device.
Background technology
When air-float guide rail uses under vertical state, often be used as the high-precision vertical linear datum and be applied in precision/ultra precise measurement instrument, rig for testing and the manufacturing equipment.Vertical-type air-flotation guide rail commonly used at present mainly is made up of air supporting guide pin bushing and guide rail upright columns, making up the air film gap between air supporting guide pin bushing and the guide rail upright columns with after the supporting of formation gas and lubricating, under the effect of drive systems such as motor, air supporting guide pin bushing and load placed on it move up and down along guide rail upright columns.In use there is following several problem in the air-float guide rail of this version: the one, and less, the poor anti jamming capability of radial support rigidity, therefore when impact and disturbance were arranged, X changed to producing trace with Y to air-film thickness, shows as little " vibration " of moving component; The 2nd, because the air film disorder causes that the little vibration of the middle and high frequency of moving component causes the kinematic system straight-line trajectory unsmooth, motion repeatability is relatively poor in the air-supporting slide rail system; The 3rd, when moving component is in positioning states, because of inside and outside disturbance makes kinematic system position stability and reliability relatively poor, especially along little " vibration " that exist on the guide rail upright columns direction at random.The problems referred to above have greatly limited the application of vertical-type air-flotation guide rail and have restricted the further raising of its performance index.
Vertical-type air-flotation guide rail rigidity is low in order to solve, the problem a little less than the antijamming capability, Chinese scholars and engineering technical personnel have done a lot of useful trials, develop novel air hydrostatic slideways such as passive compensation mould guide rail, the inner throttling aerostatic guide way of active, surface throttle aerostatic guide way, static pressure control flow controller aerostatic guide way, automatically controlled throttling aerostatic guide way, exhaust control aerostatic guide way respectively.These guide rails all are structurally to take some control measure, and with acquisition higher stiffness or rigidity controllable, but their structure is complicated, and control and adjusting are more loaded down with trivial details, and exploitativeness is relatively poor, and effect is also not obvious.The National University of Defense technology proposes a kind of novel air hydrostatic slideway that adopts the throttling of porous matter, its ultimate principle is to utilize the microstructure of porous material to carry out throttling, the shallow trench that while is connected with porous matter flow controller in the guide rail surface setting, utilize the impedance of groove to form second throttle, reach the purpose that improves air guide rail rigidity and load-bearing capacity, but porous matter bearing is made more complicated, and blocks easily.
Summary of the invention
Purpose of the present invention is exactly the problem that exists at above-mentioned prior art, a kind of vertical straight line reference method is proposed, this method is by making up a four sides totally-enclosed vertical-type air-flotation guide rail of encircling type and introduce the solid phase between the movable member of this guide rail and fixed part, utilize the soft underprop of solid phase to form the damping link with itself and the surperficial appropriate mechanical friction of fixed part, and pass through Optimization Design, reach under the prerequisite that farthest keeps the air-float guide rail original precision, realization significantly improves the support stiffness and the antijamming capability of guide rail, and the purpose that improves system motion stability and position stability.The present invention also provides a kind of vertical straight line standard apparatus based on said method.
Above-mentioned purpose realizes by following technical scheme:
A kind of vertical straight line reference method, this method may further comprise the steps:
(1), at first make up a four sides encircling type totally-enclosed vertical-type air-flotation guide rail as the straight-line guidance benchmark, and charged pressure gas makes movable member center on fixed part to float fully in guide rail, the suffered air film supporting power of movable member is F
1
(2), between the movable member of described air-float guide rail and fixed part, introduce the solid phase, this solid is synchronized with the movement with the movable member maintenance, and one-sided or two-sided action is on the air supporting working surface of fixed part correspondence with soft friction type, contact pressure is F
2, movable member is in open type or enclosed bearing state;
(3), according to the material behavior of solid phase and the configuration structure on air-float guide rail, at F
1＞F
2Under the condition, to F
1, F
2Carry out parameter optimization and air film supporting power and contact pressure are carried out corresponding adjustment.
A kind of vertical straight line standard apparatus, comprise the totally-enclosed vertical-type air-flotation guide rail of four sides encircling type that guide upright post and air supporting guide pin bushing make up, be built with air film between guide upright post and the air supporting guide pin bushing, this device also comprises and is fitted in the inner or outside solid phase of air film, one end of this solid phase is fixed on the air supporting guide pin bushing, the thin-skinned rubbing contact of air supporting worksheet that its other end is corresponding with guide upright post; Wherein the equipped mode of solid phase is: in vertical cross-section, and hand down guide upright post two rows configuration of solid; In the horizontal section, solid phase two point symmetries are configured in the M of guide upright post
1And N
1On the face, and single-point is configured in M between two parties
2And N
2On the face; Or at M
1, N
1, M
2And N
2Be 2 configurations on four faces; Or at M
1, N
1, M
2And N
2Being single-point on four faces disposes between two parties; Or only be disposed at M between two parties
2And N
2On the face.
Solid adopts the material with plastic deformation and soft rubbing characteristics mutually, and its effective deformation amount is 1～3 μ m; Solid is that point or face contact with guide upright post.
The present invention has following characteristics and beneficial effect:
1, supports much larger than gas owing to solid phase support stiffness, therefore the adding of solid phase has obviously improved the radial rigidity and the angular rigidity of air-float guide rail, antijamming capability is significantly strengthened, little " vibration " phenomenon that moving component occurs when effectively having avoided air-float guide rail to be subjected to impacting with disturbance, this is one of innovative point that is different from existing air-float guide rail;
2, the mechanical friction of solid phase soft underprop and appropriateness has been introduced the damping link to air-float guide rail, the vibrational energy that it act as remarkable absorption and consumes moving component or positioning element, play the effect that suppresses vibration and improve linear datum kinetic stability and position stability, this be the existing air-float guide rail of difference innovative point two;
3, apparatus of the present invention have been avoided because during the low appearance overload that causes of air-float guide rail load-bearing capacity, " hard contact " phenomenon that the air supporting workplace occurs, and by appropriate design air film supporting power F
1With solid contact pressure F mutually
2And the correlation parameter of micro-elasticity supporting and mechanical friction link etc., the introducing of solid phase is not influenced or the as far as possible little original straight line precision that influences air-float guide rail, this is three of the difference innovative point that has air-float guide rail now.
Apparatus of the present invention are simple in structure, control and adjusting simple and convenient, and good operability is used reliable.
Description of drawings
Fig. 1 is apparatus of the present invention overall arrangement structure three-dimensional synoptic diagram;
Fig. 2 is that the A-A of Fig. 1 is to cut-open view;
Fig. 3 is that the B-B of Fig. 1 is to cut-open view;
Fig. 4 is that solid is at M
1, N
1, M
2And N
2Be 2 configuration structure synoptic diagram on four faces;
Fig. 5 is that solid is at M
1, N
1, M
2And N
2Be single-point configuration structure synoptic diagram placed in the middle on four faces;
Fig. 6 is configured in M between two parties for solid phase single-point
2And N
2The structural representation of face;
Structural representation when Fig. 7 places air film outside for solid matches.
Among the figure: 1, guide upright post; 2, air supporting guide pin bushing; 2-1, air supporting plate; 3, air film; 4, solid phase; 5, F
1-air film supporting power; 6, F
2-contact pressure.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated.
Embodiment 1:
As depicted in figs. 1 and 2, at first make up the totally-enclosed vertical-type air-flotation guide rail of a four sides encircling type as the linear movement guide benchmark.Guide upright post 1 and air supporting guide pin bushing 2 two parts are assembled into the vertical-type air-flotation guide rail, and guide upright post 1 is a fixed part, and the linear movement guide benchmark is provided, and its base is fixed on the stable matrix; Air supporting guide pin bushing 2 is a moving component, is built with air film 3 between the matching surface of air supporting guide pin bushing 2 and guide upright post 1, forms the gas supporting with lubricated.Charge into the pressure gas of suitable pressure in air film 3, the air film supporting power that air supporting guide pin bushing 2 is born is F
1, at air film supporting power F
1Effect under, air supporting guide pin bushing 2 is separated with the working surface of guide upright post 1, floats fully around guide upright post 1, and moves up and down at drive system effect lower edge guide upright posts 1 such as motors.Wherein, the xsect of guide upright post 1 is a rectangle, its four air supporting working surface M
1, M
2, N
1And N
2All, have good roughness and flatness to guarantee working surface through precise finiss processing.The verticality of the mounting seat of these four air supporting workplaces and guide rail upright columns 1 also detects and revises by precision and guaranteed simultaneously.In addition, the air supporting guide pin bushing 2 of the work that matches with guide upright post 1 is assemblied through precision by four air supporting plate 2-1, and this partial devices has high straight line precision and higher Motion Resolution power in order to guarantee linear datum.
For guaranteeing the kinematic accuracy and the serviceable life of air-float guide rail, the selection of guide upright post 1 and air supporting guide pin bushing 2 manufactured materials is very important, mainly should consider stability of material, anti-corrosive properties, thermal expansion, machining property and high wearing quality when selecting material.Therefore, this device is selected process nature annual agings depositions up to ten thousand, stress relief " Jinan green grass or young crops " grouan completely, can obtain splendid geometrical stability.Each the air supporting plate 2-1 workplace and guide upright post 1 workplace of air supporting guide pin bushing 2 all make the air supporting workplace reach deep-submicron form accuracy and positional precision by fine abrasive, reach tens nanoscale surfacenesses simultaneously, make the surface have high gas average effect and corrosion resistivity.Guide upright post 1 and air supporting guide pin bushing 2 also can adopt the specific alloy manufacturing of stable performance.
Minimum because of the friction factor of air, so above-mentioned air-float guide rail does not almost rub with guide upright post 1, therefore have high displacement sensitivity when 2 motions of air supporting guide pin bushing.But, poor anti jamming capability less because of the gas support stiffness, therefore when impact and disturbance were arranged, X changed to producing trace with Y to air-film thickness, mainly shows as little " vibration " of moving component; Cause that owing to the air film disorder the little vibration of the middle and high frequency of moving component causes the kinematic system straight-line trajectory unsmooth in the guide track system in addition, motion repeatability is relatively poor, and moving component is when being in positioning states, and inside and outside disturbance makes kinematic system position stability and reliability relatively poor.
The key that addresses the above problem is to increase the friction of 1 of the damping of air supporting guide pin bushing 2 and itself and guide upright post.Therefore the present invention introduces solid mutually 4 between the air supporting guide pin bushing 2 of above-mentioned air-float guide rail and guide upright post 1, independently air supporting guide pin bushing 2 and guide upright post 1 are integrated into the structure with soft sliding friction characteristic each other with originally, solid phase 4 is configured in the inside of air film 3, one end and air supporting guide pin bushing 2 are fixed with one, its other end contacts with the corresponding surface of guide upright post 1, and has certain contact pressure F
2This solid 4 keeps being synchronized with the movement with air supporting guide pin bushing 2 mutually, for suppressing little " vibration " of air supporting guide pin bushing 2, guarantees guiding accuracy simultaneously, and effective dilatation amount of solid phase 4 is designed to 1～3 μ m.
As shown in Figure 2, solid 4 is fitted on four air supporting plate 2-1 mutually, and is soft rubbing contact with four air supporting workplaces of guide upright post 1, and its equipped mode is: in vertical cross-section, solid is mutually 4 along the configuration of guide upright post 1 two rows, as shown in Figure 3; In the horizontal section, 4 liang of point symmetries of solid phase are configured in the M of guide upright post 1
1And N
1On the face, single-point is configured in the M of guide upright post 1 between two parties
2And N
2On the face, make air supporting guide pin bushing 2 be in the enclosed bearing state.Solid 4 adopts elastomeric material to make mutually, and it has plastic deformation and soft rubbing characteristics.
After introducing solid phase 4, the linear datum principle of work is: solid phase 4 is as intermediary, by itself and guide upright post 1 soft friction, with air supporting guide pin bushing 2 and guide upright post 1 by original each other independently state be integrated into the structure that is in contact with one another, have soft sliding friction characteristic, greatly improved the integral rigidity and the damping of guide track system.Because solid 4 support stiffness mutually supports much larger than gas, the adding of solid phase 4 has obviously improved the radial rigidity and the angular rigidity of air-float guide rail, antijamming capability is significantly strengthened, little " vibration " phenomenon that moving component occurs when effectively having avoided air-float guide rail to be subjected to impacting with disturbance; Shi Du mechanical friction has been introduced the damping link to air-float guide rail in addition, and the vibrational energy that it act as remarkable absorption and consumes moving component or positioning element plays the effect that suppresses vibration and improve linear datum kinetic stability and position stability; Introduce solid mutually the guide rail structure after 4 avoided since during the low appearance overload that causes of air-float guide rail load-bearing capacity the air supporting workplace and " hard contact " phenomenon appears.Because the low problem of displacement sensitivity appears in the excessive kinematic system that can make again of damping and friction, has creeping phenomenon, so by appropriate design air film supporting power F
1And contact pressure F
2And the correlation parameter of micro-elasticity supporting and mechanical friction link etc., solid phase 4 is designed to a little with guide upright post 1 or face contacts, at F
1＞F
2Under the condition, to F
1, F
2Carry out parameter optimization and with air film supporting power F
1And contact pressure F
2Carry out corresponding adjustment, the introducing of solid phase 4 is not influenced or the as far as possible little original straight line precision that influences air-float guide rail.
Embodiment 2:
As shown in Figure 4, be solid phase 4 M at guide upright post 1
1, N
1, M
2And N
2Four faces are 2 configurations, and this configuration structure is applicable to the occasion that the support stiffness of guide rail and disturbance are had relatively high expectations.The miscellaneous part of present embodiment is all identical with embodiment 1 with principle of work.
Embodiment 3:
As shown in Figure 5, be solid phase 4 M at guide upright post 1
1, N
1, M
2And N
2Be single-point configuration structure placed in the middle on four faces, the miscellaneous part of present embodiment is identical with embodiment 1 with principle of work.
Embodiment 4:
As shown in Figure 6, be configured in the M of guide upright post 1 between two parties for solid phase 4 single-points
2And N
2The structure of face, this structure install and adjust fairly simple, and the miscellaneous part of present embodiment is identical with embodiment 1 with principle of work.
Embodiment 5:
As shown in Figure 7, the structure when being configured in air film 3 outsides for solid phase 4, the principle of work of present embodiment is identical with embodiment 1.
Claims (4)
1, a kind of vertical straight line reference method, this method may further comprise the steps:
(1), at first make up a four sides encircling type totally-enclosed vertical-type air-flotation guide rail as the straight-line guidance benchmark, and charged pressure gas makes movable member center on fixed part to float fully in guide rail, the suffered air film supporting power of movable member is F
1, it is characterized in that:
(2), between the movable member of described air-float guide rail and fixed part, introduce the solid phase, this solid is synchronized with the movement with the movable member maintenance, and one-sided or two-sided action is on the air supporting working surface of fixed part correspondence with soft friction type, contact pressure is F
2, movable member is in open type or enclosed bearing state;
(3), according to the material behavior of solid phase and the configuration structure on air-float guide rail, at F
1＞F
2Under the condition, to F
1, F
2Carry out parameter optimization and air film supporting power and contact pressure are carried out corresponding adjustment.
2, a kind of vertical straight line standard apparatus, comprise the totally-enclosed vertical-type air-flotation guide rail of four sides encircling type that guide upright post (1) and air supporting guide pin bushing (2) make up, be built with air film (3) between guide upright post (1) and the air supporting guide pin bushing (2), it is characterized in that this device also comprises is fitted in the inner or outside solid phase (4) of air film (3), one end of this solid phase (4) is fixed on the air supporting guide pin bushing (2), the thin-skinned rubbing contact of air supporting worksheet that its other end is corresponding with guide upright post (1); Wherein the equipped mode of solid phase (4) is: in vertical cross-section, solid phase (4) disposes along guide upright post (1) two rows; In the horizontal section, solid phase (4) two point symmetries are configured in the M of guide upright post (1)
1And N
1On the face, and single-point is configured in M between two parties
2And N
2On the face; Or at M
1, N
1, M
2And N
2Be 2 configurations on four faces; Or at M
1, N
1, M
2And N
2Being single-point on four faces disposes between two parties; Or only be disposed at M between two parties
2And N
2On the face.
3, a kind of vertical straight line standard apparatus according to claim 2 is characterized in that solid phase (4) adopts the material with plastic deformation and soft rubbing characteristics, and its effective deformation amount is 1～3 μ m.
4, a kind of vertical straight line standard apparatus according to claim 2 is characterized in that solid phase (4) and guide upright post (1) are that point or face contact.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810137529A CN100590389C (en) | 2008-11-14 | 2008-11-14 | Vertical straight line pedestal method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810137529A CN100590389C (en) | 2008-11-14 | 2008-11-14 | Vertical straight line pedestal method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101403627A true CN101403627A (en) | 2009-04-08 |
| CN100590389C CN100590389C (en) | 2010-02-17 |
Family
ID=40537707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810137529A Expired - Fee Related CN100590389C (en) | 2008-11-14 | 2008-11-14 | Vertical straight line pedestal method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100590389C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107063319A (en) * | 2016-08-08 | 2017-08-18 | 哈尔滨工业大学 | Static pressure air-bearing horizontal rectilinear motion standard apparatus based on friction-driven |
| WO2019214198A1 (en) * | 2018-05-09 | 2019-11-14 | 哈尔滨工业大学 | Air suspension support and motion guiding device having unequal-depth throttling chambers |
-
2008
- 2008-11-14 CN CN200810137529A patent/CN100590389C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107063319A (en) * | 2016-08-08 | 2017-08-18 | 哈尔滨工业大学 | Static pressure air-bearing horizontal rectilinear motion standard apparatus based on friction-driven |
| CN107063319B (en) * | 2016-08-08 | 2019-06-18 | 哈尔滨工业大学 | Static pressure air-bearing horizontal rectilinear motion standard apparatus based on friction-driven |
| WO2019214198A1 (en) * | 2018-05-09 | 2019-11-14 | 哈尔滨工业大学 | Air suspension support and motion guiding device having unequal-depth throttling chambers |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100590389C (en) | 2010-02-17 |
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Granted publication date: 20100217 Termination date: 20211114 |