CN101398684B - Scheduling method for a substrate treating apparatus - Google Patents
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Abstract
This invention provides a scheduling method for substrate treating apparatus and program thereof. A controlling section orderly processes each train in each treating section according to a procedure including a plurality of treating steps so as to determine and order of treating each train when a plurality of trains is treated by the substrate treating apparatus having a plurality of treating units for treating the substrates. The method includes: executing a basic configuration method and a first configuration method so as to generate several plans, and selecting a plan that finishes the plan in a schedule time, wherein two steps are executed by the controlling section.
Description
Technical field
Plan (schedule) the generation method of the substrate board treatment that regulations such as the glass substrate (hereinafter to be referred as substrate) that the present invention relates to that semiconductor wafer or liquid crystal indicator are used is implemented to clean, etching, drying are handled.
Background technology
Existing this method, when handling a plurality of batches of groups (lot) by substrate board treatment with a plurality of handling parts, for according to the method for making that comprises a plurality of treatment process (recipe) reason portion each batch of processed in sequence group throughout, control part pre-determines the processing sequence of each batch group, when planning to carry each batch group according to this, handle in turn, wherein said handling part is used for substrate is handled.
Particularly, according to the family tree (be Spectrum figure) of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored family tree with this treatment process, in next treatment process of each batch group, the treatment process that in each pretreatment procedure, finishes predetermined instant batch group the earliest will be configured to next treatment process (for example with reference to the spy of Japan open the 2003-241818 communique, the spy opens the 2003-243274 communique).
Actual begin to handle batch group before, the scheduling method of described substrate board treatment determines which which batch group by which handling part handled constantly at, therefore can dispose batch each treatment process of group effectively, improve the running rate of substrate board treatment.
As mentioned above, need in the generation plan under the situation of long period, the required time is planned in generation and compare predetermined reference time, surpassing under the situation of reference time, to add that the stipulated time is used as new reference time reference time, even need in the generation plan under the situation of long period, the situation (with reference to No. 3712370 communique of Jap.P.) that also can not surpass the moment of being planned is constantly finished in plan.
But, in having the prior art of this structure, have following problem.
Promptly, the scheduling method of existing substrate board treatment, improve running rate in order to suppress stand-by time, generation plan sometimes needs the long period.And, for the problem that prevents to cause thus, move after need making the allocation position of criticizing the treatment process of organizing that after this next is configured, consequently, may cause on the contrary increasing stand-by time and can't improving running rate, and exist because of generating the problem of plan flexibly as batch group minimizing of planning object.In addition, the plan object reduces problems such as also causing the running rate reduction.
Summary of the invention
The present invention is directed to above-mentioned problem and make, its purpose is to provide a kind of scheduling method and program thereof of substrate board treatment, owing to have the various configurations method, can prevent to plan the rise time increases, and can improve running rate.
In addition, another purpose of the present invention is to provide a kind of scheduling method and program thereof of substrate board treatment, by carrying out the test that the operation piece disposes accordingly, can prevent to plan the rise time increase, and can improve running rate with the reason that can't dispose.
In addition, another purpose of the present invention is to provide a kind of scheduling method and program thereof of substrate board treatment, by batch operation piece of organizing of handling the beginning front is preferentially disposed, can prevent to plan the rise time increase, and can improve running rate.
In addition, another purpose of the present invention is to provide a kind of scheduling method and program thereof of substrate board treatment, preferentially dispose by treatment process, can prevent to plan the rise time increase, and can improve running rate batch group identical with batch group that disposes earlier.
In addition, another purpose of the present invention is to provide a kind of scheduling method and program thereof of substrate board treatment, by batch treatment process of organizing with the short treatment process of stand-by time is preferentially disposed, can prevent to plan the rise time increase, and can improve running rate.
In order to realize above-mentioned order, the present invention adopts following structure.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out the basic configuration method and first collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described first collocation method is: according to described basic configuration method configuration process operation, and but the stand-by time that described treatment process produced surpasses under the situation of the allowed time of standby in handling part, cancel the configuration of this treatment process, and from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again.
According to the present invention, control part is according to the family tree of the expression combination corresponding with the processing order of each treatment process of each batch group, after the initial treatment process of any one batch of configuration group, be when basic point is explored family tree with this treatment process, in next treatment process of each batch group, the treatment process of batch group the earliest of the end predetermined instant in these pretreatment procedures is disposed as next treatment process, thereby generate plan (basic configuration method) in advance.Meanwhile, control part is according to basic configuration method configuration process operation, but and under the situation of stand-by time that this treatment process produced above the allowed time of standby in handling part, cancel the configuration of this treatment process, and in family tree from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again, thereby generate plan (first collocation method).
Therefore, use the basic configuration method to generate plan in advance, thereby can repeatedly dispose the subsequent job of pretreatment procedure and the preceding continuous operation of postprocessing working procedures, with the FEFO pretreatment procedure batch the group treatment process as next treatment process, and described next treatment process of preferential selection configuration, thereby can generate the plan that can shorten to the time till next treatment process finishes in advance.In addition, in first collocation method, owing to needn't in family tree, be positioned at than the treatment process with the reason that can't dispose more the treatment process of subordinate be configured test, therefore can reduce test number (TN).Consequently, compare with the basic configuration method and can shorten the time of generation plan.Like this, generate a plurality of plans simultaneously by feature is different separately the basic configuration method and first collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, and can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out the basic configuration method and second collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described second collocation method is: according to described basic configuration method configuration process operation the time, after the processing beginning of organizing according to each batch of initial appointment came the initial treatment process of each batch configuration set in proper order, the treatment process that the described processing in next treatment process of each batch group is begun batch group of front preferentially disposed.
According to the present invention, control part is according to the family tree of the expression combination corresponding with the processing order of each treatment process of each batch group, after the initial treatment process of any one batch of configuration group, be when basic point is explored family tree with this treatment process, in next treatment process of each batch group, to the treatment process of batch group the earliest of the end predetermined instant in these pretreatment procedures be disposed as next treatment process, thereby generate plan (basic configuration method) in advance.Meanwhile, control part is according to basic configuration method configuration process operation, and after the processing beginning order of organizing according to each batch of initial appointment is to the initial treatment process of each batch configuration set, in next treatment process of each batch group, batch treatment process of organizing of handling the beginning front is preferentially disposed (second collocation method).
Therefore, use the basic configuration method to generate plan in advance, thereby can repeatedly dispose the subsequent job of pretreatment procedure and the preceding continuous operation of postprocessing working procedures, with the FEFO pretreatment procedure batch the group treatment process as next treatment process, and described next treatment process of preferential selection configuration, thereby can generate the plan that can shorten to the time till next treatment process finishes in advance.In addition, second collocation method can be avoided following situation,, because physically restriction and can't disposing, recalls the situation that the configuration of treatment process such as family tree falls back that is.Therefore, the time of generation plan can be shortened, time of generation plan can be shortened with the comparison of basic configuration method.Like this, generate a plurality of plans simultaneously by feature is different separately the basic configuration method and second collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out basic configuration method and the 3rd collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described the 3rd collocation method is: according to described basic configuration method configuration process operation the time, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed.
According to the present invention, control part is according to the family tree of the expression combination corresponding with the processing order of each treatment process of each batch group, after the initial treatment process of any one batch of configuration group, be when basic point is explored family tree with this treatment process, in next treatment process of each batch group, to the treatment process of batch group the earliest of the end predetermined instant in these pretreatment procedures be disposed as next treatment process, thereby generate plan (basic configuration method) in advance.Meanwhile, control part is according to basic configuration method configuration process operation, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed (the 3rd collocation method).
Therefore, use the basic configuration method to generate plan in advance, thereby can repeatedly dispose the subsequent job of pretreatment procedure and the preceding continuous operation of postprocessing working procedures, with the FEFO pretreatment procedure batch the group treatment process as next treatment process, and described next treatment process of preferential selection configuration, thereby can generate the plan that can shorten to the time till next treatment process finishes in advance.In addition, the treatment process of batch group that the 3rd collocation method pair is identical with batch group of configuration earlier preferentially disposes, thereby is carrying out when the plan that the device halted state restarts to handle generates, and can shorten the time of generation plan.Like this, generate a plurality of plans simultaneously by feature is different separately basic configuration method and the 3rd collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out basic configuration method and the 4th collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described the 4th collocation method is: according to described basic configuration method configuration process operation the time, but the treatment process that has in batch group of short treatment process of the allowed time of handling part standby is preferentially disposed.
According to the present invention, control part is according to the family tree of the expression combination corresponding with the processing order of each treatment process of each batch group, after the initial treatment process of any one batch of configuration group, be when basic point is explored family tree with this treatment process, in next treatment process of each batch group, to the treatment process of batch group the earliest of the end predetermined instant in these pretreatment procedures be disposed as next treatment process, thereby generate plan (basic configuration method) in advance.Meanwhile, control part is according to basic configuration method configuration process operation, but and the treatment process that will have a batch group of short treatment process of allowed time of standby in handling part preferentially dispose (the 4th collocation method).
Therefore, use the basic configuration method to generate plan in advance, thereby can repeatedly dispose the subsequent job of pretreatment procedure and the preceding continuous operation of postprocessing working procedures, with the FEFO pretreatment procedure batch the group treatment process as next treatment process, and described next treatment process of preferential selection configuration, thereby can generate the plan that can shorten to the time till next treatment process finishes in advance.In addition,, also can can't dispose, occur in falling back in the family tree easily owing to guaranteeing the allowed time even can dispose short treatment process of allowed time physically.Therefore, the 4th collocation method preferentially disposes short treatment process of allowed time, thereby therefore be easy to avoid can shorten the time of generation plan by can't disposing of causing of allowed time.Consequently, compare with the basic configuration method and can shorten the time of generation plan.Like this, generate a plurality of plans simultaneously by feature is different separately basic configuration method and the 4th collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out first collocation method and second collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described first collocation method is: according to basic configuration method configuration process operation, and but the stand-by time that described treatment process produced surpasses under the situation of the allowed time of standby in handling part, cancel the configuration of this treatment process, and from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again, wherein, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described second collocation method is: according to described basic configuration method configuration process operation the time, after the processing beginning of organizing according to each batch of initial appointment came the initial treatment process of each batch configuration set in proper order, the treatment process that the described processing in next treatment process of each batch group is begun batch group of front preferentially disposed.
According to the present invention, control part is according to basic configuration method configuration process operation, but and under the situation of stand-by time that this treatment process produced above the allowed time of standby in handling part, cancel the configuration of this treatment process, and in family tree from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again, thereby generate plan (first collocation method).Meanwhile, control part is according to basic configuration method configuration process operation, and after the processing beginning order of organizing according to each batch of initial appointment is to the initial treatment process of each batch configuration set, in next treatment process of each batch group, batch treatment process of organizing of handling the beginning front is preferentially disposed (second collocation method).
Therefore, when using the basic configuration method, generate plan by first collocation method, thus needn't in family tree, be positioned at than the treatment process with the reason that can't dispose more the treatment process of subordinate be configured test, therefore can reduce test number (TN).Consequently, can shorten the time of generation plan with the comparison of basic configuration method.In addition, second collocation method can be avoided following situation,, because physically restriction and can't disposing, recalls the situation that the configuration of treatment process such as family tree falls back that is.Therefore, can shorten the time of generation plan.Consequently, compare with the basic configuration method and can shorten the time of generation plan.Like this, generate a plurality of plans simultaneously by feature is different separately first collocation method and second collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out first collocation method and the 3rd collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described first collocation method is: according to basic configuration method configuration process operation, and but the stand-by time that described treatment process produced surpasses under the situation of the allowed time of standby in handling part, cancel the configuration of this treatment process, and from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again, wherein, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described the 3rd collocation method is: according to described basic configuration method configuration process operation the time, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed.
According to the present invention, control part is according to basic configuration method configuration process operation, but and under the situation of stand-by time that this treatment process produced above the allowed time of standby in handling part, cancel the configuration of this treatment process, and in family tree from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again, thereby generate plan (first collocation method).Meanwhile, control part is according to basic configuration method configuration process operation, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed (the 3rd collocation method).
Therefore, when using the basic configuration method, generate plan by first collocation method, thus needn't in family tree, be in than the treatment process with the reason that can't dispose more the treatment process of subordinate be configured test, therefore can reduce test number (TN).Consequently, can shorten the time of generation plan with the comparison of basic configuration method.In addition, in the 3rd collocation method, the treatment process of criticizing group identical with batch group of configuration earlier preferentially disposed, thereby in the time of carrying out when the plan that the device halted state restarts to handle generates, can shortening the generation plan.Like this, generate a plurality of plans simultaneously by feature is different separately first collocation method and the 3rd collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out first collocation method and the 4th collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described first collocation method is: according to basic configuration method configuration process operation, and but the stand-by time that described treatment process produced surpasses under the situation of the allowed time of standby in handling part, cancel the configuration of this treatment process, and from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again, wherein, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described the 4th collocation method is: according to described basic configuration method configuration process operation the time, but the treatment process that has in batch group of short treatment process of the allowed time of handling part standby is preferentially disposed.
According to the present invention, control part is according to basic configuration method configuration process operation, but and under the situation of stand-by time that this treatment process produced above the allowed time of standby in handling part, cancel the configuration of this treatment process, and in family tree from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again, thereby generate plan (first collocation method).Meanwhile, control part is according to basic configuration method configuration process operation, but and the treatment process of batch group of short treatment process of the allowed time with standby in handling part preferentially disposed (the 4th collocation method).
Therefore, when using the basic configuration method, generate plan by first collocation method, thus needn't in family tree, be in than the treatment process with the reason that can't dispose more the treatment process of subordinate be configured test, therefore can reduce test number (TN).Consequently, can shorten the time of generation plan with the comparison of basic configuration method.In addition, promptly allow to dispose physically short treatment process of allowed time, also can can't dispose, easily falling back in family tree takes place owing to guaranteeing the allowed time.Therefore, the 4th collocation method preferentially disposes short treatment process of allowed time, thereby therefore be easy to avoid can shorten the time of generation plan by can't disposing of causing of allowed time.Consequently, compare with the basic configuration method and can shorten the time of generation plan.Like this, generate a plurality of plans simultaneously by feature is different separately first collocation method and the 4th collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out second collocation method and the 3rd collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described second collocation method is: according to basic configuration method configuration process operation the time, after the processing beginning of organizing according to each batch of initial appointment comes the initial treatment process of each batch configuration set in proper order, the treatment process that described processing in next treatment process of each batch group is begun batch group of front preferentially disposes, wherein, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described the 3rd collocation method is: according to described basic configuration method configuration process operation the time, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed.
According to the present invention, control part is according to basic configuration method configuration process operation the time, after the processing beginning order of organizing according to each batch of initial appointment is to the initial treatment process of each batch configuration set, in next treatment process of each batch group, batch treatment process of organizing of handling the beginning front is preferentially disposed (second collocation method).Meanwhile, control part is according to basic configuration method configuration process operation, and under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed (the 3rd collocation method).
Therefore, when using the basic configuration method, generate plan, can avoid following situation, that is, because restriction physically and can't disposing, recall the situation that the configuration of treatment process such as family tree falls back by second collocation method.Therefore, can shorten the time of generation plan.In addition, in the 3rd collocation method, the treatment process of batch group identical with batch group of configuration is earlier preferentially disposed, thereby carrying out when the plan that the device halted state restarts to handle generates, can shorten the time of generation plan.Like this, generate a plurality of plans simultaneously by feature is different separately second collocation method and the 3rd collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out second collocation method and the 4th collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described second collocation method is: according to basic configuration method configuration process operation the time, after the processing beginning of organizing according to each batch of initial appointment comes the initial treatment process of each batch configuration set in proper order, the treatment process that described processing in next treatment process of each batch group is begun batch group of front preferentially disposes, wherein, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described the 4th collocation method is: according to described basic configuration method configuration process operation the time, but the treatment process that has in batch group of short treatment process of the allowed time of handling part standby is preferentially disposed.
According to the present invention, control part is according to basic configuration method configuration process operation the time, after the processing beginning order of organizing according to each batch of initial appointment is to the initial treatment process of each batch configuration set, in next treatment process of each batch group, batch treatment process of organizing of handling the beginning front is preferentially disposed (second collocation method).Meanwhile, control part is according to basic configuration method configuration process operation, but and the treatment process of batch group of short treatment process of the allowed time with standby in handling part preferentially disposed (the 4th collocation method).
Therefore, when using the basic configuration method, generate plan by second collocation method, thereby can avoid following situation, that is, because restriction physically and can't disposing, recall the situation that the configuration of treatment process such as family tree falls back.Therefore, can shorten the time of generation plan.In addition,, also can can't dispose, in family tree, fall back easily owing to guaranteeing the allowed time even physically can be configured to short treatment process of allowed time.Therefore, the 4th collocation method preferentially disposes short treatment process of allowed time, thereby therefore be easy to avoid can shorten the time of generation plan by can't disposing of causing of allowed time.Consequently, compare with the basic configuration method and can shorten the time of generation plan.Like this, generate a plurality of plans simultaneously by feature is different separately second collocation method and the 4th collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: carry out the 3rd collocation method and the 4th collocation method, thereby generate the step of a plurality of plans, when generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning; Two above-mentioned steps are carried out by described control part, described the 3rd collocation method is: according to basic configuration method configuration process operation the time, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, treatment process to described batch of group preferentially disposes, wherein, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, when exploring described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process, described the 4th collocation method is: according to described basic configuration method configuration process operation the time, but the treatment process that has in batch group of short treatment process of the allowed time of handling part standby is preferentially disposed.
According to the present invention, control part is according to basic configuration method configuration process operation, and under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed (the 3rd collocation method).Meanwhile, control part is according to basic configuration method configuration process operation, but and the treatment process of batch group of short treatment process of the allowed time with standby in handling part preferentially disposed (the 4th collocation method).
Therefore, in the 3rd collocation method, carrying out when the plan that restarts to handle of device halted state generates, can shorten the time of generation plan.In addition,, also can can't dispose, occur in falling back in the family tree easily owing to guaranteeing the allowed time even physically can be configured to short treatment process of allowed time.Therefore, the 4th collocation method preferentially disposes short treatment process of allowed time, thereby is easy to avoid because therefore can't disposing of causing of allowed time can shorten the time of generation plan.Consequently, compare with the basic configuration method and can shorten the time of generation plan.Like this, generate a plurality of plans simultaneously by feature is different separately the 3rd collocation method and the 4th collocation method, selected to finish at the appointed time a plan of plan, thereby can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
And in the present invention, preferably in the step of selecting described plan, described control part is finished unique plan of processing the earliest from the selection of finishing at the appointed time in the works.
If it is a plurality of that the plan of finishing at the appointed time has, then select wherein to finish the plan of processing the earliest, thereby can improve the running rate of device.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: according to the step of basic configuration method configuration process operation; And generate the step of plan with special collocation method; Two above-mentioned steps are carried out by described control part, described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest is used as next treatment process, described special collocation method is: but the stand-by time that described treatment process is produced according to described basic configuration method configuration process operation the time surpasses under the situation of the allowed time of standby in handling part, cancel the configuration of this treatment process, and from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again.
According to the present invention, control part is according to the family tree of having represented with the corresponding combination of processing order of each treatment process of each batch group, after the initial treatment process of any one batch of configuration group, be when basic point is explored family tree with this treatment process, in next treatment process of each batch group, the treatment process of batch group the earliest of the end predetermined instant in these pretreatment procedures is configured as next treatment process, thereby generates plan (basic configuration method) in advance.Meanwhile, control part is also used special collocation method, but surpass under the situation of the allowed time of standby in handling part in the stand-by time that this treatment process produced, cancel the configuration of this treatment process, and in family tree from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again, thereby generate plan (special collocation method).
Therefore, use the basic configuration method to generate plan in advance, thereby can repeatedly dispose the subsequent job of pretreatment procedure and the preceding continuous operation of postprocessing working procedures, with the FEFO pretreatment procedure batch the group treatment process as next treatment process, and described next treatment process of preferential selection configuration, thereby can generate the plan that can shorten to the time till next treatment process finishes in advance.In addition, in special collocation method,, therefore can reduce test number (TN) owing to not carrying out in family tree, being positioned at than the more configuration test of the treatment process of subordinate of the treatment process with the reason that can't dispose.Consequently, compare, can shorten the time of generation plan, can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate with the plan generation of only using the basic configuration method.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, the step of next treatment process of each batch of search configuration group; When next treatment process of search configuration, according to the processing beginning order of each batch of initial appointment group to each batch configuration set after the initial treatment process, the treatment process that described processing in next treatment process of each batch group is begun batch group of front preferentially disposes, thereby generate the step of plan, two above-mentioned steps are carried out by described control part.
According to the present invention, control part is according to the family tree of having represented with the corresponding combination of processing order of each treatment process of each batch group, after the initial treatment process of any one batch of configuration group, be when basic point is explored family tree with this treatment process, during next treatment process of each batch of search configuration group, after the processing beginning order of organizing according to each batch of initial appointment is to the initial treatment process of each batch configuration set, in next treatment process of each batch group, the treatment process that described processing is begun batch group of front preferentially disposes.
Therefore, plan by before carrying out processing, generating in advance, thereby can repeatedly dispose, therefore can shorten to the time till next treatment process finishes the subsequent job of pretreatment procedure and the preceding continuous operation of postprocessing working procedures.In addition, by batch treatment process of organizing of handling the beginning front is preferentially disposed, thereby when behind the operation piece that has disposed certain batch group, disposing the operation piece of different batch groups, can avoid following situation, promptly, because physically restriction and can't disposing, recall the situation that the configuration of treatment process such as family tree falls back.Consequently, can shorten the time of generation plan, can avoid producing invalid stand-by time, thereby improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, the step of next treatment process of each batch of search configuration group; When next treatment process of search configuration, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, treatment process to described batch of group preferentially disposes, thereby generate the step of plan, two above-mentioned steps are carried out by described control part.
According to the present invention, control part is according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, after the initial treatment process of any one batch of configuration group, be when basic point is explored family tree with this treatment process, during next treatment process of each batch of search configuration group, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed.
Therefore, by before carrying out processing, generating plan in advance, thereby can repeatedly dispose the subsequent job of pretreatment procedure and the preceding continuous operation of postprocessing working procedures, batch treatment process of organizing of FEFO pretreatment procedure is preferentially selected configuration as next treatment process, thereby can generate the plan that can shorten to the time till next treatment process finishes in advance.In addition, preferentially dispose by treatment process to batch group identical with batch group of configuration earlier, thereby in the time of carrying out when the plan that the device halted state restarts to handle generates, can shortening the generation plan.Consequently, can prevent to plan the rise time increase, avoid producing invalid stand-by time and improve running rate.
The present invention is a kind of scheduling method of substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that, may further comprise the steps: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, the step of next treatment process of each batch of search configuration group; When next treatment process of search configuration, but batch treatment process of organizing that has in short treatment process of the allowed time of handling part standby is preferentially disposed, thereby generate the step of planning, two above-mentioned steps are carried out by described control part.
According to the present invention, control part is according to the family tree of the expression combination corresponding with the processing order of each treatment process of each batch group, after the initial treatment process of any one batch of configuration group, be when basic point is explored family tree with this treatment process, during next treatment process of each batch of search configuration group, but the treatment process of batch group of short treatment process of the allowed time with standby in handling part is preferentially disposed.
Therefore, plan by before carrying out processing, generating in advance, thereby can repeatedly dispose, can generate the plan that can shorten to the time till next treatment process finishes in advance the subsequent job of pretreatment procedure and the preceding continuous operation of postprocessing working procedures.But, even physically can be configured, also can can't dispose owing to guaranteeing the allowed time to short treatment process of allowed time, occur in falling back in the family tree easily.Therefore, by short treatment process of allowed time is preferentially disposed, thereby therefore be easy to avoid can shorten the time of generation plan by can't disposing of causing of allowed time.Consequently, can prevent to plan the rise time increase, can avoid producing invalid stand-by time, thereby improve running rate.
Description of drawings
Fig. 1 is the vertical view of schematic configuration of the substrate board treatment of expression embodiment.
Fig. 2 is the block diagram of schematic configuration of the substrate board treatment of expression embodiment.
Fig. 3 is the process flow diagram of the master routine of expression plan.
Fig. 4 is the process flow diagram of the flow process of expression basic configuration method.
Fig. 5 A is the concrete example of single batch the sequential chart of criticizing group 1.
Fig. 5 B is the concrete example of single batch the sequential chart of criticizing group 2.
Fig. 6 is the synoptic diagram of combination example of the plan of expression basic configuration method.
Fig. 7 A is the sequential chart of step 1 of the layoutprocedure of expression basic configuration method.
Fig. 7 B is the sequential chart of step 2 of the layoutprocedure of expression basic configuration method.
Fig. 7 C is the sequential chart of step 3 of the layoutprocedure of expression basic configuration method.
Fig. 8 A is the sequential chart of step 4 of the layoutprocedure of expression basic configuration method.
Fig. 8 B is the sequential chart of step 5 of the layoutprocedure of expression basic configuration method.
Fig. 8 C is the sequential chart of step 6 of the layoutprocedure of expression basic configuration method.
Fig. 9 A is the sequential chart of step 7 of the layoutprocedure of expression basic configuration method.
Fig. 9 B is the sequential chart of step 8 of the layoutprocedure of expression basic configuration method.
Fig. 9 C is the sequential chart of step 9 of the layoutprocedure of expression basic configuration method.
Figure 10 A is the sequential chart of step 10 of the layoutprocedure of expression basic configuration method.
Figure 10 B is the sequential chart of step 11 of the layoutprocedure of expression basic configuration method.
Figure 10 C is the sequential chart of step 12 of the layoutprocedure of expression basic configuration method.
Figure 11 A is the sequential chart of step 13 of the layoutprocedure of expression basic configuration method.
Figure 11 B is the sequential chart of step 14 of the layoutprocedure of expression basic configuration method.
Figure 11 C is the sequential chart of step 15 of the layoutprocedure of expression basic configuration method.
Figure 12 A is the sequential chart of step 16 of the layoutprocedure of expression basic configuration method.
Figure 12 B is the sequential chart of step 17 of the layoutprocedure of expression basic configuration method.
Figure 12 C is the sequential chart of step 18 of the layoutprocedure of expression basic configuration method.
Figure 13 A is the sequential chart of step 19 of the layoutprocedure of expression basic configuration method.
Figure 13 B is the sequential chart of step 20 of the layoutprocedure of expression basic configuration method.
Figure 13 C is the sequential chart of step 21 of the layoutprocedure of expression basic configuration method.
Figure 14 A is the sequential chart of step 22 of the layoutprocedure of expression basic configuration method.
Figure 14 B is the sequential chart of step 23 of the layoutprocedure of expression basic configuration method.
Figure 14 C is the sequential chart of step 24 of the layoutprocedure of expression basic configuration method.
Figure 15 A is the sequential chart of step 25 of the layoutprocedure of expression basic configuration method.
Figure 15 B is the sequential chart of step 26 of the layoutprocedure of expression basic configuration method.
Figure 15 C is the sequential chart of step 27 of the layoutprocedure of expression basic configuration method.
Figure 16 A is the sequential chart of step 28 of the layoutprocedure of expression basic configuration method.
Figure 16 B is the sequential chart of step 29 of the layoutprocedure of expression basic configuration method.
Figure 16 C is the sequential chart of step 30 of the layoutprocedure of expression basic configuration method.
Figure 17 A is the sequential chart of step 31 of the layoutprocedure of expression basic configuration method.
Figure 17 B is the sequential chart of step 32 of the layoutprocedure of expression basic configuration method.
Figure 17 C is the sequential chart of step 33 of the layoutprocedure of expression basic configuration method.
Figure 18 A is the sequential chart of step 34 of the layoutprocedure of expression basic configuration method.
Figure 18 B is the sequential chart of step 35 of the layoutprocedure of expression basic configuration method.
Figure 18 C is the sequential chart of step 36 of the layoutprocedure of expression basic configuration method.
Figure 19 A is the sequential chart of step 37 of the layoutprocedure of expression basic configuration method.
Figure 19 B is the sequential chart of step 38 of the layoutprocedure of expression basic configuration method.
Figure 19 C is the sequential chart of step 39 of the layoutprocedure of expression basic configuration method.
Figure 20 A is the sequential chart of step 40 of the layoutprocedure of expression basic configuration method.
Figure 20 B is the sequential chart of step 41 of the layoutprocedure of expression basic configuration method.
Figure 20 C is the sequential chart of step 42 of the layoutprocedure of expression basic configuration method.
Figure 21 A is the sequential chart of step 43 of the layoutprocedure of expression basic configuration method.
Figure 21 B is the sequential chart of step 44 of the layoutprocedure of expression basic configuration method.
Figure 22 is the process flow diagram of the flow process of expression first collocation method.
Figure 23 is the synoptic diagram of combination example of the plan of expression first collocation method.
Figure 24 A is the sequential chart of step 1 of the layoutprocedure of expression first collocation method.
Figure 24 B is the sequential chart of step 2 of the layoutprocedure of expression first collocation method.
Figure 24 C is the sequential chart of step 3 of the layoutprocedure of expression first collocation method.
Figure 25 A is the sequential chart of step 4 of the layoutprocedure of expression first collocation method.
Figure 25 B is the sequential chart of step 5 of the layoutprocedure of expression first collocation method.
Figure 25 C is the sequential chart of step 6 of the layoutprocedure of expression first collocation method.
Figure 26 A is the sequential chart of step 7 of the layoutprocedure of expression first collocation method.
Figure 26 B is the sequential chart of step 8 of the layoutprocedure of expression first collocation method.
Figure 26 C is the sequential chart of step 9 of the layoutprocedure of expression first collocation method.
Figure 27 A is the sequential chart of step 10 of the layoutprocedure of expression first collocation method.
Figure 27 B is the sequential chart of step 11 of the layoutprocedure of expression first collocation method.
Figure 27 C is the sequential chart of step 12 of the layoutprocedure of expression first collocation method.
Figure 28 A is the sequential chart of step 13 of the layoutprocedure of expression first collocation method.
Figure 28 B is the sequential chart of step 14 of the layoutprocedure of expression first collocation method.
Figure 28 C is the sequential chart of step 15 of the layoutprocedure of expression first collocation method.
Figure 29 A is the sequential chart of step 16 of the layoutprocedure of expression first collocation method.
Figure 29 B is the sequential chart of step 17 of the layoutprocedure of expression first collocation method.
Figure 29 C is the sequential chart of step 18 of the layoutprocedure of expression first collocation method.
Figure 30 A is the sequential chart of step 19 of the layoutprocedure of expression first collocation method.
Figure 30 B is the sequential chart of step 20 of the layoutprocedure of expression first collocation method.
Figure 30 C is the sequential chart of step 21 of the layoutprocedure of expression first collocation method.
Figure 31 A is the sequential chart of step 22 of the layoutprocedure of expression first collocation method.
Figure 31 B is the sequential chart of step 23 of the layoutprocedure of expression first collocation method.
Figure 31 C is the sequential chart of step 24 of the layoutprocedure of expression first collocation method.
Figure 32 A is the sequential chart of step 25 of the layoutprocedure of expression first collocation method.
Figure 32 B is the sequential chart of step 26 of the layoutprocedure of expression first collocation method.
Figure 32 C is the sequential chart of step 27 of the layoutprocedure of expression first collocation method.
Figure 33 A is the sequential chart of step 28 of the layoutprocedure of expression first collocation method.
Figure 33 B is the sequential chart of step 29 of the layoutprocedure of expression first collocation method.
Figure 33 C is the sequential chart of step 30 of the layoutprocedure of expression first collocation method.、
Figure 34 A is the sequential chart of step 31 of the layoutprocedure of expression first collocation method.
Figure 34 B is the sequential chart of step 32 of the layoutprocedure of expression first collocation method.
Figure 34 C is the sequential chart of step 33 of the layoutprocedure of expression first collocation method.
Figure 35 A is the sequential chart of step 34 of the layoutprocedure of expression first collocation method.
Figure 35 B is the sequential chart of step 35 of the layoutprocedure of expression first collocation method.
Figure 35 C is the sequential chart of step 36 of the layoutprocedure of expression first collocation method.
Figure 36 is the process flow diagram of the flow process of expression second collocation method.
Figure 37 is the synoptic diagram of combination example of the plan of expression second collocation method.
Figure 38 A is the sequential chart of step 1 of the layoutprocedure of expression second collocation method.
Figure 38 B is the sequential chart of step 2 of the layoutprocedure of expression second collocation method.
Figure 38 C is the sequential chart of step 3 of the layoutprocedure of expression second collocation method.
Figure 39 A is the sequential chart of step 4 of the layoutprocedure of expression second collocation method.
Figure 39 B is the sequential chart of step 5 of the layoutprocedure of expression second collocation method.
Figure 39 C is the sequential chart of step 6 of the layoutprocedure of expression second collocation method.
Figure 40 A is the sequential chart of step 7 of the layoutprocedure of expression second collocation method.
Figure 40 B is the sequential chart of step 8 of the layoutprocedure of expression second collocation method.
Figure 40 C is the sequential chart of step 9 of the layoutprocedure of expression second collocation method.
Figure 41 A is the sequential chart of step 10 of the layoutprocedure of expression second collocation method.
Figure 41 B is the sequential chart of step 11 of the layoutprocedure of expression second collocation method.
Figure 41 C is the sequential chart of step 12 of the layoutprocedure of expression second collocation method.
Figure 42 A is the sequential chart of step 13 of the layoutprocedure of expression second collocation method.
Figure 42 B is the sequential chart of step 14 of the layoutprocedure of expression second collocation method.
Figure 42 C is the sequential chart of step 15 of the layoutprocedure of expression second collocation method.
Figure 43 A is the concrete example of single batch the sequential chart of criticizing group 1.
Figure 43 B is the concrete example of single batch the sequential chart of criticizing group 2.
Figure 43 C is the concrete example of single batch the sequential chart of criticizing group 3.
Figure 44 is that expression uses the basic configuration method to handle 3 synoptic diagram of criticizing the combination example of the plan when organizing.
Figure 45 is the synoptic diagram of combination example that is illustrated in the plan of the basic configuration methods under the situation of 3 batches of groups.
Figure 46 A, 46B are illustrated in the layoutprocedure of 3 batches of basic configuration methods under the situation about organizing, and are the sequential charts of De Zhuan before the expression beginning.
Figure 46 C is the sequential chart of step 1 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 47 A is the sequential chart of step 2 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 47 B is the sequential chart of step 3 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 47 C is the sequential chart of step 4 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 48 A is the sequential chart of step 5 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 48 B is the sequential chart of step 6 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 48 C is the sequential chart of step 7 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 49 A is the sequential chart of step 8 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 49 B is the sequential chart of step 9 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 49 C is the sequential chart of step 10 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 50 A is the sequential chart of step 11 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 50 B is the sequential chart of step 12 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 50 C is the sequential chart of step 13 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 51 is the sequential chart of step 14 that is illustrated in the layoutprocedure of the basic configuration methods under the situation of 3 batches of groups.
Figure 52 is the process flow diagram of the flow process of expression the 3rd collocation method.
Figure 53 is the synoptic diagram of combination example of the plan of expression the 3rd collocation method.
Figure 54 is the synoptic diagram of combination example of the plan of expression the 3rd collocation method.
Figure 55 A, 55B represent the layoutprocedure of the 3rd collocation method, are the sequential charts of De Zhuan before the expression beginning.
Figure 55 C is the sequential chart of step 1 of the layoutprocedure of expression the 3rd collocation method.
Figure 56 A is the sequential chart of step 2 of the layoutprocedure of expression the 3rd collocation method.
Figure 56 B is the sequential chart of step 3 of the layoutprocedure of expression the 3rd collocation method.
Figure 56 C is the sequential chart of step 4 of the layoutprocedure of expression the 3rd collocation method.
Figure 57 A is the sequential chart of step 5 of the layoutprocedure of expression the 3rd collocation method.
Figure 57 B is the sequential chart of step 6 of the layoutprocedure of expression the 3rd collocation method.
Figure 57 C is the sequential chart of step 7 of the layoutprocedure of expression the 3rd collocation method.
Figure 58 A is the sequential chart of step 8 of the layoutprocedure of expression the 3rd collocation method.
Figure 58 B is the sequential chart of step 9 of the layoutprocedure of expression the 3rd collocation method.
Figure 58 C is the sequential chart of step 10 of the layoutprocedure of expression the 3rd collocation method.
Figure 59 A is the sequential chart of step 11 of the layoutprocedure of expression the 3rd collocation method.
Figure 59 B is the sequential chart of step 12 of the layoutprocedure of expression the 3rd collocation method.
Figure 60 is the process flow diagram of the flow process of expression the 4th collocation method.
Figure 61 is the synoptic diagram of combination example of the plan of expression the 4th collocation method.
Figure 62 A is the sequential chart of step 1 of the layoutprocedure of expression the 4th collocation method.
Figure 62 B is the sequential chart of step 2 of the layoutprocedure of expression the 4th collocation method.
Figure 62 C is the sequential chart of step 3 of the layoutprocedure of expression the 4th collocation method.
Figure 63 A is the sequential chart of step 4 of the layoutprocedure of expression the 4th collocation method.
Figure 63 B is the sequential chart of step 5 of the layoutprocedure of expression the 4th collocation method.
Figure 63 C is the sequential chart of step 6 of the layoutprocedure of expression the 4th collocation method.
Figure 64 A is the sequential chart of step 7 of the layoutprocedure of expression the 4th collocation method.
Figure 64 B is the sequential chart of step 8 of the layoutprocedure of expression the 4th collocation method.
Figure 64 C is the sequential chart of step 9 of the layoutprocedure of expression the 4th collocation method.
Figure 65 A is the sequential chart of step 10 of the layoutprocedure of expression the 4th collocation method.
Figure 65 B is the sequential chart of step 11 of the layoutprocedure of expression the 4th collocation method.
Figure 65 C is the sequential chart of step 12 of the layoutprocedure of expression the 4th collocation method.
Figure 66 A is the sequential chart of step 13 of the layoutprocedure of expression the 4th collocation method.
Figure 66 B is the sequential chart of step 14 of the layoutprocedure of expression the 4th collocation method.
Figure 66 C is the sequential chart of step 15 of the layoutprocedure of expression the 4th collocation method.
Embodiment
Below, with reference to the accompanying drawings to a preferred embodiment of the present invention will be described in detail.
Below, with reference to accompanying drawing embodiments of the invention are described.
Fig. 1 is the vertical view of schematic configuration of the substrate board treatment of expression embodiment.
This substrate board treatment for example is to be used for substrate W is implemented the device that soup is handled, cleaned processing and dried.A plurality of (for example 25) substrate W of horizontal attitude is with respect to FOUP (Front OpeningUnified Pod: the front opening film magazine) 1 be contained among the FOUP to erect attitude.The FOUP1 of ccontaining untreated substrate W is carried on the throw-in part 3.Throw-in part 3 has the plummer 5 of two carrying FOUP1.Taking-up portion 7 is equipped with on substrate board treatment, across central portion and throw-in part 3 relative sides.The substrate W that this taking-up portion 7 will finish processing is contained among the FOUP1 and takes out whole FOUP1.Taking-up portion 7 with this function similarly has two plummers 9 that are used to carry FOUP1 with throw-in part 3.
On the position of throw-in part 3 and taking-up portion 7, dispose the first carrying mechanism CTC that can between them, move.The first carrying mechanism CTC takes out a plurality of substrate W from the FOUP1 that the plummer 5 at throw-in part 3 carries, and after the attitude with substrate W is transformed to vertical direction from horizontal direction, to second carrying mechanism WTR handing-over substrate W.In addition, the first carrying mechanism CTC is transformed to horizontal direction from vertical direction, ccontaining substrate W in the FOUP1 of taking-up portion 7 with the attitude of substrate W after having accepted to finish the substrate W of processing from the second carrying mechanism WTR.The second carrying mechanism WTR can move along the length direction of substrate board treatment.
Front side at the moving direction of the above-mentioned second carrying mechanism WTR is equipped with two LPD1 of dried portion, and LPD2 is used for a plurality of substrate W are contained in and carries out drying in the low-pressure chamber.
On the moving direction of the second carrying mechanism WTR, with the LPD2 of dried portion position adjacent on first handling part 19 is equipped with.This first handling part 19 possesses pure water and cleans handling part ONB1, and it is used for that a plurality of substrate W are implemented pure water cleans and handle, and this first handling part 19 possesses soup handling part CHB1, and it uses treating fluid that a plurality of substrate W are implemented soups and handles.In addition, possess secondary carrying mechanism LF1 between clean handling part ONB1 of this pure water and soup handling part CHB1, it cleans carrying substrate W between handling part ONB1 and the soup handling part CHB1 at this pure water.This pair carrying mechanism LF1 carries out board carrying in first handling part 19, and with second carrying mechanism WTR handing-over substrate W.
With first handling part, 19 position adjacent on second handling part 20 is equipped with.This second handling part 20 has and the identical structure of above-mentioned first handling part 19.Promptly this second handling part 20 possesses pure water clean handling part ONB2, soup handling part CHB2, secondary carrying mechanism LF2.
In addition, with second handling part, 20 position adjacent on the 3rd handling part 21 is equipped with.The 3rd handling part 21 possesses pure water and cleans handling part ONB3, soup handling part CHB3, secondary carrying mechanism LF3.
In addition, with the 3rd handling part 21 position adjacent on the 4th handling part 22 is equipped with.The 4th handling part 22 possesses pure water and cleans handling part ONB4, soup handling part CHB4, secondary carrying mechanism LF4.
And the first carrying mechanism CTC, the second carrying mechanism WTR, the LPD1 of dried portion, LPD2, first handling part 19 (pure water is cleaned handling part ONB1, soup handling part CHB1, secondary carrying mechanism LF1), second handling part 20 (pure water is cleaned handling part ONB2, soup handling part CHB2, secondary carrying mechanism LF2), the 3rd handling part 21 (pure water is cleaned handling part ONB3, soup handling part CHB3, secondary carrying mechanism LF3), the 4th handling part 22 (pure water is cleaned handling part ONB4, soup handling part CHB4, secondary carrying mechanism LF4) are equivalent to " handling part " of the present invention.
Substrate board treatment with said structure shown in the block diagram of Fig. 2, carries out integral body control by control part 31.
In addition, store in storage part 37: " stipulated time ", it is equivalent to the binding hours of scheme of arrangement; " allowed time " is the time that can allow, just when the arrangement step piece and the stand-by time between the subsequent processing piece; " the configuration starting position " relevant with the positional information of arrangement step piece; Each data (family tree) etc. of the combination of the operation piece of a plurality of batches of groups in the works of expression.
A plurality of substrate W ccontaining among the FOUP1 that plan function portion 33 will carry on throw-in part 3 handle as one batch of group, according to being stored in method for making in the storage part 37 in advance by device operator indication, actual begin to handle before, use various scheduling method described later to generate a plurality of plans, thereby the treatment process (operation piece) of each batch group can be disposed effectively according to sequential.
The various plans that generated by plan function portion 33 are stored in the storage part 37, processing execution instruction unit 35 is according to from described various plans of selecting in the works, carry out the action indication relevant in the suitable moment, wherein as described later from the method for described various plans of selecting in the works with the processing of each handling part etc.
By various scheduling methods, the Configuration Control Board 39 of plan function portion 33 is selected to accept or reject the operation piece, and the test that is configured.
The function of the plan time monitoring portion 41 of plan function portion 33 is: by timer (diagram omit) to carrying out timing from the moment institute's elapsed time that begins to carry out various scheduling methods, the time of instrumentation till the stipulated time.
The plan that the plan selection portion 43 of plan function portion 33 finishes the earliest from the selection of finishing at the appointed time in the works, and should plan notifier processes and carry out instruction unit 35.
Step S1, S2
Judge whether object is criticized the group number suitable, thus branch process.Handle in appropriate circumstances and change step S3 over to, under unsuitable situation, change step S2 abnormal ending over to.
Step S3～S5
By the various scheduling methods of following explanation, the generation that begins to plan (step S3).Meanwhile, begin the supervision (step S4) of stipulated time, before the process stipulated time, continue timing (step S5) by plan time monitoring portion 41.
Step S6, S7
Generating in the works by various scheduling methods, coming branch process according to whether having finished a plan at least.Under situation about not finishing,, carry out again from step S1 as batch unsuitable situation of group number.On the other hand, under the situation of having finished at least one plan, select planning.In addition, under the situation of only finishing a plan, select this plan, under the situation of having finished a plurality of plans, therefrom select to finish predetermined instant plan the earliest.In addition, also can when only having finished a plan, select this plan at the appointed time.
＜basic configuration method 〉
Fig. 4 is the process flow diagram of the flow process of expression basic configuration method.Fig. 5 A represents the concrete example of single batch the sequential chart of criticizing group 1.Fig. 5 B represents the concrete example of single batch the sequential chart of criticizing group 2.
For the ease of understanding invention, below as shown in Figure 5, describe as example to use the method for making of more simplifying than actual recipe to handle batch situation of group.Particularly, this method for making comprises: the treatment process relevant with the transportation processing of being undertaken by the first carrying mechanism CTC (operation piece A), clean the relevant treatment process (operation piece B) of the clean processing of pure water that handling part ONB1 carries out with the transportation processing of being undertaken and by the pure water of first handling part 19 by the second carrying mechanism WTR, with the transportation processing of being undertaken and the relevant treatment process (operation piece C) of dried of being undertaken by the LPD1 of dried portion by the second carrying mechanism WTR, with the transportation processing of being undertaken and the relevant treatment process (operation piece D) of transportation processing of being undertaken by the first carrying mechanism CTC by the second carrying mechanism WTR.In addition, in the following description, the treatment process of monomer or a plurality of treatment process that need to dispose continuously are called " operation piece ".And, in order in a plurality of batches of groups, to be easy to Qu Do to the such Reference numeral of operation piece mark " batch group-operation piece ".That is the operation piece A of Reference numeral " 1-A " expression batch group 1.
In above-mentioned method for making, under the situation that preferentially will criticize group 1 initial configuration operation piece 1-A, have the combination of operation piece as shown in Figure 6.Fig. 6 is the synoptic diagram (family tree) of combination example of the plan of expression basic configuration method.Numeral among this Fig. 6 in the frame of broken lines is corresponding with the number of steps in the following explanation.
Step T1, T2
Obtain initial operation piece, exist this operation piece of obtaining with processing branch according to judging whether.
Step T3, T4
Retrieval finishes predetermined instant preceding operation piece the earliest.At this moment, because there is not preceding operation piece in the operation piece of initial configuration, therefore preceding operation piece in this case will be indicated the end predetermined instant of batch moment (beginning predetermined instant) of group beginning as preceding operation piece.Then, configuration finishes predetermined instant operation piece the earliest.
Step T5～T7
Satisfy " configuration condition " according to whether and will handle branch, described " configuration condition " is meant, each batch group is not conflicted in each one, and because of be configured and preceding operation piece between the stand-by time that produces above the allowed time etc.Satisfying under the situation of configuration condition, obtaining the subsequent processing piece of the operation piece of this configuration.Then, before having been disposed, whole operation pieces repeats above-mentioned steps T3.
Step T8, T9
In above-mentioned steps T2, when not having the operation piece, change step T8 over to.Then, according to whether existence obtains the preceding operation piece that is disposed, will handle branch again.Under the situation that does not have the operation piece, change processing over to step T9, move the mode of this configuration starting position later on and come the stored configuration position.
Step T10, T11
In above-mentioned steps T8, under the situation of the operation piece that before existence obtains, is disposed, change processing over to step T10, end the configuration of this operation piece.Then, end this operation piece and the configuration of the operation piece obtained simultaneously, return step T2.
Step T12
In above-mentioned steps T5, under the situation that does not satisfy configuration condition, in step T12, get rid of the operation piece that can't dispose.Then, return step T2.
Here, with reference to Fig. 7～21, concrete plan generation is described.Fig. 7～Figure 21 is the sequential chart of the layoutprocedure of expression basic configuration method.
Indication batch group 1 begins earlier to handle than batch group 2, indicates in the moment shown in Fig. 7 A (down to arrow).Then, at first the operation piece A (Reference numeral 1-A) that finishes predetermined instant (beginning predetermined instant) batch group 1 early is configured (step 1).Then, end predetermined instant (beginning predetermined instant) to batch end predetermined instant of the operation piece A (Reference numeral 1-A) of group 1 and batch group 2 compares, because the end predetermined instant of batch group 2 early, crowd operation piece A (Reference numeral 2-A) of group 2 is configured in crowd operation piece A (Reference numeral 1-A) of group 1 (Fig. 7 B, step 2) afterwards.But, because in handling by the first identical carrying mechanism CTC, the operation piece A (Reference numeral 1-A) of batch group 1 conflicts with crowd operation piece B (Reference numeral 2-B) of group 2, therefore can't dispose crowd operation piece A (Reference numeral 2-A) of group 2.Therefore, then will criticize group 1 operation piece B (Reference numeral 1-B) and be configured in crowd operation piece A (Reference numeral 1-A) of group 1 (Fig. 7 C, step 3) afterwards.
Step 4～6
Batch end predetermined instant of the operation piece B (Reference numeral 1-B) of group 1 and batch end predetermined instant (beginning predetermined instant) of group 2 are compared, because the end predetermined instant of batch group 2 is early, so operation piece A (Reference numeral 2-A) (Fig. 8 A, the step 4) of configuration batch group 2.Then, batch end predetermined instant of the operation piece B of group 1 and batch end predetermined instant of the operation piece B (Reference numeral 2-B) of group 2 are compared, because the end predetermined instant of operation piece 2-A early, therefore operation piece B (Reference numeral 2-B) (Fig. 8 B, the step 5) of group 2 criticized in configuration.Then, batch end predetermined instant of the operation piece B (Reference numeral 1-B) of group 1 and batch end predetermined instant of the operation piece B (Reference numeral 2-B) of group 2 are compared, because it is Zao that operation piece 1-B finishes predetermined instant than operation piece 2-B, therefore operation piece C (Reference numeral 1-C) (Fig. 8 C, the step 6) of group 1 criticized in configuration.
End predetermined instant to operation piece 1-C and operation piece 2-B compares, because the end predetermined instant of operation piece 2-B early, therefore operation piece C (Reference numeral 2-C) (Fig. 9 A, the step 7) of group 2 criticized in configuration.Here, because the relation of the LPD1 of dried portion, operation piece 2-C must keep a little time interval to be configured with preceding operation piece 2-B.If wT is in the allowed time for this stand-by time, then can arrangement step piece 2-C, if but here stand-by time wT surpasses the allowed time then is considered as not satisfying configuration condition.Therefore, end the configuration of operation piece 2-C, and arrangement step piece 1-D (Fig. 9 B, step 8).Then, because batch group 1 has been disposed the finally operation piece 1-D of operation piece of conduct, so option only has operation piece 2-C.Therefore, dispose this operation piece 2-C (Fig. 9 C, step 9).Under this situation, in operation piece 2-C, produce stand-by time wT, suppose that this stand-by time wT surpasses the allowed time.
Owing to do not satisfy configuration condition, therefore end the configuration of its preceding operation piece 1-D and operation piece 1-C.Owing to do not have the option of arrangement step piece 2-C behind operation piece 1-C, therefore first arrangement step piece 2-C (Figure 10 A, step 10).Then, finish predetermined instant early owing to compare operation piece 1-B with operation piece 2-C, so arrangement step piece 1-C (Figure 10 B, step 11).Like this, the operation piece C (Reference numeral 2-C) that criticizes group 2 that does not take out of from the LPD1 of dried portion conflicts with crowd operation piece C (Reference numeral 1-C) of group 1.Therefore, first arrangement step piece 2-D (Figure 10 C, step 12) after operation piece 2-C.
Owing to disposed operation piece 2-D, option only has operation piece 1-C, so arrangement step piece 1-C (Figure 11 A, step 13).But, in operation piece 1-C, produce stand-by time wT, suppose that this stand-by time wT surpasses the allowed time.Therefore, end operation piece 2-D, the operation piece 2-C of configuration before this, the configuration of operation piece 2-B, and replace they and arrangement step piece 1-C (Figure 11 B, step 14).Then, be connected among operation piece 2-A and the operation piece 1-C and finish after the predetermined instant operation piece 2-A early arrangement step piece 2-B (Figure 11 C, step 15).
Operation piece 2-B and operation piece 1-C are compared, be connected on and finish predetermined instant operation piece 2-B early arrangement step piece 2-C (Figure 12 A, step 16) afterwards.Under this situation, the operation piece 1-C of batch group 1 conflicts with crowd operation piece 2-C of group 2 in the LPD1 of dried portion, does not therefore satisfy configuration condition.Therefore, replace operation piece 2-C arrangement step piece 1-D (Figure 12 B, step 17).Owing to batch group 1 has been disposed whole operation pieces, so option only has operation piece 2-C (Figure 12 C, step 18).But, suppose that stand-by time wT surpasses the allowed time.
Owing to do not have the option of arrangement step piece 1-D after operation piece 2-B, therefore first arrangement step piece 1-D (Figure 13 A, step 19) before operation piece 2-B.Then, be connected among operation piece 2-A and the operation piece 1-D and finish arrangement step piece 2-B (Figure 13 B, step 20) after the predetermined instant operation piece 2-A early.Then, be connected among operation piece 2-B and the operation piece 1-D and finish arrangement step piece 2-C (Figure 13 C, step 21) after the predetermined instant operation piece 2-B early.Here, suppose that stand-by time wT surpasses the allowed time.
Similarly repeat above-mentioned order, to two batches of group The test procedure piece configurations (Figure 14～Figure 18 A, step 22～34).This test is by 1～34 expression of the Reference numeral in the frame of broken lines among Fig. 6.
Therefore but in above-mentioned test, finally can't dispose whole operation pieces, shown in Figure 18 C, increase batch group 1 and batch input of group 2 revision test (Figure 18 B～Figure 21, step 35～44) more at interval.
By above-mentioned basic configuration method, in step 44, finish whole operation piece configurations.This test is by 1～44 expression of the Reference numeral in the frame of broken lines among Fig. 6.
By so above-mentioned, the plan function portion 33 that carries out the control part 31 of basic configuration method plans in advance: according to the data of having represented with the corresponding combination of method for making of each operation piece of each batch group (family tree of Fig. 6), behind the initial operation piece of any one batch of configuration group, with this operation piece is that basic point is explored family tree, and, in the operation piece, the operation piece that will finish predetermined instant batch group the earliest in these preceding operation pieces is configured as back operation piece after with each batch group.
Therefore, use the basic configuration method to plan in advance, can repeatedly dispose the subsequent job of preceding operation piece and the preceding continuous operation of back operation piece, with the operation piece of batch group of preceding operation piece FEFO as back operation piece, and preferentially select to dispose described back operation piece, thereby can generate the plan that to shorten the time till the operation block end of back in advance.
＜the first collocation method〉(reason that can't dispose)
Figure 22 is the process flow diagram of the flow process of expression first collocation method.Figure 23 is the synoptic diagram (family tree) of combination example of the plan of expression first collocation method.
And the step T1～T7 of step U1～U7 and above-mentioned basic configuration method is identical and omit this explanation.In addition, the step T8～T11 of step U8～U11 and above-mentioned basic configuration method is identical and omit this explanation.This first collocation method is equivalent to special collocation method of the present invention.
Step U12, U13
In step U5, under the situation that does not satisfy configuration condition, whether, stand-by time will handle branch (step U12) for surpassing the allowed time according to its reason.That is, be that stand-by time surpasses under the situation of allowed time in reason, the operation piece of obtaining is all got rid of (step U13).
Step U14
In above-mentioned steps U12, can't the arrangement step piece not being, only get rid of the operation piece that can't dispose because under the situation of stand-by time, change step U2 over to.
In above-mentioned method for making, batch group 1 is begun earlier, in first collocation method, generate under the situation of plan, there is the combination of operation piece as shown in figure 23.Figure 23 is the synoptic diagram (family tree) of combination example of the plan of expression first collocation method.In this Figure 23, the numeral in the frame of broken lines is corresponding with the number of steps of following explanation.
Here, with reference to Figure 24～Figure 35 concrete plan generation is described.In addition, Figure 24～Figure 35 is the sequential chart of the layoutprocedure of expression first collocation method.
In these steps,, therefore carry out the layoutprocedure identical (Figure 24 (step 1～3) and Figure 25 (step 4～6) with above-mentioned basic configuration method owing to the just conflict of batch group of the reason that can't dispose.
Operation piece 1-C and operation piece 2-B are compared, because the end predetermined instant of operation piece 2-B early, therefore operation piece C (Reference numeral 2-C) (Figure 26 A, the step 7) of group 2 criticized in configuration.If the stand-by time Wt of Chan Shenging is in the allowed time here, then can arrangement step piece 2-C, if but here stand-by time Wt surpass the allowed time, then can't satisfy configuration condition.Therefore get rid of operation piece 1-C and after operation piece 2-B arrangement step piece 2-C (Figure 26 B, step 8).Then, according to the end predetermined instant of operation piece 1-B and operation piece 2-C, arrangement step piece 1-C (Figure 26 C, step 9).
In step 9, before operation piece 1-C, produce stand-by time Wt, this stand-by time Wt surpasses the allowed time.After getting rid of operation piece 2-C and operation piece 2-B, arrangement step piece 1-C (Figure 27 A, step 10).Then, operation piece 2-A and operation piece 1-C are compared, configuration finishes predetermined instant operation piece 2-B (Figure 27 B, step 11) early.Then, operation piece 2-B and operation piece 1-C are compared, be connected on and finish to come arrangement step piece 2-C (Figure 27 C, step 12) after the predetermined instant operation piece 2-B early.
In step 12, before operation piece 2-C, produce stand-by time Wt, this stand-by time Wt surpasses the allowed time.After getting rid of operation piece 2-C and operation piece 2-B, owing to do not have the option of arrangement step piece 2-C after operation piece 2-B, so first arrangement step piece 1-D (Figure 28 A, step 13).Operation piece 2-A and operation piece 1-D are compared, and configuration finishes predetermined instant operation piece 2-B (Figure 28 B, step 14) early.Then, according to the end predetermined instant of operation piece 2-B and operation piece 1-D, be connected on operation piece 2-B arrangement step piece 2-C (Figure 28 C, step 15) afterwards.
In step 15, before operation piece 2-C, generate stand-by time Wt, this stand-by time Wt surpasses the allowed time.Get rid of operation piece 2-C, operation piece 2-B, operation piece 2-A, because the not option of arrangement step piece 1-C after operation piece 2-A, therefore first arrangement step piece 1-C (Figure 29 A, step 16) before operation piece 2-A.Then, the end predetermined instant of operation piece 1-C and the end predetermined instant (beginning predetermined instant) of batch group 2 are compared, because the end predetermined instant (beginning predetermined instant) of batch group 2 is early, so arrangement step piece 2-A (Figure 29 B, step 17).Then, operation piece 2-A and operation piece 1-C are compared, be connected on and finish predetermined instant operation piece 2-A early arrangement step piece 2-B (Figure 29 C, step 18) afterwards.
Operation piece 1-C and operation piece 2-B are compared, be connected on and finish after the predetermined instant operation piece 2-B early arrangement step piece 2-C (Figure 30 A, step 19).But here stand-by time Wt surpasses the allowed time.Therefore, get rid of operation piece 2-C and operation piece 2-B, replace they and arrangement step piece 1-D (Figure 30 B, step 20).Batch group 1 has been disposed whole operation pieces, so option only there is operation piece 2-B, arrangement step piece 2-B (Figure 30 C, step 21).
Because option only has the operation piece 2-C after the operation piece 2-B, so arrangement step piece 2-C (Figure 31 A, step 22).Here produce stand-by time Wt before operation piece 2-C, this stand-by time Wt surpasses the allowed time.Therefore, get rid of operation piece 2-C, operation piece 2-B, operation piece 2-A (Figure 31 B, step 23).Because option only has operation piece 2-A, so arrangement step piece 2-A (Figure 31 C, step 24).
Because option only has the operation piece 2-B after the operation piece 2-A, so arrangement step piece 2-B (Figure 32 A, step 25).Because ensuing option only has the operation piece 2-C after the operation piece 2-B, so arrangement step piece 2-C (Figure 32 B, step 26).Here produce stand-by time Wt before operation piece 2-C, this stand-by time Wt surpasses the allowed time.Owing in the combination of Figure 23, can't all dispose in the path, therefore increase batch group 1 and be configured again at interval with batch input of group 2.At first, configuration beginning predetermined instant operation piece 1-A (Figure 32 C, step 27) early.
In the end predetermined instant of operation piece 1-A and batch beginning predetermined instant of group 2, the beginning predetermined instant of batch group 2 early, so arrangement step piece 2-A (Figure 33 A, step 28).Because batch group 1 and batch group 2 are conflicted in the first carrying mechanism CTC, therefore cancel the configuration of operation piece 2-A, arrangement step piece 1-B (Figure 33 B, step 29).Batch beginning predetermined instant of group 2 and the end predetermined instant of operation piece 1-B are compared configuration beginning predetermined instant operation piece 2-A (Figure 33 C, step 30) early.
Operation piece 1-B and operation piece 2-A are compared,, therefore be connected on operation piece 2-A arrangement step piece 2-B (Figure 34 A, step 31) afterwards because the end predetermined instant of operation piece 2-A early.Then, operation piece 1-B and operation piece 1-C are compared, be connected on and finish after the predetermined instant operation piece 1-B early arrangement step piece 1-C (Figure 34 B, step 32).Then, in operation piece 1-C and operation piece 2-B,, therefore be connected on operation piece 2-B arrangement step piece 2-C (Figure 34 C, step 33) afterwards because the end predetermined instant of operation piece 2-B early.
But because batch group 1 is not also taken out of from the LPD1 of dried portion, therefore the operation piece 1-C of batch group 1 clashes with crowd operation piece 2-C of group 2.That is, operation piece 1-C and operation piece 2-C can not be adjacent to configuration.Therefore, get rid of operation piece 2-C, because option only has operation piece 1-D, so arrangement step piece 1-D (Figure 35 A, step 34).Owing to batch group 1 has been disposed whole operation pieces, so option only has operation piece 2-C, arrangement step piece 2-C (Figure 35 B, step 35).Behind arrangement step piece 2-C, because option only has operation piece 2-D, so arrangement step piece 2-D (Figure 35 C, step 36).
If use above-mentioned first collocation method, compare and to finish whole operation piece configurations by 36 less steps with 44 steps of basic configuration method.This test is shown in the Reference numeral in the frame of broken lines among Figure 23 1～36.
Use first collocation method like this, according to above-mentioned basic configuration method arrangement step piece, and but the stand-by time that this operation piece is produced surpasses under the situation of the allowed time of standby in handling part, cancel the configuration of this operation piece, and the data (family tree of Figure 23) of the corresponding combination of method for making of each operation piece of organizing according to expression and each batch, from than the take-off point of this operation piece upper level also the take-off point of upper level begin to search for again the plan of generating.Therefore, needn't be in family tree, being positioned at than the more test that is configured of the chunk of subordinate of the operation piece with the reason that can't dispose, thus can reduce test number (TN).Consequently, can shorten the time of the plan made from above-mentioned basic configuration method comparison.
＜the second collocation method〉(dropping into batch group order)
Figure 36 is the process flow diagram of flow process of expression second collocation method, and Figure 37 is the synoptic diagram (family tree) of combination example of the plan of expression second collocation method.
In addition, the step T1 of step V1, V2, V4～V7 and above-mentioned basic configuration method, T2, T4～T7 are identical and omit this detailed description.This second collocation method is equivalent to " scheduling method of substrate board treatment " of the present invention.
Step V3
In the operation piece of obtaining, batch beginning predetermined instant of group operation piece is early retrieved.
Step V8～V11
Only step U8～11 of the step T8～T11 of step V9 and V11 and basic configuration method and first collocation method are different.That is, for having batch group that stand-by time surpasses the operation piece of allowed time, step V9 in time moves the configuration starting position of the initial operation piece of this batch group and store.Step V11 will end the operation piece of configuration and the operation piece eliminating that stand-by time surpasses the allowed time.
Step V12～V14
Step V13 is different with the step U12～U14 of first collocation method.That is, step V13 is the situation that the storage stand-by time surpasses batch operation piece of organizing of allowed time.
In above-mentioned method for making, batch group 1 is begun earlier, in second collocation method, generate under the situation of plan, there is the combination of operation piece as shown in figure 37.In addition, in this Figure 37, the numeral in the frame of broken lines is corresponding with the number of steps of following explanation.
Here, with reference to Figure 38～Figure 43 concrete plan generation is described.In addition, Figure 38～Figure 43 is the sequential chart of the layoutprocedure of expression second collocation method.
At first, to finishing predetermined instant (beginning predetermined instant) batch group 1 arrangement step piece 1-A (Figure 38 A, step 1) early.Then, in operation piece 1-A and operation piece 2-A, because the beginning predetermined instant morning of batch group of operation piece 1-A, therefore arrangement step piece 1-B (Figure 38 B, step 2) after this operation piece 1-A.In operation piece 1-B and operation piece 2-A, owing to the beginning predetermined instant morning of operation piece 1-B, therefore arrangement step piece 1-C (Figure 38 C, step 3) after this operation piece 1-B.
Step 4～6
In operation piece 1-C and operation piece 2-A, because the beginning predetermined instant morning of the operation piece 1-C of batch group 1, therefore arrangement step piece 1-D (Figure 39 A, step 4) after this operation piece 1-C.Owing to batch group 1 has been disposed whole operation pieces, so option only has operation piece 2-A, arrangement step piece 2-A (Figure 39 B, step 5).Then, arrangement step piece 2-B (Figure 39 C, step 6) after operation piece 2-A.
Because option only has operation piece 2-C, so arrangement step piece 2-C (Figure 40 A, step 7).But this stand-by time Wt surpasses the allowed time.Therefore, the situation that storage can't be disposed above the allowed time because of stand-by time, and get rid of the operation piece that can't dispose.Particularly, except that batch whole operation pieces of group 2 and batch operation piece 1-A (part Figure 40 B, the step 8) of group 1.After this, increase the input regeneration plan at interval of batch group 1 and batch group 2.At first, in batch group 1 and batch group 2, because the beginning predetermined instant of batch group 1 is early, so arrangement step piece 1-A (Figure 40 B, step 8).In the operation piece 2-A of crowd group 1 operation piece 1-B and batch group 2, because the beginning predetermined instant of batch group 1 is early, therefore operation piece 1-B (Figure 40 C, the step 9) of configuration batch group 1.
In the operation piece 2-A of crowd operation piece 1-C of group 1 and batch group 2, because the beginning predetermined instant of batch group 1 early, therefore operation piece 1-C (Figure 41 A, the step 10) of group 1 criticized in configuration, then in operation piece 1-C and operation piece 2-A, because the beginning predetermined instant of batch group 1 of operation piece 1-C early, so arrangement step piece 1-D (Figure 41 B, step 11).Then, batch group 1 has been disposed whole operation pieces, therefore operation piece 2-A (Figure 41 C, the step 12) of configuration batch group 2.But, the large interval before operation piece 1-A compared with the time interval of operation piece 2-A.
Because option only has operation piece 2-B, so arrangement step piece 2-B (Figure 42 A, step 13).Because option only has operation piece 2-C, so arrangement step piece 2-C (Figure 42 B, step 14).Then, because option only has operation piece 2-D, so arrangement step piece 2-D (Figure 42 C, step 15).
If use the second above-mentioned collocation method, then compare and to finish whole operation piece configurations with 15 less steps with 44 steps of basic configuration method.This test is by 1～15 expression of the Reference numeral in the frame of broken lines among Figure 37.
Use second collocation method like this, the operation piece that begins batch group of front by the processing that each batch of initial appointment organized preferentially disposes, thereby can avoid following situation: promptly, when behind the operation piece that has disposed certain batch group, the operation piece of different batch groups being configured, because restriction physically can't be disposed, the operation piece of recalling family tree and so on disposes situation about falling back.Therefore, can shorten the time of generation plan.
＜the three collocation method〉(series-operation piece)
In explanation during the 3rd collocation method, different for clear and definite and basic configuration method are used different with the above-mentioned method for making method for makings of being represented by Figure 43, and will with 3 criticize organize be object generation plan situation as an example.Figure 43 A represents the concrete example of single batch the sequential chart of criticizing group 1.Figure 43 B represents the concrete example of single batch the sequential chart of criticizing group 2.Figure 43 C represents the concrete example of single batch the sequential chart of criticizing group 3.
At batch group number is under 3 the situation, if adopt above-mentioned method for making then as Figure 44, the combination that has the operation piece shown in Figure 45.Figure 44 is illustrated in the synoptic diagram (family tree) of handling 3 batches of combination examples of planning when organizing by the basic configuration method.In this Figure 44, the numeral in the frame of broken lines is corresponding with the number of steps of following explanation.
In addition, the 3rd collocation method is equivalent to " scheduling method of substrate board treatment " of the present invention.
Basic configuration method during＜3 batches of groups 〉
Here with reference to Figure 46～Figure 51 plan is generated and be specifically described.The sequential chart of the layoutprocedure of the basic configuration method when Figure 46～Figure 51 is 3 batches of groups of expression.
And, after batch group 1 and batch group 2, set batch beginning predetermined instant of group 3, this opportunity is for example shown in Figure 46 A.That is, in the clean handling part ONB1 of pure water, handle, when batch group 2 is handled, set the beginning predetermined instant of criticizing group 3 in the clean handling part ONB2 of pure water when criticizing group 1.Therefore, at first get rid of the back operation piece (Figure 46 B) of operation piece 1-B and operation piece 2-B, this moment, operation piece 1-B and operation piece 2-B handled.
At this moment, in the beginning predetermined instant of the end predetermined instant of the end predetermined instant of operation piece 1-B, operation piece 2-B, batch group 3, the beginning predetermined instant of batch group 3 the earliest, so arrangement step piece 3-A (Figure 46 C, step 1).
In operation piece 1-B, operation piece 2-B, operation piece 3-A, the end predetermined instant of operation piece 3-A the earliest, so arrangement step piece 3-B (Figure 47 A, step 2).But operation piece 2-B is not cleaned handling part ONB2 from pure water and is taken out of, and therefore produces batch conflict of group.Thereby, can't arrangement step piece 3-B.Therefore, the back in time in-migration of batch allocation position of the operation piece 3-A of group 3 is configured (Figure 47 B, step 3).In operation piece 1-B, operation piece 2-B, operation piece 3-A, the end predetermined instant of operation piece 3-A the earliest, so arrangement step piece 3-B (Figure 47 C, step 4).
Because batch group 2 and batch group 3 are cleaned among the handling part ONB2 at pure water and are conflicted, therefore can't arrangement step piece 3-B.Therefore, get rid of operation piece 3-B, once more operation piece 3-A is moved (Figure 48 A, step 5) in time.Then, be connected among operation piece 1-B, operation piece 2-B, the operation piece 3-A and finish after the predetermined instant operation piece 2-B the earliest arrangement step piece 2-C (Figure 48 B, step 6).Then, to operation piece 1-B, operation piece 2-C, operation piece 3-A, be connected on and finish predetermined instant operation piece 3-A the earliest arrangement step piece 3-B (Figure 48 C, step 7) afterwards.
For operation piece 1-B, operation piece 2-C, operation piece 3-B, be connected on and finish predetermined instant operation piece 1-B the earliest arrangement step piece 1-C (Figure 49 A, step 8) afterwards.But because batch group clashes, thus operation piece 1-C got rid of, and be connected on and finish arrangement step piece 2-D (Figure 49 B, step 9) after the predetermined instant operation piece 2-C early among operation piece 2-C and the operation piece 3-B.Then, be connected among operation piece 1-B, operation piece 2-D, the operation piece 3-B and finish arrangement step piece 1-C (Figure 49 C, step 10) after the predetermined instant operation piece 1-B the earliest.
Be connected on and finish predetermined instant operation piece 3-B the earliest arrangement step piece 3-C (Figure 50 A, step 11) afterwards among operation piece 1-C, the operation piece 3-B.But because operation piece 1-C conflict with operation piece 3-C, so cancel the configuration of operation piece 3-C, replace this operation piece 3-C and in operation piece 1-C arrangement step piece 1-D (Figure 50 B, step 12) afterwards.Then, because option only has operation piece 3-C, so arrangement step piece 3-C (Figure 50 C, step 13).
Because option only has operation piece 3-D, therefore be connected on operation piece 3-C arrangement step piece 3-D (Figure 51, step 14) afterwards.
As mentioned above, if under the situation of 3 batches of groups, use the basic configuration method, then can in step 14, finish whole operation piece configurations.This test is by 1～14 expression of the Reference numeral in the frame of broken lines among Figure 44.
Below the 3rd collocation method is described.Figure 52 is the process flow diagram of the flow process of expression the 3rd collocation method.Figure 53 and Figure 54 are the synoptic diagram (family tree) of combination example of the plan of expression the 3rd collocation method.
Step W1, W2
In batch group that does not become the state that can't dispose, obtain the initial operation piece that does not also begin.According to whether existing the operation piece will handle branch.
Step W3～W8
In the operation piece of obtaining, the end predetermined instant operation piece the earliest of preceding operation piece is retrieved (step W3), dispose this operation piece (step W4).Then, will handle branch (step W5) according to whether satisfying configuration condition.Satisfying under the situation of configuration condition, obtaining the operation piece operation piece (step W6) afterwards that is disposed, owing to be the operation piece of same batch group, therefore according to whether existing the subsequent processing piece of this operation piece will handle branch (step W7).Under the situation that does not have the subsequent processing piece, will handle branch according to whether having disposed whole operation pieces, before all the configuration of operation pieces is finished, repeat action (step W8) from step W3.
Step W9
In step W2, do not exist under the situation of operation piece, the state that can't dispose is reset, the configuration starting position of the initial operation piece of this batch group is moved and stored in time.
Step W10
In step W5, under the situation that does not satisfy configuration condition, the operation piece of batch group that eliminating can't be disposed, the situation that storage can't be disposed.
Step W11
In step W7, under the situation of the operation piece that has the same batch group,, will handle branch according to satisfying configuration condition and can being configured.Change step W6 over to satisfying under the situation that configuration condition can dispose, under the situation that can't dispose, change step W10 over to.
Here with reference to Figure 55～Figure 59 concrete plan is generated and describe.Figure 55～Figure 59 is the sequential chart of the layoutprocedure of expression the 3rd collocation method.
And, identical with above-mentioned basic configuration method, after batch group 1 and batch group 2, set batch beginning predetermined instant of group 3, its opportunity is for example shown in Figure 55 A.Therefore, at first get rid of the back operation piece (Figure 55 B) of operation piece 1-B and operation piece 2-B, at this moment operation piece 1-B and operation piece 2-B present.
At this moment, in the beginning predetermined instant of the end predetermined instant of the end predetermined instant of operation piece 1-B, operation piece 2-B, batch group 3, the beginning predetermined instant of batch group 3 the earliest, so arrangement step piece 3-A (Figure 55 C, step 1).
Owing to disposed operation piece 3-A, then arrangement step piece 3-B (Figure 56 A, step 2).But,, therefore cancel the configuration of operation piece 3-B and store this situation because operation piece 2-B conflicts with operation piece 3-B.Owing to can't dispose crowd operation piece 3-B of group 3, therefore delete operation piece 3-A, 3-B, then configuration finishes predetermined instant operation piece 2-C (Figure 56 B, step 3) early.Then, owing to have the operation piece 2-D of identical batch group 3, arrangement step piece 2-D (Figure 56 C, step 4) after operation piece 2-C.
Owing to finished the configuration of whole operation pieces to criticizing group 2, then the beginning predetermined instant operation piece 3-A that criticizes group 3 early be configured (Figure 57 A, step 5).But, because preceding once configuration is the situation that can't dispose, so its configuration starting position is moved and stored in time.Therefore, compare with step 2 (Figure 56 A), this allocation position staggers in time.Owing to disposed operation piece 3-A, then arrangement step piece 3-B (Figure 57 B, step 6).But, thereby be configured owing to not satisfying configuration condition, therefore to get rid of operation piece 3-B and get rid of operation piece 3-A, configuration is criticized and is organized 1 operation piece 1-C (Figure 57 C, step 7).
Owing to disposed step 1-C, then arrangement step piece 1-D (Figure 58 A, step 8).Owing to finished the configuration of whole operation pieces of batch group 1, therefore batch group 3 be configured.At this moment, owing in step 5 before (Figure 57 A), allocation position is staggered, so operation piece 3-A disposes position (Figure 58 B, the step 9) that lags behind in time.Owing to disposed operation piece 3-A, then arrangement step piece 3-B (Figure 58 C, step 10).
Owing to disposed operation piece 3-B, then arrangement step piece 3-C (Figure 59 A, step 11).Owing to disposed operation piece 3-C, then arrangement step piece 3-D (Figure 59 B, step 12).
If use above-mentioned the 3rd collocation method, then compare with 14 steps of basic configuration method, can finish the configuration of whole operation pieces with 12 less steps.This test is by 1～14 expression of the Reference numeral in the frame of broken lines among Figure 53 and Figure 54.
In the 3rd collocation method, the operation piece of criticizing group identical with batch group of configuration earlier preferentially disposed like this, thereby, for the plan that begins to handle again from the device halted state, can shorten the time of generation plan.
＜the four collocation method 〉
Figure 60 is the process flow diagram of flow process of expression the 4th collocation method, and Figure 61 is the synoptic diagram (family tree) of combination example of the plan of expression the 4th collocation method.
In addition, the step T1 of step X1, X2, X4～X7 and above-mentioned basic configuration method, T2, T4～T7 are identical, omit this explanation.
The 4th collocation method is equivalent to " scheduling method of substrate board treatment " of the present invention.
Step X3
In the operation piece of obtaining, the shortest operation piece of allowed time in the operation piece before the retrieval.But, in each initial operation piece comparison each other, the beginning predetermined instant of each operation piece is compared, select beginning predetermined instant operation piece early.
Step X8～X11
Step X9 and step X11 are different from the basic configuration method.That is, in step X9, if stand-by time will be moved and stored after above the operation piece of batch group of allowed time, then will disposing the starting position.In step X, obtain once more and operation piece that the operation piece ending to dispose is obtained simultaneously, get rid of ending the operation piece of configuration and the operation piece of batch group that stand-by time surpasses the allowed time.
Step X12～X14
These steps are identical with above-mentioned second collocation method.
In the method for making of above-mentioned basic configuration method, first collocation method, second collocation method, batch group 1 is begun earlier, in the 4th collocation method, generate under the situation of plan, there is the combination of the operation piece shown in Figure 61.In addition, in this Figure 61, the numeral in the frame of broken lines is corresponding with the number of steps of following explanation.
Here with reference to Figure 62～Figure 66 plan is generated and be specifically described.Figure 62～Figure 66 is the sequential chart of the layoutprocedure of expression the 4th collocation method.But in this embodiment, allowed time=0 of the first carrying mechanism CTC, allowed time=∞ of the LPD1 of dried portion, the pure water of first handling part clean allowed time=∞ of the clean handling part ONB2 of pure water of the handling part ONB1 and second handling part.
At first, for finishing predetermined instant (beginning predetermined instant) batch group 1 arrangement step piece 1-A (Figure 62 A, step 1) early.Then, configurable is operation piece 1-B and operation piece 2-A, because before each in operation piece 1-A and batch group 2 the beginning predetermined instant, the allowed time of operation piece 1-A is short, so at arrangement step piece 1-B (Figure 62 B, step 2) thereafter.Then, configurable is operation piece 1-C and operation piece 2-A, because before each in operation piece 1-B and batch group 2 the beginning predetermined instant, the allowed time of operation piece 1-B is short, therefore arrangement step piece 1-C (Figure 62 C, step 2) after operation piece 1-B.
Step 4～5
Then can be configured to the operation piece 2-A of operation piece 1-D and batch group 2, operation piece 1-C is identical with batch allowed time of the beginning predetermined instant of group 2 before each, therefore operation piece 1-C and operation piece 2-A are compared configuration beginning predetermined instant operation piece 2-A (Figure 63 A, step 4) early.Then, preceding operation piece to configurable operation piece 1-D and operation piece 2-B, be operation piece 1-C (allowed time=∞) and allowed time of operation piece 2-A (allowed time=0) compare arrangement step piece 2-B (Figure 63 B, step 5) after short operation piece 2-A of allowed time.Then, preceding operation piece to configurable operation piece 1-D and operation piece 2-C, be operation piece 1-C (allowed time=∞) and the allowed time of operation piece 2-B (allowed time=180 second) compare arrangement step piece 2-C (Figure 63 C, step 6) after short operation piece 2-B of allowed time.
But, suppose that the stand-by time Wt of operation piece 2-C surpasses the allowed time here.Therefore, increase batch group 1 and generate plan at interval once more with batch input of group 2.At first, operation piece 1-A (Figure 64 A, the step 7) of configuration beginning predetermined instant batch group 1 early.In the beginning predetermined instant of the preceding operation piece 1-A of configurable operation piece 1-B and batch group 2 before configurable operation piece 2-A, because the allowed time of operation piece 1-A weak point, therefore arrangement step piece 1-B (Figure 64 B, step 8) after operation piece 1-A.Then, short operation piece 1-C (Figure 64 C, step 9) of configuration allowed time.
Before respectively being equivalent to of configurable operation piece 1-D and operation piece 2-A in the operation piece 1-C of operation piece and the beginning predetermined instant, because the beginning predetermined instant of operation piece 2-A is early, so arrangement step piece 2-A (Figure 65 A, step 10).Then, since being equivalent to before the operation piece 1-C of operation piece (allowed time=∞) and among the operation piece 2-A (allowed time=0 second), the allowed time of operation piece 2-A is short, therefore in operation piece 2-A arrangement step piece 2-B (Figure 65 B, step 11) afterwards.Then, since being equivalent to before the operation piece 1-C of operation piece (allowed time=∞) and among the operation piece 2-B (allowed time=180 second), the allowed time of operation piece 2-B is short, therefore in operation piece 2-B arrangement step piece 2-C (Figure 65 C, step 12) afterwards.
But if arrangement step piece 2-C, then batch group 1 is conflicted with batch group 2 in the LPD1 of dried portion, therefore gets rid of operation piece 2-C arrangement step piece 1-D (Figure 66 A, step 13).Owing to finished the configuration of whole operation pieces to criticizing group 1, so option only has operation piece 2-C, arrangement step piece 2-C (Figure 66 B, step 14).Because option only has operation piece 2-D, so arrangement step piece 2-D (Figure 66 C, step 15).
If use the 4th above-mentioned collocation method, then compare the configuration that to finish whole operation pieces with 15 less steps with 44 steps of basic configuration method.This test is by 1～15 expression of the Reference numeral in the frame of broken lines among Figure 61.
If use above-mentioned the 4th collocation method, then can avoid following situation: even short operation piece of allowed time can dispose physically, but because of can't guaranteeing that the allowed time causes disposing, thereby situation about falling back in combination (family tree) is more.Therefore, by short operation piece of allowed time is preferentially disposed, thereby be easy to avoid because can't disposing of causing of allowed time can be shortened the generation planned time.
Use the scheduling method of above-mentioned basic configuration method, first collocation method, second collocation method, the 3rd collocation method, the 4th collocation method to generate plan, generate plan in the works at the appointed time, finish predetermined instant plan early by carrying out, thereby can improve the running rate of substrate board treatment.And, owing to have the various configurations method, thus can prevent to plan the rise time increase.
The present invention is not limited only to above-mentioned embodiment, can as described belowly be out of shape enforcement.
(1) in the above-described embodiments, the method of planning that basic configuration method and first collocation method, second collocation method, the 3rd collocation method, the 4th collocation method are combined is illustrated as an example, but the present invention also can be with basic configuration method and any one collocation method combination at least.
(2) in the above-described embodiments, adopt the examples that are intended to be under the situation that two batches of groups or three batches of groups are handled simultaneously, but the present invention is for being that the situation that object generates plan also is suitable for batch group more than 4.
(3) in the above-described embodiments, be that example is illustrated with the method for making of batch group being washed processing, dried, but the present invention is not limited only to this method for making, also goes for various method for makings.
Claims (16)
1. the scheduling method of a substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that
May further comprise the steps:
Carry out the basic configuration method and first collocation method, thereby generate the step of a plurality of plans,
When generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning;
Two above-mentioned steps are carried out by described control part,
Described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process
Described first collocation method is: according to described basic configuration method configuration process operation, and but the stand-by time that described treatment process produced surpasses under the situation of the allowed time of standby in handling part, cancel the configuration of this treatment process, and from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again.
2. the scheduling method of substrate board treatment as claimed in claim 1 is characterized in that,
In the step of a plurality of plans of described generation, except each collocation method, also have second collocation method,
Described second collocation method is: according to described basic configuration method configuration process operation the time, after the processing beginning of organizing according to each batch of initial appointment came the initial treatment process of each batch configuration set in proper order, the treatment process that the described processing in next treatment process of each batch group is begun batch group of front preferentially disposed.
3. the scheduling method of substrate board treatment as claimed in claim 1 is characterized in that,
In the step of a plurality of plans of described generation, except each collocation method, also have the 3rd collocation method,
Described the 3rd collocation method is: according to described basic configuration method configuration process operation the time, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed.
4. the scheduling method of substrate board treatment as claimed in claim 2 is characterized in that,
In the step of a plurality of plans of described generation, except each collocation method, also have the 3rd collocation method,
Described the 3rd collocation method is: according to described basic configuration method configuration process operation the time, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed.
5. as the scheduling method of each described substrate board treatment in the claim 1～4, it is characterized in that,
In the step of a plurality of plans of described generation, except each collocation method, also have the 4th collocation method,
Described the 4th collocation method is: according to described basic configuration method configuration process operation the time, but the treatment process that has in batch group of short treatment process of the allowed time of handling part standby is preferentially disposed.
6. the scheduling method of a substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that
May further comprise the steps:
Carry out the basic configuration method and second collocation method, thereby generate the step of a plurality of plans,
When generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning;
Two above-mentioned steps are carried out by described control part,
Described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process
Described second collocation method is: according to described basic configuration method configuration process operation the time, after the processing beginning of organizing according to each batch of initial appointment came the initial treatment process of each batch configuration set in proper order, the treatment process that the described processing in next treatment process of each batch group is begun batch group of front preferentially disposed.
7. the scheduling method of substrate board treatment as claimed in claim 6 is characterized in that,
In the step of a plurality of plans of described generation, except each collocation method, also have the 3rd collocation method,
Described the 3rd collocation method is: according to described basic configuration method configuration process operation the time, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed.
8. as the scheduling method of claim 6 or 7 described substrate board treatments, it is characterized in that,
In the step of a plurality of plans of described generation, except each collocation method, also have the 4th collocation method,
Described the 4th collocation method is: according to described basic configuration method configuration process operation the time, but the treatment process that has in batch group of short treatment process of the allowed time of handling part standby is preferentially disposed.
9. the scheduling method of a substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that
May further comprise the steps:
Carry out basic configuration method and the 3rd collocation method, thereby generate the step of a plurality of plans,
When generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning;
Two above-mentioned steps are carried out by described control part,
Described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process
Described the 3rd collocation method is: according to described basic configuration method configuration process operation the time, under the situation of the treatment process of the described batch of group that after the treatment process that has batch group that can be connected on configuration earlier, disposes, the treatment process of described batch of group is preferentially disposed.
10. the scheduling method of substrate board treatment as claimed in claim 9 is characterized in that,
In the step of a plurality of plans of described generation, except each collocation method, also have the 4th collocation method,
Described the 4th collocation method is: according to described basic configuration method configuration process operation the time, but the treatment process that has in batch group of short treatment process of the allowed time of handling part standby is preferentially disposed.
11. the scheduling method of a substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that
May further comprise the steps:
Carry out basic configuration method and the 4th collocation method, thereby generate the step of a plurality of plans,
When generating described a plurality of plans, from wherein selecting to have finished at the appointed time the step of a plan of planning;
Two above-mentioned steps are carried out by described control part,
Described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest, be used as next treatment process
Described the 4th collocation method is: according to described basic configuration method configuration process operation the time, but the treatment process that has in batch group of short treatment process of the allowed time of handling part standby is preferentially disposed.
12. the scheduling method as each described substrate board treatment in the claim 1,6,10,11 is characterized in that,
In the step of selecting described plan, the unique plan of in the works selecting the earliest finish processing of described control part from finishing at the appointed time.
13. the scheduling method of a substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that
May further comprise the steps:
Step according to basic configuration method configuration process operation;
And generate the step of plan with special collocation method;
Two above-mentioned steps are carried out by described control part,
Described basic configuration method is: according to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, in next treatment process of each batch group, the treatment process of the end predetermined instant of search and configuration pretreatment procedure separately batch group the earliest is used as next treatment process
Described special collocation method is: but the stand-by time that described treatment process is produced according to described basic configuration method configuration process operation the time surpasses under the situation of the allowed time of standby in handling part, cancel the configuration of this treatment process, and from than the take-off point of this treatment process upper level also the take-off point of upper level begin to search for again.
14. the scheduling method of a substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that
May further comprise the steps:
According to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, the step of next treatment process of each batch of search configuration group;
When next treatment process of search configuration, according to the processing beginning order of each batch of initial appointment group to each batch configuration set after the initial treatment process, the treatment process that described processing in next treatment process of each batch group is begun batch group of front preferentially disposes, thereby generate the step of plan
Two above-mentioned steps are carried out by described control part.
15. the scheduling method of a substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that
May further comprise the steps:
According to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, the step of next treatment process of each batch of search configuration group;
When next treatment process of search configuration, after the treatment process that has batch group that can be connected on configuration earlier under the situation of the treatment process of described batch of group of configuration, the treatment process of described batch of group is preferentially disposed, thereby generate the step of planning,
Two above-mentioned steps are carried out by described control part.
16. the scheduling method of a substrate board treatment, by having a plurality of substrate board treatments that are used for handling part that substrate implement is handled when handling a plurality of batches of groups, control part is for according to the processing order that includes a plurality of treatment process each batch of processed in sequence group and determine the processing sequence that each batch organized in the reason portion throughout, it is characterized in that
May further comprise the steps:
According to the family tree of expression with the corresponding combination of processing order of each treatment process of each batch group, to any one batch configuration set after the initial treatment process, be when basic point is explored described family tree with described treatment process, the step of next treatment process of each batch of search configuration group;
When next treatment process of search configuration, but batch treatment process of organizing that has in short treatment process of the allowed time of handling part standby is preferentially disposed, thereby generates the step of planning,
Two above-mentioned steps are carried out by described control part.
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| JP2007181080 | 2007-07-10 | ||
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| JP2007212090A JP2009048320A (en) | 2007-08-16 | 2007-08-16 | Scheduling method and program for substrate treating apparatus |
| JP2007-212090 | 2007-08-16 | ||
| JP2007212090 | 2007-08-16 | ||
| JP2007319503A JP2009145946A (en) | 2007-12-11 | 2007-12-11 | Scheduling method and program for substrate treating apparatus |
| JP2007319504 | 2007-12-11 | ||
| JP2007319505A JP2009145948A (en) | 2007-12-11 | 2007-12-11 | Scheduling method and its program for substrate treating apparatus |
| JP2007-319505 | 2007-12-11 | ||
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| JP2007319504A JP2009145947A (en) | 2007-12-11 | 2007-12-11 | Scheduling method and its program for substrate treating apparatus |
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| JP2007-319503 | 2007-12-11 | ||
| JP2007319505 | 2007-12-11 | ||
| JP2008133268A JP5022302B2 (en) | 2007-07-10 | 2008-05-21 | Substrate processing apparatus schedule creation method and program thereof |
| JP2008-133268 | 2008-05-21 | ||
| JP2008133268 | 2008-05-21 |
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| JP5352390B2 (en) * | 2009-09-09 | 2013-11-27 | 大日本スクリーン製造株式会社 | Substrate processing apparatus schedule creation method and program thereof |
| CN109074055B (en) * | 2016-04-26 | 2021-06-15 | 富士通株式会社 | Work support device, work support method, and computer-readable storage medium storing work support program |
| EP3779625A4 (en) * | 2018-03-27 | 2022-04-06 | Kabushiki Kaisha Toshiba | Visualization system |
| JP7170438B2 (en) * | 2018-07-03 | 2022-11-14 | 東京エレクトロン株式会社 | SUBSTRATE PROCESSING APPARATUS AND JUDGMENT METHOD |
| CN113299587B (en) * | 2021-05-21 | 2022-04-26 | 无锡亚电智能装备有限公司 | Wafer cleaning process task arrangement method and device |
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