CN101396764B - 激光处理装置 - Google Patents

激光处理装置 Download PDF

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Publication number
CN101396764B
CN101396764B CN2008101498409A CN200810149840A CN101396764B CN 101396764 B CN101396764 B CN 101396764B CN 2008101498409 A CN2008101498409 A CN 2008101498409A CN 200810149840 A CN200810149840 A CN 200810149840A CN 101396764 B CN101396764 B CN 101396764B
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CN
China
Prior art keywords
optical system
lens
lens combination
laser beam
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008101498409A
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English (en)
Chinese (zh)
Other versions
CN101396764A (zh
Inventor
江田幸夫
安达贞志
栗田典夫
筬岛哲也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Olympus Corp
Original Assignee
Hamamatsu Photonics KK
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004132997A external-priority patent/JP4686135B2/ja
Application filed by Hamamatsu Photonics KK, Olympus Corp filed Critical Hamamatsu Photonics KK
Publication of CN101396764A publication Critical patent/CN101396764A/zh
Application granted granted Critical
Publication of CN101396764B publication Critical patent/CN101396764B/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Lenses (AREA)
  • Laser Beam Processing (AREA)
  • Dicing (AREA)
CN2008101498409A 2004-04-28 2005-04-27 激光处理装置 Expired - Fee Related CN101396764B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2004-132997 2004-04-28
JP2004132995A JP4681821B2 (ja) 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置
JP2004132995 2004-04-28
JP2004132997 2004-04-28
JP2004-132995 2004-04-28
JP2004132997A JP4686135B2 (ja) 2004-04-28 2004-04-28 レーザ加工装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB2005800017270A Division CN100485446C (zh) 2004-04-28 2005-04-27 激光处理装置

Publications (2)

Publication Number Publication Date
CN101396764A CN101396764A (zh) 2009-04-01
CN101396764B true CN101396764B (zh) 2011-01-26

Family

ID=35443587

Family Applications (3)

Application Number Title Priority Date Filing Date
CN2008101498409A Expired - Fee Related CN101396764B (zh) 2004-04-28 2005-04-27 激光处理装置
CN2008101498413A Expired - Fee Related CN101396765B (zh) 2004-04-28 2005-04-27 激光处理装置
CNB2005800017270A Expired - Fee Related CN100485446C (zh) 2004-04-28 2005-04-27 激光处理装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
CN2008101498413A Expired - Fee Related CN101396765B (zh) 2004-04-28 2005-04-27 激光处理装置
CNB2005800017270A Expired - Fee Related CN100485446C (zh) 2004-04-28 2005-04-27 激光处理装置

Country Status (2)

Country Link
JP (1) JP4681821B2 (https=)
CN (3) CN101396764B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4141485B2 (ja) * 2006-07-19 2008-08-27 トヨタ自動車株式会社 レーザ加工システムおよびレーザ加工方法
JP5479925B2 (ja) 2010-01-27 2014-04-23 浜松ホトニクス株式会社 レーザ加工システム
JP2016111315A (ja) * 2014-11-27 2016-06-20 株式会社東京精密 レーザー加工装置及びレーザー加工方法
JP6602207B2 (ja) * 2016-01-07 2019-11-06 株式会社ディスコ ＳｉＣウエーハの生成方法
JP6332886B2 (ja) * 2017-05-11 2018-05-30 住友大阪セメント株式会社 加工装置のオフセット量調整方法
JP6643442B1 (ja) * 2018-10-12 2020-02-12 株式会社アマダホールディングス レーザ加工機及びレーザ加工方法
JP7394299B2 (ja) * 2020-03-09 2023-12-08 株式会社東京精密 オートフォーカス光学系及び加工光学装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5637244A (en) * 1993-05-13 1997-06-10 Podarok International, Inc. Method and apparatus for creating an image by a pulsed laser beam inside a transparent material
CN1311870A (zh) * 1998-07-31 2001-09-05 田纳西大学研究公司 产生改善的激光束的装置和方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267689U (https=) * 1985-10-18 1987-04-27
JPH04327394A (ja) * 1991-04-30 1992-11-16 Amada Co Ltd 光移動型レーザ加工機
DE9407288U1 (de) * 1994-05-02 1994-08-04 Trumpf Gmbh & Co, 71254 Ditzingen Laserschneidmaschine mit Fokuslageneinstellung
US6087617A (en) * 1996-05-07 2000-07-11 Troitski; Igor Nikolaevich Computer graphics system for generating an image reproducible inside optically transparent material
JP2000071088A (ja) * 1998-08-27 2000-03-07 Nisshinbo Ind Inc レ−ザ加工機
JP3522654B2 (ja) * 2000-06-09 2004-04-26 住友重機械工業株式会社 レーザ加工装置及び加工方法
JP3587805B2 (ja) * 2001-07-30 2004-11-10 松下電器産業株式会社 レーザ加工装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5637244A (en) * 1993-05-13 1997-06-10 Podarok International, Inc. Method and apparatus for creating an image by a pulsed laser beam inside a transparent material
CN1311870A (zh) * 1998-07-31 2001-09-05 田纳西大学研究公司 产生改善的激光束的装置和方法

Also Published As

Publication number Publication date
CN101396765B (zh) 2011-02-09
CN101396764A (zh) 2009-04-01
JP4681821B2 (ja) 2011-05-11
CN100485446C (zh) 2009-05-06
CN1906522A (zh) 2007-01-31
CN101396765A (zh) 2009-04-01
JP2005316069A (ja) 2005-11-10

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Granted publication date: 20110126

Termination date: 20190427

CF01 Termination of patent right due to non-payment of annual fee