CN101387509B - 长度测量装置 - Google Patents
长度测量装置 Download PDFInfo
- Publication number
- CN101387509B CN101387509B CN200810215938XA CN200810215938A CN101387509B CN 101387509 B CN101387509 B CN 101387509B CN 200810215938X A CN200810215938X A CN 200810215938XA CN 200810215938 A CN200810215938 A CN 200810215938A CN 101387509 B CN101387509 B CN 101387509B
- Authority
- CN
- China
- Prior art keywords
- web member
- measurement
- snap close
- scale
- length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005259 measurement Methods 0.000 claims description 38
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 2
- 230000008878 coupling Effects 0.000 abstract 7
- 238000010168 coupling process Methods 0.000 abstract 7
- 238000005859 coupling reaction Methods 0.000 abstract 7
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000012791 sliding layer Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
- G01D5/34753—Carriages; Driving or coupling means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length-Measuring Instruments Using Mechanical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007044128.4 | 2007-09-15 | ||
| DE102007044128A DE102007044128A1 (de) | 2007-09-15 | 2007-09-15 | Längenmesseinrichtung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101387509A CN101387509A (zh) | 2009-03-18 |
| CN101387509B true CN101387509B (zh) | 2012-04-25 |
Family
ID=40193830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810215938XA Active CN101387509B (zh) | 2007-09-15 | 2008-09-12 | 长度测量装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7856734B2 (enExample) |
| EP (1) | EP2037230B1 (enExample) |
| JP (1) | JP5484700B2 (enExample) |
| CN (1) | CN101387509B (enExample) |
| DE (1) | DE102007044128A1 (enExample) |
| ES (1) | ES2390113T3 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007033574A1 (de) * | 2007-07-19 | 2009-01-22 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
| DE102009043293A1 (de) * | 2009-09-29 | 2011-03-31 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
| DE102011007459B4 (de) * | 2011-04-15 | 2023-05-11 | Dr. Johannes Heidenhain Gmbh | Optische Längenmesseinrichtung |
| CN102445133B (zh) * | 2011-09-26 | 2013-10-16 | 湖北三江航天红峰控制有限公司 | 部件运动状态下伸缩长度测量装置 |
| JP2014196955A (ja) * | 2013-03-29 | 2014-10-16 | 株式会社ミツトヨ | 光電式エンコーダ |
| ES2618855T3 (es) * | 2014-10-14 | 2017-06-22 | Dr. Johannes Heidenhain Gmbh | Dispositivo de medición de posición con dispositivo para la compensación de errores por dilatación térmica de una regla graduada |
| EP3228993B1 (de) * | 2016-04-05 | 2018-08-01 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung |
| EP3276310B1 (de) * | 2016-07-27 | 2018-09-19 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung |
| ES2693900T3 (es) * | 2016-08-02 | 2018-12-14 | Dr. Johannes Heidenhain Gmbh | Dispositivo de medición de la longitud |
| EP3293496B1 (de) * | 2016-09-12 | 2018-11-21 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung und verfahren zu deren montage |
| DE102021200417B3 (de) * | 2021-01-18 | 2022-04-28 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5142792A (en) * | 1990-05-31 | 1992-09-01 | Dr. Johannes Heidenhaim Gmbh | Position measuring device |
| CN1480707A (zh) * | 2002-08-03 | 2004-03-10 | 约翰尼斯海登海恩博士股份有限公司 | 光学位置检测装置 |
| CN1675520A (zh) * | 2002-08-08 | 2005-09-28 | 约翰尼斯海登海恩博士股份有限公司 | 长度测量装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2845542C2 (de) | 1978-10-19 | 1980-01-31 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Längenmeßeinrichtung |
| DE3201887C2 (de) | 1982-01-22 | 1983-11-24 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Längenmeßeinrichtung |
| IT1190631B (it) * | 1986-04-22 | 1988-02-16 | G Giacomo Giacomello | Trasduttore per misure incrementali di precisione di grandezze lineari,con compensazione delle dilatazioni termiche del regolo di misura |
| EP0348660B1 (de) * | 1988-06-29 | 1992-02-19 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung |
| JPH086704B2 (ja) * | 1990-09-12 | 1996-01-29 | ダイキン工業株式会社 | 摺動部構造及びオイルレス圧縮機の摺動部構造 |
| JPH04132659A (ja) * | 1990-09-21 | 1992-05-06 | Brother Ind Ltd | 酸化クロム系複合焼結体 |
| JP2002053371A (ja) * | 2000-08-08 | 2002-02-19 | Toshiba Corp | 導電性を有する酸化ジルコニウム焼結体およびそれを用いた摺動部材 |
| JP4434452B2 (ja) | 2000-08-15 | 2010-03-17 | ソニーマニュファクチュアリングシステムズ株式会社 | 測尺装置 |
| JP4230810B2 (ja) * | 2003-04-24 | 2009-02-25 | 株式会社ミツトヨ | 測長装置 |
-
2007
- 2007-09-15 DE DE102007044128A patent/DE102007044128A1/de not_active Withdrawn
-
2008
- 2008-06-14 ES ES08010849T patent/ES2390113T3/es active Active
- 2008-06-14 EP EP08010849A patent/EP2037230B1/de active Active
- 2008-09-04 US US12/231,607 patent/US7856734B2/en active Active
- 2008-09-11 JP JP2008232990A patent/JP5484700B2/ja active Active
- 2008-09-12 CN CN200810215938XA patent/CN101387509B/zh active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5142792A (en) * | 1990-05-31 | 1992-09-01 | Dr. Johannes Heidenhaim Gmbh | Position measuring device |
| CN1480707A (zh) * | 2002-08-03 | 2004-03-10 | 约翰尼斯海登海恩博士股份有限公司 | 光学位置检测装置 |
| CN1675520A (zh) * | 2002-08-08 | 2005-09-28 | 约翰尼斯海登海恩博士股份有限公司 | 长度测量装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20090071025A1 (en) | 2009-03-19 |
| CN101387509A (zh) | 2009-03-18 |
| JP5484700B2 (ja) | 2014-05-07 |
| EP2037230A1 (de) | 2009-03-18 |
| EP2037230B1 (de) | 2012-08-22 |
| JP2009069154A (ja) | 2009-04-02 |
| ES2390113T3 (es) | 2012-11-06 |
| DE102007044128A1 (de) | 2009-03-19 |
| US7856734B2 (en) | 2010-12-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101387509B (zh) | 长度测量装置 | |
| EP2613120B1 (en) | Contact probe using a wavelength detector | |
| US9057598B2 (en) | Touch probe | |
| EP4006383B1 (en) | Flexible connection structure of lead screw | |
| CN102564309B (zh) | 基于光纤布拉格光栅的微孔尺寸测量装置 | |
| CN101918722A (zh) | 用于确定流体动力执行器的活塞沿其行程路径的行进位置的系统 | |
| CN1815137A (zh) | 阵列垂直腔面发射激光器共焦显微系统 | |
| CN106839997B (zh) | 直线光栅尺的检测方法 | |
| CN213536262U (zh) | 一种丝杠的柔性连接结构及闪测仪载物台 | |
| US10234277B2 (en) | Length-measuring device | |
| KR101415637B1 (ko) | 리니어 인코더 | |
| CN116136394B (zh) | 一种集成点线双模式的激光测头装置及结构曲面测量方法 | |
| US9989345B2 (en) | Linear displacement measuring apparatus | |
| CN115950330B (zh) | 尺寸测量装置 | |
| JP7062488B2 (ja) | エンコーダ | |
| TW201239314A (en) | Probe measuring device | |
| CN103097921B (zh) | 透镜阵列及其透镜边缘检测方法 | |
| CN212482410U (zh) | 一种基于玻璃导轨的高精度三维轮廓扫描测量平台 | |
| CN102865818B (zh) | 接触式测长装置 | |
| CN206573075U (zh) | 一种非接触式光栅尺结构 | |
| CN204881518U (zh) | 绝对式高效三坐标测量装置 | |
| JPH04231810A (ja) | 位置測定装置 | |
| CN204881520U (zh) | 高精度三坐标测量仪 | |
| CN222926158U (zh) | 结构简单的光栅尺移动机构 | |
| CN111197959B (zh) | 一种光栅测量系统及光刻机 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |