CN101383285B - 一种制备单电子晶体管的方法 - Google Patents
一种制备单电子晶体管的方法 Download PDFInfo
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- CN101383285B CN101383285B CN2007101213664A CN200710121366A CN101383285B CN 101383285 B CN101383285 B CN 101383285B CN 2007101213664 A CN2007101213664 A CN 2007101213664A CN 200710121366 A CN200710121366 A CN 200710121366A CN 101383285 B CN101383285 B CN 101383285B
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- electronic transistor
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- evaporation
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- 238000010894 electron beam technology Methods 0.000 claims abstract description 15
- 239000003292 glue Substances 0.000 claims abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 34
- 238000001704 evaporation Methods 0.000 claims description 19
- 230000008020 evaporation Effects 0.000 claims description 19
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 16
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- 239000000463 material Substances 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 10
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- 238000005530 etching Methods 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
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- 239000007789 gas Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 238000011161 development Methods 0.000 claims description 5
- 239000007772 electrode material Substances 0.000 claims description 5
- 238000005566 electron beam evaporation Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
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- 239000004926 polymethyl methacrylate Substances 0.000 claims description 4
- 229910001203 Alloy 20 Inorganic materials 0.000 claims description 3
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- 239000012212 insulator Substances 0.000 claims description 3
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- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 206010020751 Hypersensitivity Diseases 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
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CN2007101213664A CN101383285B (zh) | 2007-09-05 | 2007-09-05 | 一种制备单电子晶体管的方法 |
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CN2007101213664A CN101383285B (zh) | 2007-09-05 | 2007-09-05 | 一种制备单电子晶体管的方法 |
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CN101383285A CN101383285A (zh) | 2009-03-11 |
CN101383285B true CN101383285B (zh) | 2010-09-22 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103545359B (zh) * | 2012-07-10 | 2016-04-27 | 中国科学院苏州纳米技术与纳米仿生研究所 | 单电子晶体管核心结构制备方法及单电子晶体管核心结构 |
CN104377117A (zh) * | 2014-09-26 | 2015-02-25 | 中国科学院半导体研究所 | 利用相对易腐蚀的金属制备另一种金属图形的剥离方法 |
CN111106531A (zh) * | 2019-12-20 | 2020-05-05 | 中国电子科技集团公司第五十五研究所 | 一种硅基纳米级弯曲切趾光栅的制备方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1795376A (zh) * | 2003-05-23 | 2006-06-28 | 独立行政法人科学技术振兴机构 | 单电子晶体管、场效应晶体管、传感器、传感器的制造方法及检测方法 |
CN1953205A (zh) * | 2005-10-20 | 2007-04-25 | 中国科学院半导体研究所 | 通过注氧进行量子限制的硅基单电子晶体管及制作方法 |
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- 2007-09-05 CN CN2007101213664A patent/CN101383285B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1795376A (zh) * | 2003-05-23 | 2006-06-28 | 独立行政法人科学技术振兴机构 | 单电子晶体管、场效应晶体管、传感器、传感器的制造方法及检测方法 |
CN1953205A (zh) * | 2005-10-20 | 2007-04-25 | 中国科学院半导体研究所 | 通过注氧进行量子限制的硅基单电子晶体管及制作方法 |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHA Free format text: FORMER OWNER: INST OF MICROELECTRONICS, C. A. S Effective date: 20130417 Owner name: INST OF MICROELECTRONICS, C. A. S Effective date: 20130417 |
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Effective date of registration: 20130417 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee after: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) Corp. Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |