CN101382622A - 光电器件阵列与光纤阵列的无源耦合方法及其组件制备 - Google Patents
光电器件阵列与光纤阵列的无源耦合方法及其组件制备 Download PDFInfo
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101907753B (zh) * | 2009-06-03 | 2012-04-25 | 中国科学院微电子研究所 | 一种多路并行光电模块装配方法 |
CN103226223A (zh) * | 2013-05-13 | 2013-07-31 | 洛合镭信光电科技(上海)有限公司 | 用于高速并行光收发模块的光引擎微封装结构 |
CN103345028A (zh) * | 2013-07-11 | 2013-10-09 | 中国科学院半导体研究所 | 一种光纤与光电子器件垂直耦合的方法 |
CN103472542A (zh) * | 2013-09-13 | 2013-12-25 | 河南仕佳光子科技有限公司 | 用于定位光纤阵列的梯形槽的制作方法 |
CN103605197A (zh) * | 2013-11-26 | 2014-02-26 | 中国科学院长春光学精密机械与物理研究所 | 二维光纤精密定位耦合器及其制作方法 |
CN103777280A (zh) * | 2014-01-27 | 2014-05-07 | 华进半导体封装先导技术研发中心有限公司 | 一种具有倾斜角度的光纤装配体及其装配方法 |
CN103809240A (zh) * | 2012-11-13 | 2014-05-21 | 上海华虹宏力半导体制造有限公司 | 一种在硅基工艺上制作光纤对准基座阵列的方法 |
CN103885143A (zh) * | 2014-04-15 | 2014-06-25 | 昆山柯斯美光电有限公司 | 芯片阵列与并行光纤耦合对准的组件及其制备方法 |
CN104422987A (zh) * | 2013-09-03 | 2015-03-18 | 中国科学院微电子研究所 | 互连结构 |
CN106405754A (zh) * | 2016-11-25 | 2017-02-15 | 华进半导体封装先导技术研发中心有限公司 | 一种光纤模组用的结构支架及其制作方法 |
CN107843959A (zh) * | 2017-11-20 | 2018-03-27 | 武汉驿路通科技股份有限公司 | 一种多通道光纤阵列及其制作方法 |
CN110927897A (zh) * | 2019-12-10 | 2020-03-27 | 深圳市晟睿通信有限公司 | 一种光电感应装置及其实现方法 |
CN111001452A (zh) * | 2019-12-20 | 2020-04-14 | 京东方科技集团股份有限公司 | 一种微型全分析器件及其制作方法 |
CN111948765A (zh) * | 2020-07-03 | 2020-11-17 | 中国计量科学研究院 | 基于硅基刻蚀的超导光学探测器与光纤对准方法及装置 |
CN116027487A (zh) * | 2023-03-29 | 2023-04-28 | 武汉驿路通科技股份有限公司 | 一种隔离器与光纤阵列的贴合装置及方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100248049B1 (ko) * | 1997-07-31 | 2000-03-15 | 윤종용 | 정렬용 플랫폼을 이용한 광섬유의 수동정렬 장치 |
JP4008649B2 (ja) * | 2000-09-27 | 2007-11-14 | 沖電気工業株式会社 | 光学装置 |
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Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101907753B (zh) * | 2009-06-03 | 2012-04-25 | 中国科学院微电子研究所 | 一种多路并行光电模块装配方法 |
CN103809240B (zh) * | 2012-11-13 | 2016-06-08 | 上海华虹宏力半导体制造有限公司 | 一种在硅基工艺上制作光纤对准基座阵列的方法 |
CN103809240A (zh) * | 2012-11-13 | 2014-05-21 | 上海华虹宏力半导体制造有限公司 | 一种在硅基工艺上制作光纤对准基座阵列的方法 |
CN103226223A (zh) * | 2013-05-13 | 2013-07-31 | 洛合镭信光电科技(上海)有限公司 | 用于高速并行光收发模块的光引擎微封装结构 |
CN103345028A (zh) * | 2013-07-11 | 2013-10-09 | 中国科学院半导体研究所 | 一种光纤与光电子器件垂直耦合的方法 |
CN104422987B (zh) * | 2013-09-03 | 2018-06-22 | 中国科学院微电子研究所 | 互连结构 |
CN104422987A (zh) * | 2013-09-03 | 2015-03-18 | 中国科学院微电子研究所 | 互连结构 |
CN103472542A (zh) * | 2013-09-13 | 2013-12-25 | 河南仕佳光子科技有限公司 | 用于定位光纤阵列的梯形槽的制作方法 |
CN103472542B (zh) * | 2013-09-13 | 2016-01-20 | 河南仕佳光子科技有限公司 | 用于定位光纤阵列的梯形槽的制作方法 |
CN103605197A (zh) * | 2013-11-26 | 2014-02-26 | 中国科学院长春光学精密机械与物理研究所 | 二维光纤精密定位耦合器及其制作方法 |
CN103605197B (zh) * | 2013-11-26 | 2016-03-02 | 中国科学院长春光学精密机械与物理研究所 | 二维光纤精密定位耦合器 |
CN103777280B (zh) * | 2014-01-27 | 2016-06-15 | 华进半导体封装先导技术研发中心有限公司 | 一种具有倾斜角度的光纤装配体及其装配方法 |
CN103777280A (zh) * | 2014-01-27 | 2014-05-07 | 华进半导体封装先导技术研发中心有限公司 | 一种具有倾斜角度的光纤装配体及其装配方法 |
CN103885143A (zh) * | 2014-04-15 | 2014-06-25 | 昆山柯斯美光电有限公司 | 芯片阵列与并行光纤耦合对准的组件及其制备方法 |
CN103885143B (zh) * | 2014-04-15 | 2016-06-15 | 昆山柯斯美光电有限公司 | 芯片阵列与并行光纤耦合对准的组件及其制备方法 |
CN106405754A (zh) * | 2016-11-25 | 2017-02-15 | 华进半导体封装先导技术研发中心有限公司 | 一种光纤模组用的结构支架及其制作方法 |
CN106405754B (zh) * | 2016-11-25 | 2018-01-16 | 华进半导体封装先导技术研发中心有限公司 | 一种光纤模组用的结构支架及其制作方法 |
CN107843959A (zh) * | 2017-11-20 | 2018-03-27 | 武汉驿路通科技股份有限公司 | 一种多通道光纤阵列及其制作方法 |
CN110927897A (zh) * | 2019-12-10 | 2020-03-27 | 深圳市晟睿通信有限公司 | 一种光电感应装置及其实现方法 |
CN111001452A (zh) * | 2019-12-20 | 2020-04-14 | 京东方科技集团股份有限公司 | 一种微型全分析器件及其制作方法 |
CN111948765A (zh) * | 2020-07-03 | 2020-11-17 | 中国计量科学研究院 | 基于硅基刻蚀的超导光学探测器与光纤对准方法及装置 |
CN111948765B (zh) * | 2020-07-03 | 2022-04-08 | 中国计量科学研究院 | 基于硅基刻蚀的超导光学探测器与光纤对准方法及装置 |
CN116027487A (zh) * | 2023-03-29 | 2023-04-28 | 武汉驿路通科技股份有限公司 | 一种隔离器与光纤阵列的贴合装置及方法 |
CN116027487B (zh) * | 2023-03-29 | 2023-06-16 | 武汉驿路通科技股份有限公司 | 一种隔离器与光纤阵列的贴合装置及方法 |
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