CN101382608B - Method for making 180 degree big span second grade optical axis parallelism angle mirror - Google Patents
Method for making 180 degree big span second grade optical axis parallelism angle mirror Download PDFInfo
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- CN101382608B CN101382608B CN 200810231846 CN200810231846A CN101382608B CN 101382608 B CN101382608 B CN 101382608B CN 200810231846 CN200810231846 CN 200810231846 CN 200810231846 A CN200810231846 A CN 200810231846A CN 101382608 B CN101382608 B CN 101382608B
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Abstract
The invention discloses a manufacturing method of a 180 degrees large span second parallelism of optical axis angle mirror; the substantial contents of the method are that: surface shape requirement and parallelism precision of two end surfaces of the angle mirror supporting plate are guaranteed by common optical elements processing technique; two plane reflectors are processed by adopting common optical elements processing technique, and sections of the reflecting surface of the two reflectors are stuck on the two end surfaces of the angle supporting plate by optical cement mode, thus forming the angle mirror. The manufacturing method of the angle mirror in the invention not only has comparatively simple manufacturing process and shortens the manufacturing period of the angle mirror, but also easily guarantees the second level parallelism requirement between the emergent light axis and the incident light axis, and the angle mirror has good optical cement strength and reliable quality.
Description
Technical field
The invention belongs to optics cold processing technique field, relate generally to a kind of method for making of angle mirror, relate in particular to a kind of method for making of big span second grade optical axis parallelism angle mirror.
Background technology
As everyone knows, in comprehensive optical instrument, in order to save the space and to carry out the rational structure configuration, need usually the light path of optical system is turned back, the concrete angle of turning back will be decided according to the specific design of instrument.Realize that turn back 90 ° optical element of light path generally adopts the plane mirror of isosceles right-angle prism, 45 ° of placements, the light path of realization more than 90 ° turned back, and generally is to be bonded in the angle mirror that constitutes on the shared supporting plate by a plurality of plane mirrors or a plurality of prism to realize.180 ° of traditional angle mirror method for makings are, at first, one side hair side of first plane mirror (or first prism) is bonded in the optics epoxide-resin glue on first of supporting plate, and the verticality of in the first solidification process that schedules to last 8h, monitoring and regulating first plane mirror and supporting plate according to 1 time/30min, the reflecting surface of promptly final assurance first plane mirror and first verticality of angle mirror supporting plate are 90 ° ± 10 " in the scope, then be the back solidification process that schedules to last 24h; Second, second plane mirror also is bonded in the optics epoxide-resin glue by design attitude size, precision and optical path direction on first of supporting plate, and in scheduling to last the first solidification process of 8h according to 1 time/30min monitoring and regulate the plain shaft parallelism of second plane mirror and first plane mirror, finally guarantee the back solidification process of the going out of second plane mirror and first plane mirror, 24h of laggard behavior phase of accuracy requirement that the incident light axis parallel error reaches drawing.
At present, China surely takes aim at capstan head at the airborne photoelectric that grinds and has been equipped with a tread optical axis detector, so that can be easily the plain shaft parallelism of its each optical sensor is regularly detected, calibrates.Because it is bigger that photoelectricity is surely taken aim in the capstan head span between each photoelectric sensor optical axis, and collimation requires very high, therefore this optical axis detector has adopted 180 ° of big span second grade optical axis parallelism angle mirrors, simultaneously the version of this angle mirror also with angle mirror in the past different (referring to Fig. 1), two end face A of its pallet length direction, B be parallel to each other and with the axis of length direction angle at 45, two sides of supporting plate Width are broken line shape, two end face A, the horizontal centre distance of B is 220.86mm, require first simultaneously, second plane mirror 1, the bottom of 2 reflectings surface is bonded in two end face A of supporting plate 3 respectively, on the B, the emergent light axis of angle mirror and the vertical range of incident light axis are 316.95mm, and it is 10 that the depth of parallelism of two optical axises requires ".Make this angle mirror if still adopt traditional angle mirror method for making, can bring following problem: (1) is because the horizontal centre distance of supporting plate 3 both ends of the surface A, B is bigger, and the size of these two end faces has only 40mm * 20mm, therefore the collimation that can't detect and control these two end face A, B in the corase grind stage of supporting plate reaches a second class precision, more can't guarantee the verticality of these two end face A, B and supporting plate 3 big faces; (2) in order to guarantee high-precision depth of parallelism requirement, in the gummed process, must two end faces of supporting plate 3 be finish grinded, also to revise simultaneously two end face A, B respectively with the level of supporting plate 3 big faces and the deviation of vertical direction, and this departure is wayward, bring difficulty to practical operation, nor be beneficial to the control of first, second plane mirror 1,2 beauty defects; (3) adopt the optical resin glue glued adhesion between first, second plane mirror 1,2 and the supporting plate 3, not only need more than 30 hour set time, and when the debugging plain shaft parallelism, can not carry out local warming by diagonal mirror, cause the angle mirror fabrication cycle long, in addition, then need tear glue open, the problem that each optical element is scrapped easily take place and tear glue open to the angle mirror that does not satisfy depth of parallelism requirement.
Summary of the invention
First technical matters that the present invention will solve is at the deficiency that prior art exists, to provide the method for making of 180 ° of big span second grade optical axis parallelism angle mirrors of a kind of making.
For solving the problems of the technologies described above, angle mirror method for making provided by the invention comprises following processing step:
The first step is processed first, second plane mirror and is made both reach standby behind the precision index that drawing indicates with conventional optical element processing technology;
Second step, after the square supporting plate blank of two block lengths alignment bonding, the template that bonds again, and take off template after promptly becoming a supporting plate subassembly by the rectangular supporting plate blank machine-shaping of shape of template after with described bonding;
The 3rd step, a broken line shape side of supporting plate subassembly Width is bonded on the rubber moulding, and the geometric center of supporting plate subassembly length direction first end face is overlapped with the pivot center of rubber moulding, adopt conventional optical element processing technology that described first end face is finish grinded, polishes, touch the mark up to the surface figure accuracy of described first end face and take off rubber moulding after requiring;
The 4th step, another broken line shape side of supporting plate subassembly Width is bonded on the described rubber moulding, and the geometric center of supporting plate subassembly length direction second end face is overlapped with the pivot center of rubber moulding, adopt conventional optical element processing technology to described second end face finish grind, detection, reconditioning, reach 30 up to the parallel error of described second end face and described first end face " in;
The 5th step, adopt conventional optical element processing technology that described second end face is polished, detects, repaiies throwing, reach 5 up to the parallel error of described second end face and described first end face " touch the mark with surface figure accuracy interior and described second end face and take off rubber moulding after requiring;
The 6th step, give the heating of supporting plate subassembly and it is splitted into two independently supporting plates and cleaning up, respectively the optical cement position of standby first, second plane mirror reflecting surface directly being fitted on first, second end face of single supporting plate on the superclean bench, obtained a complete angle mirror thus.
In the 4th step, the correct grinding that the 5th step is carried out described supporting plate subassembly respectively, in the glossing, the optical plate glass that all polishes with two photoelectric collimators and both ends of the surface detects the depth of parallelism of described supporting plate second end face and first end face at any time, the bore of optical plate glass is greater than described supporting plate first, the horizontal centre distance of second end face, its concrete step that detects is, make first photoelectric collimator be positioned at optical plate glass radially an end the top and with the optical plate glass autocollimation, make simultaneously second photoelectric collimator be positioned at optical plate glass radially the other end the below and with the optical plate glass autocollimation, and respectively the autocollimation of optical plate glass is looked like to adjust to first, the reference position of second photoelectric collimator; The floating geometric center that has rubber moulding supporting plate subassembly second end face that is bonded at of the optical glass sheet water of polishing both surfaces, and with behind the optical plate glass in this supporting plate subassembly replacement autocollimation light path, make first end face and described first photoelectric collimator of described supporting plate subassembly realize autocollimation, and make the reference position place of the autocollimation image position of first end face in first photoelectric collimator; Connect the autocollimation picture of this supporting plate subassembly second end face of observation in the inner room, visual field of second photoelectric auto-collimator, and the autocollimation picture of second end face and the departure and the bias direction of the second photoelectric collimator reference position are marked on the relevant position of described second end face.
According to the present invention, the bore of described optical plate glass is Φ 250mm, and parallel error is 2 "; The precision of described first, second photoelectric collimator is 1 "; The bore of described optical glass sheet is Φ 15mm, and parallel error is 5 ".
Beneficial effect of the present invention is embodied in the following aspects.
(1) general thought of the present invention is, guarantee the face shape requirement of two end faces of supporting plate by corresponding technological process, make two parallelism precisions between the end face be better than the depth of parallelism index request of angle mirror emergent light axis and incident light axis simultaneously, then two plane mirrors that satisfy index request are bonded on two end faces of supporting plate in the optical cement mode, thereby constitute angle mirror.The present invention has opened up a new way for the making of long span high precision angle mirror, has stronger practicality and generalization.
(2) the present invention is in making the angle mirror process, earlier with cope match-plate pattern moulding again after two rectangular supporting plate blank bondings, and in follow-up grinding and polishing process, all the time two supporting plates are done as a whole processing, thus, two end faces of supporting plate subassembly will increase than the area of two end faces of single supporting plate and be twice, this helps correct grinding, polishing and the detection of two end faces, and can more easily realize to second end face repair a die, repair process operations such as throwing, finally make two end faces reach desired depth of parallelism index.
(3) the present invention is in the gluing technique of supporting plate and plane mirror, abandoned traditional optical resin glue, but adopt the optical cement method to glue together, and promptly rely on intermolecular attractive force, the polishing position of two plane mirrors is fitted tightly respectively on two polished end faces of supporting plate.Adopt the optical cement method not only can save optical resin glue required a large amount of set times, improved production efficiency, the more important thing is, be easy to guarantee the collimation precision of angle mirror emergent light axis and incident light axis; Result after the high and low temperature test is further verified shows that the depth of parallelism index of angle mirror and the intensity of optical cement layer all meet the demands simultaneously, therefore says that method for making provided by the invention can guarantee the quality and the precision of angle mirror well.
Description of drawings
Fig. 1 is the structural representation of ground light axle detector with big span angle mirror.
Fig. 2 is the synoptic diagram of two plane mirrors shown in Fig. 1.
Fig. 3 is the aluminium formwork structure synoptic diagram of processing supporting plate subassembly.
Fig. 4 is the structural representation of the special-purpose rubber moulding of supporting plate subassembly.
Fig. 5 is the synoptic diagram behind the rubber moulding on the supporting plate subassembly.
Fig. 6 detects the optical device of the supporting plate subassembly both ends of the surface depth of parallelism and detects schematic diagram.
Fig. 7 is the detection light path synoptic diagram of the blade assemblies both ends of the surface depth of parallelism.
Fig. 8 detects the optical device of the angle mirror emergent light axis and the incident light axis depth of parallelism and detects schematic diagram.
Fig. 9 is the detection light path synoptic diagram of the angle mirror emergent light axis and the incident light axis depth of parallelism.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing and preferred embodiment.
The angle mirror method for making of the preferred embodiment of the present invention comprises following processing and checking procedure.
The first step according to the drawing requirement, adopts conventional optical element processing technology to process first, second plane mirror 1,2.The material of first, second plane mirror 1,2 is quartz glass, and reflecting surface is of a size of 40mm * 60mm, and thickness is 20mm (referring to Fig. 2).The surface figure accuracy index is: N≤0.5 Δ N≤0.2B≤III.
In second step, adopting quartz glass flow process blanking routinely, base are flat, the back rectangle blank of formation supporting plate 3 in mill side, two identical rectangle blanks and aluminium template 4 (referring to Fig. 3) are placed on are preheating to 75 ℃ ± 5 ℃ on the electric hot plate.Then, with the big face of two rectangle blanks evenly bond together and make with round as a ball glue two rectangle blanks around alignment, afterwards the one side of aluminium template 4 is bonded in the big face central authorities of one of them rectangle blank and natural cooling.Take off aluminium template 4 after according to aluminium template 4 shapes the machine-shaping of two rectangle blanks promptly being become the supporting plate subassembly again.
The 3rd step, to paint on the broken line face with supporting plate subassembly one side, lacquer is done back point pitch point, requires pitch to put uniform arrangement.When special-purpose rubber moulding 5 (referring to Fig. 4) is heated to 50 ℃ ± 5 ℃, place on the special-purpose rubber moulding 5 the supporting plate subassembly and natural cooling (referring to Fig. 5), making the geometric center of the supporting plate subassembly first end face A and the pivot center of special-purpose rubber moulding 5 simultaneously is inner bolt hole dead in line and deviation≤0.1mm.Because two sides of supporting plate subassembly are broken line shape,, like this, can well solve a security and the inhomogeneity difficult problem of glue-line behind the dish on the supporting plate subassembly so need configuration to have the special-purpose rubber moulding 5 of broken line shape.Then, adopt conventional optical element processing technology that the first end face A of supporting plate subassembly is finish grinded, polishes, take off special-purpose rubber moulding 5 reach the precision index of N≤0.5 Δ N≤0.2B≤III when its face shape after.
The 4th step, to paint on the broken line face with supporting plate subassembly opposite side, lacquer is done back point pitch point, requires pitch to put uniform arrangement.When special-purpose rubber moulding 5 is heated to 50 ℃ ± 5 ℃, be positioned on the special-purpose rubber moulding 5 the supporting plate subassembly and natural cooling, making the geometric center of the second end face B and the pivot center of special-purpose rubber moulding 5 simultaneously is inner bolt hole dead in line and deviation≤0.1mm.Directly finish grind the second end face B of supporting plate subassembly, and control its face shape, control its face shape with the method for breathing out and be low aperture, and require the second end face B and model surface contact portion to reach more than 2/3 with two-dimensional template with 303# emery; In the correct grinding process, at any time the depth of parallelism of the second end face B and the first end face A is tested, the instruments of inspection is that precision is 1 " two photoelectric collimators 7,8 and the optical plate glass 6 that all polishes of both ends of the surface; the bore of optical plate glass must be greater than the horizontal centre distance of first, second end face of supporting plate A, B; in the present embodiment; the bore of optical plate glass 6 is Φ 250mm, surface figure accuracy N
1=-1, N
2=+1, parallel error 2 ".The concrete step that detects is: make first photoelectric collimator 7 be positioned at optical plate glass 6 radially an end the top and with optical plate glass 6 autocollimations, make simultaneously second photoelectric collimator 8 be positioned at optical plate glass radially the other end the below and with the optical plate glass autocollimation, and respectively the autocollimation of optical plate glass 6 is looked like to adjust to the reference position (referring to Fig. 6) of first, second photoelectric collimator; With a bore is that Φ 15mm, parallel error are 5 " and the floating geometric center that has the special-purpose rubber moulding 5 supporting plate subassemblies second end face B that is bonded at of the K9 glass sheet water that all polished of two sides; and after replacing optical plate glass 6 in autocollimation light path with this supporting plate subassembly; make the first end face A and first photoelectric collimator, 7 realization autocollimations of supporting plate subassembly, and make the autocollimation image position of the first end face A locate (referring to Fig. 7) in the reference position of first photoelectric collimator 7; Connect the autocollimation picture of this supporting plate subassembly of observation second end face B in the inner room, visual field of second photoelectric auto-collimator 8, and the departure and the bias direction of this autocollimation picture and second photoelectric collimator, 8 reference positions is marked on the relevant position of the second end face B.After the detection, adopt the second end face B of the method reconditioning supporting plate subassembly of little flat-die or application of load according to mark position, machined parameters such as record modification departure, used time and speed of mainshaft degree is so that reference during the secondary reconditioning.After this, constantly detect continuous reconditioning, until reference position deviation≤30 of the autocollimation picture and second photoelectric collimator 8 of the supporting plate subassembly second end face B ".
The 5th step, with second end face B thick the throw 5～10min of cerium rouge to the supporting plate subassembly, after making the second end face B reach the bright degree of visual surperficial mao mao, according to light path shown in Figure 7 the supporting plate subassembly is carried out the depth of parallelism and detect, the detection step during it detects step and the 4th goes on foot is identical.After the detection, adopt the method for manual or little flat-die, application of load to repair the second end face B that throws the supporting plate subassembly by mark position, machined parameters such as record modification departure, used time and speed of mainshaft degree are so that secondary is repaiied reference when throwing.After this, constantly throwing is constantly repaiied in detection, until the autocollimatic picture of the second end face B of supporting plate subassembly and reference position deviation≤5 of second photoelectric collimator 8 "; Also to make the face shape of the second end face B reach the precision index of N≤0.5 Δ N≤0.2B≤III simultaneously, take off special-purpose rubber moulding 5 afterwards.
The 6th step was placed on preheating on the electric hot plate with the supporting plate subassembly, treated the supporting plate subassembly to be divided into after the fusing of round as a ball glue two independently supporting plates 3 and clean supporting plate 3 with petrolic solvent at ambient temperature.After this, wipe the optical cement position of first plane mirror 1 and the first end face A of supporting plate 3 with the alcohol ether mixed liquor is clear earlier, and with 6
XMagnifier is observed wiping surface, requires no watermark, wet goods dirt; First plane mirror 1 is placed on the superclean bench with supporting plate 3, position by drawing directly fits on the first end face A of supporting plate 3 the optical cement position of first plane mirror 1 again, and this gummed mode is called the optical cement bonding; Still need be after the optical cement bonding with 6
XMagnifier observation optical cement face requires the optical cement face that fouls such as foreign matter, white point can not be arranged, otherwise needs heavily to wipe, and heavy glue is with fastness and the assurance parallel error precision that strengthens optical cement.Adopt above-mentioned steps again the optical cement position of second plane mirror 2 directly to be fitted to the second end face B of supporting plate 3 and check accordingly until qualified.Obtained a complete angle mirror 10 thus.
In the 7th step, adopt precision 1 " first photoelectric auto-collimator 7 (or second photoelectric auto-collimator 8) and the incident light axis of high precision plane catoptron 9 diagonal mirrors 10 and the collimation degree between the emergent light axis detect.The bore of high precision plane catoptron 9 is greater than the vertical range of the emergent light axis and the incident light axis of angle mirror 10, and in the present embodiment, the bore of high precision plane catoptron 9 is Φ 450mm, surface figure accuracy N=-2.The concrete step that detects is to make the high precision plane catoptron 9 and first photoelectric auto-collimator 7 realize that the autocollimatic direct join makes the autocollimation image position of high precision plane catoptron in the reference position of first photoelectric auto-collimator 7 (referring to Fig. 8); Constitute detection light path shown in Figure 9 with the high precision plane catoptron 9 in angle mirror 10 alternate figures 8, in the visual field of first photoelectric auto-collimator 7, directly observe the autocollimation picture of angle mirror 10 and the deviation of reference position by rotating angle mirror 10, the optical axis parallel error reaches 8 " angle mirror 10 be considered as specification product, finished whole manufacturing process of angle mirror 10 thus.
Adopt low temperature-10 ℃ and be incubated 4h, be incremented to 40 ℃ and the environmental test condition that is incubated 4h by certain frequency then and the qualified angle mirror 10 that adopts the present invention to make carried out the low temperature and the hot environment test of one-period, and after test, place light path shown in Figure 9 to detect angle mirror 10, the emergent light axis and the parallel error between the incident light axis of check angle mirror 10 still are 8 "; Simultaneously the outward appearance crack-free of visual check angle mirror 10, collapse the limit phenomenon; And by 6
XLens examination optical cement face finds no the phenomenon of coming unstuck.
Claims (3)
1. one kind 180 ° big span second grade optical axis parallelism angle mirror method for makings, it is characterized in that: this method for making comprises following processing step:
The first step is processed first, second plane mirror [1,2] and is made both reach standby behind the precision index that drawing indicates with conventional optical element processing technology;
Second step, after the square supporting plate blank of two block lengths alignment bonding, the template that bonds again, and take off template after promptly becoming a supporting plate subassembly by the rectangular supporting plate blank machine-shaping of shape of template after with described bonding;
The 3rd step, a broken line shape side of supporting plate subassembly Width is bonded on the rubber moulding, and the geometric center of supporting plate subassembly length direction first end face [A] is overlapped with the pivot center of rubber moulding, adopt conventional optical element processing technology that described first end face [A] is finish grinded, polishes, touch the mark up to the surface figure accuracy of described first end face [A] and take off rubber moulding after requiring;
The 4th step, another broken line shape side of supporting plate subassembly Width is bonded on the described rubber moulding, and the geometric center of supporting plate subassembly length direction second end face [B] is overlapped with the pivot center of rubber moulding, adopt conventional optical element processing technology to described second end face [B] finish grind, detection, reconditioning, reach 30 up to the parallel error of described second end face [B] and described first end face [A] " in;
The 5th step, adopt conventional optical element processing technology that described second end face [B] is polished, detects, repaiies throwing, reach 5 up to the parallel error of described second end face [B] and described first end face [A] " touch the mark with the surface figure accuracy of interior and described second end face [B] and take off rubber moulding after requiring;
The 6th step, give the heating of supporting plate subassembly and it is splitted into two independently supporting plates and cleaning up, respectively the optical cement position of standby first, second plane mirror [1,2] reflecting surface directly being fitted on first, second end face [A, B] of single supporting plate on the superclean bench, obtained a complete angle mirror thus.
2. 180 ° of big span second grade optical axis parallelism angle mirror method for makings according to claim 1, it is characterized in that: in the supporting plate subassembly fine grinding technology and supporting plate subassembly glossing of described the 4th step in described the 5th step, with two photoelectric collimators [7,8] and the optical plate glass [6] that all polishes of both ends of the surface at any time the depth of parallelism of described supporting plate second end face [B] with first end face [A] detected, the bore of optical plate glass [6] is greater than described supporting plate first, second end face [the A, B] horizontal centre distance, its concrete step that detects is, make first photoelectric collimator [7] be positioned at optical plate glass [6] radially an end the top and with optical plate glass [6] autocollimation, make simultaneously second photoelectric collimator [8] be positioned at optical plate glass [6] radially the other end the below and with optical plate glass [6] autocollimation, and respectively the autocollimation of optical plate glass [6] is looked like to adjust to first, second photoelectric collimator [7,8] reference position; The floating geometric center that has rubber moulding supporting plate subassembly second end face [B] that is bonded at of the optical glass sheet water of polishing both surfaces, and with behind the optical plate glass [6] in this supporting plate subassembly replacement autocollimation light path, make first end face [A] of described supporting plate subassembly realize autocollimation, and make the reference position place of the autocollimation image position of first end face [A] in first photoelectric collimator [7] with described first photoelectric collimator [7]; Connect the autocollimation picture of this supporting plate subassembly second end face [B] of observation in the inner room, visual field of second photoelectric auto-collimator [8], and the autocollimation picture of second end face [B] and the departure and the bias direction of second photoelectric collimator [8] reference position are marked on the relevant position of described second end face [B].
3. 180 ° of big span second grade optical axis parallelism angle mirror method for makings according to claim 2, it is characterized in that: the bore of described optical plate glass [6] is Φ 250mm, parallel error is 2 "; The precision of described first, second photoelectric collimator [7,8] is 1 "; The bore of described optical glass sheet is Φ 15mm, and parallel error is 5 ".
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| CN101633137B (en) * | 2009-08-20 | 2011-02-09 | 四川欧瑞特光电科技有限公司 | Method for trimming angle of pyramid prism and single trimming tool equipment |
| CN105589326A (en) * | 2014-10-23 | 2016-05-18 | 北京自动化控制设备研究所 | Manufacturing method for micro-miniature atomic air chamber |
| CN109059807B (en) * | 2018-10-29 | 2021-01-01 | 北京遥感设备研究所 | Mirror surface parallelism measuring device and measuring method for inner reflector of semi-closed structure |
| CN113204112B (en) * | 2021-04-30 | 2022-11-04 | 中国科学院国家天文台南京天文光学技术研究所 | Demoulding device and demoulding method of ultrathin self-adaptive deformable mirror |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2154019A (en) * | 1984-02-10 | 1985-08-29 | Zeiss Jena Veb Carl | Double-beam interferometer arrangement particularly for fourier-transform spectrometers |
| CN101055341A (en) * | 2007-04-17 | 2007-10-17 | 天津大学 | Amplification imaging vision positioning device for IC package |
-
2008
- 2008-10-23 CN CN 200810231846 patent/CN101382608B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2154019A (en) * | 1984-02-10 | 1985-08-29 | Zeiss Jena Veb Carl | Double-beam interferometer arrangement particularly for fourier-transform spectrometers |
| CN101055341A (en) * | 2007-04-17 | 2007-10-17 | 天津大学 | Amplification imaging vision positioning device for IC package |
Non-Patent Citations (2)
| Title |
|---|
| 熊长新.微楔形镜加工技术研究.光学技术33 增刊.2007,33(增刊),25-26. |
| 熊长新.微楔形镜加工技术研究.光学技术33 增刊.2007,33(增刊),25-26. * |
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