CN101339030B - Dual spindle piezoelectric detection gyroscope possessing magnetostriction vibrator - Google Patents
Dual spindle piezoelectric detection gyroscope possessing magnetostriction vibrator Download PDFInfo
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- CN101339030B CN101339030B CN2008100416806A CN200810041680A CN101339030B CN 101339030 B CN101339030 B CN 101339030B CN 2008100416806 A CN2008100416806 A CN 2008100416806A CN 200810041680 A CN200810041680 A CN 200810041680A CN 101339030 B CN101339030 B CN 101339030B
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Abstract
A dual axis piezoelectric detection gyroscope with a magnetostrictive vibrator in the micro electromechanical technical field comprises a magnetostrictive vibrator, a driving coil, an output electrode and a cantilever beam. The magnetostrictive vibrator has a structure that the two square surfaces of a cuboid are provided with square-hole holes, and the inner boundary and the outer boundary of the square-hole shape are squares. The vibration of the magnetostrictive vibrator under special model is regarded as reference vibration; the magnetostrictive vibrator in the model has special positionsin both directions in which the moving directions on an upper surface and a lower surface are opposite. When the outside world has angular velocity, Coriolis force with opposite direction is generated on the opposite position of the moving direction to enable piezoelectric film to deform and generate internal stress, and the angular velocity of the outside dual axis is detected by the electric potential generated on the output electrode. The dual axis piezoelectric detection gyroscope has the advantages of simple structure, strong shock resistance, convenient fixing, sensitive dual axis detection, weak coupling interference between the reference vibration and the detection signal and power consumption saving owing to being free of high-speed rotation.
Description
Technical field
What the present invention relates to is a kind of little gyro of field of micro electromechanical technology, and specifically, what relate to is a kind of dual spindle piezoelectric detection gyroscope with magnetostrictive vibrator.
Background technology
Gyro is the core devices of attitude control and inertial guidance, the raising of guidance demands such as the development of inertial technology and satellite, guided missile, require that gyro is little to power, the life-span is long, volume is little, the direction that can adapt to various rugged surroundings develops.
Find through literature search prior art, (number of patent application is Chinese patent " piezoelectric gyro element and piezoelectric gyroscope ": 200510131905.3) mention the structure that can pass through the prism-shaped vibrating mass of piezoelectric, detect the angular velocity on 2 direction of principal axis.The cross section is that piezoelectric transducer one end of the prism-shaped of rectangle is fixed, on its 1st side, form the 1st drive electrode, on the 2nd side, be formed on the 2nd～the 4th drive electrode that separates on the Width, band phase differential ground applies drive current to each drive electrode, make the piezoelectric transducer vibration, its other end moves in a circle.With the direction of the rotary middle spindle quadrature of its vibration on effect when moment of torsion is arranged, the 2nd detecting electrode that the 1st detecting electrode that forms from the 1st side of piezoelectric transducer and the 2nd side form is exported the amount of deflection of consequent piezoelectric transducer, thereby detects the angular velocity on 2 direction of principal axis.
There is following deficiency in this technology: at first, driving circuit requires repeatedly phase shift, and some driving circuit also comprises amplitude detecting circuit, agc circuit, it is high that control is required, and the circuit complexity, disturbs greatly, and noise is many, be difficult to obtain desirable drive signal.Secondly, make piezoelectrics self produce circular motion as the reference motion by apply four different phase drive signals of phase place on four different electrodes, the circular motion of rule is difficult to be realized accurately, has increased the error of angular velocity detection.Guarantee that the piezoelectrics rotation obtains the high speed circular motion, power consumption is big.
Summary of the invention
The objective of the invention is deficiency, propose a kind of dual spindle piezoelectric detection gyroscope with magnetostrictive vibrator at prior art.Adopt magnetostrictive vibrator on the structure of the present invention with " returning " type groove structure, about oscillator, " return " type surface pressure conductive film one deck piezoelectric membrane is set respectively, utilize special mode of vibration under the distinctive mode of magnetostrictive vibrator as excitation, the piezoelectric effect of piezoelectric membrane detects, and realizes gyro twin shaft sensitivity.As duty, do not need accurate high speed circular revolution with this special vibration during work, and easily accurately realize.Detect the piezoelectric effect of directly utilizing piezoelectric membrane, detectable voltage signals gets final product.The present invention is simple in structure, and impact resistance is strong, does not need Vacuum Package, has the node of being convenient to fix, and is few with reference to the coupled interference between vibration and the detection signal, and is that twin shaft detects, and processing technology easily realizes, can work well under rugged surroundings.Drive simple and conveniently in addition, and power consumption is little.
The present invention is achieved by the following technical solutions, the present invention includes magnetostrictive vibrator, upper surface piezoelectric membrane, lower-left side drive coil, upper right side drive coil, upper surface upside output electrode, upper surface right side output electrode, upper surface downside output electrode, upper surface left side output electrode, upper surface semi-girder, lower surface semi-girder.
The magnetostrictive vibrator material is the magnetostriction materials of conduction, structure is the rectangular parallelepiped with two sides square surface, two square surfaces are parallel to each other, upper and lower surface for magnetostrictive vibrator, the face that directly connects the magnetostrictive vibrator upper and lower surface is a rectangle, in the magnetostrictive vibrator upper and lower surface " returning " type hole is set respectively, these two " returning " type holes are non through hole, constitute two bathtub constructions in the magnetostrictive vibrator upper and lower surface respectively, two semi-girders are separately positioned on magnetostrictive vibrator upper and lower surface center, be positioned at the center in two " going back to " types of magnetostrictive vibrator hole, two semi-girders and two " returning " types of magnetostrictive vibrator surface are symmetrically distributed about magnetostrictive vibrator, and other surface of magnetostrictive vibrator is rectangle (being that other surfaces can not be squares).
The magnetostrictive vibrator upper surface is arranged the upper surface piezoelectric membrane, " returning " type hole is set on the upper surface piezoelectric membrane, " returning " type hole on the upper surface piezoelectric membrane is a through hole, it is consistent with the ragged edge size and dimension in " returning " type hole of magnetostrictive vibrator that the upper surface piezoelectric membrane " returns " ragged edge of type, and the inner and outer boundary of above-mentioned all " returning " type is two squares.
The surface that the upper surface piezoelectric membrane contacts with magnetostrictive vibrator is a upper surface piezoelectric membrane lower surface, then the upper surface piezoelectric membrane other with the parallel face of upper surface piezoelectric membrane lower surface, promptly surface (promptly contact with magnetostrictive vibrator surface) is last piezoelectric membrane upper surface freely; The limit that the upper surface housing of upper surface piezoelectric membrane forms square (square that the outermost on " returning " type surface is formed) upside is that limit that the upper surface housing of upper surface first limit, upper surface piezoelectric membrane forms square right side is that limit that the upper surface housing of upper surface second limit, upper surface piezoelectric membrane forms square downside is that the limit that the upper surface housing of upper surface the 3rd limit, upper surface piezoelectric membrane forms the square left side is upper surface the 4th limit.The line of the mid point on the mid point on upper surface first limit and upper surface the 3rd limit is upper surface first center line, and the line of the mid point on the mid point on upper surface second limit and upper surface the 4th limit is upper surface second center line.
Arrange lower-left side drive coil, upper right side drive coil, upper surface upside output electrode, upper surface right side output electrode, upper surface downside output electrode, upper surface left side output electrode on the described upper surface piezoelectric membrane upper surface.Wherein lower-left side drive coil and upper right side drive coil are positioned on the foursquare clinodiagonal of upper surface piezoelectric membrane upper surface housing formation; Upper surface upside output electrode and upper surface downside output electrode about upper surface second center line be symmetrically distributed, be positioned on upper surface first center line, upper surface right side output electrode and upper surface left side output electrode about the symmetrical distribution of upper surface first center line, be positioned on upper surface second center line.There are two semi-girder upper surface semi-girders and lower surface semi-girder in the both sides up and down of gyroscope structure of the present invention, verify that by analysis its displacement is very little under mode of oscillation, the end points of therefore selected two semi-girders is as the node of the little gyro of the present invention, node is as point of fixity, two semi-girders and magnetostrictive vibrator one.
The present invention utilizes the vibration under special mode of magnetostrictor as with reference to vibration, utilizes piezoelectric effect to obtain output signal and detects extraneous angular velocity.The exchange current excitation magnetostrictive vibrator that drive coil feeds certain frequency is in certain mode.Wherein magnetostrictive vibrator is the Y-axis negative direction at the direction of vibration of upper surface upside output electrode position, and is the Y-axis positive dirction with the pairing position of upper surface upside output electrode direction of vibration on lower surface.Because the direction of vibration of two positions is opposite, when adding the angular velocity that is subjected to the horizontal X direction, the direction of suffered Ke Shi power is opposite, make the magnetostrictive vibrator Z-direction produce and stretch or compression, and then top piezoelectric membrane produces crooked, form internal stress, finally make the upside output electrode form certain electromotive force, the size of electromotive force is directly proportional with the size of extraneous angular velocity.Therefore can detect the angular velocity of directions X by the electromotive force of upper surface upside output electrode; And then the electromotive force of upper surface downside output electrode also is the detection signal of extraneous angular velocity.The direction of motion of upper surface right side output electrode, lower surface left side output electrode is vertical with the direction of motion of upper surface upside output electrode, upper surface downside output electrode, in like manner with the electromotive force of the electromotive force of output electrode on the left of the upper surface and the lower surface right side output electrode detection signal as Y deflection speed.
The present invention is owing to adopt block magnetostrictive vibrator, and simple in structure, impact resistance is strong, has the node of being convenient to fix, and processing technology easily realizes, can work well under rugged surroundings.The present invention utilizes special vibration under the special mode as duty, adopt magnetostriction principle to produce with reference to vibration, the voltage signal that the direct piezo electric effect of the piezoelectric membrane of high tension electricity coefficient produces is as detection signal, coupled interference between reference vibration and the detection signal is few, can detect the angular velocity of extraneous biaxially oriented exactly.The present invention can be applied in fields such as satellite, weapon, civil navigation.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment is made up of magnetostrictive vibrator 1, upper surface piezoelectric membrane 2, lower-left side drive coil 3, upper right side drive coil 4, upper surface upside output electrode 5, upper surface right side output electrode 6, upper surface downside output electrode 7, upper surface left side output electrode 8, upper surface semi-girder 9, lower surface semi-girder.
The surface that upper surface piezoelectric membrane 2 contacts with magnetostrictive vibrator 1 is a upper surface piezoelectric membrane lower surface, then upper surface piezoelectric membrane 2 other with the parallel face of upper surface piezoelectric membrane 1 lower surface, promptly surface (i.e. the surface that contact with magnetostrictive vibrator 1) is upper surface piezoelectric membrane upper surface freely; Arrangement of electrodes is on upper surface piezoelectric membrane 2 upper surfaces.
Be provided with " going back to " type hole at magnetostrictive vibrator 1 lower surface, at magnetostrictive vibrator 1 upper surface " returning " type hole is set, " returning " type hole is set on upper surface piezoelectric membrane 2, two " returning " type holes of magnetostrictive vibrator 1 are non through hole, constitute two bathtub constructions at magnetostrictive vibrator 1 upper surface, magnetostrictive vibrator 1 lower surface respectively, two semi-girders and 1 two " returning " types of magnetostrictive vibrator surface are symmetrically distributed about magnetostrictive vibrator 1, and other surface of magnetostrictive vibrator 1 is rectangle (being that other surfaces can not be squares)." returning " type hole on the upper surface piezoelectric membrane is a through hole.
The outside in " returning " type hole that is positioned at magnetostrictive vibrator 1 upper surface is parallel with corresponding four ragged edges of magnetostrictive vibrator 1 upper surface.It is consistent with the ragged edge size and dimension in " returning " type hole of magnetostrictive vibrator 1 that upper surface piezoelectric membrane 2 " returns " ragged edge of type.Two semi-girders are separately positioned on magnetostrictive vibrator 1 upper surface center, magnetostrictive vibrator 1 lower surface center, be positioned at the center in 1 two " going back to " types of magnetostrictive vibrator hole, the material of two semi-girders is magnetostriction materials, with magnetostrictive vibrator 1 be one.The inner and outer boundary of above-mentioned all " returning " type is two squares.
Arrange upper surface left side lower-left side drive electrode 3, upside drive coil 4, upper surface upside output electrode 5, upper surface right side output electrode 6, upper surface downside output electrode 7, upper surface left side output electrode 8 at upper surface piezoelectric membrane 2 upper surfaces.It is upper surface that upper surface piezoelectric membrane 2 freedom " are gone back to " surface, " returning " surface that the upper surface piezoelectric membrane contacts with magnetostrictive vibrator is lower surface, upper surface piezoelectric membrane upper surface housing forms limit upper surface first limit of square (square that the outermost on " going back to " type surface is formed) upside, the limit that the upper surface housing forms square right side is upper surface second limit, the limit that the upper surface housing forms square downside is upper surface the 3rd limit, and the limit that the upper surface housing forms the square left side is upper surface the 4th limit.The line of the mid point on the mid point on upper surface first limit and upper surface the 3rd limit is upper surface first center line, and the line of the mid point on the mid point on upper surface second limit and upper surface the 4th limit is upper surface second center line.
Position distribution: lower-left side drive coil 3 is positioned on the foursquare clinodiagonal of upper surface housing formation with upper right side drive coil 4; Upper surface upside output electrode 5 is symmetrically distributed, is positioned on upper surface first center line about upper surface second center line with upper surface downside output electrode 7, and upper surface right side output electrode 5 is symmetrically distributed, is positioned on upper surface second center line about upper surface first center line with upper surface left side output electrode 7.The both sides up and down of present embodiment magnetostriction/piezoelectric micromotor gyroscope arrangement have two semi-girder upper surface semi-girders 9 and lower surface semi-girder (with upper surface semi-girder 9 about the magnetostrictive vibrator symmetry), verify that by analysis its displacement is very little under mode of oscillation, the end points of therefore selected two semi-girders is as the node (node is point of fixity) of the little gyro of present embodiment.
Processing technology: bulk conduction magnetostriction materials are cut, grind and just obtain magnetostrictive vibrator.Then with magnetostrictive vibrator as matrix, utilize wet etching to obtain two " going back to " type holes then, adopt fine process to prepare piezoelectric membrane, drive coil and electrode.Electroplate again and obtain electrode.
Present embodiment utilizes the vibration under special mode of magnetostrictor as with reference to vibration, utilizes piezoelectric effect to obtain output signal and detects extraneous angular velocity.X-axis is the upper surface downside output electrode 7 and upper surface upside output electrode 5 lines of centres, and Y-axis is the upper surface right side output electrode 6 and upper surface left side output electrode 8 lines of centres, and X-axis, Y-axis, Z axle meet the right-hand rule.When the exchange current of lower-left side drive coil 3 and upper right side drive coil 4 feeding certain frequencies encourages (being in certain mode), can produce with reference to vibration, wherein magnetostrictive vibrator is the Y-axis negative direction at the direction of vibration of upper surface upside output electrode 5 positions, and is the Y-axis positive dirction with the pairing position of upper surface upside output electrode direction of vibration on lower surface.Because the direction of vibration of two positions is opposite, when adding the angular velocity that is subjected to the horizontal X direction, the direction of suffered Ke Shi power is opposite, make magnetostrictive vibrator in upper surface upside output electrode 5 and on the lower surface and the Z-direction between the pairing position of upper surface upside output electrode produce to stretch or compression, and then top piezoelectric membrane produces crooked, form internal stress, finally make upside output electrode 5 form certain electromotive force.Because the size of Ke Shi power is directly proportional with extraneous angular velocity size, the size of the electromotive force that extraneous angular velocity causes is directly proportional with Ke Shi power, the size of the electromotive force of the upside output electrode that causes of angular velocity is directly proportional with the size of extraneous angular velocity as can be known, therefore can detect the angular velocity of directions X by the electromotive force of upper surface upside output electrode 5; And then same reason, the electromotive force of upper surface downside output electrode 7 also is directly proportional with the size of extraneous angular velocity.Upper surface upside output electrode 5 is identical owing to vibrating suffered stress with upper surface downside output electrode 7, has identical electromotive force, but direction of motion is opposite, the electromotive force that extraneous angular velocity causes is opposite, therefore the electromotive force of upper surface upside output electrode 5 and upper surface downside output electrode 7 is subtracted each other as the detection signal of directions X angular velocity and can eliminate the electromotive force that vibration causes.The direction of motion of upper surface right side output electrode 6, upper surface left side output electrode 8 is vertical with the direction of motion of upper surface upside output electrode 5, upper surface downside output electrode 7, in like manner the electromotive force of the electromotive force of output electrode 8 on the left of the upper surface and upper surface right side output electrode 6 is subtracted each other the detection signal as Y deflection speed.The acceleration detection coupling of verifying this both direction by analysis is very little.
Claims (2)
1. dual spindle piezoelectric detection gyroscope with magnetostrictive vibrator, comprise magnetostrictive vibrator, the upper surface piezoelectric membrane, lower-left side drive coil, the upper right side drive coil, upper surface upside output electrode, upper surface right side output electrode, upper surface downside output electrode, upper surface left side output electrode, the upper surface semi-girder, the lower surface semi-girder, it is characterized in that, described magnetostrictive vibration minor structure is the rectangular parallelepiped with two sides square surface, two square surfaces are parallel to each other, upper and lower surface for magnetostrictive vibrator, the face that directly connects the magnetostrictive vibrator upper and lower surface is a rectangle, in the magnetostrictive vibrator upper and lower surface " returning " type hole is set respectively, these two " returning " type holes are non through hole, constitute two bathtub constructions in the magnetostrictive vibrator upper and lower surface respectively, two semi-girders are separately positioned on magnetostrictive vibrator upper and lower surface center, are positioned at the center in two " going back to " types of magnetostrictive vibrator hole;
Described magnetostrictive vibrator upper surface is arranged the upper surface piezoelectric membrane, " returning " type hole is set on the upper surface piezoelectric membrane, " returning " type hole on the upper surface piezoelectric membrane is a through hole, it is consistent with the ragged edge size and dimension in " returning " type hole of magnetostrictive vibrator that the upper surface piezoelectric membrane " returns " ragged edge of type, and the inner and outer boundary of above-mentioned all " returning " type is two squares;
The surface that the upper surface piezoelectric membrane contacts with magnetostrictive vibrator is a upper surface piezoelectric membrane lower surface, then the upper surface piezoelectric membrane face parallel with upper surface piezoelectric membrane lower surface is last piezoelectric membrane upper surface, the limit that the upper surface housing of upper surface piezoelectric membrane forms square upside is upper surface first limit, the limit that the upper surface housing of upper surface piezoelectric membrane forms square right side is upper surface second limit, the limit that the upper surface housing of upper surface piezoelectric membrane forms square downside is upper surface the 3rd limit, the limit that the upper surface housing of upper surface piezoelectric membrane forms the square left side is upper surface the 4th limit, the line of the mid point on the mid point on upper surface first limit and upper surface the 3rd limit is upper surface first center line, and the line of the mid point on the mid point on upper surface second limit and upper surface the 4th limit is upper surface second center line;
Described upper surface piezoelectric membrane upper surface is provided with lower-left side drive coil, the upper right side drive coil, upper surface upside output electrode, upper surface right side output electrode, upper surface downside output electrode, upper surface left side output electrode, wherein lower-left side drive coil and upper right side drive coil are positioned on the foursquare clinodiagonal of upper surface piezoelectric membrane upper surface housing formation, upper surface upside output electrode and upper surface downside output electrode are symmetrically distributed about upper surface second center line, be positioned on upper surface first center line, upper surface right side output electrode and upper surface left side output electrode are symmetrically distributed about upper surface first center line, be positioned on upper surface second center line.
2. the dual spindle piezoelectric detection gyroscope with magnetostrictive vibrator according to claim 1 is characterized in that, described magnetostrictive vibrator, and its material is the magnetostriction materials of conduction.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102305627A (en) * | 2011-07-22 | 2012-01-04 | 上海交通大学 | All solid dual-axis gyroscope with discoid piezoelectric vibrator |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104897144B (en) * | 2015-05-29 | 2019-05-24 | 上海交通大学 | More driving electrodes modal coupling micro-solid mode gyroscopes |
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| CN1210255A (en) * | 1997-09-04 | 1999-03-10 | 株式会社村田制作所 | Vibrating gyroscope and adjusting method therefor |
| CN1580700A (en) * | 2003-08-05 | 2005-02-16 | 财团法人工业技术研究院 | Miniature vibrating type double-shaft sensing gyrometer |
| CN1865850A (en) * | 2004-12-16 | 2006-11-22 | 精工爱普生株式会社 | Piezoelectric gyro element and piezoelectric gyroscope |
| US20070284971A1 (en) * | 2006-06-12 | 2007-12-13 | Kabushiki Kaisha Toshiba | Electronic device |
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- 2008-08-14 CN CN2008100416806A patent/CN101339030B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1210255A (en) * | 1997-09-04 | 1999-03-10 | 株式会社村田制作所 | Vibrating gyroscope and adjusting method therefor |
| CN1580700A (en) * | 2003-08-05 | 2005-02-16 | 财团法人工业技术研究院 | Miniature vibrating type double-shaft sensing gyrometer |
| CN1865850A (en) * | 2004-12-16 | 2006-11-22 | 精工爱普生株式会社 | Piezoelectric gyro element and piezoelectric gyroscope |
| US20070284971A1 (en) * | 2006-06-12 | 2007-12-13 | Kabushiki Kaisha Toshiba | Electronic device |
Non-Patent Citations (1)
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| JP特开2007-132887A 2007.05.31 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102305627A (en) * | 2011-07-22 | 2012-01-04 | 上海交通大学 | All solid dual-axis gyroscope with discoid piezoelectric vibrator |
| CN102305627B (en) * | 2011-07-22 | 2013-02-27 | 上海交通大学 | All solid dual-axis gyroscope with discoid piezoelectric vibrator |
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