CN101312166B - 功率半导体模块 - Google Patents

功率半导体模块 Download PDF

Info

Publication number
CN101312166B
CN101312166B CN200810109175.0A CN200810109175A CN101312166B CN 101312166 B CN101312166 B CN 101312166B CN 200810109175 A CN200810109175 A CN 200810109175A CN 101312166 B CN101312166 B CN 101312166B
Authority
CN
China
Prior art keywords
power semiconductor
substrate
cup
semiconductor modular
constitutes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200810109175.0A
Other languages
English (en)
Other versions
CN101312166A (zh
Inventor
R·波普
M·莱德勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semikron GmbH and Co KG
Semikron Elektronik GmbH and Co KG
Original Assignee
Semikron Elektronik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semikron Elektronik GmbH and Co KG filed Critical Semikron Elektronik GmbH and Co KG
Publication of CN101312166A publication Critical patent/CN101312166A/zh
Application granted granted Critical
Publication of CN101312166B publication Critical patent/CN101312166B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/04Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/053Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/10Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/02Arrangements of circuit components or wiring on supporting structure
    • H05K7/10Plug-in assemblages of components, e.g. IC sockets
    • H05K7/1053Plug-in assemblages of components, e.g. IC sockets having interior leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • H01L25/072Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Semiconductor Lasers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Led Device Packages (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Rotary Pumps (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

本发明描述一种功率半导体模块(10),包括一基片(12)和一杯形的壳体(14),其中壳体(14)的环绕环的杯边缘(16)成阶梯地构成有一加高的外边缘(18)和一相对其凹陷的内边缘(20),它们通过一阶梯表面(22)相互连接。内边缘(20)可以构成有多个凸出部(24),并且外边缘(18)构成有多个防扭转凸头(26)。基片(12)以其邻接其外边缘(28)内侧的边缘区域(30)贴紧于各凸出部(24)。阶梯表面(22)在壳体(14)的环绕的杯边缘(16)的各角区域(32)内分别构成有保角弯曲的扩大部(34),从而可靠地避免基片(12)的各角(44)与杯边缘(16)的角区域(22)之间的接触。

Description

功率半导体模块
技术领域
本发明涉及一种功率半导体模块,包括一基片和一杯形的壳体,其中壳体的杯边缘成阶梯地构成有一个环绕的加高的外边缘和一个相对外边缘凹陷的内边缘,它们通过一阶梯表面相互连接。
背景技术
在基片中优选涉及一DCB基片(直接的铜粘结的基片)。
一种这样的功率半导体模块描述于本申请人的较早的专利申请10 2008 052 607.4中。在该功率半导体模块中将因基片相对于杯形壳体的意外的扭转产生的生产废品减至最少。但已表明,虽然杯形壳体构造具有防扭转凸头,由于基片和/或壳体的尺寸公差,不能可靠地排除基片的各角与壳体的杯边缘的角区域的接触,由此这样地造成功率半导体模块的生产废品,即基片以其角的至少一个压进壳体的杯边缘的角区域内。该基片以其一角与所属的壳体的杯边缘的角区域的不符合要求的可能的接触例如被这样引起,即基片具有其外边缘的较大的尺寸公差。该尺寸公差例如这样造成,即基片通常由一相当大几倍的基片中通过激光切割而制成,其中通过所说的激光切割,几倍的基片形成有预定断裂线,所述几倍的基片沿这些预定断裂线被分裂成多个基片。
发明内容
以这些情况的了解,本发明的目的在于,提供一种开头所述型式的功率半导体模块,其中用结构上简单的措施防止基片的各角与壳体的杯边缘的所属的各角区域的接触并且避免由此造成的生产废品。
该目的按照本发明通过具有的如下特征的功率半导体模块的实现,功率半导体模块包括一基片和一杯形的壳体,其中壳体的杯边缘成阶梯地构成有一环绕的加高的外边缘和一相对外边缘凹陷的内边缘,它们通过一阶梯表面相互连接,阶梯表面在壳体的杯边缘的各角区域内分别构成有保角弯曲的扩大部。
通过壳体的杯边缘的角区域构成有弯曲的扩大部产生的优点是,当基片相对壳体、亦即相对壳体的杯边缘意外地扭转时,基片的各角在任何时候、亦即仍与壳体的杯边缘的各角区域保持间距。
如果基片具有一正方形的或至少接近正方形的基面并且壳体的杯边缘具有一相应的基面形状,这样优选的是,在壳体的杯边缘的角区域内的相应弯曲的扩大部具有两相等长的扩大部侧边。如果基片具有一矩形的基面形状,则弯曲的扩大部的两扩大侧边优选匹配于基片的长宽比确定尺寸。
在本发明的功率半导体模块中优选的是,杯形的壳体的内边缘构成有多个凸出部并且外边缘构成有多个防扭转凸头,并且基片以其邻接其外边缘内侧的边缘区域贴紧于各凸出部。通过一种这样的构成产生的优点是,通过防扭转凸头在任何情况下确定地限制基片相对于壳体、亦即相对于其杯边缘的无意的扭转。
可以符合目的的是,每一扩大部侧边具有一平行于所属的阶梯表面的侧边部分和一个紧接该侧边部分的锥面部分。两侧边部分优选通过一半径部分相互连接。
已证明有利的是,相应的锥面部分邻接于一所属的防扭转凸头。
本发明的功率半导体模块的优点是,按简单的方式实现一结构上简单的结构,基片以其外边缘的各角即使在充分利用最大允许尺寸公差的情况下也不会在壳体的杯边缘上刮削。另一优点在于,按照本发明的结构正面影响基片的例如按DE 10 2004 021 927 A1构成的涂层过程,因为在基片上涂覆的涂层材料在角区域内可以不贴靠在壳体上。
附图说明
由一本发明的功率半导体模块的一附图中所示的实施例或其重要的细节的以下描述得出其他的细节、特征和优点。其中:
图1半导体模块从下面看的视图;
图2沿图1中剖面线II-II截取的示意的部分大大放大的和不按比例的剖面图;
图3壳体的杯边缘的以放大的比例和不按比例从下面看去的视图的一部分;
图4杯形的壳体的结构的示意透视图;
图5图1的细节V的放大比例的图;
图6图1的细节VI的相当于图5的比例的图。
具体实施方式
图1以底视图示出功率半导体模块10的一结构,其包括一基片12和一杯形的壳体14。同样由图2至6显而易见的是,杯形的壳体14具有一环绕的杯边缘16,其成阶梯地构成有一环绕的加高的外边缘18和一相对该外边缘凹陷的内边缘20。加高的外边缘18和凹陷的内边缘20通过一阶梯表面22相互连接。
凹陷的内边缘20构成有彼此间隔开的多个凸出部24,并且加高的外边缘18构成有彼此间隔开的多个防扭转凸头26。基片12以其在其外边缘28邻接的其上面的边缘区域30贴紧壳体14的凸出部24。基片12优选涉及一DCB基片(=直接的铜粘结的基片)。
在杯形壳体的加高的外边缘18与凹陷的内边缘20之间的阶梯表面22在杯形壳体14的环绕的杯边缘16的各角区域32内分别构成有一保角(eckkonform)弯曲的扩大部34。相应弯曲的扩大部34具有两个相互垂直定向的扩大部侧边36,它们在图3中通过双箭头36表示。相应的扩大部侧边36具有一平行于所属的阶梯表面32的侧边部分,其在图3中通过双箭头38表示,和一紧接其的锥面部分,其在图3中通过双箭头40表示。两相互垂直定向的侧边部分38通过一半径部分42相互连接。相应的锥面部分40邻接于一所属的防扭转凸头26。
图1中示出一功率半导体模块10,其中由于基片12的外边缘28和环绕的杯边缘16的尺寸公差和由此材料一体地从其加高的外边缘18伸出的各防扭转凸头26,基片12相对于杯形壳体14或其环绕的杯边缘16沿顺时针方向微小地扭转,从而基片12的外边缘28只分别贴紧一防扭转凸头26上,同时通过阶梯表面22在杯边缘16的各角区域32内的构成分别以一保角的弯曲的扩大部34防止基片12以其各角44与壳体14的环绕的杯边缘16的各角区域34发生接触并避免一由此产生的损坏并因此避免生产废品。
相同的细节在图1至6中分别以相同的附图标记表示,从而不必要的是结合各附图分别详述全部的细节。
附图标记清单
10 功率半导体模块
12 (10的)基片
14 (10的)杯形的壳体
16 (14的)环绕的杯边缘
18 (16的)加高的外边缘
20 (16的)凹陷的内边缘
22 (18与20之间的)阶梯表面
24 (在20上用于12的)凸出部
26 (在18上用于28的)防扭转凸头
28 (12的)外边缘
30 (12的)边缘区域
32 (16的)角区域
34 (22在32处的)弯曲的扩大部
36 (34的)扩大部侧边
38 (36的)平行的侧边部分
40 (36的)锥面部分
42 (38与40之间的)半径部分
44 (12的)角

Claims (6)

1.功率半导体模块(10),包括一基片(12)和一杯形的壳体(14),其中壳体(14)的杯边缘(16)成阶梯地构成有一环绕的加高的外边缘(18)和一相对外边缘(18)凹陷的内边缘(20),它们通过一阶梯表面(22)相互连接;其特征在于,阶梯表面(22)在壳体(14)的杯边缘(16)的各角区域(32)内分别构成有保角弯曲的扩大部(34)。
2.按照权利要求1所述的功率半导体模块(10),其特征在于,杯形的壳体(14)的内边缘(20)构成有各凸出部(24),并且外边缘(18)构成有各防扭转凸头(26),并且基片(12)以其在内侧邻接其外边缘(28)的边缘区域(30)贴紧于各凸出部(24)。
3.按照权利要求2所述的功率半导体模块(10),其特征在于,相应的弯曲的扩大部(34)具有两个相互垂直定向的扩大部侧边(36)。
4.按照权利要求3所述的功率半导体模块(10),其特征在于,每一扩大部侧边(36)具有平行于所属的阶梯表面(22)的侧边部分(38)和紧接该侧边部分的锥面部分(40)。
5.按照权利要求4所述的功率半导体模块(10),其特征在于,两侧边部分(38)通过一半径部分(42)相互连接。
6.按照权利要求4所述的功率半导体模块(10),其特征在于,相应的锥面部分(40)邻接于所述防扭转凸头(26)。
CN200810109175.0A 2007-05-24 2008-05-23 功率半导体模块 Active CN101312166B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007024159.5 2007-05-24
DE102007024159A DE102007024159B3 (de) 2007-05-24 2007-05-24 Leistungshalbleitermodul

Publications (2)

Publication Number Publication Date
CN101312166A CN101312166A (zh) 2008-11-26
CN101312166B true CN101312166B (zh) 2012-02-29

Family

ID=39711122

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200810109175.0A Active CN101312166B (zh) 2007-05-24 2008-05-23 功率半导体模块

Country Status (5)

Country Link
EP (1) EP1995779B1 (zh)
CN (1) CN101312166B (zh)
AT (1) ATE537559T1 (zh)
DE (1) DE102007024159B3 (zh)
ES (1) ES2379022T3 (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686758A (en) * 1994-05-31 1997-11-11 Mitsubishi Denki Kabushiki Kaisha Semiconductor device having integral structure of case and external connection terminals
CN1581502A (zh) * 2003-08-14 2005-02-16 松下电器产业株式会社 固态成像装置的制造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3604882A1 (de) * 1986-02-15 1987-08-20 Bbc Brown Boveri & Cie Leistungshalbleitermodul und verfahren zur herstellung des moduls
DE68904399T2 (de) * 1988-05-06 1993-08-05 Whitaker Corp Haltemittel fuer ic-traegerfassungen.
DE19630173C2 (de) * 1996-07-26 2001-02-08 Semikron Elektronik Gmbh Leistungsmodul mit Halbleiterbauelementen
EP0884781A3 (en) * 1997-06-12 1999-06-30 Hitachi, Ltd. Power semiconductor module
DE102004018475A1 (de) * 2004-04-16 2005-11-10 eupec Europäische Gesellschaft für Leistungshalbleiter mbH Leistungshalbleiteranordnung
DE102004021927B4 (de) * 2004-05-04 2008-07-03 Semikron Elektronik Gmbh & Co. Kg Verfahren zur inneren elektrischen Isolation eines Substrats für ein Leistungshalbleitermodul
DE102006052607A1 (de) * 2006-11-08 2008-05-15 Semikron Elektronik Gmbh & Co. Kg Leistungsmodul

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686758A (en) * 1994-05-31 1997-11-11 Mitsubishi Denki Kabushiki Kaisha Semiconductor device having integral structure of case and external connection terminals
CN1581502A (zh) * 2003-08-14 2005-02-16 松下电器产业株式会社 固态成像装置的制造方法

Also Published As

Publication number Publication date
EP1995779B1 (de) 2011-12-14
EP1995779A2 (de) 2008-11-26
CN101312166A (zh) 2008-11-26
EP1995779A3 (de) 2011-01-05
ES2379022T3 (es) 2012-04-20
DE102007024159B3 (de) 2008-11-06
ATE537559T1 (de) 2011-12-15

Similar Documents

Publication Publication Date Title
US9831216B2 (en) Chip packaging module
US9647328B2 (en) Patch radiator
EP1073113A3 (en) Backside contact for touch sensing chip
EP1083602A2 (en) Lead frame and resin package and photoelectron device using the same
GB2584059A (en) Dielectric resonator antenna having first and second dielectric portions
USD942538S1 (en) Asymmetrical arrangement of contact pads and connection bridges of a transponder chip module
CN109411486B (zh) 感测器封装结构
WO2010056479A3 (en) Flexible and stackable semiconductor die packages, systems using the same, and methods of making the same
US11031697B2 (en) Electromagnetic device
US20170345701A1 (en) Substrate holding device
US10770383B2 (en) Semiconductor device having flexible interconnection and method for fabricating the same
CN104835793A (zh) 晶片封装体及其制造方法
EP1039539A3 (en) Ceramic circuit board
JP2010529681A5 (zh)
CN105899287A (zh) 用于循环容纳在容器内的液体的装置
CN101312166B (zh) 功率半导体模块
TWI661493B (zh) 晶圓級超聲波晶片規模製造及封裝方法
USD914693S1 (en) Directional pad module
US20170352790A1 (en) Led package structure and lens thereof
JP2015163874A (ja) ヘッダに接触するセンサダイの背面を備える流体センサ
JP2006324317A (ja) 発光ダイオード及び発光ダイオード用パッケージ
CN103003678A (zh) 用于红外线传感器的传感器部件及其制造方法
JP2017028155A5 (zh)
FR3105583B1 (fr) Substrat en silicium cristallin comprenant une surface structurée
CN103682067A (zh) 发光装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant