CN101311828A - Viscous microstructure preparation method - Google Patents

Viscous microstructure preparation method Download PDF

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Publication number
CN101311828A
CN101311828A CNA2007101052253A CN200710105225A CN101311828A CN 101311828 A CN101311828 A CN 101311828A CN A2007101052253 A CNA2007101052253 A CN A2007101052253A CN 200710105225 A CN200710105225 A CN 200710105225A CN 101311828 A CN101311828 A CN 101311828A
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China
Prior art keywords
microstructure
mould
manufacture method
viscous
substrate
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CNA2007101052253A
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Chinese (zh)
Inventor
蔡友谅
谢博彬
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Contrel Semiconductor Technology Co Ltd
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Contrel Semiconductor Technology Co Ltd
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Priority to CNA2007101052253A priority Critical patent/CN101311828A/en
Publication of CN101311828A publication Critical patent/CN101311828A/en
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Abstract

A method for manufacturing viscosity microstructure comprises the procedures as follows: a) a base plate and a mould are prepared and the bottom of the mould is provided with a plurality of nano-scale sockets; b) a liquid impression layer is arranged on the base plate; c) the mould is pressed under the base plate, so the liquid impression layer goes into the socket to a preset depth, thus forming a substrate and a nano-bulge arranged on the substrate; and air in the socket is compressed; d) the impression layer is turned into solid state by solidification; and e) demoulding, the mould is pulled upwardly off the base plate. Due to the bounce produced by the compressed air in the socket, the nano-bulges formed in the socket can be withdrawn from the sockets easily. The substrate and the nano-bulges are combined together to form the viscosity microstructure. Therefore, the requirements of mass production and low cost can be met.

Description

The manufacture method of viscous microstructure
Technical field
The present invention is relevant with the manufacturing technology of nanostructure, is meant a kind of manufacture method of viscous microstructure especially.
Background technology
Press, existing known nano-sticking paper mainly is the technology of being learnt by the toe skin of occurring in nature gecko, mainly utilizes the cochleariform process structure of very high-density on the toe to come its absorption surface is produced Fan Dewali, to reach the effect of absorption.Existing nano-sticking paper reaches adsorption effect by its surperficial high density cilium.
In the manufacturing technology of at present known nano-sticking paper, in respect of AndreK.Geim (the A.K.Geim et al. of Britain Manchester university, Nat.Mater.2,461 (2003)), Metin sitti (the M.sitti et al. of U.S. Carnegie Mellom university, J.Adhesion Sci.Technol., 18, p 1055 (2003)), the Ali Dhinojwala of Akron university (B Yurdumakan et al., Chem.Commun., p3799 (2005)) with the Yang Zhao (Y.Zhao of U.S. Atlas Scientific company, J.Vac.Sci.Techno.B, 23 (1), p331 (2006)) etc. four groups, the material that the above two use is macromolecule, and both then use CNT the back.
The method of Geim is with equipment such as the little shadow of electron beam (electron beam lithography) system, metal sputtering and electric paste etchings, the polyimide fiber of up to a million synthetic of preparation on the polyimide film.These fibers be diameter about 500 nanometers, about 2 microns long column structures of length, and interfibrous distance is 1.0 microns.Experimental result shows that it is 300 g object that every square centimeter of pact of this fiber can be carried quality, and promptly loses its adhesion after reusing for several times again.But the shortcoming of this method is not only to use expensive device such as electron beam microlithography system, metal sputtering and electric paste etching equipment.In addition, its throughput rate is also very slow, and can't large tracts of land production, and can't meet the volume production demand.Simultaneously, fibre structure is via the etching mode manufacturing, thus also cause the fibre structure characteristic changing, and can't reuse.
As for Sitti then is to adopt the mode of model (molding) method to prepare the Silicone rubber fiber of up to a million synthetic, experimental result shows that it is 0.3 g object that every square centimeter of pact of this fiber can be carried quality, therefore the shortcoming of this method is, though adopt the model method that to make characteristic fast in a large number, but its mould can't be reused, so do not meet the needs of volume production.
Dhinojwala and Zhao adopt synthetic CNT as the cochleariform process structure on the gecko toe, though can obtain the adhesion suitable with the cochleariform process structure, but the shortcoming of this method is that the growth temperature of CNT is too high, and can't directly grow up on soft polymeric substrate.
Summary of the invention
The object of the present invention is to provide a kind of manufacture method of viscous microstructure, its mould is reusable, meets volume production and low-cost demand on the industry.
For achieving the above object, the manufacture method of viscous microstructure provided by the invention includes the following step:
A) purchase a substrate and a mould: wherein the bottom surface of this mould has nano level plural groove, and respectively this groove has predetermined depth;
B) on this substrate, cover and put a liquid embossed layer;
C) this mould is pressed against this substrate, this embossed layer is between this mould and this substrate and form a base material, and this embossed layer and enter predetermined depth in these grooves and form the nanometer projection that is positioned on this base material, being positioned at respectively originally, the air of this groove promptly is compressed;
D) solidify, it is solid-state that this embossed layer is transferred to by liquid state; And
E) demoulding, this mould is upwards pulled away this substrate, withdraw from these grooves smoothly by respectively being compressed the bounce that air produces in this groove, can making the nanometer projection that is formed in this groove respectively, this base material is promptly united with these nanometer projections and is formed a viscous microstructure.
The manufacture method of described viscous microstructure, wherein, also include: step f) is taken off finished product, by taking off this viscous microstructure on this substrate.
The manufacture method of described viscous microstructure, wherein, in step a), this mould bottom surface is provided with a release agent, and this release agent covers the cell wall of this mould bottom surface and these grooves.
The manufacture method of described viscous microstructure, wherein, respectively the diameter of this groove is between 0.01 to 5 micron, and the degree of depth of these grooves is more than the twice of this nanometer rising height.
The manufacture method of described viscous microstructure, wherein, this embossed layer is a polymkeric substance.
The manufacture method of described viscous microstructure, wherein, this embossed layer is the potpourri of polymkeric substance and organic nano particle.
The manufacture method of described viscous microstructure, wherein, this embossed layer is the potpourri of polymkeric substance and inorganic nano-particle.
The manufacture method of described viscous microstructure, wherein, this embossed layer is the co-polymer of polymkeric substance and organic nano particle.
The manufacture method of described viscous microstructure, wherein, this embossed layer is the co-polymer of polymkeric substance and inorganic nano-particle.
The manufacture method of described viscous microstructure, wherein, in step d), curing mode can be heating or the mode of irradiation ultraviolet radiation is solidified this embossed layer, and this mould and this substrate the two one of them are transparent.
The manufacture method of described viscous microstructure, wherein, respectively this groove is penetrated this mould and is formed an opening respectively by bottom land, and this opening connects a gas source.
The viscous microstructure that the present invention makes according to above-mentioned manufacture method, mainly by a base material, and the plural nanometer projection that is positioned on this base material forms, and wherein respectively this nanometer protrusion diameter and highly is lower than 10 microns between 0.01 to 5 micron.
Say that briefly the manufacture method of viscous microstructure provided by the invention includes the following step: a) purchase a substrate and a mould: wherein the bottom surface of this mould has nano level plural groove, and respectively this groove has predetermined depth; B) on this substrate, cover and put a liquid embossed layer; C) this mould is pressed against this substrate, this embossed layer is between this mould and this substrate and form a base material, and this embossed layer and enter predetermined depth in these grooves and form the nanometer projection that is positioned on this base material, being positioned at respectively originally, the air of this groove promptly is compressed; D) solidify, it is solid-state that this embossed layer is transferred to by liquid state; And e) demoulding, this mould is upwards pulled away this substrate, by the bounce that air produced that is compressed in this groove respectively, can make the nanometer projection that is formed in this groove respectively withdraw from these grooves smoothly, this base material is promptly united with these nanometer projections and is formed a viscous microstructure.Thus, this mould is promptly reusable, reaches demand cheaply and can meet volume production.
Description of drawings
Fig. 1 is the first action synoptic diagram of the present invention's first preferred embodiment.
Fig. 2 is the second action synoptic diagram of the present invention's first preferred embodiment.
Fig. 3 is the 3rd action synoptic diagram of the present invention's first preferred embodiment.
Fig. 4 is the 4th action synoptic diagram of the present invention's first preferred embodiment.
Fig. 5 is the 5th action synoptic diagram of the present invention's first preferred embodiment.
Fig. 6 is the first action synoptic diagram of the present invention's second preferred embodiment.
Fig. 7 is the second action synoptic diagram of the present invention's second preferred embodiment.
Fig. 8 is the 3rd action synoptic diagram of the present invention's second preferred embodiment.
Embodiment
In order to describe technical characterstic of the present invention place in detail, lift the explanation of two following preferred embodiments and conjunction with figs. as after, wherein:
To shown in Figure 5, the manufacture method of a kind of viscous microstructure that the present invention's first preferred embodiment is provided mainly has the following step as Fig. 1:
A) purchase a substrate 11 and a mould 21: as shown in Figure 1, the bottom surface of this mould 21 has nano level plural groove 22, and respectively this groove 22 has predetermined depth, and respectively the diameter of this groove 22 between 0.01 to 5 micron.These mould 21 bottom surfaces are provided with one deck release agent 24, and this release agent 24 covers the cell wall of these mould 21 bottom surfaces and these grooves 22.When release agent 24 helps withdrawing pattern, allow the easier disengaging mould 21 of finished product.
B) as shown in Figure 2, on this substrate 11, cover and put a liquid embossed layer 31.This embossed layer 31 can be polymkeric substance or for the potpourri of polymkeric substance and organic nano particle or for the potpourri of polymkeric substance and inorganic nano-particle or be the co-polymer of polymkeric substance and organic nano particle or be the co-polymer of polymkeric substance and inorganic nano-particle.
C) as shown in Figure 3, this mould 21 is pressed against this substrate 11, this embossed layer 31 is between this mould 21 and this substrate 11 and form a base material 32, and this embossed layer 31 and enter predetermined depths in these grooves 22 and form the plural nanometer projection 34 that is positioned on this base material 32.Originally being positioned at respectively, the air of this groove 22 promptly is compressed.
D) as shown in Figure 4, solidify, make this embossed layer 31 transfer to solid-state by liquid state.And the mode of solidifying can be the mode of heating or irradiation ultraviolet radiation this embossed layer 31 is solidified, and this base material 32 and these nanometer projections 34 are promptly finalized the design and can not changed.Shown in Fig. 4, be the expression irradiation ultraviolet radiation, in the case, this mould 21 is transparent materials, passes through to make things convenient for ultraviolet ray; In addition, also can select for use transparent substrate (not shown) that ultraviolet ray is passed through by the below certainly.
E) as shown in Figure 5, the demoulding, this mould 21 is upwards pulled away this substrate 11, by the bounce that air produced that is compressed in this groove 22 respectively, can make the rice projections that are formed at respectively in this groove 22 withdraw from these grooves 22 smoothly, this base material 32 is promptly united formation one viscous microstructure 30 with these nanometer projections 34.And the degree of depth of these grooves 22 is more than the twice of height of these nanometer projections 34.
The viscous microstructure 30 that comes out by the above-mentioned steps manufacturing, promptly can be united and be formed: a base material 32 by following structure, and the plural nanometer projection 34 that is positioned on this base material 32 is formed, respectively the diameter of this nanometer projection 34 is between 0.01 to 5 micron, and respectively the height of this nanometer projection 34 is lower than 10 microns.
Please consult Fig. 6 to Fig. 8 again, the manufacture method of a kind of viscous microstructure that the present invention's second preferred embodiment is provided mainly generally is same as aforementioned first embodiment, and difference is:
In step a), as shown in Figure 6, respectively this groove 22 ' of this mould 21 ' is penetrated this mould 21 ' and is formed an opening 26 respectively by bottom land, and these openings 26 connect a gas source 28.Wherein, these openings 26 are positioned at this mould 21 ' top in present embodiment.
In step c), respectively the air in this groove 22 ' communicates with this gas source 28.
In step e), during demoulding, as shown in Figure 8, these grooves 22 ' are provided the air of predetermined pressure by this gas source 28, and reach with first embodiment in the identical effect of air bounce by compression, can when the demoulding, these nanometer projections 34 ' be released these grooves 22 '.
All the other methods of this second embodiment are identical with aforementioned first embodiment, hold and do not give unnecessary details.
By the described technology of previous embodiment as can be known, the manufacture method of viscous microstructure provided by the present invention, do not need vacuum environment, can be under general environment, with simple model technology, quick and a large amount of form nano level plural fiber, can be as microstructure with stickiness, not only can close the volume production demand on the industry, more have advantage cheaply concurrently, advantage on the industry more be arranged than known technology.

Claims (12)

1. the manufacture method of a viscous microstructure includes the following step:
A) purchase a substrate and a mould: wherein the bottom surface of this mould has nano level plural groove, and respectively this groove has predetermined depth;
B) on this substrate, cover and put a liquid embossed layer;
C) this mould is pressed against this substrate, this embossed layer is between this mould and this substrate and form a base material, and this embossed layer and enter predetermined depth in these grooves and form the nanometer projection that is positioned on this base material, being positioned at respectively originally, the air of this groove promptly is compressed;
D) solidify, it is solid-state that this embossed layer is transferred to by liquid state; And
E) demoulding, this mould is upwards pulled away this substrate, withdraw from these grooves smoothly by respectively being compressed the bounce that air produces in this groove, can making the nanometer projection that is formed in this groove respectively, this base material is promptly united with these nanometer projections and is formed a viscous microstructure.
2. according to the manufacture method of the described viscous microstructure of claim 1, wherein, also include: step f) is taken off finished product, by taking off this viscous microstructure on this substrate.
3. according to the manufacture method of the described viscous microstructure of claim 1, wherein, in step a), this mould bottom surface is provided with a release agent, and this release agent covers the cell wall of this mould bottom surface and these grooves.
4. according to the manufacture method of the described viscous microstructure of claim 1, wherein, respectively the diameter of this groove is between 0.01 to 5 micron, and the degree of depth of these grooves is more than the twice of this nanometer rising height.
5. according to the manufacture method of the described viscous microstructure of claim 1, wherein, this embossed layer is a polymkeric substance.
6. according to the manufacture method of the described viscous microstructure of claim 1, wherein, this embossed layer is the potpourri of polymkeric substance and organic nano particle.
7. according to the manufacture method of the described viscous microstructure of claim 1, wherein, this embossed layer is the potpourri of polymkeric substance and inorganic nano-particle.
8. according to the manufacture method of the described viscous microstructure of claim 1, wherein, this embossed layer is the co-polymer of polymkeric substance and organic nano particle.
9. according to the manufacture method of the described viscous microstructure of claim 1, wherein, this embossed layer is the co-polymer of polymkeric substance and inorganic nano-particle.
10. according to the manufacture method of the described viscous microstructure of claim 1, wherein, in step d), the mode that curing mode can be heating or irradiation ultraviolet radiation is solidified this embossed layer, and this mould and this substrate the two one of them are transparent.
11. according to the manufacture method of the described viscous microstructure of claim 1, wherein, respectively this groove is penetrated this mould and formed an opening respectively by bottom land, this opening connects a gas source.
12. a viscous microstructure of making according to the described manufacture method of claim 1, mainly by a base material, and the plural nanometer projection that is positioned on this base material forms, and wherein respectively this nanometer protrusion diameter and highly is lower than 10 microns between 0.01 to 5 micron.
CNA2007101052253A 2007-05-24 2007-05-24 Viscous microstructure preparation method Pending CN101311828A (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102253433A (en) * 2011-07-04 2011-11-23 江阴市通利包装材料有限公司 Prism sheet optical protective film and preparation method thereof
CN103926788A (en) * 2013-01-16 2014-07-16 昆山华冠商标印刷有限公司 Imprinting plate, manufacturing method thereof and workpiece imprinted by imprinting plate
CN107394558A (en) * 2016-05-17 2017-11-24 泰科电子(上海)有限公司 Impression block and the method that micro-structural is formed on the coating of conducting terminal

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102253433A (en) * 2011-07-04 2011-11-23 江阴市通利包装材料有限公司 Prism sheet optical protective film and preparation method thereof
CN103926788A (en) * 2013-01-16 2014-07-16 昆山华冠商标印刷有限公司 Imprinting plate, manufacturing method thereof and workpiece imprinted by imprinting plate
CN107394558A (en) * 2016-05-17 2017-11-24 泰科电子(上海)有限公司 Impression block and the method that micro-structural is formed on the coating of conducting terminal

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Open date: 20081126