CN101303506A - Optical differentiator based on silicon-based ring resonator - Google Patents

Optical differentiator based on silicon-based ring resonator Download PDF

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CN101303506A
CN101303506A CNA2008100395570A CN200810039557A CN101303506A CN 101303506 A CN101303506 A CN 101303506A CN A2008100395570 A CNA2008100395570 A CN A2008100395570A CN 200810039557 A CN200810039557 A CN 200810039557A CN 101303506 A CN101303506 A CN 101303506A
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ring resonator
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刘芳菲
苏翼凯
王涛
李强
仇旻
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Shanghai Jiao Tong University
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Abstract

一种基于硅基环形谐振腔的光微分器,属于光纤通信技术领域。本发明包括:待微分信号发生器,硅基环形谐振腔、微分后信号检测和监控系统,所述硅基环形谐振腔由一个硅基微环和一根直波导构成,两者之间的空气隙间隔为几十至几百纳米,硅基环形谐振腔频谱特征是周期性的带阻滤波特性,在谐振波长处的透射率等于0或非常接近0。本发明的原理是当硅基环形谐振腔满足或接近临界耦合状态时,其在谐振波长为中心的一定范围内的频谱特性是微分器的很好的近似。由该器件制作的光微分器结构简单,体积小,易于集成,能够用于集成的全光信号处理系统中。

Figure 200810039557

An optical differentiator based on a silicon-based ring resonant cavity belongs to the technical field of optical fiber communication. The invention includes: a signal generator to be differentiated, a silicon-based ring resonant cavity, and a signal detection and monitoring system after differentiation. The silicon-based ring resonant cavity is composed of a silicon-based microring and a straight waveguide, and the air between them The gap interval is tens to hundreds of nanometers, and the spectral characteristics of the silicon-based ring resonator are periodic band-stop filtering characteristics, and the transmittance at the resonance wavelength is equal to or very close to zero. The principle of the invention is that when the silicon-based ring resonant cavity satisfies or is close to the critical coupling state, its spectral characteristics in a certain range centered on the resonant wavelength are good approximations of differentiators. The optical differentiator made by the device is simple in structure, small in size, easy to integrate, and can be used in an integrated all-optical signal processing system.

Figure 200810039557

Description

基于硅基环形谐振腔的光微分器 Optical differentiator based on silicon-based ring resonator

技术领域 technical field

本发明涉及的是一种光纤通信技术领域的光微分器,特别是一种基于硅基环形谐振腔的光微分器。The invention relates to an optical differentiator in the technical field of optical fiber communication, in particular to an optical differentiator based on a silicon-based ring resonant cavity.

背景技术 Background technique

全光信号处理是一项新兴的光通信技术,用于解决高速电子器件遇到的带宽瓶颈问题。光时域微分器是用于全光信号处理的一个重要器件,能够在光域直接对光信号进行对时间的一阶导,可以用于模-数转换,脉冲整形,微波信号的光处理等领域。同时,大规模集成正成为光器件的一个发展趋势。新兴的绝缘体上硅结构为光子器件的集成提供了一个良好的平台。因此在集成的绝缘体上硅结构上设计用于全光信号处理功能的器件是近来热门的一个研究领域。All-optical signal processing is an emerging optical communication technology to address bandwidth bottlenecks encountered in high-speed electronics. Optical time-domain differentiator is an important device for all-optical signal processing. It can directly conduct first-order derivatives of optical signals to time in the optical domain. It can be used for analog-to-digital conversion, pulse shaping, optical processing of microwave signals, etc. field. At the same time, large-scale integration is becoming a development trend of optical devices. Emerging silicon-on-insulator structures provide a good platform for the integration of photonic devices. Therefore, the design of devices for all-optical signal processing functions on integrated silicon-on-insulator structures is a recent hot research field.

经对现有技术的文献检索发现,Naum K.Berger等人发表在光学特快2006年第15卷的文章“Temporal differentiation of optical signals using aphase-shifted fiber Bragg grating”(基于相移光纤布拉格光栅的光时域微分器),该文利用具有π的相移的光纤布拉格光栅的反射谱具有与微分器频谱相似的性质,能够对吉比特光信号进行精确而高效的一阶时域微分,但不足之处在于该微分器尺寸较大,长度有毫米量级,且材料为光纤,不适于大规模集成。Found through literature search to the prior art, Naum K.Berger et al. published the article "Temporal differentiation of optical signals using aphase-shifted fiber Bragg grating" in the 15th volume of Optics Express in 2006 (light based on phase-shifted fiber Bragg grating time-domain differentiator), this paper utilizes that the reflection spectrum of a fiber Bragg grating with a phase shift of π has similar properties to the spectrum of a differentiator, and can perform accurate and efficient first-order time-domain differentiation of gigabit optical signals, but it is not enough The difference lies in that the size of the differentiator is large, the length is on the order of millimeters, and the material is optical fiber, which is not suitable for large-scale integration.

发明内容 Contents of the invention

本发明的目的在于克服现有技术中的不足,提供一种基于硅基环形谐振腔的光微分器,该技术利用了与单根直波导耦合的硅基微环的频谱具有的凹陷滤波的特性,当工作在临界耦合状态或十分接近临界耦合状态(如深度大于27dB),其在谐振波长处的透射率几乎为0,因此在谐振波长周边的一定频谱范围内(小于3dB带宽)具有微分器类似的频谱特性,该微分器具有体积小,结构简单,易于大规模集成的优点。The purpose of the present invention is to overcome the deficiencies in the prior art, to provide a kind of optical differentiator based on silicon-based ring resonator, this technology has utilized the characteristic of notch filtering that the frequency spectrum of the silicon-based microring coupled with a single straight waveguide has , when working in the critical coupling state or very close to the critical coupling state (such as the depth is greater than 27dB), its transmittance at the resonance wavelength is almost 0, so there is a differentiator in a certain spectral range around the resonance wavelength (less than 3dB bandwidth) Similar to the spectral characteristics, the differentiator has the advantages of small size, simple structure, and easy large-scale integration.

本发明是通过以下技术方案实现的,本发明包括:待微分信号发生器,硅基环形谐振腔,以及微分后信号检测和监控系统。其中待微分信号发生器与硅基环形谐振腔的输入相连,硅基环形谐振腔的输出与微分后信号检测和监控系统相连。The invention is realized through the following technical solutions, and the invention includes: a signal generator to be differentiated, a silicon-based ring resonant cavity, and a signal detection and monitoring system after differentiation. The signal generator to be differentiated is connected with the input of the silicon-based ring resonant cavity, and the output of the silicon-based ring resonant cavity is connected with the post-differentiation signal detection and monitoring system.

所述的待微分信号发生器,包括可调激光器,电信号发生器,电光调制器。其中:可调激光器产生连续的激光,波长对应环形谐振腔的一个谐振峰,其输出端口与电光调制器的输入端口相连,电信号发生器输出端口与电光调制器的射频输入端口相连,电光调制器负责将电信号调制到光上,产生待微分的光信号。The signal generator to be differentiated includes an adjustable laser, an electrical signal generator, and an electro-optic modulator. Among them: the tunable laser generates continuous laser light, the wavelength corresponds to a resonance peak of the ring resonator, its output port is connected to the input port of the electro-optic modulator, the output port of the electrical signal generator is connected to the radio frequency input port of the electro-optic modulator, and the electro-optic modulation The device is responsible for modulating the electrical signal onto the light to generate the optical signal to be differentiated.

所述硅基环形谐振腔由一个硅基微环和一根直波导构成,硅基微环和一根直波导之间的空气隙间隔为几十至几百纳米,硅基环形谐振腔频谱特征是周期性的带阻滤波特性,在谐振波长处的透射率等于0或非常接近0。The silicon-based ring resonator is composed of a silicon-based microring and a straight waveguide, the air gap between the silicon-based microring and a straight waveguide is tens to hundreds of nanometers, and the silicon-based ring resonator has spectral characteristics It is a periodic band-stop filter characteristic, and the transmittance at the resonance wavelength is equal to 0 or very close to 0.

所述硅基环形谐振腔,改变其频谱是通过改变硅基微环和直波导之间的空气隙间隔,改变硅基微环和直波导之间的耦合程度,临界耦合的条件是当硅基微环的本征损耗和由于跟直波导耦合导致的损耗相等时。The silicon-based ring resonator changes its frequency spectrum by changing the air gap interval between the silicon-based microring and the straight waveguide, and changing the coupling degree between the silicon-based microring and the straight waveguide. The critical coupling condition is when the silicon-based ring resonator When the intrinsic loss of the microring is equal to the loss due to coupling with the straight waveguide.

所述的微分后信号检测和监控系统包括功分器,功率监控器和检测系统。其中硅基环形谐振腔的输出与功分器的输入相连,功分器输出功率较大的端口与检测系统相连,输出功率较小的端口与功率监控器相连。功率监控器用来监控激光器波长是否为谐振波长,检测系统用来观察微分后的波形,可以采用示波器进行检测。The post-differentiation signal detection and monitoring system includes a power divider, a power monitor and a detection system. Wherein the output of the silicon-based ring resonant cavity is connected with the input of the power divider, the port with higher output power of the power divider is connected with the detection system, and the port with smaller output power is connected with the power monitor. The power monitor is used to monitor whether the laser wavelength is a resonant wavelength, and the detection system is used to observe the differentiated waveform, which can be detected by an oscilloscope.

本发明的原理是当硅基环形谐振腔满足或接近临界耦合状态时,其在谐振波长为中心的一定范围内的频谱特性是微分器的很好的近似。由该器件制作的光微分器结构简单,体积小,易于集成,能够用于集成的全光信号处理系统中。The principle of the invention is that when the silicon-based ring resonant cavity satisfies or is close to the critical coupling state, its spectral characteristics in a certain range centered on the resonant wavelength are good approximations of differentiators. The optical differentiator made by the device is simple in structure, small in size, easy to integrate, and can be used in an integrated all-optical signal processing system.

与现有技术相比,本发明具有如下有益效果:本发明使用的环形谐振腔结构简单,体积小,环的半径只有几微米至几十微分,而现有技术中使用的光纤光栅长度在毫米数量级。另外,使用绝缘体上硅结构作为微分器的材料,相比现有技术中用光纤作材料,更易于大规模的光电集成。这是因为绝缘体上硅结构刻蚀等用到的工艺与成熟的超大规模集成电路的工艺完全兼容,而大规模集成的光电器件较分立器件能更节约成本。Compared with the prior art, the present invention has the following beneficial effects: the structure of the ring resonator used in the present invention is simple, the volume is small, and the radius of the ring is only several microns to tens of microns, while the length of the fiber grating used in the prior art is within millimeters Magnitude. In addition, using the silicon-on-insulator structure as the material of the differentiator is easier for large-scale optoelectronic integration than using optical fiber as the material in the prior art. This is because the processes used for silicon-on-insulator structure etching are fully compatible with mature VLSI processes, and large-scale integrated optoelectronic devices can save costs more than discrete devices.

附图说明 Description of drawings

图1为本发明结构示意图;Fig. 1 is a structural representation of the present invention;

图2为本发明实施例装置及器件结构图;Fig. 2 is the structural diagram of device and device of the embodiment of the present invention;

图3为本发明实施例测试结果图。Fig. 3 is a graph showing test results of an embodiment of the present invention.

具体实施方式 Detailed ways

下面结合附图对本发明的实施例作详细说明:本实施例在以本发明技术方案为前提下进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于下述的实施例。The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following the described embodiment.

如图1所示,本实施例包括:待微分信号发生器,硅基环形谐振腔,以及微分后信号检测和监控系统。其中待微分信号发生器与硅基环形谐振腔的输入相连,硅基环形谐振腔的输出与微分后信号检测和监控系统相连。As shown in FIG. 1 , this embodiment includes: a signal generator to be differentiated, a silicon-based ring resonant cavity, and a signal detection and monitoring system after differentiation. The signal generator to be differentiated is connected with the input of the silicon-based ring resonant cavity, and the output of the silicon-based ring resonant cavity is connected with the post-differentiation signal detection and monitoring system.

所述的待微分信号发生器,包括可调激光器,电信号发生器,电光调制器。其中:可调激光器产生连续的激光,波长对应环形谐振腔的一个谐振峰,其输出端口与电光调制器的输入端口相连,电信号发生器输出端口与电光调制器的射频输入端口相连,电光调制器负责将电信号调制到光上,产生待微分的光信号。The signal generator to be differentiated includes an adjustable laser, an electrical signal generator, and an electro-optic modulator. Among them: the tunable laser generates continuous laser light, the wavelength corresponds to a resonance peak of the ring resonator, its output port is connected to the input port of the electro-optic modulator, the output port of the electrical signal generator is connected to the radio frequency input port of the electro-optic modulator, and the electro-optic modulation The device is responsible for modulating the electrical signal onto the light to generate the optical signal to be differentiated.

所述的硅基环形谐振腔包括一个采用绝缘体上硅结构制作的微环和一个与之靠得很近(之间的空气隙间隔为几十至几百纳米)的直波导。这种结构的环形谐振腔的频谱特性为周期性的凹陷滤波,也即周期性的带阻滤波。其凹陷滤波的深度取决于微环和直波导间的距离以及微环的损耗。当微环和直波导的间隔恰当使得环形谐振腔工作在临界耦合状态时,在谐振波长处环形谐振腔的透射率为0,即谐振波长的光信号完全不能通过环形谐振腔。此时环形谐振腔的频谱特性在谐振波长为中心的一定范围内(小于频谱的3dB带宽)是微分器的频谱特性的很好的近似,因此,本发明能对在一定带宽限制下(小于频谱的3dB带宽)的光信号进行时域微分。The silicon-based ring resonant cavity includes a micro-ring made of a silicon-on-insulator structure and a straight waveguide that is very close to it (with an air gap interval of tens to hundreds of nanometers). The frequency spectrum characteristic of the ring resonator with this structure is periodic notch filtering, that is, periodic band-stop filtering. The depth of the notch filter depends on the distance between the microring and the straight waveguide and the loss of the microring. When the distance between the microring and the straight waveguide is appropriate so that the ring resonator works in the critical coupling state, the transmittance of the ring resonator at the resonance wavelength is 0, that is, the optical signal at the resonance wavelength cannot pass through the ring resonator at all. Now the spectral characteristic of the ring resonator is a good approximation of the spectral characteristic of the differentiator in a certain range (less than the 3dB bandwidth of the frequency spectrum) centered on the resonance wavelength. 3dB bandwidth) optical signal for time-domain differentiation.

所述的微分后信号检测和监控系统包括功分器,功率监控器和检测系统。其中硅基环形谐振腔的输出与功分器的输入相连,功分器输出功率较大的端口与检测系统相连,输出功率较小的端口与功率监控器相连。功率监控器用来监控激光器波长是否为谐振波长,检测系统用来观察微分后的波形,可以采用示波器进行检测。The post-differentiation signal detection and monitoring system includes a power divider, a power monitor and a detection system. Wherein the output of the silicon-based ring resonant cavity is connected with the input of the power divider, the port with higher output power of the power divider is connected with the detection system, and the port with smaller output power is connected with the power monitor. The power monitor is used to monitor whether the laser wavelength is a resonant wavelength, and the detection system is used to observe the differentiated waveform, which can be detected by an oscilloscope.

如图2所示,为实施例对类高斯形的光信号进行微分的情况。图2(a)是实验装置图。波长约为1554.46nm的可调光源输出的光载波送给电光调制器。电光调制器包括马赫曾德调制器以及其前面用来控制其偏振态的第一偏振控制器。马赫曾德调制器的偏置电压约为3.1V。电信号发生器包括正弦信号发生器用来产生10GHz的正弦信号以及电放大器以产生能够驱动马赫曾德调制器的电信号。所产生的光信号为占空比为50%的类高斯形脉冲。电光调制器部分还包括第一掺铒光纤放大器以补偿马赫曾德调制器的插入损耗。掺铒光纤放大器放大再与硅基环形谐振腔系统的第二偏振控制器相连。第二偏振控制器用于控制进入到硅基环形谐振腔的光信号的偏振态,使之为横电场模。微分后系统检测和监控系统中的功分器为95∶5功分器,其中95%部分的光接光检测系统,包括第二掺铒光纤放大器放大以及光带通滤波器和示波器用来观察其波形。另外5%部分的光输入到功率监控器用于监控信号波长是否位于谐振波长处。图2(b)是实施例用到的硅基环形谐振腔的结构图。图2(b-i)为硅基环形谐振腔的俯视图。硅基微环半径为40微米,微环和直波导宽都为450纳米,直波导和环之间的空气间隙为90纳米。图2(b-ii)为硅基微环的横截面示意图。用来制作硅基微环的绝缘体上的硅结构最上方为250纳米厚的单晶硅,中间是3微米厚的二氧化硅缓冲层,最下面是525微米厚的硅衬底。As shown in FIG. 2 , it is a case where the embodiment differentiates a Gaussian-like optical signal. Figure 2(a) is a diagram of the experimental setup. The optical carrier output by the adjustable light source with a wavelength of about 1554.46nm is sent to the electro-optical modulator. The electro-optic modulator includes a Mach-Zehnder modulator followed by a first polarization controller for controlling its polarization state. The bias voltage of the Mach-Zehnder modulator is about 3.1V. The electric signal generator includes a sinusoidal signal generator for generating a 10GHz sinusoidal signal and an electric amplifier for generating an electric signal capable of driving the Mach-Zehnder modulator. The generated optical signal is a Gaussian-like pulse with a duty cycle of 50%. The electro-optic modulator section also includes a first erbium-doped fiber amplifier to compensate for the insertion loss of the Mach-Zehnder modulator. The erbium-doped fiber amplifier is amplified and then connected to the second polarization controller of the silicon-based ring resonator system. The second polarization controller is used to control the polarization state of the optical signal entering the silicon-based ring resonator to make it a transverse electric field mode. The power divider in the post-differentiation system detection and monitoring system is a 95:5 power divider, of which 95% of the light-connected light detection system includes the second erbium-doped fiber amplifier amplification and optical band-pass filter and oscilloscope for observation its waveform. The other 5% of the light is input to the power monitor to monitor whether the signal wavelength is at the resonance wavelength. Fig. 2(b) is a structural diagram of the silicon-based ring resonator used in the embodiment. Figure 2(b-i) is the top view of the silicon-based ring resonator. The radius of the silicon-based microring is 40 micrometers, the width of both the microring and the straight waveguide is 450 nanometers, and the air gap between the straight waveguide and the ring is 90 nanometers. Figure 2(b-ii) is a schematic cross-sectional view of a silicon-based microring. The silicon-on-insulator structure used to make silicon-based microrings has a 250-nanometer-thick monocrystalline silicon on top, a 3-micron-thick silicon dioxide buffer layer in the middle, and a 525-micron-thick silicon substrate at the bottom.

如图3所示,为本发明实施例测试结果图。图3(a)为测得的硅基微环的谐振峰以及通过拟合得到的频谱图,图3(a)中谐振峰深度约为27.5dB,表明环形谐振腔已经非常接近临界耦合状态,3dB带宽约为0.34nm;图3(b)和图3(c)分别为为光信号发生器产生的类高斯形光信号,以及微分后的光信号。理论上高斯脉冲微分后在光强上为两个对称的脉冲,可见实验结果与理论的微分效果很接近,从而证明了该微分器的可行性。As shown in FIG. 3 , it is a diagram of test results of the embodiment of the present invention. Figure 3(a) is the measured resonance peak of the silicon-based microring and the spectrum obtained by fitting. The depth of the resonance peak in Figure 3(a) is about 27.5dB, indicating that the ring resonator is very close to the critical coupling state. The 3dB bandwidth is about 0.34nm; Figure 3(b) and Figure 3(c) are the Gaussian-like optical signal generated by the optical signal generator and the differentiated optical signal respectively. Theoretically, after Gaussian pulse is differentiated, there are two symmetrical pulses in terms of light intensity. It can be seen that the experimental results are very close to the theoretical differential effect, thus proving the feasibility of the differentiator.

Claims (4)

1.一种基于硅基环形谐振腔的光微分器,包括:待微分信号发生器,硅基环形谐振腔,以及微分后信号检测和监控系统,待微分信号发生器与硅基环形谐振腔的输入相连,硅基环形谐振腔的输出与微分后信号检测和监控系统相连,其特征在于,所述硅基环形谐振腔由一个硅基微环和一根直波导构成,硅基微环和一根直波导之间的空气隙间隔为几十至几百纳米,硅基环形谐振腔频谱呈周期性的带阻滤波特性,在谐振波长处的透射率等于0或非常接近0。1. An optical differentiator based on a silicon-based ring resonator, comprising: a signal generator to be differentiated, a silicon-based ring resonator, and a signal detection and monitoring system after differentiation, and the signal generator to be differentiated and the silicon-based ring resonator The input is connected, and the output of the silicon-based ring resonator is connected with the differential signal detection and monitoring system. It is characterized in that the silicon-based ring resonator is composed of a silicon-based microring and a straight waveguide, and the silicon-based microring and a The air gap between the straight waveguides is tens to hundreds of nanometers. The frequency spectrum of the silicon-based ring resonator exhibits periodic band-stop filtering characteristics, and the transmittance at the resonance wavelength is equal to 0 or very close to 0. 2.根据权利要求1所述的基于硅基环形谐振腔的光微分器,其特征是,所述硅基环形谐振腔,改变其频谱是通过改变硅基微环和直波导之间的空气隙间隔,改变硅基微环和直波导之间的耦合程度,临界耦合的条件是当硅基微环的本征损耗和由于跟直波导耦合导致的损耗相等时。2. The optical differentiator based on the silicon-based ring resonator according to claim 1, characterized in that, the silicon-based ring resonator changes its frequency spectrum by changing the air gap between the silicon-based microring and the straight waveguide The interval changes the coupling degree between the silicon-based microring and the straight waveguide. The critical coupling condition is when the intrinsic loss of the silicon-based microring is equal to the loss caused by coupling with the straight waveguide. 3.根据权利要求1所述的基于硅基环形谐振腔的光微分器,其特征是,所述的待微分信号发生器包括可调激光器、电信号发生器、电光调制器,其中:可调激光器产生连续的激光,波长对应环形谐振腔的一个谐振峰,其输出端口与电光调制器的输入端口相连,电信号发生器输出端口与电光调制器的射频输入端口相连,电光调制器负责将电信号调制到光上,产生待微分的光信号。3. The optical differentiator based on silicon-based ring resonator according to claim 1, wherein said signal generator to be differentiated comprises an adjustable laser, an electrical signal generator, and an electro-optic modulator, wherein: adjustable The laser generates continuous laser light, the wavelength corresponds to a resonant peak of the ring resonator, its output port is connected to the input port of the electro-optic modulator, the output port of the electrical signal generator is connected to the radio frequency input port of the electro-optic modulator, and the electro-optic modulator is responsible for the electrical The signal is modulated onto the light, producing an optical signal to be differentiated. 4.根据权利要求1所述的基于硅基环形谐振腔的光微分器,其特征是,所述的微分后信号检测和监控系统包括功分器、功率监控器和检测系统,其中硅基环形谐振腔的输出与功分器的输入相连,功分器输出功率较大的端口与检测系统相连,输出功率较小的端口与功率监控器相连,功率监控器用来监控激光器波长是否为谐振波长,检测系统用来观察微分后的波形。4. The optical differentiator based on silicon-based ring resonator according to claim 1, wherein the signal detection and monitoring system after differentiation includes a power divider, a power monitor and a detection system, wherein the silicon-based ring The output of the resonant cavity is connected to the input of the power splitter, the port with the larger output power of the power splitter is connected to the detection system, and the port with the smaller output power is connected to the power monitor, which is used to monitor whether the laser wavelength is a resonant wavelength, The detection system is used to observe the differentiated waveform.
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