CN101296037B - Apparatus and method for light-operated controlling light delay line based on silicon based micro-ring - Google Patents
Apparatus and method for light-operated controlling light delay line based on silicon based micro-ring Download PDFInfo
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Abstract
The invention relates to a device and a method of light-control and adjustable light delay line based on a silica-based micro-ring, pertaining to the technical field of optical communication. The device comprises a data packet transmitter, a pump-control optical generation system, the silica-based micro-ring, a coupled system of the silica-based micro-ring and a data packet delay measuring system, wherein, the data packet transmitter and pump-control light are connected through a 3dB coupler, the output of the coupler is connected with the silica-based micro-ring and the coupled system of the silica-based micro-ring, and the light output from the silica-based micro-ring is input into the data packet delay measuring system to calculate the relative delay of the data packet. The invention applies the silica-based micro-ring as an ultra-small integratable on-chip delay line and controls the delay of the data packet by using the pump light entering the silica-based micro-ring by being coupled with the data packet. By adjusting an adjustable light attenuator successively, the power of the pump light can be changed successively, thus realizing accurate and successive adjustment over data packet delay. The invention has low requirement for the bump power, simple method and external control which adding no surplus parts on the manufacture of the device.
Description
Technical field
The present invention relates to the apparatus and method in a kind of optical communication technique field, specifically is a kind of apparatus and method of the light-operated controlling light delay line based on silicon-based micro ring.
Background technology
The light caching technology is a kind of emerging in order to solve a key technology of data packet competition in the full light interconnection of full light optical switching network and computer.Especially, adopt the sheet glazing caching technology of micro-nano waveguiding structure to be applied in the integrated optical circuit.Recently the silicon on insulated substrate technology of rising provides a good platform for integrated optoelectronic device, and the manufacture craft of this structure and CMOS integrated circuit technology are compatible fully, the component compact of making, and size can reach submicron order.The essence of light buffer memory is exactly optical delay line, generally need utilize resonance enhancement effect that material dispersion or structure chromatic dispersion cause to reduce the length of delay line.The resonance that material dispersion causes strengthens the nonlinear effect that generally will utilize material, needs very high control luminous power; The resonance that the structure chromatic dispersion causes strengthens the structure by the design resonant cavity, utilizes the linear effect of device to realize postponing, and has greater flexibility.
Find by prior art documents, people such as Fengnian Xia are published in Nature Photonics first-phase article " Ultracompact optical buffers on a silicon chip " (microminiature light buffer memory on the silicon chip) in 2007, have produced an extra small optical buffer in this article on silicon chip.In this device, the most nearly delay line that constitutes of the delay line that constitutes of 100 the ring resonator of single-ended coupling and the ring resonator that intercouples that designed cascade can postpone 10 bits to the True Data of 20Gb/s.Though the retardation that this method provides is big, weak point is that retardation is fixing non-adjustable, lacks flexibility.And a lot of application scenarios need the delay of light buffer memory adjustable.
Summary of the invention
The objective of the invention is at above-mentioned the deficiencies in the prior art, a kind of apparatus and method of the light-operated controlling light delay line based on silicon-based micro ring have been proposed, this technology utilizes the linear effect of silicon-based micro ring resonator to postpone, injecting the thermal effect that produces by optical pumping regulates postponing, promptly the temperature of silicon-based micro ring is raise by optical pumping, refractive index changes, cause the red shift of resonance peak, thereby being equivalent to the wavelength that has changed input signal, also is that variation has taken place the retardation that signal passes through silicon-based micro ring.The present invention has the advantage of accurate control lag amount, can make retardation from 0 adjustable continuously in the maximum range because change the control of input pump power, reaches the retardation of signal is finely tuned accurately.
The present invention is achieved by the following technical solutions:
The device based on the light-operated controlling light delay line of silicon-based micro ring that the present invention relates to comprises: packet transmission machine, pumping control light produce system, silicon-based micro ring and coupled system thereof, packet delay measurements system.Wherein: the packet transmission machine produces system with pumping control light and links to each other with silicon-based micro ring and coupled system thereof simultaneously, and the light of exporting from silicon-based micro ring is input to the relative delay amount that packet delay measurements system comes the calculated data bag.
Described packet transmission machine comprises first laser, electric signal generator, electrooptic modulator and image intensifer.Wherein: the output port of first laser links to each other with the input port of electrooptic modulator, the electric signal generator output port links to each other with the electric signal input end mouth of electrooptic modulator, electrooptic modulator is responsible for the signal of telecommunication is modulated on the light, generation has the packet of special code type, and image intensifer amplifies packet to compensate the insertion loss of electrooptic modulator.
Described pumping is controlled light generation system and is comprised second laser, high power light amplifier and adjustable optical attenuator.Wherein: the output port of second laser links to each other with high power light amplifier in mouth, and the high power light amplifier output port links to each other with the adjustable optical attenuator input port, can continuously change the size of pumping light power.
Described high power light amplifier is meant the image intensifer of saturation output power greater than 20dBm.
Described silicon-based micro ring and coupled system thereof comprise that silicon based annular resonant cavity, end face cut flat input bare fiber and output bare fiber, first Polarization Controller, second Polarization Controller, coupler, power splitter, power monitor.Wherein: the input of first Polarization Controller links to each other with the output of packet transmission machine, the input of second Polarization Controller links to each other with the output that pumping control light produces system, the output of the output of first Polarization Controller and second Polarization Controller links to each other with two inputs of coupler, the output of coupler links to each other with the input bare fiber, the input bare fiber is coupled to light the silicon-based micro ring from optical fiber, output bare fiber the light that is used for collecting from silicon-based micro ring, its output links to each other with the input of power splitter, the output port that the power splitter power output is bigger links to each other with packet delay measurements system, and the less output port of power output links to each other with power monitor.
Described packet delay measurements system comprises image intensifer, tunable, oscilloscope.Wherein: image intensifer links to each other with the output of silicon-based micro ring and coupled system thereof, and tunable links to each other with the output of image intensifer, and to isolate packet, the output of tunable is linked on the oscilloscope.
The present invention utilizes silicon based annular resonant cavity that packet is delayed time, and this amount of delay is in resonance wave strong point maximum, and the off-resonance wavelength is far away more, and amount of delay is more little.This time-delay can accurately be controlled by changing the way of injecting pumping control luminous power.It is specially the pump light wavelength and is arranged near another resonance peak that resonance spectrum is different from the data packet signal wavelength, the thermal effect that pump light produces changes the refractive index of silicon-based micro ring, make the resonance spectrum of silicon-based micro ring move toward the low frequency direction, different pumping light powers causes the side-play amount of different resonance spectrum, thereby is equivalent to control amount of delay by the wavelength of regulating the data-signal bag.
The method based on the light-operated controlling light delay line of silicon-based micro ring that the present invention relates to comprises following concrete steps:
Step 1 in the packet transmission machine, is transferred to the pseudo random sequence that electric signal generator produces on the light by electrooptic modulator, produces the packet of required sign indicating number type.
Step 2 is closed pump signal, regulates first Polarization Controller link to each other with packet transmission machine branch road, makes the power output maximum of the light that power monitor detects, and fixes the position of first Polarization Controller.Regulate the wavelength of data packet signal branch road, observe the reading of power monitor, the luminous power minimum that power monitor is detected, then the packet wavelength just is positioned at a resonance peaks of silicon-based micro ring.Regulate the tunable of packet delay measurements system, make that the wavelength of tunable centre wavelength and packet is the same.
Step 3 is opened second laser that produces pump light, closes the packet transmission machine.Second Polarization Controller that adjusting and pumping control light generation system links to each other, the light maximum that power monitor is detected is fixed the position of this Polarization Controller.Regulate the output wavelength (another resonance peak position that is different from the data packet signal wavelength) of second laser, observe the reading of power monitor, the luminous power minimum that power monitor is detected, find another resonance peak of silicon-based micro ring, continue to increase wavelength again, make the reading of power monitor increase about 3dB, this wavelength is made as the pumping light wavelength.
Step 4 is opened the packet transmission machine, and the adjustable optical attenuator of regulating pumping control light generation system makes decay maximum, notes the waveform by the data packet signal light after silicon-based micro ring and coupled system and the packet measuring system under oscilloscope; Regulate the adjustable optical attenuator that pumping control light produces system continuously, note the pumping light power and the corresponding waveform that are input to bare fiber.
Step 5, waveform for record by the edge of individual signals pulse or the position judgment retardation at peak value place, can obtain a retardation like this with the calibration curve of going into fine pumping light power, by this calibration curve, can regulate the retardation that obtains needs into fine pump power.
Described by the individual signals pulse the edge or the position judgment retardation at peak value place, concrete grammar be edge during with the complete off-resonance of data packet signal or peak as the reference position, retardation is the poor of edge or position, peak value place and reference position.
Compared with prior art, the present invention has following beneficial effect: the present invention has added control light on the branch road of packet, makes that the retardation of packet can be accurately adjustable by the luminous power that changes control light.And people's such as Fengnian Xia device can only be realized the retardation of fixing.In addition, the thermal effect control lag that the present invention utilizes pump light to produce, because thermal effect is the effect that is easy to generate most, therefore the pump power that needs is low.The threshold power that postpones to change is about 0dBm (input bare fiber place records), makes the power of the complete off-resonance of signal wavelength position be about 10dBm.In addition, the method is simple, externally control, and need not in the making of device increases extra part, makes on the manufacture craft simple.
Description of drawings
Fig. 1 is a structure principle chart of the present invention;
Fig. 2 is experimental provision and device architecture figure in the embodiments of the invention;
Fig. 3 is embodiments of the invention figure as a result.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, the present invention is based on the structure principle chart of device of the light-operated controlling light delay line of silicon-based micro ring, comprising: packet transmission machine, pumping control light produce system, silicon-based micro ring and coupled system thereof, packet delay measurements system.Wherein: the packet transmission machine links to each other with silicon-based micro ring and coupled system thereof with pumping control light simultaneously, and the light of exporting from silicon-based micro ring is input to the relative delay amount that packet delay measurements system comes the calculated data bag.
Described packet transmission machine comprises first laser, electric signal generator, electrooptic modulator, image intensifer.Wherein: the output port of first laser links to each other with the input port of electrooptic modulator, the electric signal generator output port links to each other with the electric signal input end mouth of electrooptic modulator, electrooptic modulator is responsible for the signal of telecommunication is modulated on the light, generation has the packet of special code type, and image intensifer amplifies packet to compensate the insertion loss of electrooptic modulator.
Described pumping is controlled light generation system and is comprised second laser, high power (saturation output power is greater than 20dBm) image intensifer and adjustable optical attenuator.Wherein: the output port of second laser links to each other with high power light amplifier in mouth, and the high power light amplifier output port links to each other with the adjustable optical attenuator input port, can continuously change the size of pumping light power.
Described silicon-based micro ring and coupled system thereof comprise that silicon based annular resonant cavity, end face cut flat input bare fiber and output bare fiber, first Polarization Controller, second Polarization Controller, coupler, power splitter, power monitor.Wherein: the input of first Polarization Controller links to each other with the output of packet transmission machine, the input of second Polarization Controller links to each other with the output that pumping control light produces system, the output of the output of first Polarization Controller and second Polarization Controller links to each other with two inputs of coupler, the output of coupler links to each other with the input bare fiber, bare fiber is coupled to light the silicon-based micro ring from optical fiber, output bare fiber the light that is used for collecting from silicon-based micro ring, its output links to each other with the input of power splitter, the output port that the power splitter power output is bigger links to each other with packet delay measurements system, and the less output port of power output links to each other with power monitor.
Described packet delay measurements system comprises image intensifer, tunable, oscilloscope.Wherein: image intensifer links to each other with the output of silicon-based micro ring and coupled system thereof, and tunable links to each other with the output of fiber amplifier, and to isolate packet, the output of tunable is linked on the oscilloscope.
The number of parts such as above-mentioned first Polarization Controller of the present invention, second Polarization Controller, electrooptic modulator can be adjusted, and both can be one, also can be for a plurality of.
As shown in Figure 2, for embodiment the packet of nrz format is carried out the situation of light-operated control lag.Fig. 2 (a) is an installation drawing.
Step 1, in the packet transmission machine, first laser output continuous light carrier wave is delivered to electrooptic modulator, and the length that electric signal generator produces 5Gb/s is 2
7-1 the pseudorandom signal of telecommunication and the sinusoidal signal of 5GHz, electrooptic modulator are used for the signal of telecommunication is transferred on the light, and the generation duty ratio is 50% NRZ.Wherein electric signal generator comprises that first electric signal generator produces the pseudorandom signal of telecommunication and second electric signal generator produces sinusoidal signal, and first electric amplifier and second electric amplifier are to produce the radiofrequency signal that can drive electrooptic modulator; Electrooptic modulator comprises that first Mach of zehnder modulators is used for the pseudorandom signal of telecommunication that first electric signal generator produces is transferred on the light, produce the light signal of non-return-to-zero form, second Mach of zehnder modulators is used for the sinusoidal signal that second electric signal generator produces is transferred on the light, and the generation optical clock signal cuts into the form that makes zero with the light signal of non-return-to-zero form; Lay respectively at the polarization state that the 3rd Polarization Controller before first Mach of zehnder modulators and the second Mach of zehnder modulators and the 4th Polarization Controller are controlled first Mach of zehnder modulators and second Mach of zehnder modulators respectively; And the adjustable optic fibre delay line between first Mach of zehnder modulators and second Mach of zehnder modulators is used for the light signal and the optical clock signal of synchronous non-return-to-zero form.The bias voltage of first Mach of zehnder modulators and second Mach of zehnder modulators all is about 3.1V.First image intensifer comprises first erbium-doped fiber amplifier and first band pass filter, with after the output amplification of second Mach of zehnder modulators and the filtering as final data bag signal.
Step 2 is closed pump signal, regulates the power output maximum that first Polarization Controller link to each other with first band pass filter makes the light that power monitor detects, and fixes the position of first Polarization Controller.Wherein the coupler of using in silicon-based micro ring and the coupled system thereof is a three-dB coupler, and power splitter is the power splitter of 95:5.Regulate the wavelength of first laser, observe the reading of power monitor, the luminous power minimum that power monitor is detected, then the packet wavelength just is positioned at a resonance peaks of silicon-based micro ring, this moment, the wavelength of first laser was near the 1548.675nm, and the packet power that records at input bare fiber place is-7dBm.Regulate the tunable of packet delay measurements system, make tunable centre wavelength also be 1548.675nm.
Step 3 is opened second laser that produces pump light, closes the packet transmission machine.Second Polarization Controller that adjusting and pumping control light generation system links to each other, the light maximum that power monitor is detected is fixed the position of this Polarization Controller.Regulate the output wavelength of second laser, observe the reading of power monitor, the luminous power minimum that power monitor is detected, find another resonance peak of silicon-based micro ring, continue to increase wavelength again, make the reading of power monitor increase about 3dB, this wavelength is made as the pumping light wavelength, pumping this moment light wavelength is 1552.860nm.Wherein the high power light amplifier in the pumping control light generation system comprises that saturation output power is that the high power erbium-doped fiber amplifier of 21dBm and second band pass filter are with the filtering spontaneous emission noise.
Step 4, open the packet transmission machine, the adjustable optical attenuator of regulating pumping control light generation system makes decay maximum (about 60dB decay), notes the waveform by the data packet signal light after silicon-based micro ring and coupled system and the packet measuring system under oscilloscope; Regulate the adjustable optical attenuator that pumping control light produces system continuously, note the pumping light power and the corresponding waveform that are input to bare fiber.Wherein the structure chart of silicon-based micro ring is shown in Fig. 2 (b).Fig. 2 (b-i) and (b-ii) be the vertical view of silicon-based micro ring under the different amplification.The silicon-based micro ring radius is 20 microns, wide 450 nanometers, and the air gap between straight wave guide and the ring is 120 nanometers.Fig. 2 (b-iii) is the cross sectional representation of silicon-based micro ring.The silicon structure the top that is used for making on the insulator of silicon-based micro ring is the monocrystalline silicon of 250 nanometer thickness, and the centre is the silicon dioxide resilient coating of 3 micron thickness, and the bottom is the silicon substrate of 525 micron thickness.Second image intensifer in the packet measuring system comprises second erbium-doped fiber amplifier and the amplification of the 3rd erbium-doped fiber amplifier two-stage.
Step 5, for the waveform of record, the position judgment retardation at the peak value place by the individual signals pulse can obtain a retardation like this with the calibration curve of going into fine pumping light power, by this calibration curve, can regulate the retardation that obtains needs into fine pump power.
As shown in Figure 3, be the figure as a result of present embodiment.Fig. 3 (a-i) and (a-ii) be respectively two resonance peaks of silicon-based micro ring, wherein the data packet signal wavelength is positioned near the corresponding resonance peak of Fig. 3 (a-i), and centre wavelength is 1548.675nm.The pump light wavelength is positioned near the corresponding resonance peak of Fig. 3 (a-ii), and centre wavelength is 1552.860nm.The resonance peak degree of depth that Fig. 3 (a-i) is corresponding is about 8dB, and three dB bandwidth is about 0.036nm; The resonance peak degree of depth that Fig. 3 (a-ii) is corresponding is about 10dB, and three dB bandwidth is about 0.038nm.Fig. 3 (b) is a pump power at-37dBm, 3.2dBm, the data packet signal pulse wave during 13.6dBm.When pump power is very low (as-37dBm), the wavelength of packet just is positioned at the center of resonance peak, the retardation maximum.Fig. 3 (c) is the relation curve of retardation and pump power, go into fine pump power greatly when 0dBm retardation begin to reduce.Pump power is increased to about 10dBm from 0dBm to postpone just can be adjusted to 0 continuously from the about 70ps of maximum delay amount.Fig. 3 (d) is the ber curve after resonance place and disresonance place data packet signal pass through silicon-based micro ring, and the receiver sensitivity of the two only differs less than 1dB, and visual data bag signal changes hardly in the synchronous signal quality that obtains variable delay.
Claims (7)
1. device based on the light-operated controlling light delay line of silicon-based micro ring, it is characterized in that, comprise: packet transmission machine, pumping control light produce system, silicon-based micro ring and coupled system thereof, packet delay measurements system, wherein: the packet transmission machine links to each other with silicon-based micro ring and coupled system thereof with pumping control light simultaneously, and the light of exporting from silicon-based micro ring is input to the relative delay amount that packet delay measurements system comes the calculated data bag;
Described silicon-based micro ring and coupled system thereof comprise silicon-based micro ring, end face is cut flat input bare fiber, end face is cut flat output bare fiber, first Polarization Controller, second Polarization Controller, coupler, power splitter, power monitor, wherein: the input of first Polarization Controller links to each other with the output of packet transmission machine, the input of second Polarization Controller links to each other with the output that pumping control light produces system, the output of the output of first Polarization Controller and second Polarization Controller links to each other with two inputs of coupler, the output of coupler links to each other with the input bare fiber, the input bare fiber is coupled to light the silicon-based micro ring from optical fiber, output bare fiber the light that is used for collecting from silicon-based micro ring, its output links to each other with the input of power splitter, the output port that the power splitter power output is bigger links to each other with packet delay measurements system, and the less output port of power output links to each other with power monitor;
Described silicon-based micro ring radius is 20 microns, wide 450 nanometers, air gap between straight wave guide and the ring is 120 nanometers, the silicon structure the top that is used for making on the insulator of silicon-based micro ring is the monocrystalline silicon of 250 nanometer thickness, the centre is the silicon dioxide resilient coating of 3 micron thickness, and the bottom is the silicon substrate of 525 micron thickness.
2. the device of the light-operated controlling light delay line based on silicon-based micro ring according to claim 1, it is characterized in that, described packet transmission machine comprises first laser, electric signal generator, electrooptic modulator, wherein: the output port of first laser links to each other with the input port of electrooptic modulator, the electric signal generator output port links to each other with the electric signal input end mouth of electrooptic modulator, electrooptic modulator is responsible for the signal of telecommunication is modulated on the light, generation has the packet of special code type, and image intensifer amplifies packet to compensate the insertion loss of electrooptic modulator.
3. the device of the light-operated controlling light delay line based on silicon-based micro ring according to claim 1, it is characterized in that, described pumping control light produces system, comprise second laser, high power light amplifier and adjustable optical attenuator, wherein: the output port of second laser links to each other with high power light amplifier in mouth, the high power light amplifier output port links to each other with the adjustable optical attenuator input port, can continuously change the size of pumping light power.
4. the device of the light-operated controlling light delay line based on silicon-based micro ring according to claim 3 is characterized in that described high power light amplifier is meant the image intensifer of saturation output power greater than 20dBm.
5. the device of the light-operated controlling light delay line based on silicon-based micro ring according to claim 1, it is characterized in that, described packet delay measurements system comprises image intensifer, tunable, oscilloscope, wherein: image intensifer links to each other with the output of silicon-based micro ring and coupled system thereof, tunable links to each other with the output of image intensifer, to isolate packet, the output of tunable is linked on the oscilloscope.
6. the method based on the light-operated controlling light delay line of silicon-based micro ring is characterized in that, comprises the steps:
Step 1 in the packet transmission machine, is transferred to the pseudo random sequence that electric signal generator produces on the light by electrooptic modulator, produces the packet of required sign indicating number type;
Step 2, close pump signal, first Polarization Controller that adjusting links to each other with packet transmission machine branch road, make the power output maximum of the light that power monitor detects, the fixing position of Polarization Controller, regulate the wavelength of data packet signal branch road, observe the reading of power monitor, the luminous power minimum that power monitor is detected, then the packet wavelength just is positioned at a resonance peaks of silicon-based micro ring, regulate the tunable of packet delay measurements system, make that the wavelength of filter center wavelength and packet is the same;
Step 3, open second laser that produces pump light, close the packet transmission machine, second Polarization Controller that adjusting links to each other with pumping control light generation system, the light maximum that power monitor is detected, fix the position of this Polarization Controller, the output wavelength of regulating second laser is different from another resonance peak position of data packet signal wavelength, observe the reading of power monitor, the luminous power minimum that power monitor is detected finds another resonance peak of silicon-based micro ring, continues to increase wavelength again, make the reading of power monitor increase 3dB, this wavelength is made as the pumping light wavelength;
Step 4 is opened the packet transmission machine, and the adjustable optical attenuator of regulating pumping control light generation system makes decay maximum, notes the waveform by the data packet signal light after silicon-based micro ring and coupled system and the packet measuring system under oscilloscope; Regulate the adjustable optical attenuator that pumping control light produces system continuously, note the pumping light power and the corresponding waveform that are input to bare fiber;
Step 5, waveform for record by the edge of individual signals pulse or the position judgment retardation at peak value place, can obtain a retardation like this with the calibration curve of going into fine pumping light power, by this calibration curve, can regulate the retardation that obtains needs into fine pump power.
7. the method for the light-operated controlling light delay line based on silicon-based micro ring according to claim 6, it is characterized in that, in the step 5, described by the edge of individual signals pulse or the position judgment retardation at peak value place, concrete grammar be edge during with the complete off-resonance of data packet signal or peak as the reference position, retardation is the poor of edge or position, peak value place and reference position.
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| CN101576633B (en) * | 2009-06-12 | 2010-09-22 | 哈尔滨工业大学 | Coupled resonant inducing transparent controllable signal delayer used in 1550nm optical communication |
| CN101833221B (en) * | 2010-04-02 | 2011-06-29 | 上海交通大学 | All-optical single side band (SSB) up conversion generator based on silicon-based micro ring resonator |
| CN101834669B (en) * | 2010-04-02 | 2012-09-05 | 上海交通大学 | Frequency shift keying (FSK) optical modulation signal generator based on silicon-based micro ring resonator |
| CN102064890B (en) * | 2010-11-08 | 2013-07-31 | 武汉邮电科学研究院 | Ultra-long single span optical transmission method based on polarization multiplexing push-pull modulation encoding |
| CN102681091A (en) * | 2012-04-12 | 2012-09-19 | 上海交通大学 | Tunable optical delay line based on coupled optical waveguides |
| CN111458908A (en) * | 2020-04-09 | 2020-07-28 | 联合微电子中心有限责任公司 | Micro-ring electro-optical modulator based on lithium niobate single crystal thin film and use method and application thereof |
| CN111817788B (en) * | 2020-06-23 | 2021-05-07 | 东北林业大学 | Optical pulse delayer capable of self-regulating working wavelength |
| CN114696908A (en) * | 2020-12-28 | 2022-07-01 | 华为技术有限公司 | Dispersion compensation device, transmitter, receiver and dispersion compensation method |
| CN113820691A (en) * | 2021-08-17 | 2021-12-21 | 厦门彼格科技有限公司 | High-precision optical delay phase regulation and control method with optical amplification |
| CN114978326B (en) * | 2021-11-05 | 2024-01-02 | 北京理工大学 | Broadband arbitrary waveform optical generator chip |
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