CN101295632B - 加热装置 - Google Patents

加热装置 Download PDF

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Publication number
CN101295632B
CN101295632B CN2008100996426A CN200810099642A CN101295632B CN 101295632 B CN101295632 B CN 101295632B CN 2008100996426 A CN2008100996426 A CN 2008100996426A CN 200810099642 A CN200810099642 A CN 200810099642A CN 101295632 B CN101295632 B CN 101295632B
Authority
CN
China
Prior art keywords
filament
heater
treated
lamp
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008100996426A
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English (en)
Chinese (zh)
Other versions
CN101295632A (zh
Inventor
水川洋一
金津桂太
吉冈正树
铃木信二
关匡平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005191222A external-priority patent/JP2006279008A/ja
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of CN101295632A publication Critical patent/CN101295632A/zh
Application granted granted Critical
Publication of CN101295632B publication Critical patent/CN101295632B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Resistance Heating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Control Of Resistance Heating (AREA)
CN2008100996426A 2005-03-02 2006-03-02 加热装置 Expired - Fee Related CN101295632B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005057803 2005-03-02
JP057803/2005 2005-03-02
JP191222/2005 2005-06-30
JP2005191222A JP2006279008A (ja) 2005-03-02 2005-06-30 ヒータ及びヒータを備えた加熱装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN 200610059456 Division CN1828829A (zh) 2005-03-02 2006-03-02 加热器及具备加热器的加热装置

Publications (2)

Publication Number Publication Date
CN101295632A CN101295632A (zh) 2008-10-29
CN101295632B true CN101295632B (zh) 2010-12-08

Family

ID=36947128

Family Applications (2)

Application Number Title Priority Date Filing Date
CN 200610059456 Pending CN1828829A (zh) 2005-03-02 2006-03-02 加热器及具备加热器的加热装置
CN2008100996426A Expired - Fee Related CN101295632B (zh) 2005-03-02 2006-03-02 加热装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN 200610059456 Pending CN1828829A (zh) 2005-03-02 2006-03-02 加热器及具备加热器的加热装置

Country Status (2)

Country Link
JP (2) JP2011103475A (ja)
CN (2) CN1828829A (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4893159B2 (ja) * 2006-08-24 2012-03-07 ウシオ電機株式会社 フィラメントランプおよび光照射式加熱処理装置
JP4935417B2 (ja) * 2007-02-26 2012-05-23 ウシオ電機株式会社 光照射式加熱処理装置
JP2009238552A (ja) * 2008-03-27 2009-10-15 Ushio Inc フィラメントランプ
JP5125933B2 (ja) * 2008-09-22 2013-01-23 ウシオ電機株式会社 フィラメントランプ
CN103014674A (zh) * 2011-09-26 2013-04-03 吉富新能源科技(上海)有限公司 一种太阳能光伏玻璃镀膜预加热装置
JP6219227B2 (ja) * 2014-05-12 2017-10-25 東京エレクトロン株式会社 ヒータ給電機構及びステージの温度制御方法
TWI674071B (zh) * 2014-12-15 2019-10-11 瑞士商菲利浦莫里斯製品股份有限公司 氣溶膠產生系統及用於在電熱式氣溶膠產生系統內導引氣流的方法
CN111501022A (zh) * 2020-06-20 2020-08-07 西南石油大学 一种多组热丝反应设备

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549742B2 (ja) * 1974-04-24 1980-12-13
JPH0652674B2 (ja) * 1985-02-05 1994-07-06 ミノルタカメラ株式会社 加熱装置用ハロゲン発熱体
JPS62167397U (ja) * 1986-04-14 1987-10-23
JPS62180891U (ja) * 1986-05-08 1987-11-17
JP3103896B2 (ja) * 1991-03-15 2000-10-30 ソニー株式会社 ハロゲンランプ及び熱処理炉
JPH0620938A (ja) * 1992-06-30 1994-01-28 Kawasaki Steel Corp 半導体基板の急速熱酸化装置
JPH0716353U (ja) * 1993-08-31 1995-03-17 ウシオ電機株式会社 管型ランプ
EP0924500B1 (de) * 1997-12-08 2006-10-18 STEAG RTP Systems GmbH Verfahren zum Messen elektromagnetischer Strahlung

Also Published As

Publication number Publication date
JP2011103476A (ja) 2011-05-26
CN1828829A (zh) 2006-09-06
JP2011103475A (ja) 2011-05-26
CN101295632A (zh) 2008-10-29

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Granted publication date: 20101208

CF01 Termination of patent right due to non-payment of annual fee