CN101294894A - Continuous locking mold near-field optical cavity ring-down spectrum analysis device - Google Patents
Continuous locking mold near-field optical cavity ring-down spectrum analysis device Download PDFInfo
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- CN101294894A CN101294894A CNA2008100619181A CN200810061918A CN101294894A CN 101294894 A CN101294894 A CN 101294894A CN A2008100619181 A CNA2008100619181 A CN A2008100619181A CN 200810061918 A CN200810061918 A CN 200810061918A CN 101294894 A CN101294894 A CN 101294894A
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Abstract
The invention relates to a continuous locked-mode near field optical cavity ring-down spectrum analyzing device. The prior device adopts a linear finesse cavity with high positioning requirements for an optical engine and complex structure, and can not conduct test for thin films and interfaces. With the device, the outgoing light beam of coherent light is split into two beams with different polarization characteristics; one beam of polarization light forms a measuring beam through optical modulation and control; the other beam thereof forms a locked-mode beam through frequency regulation; the two beams unify the path through a polarization beam splitter; the locked-mode beam forms a feedback signal control moving component after detection, drives an optical traveling wave high-finesse cavity to displace, and the incident beam and the high-finesse cavity maintain continuous locked mode when in measurement. The finesse cavity has the advantages of simple construction, single optical element, simple and stable structure, and low requirements for mechanical positioning. Furthermore, the objects of the spectrum analyzing measurement can be thin films, interfaces, nano-materials and fluids.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of spectral analysis device, particularly a kind of continuous locking mold near-field optical cavity ring-down spectrum analysis device.Be mainly used in the trace concentration test of form materials such as fluid, film, interface, nano-substance.
Technical background
Exist a large amount of trace amounts of substances to measure demand in many fields such as environmental analysis, life science, medical, national defense safety, advanced process industries, and more and more higher to the requirement of trace materials detection sensitivity.The cavity ringdown spectroscopy technology becomes one of trace materials measuring technique development trend owing to have detection sensitivity height, absolute measurement, good selective.The cavity ringdown spectroscopy technology is used for analyzing trace gas concentration and component more, and in the last few years, the researcher also was applied to the flowing material analysis with the cavity ringdown spectroscopy technology.In the prior art, have a kind of cavity ringdown spectroscopy system (referring to United States Patent (USP) " Cavity ring down arrangement for non-cavityfiling samples ", the patent No.: US6,452,680B1).This cavity ringdown spectroscopy system has suitable advantage, but, still come with some shortcomings: 1) adopt the meticulous cavity configuration of line style in this cavity ringdown spectroscopy system, laser forms optical standing wave in high-fineness cavity, cause the light distribution inequality, and the reflected light of light beam incident end chamber mirror easily produces interference to laser instrument; 2) in this test macro, laser and chamber coupling efficiency are low, transmission and reflection take place during the first incident high-fineness cavity of laser beam mirror, transmitted light takes place to come and go in high-fineness cavity to be propagated, the efficiency of light energy utilization is low, and photodetector is surveyed this and is transmitted to the penetrate laser energy that go out of chamber inner light beam by a certain chamber mirror and declines and swing variation, and luminous energy is very low, require detector to have high detection sensitivity, system's photoelectric detection part is proposed high request; 3) can only be used for the test analysis flowing material, can not be to the trace concentration test of form materials such as film, interface, nano-substance, when convection cell is measured, need detected fluid to have certain volume quantity, can't detect having a spot of detected fluid; 4) this cavity ringdown spectroscopy system is to the machining and the positioning requirements height of high-fineness cavity system architecture, complex structure, when laser beam incident and outgoing sample cell, in order to make luminous energy loss not occur at the interface, all to so just increase the sample cell mechanical positioning and require and the requirement of beam direction control accuracy with Brewster angle incidence and outgoing; 5) high-fineness cavity in this cavity ringdown spectroscopy system has two or more high reflectivity mirror optical elements to constitute complex structure.
Summary of the invention
The objective of the invention is to deficiency at above-mentioned technology formerly, a kind of continuous locking mold near-field optical cavity ring-down spectrum analysis device is provided, it is even to have in the optical traveling-wave annular high-fineness cavity light distribution, reflected light is difficult for influencing laser performance, laser and high-fineness cavity are realized continuous locking mold, measurement of species is in extensive range, and the measured matter aequum is few, and system constitutes characteristics such as simple.
Basic design of the present invention is: the laser emitting light beam is divided into two bundles with different polarization characteristic, a branch of polarized light constitutes measuring beam through optical modulation and control, another bundle forms the locked mode light beam through the overfrequency regulation and control, two-beam is unified behind same path through polarization spectroscope, the annular high-fineness cavity that the incident single optical element constitutes, because two-beam exists frequency and difference in polarisation, in the chamber, do not exist coupling relevant, outgoing beam is through the polarization spectroscope beam split, the locked mode light beam is detected the back and forms feedback signal processing unit control moving-member by analysis, drive annular high-fineness cavity and incident beam and produce relative displacement, thereby guarantee that incident beam and high-fineness cavity keep continuous locking mold, the measuring beam of outgoing is by detector acceptance in addition, and forming declines swings signal, realizes that trace materials detects; The inner total reflection point place of annular high-fineness cavity forms the optical near-field detection zone, but form substance testings such as convection cell, biochip, particulate matter.
Technical solution of the present invention is: comprise coherent source, incident polarization spectroscope, beam modulation and controller, frequency modulator, analysis controlling unit, optical traveling-wave high-fineness cavity, detecting polarization spectroscope, locked mode detector, signal sensor.Beam shaping isolated part, incident polarization spectroscope and locked mode beam reflection mirror are put successively on the outgoing beam position of coherent source.The incident polarization spectroscope is to the reflection of s light, and to the p transmittance, the measuring beam catoptron is arranged on the spectroscopical outgoing s of the incident polarization polarization state light beam optical path.On the reflected light path of measuring beam catoptron, be disposed with optical traveling-wave high-fineness cavity and detecting polarization spectroscope; Synthetic polarization spectroscope is arranged between measuring beam catoptron and the optical traveling-wave high-fineness cavity, be positioned at the intersection point place of the reflected light path of the reflected light path of measuring beam catoptron and locked mode beam reflection mirror, the reflected light path of the reflected light path of measuring beam catoptron and locked mode beam reflection mirror is with the polarization light-dividing surface symmetry of synthetic polarization spectroscope.Beam modulation and controller are arranged on to be measured on the light path, and the frequency modulator is arranged on the locked mode light path; Described measurement light path is the path that light passes through incident polarization spectroscope, measuring beam catoptron and synthetic polarization spectroscope; Described locked mode light path is the path that light passes through incident polarization spectroscope, locked mode beam reflection mirror and synthetic polarization spectroscope.The locked mode detector is arranged on the spectroscopical transmitted light light path of detecting polarization, and signal sensor is arranged on the spectroscopical reflected light light path of detecting polarization.Described optical traveling-wave high-fineness cavity is isosceles triangle prism or isosceles trapezoid prism, and two waists are that the high reflectance plane of incidence and high reflectance exit facet, bottom surface are inner total reflection face; Moving-member and optical traveling-wave high-fineness cavity are connected.Coherent source, beam modulation all are electrically connected with analysis controlling unit with controller, frequency modulator, moving-member, locked mode detector and signal sensor.
Described coherent source is a kind of of semiconductor laser, solid state laser, gas laser, liquid laser.
Described beam shaping isolated part is to be linked in sequence and to constitute by expanding adjustable beam expander optics of bundle multiplying power and isolation parts.
Described beam modulation and controller are a kind of of liquid crystal type spatial light modulator, reflective spatial light modulator, acousto-optic electrooptic modulator.
Described frequency modulator is a kind of of acousto-optic modulator, electrooptic modulator, frequency-changer crystal modulator.
Described beam modulation and controller are arranged between incident polarization spectroscope and the measuring beam catoptron, or are arranged between measuring beam catoptron and the synthetic polarization spectroscope.
Described frequency modulator is arranged between incident polarization spectroscope and the locked mode beam reflection mirror, or is arranged between locked mode beam reflection mirror and the synthetic polarization spectroscope.
Described photodetector is a kind of in photodiode, snowslide pipe, the photomultiplier.
Described moving-member is a kind of in stepper motor, piezoelectric ceramics shifter, the nanometer displacement element.
The course of work of apparatus of the present invention is that coherent source is launched light beam, through beam shaping isolated part shaping incident polarization spectroscope; The incident polarization spectroscope is to the reflection of s light, and to the p transmittance, behind the s polarizing beam of outgoing process beam modulation and the controller, polarization spectroscope is synthesized in incident after the measured beam reflection mirror reflection; The p polarizing beam of outgoing is reflected after the mirror reflection, and behind overfrequency modulator shift frequency, polarization spectroscope is synthesized in incident; Beam modulation links to each other with analysis controlling unit with the frequency modulator with controller; Synthetic polarization spectroscope is to the s transmittance, and to the reflection of p light, the s of outgoing and p polarizing beam be the path altogether, incides the optical traveling-wave high-fineness cavity that is made of single optical element; The optical traveling-wave high-fineness cavity is the isosceles triangle prism, and the high reflectance plane of incidence and high reflectance outgoing are that two waists, inner total reflection faces are ground, and the test section is the optical near-field zone of inner total reflection face; Light beam is by the incident of the high reflectance plane of incidence, at the high reflectance plane of incidence, inner total reflection face and the high reflectance exit facet reflection ripple of embarking on journey, by the outgoing of high reflectance exit facet, by the beam split of detecting polarization spectroscope; The detecting polarization spectroscope is to the reflection of s light, and to the p transmittance, flashlight s light beam is equipped with signal sensor and surveys on the exit direction, and locked mode light p light beam is equipped with the locked mode detector and surveys on the exit direction; Signal sensor links to each other with analysis controlling unit with the locked mode detector; Analysis controlling unit links to each other with moving-member, moving-member and high-fineness cavity mechanical connection, the analyzed control module of locked mode detector signal feeds back to moving-member, produces high-fineness cavity and chamber incident beam relative displacement, realizes light beam and high-fineness cavity continuous locking mold; Measured matter places on the inner total reflection face, and beam modulation and controller carry out switch to the s light beam, obtains measuring declining swinging signal, realizes measuring.If measured matter can be equipped with flow cell for having a certain amount of fluid on inner total reflection face, realize successive dynamic measuring.Can place catoptron change light beam direct of travel as the case may be on the light path arrangement on light beam, polarization spectroscope can be selected suitable dichroism in use.
Control coherent source, beam modulation and controller, frequency modulator, moving-member by analysis controlling unit in apparatus of the present invention, and locked mode detector and signal sensor send to analysis controlling unit with detectable signal and handle, and these all are mature technologies.Inventive point of the present invention is to provide a kind of light channel structure of near-field optical cavity ring-down spectrum analysis that can continuous locking mold.
Compared with prior art, advantage of the present invention:
1) meticulous chamber constitute simple, only by an optical element looping high-fineness cavity, the inner capable ripple of light beam that forms, light distribution is even, the reflected light of light beam incident end chamber mirror is difficult for laser instrument produced and disturbs; The simple and stable structure of test macro requires low to mechanical positioning;
2) the laser emitting light beam is divided into two bundles with different polarization characteristic, a branch of polarizing beam is used to realize the locked mode between light beam and the high-fineness cavity, another kind is used for surveying, realized the continuous locking mold in the measuring process, improved measuring speed, improved utilization ratio of optical energy simultaneously, signal strength detection has reduced the detection circuit requirement;
3) the cavity ringdown spectroscopy measuring object is extended to film, interface, nano-substance, fluid, required measured object quality is few during measurement.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Continuous locking mold near-field optical cavity ring-down spectrum analysis device, comprise coherent source 1, incident polarization spectroscope 14, beam modulation and controller 3, frequency modulator 12, analysis controlling unit 9, optical traveling-wave high-fineness cavity 6, detecting polarization spectroscope 7, locked mode detector 8, signal sensor 10.Solid line is a light path, and dotted line is that electronics connects.Be equipped with beam shaping isolated part 2, incident polarization spectroscope 14 on coherent source 1 outgoing beam successively.14 pairs of s light reflections of incident polarization spectroscope, to the p transmittance, be equipped with beam modulation and controller 3 and measuring beam catoptron 4 on the s polarization state light beam optical path of incident polarization spectroscope 14 outgoing successively, be equipped with frequency modulator 12 and locked mode beam reflection mirror 13 on the p polarization state light beam optical path of incident polarization spectroscope 14 outgoing successively; Beam modulation links to each other with analysis controlling unit 9 with frequency modulator 12 with controller 3; S and p polarizing beam direction intersect, the intersection is equipped with synthetic polarization spectroscope 5, and synthetic 5 pairs of s transmittance of polarization spectroscope are reflected p light, the s of outgoing and p polarizing beam be the path altogether, is equipped with the optical traveling-wave high-fineness cavity 6 that is made of single optical element on the light path of advancing; Optical traveling-wave high-fineness cavity 6 is the isosceles triangle prism, and the high reflectance plane of incidence and high reflectance outgoing are that two waists 601, inner total reflection faces are ground, and the test section is the optical near-field zone of inner total reflection face 602; Light beam is by 601 incidents of the high reflectance plane of incidence, and incident direction is parallel with the base, at the high reflectance plane of incidence 601, inner total reflection face 602 and the high reflectance exit facet 603 reflections ripple of embarking on journey, by 603 outgoing of high reflectance exit facet; Be equipped with detecting polarization spectroscope 7 on the outgoing beam direction, 7 pairs of s light reflections of detecting polarization spectroscope, to the p transmittance, be equipped with signal sensor 10 on the flashlight s light beam exit direction, be equipped with locked mode detector 8 on the locked mode light p light beam exit direction, signal sensor 10 links to each other with analysis controlling unit 9 with locked mode detector 8; Analysis controlling unit 9 links to each other with moving-member 11, moving-member 11 and high-fineness cavity 6 mechanical connections, the analyzed control module 9 of locked mode detector 8 signals feeds back to moving-member 11, produces high-fineness cavity 6 and chamber incident beam relative displacement, realizes light and high-fineness cavity 6 continuous locking molds.
Coherent source 1 is a solid state laser, beam shaping isolated part 2 is to be linked in sequence and to constitute by expanding adjustable beam expander optics of bundle multiplying power and isolation parts, beam modulation and controller 3 are the liquid crystal type spatial light modulator, frequency modulator 12 is an acousto-optic modulator, analysis controlling unit 9 is a computer system, signal sensor 10 and locked mode detector 8 are the snowslide pipe, and moving-member 11 is the piezoelectric ceramics shifter.
The course of work of apparatus of the present invention is that coherent source 1 is launched light beam, through beam shaping isolated part 2 shaping incident polarization spectroscopes 14; 14 pairs of s light reflections of polarization spectroscope, to the p transmittance, behind the s polarizing beam of outgoing process beam modulation and the controller 3, the synthetic polarization spectroscope 5 of measured beam reflection mirror 4 reflection back incidents; The p polarizing beam of outgoing is reflected after mirror 13 reflection, and behind overfrequency modulator 12 shift frequencies, polarization spectroscope 5 is synthesized in incident; Beam modulation links to each other with analysis controlling unit 9 with frequency modulator 12 with controller 3; Synthetic 5 pairs of s transmittance of polarization spectroscope, to the reflection of p light, the s of outgoing and p polarizing beam be the path altogether, incides the optical traveling-wave high-fineness cavity 6 that is made of single optical element; Light beam is by 601 incidents of the high reflectance plane of incidence, at the high reflectance plane of incidence 601, inner total reflection face 602 and the high reflectance exit facet 603 reflections ripple of embarking on journey, by 603 outgoing of high reflectance exit facet, by polarization spectroscope 7 beam split; 7 pairs of s light reflections of polarization spectroscope, to the p transmittance, flashlight s light beam is equipped with signal sensor 10 and is surveyed on the exit direction, and locked mode light p light beam is equipped with locked mode detector 8 and is surveyed on the exit direction; Signal sensor 10 links to each other with analysis controlling unit 9 with locked mode detector 8; Analysis controlling unit 9 links to each other with moving-member 11, moving-member 11 and high-fineness cavity 6 mechanical connections, the analyzed control module 9 of locked mode detector 8 signals feeds back to moving-member 11, produce high-fineness cavity 6 and chamber incident beam relative displacement, realize light beam and optical traveling-wave high-fineness cavity 6 continuous locking molds; Measured matter places on the inner total reflection face 602, and 3 pairs of s light beams of beam modulation and controller carry out switch, obtains measuring declining swinging signal, realizes measuring, and present embodiment success convection cell form material has carried out the trace concentration monitoring.
Claims (8)
1, continuous locking mold near-field optical cavity ring-down spectrum analysis device, comprise coherent source, incident polarization spectroscope, beam modulation and controller, frequency modulator, analysis controlling unit, optical traveling-wave high-fineness cavity, detecting polarization spectroscope, locked mode detector, signal sensor, it is characterized in that: beam shaping isolated part, incident polarization spectroscope and locked mode beam reflection mirror are put successively on the outgoing beam light path of coherent source, and the measuring beam catoptron is arranged on the spectroscopical outgoing s of the incident polarization polarization state light beam optical path;
On the reflected light path of measuring beam catoptron, be disposed with optical traveling-wave high-fineness cavity and detecting polarization spectroscope; Synthetic polarization spectroscope is arranged between measuring beam catoptron and the optical traveling-wave high-fineness cavity, be positioned at the intersection point place of the reflected light path of the reflected light path of measuring beam catoptron and locked mode beam reflection mirror, the reflected light path of the reflected light path of measuring beam catoptron and locked mode beam reflection mirror is with the polarization light-dividing surface symmetry of synthetic polarization spectroscope;
Beam modulation and controller are arranged on to be measured on the light path, and the frequency modulator is arranged on the locked mode light path; Described measurement light path is the path that light passes through incident polarization spectroscope, measuring beam catoptron and synthetic polarization spectroscope; Described locked mode light path is the path that light passes through incident polarization spectroscope, locked mode beam reflection mirror and synthetic polarization spectroscope;
The locked mode detector is arranged on the spectroscopical transmitted light light path of detecting polarization, and signal sensor is arranged on the spectroscopical reflected light light path of detecting polarization;
Described optical traveling-wave high-fineness cavity is isosceles triangle prism or isosceles trapezoid prism, and two waists are that the high reflectance plane of incidence and high reflectance exit facet, bottom surface are inner total reflection face; Moving-member and optical traveling-wave high-fineness cavity are connected;
Coherent source, beam modulation all are electrically connected with analysis controlling unit with controller, frequency modulator, moving-member, locked mode detector and signal sensor.
2, continuous locking mold near-field optical cavity ring-down spectrum analysis device as claimed in claim 1 is characterized in that: described coherent source is a kind of of semiconductor laser, solid state laser, gas laser, liquid laser.
3, continuous locking mold near-field optical cavity ring-down spectrum analysis device as claimed in claim 1 is characterized in that: described beam modulation and controller are a kind of of liquid crystal type spatial light modulator, reflective spatial light modulator, acousto-optic electrooptic modulator.
4, continuous locking mold near-field optical cavity ring-down spectrum analysis device as claimed in claim 1 is characterized in that: described frequency modulator is a kind of of acousto-optic modulator, electrooptic modulator, frequency-changer crystal modulator.
5, continuous locking mold near-field optical cavity ring-down spectrum analysis device as claimed in claim 1 is characterized in that: described photodetector is a kind of in photodiode, snowslide pipe, the photomultiplier.
6, continuous locking mold near-field optical cavity ring-down spectrum analysis device as claimed in claim 1 is characterized in that: described moving-member is a kind of in stepper motor, piezoelectric ceramics shifter, the nanometer displacement element.
7, continuous locking mold near-field optical cavity ring-down spectrum analysis device as claimed in claim 1, it is characterized in that: described beam modulation and controller are arranged between incident polarization spectroscope and the measuring beam catoptron, or are arranged between measuring beam catoptron and the synthetic polarization spectroscope.
8, continuous locking mold near-field optical cavity ring-down spectrum analysis device as claimed in claim 1, it is characterized in that: described frequency modulator is arranged between incident polarization spectroscope and the locked mode beam reflection mirror, or is arranged between locked mode beam reflection mirror and the synthetic polarization spectroscope.
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| CN2008100619181A CN101294894B (en) | 2008-05-27 | 2008-05-27 | Continuous locking mold near-field optical cavity ring-down spectrum analysis device |
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| CN2008100619181A CN101294894B (en) | 2008-05-27 | 2008-05-27 | Continuous locking mold near-field optical cavity ring-down spectrum analysis device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104819956A (en) * | 2015-02-11 | 2015-08-05 | 中国科学院长春光学精密机械与物理研究所 | Control system based on CRDS gas concentration measurement system |
| CN109696241A (en) * | 2019-02-22 | 2019-04-30 | 中国科学院物理研究所 | Polarization state detection device, its detection method and application |
| CN112557327A (en) * | 2020-12-22 | 2021-03-26 | 天津城建大学 | New coronavirus COVID-19 marker detector and detection method |
-
2008
- 2008-05-27 CN CN2008100619181A patent/CN101294894B/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104819956A (en) * | 2015-02-11 | 2015-08-05 | 中国科学院长春光学精密机械与物理研究所 | Control system based on CRDS gas concentration measurement system |
| CN109696241A (en) * | 2019-02-22 | 2019-04-30 | 中国科学院物理研究所 | Polarization state detection device, its detection method and application |
| CN109696241B (en) * | 2019-02-22 | 2021-02-26 | 中国科学院物理研究所 | Polarization state detection device, detection method and application thereof |
| CN112557327A (en) * | 2020-12-22 | 2021-03-26 | 天津城建大学 | New coronavirus COVID-19 marker detector and detection method |
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