CN101294791B - Method for dynamically measuring interference signal analysis - Google Patents
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Abstract
A method of resolving interference signals of dynamic measurement is provided, and is suitable for measuring dynamic characteristics of a unit to be measured. The method includes the following steps: capturing the dynamic interference signals when the unit to be measured vibrates; and carrying out deconvolution operation on the dynamic interference signals so as to acquire the reduced dynamic interference signals.
Description
Technical field
The invention relates to a kind of method of interference signal analysis, and particularly relevant for a kind of method of dynamically measuring interference signal analysis.
Background technology
The micro-measurement instrument of traditional interference of light surface topography, be of a size of the master to measure micro-structure surface three axial fluctuatings, the static state that belong to measure more, application is quite extensive, comprises in the measurement, liquid crystal flat panel display of the surfaceness of wafer and the measurement of flatness, the measurement of the laser labelling degree of depth, the size of covering gold goal projection in the brilliant processing procedure and coplane degree measurement of measurement, fiber end face and the micro optical element surface topography of spacer (spacer) size and height on the new-type colored filter or the like.Began in recent years, and had the people that the function of dynamic measurement is added up successively, more expanded the application that this class measures instrument, to containing in micromechanics and the micro photo-electro-mechanical industry observation of dynamic behaviours such as function element and film and measurement.
Fig. 1 is the structural representation of known a kind of static measurement mechanism, and it is to utilize the vertical interference fringe of white light to measure static determinand surface profile, and relevant explanation sees also TaiWan, China I237685 patent.Please refer to Fig. 1, known static measurement mechanism 100 comprises light source generator 110, optical splitter 120, interference mirror group 130, image-generating unit 140 and shifter 150, and this static measurement mechanism 100 is to be used to measure the surface profile of determinand 50 when static state.
Accept above-mentioned, the light beam 112 that light source generator 110 produces can be incident to interference mirror group 130 via optical splitter 120 reflections, and light beam 112 can be divided into reference beam 112a via interference mirror group 130 and measure light beam 112b, wherein measure light beam 112b and can be incident to determinand 50 surfaces, and by in the determinand 50 return reflection surface interference mirror groups 130.Reference beam 112a can close light and form interfering beam 114 with measurement light beam 112b, and interfering beam 114 can be incident to image-generating unit 140 once more to produce the interference image via optical splitter 120.
Image-generating unit 140 can be as charge coupled cell (ChargeCoupled Device, CCD) array optical integrator, and interfering beam 114 intensity that arbitrary pixel received in the imaging unit 140 are the upward interference degrees of specific region of corresponding determinand 50 surfaces.By shifter 150 upper and lower displacements with modulation reference beam 112a and measure optical path difference between the light beam 112b, cause the Strength Changes of interfering beam 114, to capture static interference signal, wherein the intensity of interfering beam 114 is because of the promptly static for this reason interference signal of change of the different optical path differences of sequence.
Fig. 2 A is the synoptic diagram of static interference signal, the displacement of the corresponding shifter of transverse axis wherein, and the corresponding interference strength of the longitudinal axis.The synoptic diagram of the displacement of maximum interference intensity contrast corresponding to the determinand surface profile takes place in Fig. 2 B.Please refer to Fig. 2 A, 2B and Fig. 1, arbitrary zone is gone up on corresponding determinand 50 surfaces, and the displacement that changes shifter 150 promptly can capture the static interference signal of varying strength.Generally speaking, the exact position of generation maximum interference intensity contrast gets final product the height of corresponding determinand 50 surface profiles.In other words, the shape of interference signal can be surrounded around getting up by ripple, and the height that the exact position at Bo Bao center can corresponding determinand 50 surface profiles.
When the height change of determinand 50 surface profiles, the displacement of the corresponding shifter 150 of interfering beam 114 intensity also can change to some extent, makes the exact position that the maximum interference intensity contrast takes place change.By determinand 50 All Rangeses are measured the exact position that the maximum interference intensity contrast takes place, can try to achieve the surface profile image of determinand 50.
That is, static interference signal is carried out step that three-D profile rebuilds promptly serve as reasons and measure the exact position of each pixel generation maximum interference intensity contrast, and calculate the height of surface profile of the corresponding region of determinand 50.When the height that calculates determinand 50 all surfaces profiles, promptly finish the surface profile image of setting up determinand.In addition, static interference signal also can carry out static characteristics to determinand and measure except rebuilding the surface profile image of determinand.
Fig. 3 is the structural representation of known a kind of dynamic measurement mechanism.Please refer to Fig. 3, known dynamic measurement mechanism 300 is similar to static measurement mechanism 100 (as shown in Figure 1), its difference is that dynamic measurement mechanism 300 more comprises stroboscopic controller 310 and drives platform 320, and this dynamic measurement mechanism 300 is used to measure dynamic perfromance and the surface profile of determinand 50 when vibration.
Accept above-mentioned, determinand 50 is to be placed in to drive on the platform 320, and the signal of stroboscopic controller 310 input same frequencys is to light source generator 110 and driving platform 320, make light source generator 110 produce stroboscopic pulse light beam 312, and make driving platform 320 drive determinands 50 with this characteristic frequency vibration with characteristic frequency.
Stroboscopic pulse light beam 312 is incident to image-generating unit 140 to produce the interference image and form interfering beam 314 after can interfering with determinand 50 via optical splitter 120, interference mirror group 130.With the single pixel of image-generating unit 140, cause the Strength Changes of interfering beam 314 by shifter 150 upper and lower displacements, can get dynamic interference signal, wherein the intensity of interfering beam 314 is because of the i.e. dynamic interference signal for this reason of the change of the different optical path differences of sequence.
Calculate in the dynamic interference signal exact position that the maximum interference intensity contrast takes place, can get the height of surface profile of the corresponding region of determinand 50.When the height that calculates determinand 50 Zone Fulls, promptly finish the surface profile image of setting up determinand.In addition, dynamically interference signal also can carry out dynamic perfromance to determinand and measure except rebuilding the surface profile image of determinand.
Fig. 4 A is the cycle synoptic diagram of determinand vibratory output and stroboscopic pulse light beam.Please refer to Fig. 4 A and Fig. 3, the vibration period T of determinand 50 is identical with the cycle of stroboscopic pulse light beam 312, and the pulse of stroboscopic pulse light beam 312 constantly compared to initial vibration cycle of determinand 50 constantly can be at interval one time delay tc, wherein can adjust arbitrarily time delay.Generally speaking, the burst length δ T of stroboscopic pulse light beam 312 is much smaller than the vibration period T of determinand 50, make that for stroboscopic pulse light beam 312 it is in shining the burst length δ T of determinand 50, the vibration position of determinand 50 contour surfaces does not almost change.
Thus, preceding method can obtain to interfere and contrast good dynamic interference signal, and then the exact position that can calculate the maximum interference intensity contrast of dynamic interference signal, rebuilds at the three-D profile of vibration momentary status to carry out determinand 50.
Yet, when the vibration frequency of determinand 50 increases, can make its vibration period T reduce and no longer much larger than the burst length δ T of stroboscopic pulse light beam 312.For stroboscopic pulse light beam 312, it is in shining the burst length δ T of determinand 50, the vibration position change amplitude of determinand 50 contour surfaces increases, and makes interfering beam 314 comprise the interference information of the different vibration positions of determinand 50 contour surfaces simultaneously.After image-generating unit 140 is with interfering beam 314 integrations, can cause the interference contrast of dynamic interference signal to reduce.
Fig. 4 B is the dynamic interference signal synoptic diagram of determinand when dither.Please refer to Fig. 4 B, Fig. 4 A and Fig. 3,, can make the interference contrast of dynamic interference signal reduce and image fog (noise ratio reduction) because vibration period T is not the burst length δ T much larger than stroboscopic pulse light beam 312.This can cause be difficult for calculating the exact position of the maximum interference intensity contrast of dynamic interference signal, and then three-D profile that can't accurate reconstruction determinand 50.
Although reduce the interference contrast that the burst length δ T of stroboscopic pulse light beam 312 can promote dynamic interference signal, yet, make burst length δ T still have the limit physically because stroboscopic pulse light beam 312 is not the Delta function of mathematics coideal.Thus, the method for known dynamic measurement determinand surface profile can't effectively be applied to the situation of determinand dither.
Summary of the invention
In view of this, the purpose of this invention is to provide a kind of method of dynamically measuring interference signal analysis, when determinand is in dither, the surface profile of the dynamic perfromance that also can measure determinand effectively with dynamically the time.
For reaching above-mentioned or other purpose, the present invention proposes a kind of method of dynamically measuring interference signal analysis, be suitable for measuring the surface profile of the dynamic perfromance of determinand with dynamically the time, the method for this dynamically measuring interference signal analysis comprises the following steps: to capture dynamic interference signal from the surface profile of determinand; Dynamic interference signal is carried out deconvolution (deconvolution) computing, in the hope of reducing dynamic interference signal.
In one embodiment of this invention, can carry out three-D profile and rebuild reducing dynamic interference image, in the hope of the surface profile image of determinand.
In one embodiment of this invention, can capture from the surface profile of determinand before the dynamic interference signal, set the phase place of stroboscopic pulse light beam earlier.
In one embodiment of this invention, can after the surface profile image of trying to achieve determinand, change the phase place of stroboscopic pulse light beam.
In one embodiment of this invention, above-mentioned deconvolution computing can comprise the computing of being changeed mutually by frequency domain and time domain.
In one embodiment of this invention, the above-mentioned process that dynamic interference image is carried out this deconvolution computing more comprises the following steps: the intensity of stroboscopic pulse light beam is converted to frequency domain by time domain; Dynamic interference signal is converted to frequency domain by time domain; In frequency domain, calculate the intensity of dynamic interference signal divided by the stroboscopic pulse light beam; Dynamic interference signal is carried out the inverse transform computing in the hope of reducing dynamic interference signal divided by the value of the intensity of stroboscopic pulse light beam.
In one embodiment of this invention, above-mentioned inverse transform computing can be anti-Fu Li leaf translation operation or other can handle the translation operation that frequency domain transfers time domain to.
In one embodiment of this invention, above-mentioned method is to cooperate the interference measurement device and the interference signal of dynamic measurement determinand when dynamic, and the interference measurement device for example is Mirau formula interferometer, Michelson formula interferometer or Linnik formula interferometer, and other can carry out the device that the interference of light measures.
In sum, in the method for dynamically measuring interference signal analysis of the present invention, dynamic interference signal is carried out the deconvolution computing earlier, to try to achieve the dynamic interference signal of reduction of interfering contrast preferable earlier.This reduces dynamic interference signal through after further analyzing, and can obtain the dynamic perfromance of determinand, also can carry out three-D profile and rebuild, with the surface profile of accurate reconstruction determinand.
Description of drawings
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and cooperate appended accompanying drawing, be described in detail below, wherein:
Fig. 1 is the structural representation of known a kind of static measurement mechanism.
Fig. 2 A is the synoptic diagram of static interference signal.
The synoptic diagram of the displacement of maximum interference intensity contrast corresponding to the determinand surface profile takes place in Fig. 2 B.
Fig. 3 is the structural representation of a kind of dynamic measurement mechanism.
Fig. 4 A is the cycle synoptic diagram of determinand vibratory output and stroboscopic pulse light beam.
Fig. 4 B is the dynamic interference signal synoptic diagram of determinand when dither.
Fig. 5 is the process flow diagram according to the method for the dynamic measurement surface profile of one embodiment of the invention.
Fig. 6 A and Fig. 6 B are respectively dynamic interference image and the dynamic synoptic diagram of interfering image of reduction.
Fig. 7 is the process flow diagram according to the method for the dynamic measurement surface profile of another embodiment of the present invention.
Embodiment
Fig. 5 is the process flow diagram according to the method for the dynamically measuring interference signal analysis of one embodiment of the invention, and the employed measuring structure of dynamically measuring interference signal analysis method of the present invention can be the dynamic measurement mechanism as Fig. 3.Please refer to Fig. 5 and Fig. 3, the method of dynamically measuring interference signal analysis of the present invention comprises the following steps: when determinand 50 vibrations, capture dynamic interference signal S51, wherein the intensity of interfering beam 314 is because of the promptly dynamic for this reason interference signal of the change of the different optical path differences of sequence.The aforementioned process that the dynamic interference signal of acquisition has been described in detail in detail just repeats no more in this.
When determinand 50 during, can make the interference contrast of dynamic interference signal reduce in dither.By dynamic interference signal is carried out the deconvolution computing, just can try to achieve the dynamic interference signal S52 of reduction, the dynamic interference signal that wherein reduces has higher interference contrast.Explanation is slightly earlier, if earlier the interference state (with respect to perfect stroboscopic pulse light beam 312 for) of determinand 50 when " static state " is considered as specific convolution operation with stroboscopic pulse light beam 312 (in fact), can effectively carries out the deconvolution computing and restore the interference state of determinand 50 when being equivalent to " static state " dynamic interference signal.The relevant derivation of equation and theoretical explanation will be in narrations in detail after a while.
In one embodiment of this invention, then can carry out three-D profile and rebuild, in the hope of the surface profile image S53 of determinand reducing dynamic interference signal.Because the dynamic interference signal of reduction has higher interference contrast, but so the three-D profile of the present invention's accurate reconstruction determinand 50, significantly promote to measure the degree of accuracy of determinand 50 surface profiles.Subsidiary one carry be, aforementioned how to have mentioned to static or dynamically interference signal carry out three-D profile and rebuild, and similarly method also is applicable to and the dynamic interference signal of reduction just repeats no more in this.In addition, but the also dynamic interference signal of analysis-reduction of the present invention measures determinand 50 is carried out dynamic perfromance.
Below, will carry out theoretical formula at the part of deconvolution computing and derive and explanation.At first, determinand 50 interference light source strength in arbitrary zone when static state can be expressed as:
Wherein I is the interference light source strength, changes along with the position z on determinand surface.I。Be average interference light source strength, C (z) is the interference fringe contrast.λ
Mc=2 (m/ (1+f)), and f is the correction coefficient of eyepiece, m is the ordinal number of interference fringe, Δ φ is a phase place.
The interference light source strength can have different mathematic parameter form performances under different interference measurement devices.In the present embodiment, be that example explains only with Mirau formula spectral interference instrument, be familiar with this operator when the spectral interference instrument that can be applied to other kind easily.
When determinand 50 with its amplitude a, vibration frequency ω, when phase was carried out sinusoidal vibration, the position z of determinand 50 surf zones can be expressed as:
z(ω，t，a)＝z
0+z
1(ω，t，a)(2)
z
1(ω，t，a)＝asin(ωt+φ)(2-1)
Z wherein
0Be the zero optical path difference position, and z
1Be the displacement of vibration, and t is a time parameter.
With formula (2) and (2-1) substitution formula (1), get final product to such an extent that the interference light source strength of determinand 50 when dynamic is:
When the time parameter t in the formula (3) is fixed, be determinand 50 in specific " static state " interference state of when vibration.That is for perfect stroboscopic pulse light beam 312 (the Delta function of mathematics coideal), formula (3) is " static state " interference state of corresponding stroboscopic pulse light beam 312.
In other words, formula (3) is the actual interference state of desiring to try to achieve of the present invention.Yet stroboscopic pulse light beam 312 is not to be the Delta function, and on practice, stroboscopic pulse light beam 312 can be expressed as by Gaussian function:
δ wherein
TBe the standard deviation (standarddeviation) of stroboscopic pulse light beam, Pc is a largest light intensity, and tc is the center time (can be with reference to figure 4A, that is time delay tc) of stroboscopic pulse light beam.
Stroboscopic pulse light beam 312 is converted to displacement parameter z and is expressed as from time parameter t:
Wherein zc is the center of stroboscopic pulse light beam 312,
Be the light intensity distributions scope of pulsed light on the z axle of standard deviation in the time, the z axle be shifter 150 offset axis to, v is the speed (v=a ω cos (ω t+ φ)) of determinand 50 vibration displacements.
Interfering beam 314 can be considered the signal that come out by stroboscopic pulse light beam 312 and the interference light source institute convolution (convolution) of determinand 50 when dynamic, and then the intensity I s of interfering beam 314 just can be expressed as:
Wherein
Be mathematical convolution operation symbol.
In formula (6), if vibration frequency ω fixes, and the locking particular phases, promptly time delay, tc fixed, then can be in the width of stroboscopic pulse light beam 312, obtain stroboscopic pulse light beam 312 and the interference light source institute convolution of determinand 50 when dynamic interfering beam 314 signals that come out.
When carrying out vertical scanning when shifter 150 adjustment displacements, determinand 50 centres of oscillation can be along with vertical scanning constantly near reaching away from zero optical path difference position z
0, the parameter that therefore must add vertical scanning again is to formula (6), and formula (6) is rewritten as following formula:
(7)
Z wherein
k(t) be determinand 50 centres of oscillation and zero optical path difference position z
0Displacement apart.
Setting new argument d (t)=z (ω, t, a)+z
k(t) putting rewriting formula (7) after once more in order can get:
(8)
Parameter that it should be noted that the intensity I s of interfering beam 314 in formula (8) only is the time domain of time parameter t (time domain) expression, and the intensity I s of interfering beam 314 (d (t)) is the dynamic interference signal that actual amount measures.
In one embodiment of this invention, for enabling that easily the intensity I s of interfering beam 314 is carried out deconvolution in the hope of the interference light source strength I (suc as formula (3)) of determinand 50 when dynamic, can transfer formula (8) to frequency domain (frequency domain) by time domain and be expressed as with frequency parameter w:
I
S(d(w))＝I(d(w))P(d(w))(9)
Therefore with carrying out promptly getting the interference light source strength I of determinand 50 when dynamic after formula (9) transposition again be by the inverse transform computing that frequency domain is converted to time domain:
Wherein the interference light source strength I of determinand 50 when dynamic is the dynamic interference signal of reduction that carries out after the deconvolution computing.
Though be to be converted to time domain with anti-Fu Li leaf translation operation by frequency domain in formula (10), the present invention does not limit the mode of inverse transform computing.For example, formula (10) also can be anti-Laplce (Laplace) (￡
-1) translation operation, end is seen the actual operation convenience and is decided.
Particularly, the process of deconvolution computing is that first intensity P with stroboscopic pulse light beam 312 transfers frequency domain to by time domain.Because stroboscopic pulse light beam 312 can be set by experiment and adjust, so P (d (w)) is known parameter.In addition, also the dynamic interference signal that actual amount is measured transfers frequency domain to by time domain, and the intensity I s (d (w)) of interfering beam 314 that must be in frequency domain,
Then, behind the intensity P (d (w)) of intensity I s (d (w)) with interfering beam 314, carry out the inverse transform computing again and can obtain reducing dynamic interference signal divided by stroboscopic pulse light beam 312.
Fig. 6 A and Fig. 6 B are respectively the synoptic diagram of dynamic interference signal and the dynamic interference signal of reduction, and wherein icon is the coordinate diagram of the corresponding shifter displacements of determinand 50 a certain regional interference strengths, and the vibration frequency ω that selects for use is 205.4KHz.Please refer to Fig. 6 A and Fig. 6 B, by dynamic interference signal is carried out the deconvolution computing, can try to achieve the dynamic interference signal of reduction of interfering contrast preferable, enabling the surface profile of accurate reconstruction determinand 50, or accurately determinand 50 being carried out dynamic perfromance measures.
Spirit of the present invention is the dynamic interference signal that actual amount measures is considered as being formed by as the formula (3) dynamic interference signal and pulsed light beam 312 convolutions, can obtain reducing dynamic interference state (being dynamic interference signal as the formula (3)) by the deconvolution computing.The aforesaid derivation of equation is interpretation specific embodiment of the present invention only, is not in order to limit scope of the present invention.
In addition, the preferred mode of deconvolution computing for example is earlier to transfer the intensity of pulsed light beam 312 to frequency domain, the dynamic interference signal that measures is carried out the inverse transform computing after divided by the intensity of pulsed light beam 312 again, in the hope of reducing dynamic interference state.In addition, the present invention does not limit the mode of deconvolution computing, as the formula (8), the present invention also can be not by the mode of time-domain and frequency-domain conversion, and directly deconvolution computing and must be in time domain as the dynamic interference signal of reduction of interference strength I (d (t)).
Refer again to Fig. 3, the present invention does not limit the kind of interference measurement device and interference mirror group 130.For example, the interference measurement device can be the interferometer of Mirau formula interferometer, Michelson formula interferometer, Linnik formula interferometer or other suitable species.
In addition, in the present embodiment, light source generator 110 for example is that (Light Emitting Diode LED) explain to produce stroboscopic pulse light beam 312, but the present invention does not limit the kind of light source generator 110 to white light emitting diode.In addition, image-generating unit 140 is except being the charge coupled cell, also can be complementary metal oxide semiconductor (CMOS) (Complementary Metal-Oxide Semiconductor, CMOS) or other suitable array optical integrator.
In addition, the effect of light source generator 110 generation stroboscopic pulse light beams 312 can be equal to the time that restriction image-generating unit 140 receives light sources.That is the of short duration shutter of may command image-generating unit 140 periodic unlatchings, it can obtain dynamic interference signal equally.
Fig. 7 is the process flow diagram according to the method for the dynamic measurement surface profile of another embodiment of the present invention.Please refer to Fig. 7, the process flow diagram of Fig. 7 is similar to the process flow diagram of Fig. 5, and its difference is at first to set the phase place S50 of stroboscopic pulse light beam 312, in other words, is tc time delay (shown in Fig. 4 A) that sets stroboscopic pulse light beam 312.
The phase place of certain tones flash pulsing light beam 312 can measure the particular phases (as crest, trough or node) of determinand 50 in vibration, is familiar with this operator when understanding easily, just repeat no more in this.Behind the surface profile image of trying to achieve determinand 50, can change the phase place S54 of stroboscopic pulse light beam, again determinand 50 other phase place in vibration is measured.After all phase places to stroboscopic pulse light beam 312 scan, can try to achieve the mode of oscillation S55 of determinand 50.
In addition, although aforementioned be to be that example explains in the situation of external force vibration with determinand 50, but method of the present invention is equally applicable to the situation of determinand 50 under natural vibration, and tries to achieve the dynamic interference signal of reduction.
In sum, in the method for dynamic interference signal analysis of the present invention, owing to earlier dynamic interference signal is carried out the deconvolution computing, in the hope of interfering the preferable dynamic interference signal of reduction of contrast.But the surface profile of accurate reconstruction determinand like this, or determinand is carried out preferable dynamic perfromance to measure.Particularly determinand is when dither, and the dynamic interference signal of the reduction that method of the present invention is tried to achieve has preferable interference contrast.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limiting the present invention, anyly has the knack of this operator, without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is when looking being as the criterion that accompanying Claim defines.
Claims (10)
1. the method for a dynamic interference signal analysis is applicable to the dynamic perfromance that measures the determinand surface profile with dynamically the time, it is characterized in that the method for this dynamic interference signal analysis comprises:
During this determinand vibration, acquisition one dynamic interference signal;
This dynamic interference signal is carried out a deconvolution computing, and in the hope of the dynamic interference signal of a reduction, wherein the step that this dynamic interference signal is carried out this deconvolution computing comprises:
The intensity of one stroboscopic pulse light beam is converted to frequency domain by time domain;
Should be converted to frequency domain by time domain by dynamic interference signal;
In frequency domain, calculate the intensity of this dynamic interference signal divided by this stroboscopic pulse light beam; And
An inverse transform computing of this dynamic interference signal being carried out divided by the value of the intensity of this stroboscopic pulse light beam transfer time domain to by frequency domain is reduced dynamic interference signal in the hope of this.
2. the method for dynamic interference signal analysis as claimed in claim 1 is characterized in that, wherein this deconvolution computing comprises the computing of being changeed mutually by frequency domain and time domain.
3. the method for dynamically measuring interference signal analysis as claimed in claim 1 is characterized in that, wherein this inverse transform computing is anti-Fu Li leaf translation operation.
4. the method for dynamically measuring interference signal analysis as claimed in claim 1 is characterized in that, comprises also that wherein this is reduced dynamic interference signal carries out three-D profile and rebuild, in the hope of the surface profile image of this determinand.
5. the method for dynamically measuring interference signal analysis as claimed in claim 1, it is characterized in that, wherein be to cooperate an interference measurement device and the dynamic perfromance of this determinand of the dynamic measurement surface profile with dynamically the time, and this interference measurement device is Mirau formula interferometer, Michelson formula interferometer or Linnik formula interferometer.
6. the method for a dynamically measuring interference signal analysis is applicable to measure the surface profile of a determinand when dynamic and the mode of oscillation of this determinand, it is characterized in that the method for this dynamically measuring interference signal analysis comprises:
Set the phase place of a stroboscopic pulse light beam;
Surface profile acquisition one dynamic interference signal from this determinand;
This dynamic interference signal is carried out a deconvolution computing, in the hope of the dynamic interference signal of a reduction;
This is reduced dynamic interference signal carry out three-D profile and rebuild, in the hope of a surface profile image of this determinand; And
Change the phase place of this stroboscopic pulse light beam, again determinand other phase places in vibration are measured.
7. the method for dynamically measuring interference signal analysis as claimed in claim 6 is characterized in that, wherein this deconvolution computing also comprises the computing of being changeed mutually by frequency domain and time domain.
8. the method for dynamically measuring interference signal analysis as claimed in claim 6 is characterized in that, wherein the step that this dynamic interference signal is carried out this deconvolution computing comprises:
The intensity of this stroboscopic pulse light beam is converted to frequency domain by time domain;
Should be converted to frequency domain by time domain by dynamic interference signal;
In frequency domain, calculate the intensity of this dynamic interference signal divided by this stroboscopic pulse light beam; And
An inverse transform computing of this dynamic interference signal being carried out divided by the value of the intensity of this stroboscopic pulse light beam transfer time domain to by frequency domain is reduced dynamic interference signal in the hope of this.
9. the method for dynamically measuring interference signal analysis as claimed in claim 8 is characterized in that, wherein this inverse transform computing is anti-Fu Li leaf translation operation.
10. the method for dynamically measuring interference signal analysis as claimed in claim 6, it is characterized in that, wherein be to cooperate an interference measurement device and the dynamic perfromance of this determinand of the dynamic measurement surface profile with dynamically the time, and this interference measurement device is Mirau formula interferometer, Michelson formula interferometer or Linnik formula interferometer.
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