CN101284269B - Ultrasonic cleaning device and method - Google Patents
Ultrasonic cleaning device and method Download PDFInfo
- Publication number
- CN101284269B CN101284269B CN2008100870343A CN200810087034A CN101284269B CN 101284269 B CN101284269 B CN 101284269B CN 2008100870343 A CN2008100870343 A CN 2008100870343A CN 200810087034 A CN200810087034 A CN 200810087034A CN 101284269 B CN101284269 B CN 101284269B
- Authority
- CN
- China
- Prior art keywords
- cleaning
- ultrasonic
- ultrasonic vibration
- thing
- cleaned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention provides an ultrasonic cleaning device capable of symmetrically and efficiently cleaning the articles to be cleaned to further improve quality of the cleaned articles and lower the cost. The ultrasonic cleaning device comprises a cleaning trough for accommodating cleaning solution, a cleaned article support unit for supporting the cleaned articles and immersing the articles in the cleaning solution, and an oscillation applying unit for applying ultrasonic oscillation to the cleaning solution within the cleaning trough. The oscillation applying unit includes a planar oscillation plate, a plurality of ultrasonic oscillation elements that are regularly arranged on the oscillation plate; the cleaned article support unit includes a support surface where the plurality of cleaned articles can be placed in parallel and which supports these cleaned articles opposite to the oscillation plate; the device also comprises a movable unit making the oscillation applying unit and/or the cleaned article support unit movable, such that the oscillation plate and the support surface oppositely moves in parallel. Moreover, the invention also provides an ultrasonic cleaning method using the ultrasonic cleaning device.
Description
Technical field
The present invention relates to a kind of ultrasonic cleaning equipment, the ultrasonic vibratory energy that particularly a kind of utilization emits in the cleaning fluid cleans the ultrasonic cleaning equipment attached to the spot on the thing to be cleaned.
Background technology
The precise parts that electronic unit that is made up of semiconductor chip and size are less etc. require to have higher cleannes according to its purposes, so, all need clean as product turnout or before being assembled into device after making.For example, for disk, the head-slider that needs to hang down flight is assembled in the disk set, thus require to have higher cleannes, and be again the parts higher to positioning accuracy request, so requirement must clean up.
Ultrasonic cleaning equipment just uses as the device that cleans above-mentioned electronic unit etc. in the past.So-called ultrasonic waves for cleaning is exactly; The vibration of ultrasonic vibration element is passed to oscillating plate; And with this vibration radiation in cleaning fluid, the energy that utilizes vibration to produce is promptly removed attached to the dirty a kind of cleaning method on the thing to be cleaned by the shock wave that cavitation (cavitation) produces.To combine Figure 22 that the cavitation that in cleaning fluid, takes place because of ultrasonic vibration is described below.In addition, shown in Figure 21 (a), ultrasonic cleaning equipment is provided with ultrasonic vibration element 202 in the bottom surface of the rinse bath that accommodates cleaning fluid 210 201, and above this ultrasonic vibration element, is provided with the cleaning thing supporting seat 103 that is used to support cleaning thing 131.
Figure 22 (a) is the theoretical waveforms of the standing wave U that in cleaning fluid, takes place because of ultrasonic vibration.In theory, this standing wave U decays to the water surface from the bottom surface of rinse bath, but upward propagate to the depth direction (top) of cleaning fluid.But in fact, shown in Figure 22 (b), because hyperacoustic energy that remained in oxygen and other GAS ABSORPTION in the solution, so standing wave U is that its energy of bottom surface is low more away from sending out a vibration source more.In other words, it is better near the cleaning performance in rinse bath bottom surface to occur, more away from the poor more problem of rinse bath bottom surface cleaning performance.Particularly; As stated, when in rinse bath, being provided with multilayer and can placing the plummer that cleans thing, in solution near the plummer on upper strata ultrasonic energy low more; Simultaneously; Because the plummer ultrasonic energy of lower floor also can die down, so, cleaning performance poor more problem in more past top can appear.And the trough part of standing wave U also is different with the cleaning performance of peak part.This shows, still have the problem that evenly to clean thing to be cleaned.
For addressing the above problem; Japanese patent application laid is opened in the flat 8-267029 communique and has been disclosed a kind of ultrasonic cleaning equipment; Its bottom surface at rinse bath is provided with the ultrasonic vibration element; Simultaneously, shown in the arrow Y101 of Figure 21 (b), the cleaning thing supporting seat 103 of the cleaning thing 131 in support cleaning fluid ultrasonic vibration element 202 relatively moves up and down.Therefore, thing to be cleaned alternately is positioned at wave trough position and the crest location of the standing wave U that is produced by above-mentioned ultrasonic vibration, thereby realizes even energize, the purpose of evenly cleaning.
Yet above-mentioned cleaning energy is inhomogeneous, and promptly just not occur in the direction of propagation of ultrasonic vibration be on the level direction in the above-mentioned example to the uneven phenomenon of cavitation, on the face of same level, also can take place.For example, as the back Figure 11, shown in Figure 12 etc., apart from the center of ultrasonic vibration element energy far away more a little less than.Therefore; Certain depth in cleaning fluid in order to obtain uniform ultrasonic energy at grade, considers that the ultrasonic vibration element is had no sticking together of gap; But because the unfavorable condition of vibration can take place to suppress mutually adjacent vibrating elements, thereby can not obtain suitable vibration.And adjacent vibrating elements receives stress each other easily, so the lost of life of vibrating elements can occur and accelerate problem such as corrosion.
In addition, open in Japan Patent No. 3641383 communique, japanese patent application laid and disclosed the cleaning device that the ultrasonic vibration element shook or will be placed with thing to be cleaned in cleaning fluid plummer with respect to the horizontal plane carries out parallel rotation in the flat 5-50047 communique.Utilize this device, can change ultrasonic vibration element and thing to be cleaned position relation on above-below direction or horizontal direction, thereby make ultrasonic irradiation to thing to be cleaned, can realize even cleaning with varying strength.
Yet, in above-mentioned example in the past, because therefore the ultrasonic intensity that the ultrasonic vibration element produces different because of according to the shape of this ultrasonic vibration element and setting, still can not realize even and high efficiency cleaning.For example, the Japan Patent technology that No. 3641383 communique disclosed exists owing to shaking of ultrasonic vibration element makes the distance of ultrasonic vibration element and thing to be cleaned far away in some place, thereby reduces the problem of the effect of cleaning.In addition; Japanese patent application laid opens that technology that flat 5-50047 communique disclosed exists because the ultrasonic vibration element is arranged on the direction of extending along the radius of the plummer of rotation; So the cleaning performance of interior all sides and outer circumferential side is different; And, because the vibrating elements setting is also less, can not realize evenly and the problem of high efficiency washing so can produce.
Therefore, the present invention provides a kind of ability even and high efficiency cleaning thing to be cleaned for improving the problem that exists in the above-mentioned prior art especially, from and can improve article-cleaning matter and the ultrasonic cleaning equipment that reduces cost.
Summary of the invention
A kind of ultrasonic cleaning equipment that one embodiment of the invention provides comprises the rinse bath that can hold cleaning fluid, supports thing to be cleaned and with its vibration applying unit that is impregnated into the cleaning thing support unit in the cleaning fluid and the cleaning fluid in the rinse bath is applied ultrasonic vibration.Said vibration applying unit has plane oscillating plate, is arranged on a plurality of ultrasonic vibration elements on this oscillating plate regularly; Said cleaning thing support unit has can a plurality of things to be cleaned of parallel placement with respect to oscillating plate and support the supporting surface of these things to be cleaned; Said oscillating plate is the plane towards the one side of said supporting surface, and the liquid level of said plane and said cleaning fluid is parallel to each other; This device also comprises makes this vibration applying unit and/or the movable mobile unit of this cleaning thing support unit, makes this oscillating plate and this supporting surface opposing parallel move.
In the present embodiment, at first, the vibration that utilizes the ultrasonic vibration element on the oscillating plate that is arranged on the vibration applying unit regularly to be produced applies ultrasonic vibration to cleaning fluid.And, through cleaning fluid this ultrasonic vibration is supplied with to thing to be cleaned, thereby the dirty generation of this thing to be cleaned is vibrated and removal, carry out ultrasonic waves for cleaning with this.At this moment, at least can movable oscillating plate and supporting surface in any one, both can opposing parallel be moved.Like this; Move with respect to the parallel of vibration applying unit through thing to be cleaned; Make the ultrasonic vibratory energy that on the plane of the same level of cleaning fluid, is produced to supply to equably on the thing to be cleaned, and can supply with above certain quantity of energy with varying strength.Therefore, can suppress the inhomogeneities after thing to be cleaned cleans, can realize high efficiency cleaning again, thereby can improve the quality of cleaning thing and reduce cost.
In addition, the oscillating plate of said vibration applying unit is arranged on the position that plane that makes this oscillating plate and the liquid level that is contained in the cleaning fluid in the said rinse bath be parallel to each other.So, the ultrasonic vibration that this oscillating plate produces reflects on the interface between liquid level and the air, thus can be in cleaning fluid the higher ultrasonic vibration of produce power, can improve the efficient of ultrasonic waves for cleaning.
In addition, said mobile unit at least be parallel to the plane that forms by oscillating plate and orthogonal two direction of principal axis and perpendicular to a direction in the axial direction of rotation on this plane on movable said vibration applying unit and/or said cleaning thing support unit.At this moment, this mobile unit is controlled said vibration applying unit and said cleaning thing support unit, makes both unmovable on same direction simultaneously.And this vibration applying unit and should clean the relative operating range between the thing support unit is less than the distance between the ultrasonic vibration element of adjacent setting on the movable direction of mobile unit and greater than a half-distance of this distance.
Pass through said structure; Vibration applying unit and/or clean the thing support unit and can keep the state that is parallel to each other; Again can be movable on X, Y direction or the direction of rotation of this parallel direction; Thereby on the plane of the same level of cleaning fluid, ultrasonic vibration intensity is more supplied on the thing to be cleaned to homogenising, and suppress the inhomogeneities of cleaning.Particularly, can set movable distance according to the distance between the adjacent ultrasonic vibration element, thereby can compensate the intensity difference between the ultrasonic vibration element, make its more homogenising.
In addition, said ultrasonic vibration applying unit is provided with multiple row ultrasonic vibration element, and each the ultrasonic vibration element that is arranged on the adjacent columns is not contacted mutually, and has no to arrange with gap each row.This vibration applying unit has first row and the secondary series that forms and alternately arrange each other with the setting of same interval respectively; And on these first row and secondary series, dispose the ultrasonic vibration element respectively, make between the ultrasonic vibration element of ultrasonic vibration element in these first row in this secondary series.In this vibration applying unit, be separated by more than the 4mm between the outer rim of this each ultrasonic vibration element.Therefore; When this ultrasonic vibration element is done suitable vibration; Interval between this vibrating elements reduces; And as stated can thing to be cleaned is parallel mobile, thereby can supply to ultrasonic vibration more equably on the thing to be cleaned, and the ultrasonic vibration of this moment has the energy of suitable cleaning strength.
In addition, ten thousand (Langevin) type vibrating elements that said ultrasonic vibration element is preferably bright, particularly available stud are installed to the ten thousand bright type vibrating elements of stud formula on the said oscillating plate.So, with regard to the ultrasonic vibration element,, can reduce the vibrating elements that is positioned at this central portion, and can reduce amplitude in the vibration of this central portion generation through using central portion by the ten thousand bright type vibrating elements of bolt locking.Particularly, through using the part of stud formula, on the central portion that inserts stud, there is not vibrating elements, so can reduce amplitude.Thereby, can reduce the low frequency part of the vibration that imposes on cleaning fluid, and produce the more high-frequency part that can not make thing vibration to be cleaned and can only make dirty vibration, this high-frequency is partly supplied with to thing to be cleaned.Its result under the situation that can keep cleaning performance, can alleviate the damage of cleaning thing, the quality that improves the cleaning thing.
In addition; Another embodiment of the present invention provides a kind of method for suppersonic cleaning; This method for suppersonic cleaning utilizes ultrasonic cleaning equipment to carry out, and this method comprises: through the vibration applying unit cleaning fluid is applied ultrasonic vibration, thereby clean the matting of thing to be cleaned; This matting also comprises makes said vibration applying unit and/or the movable mobile unit of said cleaning thing support unit; Thereby the movable operation that this oscillating plate and this supporting surface opposing parallel are moved, wherein this ultrasonic cleaning equipment comprises the rinse bath that can hold cleaning fluid; Have plane oscillating plate and be arranged on the vibration applying unit that applies a plurality of ultrasonic vibration elements of ultrasonic vibration on this oscillating plate and to the cleaning fluid in this rinse bath regularly; Having can a plurality of thing to be cleaned of parallel placement with respect to oscillating plate and support the supporting surface of these things to be cleaned, and supports thing to be cleaned it is impregnated into the cleaning thing support unit in the cleaning fluid; Said oscillating plate is the plane towards the one side of said supporting surface, and the liquid level of said plane and said cleaning fluid is parallel to each other.
Preferably; Through said movable operation, at least be parallel to the plane that forms by oscillating plate and orthogonal two direction of principal axis and perpendicular to a direction in the axial direction of rotation on this plane on movable said vibration applying unit and/or said cleaning thing support unit.At this moment, said vibration applying unit of this movable Working Procedure Controlling and said cleaning thing support unit make both unmovable on same direction simultaneously.In addition; Can relatively movable said vibration applying unit and/or said cleaning thing support unit through this movable operation, make between the two relative operating range less than the distance between the ultrasonic vibration element of adjacent setting on the movable direction of movable operation and greater than a half-distance of this distance.
Compared with prior art; The present invention is owing to have said structure and function; Therefore; At least near the particular range cleaning the thing supporting surface, can make in the ultrasonic vibration that produces varying strength on the liquid level of the same degree of depth of cleaning fluid to have the energy more than a certain amount of, and can supply with equably to thing to be cleaned.And then, can suppress after thing to be cleaned cleans inhomogeneities, can realize high efficiency cleaning, also can improve the quality of cleaning thing and reducing cost.
Description of drawings
Fig. 1 is the sketch map of the ultrasonic cleaning equipment structure that provides of first embodiment of the invention.
Fig. 2 is the key diagram of the movable state of cleaning thing supporting base shown in Figure 1.
Fig. 3 is the structure of vibrating device shown in Figure 1 and the sketch map of ultrasonic vibration.
Fig. 4 is the key diagram of expression ultrasonic vibration arrangements of components.
Fig. 5 is the key diagram of expression ultrasonic vibration arrangements of components.
Fig. 6 is the key diagram of ultrasonic vibration intensity with ultrasonic vibration element of Fig. 4 and configuration shown in Figure 5.
Fig. 7 is the key diagram of expression ultrasonic vibration arrangements of components.
Fig. 8 is the key diagram of ultrasonic vibration intensity with ultrasonic vibration element of configuration shown in Figure 7.
Fig. 9 is the form of having summed up Fig. 6 and ultrasonic vibration intensity shown in Figure 8.
Figure 10 is the key diagram of the ultrasonic vibration intensity of the ultrasonic vibration element that provides of second embodiment of the invention.
Figure 11 is the key diagram of the ultrasonic vibration intensity of the ultrasonic vibration element that provides of second embodiment of the invention.
Figure 12 is the key diagram of the ultrasonic vibration intensity of the ultrasonic vibration element that provides of second embodiment of the invention.
Figure 13 is the structural representation of the ultrasonic vibration element that provides of second embodiment of the invention.
Figure 14 is the structural representation of the ultrasonic vibration element that provides of second embodiment of the invention.
Figure 15 is the vibrational waveform figure that the ultrasonic vibration element that provides of second embodiment of the invention produces.
Figure 16 is the skeleton diagram of the ultrasonic cleaning equipment structure that provides of third embodiment of the invention.
Figure 17 is the key diagram of the movable state of expression vibrating device shown in Figure 16.
Figure 18 is the structure skeleton diagram of the ultrasonic cleaning equipment that provides of fourth embodiment of the invention.
Figure 19 is the key diagram of the active state of cleaning thing supporting seat shown in Figure 18 and vibrating device.
Figure 20 is the structure of the ultrasonic vibration element that provides of fifth embodiment of the invention and the sketch map of ultrasonic vibration.
Figure 21 is the structure of ultrasonic cleaning equipment of the prior art and the skeleton diagram of action.
Figure 22 is the sketch map of ultrasonic vibration waveform.
The specific embodiment
The ultrasonic cleaning equipment that the present invention relates to has the characteristic that the ultrasonic vibration of uniform strength can be provided to the thing to be cleaned of the parallel placement of relative vibrating device.To concrete structure and action be described with embodiment below.
To combine Fig. 1 to Fig. 9 below, specify the first embodiment of the present invention.Fig. 1 is the sketch map of the structure of expression ultrasonic cleaning equipment; And Fig. 2 is the key diagram of its action of expression.Fig. 3 to Fig. 9 is the configuration of expression ultrasonic vibration element and the key diagram of ultrasonic vibration intensity.
Structure
As shown in Figure 1, the ultrasonic cleaning equipment of present embodiment comprises the rinse bath 1 that can hold cleaning fluid 10, support thing 31 to be cleaned and it is impregnated into the vibrating device 2 (vibration applying unit) that cleaning thing supporting seat 3 (cleaning the thing support unit) and the cleaning fluid 10 in rinse bath 1 in the cleaning fluid 10 apply ultrasonic vibration.Wherein, cleaning fluid 10 can be pure water, isopropyl alcohol, butane and neutral lotion etc.In addition, being supported on the cleaning thing 31 that cleans on the thing supporting seat 3 is electronic unit or other electronic units such as head-slider.Also have; Explanation to the structure of vibrating device 2 will be narrated in the back; This vibrating device 2 is loaded in the bottom surface of the rinse bath 1 that cleaning fluid 10 is housed, and 3 of cleaning thing supporting seats that support this cleaning thing 31 are on the liquid level position of certain depth in the cleaning fluid 10 by the top that bracing or strutting arrangement (figure does not show) supports to this vibrating device 2.
In the present embodiment, ultrasonic cleaning equipment further comprises and drive to clean thing supporting seat 3 movable drive unit 4 and controller 5 (mobile unit) of controlling the movable state of this drive unit 4 in rinse bath 1.In addition; Shown in Fig. 1 is the situation that this drive unit 4 is loaded in the outside of rinse bath 1; Certainly; This drive unit 4 also can be loaded in the rinse bath 1, can also be drive unit 4 to bracing or strutting arrangement (figure does not show) dual-purpose on the liquid level of the certain depth of cleaning fluid 10 supporting cleaning thing supporting seat 3.
Carry out detailed explanation in the face of above-mentioned vibrating device 2 down.Shown in Fig. 3 (a), the vibrating device 2 of present embodiment comprises plane oscillating plate 21 and is arranged on a plurality of ultrasonic vibration elements 22 on this oscillating plate 21 regularly.And,, therefore have the state that is provided with that is parallel to bottom surface and liquid level because this oscillating plate 21 is arranged on the bottom surface of the rinse bath 1 that cleaning fluid 10 is housed.Thus, the ultrasonic vibration that ultrasonic vibration element 2 and oscillating plate 21 are produced reflects on the interface between liquid level and the air, thus can be in cleaning fluid 10 the higher ultrasonic vibration of produce power.Moreover, also can this ultrasonic vibration element 22 be set directly at the bottom surface of rinse bath 1.That is to say, also can the bottom surface of rinse bath 1 be used as oscillating plate 21 as the part of vibrating device 2.
Shown in Fig. 3 (a), in the vibrating device 2 of present embodiment, oscillating plate 21 is provided with ultrasonic vibration element 22.The top side that this ultrasonic vibration element 22 both can be arranged on this oscillating plate 21 also can be arranged on the inside one side of this oscillating plate 21.To combine Fig. 4 that the configuration of ultrasonic vibration element 22 is described below.The schematic drawing of the part ultrasonic vibration element 22 on the oscillating plate that is arranged on vibrating device 2 21 shown in Fig. 4 (a).As shown in the figure, this ultrasonic vibration element 22 is arranged to some row L1, L2.Concrete, this ultrasonic vibration element 22 to be uniformly-spaced being arranged to the first row L1 of row, and also alternately arranges with the secondary series L2 that uniformly-spaced is arranged to row, and has no the gap between each adjacent row.That is to say; In the adjacent first row L1 and secondary series L2, with these two row in abutting connection with and to establish be to connect the outer peripheral straight line (dotted line) that is arranged on the ultrasonic vibration element 22 on the first row L1 in order making, and to connect outer peripheral straight line (dotted line) coincidence mutually that is arranged on the ultrasonic vibration element 22 on the secondary series L2.And the interval between the last ultrasonic vibration element 22 of each row L1, L2 equates separately.But, so as not to be arranged on adjacent columns L1, the last ultrasonic vibration element 22 of L2 is in contact with one another, in each row L1, L2, the position that is provided with of the ultrasonic vibration element 22 that staggered.Concrete, taked to make to be located at the mode between each ultrasonic vibration element 22 that is configured to row on the first row L1 at each ultrasonic vibration element 22 that is configured to row on the secondary series L2.In the present embodiment, the diameter of phi of this ultrasonic vibration element 22 is 45mm, and has the above configuration of interval D=4mm respectively between the outward flange that makes each ultrasonic vibration element 22.Even the reason that the interval D between this ultrasonic vibration element 22 is designed to more than the 4mm is that ultrasonic vibration element 22 vibrates, can not contact adjacent ultrasonic vibration element yet.
Also have, shown in Fig. 3 (b) is when ultrasonic vibration element 22 is configured to aforesaid form, the intensity distributions of the ultrasonic vibration on same degree of depth liquid level.As shown in the figure, the intensity of ultrasonic vibration is uneven on the liquid level of the same degree of depth.Particularly near the intensity ultrasonic vibration element 22 centers is the strongest, periphery a little less than.Although set the gap between the ultrasonic vibration element 22 less and carried out regularly being provided with, intensity still can be uneven.But in the present embodiment, the structure of utilizing the activity that is described below to clean thing supporting seat 3 solves above-mentioned problem.Down in the face of clean thing supporting seat 3 with and drive unit 4 describe.As shown in Figure 2, clean thing supporting seat 3 and have the supporting surface that can place a plurality of cleaning things 31, this supporting surface has flat shape.And it is set that this supporting surface is parallel to the liquid level of bottom surface and cleaning fluid 10 of said washing groove 1.That is, this supporting surface is parallel to the oscillating plate 21 of vibrating device 2.In addition,, clean thing supporting seat 3 and adopted the structure of pushing down and supporting with the sieve aperture element, and a side supports cleaning thing 31 below relative with vibrating device 2 in order to make the more cleaning fluid 10 of thing to be cleaned 31 contacts.
In addition; As shown in Figure 2; Drive unit 4 is (oscillating plate 21) and orthogonal two direction of principal axis in the bottom surface that is parallel to rinse bath 1, promptly along the horizontal direction (X-direction is the Y11 direction of Fig. 2) of the supporting surface that cleans thing supporting seat 3, to clean thing supporting seat 3 movable along the longitudinal direction (Y direction is the Y12 direction of Fig. 2) of the supporting surface of through this horizontal direction and perpendicular to making at least one direction in the axial direction of rotation (the axial direction of rotation of Z is the Y13 direction of Fig. 2) of supporting surface.At this moment, the movable state of this thing supporting seat 3 to be cleaned is by controller 5 controls.For example, shown in the arrow Y11 of Fig. 2 (a), can only on X-direction, move back and forth, shown in Fig. 2 (b), also can on X-direction and Y direction, carry out alternate reciprocating motion (arrow Y11, Y12).And, shown in Fig. 2 (c), be the center with the intersection of diagonal that is similar to rectangular cleaning thing supporting seat 3, the reciprocating motion (arrow Y13) that can around the Z axle, be rotated.
At this moment; Shown in Fig. 4 (b); Cooperate ultrasonic vibration element 22 state being set and be set at half distance A 1 (the first row L1 is to the distance between the adjacent secondary series L2) that the distance that equates with distance A 2 perhaps is set at distance A 2 in the movable distance of X-direction (Y11 direction) with vibrating device 2 relative cleaning thing supporting seats 3; Wherein, distance A 2 is at each other distance of the ultrasonic vibration element 22 of the adjacent setting of X-direction (from the first row L1 across adjacent secondary series L2 again to the distance of the first adjacent row).Promptly; As stated; When ultrasonic vibration element 22 respectively be listed as L1, when L2 has no alternately arranging of gap, the ultrasonic vibration element is just at two ultrasonic vibration elements (distance A 2) or just on a ultrasonic vibration element (distance A 1), move back and forth.And can move back and forth greater than distance A 1 and on less than distance A 2.In addition; Cleaning the movable distance of thing supporting seat 3 on Y direction (Y12 direction) is set at apart from B2 or apart from the half-distance B1 of B2 as stated; At this moment, apart from B2 be and the adjacent ultrasonic vibration element 22 equidistant distance each other that is arranged on the Y direction.That is, the ultrasonic vibration element just moves back and forth on a spacing (apart from B2) that is arranged at the ultrasonic vibration element 22 on each column direction or half pitch (apart from B1).And, also can be greater than moving back and forth apart from B1 and less than on apart from B2.
To combine Fig. 6 (a) and Fig. 6 (b) to explain when cleaning thing supporting seat 3 below, supply with the intensity of giving the ultrasonic vibration of cleaning thing supporting seat 3 with respect to vibrating device 2 reciprocating motions.Shown in figure; Near the center of ultrasonic vibration element 22 intensity is 100% o'clock; At first, when cleaning thing supporting seat 3 not movably and fixedly the time, the position between the ultrasonic vibration element 22 be between the ultrasonic vibration element above the minimum of intensity at position be 70%.Secondly, as stated, on the X-direction only in the scope of distance A 1 or distance A 2 when back and forth movable, for specific thing to be cleaned 31, because of adjacent ultrasonic vibration can overlap supply, so minimum intensity also can reach 85%.Equally, on the Y direction, when cleaning thing supporting seat 3 not movably and fixedly the time, minimum intensity also can reach 83%, and when cleaning thing supporting seat 3 just apart from B1 or in apart from the scope of B2 back and forth movably the time, the intensity of minimum also can reach 92%.
To combine Fig. 5 that other settings of ultrasonic vibration element 22 are described below.In the present embodiment, and illustrated in fig. 4ly be provided with equally above-mentioned, ultrasonic vibration element 22 is separately positioned on a plurality of row L1, L2 is last.And, ultrasonic vibration element 22 with the first row L11 that uniformly-spaced is arranged in row with equally be with the secondary series L12 that uniformly-spaced is arranged in row between have no with gap alternately arrangement.And each is listed as on the column direction of L11, L12, and ultrasonic vibration element 22 is to be separated by mutually to be equivalent to the distance of a ultrasonic vibration element and to be provided with.And, be located at first at each ultrasonic vibration element 22 of being arranged to row on the secondary series L12 and be listed as between each ultrasonic vibration element 22 of being arranged to row on the L11.
In above-mentioned the setting, after the distance A 11 of setting shown in Fig. 5 (b), when cleaning thing supporting seat 3 moved back and forth with respect to vibrating device 2, the intensity of supplying with the ultrasonic vibration of giving cleaning thing supporting seat 3 was shown in Fig. 6 (c).As shown in the drawing, near the intensity the center of ultrasonic vibration element 22 is 100% o'clock, and when thing supporting seat 3 to be cleaned not movably and fixedly the time, not having the minimum of intensity above the position of ultrasonic vibration element 22 is 50%.On the other hand, as stated, when only in the scope of distance A 11, moving back and forth on the X-direction, because the vibration of adjacent ultrasonic vibration element 22 can overlap, so even minimum intensity also can reach 75%.In view of the above; Even the interval between the ultrasonic vibration element 22 is arranged to also bigger than the gap shown in Fig. 4; Also can be because of the cause that respectively has no the gap between the row of ultrasonic vibration element, the ultrasonic vibration that will have the energy of suitable cleaning strength can be supplied with to thing 31 to be cleaned more equably.
On the other hand, different with above-mentioned situation, in Fig. 7 (a) and Fig. 7 (b), illustrated the example that respectively has a fixed gap between the row that ultrasonic vibration element 22 forms has been set.Concrete, in Fig. 7 (a), show the example at the interval of the ultrasonic vibration element size of almost being separated by between row L21 and the L22 of ultrasonic vibration element 22.In Fig. 7 (b), though show the example that does not have the gap of size shown in Fig. 7 (a) between row L31 and the L32 of ultrasonic vibration element 22 but still have certain intervals.And the ultrasonic vibration intensity that thing supporting seat 3 to be cleaned is given in supply under the different situations is then shown in Fig. 8 (a) and Fig. 8 (b).Shown in Fig. 8 (a), under the situation of Fig. 7 (a), be movable, also because the ultrasonic vibration element is not set, so minimum intensity is 30% at adjacent row even clean thing supporting seat 3.In addition, shown in Fig. 8 (b), under the situation of Fig. 7 (b), owing to still have a certain clearance, so cleaning thing supporting seat 3 when movable, minimum intensity is 70%, compares with the situation of above-mentioned Fig. 4 and Fig. 5 and can know that effect descends to some extent., as stated, make cleaning thing 31 movable, so just can bring into play effect of the present invention as stated with respect to vibrating elements 22 through ultrasonic vibration element 22 is set regularly.In addition, it is as shown in Figure 9 to be in above-mentioned various minimum of a value, maximum and the mean value that ultrasonic energy under the state is set.
Action
Action in the face of ultrasonic cleaning equipment describes down.At first, aforesaid ultrasonic cleaning equipment is provided, particularly, ultrasonic vibration element 22 is set, and set vibrating device 2 like above-mentioned Fig. 4, shown in Figure 5.Also have, in rinse bath 1, hold cleaning fluid 10, and vibrating device 2 is set in the bottom surface of rinse bath 1.And, the cleaning thing supporting seat 3 that support to clean thing 31 is arranged on the top of vibrating device 2 and is parallel under the state of this vibrating device 2 it is impregnated in the cleaning fluid 10.
Secondly, vibration ultrasonic vibration element 22 is applied to ultrasonic vibration in the cleaning fluid 1.Shown in the arrow Y1 of Fig. 1,, remove through vibration thus and clean dirty on the thing 31, thereby carry out ultrasonic waves for cleaning (matting) applying ultrasonic vibration by cleaning the thing to be cleaned 31 that thing supporting seat 3 supports.
And in cleaning process, the instruction of being sent according to controller 5 comes driver 4, makes to clean the oscillating plate 21 movable (movable operation) that thing supporting seat 3 is parallel to vibrating device 2.For example, as stated, the supporting surface along cleaning thing supporting seat 3 moves back and forth it on X, Y direction, perhaps be rotated motion (with reference to arrow Y11, Y12, the Y13 of Fig. 2).
So then shown in Fig. 3 (b); On the liquid level of the same degree of depth of cleaning fluid 10; Ultrasonic vibration intensity can fluctuate; But to be parallel to vibrating device movable because of cleaning thing supporting seat 3, so shown in the form among Fig. 6 and Fig. 9, in that support near the supporting surface that cleans thing 31 can high efficiency and the vibration with a certain amount of above energy is provided equably.Therefore, can suppress the inhomogeneities after thing to be cleaned cleans, and can carry out high efficiency cleaning again, improve article-cleaning matter, reduce cost.
To combine Figure 10 to Figure 15 that the second embodiment of the present invention is described below.The structure of the ultrasonic cleaning equipment of present embodiment and the foregoing description 1 is basic identical, and just the structure of ultrasonic vibration element 22 is different.
At first, be the method for getting distance B from the center C of ultrasonic vibration element 22 shown in Figure 10 (a).Shown in Figure 10 (b), (c), (d) is corresponding different distances D, has the energy variation of the ultrasonic vibration element of each frequency characteristic.And shown in each line chart is each distance on from the vibrating elements to the vertical direction.Moreover shown in Figure 11 is from the distance of the center C of the ultrasonic vibration element 22 of diameter 45mm is the oscillation intensity S of Dmm part.Shown in Figure 12 (a) is that to emit to from the position of distance center C distance B=0mm be vibrational energy and the relation between the frequency the cleaning fluid in the centre of oscillation.In addition, shown in Figure 12 (b) is D=0,15,30, and the chart of the vibrational energy that each frequency of 45mm part is corresponding.And, can find out near frequency is 100kHz, 200kHz, to have energy peak from Figure 12 (a), and be 50kHz to have less peak value near the 150kHz in frequency.In addition, can find out from Figure 12 (b), be that 0 to 15mm part energy is higher to the distance B of the center C of ultrasonic vibration element, and the energy at its peripheral position is less.On the other hand, in the ultrasonic waves for cleaning process because energy is higher, if thereby have the low frequency composition in the vibration, thing to be cleaned also can vibrate, so can cause the damage of cleaning thing.That is to say, in the ultrasonic waves for cleaning process, preferably can produce morely, can not make thing to be cleaned vibrations and only vibrate dirty high-frequency energy, and this high-frequency energy can alleviate cleaning the damage of thing.
In view of this, adopted in the present embodiment ten thousand bright type vibrating elements 22 ', this ten thousand bright type vibrating elements 22 ' be entreat range upon range of vibration part the position with the element of bolted to the ultrasonic vibration element therein.In Figure 13, represented one of them example.Figure 13 (a) is a profile, shown in Figure 13 (b) be installed to ten thousand bright type vibrating elements 22 on the oscillating plate 21 ' installed surface.At this moment, ten thousand bright type vibrating elements 22 ' be installed on the oscillating plate 21 through binding agent etc., thus constitute vibrating device 2.
This shows because used ten thousand bright type vibrating elements 22 ', be provided with bolt 22 ' a at middle body, do not have vibration part, so the amplitude of the vibration that this middle body produces can decrease.Therefore, can reduce the low frequency composition of the vibration that is applied in the cleaning fluid, produce and more thing to be cleaned is not vibrated and only vibrate dirty high-frequency composition, and it supplied with give thing to be cleaned.
In addition, in order to keep cleaning performance and to reduce, preferably adopt available stud to be installed to the ten thousand bright type vibrating elements of stud formula on the oscillating plate 21 to cleaning the damage of thing.It is shown in figure 14 to have this example of structure.Figure 14 figure (a) is a profile, and shown in Figure 14 (b) is the installed surface of ten thousand bright type vibrating elements of the stud formula on the oscillating plate 21 of being installed to.As shown in the drawing, be range upon range of vibration part etc. at middle body with bolt 22 " the structure that a is installed together.Thereby,, and do not have vibrating elements fully at middle body at fastening bolt 22 " front of a has formed the double thread hole 22 of the installation usefulness that can be used on the oscillating plate 21 " b.Therefore; With comparing that above-mentioned Figure 13 is disclosed, the amplitude of the vibration that is produced by middle body reduces, and can reduce the low frequency composition of the vibration that is applied in the cleaning fluid; Produce and more thing to be cleaned is not vibrated and only make the high-frequency composition of dirty vibration, and it is supplied with give thing to be cleaned.Its result can alleviate the damage that the cleaning thing is caused, thereby improves the quality of cleaning thing.
Moreover shown in Figure 15 (a) is above-mentioned ten thousand bright type vibrating elements 22 with binding agent etc. " the vibrational waveform W1 that the 21 last times of oscillating plate that being installed in does not have stud produce." the vibrational waveform W2 that this stud 21a that is installed in the oscillating plate 21 that is formed with stud 21a produces when going up shown in Figure 15 (b) above-mentioned ten thousand bright type vibrating elements 22.This shows that the method for vibrating elements being installed through stud 21a is disperse vibration equably.Therefore, can realize the better cleaning performance of uniformity.
To combine Figure 16 and Figure 17 that the third embodiment of the present invention is described below.Shown in figure 16; The structure of the ultrasonic cleaning equipment in the ultrasonic cleaning equipment of present embodiment and the foregoing description 1 is basic identical, in embodiment 1, cleans thing supporting seat 3 and has movable structure; And in the present embodiment, vibrating device 2 has movable structure.
Concrete, shown in figure 16, the same with the foregoing description; Be designed with drive unit 6; This drive unit 6 is used to drive the vibrating device 2 with ultrasonic vibration element 22, and controller 5 also is installed, and this controller 5 is used for the driving condition that accessory drive 6 drives vibrating device 2.And; Drive unit 6 makes on vibrating device 2 at least one direction in three directions shown in Figure 17 movable; That is bottom surface and orthogonal two direction of principal axis that, are parallel to rinse bath 1 promptly along the horizontal direction (X-direction (the Y21 direction of Figure 17)) on the plane of oscillating plate 21, along the longitudinal direction (Y direction (the Y22 direction of Figure 17)) of the oscillating plate of through this horizontal direction, perpendicular to the axial direction of rotation (the axial direction of rotation of Z (the Y23 direction of Figure 17)) of oscillating plate 21.For example, shown in the arrow Y21 of Figure 17 (a), can only on X-direction, move back and forth.Shown in Figure 17 (b), also can on X-direction and Y direction, alternately move back and forth.Again perhaps, shown in Figure 17 (c), be the center with the diagonal focus of the vibrating device 2 that slightly is rectangle, can around the Z axle, be rotated reciprocating motion.
At this moment; Identical with the foregoing description 1; The setting of corresponding ultrasonic vibration element 22, the movable distance of vibrating device 2 on X-direction (Y21 direction), Y direction (Y22 direction), thing 31 promptly to be cleaned with respect to the movable distance of ultrasonic vibration element 22 preferably less than distance A 2 and greater than distance A 1; Wherein distance A 2 is the distances between the ultrasonic vibration element 22 of adjacent setting on the movable direction, and half of this distance A 2 promptly is distance A 1.
Therefore, it is movable abreast that vibrating device 2 cleans thing supporting base 3 relatively, and thing 31 promptly to be cleaned reciprocatingly moves with respect to ultrasonic vibration element 22 in cleaning process.Thereby, as stated, the uneven ultrasonic vibration of intensity that on the liquid level of the same degree of depth of cleaning fluid 10, is produced, near high efficiency and provide equably and the have a certain amount of above energy supporting surface that supports thing 31 to be cleaned.Therefore, can suppress the inhomogeneities after thing to be cleaned cleans, the efficient cleaning that realizes cleaning thing, can also improve article-cleaning matter thus and reduce cost.
Embodiment 4
To combine Figure 18 and Figure 19 that the fourth embodiment of the present invention is described below.Shown in figure 18, the ultrasonic cleaning equipment structure of the ultrasonic cleaning equipment of present embodiment and the foregoing description 1 is basic identical, has just adopted in the present embodiment and has cleaned thing supporting base 3 and all movable structure of vibrating device 2.
Concrete; Shown in figure 18; Be designed with and drive the drive unit 4 that cleans thing supporting base 3; And aforesaid driving has the drive unit 6 of the vibrating device 2 of ultrasonic vibration element 22, and the controller 5 of the driving condition of cleaning thing supporting base 3 that control drives by drive unit 4,6 and vibrating device 2 also has been installed.And controller 5 comes the controlled motion state through each drive unit 4,6, and cleaning thing supporting base 3 is not moved on same direction with vibrating device 2 simultaneously.For example, shown in Figure 19 (a), clean thing supporting base 3 when Y direction (arrow Y12) goes up motion, make vibrating device 2 go up motion at directions X (arrow Y21).In addition, shown in Figure 19 (b), make when cleaning thing supporting base 3 (arrow Y13) rotates in a clockwise direction, also make vibrating device 2 with (arrow Y23) motion counterclockwise.In addition, shown in Figure 19 (c), make when cleaning thing supporting base 3 (arrow Y13) rotates in a clockwise direction, it is mobile that vibrating device 2 is replaced on directions X (arrow Y21) and Y direction (arrow Y22).Opposite, shown in Figure 19 (d), clean thing supporting base 3 and on directions X (arrow Y11) and Y direction (arrow Y12), replace when mobile, make vibrating device 2 in a clockwise direction (arrow Y23) rotate.
At this moment; Identical with the foregoing description 1; The setting of corresponding ultrasonic vibration element 22; Clean thing supporting base 3 and vibrating device 2 at the relative operating range on X-direction (Y21 direction), the Y direction (Y22 direction) preferably less than the distance A 2 between the ultrasonic vibration element 22 of adjacent setting on movable direction, and be greater than half distance A 1 of distance A 2.
So; Vibrating device 2 is that opposing parallel ground carries out activity with cleaning thing supporting base 3; Therefore; As stated, supporting in the uneven ultrasonic vibration of intensity that produces on the liquid level of the same degree of depth of cleaning fluid 10 near the supporting surface of thing 31 to be cleaned, can high efficiency and supply with vibration equably with a certain amount of above energy.Thereby, can suppress after thing to be cleaned cleans inhomogeneities, also can realize cleaning the high efficiency washing of thing, and then improve article-cleaning matter and can reduce cost.In addition, more than for example clear thing supporting base 3 and the vibrating device 2 movable situation on different directions respectively of cleaning, certainly, even on same direction, move, so long as movement velocity difference and relatively moving then also belongs to scope of the present invention.
As stated, as long as the ultrasonic vibration element 22 that is arranged on the oscillating plate 21 that constitutes vibrating device 2 has well-regulated configuration, Any shape all can.For example, shown in Figure 20 (a), the ultrasonic vibration element 121 of the multi-ribbon shape that on oscillating plate 21, also can laterally arrange.Thereby from this kind structural vibrations device 2; Just produce the uneven ultrasonic vibration shown in Figure 20 (b) in the ultrasonic vibration element 121, but, as stated; Because vibrating device 2 and/or thing supporting base 3 to be cleaned are movable relatively; So, support to clean near the supporting surface of thing 31, can high efficiency and supply with vibration equably with a certain amount of above energy.Thus, can suppress after thing to be cleaned cleans inhomogeneities, realize cleaning the high efficiency washing of thing, and then can improve article-cleaning matter, and can reduce cost.
Utilizability on the industry
Ultrasonic cleaning equipment of the present invention can be used for the goods of electronic units such as erase head slide block etc., therefore, has the utilizability on the industry.
Claims (11)
1. ultrasonic cleaning equipment; Comprise the rinse bath that can hold cleaning fluid, support thing to be cleaned and it is impregnated into the cleaning thing support unit in the cleaning fluid and the cleaning fluid in the rinse bath applied the vibration applying unit of ultrasonic vibration, it is characterized in that:
Said vibration applying unit has plane oscillating plate and is arranged on a plurality of ultrasonic vibration elements on this oscillating plate regularly;
Said cleaning thing support unit has can a plurality of things to be cleaned of parallel placement with respect to oscillating plate and support the supporting surface of these things to be cleaned; Said oscillating plate is the plane towards the one side of said supporting surface, and the liquid level of said plane and said cleaning fluid is parallel to each other;
This device also comprises makes this vibration applying unit and/or the movable mobile unit of this cleaning thing support unit, makes this oscillating plate and this supporting surface opposing parallel move; Said mobile unit at least be parallel to the plane that forms by oscillating plate and orthogonal two direction of principal axis and perpendicular to a direction in the axial direction of rotation on this plane on movable said vibration applying unit and/or said cleaning thing support unit.
2. ultrasonic cleaning equipment as claimed in claim 1 is characterized in that: said mobile unit is controlled said vibration applying unit and said cleaning thing support unit, makes both unmovable on same direction simultaneously.
3. according to claim 1 or claim 2 ultrasonic cleaning equipment; It is characterized in that: the relative operating range between said vibration applying unit and the said cleaning thing support unit, less than the distance between the ultrasonic vibration element of adjacent setting on the movable direction of mobile unit and greater than a half-distance of this distance.
4. ultrasonic cleaning equipment as claimed in claim 3; It is characterized in that: said ultrasonic vibration applying unit is provided with multiple row ultrasonic vibration element; Each the ultrasonic vibration element that is arranged on adjacent columns is not contacted, and have no to arrange with gap each row.
5. ultrasonic cleaning equipment as claimed in claim 4; It is characterized in that: said vibration applying unit has first row and the secondary series that forms and alternately arrange each other with the setting of same interval respectively; And on these first row and secondary series, dispose the ultrasonic vibration element respectively, make between the ultrasonic vibration element of ultrasonic vibration element in these first row in this secondary series.
6. ultrasonic cleaning equipment as claimed in claim 5 is characterized in that: in said vibration applying unit, be separated by more than the 4mm between the outer rim of said each ultrasonic vibration element.
7. ultrasonic cleaning equipment as claimed in claim 5 is characterized in that: said ultrasonic vibration element is ten thousand bright type vibrating elements.
8. ultrasonic cleaning equipment as claimed in claim 7 is characterized in that: said ultrasonic vibration element is that available stud is installed to the ten thousand bright type vibrating elements of stud formula on the said oscillating plate.
9. method for suppersonic cleaning; Use comprises the rinse bath that can hold cleaning fluid, has plane oscillating plate; Be arranged on regularly on this oscillating plate and to the cleaning fluid in this rinse bath apply a plurality of ultrasonic vibration elements of the ultrasonic fluctuation of shaking the vibration applying unit, having can a plurality of thing to be cleaned of parallel placement with respect to oscillating plate and support the supporting surface of these things to be cleaned; Support thing to be cleaned and it is impregnated into the ultrasonic cleaning equipment of the cleaning thing support unit in the cleaning fluid; Said oscillating plate is the plane towards the one side of said supporting surface, and the liquid level of said plane and said cleaning fluid is parallel to each other; It is characterized in that:
This method for suppersonic cleaning comprise through the vibration applying unit cleaning fluid is applied ultrasonic vibration, thereby clean the matting of thing to be cleaned,
This matting also comprises makes said vibration applying unit and/or the movable mobile unit of said cleaning thing support unit, thus the movable operation that this oscillating plate and this supporting surface opposing parallel are moved; Through said movable operation, at least be parallel to the plane that forms by oscillating plate and orthogonal two direction of principal axis and perpendicular to a direction in the axial direction of rotation on this plane on movable said vibration applying unit and/or said cleaning thing support unit.
10. method for suppersonic cleaning as claimed in claim 9 is characterized in that: said vibration applying unit of said movable Working Procedure Controlling and said cleaning thing support unit make both unmovable on same direction simultaneously.
11. like claim 9 or 10 described method for suppersonic cleaning; It is characterized in that: can relatively movable said vibration applying unit and/or said cleaning thing support unit through said movable operation, make between the two relative operating range less than the distance between the ultrasonic vibration element of adjacent setting on the movable direction that when carrying out movable operation, occurs and greater than a half-distance of this distance.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007106399A JP4953892B2 (en) | 2007-04-13 | 2007-04-13 | Ultrasonic cleaning apparatus and method |
| JP2007-106399 | 2007-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101284269A CN101284269A (en) | 2008-10-15 |
| CN101284269B true CN101284269B (en) | 2012-09-05 |
Family
ID=39982893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100870343A Expired - Fee Related CN101284269B (en) | 2007-04-13 | 2008-03-28 | Ultrasonic cleaning device and method |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4953892B2 (en) |
| CN (1) | CN101284269B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010216049A (en) * | 2009-03-19 | 2010-09-30 | Japan Vilene Co Ltd | Method and apparatus for producing fiber aggregate |
| CN109420642A (en) * | 2017-08-21 | 2019-03-05 | 中芯国际集成电路制造(北京)有限公司 | A kind of ultrasonic cleaning equipment |
| JP7005378B2 (en) * | 2018-02-21 | 2022-01-21 | 三菱電機株式会社 | Cleaning equipment |
| CN110126479A (en) * | 2019-05-29 | 2019-08-16 | 王改 | A kind of drum-type ink jet numbering machine |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87103641A (en) * | 1986-05-16 | 1987-11-25 | 伊斯曼柯达公司 | Clean the method and apparatus of semiconductor wafer |
| JP2002192092A (en) * | 2000-12-26 | 2002-07-10 | Toshiba Corp | Ultrasonic cleaning method, ultrasonic cleaning device and method for cleaning electrode part ultrasonically |
| JP2006110418A (en) * | 2004-10-12 | 2006-04-27 | Univ Of Tokyo | Ultrasonic cleansing apparatus |
| JP4256473B2 (en) * | 1996-06-11 | 2009-04-22 | クイーン・メアリー・アンド・ウエストフィールド・カレッジ | Cilia stimulation method |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61238385A (en) * | 1985-04-15 | 1986-10-23 | 島田理化工業株式会社 | Ultrasonic transmitter in ultrasonic washing apparatus |
| JPS6296845U (en) * | 1985-12-06 | 1987-06-20 | ||
| JP2899652B2 (en) * | 1989-11-16 | 1999-06-02 | 日本特殊陶業株式会社 | Vibration amplitude flattening method of Langevin type ultrasonic transducer |
| JPH0555180A (en) * | 1991-08-29 | 1993-03-05 | Fujitsu Ltd | Lift-off device for large-sized substrate and regulating method therefor |
| JPH05243203A (en) * | 1992-02-28 | 1993-09-21 | Fujitsu Ltd | Ultrasonic washer |
| JPH1052669A (en) * | 1996-05-22 | 1998-02-24 | Daishinku Co | Ultrasonic vibrator unit, ultrasonic cleaning device, and throw-in type ultrasonic cleaning device |
| JPH10277483A (en) * | 1997-04-04 | 1998-10-20 | Daishinku Co | Bolted langevin type vibrator |
-
2007
- 2007-04-13 JP JP2007106399A patent/JP4953892B2/en not_active Expired - Fee Related
-
2008
- 2008-03-28 CN CN2008100870343A patent/CN101284269B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87103641A (en) * | 1986-05-16 | 1987-11-25 | 伊斯曼柯达公司 | Clean the method and apparatus of semiconductor wafer |
| JP4256473B2 (en) * | 1996-06-11 | 2009-04-22 | クイーン・メアリー・アンド・ウエストフィールド・カレッジ | Cilia stimulation method |
| JP2002192092A (en) * | 2000-12-26 | 2002-07-10 | Toshiba Corp | Ultrasonic cleaning method, ultrasonic cleaning device and method for cleaning electrode part ultrasonically |
| JP2006110418A (en) * | 2004-10-12 | 2006-04-27 | Univ Of Tokyo | Ultrasonic cleansing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4953892B2 (en) | 2012-06-13 |
| CN101284269A (en) | 2008-10-15 |
| JP2008259998A (en) | 2008-10-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101284269B (en) | Ultrasonic cleaning device and method | |
| KR101571685B1 (en) | Ultrasonic washing apparatus, and ultrasonic washing method | |
| CN100350556C (en) | Processing apparatus | |
| AU690610B2 (en) | Ultrasonic agitator | |
| CN100539004C (en) | The nozzle unit that is used for the method and apparatus that substrate is handled and is used for this processing operation | |
| JP2009517543A (en) | Apparatus and method for vibrating liquids during wet chemical processing of microstructured workpieces | |
| CN100464877C (en) | Chip washing method and device | |
| ES2209077T3 (en) | CLEANING PROCEDURE OF A METAL PART. | |
| CN106168528A (en) | Nonlinear elasticity auxiliary vibration device and vibration and sway platform | |
| KR20080025264A (en) | Ultrasonic auto washer for plate shapedmembers | |
| CN205203424U (en) | Long purlin manufacture process residual stress release process units of aircraft wing | |
| CN210974893U (en) | Ultrasonic purification device before plating of cylinder body | |
| US2883310A (en) | Surface cleaning apparatus and method | |
| CN217019960U (en) | Polishing cloth trimming disc with ultrasonic function | |
| CN203526131U (en) | Equipment for oscillating and cleaning workpieces | |
| CN114425498B (en) | Catalyst support impregnation apparatus and method | |
| CN211697423U (en) | Automobile wheel hub salt fog test device | |
| CN211437190U (en) | Ultrasonic cleaning equipment | |
| JP3645412B2 (en) | Ultrasonic cleaner | |
| CN112588710A (en) | Ultrasonic cleaning device and cleaning method thereof | |
| WO2012043090A1 (en) | Method of producing substrate for use in information recording medium, and washing device used in production thereof | |
| KR101611333B1 (en) | Fountain Type Ultrasonic Cleaning Apparatus | |
| CN220836991U (en) | Spring fixing frame for ultrasonic cleaning | |
| CN210426929U (en) | Vibration test device | |
| JPH07263397A (en) | Ultrasonic cleaning method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120905 Termination date: 20160328 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |