CN101266269A - Dummy instrument controlled four electrode method electric conductivity test device - Google Patents
Dummy instrument controlled four electrode method electric conductivity test device Download PDFInfo
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- CN101266269A CN101266269A CNA2008101061384A CN200810106138A CN101266269A CN 101266269 A CN101266269 A CN 101266269A CN A2008101061384 A CNA2008101061384 A CN A2008101061384A CN 200810106138 A CN200810106138 A CN 200810106138A CN 101266269 A CN101266269 A CN 101266269A
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Abstract
A four-electrode method conductivity testing device controlled by a virtual device belongs to material property testing domain. The device is composed of a hardware testing platform and a virtual software controlling platform. The hardware testing platform comprises a X-Y-Z three-dimensional mobile platform (7), a vertical electrode supporting platform (8), a horizontal electrode supporting loading object platform (9) and a spring electrode, and is mainly used for loading the tested object and adjusting the position and satisfying test requirement of the sample in different shape and size by adjusting the mobile platform. The virtual software controlling platform is composed of a voltmeter (5), a current supply meter (6), a general purpose interface bus control card (2) and a computer (1). The voltmeter is connected with the current supply meter by a trigger cable (4) and the voltmeter, current supply meter and trigger cable are connected with the general purpose interface bus control card by the general purpose interface bus cable, therefore the four-electrode method conductivity testing device controlled by the virtual device is formed. The testing result has creditability and the data can be acquired and automatically processed at the same time.
Description
Technical field
This device belongs to the material properties test technical field, is specially adapted to material electric conductivity tests such as semiconductor and microelectronic packaging material.
Background technology
Conductivity of electrolyte materials is research and evaluation material property a very important part, particularly semiconductor type material and microelectronic packaging material.Semiconductor material mainly is because the particle of doping variable concentrations and kind changes the conductance of material, thereby realize its function, the variation of conductivity is an important means of estimating its performance, but the variation of conductivity is very little behind the doping particle, is very important and find out a kind of easy, efficient method of testing that has high confidence level simultaneously.Be electronic package material under arms in the process, owing to making its electric property, different Service Environment effects changes, the assessment data that obtains its reliability by the situation of change of measuring its conductivity also is very important, but be that the size of electronic package material own is very little, the variation of its conductivity is littler, and its shape, size also are not quite similar, so also need a kind of easy, efficient method of testing that has high reliability simultaneously.
Soil Dept. of Chengdu Branch, Chinese Academy of Sciences's patent (90212551.6) provides a kind of field soil conductivity direct determinator, also be applicable to the conductivity meter that liquid electric conductivities such as laboratory solution, pure water are measured, but this conductivity meter MAIN SOILS and liquid, and measured object resistivity is general bigger, electrode need insert testing sample, is not suitable for accurate measurement; Xian Electrical Ceramics Research Institute has been invented a kind of pollution layer conductivity measurement mechanism (85200823).This pollution layer conductivity measurement mechanism belongs to the electrical engineering field, be used for the measurement of the conductivity under the high voltage electric power equip ment external insulation pollution layer wet condition, range of application has the big limitation of nuclear, and data only are to show, handles and can not collect the computing machine science of carrying out; The conductivity sensor that FURUKAWAH patent JP2005291914-A provides a kind of automatic vending machine to use.This device is mainly used to measure the conductivity of circulating fluid, and is not suitable for semiconductor and microelectronic packaging material.
Owing to lack the material resistance subtle change of suitable adaptation different shape, size and the device that the automatic science of data is handled, at home, also not to the device that resistivity of material is accurately measured and the automatic science of data is handled of difformity and size.In fact, in the measuring process for small resistance variations, contact resistance is much larger than institute's measuring resistance, and the four electrode method of employing comparative maturity is measured the influence of just well having avoided contact resistance heap measurement result, and measurement result has more credibility; For scientific experiment, the collection of data is very important with handling automatically simultaneously, adopts LabVIEW
TMVirtual instrument software cooperates the general purpose interface bus control card, can realize this function well; Adopt the three-dimensional mobile platform of X-Y-Z simultaneously, can better adapt to the requirement of the testing sample of difformity, different size.Therefore, the four electrode method electric conductivity test device of exploitation and the control of development virtual instrument, accurately measure the resistivity of measuring semiconductor type material and microelectronic packaging material, have crucial meaning to correct assessment semiconductor and for the electric property of electronic package material.
Summary of the invention
The present invention is primarily aimed at material electric conductivities such as semiconductor and microelectronic packaging material and tests and design, and is applicable to the measurement of the conductivity under the room temperature condition.
The four electrode method electric conductivity test device of this virtual instrument control, it is characterized in that, it is made of hardware test platform and virtual instrument software control platform two large divisions, wherein hardware test platform is made of the three-dimensional mobile platform of X-Y-Z, vertical electrode support platform, horizontal electrode support article carrying platform and spring electrode, and virtual instrument control platform mainly comprises voltage table, current source table, general purpose interface bus control card and computing machine.Testing sample is placed in horizontal electrode and supports the article carrying platform upper surface, clamps end face by two horizontal spring electrodes simultaneously; The uprighting spring electrode is fixed on the vertical electrode support platform, keeps closely contacting from vertical direction and testing sample; The vertical electrode support platform, and is driven by vertical mobile module and to make it to move on the X-Y-Z three-dimensional on the vertical mobile module of the three-dimensional mobile platform of X-Y-Z by screw retention, to satisfy the requirement of difformity and size sample.Also spring electrode is placed in the diverse location boring on vertical electrode support platform and horizontal electrode support article carrying platform simultaneously, to satisfy the requirement of sample size in bigger variation range.Its annexation is as follows: level links to each other with current source table and voltage table by lead respectively with the uprighting spring electrode, is connected by triggering cable between voltage table and the current source table, and links together by general purpose interface bus cable and the general purpose interface bus control card that is connected on the computing machine respectively.The general purpose interface bus control card is gathered experimental data by voltage table and current source table in the computing machine.
The vertical electrode support platform of apparatus of the present invention supports the article carrying platform characteristics with horizontal electrode and is and can changes distance between electrodes by the different spring electrode access point of conversion, adapt to the requirement of the sample of different size, the use of spring electrode simultaneously not only can better clamp sample, can among a small circle, regulate simultaneously the distance between electrode and the sample, adapt to the smaller sample of change in size.
The three-dimensional mobile platform of the X-Y-Z that purchases of apparatus of the present invention can and be measured under the situation of spacing the variation of the conductivity of measuring samples diverse location at fixed sample in addition; As the device that can move, can be implemented in the conductivity of bigger range of size measuring samples on a large scale simultaneously.
Another one part and parcel of the present invention is the software control measure portion, cooperates Keithley
TM2400 current source tables, 2182 voltage tables and general purpose interface bus control card realize collection of experiment data and processing.The concrete order that connects is: the current source table links to each other with sample by lead, horizontal spring electrode, and voltage table is connected with sample by lead, uprighting spring electrode; Current source table and voltage table link to each other with the general purpose interface bus control card that inserts computing machine by the general purpose interface bus cable, link to each other the collection of computer general-purpose interface bus control card, deal with data by the triggering cable between current source table and the voltage table.
The present invention is in the time interval that can control survey and the cycle of measurement, measurement result preserved and show intuitively in the mode of chart, thereby realize the measurement of conductivity and the variation of conductivity are observed.
Measurement result of the present invention has more credibility, and has realized the collection of data and processing automatically simultaneously.
Description of drawings:
Fig. 1 test platform general assembly synoptic diagram
Fig. 2 vertical electrode support platform synoptic diagram
Fig. 3 horizontal electrode supports the article carrying platform synoptic diagram
Fig. 4 embodiment 1 sample voltage measurement figure
Fig. 5 embodiment 2 sample voltage measurement figure
The content of digital representative among the figure:
The 1-computing machine
2-general purpose interface bus control card
3-general purpose interface bus cable
4-triggers cable
The 5-voltage table
6-current source table
The three-dimensional mobile platform of 7-X-Y-Z
8-vertical electrode support platform
The 9-horizontal electrode supports article carrying platform
Embodiment
The method of testing and the device of the conductivity of sample are described below by accompanying drawing and corresponding specific embodiment, but be understood that, wherein in an embodiment about the description of size, material type and the positioned opposite of sample and do not mean that and limit the invention to particular forms disclosed, this programme only is open in the mode of example, unless otherwise specified.
The four electrode method conductivity measuring apparatus of virtual instrument control is made of hardware test platform and virtual instrument software control platform two large divisions, and assembling and connected mode are as shown in Figure 1.Wherein apparatus main body mainly comprises computing machine, general purpose interface bus control card, general purpose interface bus cable, Keithley2400 current source table, Keithley2182 voltage table, triggers cable, the three-dimensional mobile platform of X-Y-Z, vertical electrode support platform, horizontal electrode support article carrying platform and spring electrode, and Fig. 2, Fig. 3 are respectively the vertical electrode support platform and horizontal electrode supports the article carrying platform synoptic diagram.
The annexation of the four electrode method conductivity measuring apparatus of virtual instrument control is as follows: the general purpose interface bus control card links to each other with computing machine by the expansion interface slot of computing machine; Keithley2400 current source table and Keithley2182 voltage table link to each other with general purpose interface bus interface on the general purpose interface bus control card by the general purpose interface bus cable, and receive respectively on the 220V power supply; Link to each other by triggering cable between Keithley2400 current source table and the Keithley2182 voltage table; Spring electrode links to each other with voltage table with the current source table respectively by lead; Wherein the uprighting spring electrode links to each other with the three-dimensional mobile platform of X-Y-Z by the vertical electrode support platform, thereby realizes the three-dimensional motion of electrode, drives by the three-dimensional mobile platform of X-Y-Z to contact with sample; The horizontal spring electrode is fixed on horizontal electrode and supports article carrying platform, contacts with testing sample by spring; By changing the fixed position of electrode on horizontal electrode support article carrying platform, realize large-scale traverse measurement simultaneously; The three-dimensional mobile platform of X-Y-Z supports on the article carrying platform at horizontal electrode by screw retention.
The LabVIEW that packs in the computing machine
TMThe programmed control general purpose interface bus control card that software passes through to be worked out is gathered experimental data by voltage table and current source table.The time interval of measuring by software control and the cycle of measurement, measurement result preserved and show intuitively, thereby realize the measurement of conductivity and the variation of conductivity are observed in the mode of chart.
Embodiment 1: used sample is a reguline metal tin, and sample size is: long 20mm, wide 16mm, thick 4.5mm.Data read is counted 10, and electrode separation 10mm, electric current are 0.02A.
The concrete test process of present embodiment is as follows: polished in the surface of testing sample, remove the oxide on surface, and measure its size, the sample of handling well is placed on horizontal electrode to be supported on the article carrying platform, the position of adjusting spring electrode makes it to contact with the surface of sample, with the power supply opening of current source table and voltage table, adjust to state to be measured then.Open computing machine and LabVIEW
TMVirtual instrument software accesses the process of measurement of being worked out, and measurement parameter is set, and working procedure is measured.
Can measure the conductivity of this sample under this test condition by Fig. 4 is 7.3 * 10
4/ Ω cm.
The standard conductivity of pure tin is 9.17 * 10
4/ Ω cm considers in fusion process the impurity that can add, and innerly can produce pore, and defectives such as slag inclusion have hindered electronics along the moving of a certain direction, and cause conductivity to reduce, so the measurement result of this measurement mechanism is more accurate.
Embodiment 2: used sample is a reguline metal copper, and sample size is: long 17mm, wide 12mm, thick 3mm.Data read is counted 10, electrode separation 10mm, electric current 0.02A.
The concrete test process of this example is as follows: polished in the surface of testing sample, remove the oxide on surface, and measure its size, the sample of handling well is placed on horizontal electrode to be supported on the article carrying platform, the position of adjusting spring electrode makes it to contact with the surface of sample, with the power supply opening of current source table and voltage table, adjust to state to be measured then.Open computing machine and LabVIEW
TMVirtual instrument software accesses the process of measurement of being worked out, and measurement parameter is set, and working procedure is measured.
Can measure the conductivity of this sample under this experiment condition by Fig. 5 is 4.05 * 10
5/ Ω cm.
The standard conductivity of fine copper is 6.8 * 10
5/ Ω cm excessive dislocation and defective can occur through the sample after cutting and the polishing, thereby causes the conductivity of measuring samples to reduce, so the measurement result of this measurement mechanism is more accurate.
Claims (1)
1. the four electrode method electric conductivity test device of virtual instrument control, it is characterized in that, it is made of hardware test platform and virtual instrument software control platform two large divisions, wherein hardware test platform supports article carrying platform (9) and spring electrode formation by the three-dimensional mobile platform (7) of X-Y-Z, vertical electrode support platform (8), horizontal electrode, and virtual instrument control platform comprises voltage table (5), current source table (6), general purpose interface bus control card (2), computing machine (1); Vertical electrode support platform (8) is fixed on the vertical mobile module of the three-dimensional mobile platform of X-Y-Z (7); Its annexation is as follows: the horizontal spring electrode links to each other with current source table and voltage table by lead; The uprighting spring electrode links to each other with current source table and voltage table by lead; Is connected by triggering cable (4) between voltage table and the current source table, and links together by general purpose interface bus cable and the general purpose interface bus control card that is connected on the computing machine respectively.
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| CNA2008101061384A CN101266269A (en) | 2008-05-09 | 2008-05-09 | Dummy instrument controlled four electrode method electric conductivity test device |
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| CNA2008101061384A CN101266269A (en) | 2008-05-09 | 2008-05-09 | Dummy instrument controlled four electrode method electric conductivity test device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565144A (en) * | 2011-01-04 | 2012-07-11 | 上海仪迈仪器科技有限公司 | Achievement device for concurrently measuring conductivity and pH value in the same solution |
| CN103176024A (en) * | 2011-12-21 | 2013-06-26 | 中兴通讯股份有限公司 | Method and system for utilizing source meter to conduct measurement |
| CN103412192A (en) * | 2013-07-08 | 2013-11-27 | 浙江省计量科学研究院 | Pure water conductivity measurement system |
| CN104459323A (en) * | 2013-09-13 | 2015-03-25 | 中国科学院大连化学物理研究所 | Humiture controllable conductivity testing device and operation method thereof |
| CN109030945A (en) * | 2018-06-08 | 2018-12-18 | 同济大学 | A kind of soil resistivity sensing device based on high-density electric observation |
| CN109188094A (en) * | 2018-09-30 | 2019-01-11 | 北京航空航天大学 | A kind of detection method and detection device of metal material conductivity |
-
2008
- 2008-05-09 CN CNA2008101061384A patent/CN101266269A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565144A (en) * | 2011-01-04 | 2012-07-11 | 上海仪迈仪器科技有限公司 | Achievement device for concurrently measuring conductivity and pH value in the same solution |
| CN102565144B (en) * | 2011-01-04 | 2014-11-19 | 上海仪迈仪器科技有限公司 | Achievement device and method for concurrently measuring conductivity and pH value in the same solution |
| CN103176024A (en) * | 2011-12-21 | 2013-06-26 | 中兴通讯股份有限公司 | Method and system for utilizing source meter to conduct measurement |
| CN103412192A (en) * | 2013-07-08 | 2013-11-27 | 浙江省计量科学研究院 | Pure water conductivity measurement system |
| CN103412192B (en) * | 2013-07-08 | 2015-10-28 | 浙江省计量科学研究院 | A kind of pure water conductivity measurement system |
| CN104459323A (en) * | 2013-09-13 | 2015-03-25 | 中国科学院大连化学物理研究所 | Humiture controllable conductivity testing device and operation method thereof |
| CN104459323B (en) * | 2013-09-13 | 2017-05-10 | 中国科学院大连化学物理研究所 | Humiture controllable conductivity testing device and operation method thereof |
| CN109030945A (en) * | 2018-06-08 | 2018-12-18 | 同济大学 | A kind of soil resistivity sensing device based on high-density electric observation |
| CN109188094A (en) * | 2018-09-30 | 2019-01-11 | 北京航空航天大学 | A kind of detection method and detection device of metal material conductivity |
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Open date: 20080917 |