CN101252101A - 采用曝光场拼接技术制作超大功率智能器件的方法 - Google Patents
采用曝光场拼接技术制作超大功率智能器件的方法 Download PDFInfo
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- CN101252101A CN101252101A CNA2008100563538A CN200810056353A CN101252101A CN 101252101 A CN101252101 A CN 101252101A CN A2008100563538 A CNA2008100563538 A CN A2008100563538A CN 200810056353 A CN200810056353 A CN 200810056353A CN 101252101 A CN101252101 A CN 101252101A
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CN2008100563538A CN101252101B (zh) | 2008-01-17 | 2008-01-17 | 采用曝光场拼接技术制作超大功率智能器件的方法 |
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CN2008100563538A CN101252101B (zh) | 2008-01-17 | 2008-01-17 | 采用曝光场拼接技术制作超大功率智能器件的方法 |
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CN101252101A true CN101252101A (zh) | 2008-08-27 |
CN101252101B CN101252101B (zh) | 2010-08-11 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105304682A (zh) * | 2015-10-20 | 2016-02-03 | 深圳典邦科技有限公司 | 一种硅基oled图像收发装置及其制作方法 |
CN109074006A (zh) * | 2016-05-18 | 2018-12-21 | Towerjazz松下半导体有限公司 | 半导体装置及其制造方法 |
CN110505385A (zh) * | 2019-08-29 | 2019-11-26 | Oppo广东移动通信有限公司 | 成像系统、终端和图像获取方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3999301B2 (ja) * | 1997-03-07 | 2007-10-31 | 富士通株式会社 | 露光データ作成方法 |
US6048785A (en) * | 1997-06-16 | 2000-04-11 | Advanced Micro Devices, Inc. | Semiconductor fabrication method of combining a plurality of fields defined by a reticle image using segment stitching |
TW594439B (en) * | 2003-09-18 | 2004-06-21 | Taiwan Semiconductor Mfg | Shop-step shift method for stitching mask patterns |
JP4854998B2 (ja) * | 2005-07-05 | 2012-01-18 | 三菱電機株式会社 | 液晶表示装置の製造方法 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105304682A (zh) * | 2015-10-20 | 2016-02-03 | 深圳典邦科技有限公司 | 一种硅基oled图像收发装置及其制作方法 |
US20180240851A1 (en) * | 2015-10-20 | 2018-08-23 | Shenzhen Dianbond Technology Co., Ltd | Silicon-based oled image transceiving device and manufacture method thereof |
CN105304682B (zh) * | 2015-10-20 | 2019-05-28 | 深圳典邦科技有限公司 | 一种硅基oled图像收发装置及其制作方法 |
US10418421B2 (en) | 2015-10-20 | 2019-09-17 | Shenzhen Dianbond Technology Co., Ltd | Silicon-based OLED image transceiving device and manufacture method thereof |
CN109074006A (zh) * | 2016-05-18 | 2018-12-21 | Towerjazz松下半导体有限公司 | 半导体装置及其制造方法 |
CN109074006B (zh) * | 2016-05-18 | 2021-03-23 | 高塔伙伴半导体有限公司 | 半导体装置及其制造方法 |
CN110505385A (zh) * | 2019-08-29 | 2019-11-26 | Oppo广东移动通信有限公司 | 成像系统、终端和图像获取方法 |
CN110505385B (zh) * | 2019-08-29 | 2021-06-11 | Oppo广东移动通信有限公司 | 成像系统、终端和图像获取方法 |
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