CN101251463B - Control system for micro-nano sample in electronic microscope - Google Patents
Control system for micro-nano sample in electronic microscope Download PDFInfo
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- CN101251463B CN101251463B CN2008100200445A CN200810020044A CN101251463B CN 101251463 B CN101251463 B CN 101251463B CN 2008100200445 A CN2008100200445 A CN 2008100200445A CN 200810020044 A CN200810020044 A CN 200810020044A CN 101251463 B CN101251463 B CN 101251463B
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Abstract
The present invention discloses a control system for micro-nano samples under electron microscopes, comprising an operation platform, a sample carrier, operation modules and a control device. The control system is characterized in that: the control device comprises a signal transmitting device, a signal receiving device and a battery component compatible with vacuum environment; the signal receiving device is arranged on the operation platform; the signal transmitting device is connected with a human-computer exchange controller and transmits control signals to the signal receiving device through wireless transmission medium; the battery component supplies power to the receiving device and a control circuit; the receiving device receives signals and drives the operation modules to execute corresponding operation via the control circuit. Through the fit of the signal transmitting device and the receiving device, the present invention uses the wireless transmission medium as a communication mode, so as to realize the wireless control on the operation modules in a sample chamber and prevent conductor interpenetration and sample chamber refitting from affecting the vacuum degree of the sample chamber. The control system is suitable for various electron microscopes, and is direct and convenient to operate.
Description
Technical field
The present invention relates to a kind of control system that is used for the micro-nano sample inspection process, be specifically related to a kind of control system that micro-nano sample is carried out each generic operation of under electron microscope, controlling.
Background technology
Electron microscope is according to electron-optical concept, replace light beam and optical lens with electron beam and electronic lens, make the instrument of fine structure imaging under very high enlargement factor of material, adjacent 2 minimum spacing that its resolution characteristic can be differentiated with it is represented.Hyundai electronics microscope maximum amplification times yield is above 3,000,000 times, and the maximum amplification times yield of optical microscope is about 2000 times (these are the restrictions that is subjected to the wavelength of light of this microscope execution work institute foundation), so just can observe directly the atom lattice of marshalling in the atom of some heavy metal and the crystal by electron microscope.
The hyundai electronics microscope generally comprises: (1) one electron gun, and it is used to produce accelerated electron beam; (2) one image generation systems, this system comprises electrostatic lens and metal diaphragm, metal diaphragm wherein is used for boundary and focused beam, makes electron beam pass the surface of sample or scans on the surface, and form enlarged image; (3) one image viewing and recording systems, it generally includes photographic plate or video screen; (4) one vacuum pumps, it is used to keep microscopical condition of high vacuum degree, makes electronics depart from its moving line to avoid air molecule.
Can be divided into transmission electron microscope, sweep electron microscope, emissive type electron microscope etc. by structure and purposes.Transmission electron microscope (TEM) is usually used in observing those and uses the unresolvable trickle structure of matter of simple microscope, and electronics passes the slice of sample, and forms an image on a video screen or photographic plate; Sweep electron microscope (SEM) is mainly used in the pattern of observing solid surface, also can combine with X-ray diffractometer or electron spectrometer, constitute electron microprobe, be used for the material composition analysis, for example be used to study the three-dimensional structure of various body surfaces, from metal, ceramic to haemocyte, insect bodies etc.; Emissive type electron microscope is used for the research of self-emission electron surface.
Different types of electron microscope all is provided with a control system usually, be used with microscope, be used for being operated by the sample of imaging, yet, control system all aims at certain specific microscope usually and develops, and just is not suitable for TEM as the control system of SEM, even with a kind of microscope but the model difference, control system also can't be general mutually, lacks with dissimilar microscopical interfaces to exchange the dirigibility of using.
For this reason, Chinese invention patent is disclosed to be used for the operating system (CN1662838A) of the sample executable operations studied by microscope and to be used for module operating (CN1662839A) to the sample executable operations of being studied by microscope, is applicable to all kinds of microscopical interfaces and adapts to a plurality of operational modules of each generic operation by setting.Substantially comprise an operating platform, an interface and at least 1 operational module, interface is used for connecting with a microscope, so that the sample that is arranged in the sample chamber is carried out imaging by microscope, operational module is set on the interior operating platform of sample chamber, the sample stage that bears sample is positioned in the middle of the operational module, so that to being arranged in the sample executable operations on the sample stage.Be to realize control, a control system that links up with platform need be set control system so that each operational module according to required mode to the sample executable operations.Control system can comprise any suitable system based on processor---for example individual calculation machine (PC), and it can carry out suitable software, to control carrying out with the joining operational module of platform, as shown in Figure 1.
At present, the input of control system, output order all pass sample chamber and are connected with control circuit on the operating platform through lead, and reserving hole channel is in order to connecting on the sample chamber sidewall, and consequent problem is: 1. the sample chamber domestic demand keeps vacuum state (10
-7Torr), one packoff that can guarantee sample chamber vacuum tightness need be set in the duct that lead interts, and when operational module many more, the input of corresponding each module, output lead are also just many more, this making to packoff causes sizable difficulty, and the vacuum tightness in the sample chamber is one of key factor that influences the microscope imaging quality; 2. position, duct, the quantity reserved on the sample chamber sidewall on different types of electron microscope are inconsistent, when control system and microscope assembling, need the repacking sample chamber, again connect each control circuit, and need to keep the consistance of sample chamber build-in test environment, thereby increased test repeatedly and personalized trouble of reequiping; 3. the space in the sample chamber is limited, size such as 15cm * 15cm * 6cm, in so limited space, control system (comprising each operational module, sample stage etc.) need be set, the limited space that supplies control circuit and input, output order line to insert, so the order line that sample is carried out all kinds of complex operations to be needed inserts and the setting operation module number is all limited, the automation mechanized operation ability drop makes troubles for research, surveying work.
Summary of the invention
The object of the invention provides a kind of control system of micro-nano sample in electronic microscope, adopts this control system to the sample executable operations, need not repacking or test, just can be applicable to all kinds of electron microscopes, and controls simple, convenient.
For achieving the above object, the technical solution used in the present invention is: a kind of control system of micro-nano sample in electronic microscope, comprise an operating platform, be arranged at least one operational module on this platform, the sample stage of carrying sample, and the control device that is connected with each operational module inner control circuit, described control device comprises a sender unit, one signal receiving device and one and the battery component of vacuum environment compatibility, described signal receiving device is arranged on the described operating platform, its signal output part is connected with each described control circuit, a described sender unit and a man-machine exchange control linkage, and transmit control signal to described signal receiving device by wireless transmission medium, described battery component is the power supply of receiving trap and described control circuit, and the receiving trap received signal also drives each operational module through control circuit and carries out corresponding operating.
In the technique scheme, electron microscope generally includes electron gun, image generation system, image viewing and recording system and vacuum pump, and with the control system that microscope is used, be used for being operated by the sample of imaging.Control system comprises operating platform, the sample stage of carrying sample, the interface that connects with microscope, to the operational module and the control device of sample executable operations.Described operational module generally is made of actuating mechanism and end-effector (as probe etc.), be provided with control circuit in each operational module, the output control signal, drive actuating mechanism and actuator complete operation, the signal input part of control circuit is connected with described signal receiving device on being installed on operating platform, this receiving trap receives from the control signal that is positioned at the outer sender unit of sample chamber by wireless transmission medium, and operating personnel instruct to the emitter input operation by the man-machine exchange control unit that is connected with emitter.The battery component of described and vacuum environment compatibility, can be at the battery component of operate as normal under the vacuum environment, because battery component need be installed in the sample chamber of vacuum environment, be operational module and receiving trap power supply, and common batteries (being filled with electrolytic solution in the housing) is under vacuum environment, and housing will be subjected to than Duo an atmospheric pressure in air, very easily causes leakage, thereby need to adopt the battery component that is applicable under the vacuum environment at this place, realize controlled in wireless thus.
In the technique scheme, described battery component is a solid state battery, and its output terminal is connected with the power end of each described control circuit and described signal receiving device.The problem of electrolyte leakage can not take place in no electrolytic solution in the solid state battery under vacuum environment, be the battery component of a class and vacuum environment compatibility.
Another kind of technical scheme is, described battery component is by liquid cell and be wrapped in the outer capsul of battery and form, be filled with air between described liquid cell and capsul, the electrode tip of battery is connected with the power end of each described control circuit and described signal receiving device outside lead leads to capsul.By the parcel of capsul, and be filled with air between capsul and battery, for capsul provides certain support, the pressure that is subjected to of liquid cell in the capsul still is aerial pressure like this, do not increase, can normally use, constitute the battery component of a class and vacuum environment compatibility.
In the technique scheme, described control signal is radiofrequency signal or microwave signal.
Because the technique scheme utilization, the present invention compared with prior art has following advantage:
1. among the present invention signal receiving device is installed on the operating platform that is positioned at sample chamber, by being connected of wireless transmission medium (as the radiofrequency signal) sender unit outer with being positioned at sample chamber, with with the battery component of vacuum environment compatibility power supply as operational module and receiving trap, finish the transmission of control signal (input, output order), and driving operational module executable operations, transmitted with adopt lead in the past, avoid interting of lead and influence the hermetically-sealed construction of sample chamber, keep the vacuum environment in the sample chamber constant, be beneficial to the observation of electron microscope;
2. owing to adopt wireless realization signal transmission, control system all can directly be used under different types of electron microscope, need not sample chamber is reequiped and test repeatedly, avoid influencing vacuum tightness and measuring accuracy;
3. owing to adopt wireless realization signal transmission, make the transmission of control signal not be subjected to the limitation of sample chamber size, directly other operational module of micro/nano level to be controlled, easy operating can be finished comparatively complicated operations, reaches the operation of robotization.
Description of drawings
Fig. 1 is the structured flowchart of background technology of the present invention;
Fig. 2 is the structured flowchart of the embodiment of the invention one;
Fig. 3 is the structural representation of operational module in the embodiment of the invention one;
Fig. 4 is the structured flowchart of the embodiment of the invention two.
Wherein: 1, operating platform; 2, receiving trap; 3, battery component; 4, sample stage; 5, operational module; 6, manipulater.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described:
Embodiment one: extremely shown in Figure 3 referring to Fig. 1, a kind of control system of micro-nano sample in electronic microscope, comprise an operating platform 1, be arranged at 4 operational modules 5 on this platform, the sample stage 4 of carrying sample, and the control device that is connected with each operational module 5 inner control circuit, described control device comprises a sender unit, one signal receiving device 2 and one and the battery component 3 of vacuum environment compatibility, described signal receiving device 2 is arranged on the described operating platform 1, its signal output part is connected with each described control circuit, a described sender unit and a man-machine exchange control linkage, and send radio frequency (RF) signals to described signal receiving device 2 by radiowave, described battery component 3 is a solid state battery, its output terminal is connected with the power end of each described control circuit and described signal receiving device 2, be the power supply of receiving trap 2 and described control circuit, receiving trap 2 received signals also drive each operational module through control circuit and carry out corresponding operating.
As shown in Figure 3, the control system that is installed in the sample chamber has comprised an operating platform 1, and operating platform 1 is provided with 4 operational modules 5, respectively by the terminal manipulater 6 (probe) of actuating mechanism control, the centre of operational module is provided with sample stage 4, is used to carry sample.Be provided with control circuit (message handler) in each operational module 5, input end is connected with receiving trap 2, receiving trap 2 receives the radio-frequency (RF) control signal from the outer emitter emission of sample chamber, and emitter constitutes controlled in wireless by computing machine (central processing unit) control.
Embodiment two: referring to shown in Figure 4, a kind of control system of micro-nano sample in electronic microscope, comprise an operating platform, be arranged at 1 operational module on this platform, the sample stage of carrying sample, and the control device that is connected with the operational module inner control circuit, described control device comprises a sender unit, one signal receiving device and one and the battery component of vacuum environment compatibility, described signal receiving device is arranged on the operating platform, described battery component is by liquid cell and be wrapped in the outer capsul of battery and form, be filled with air between described liquid cell and capsul, the electrode tip of battery is outside lead leads to capsul, be connected with the power end of described receiving trap and described control circuit, be both power supplies, the signal output part of described receiving trap is connected with described control circuit, described sender unit is connected with a man-machine exchange control unit (as personal computer), and with microwave as wireless transmission medium, control signal is sent in the described signal receiving device, drives operational module by described control circuit again and carry out corresponding operating.
Claims (4)
1. the control system of a micro-nano sample in electronic microscope, comprise an operating platform (1), be arranged at least one operational module (5) on this platform, the sample stage (4) of carrying sample, and the control device that is connected with each operational module (5) inner control circuit, it is characterized in that: described control device comprises a sender unit, one signal receiving device (2) and one and the battery component (3) of vacuum environment compatibility, described signal receiving device (2) is arranged on the described operating platform (1), its signal output part is connected with each described control circuit, a described sender unit and a man-machine exchange control linkage, and transmit control signal to described signal receiving device (2) by wireless transmission medium, described battery component (3) is the power supply of receiving trap and described control circuit, and the receiving trap received signal also drives each operational module (5) through control circuit and carries out corresponding operating.
2. control system according to claim 1 is characterized in that: described battery component (3) is a solid state battery, and its output terminal is connected with the power end of each described control circuit and described signal receiving device (2).
3. control system according to claim 1, it is characterized in that: described battery component (3) is by liquid cell and be wrapped in the outer capsul of battery and form, be filled with air between described liquid cell and capsul, the electrode tip of battery is connected with the power end of each described control circuit and described signal receiving device (2) outside lead leads to capsul.
4. control system according to claim 1 is characterized in that: described control signal is radiofrequency signal or microwave signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100200445A CN101251463B (en) | 2008-03-19 | 2008-03-19 | Control system for micro-nano sample in electronic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100200445A CN101251463B (en) | 2008-03-19 | 2008-03-19 | Control system for micro-nano sample in electronic microscope |
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| Publication Number | Publication Date |
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| CN101251463A CN101251463A (en) | 2008-08-27 |
| CN101251463B true CN101251463B (en) | 2011-06-15 |
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| CN2008100200445A Expired - Fee Related CN101251463B (en) | 2008-03-19 | 2008-03-19 | Control system for micro-nano sample in electronic microscope |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101846635B (en) * | 2010-05-07 | 2012-05-23 | 中国科学院半导体研究所 | Ultra-high vacuum multifunctional integrated test system |
| WO2013113760A1 (en) | 2012-01-30 | 2013-08-08 | Leica Microsystems Cms Gmbh | Microscope with wireless radio interface and microscope system |
| CN102903218A (en) * | 2012-10-08 | 2013-01-30 | 彭博 | Microscope remote control system |
| JP6304394B2 (en) * | 2014-10-24 | 2018-04-04 | 株式会社島津製作所 | Scanning probe microscope |
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