CN101251464A - Wireless control system for micro-nano sample in electronic microscope - Google Patents
Wireless control system for micro-nano sample in electronic microscope Download PDFInfo
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- CN101251464A CN101251464A CNA200810020045XA CN200810020045A CN101251464A CN 101251464 A CN101251464 A CN 101251464A CN A200810020045X A CNA200810020045X A CN A200810020045XA CN 200810020045 A CN200810020045 A CN 200810020045A CN 101251464 A CN101251464 A CN 101251464A
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Abstract
The present invention discloses a wireless control system for micro-nano samples under electron microscopes, comprising an operation platform, operation modules, a sample carrier and a control device. The control system is characterized in that: the control device comprises a receiving device, a transmitting device and a central processor; the receiving device comprises a first RF module and a microprocessor, and an output end of the microprocessor is connected with a control circuit; the transmitting device comprises a second RF module and a second microprocessor, and an input end of the microprocessor is connected with the central processor, so as to read control instructions output by the central processor and convert the control instructions into an RF control signal to be transmitted; the RF control signal is transmitted via radio waves and received by the first RF module; the operation modules are driven via induction current generated by inductive-electromagnetic coupling. The transmitting device and the receiving device of the present invention use radio waves as communication medium and use induction electric energy generated via an alternating magnetic field as a driving power source, so as to realize the wireless control on the operation modules in a sample chamber.
Description
Technical field
The present invention relates to a kind of control system that is used for the observation of micro-nano sample, be specifically related to a kind of control system that micro-nano sample is carried out each generic operation of under electron microscope, controlling.
Background technology
Electron microscope is according to electron-optical concept, replace light beam and optical lens with electron beam and electronic lens, make the instrument of fine structure imaging under very high enlargement factor of material, adjacent 2 minimum spacing that its resolution characteristic can be differentiated with it is represented.Hyundai electronics microscope maximum amplification times yield is above 3,000,000 times, and the maximum amplification times yield of optical microscope is about 2000 times (these are the restrictions that is subjected to the wavelength of light of this microscope execution work institute foundation), so just can observe directly the atom lattice of marshalling in the atom of some heavy metal and the crystal by electron microscope.
The hyundai electronics microscope generally comprises: (1) one electron gun, and it is used to produce accelerated electron beam; (2) one image generation systems, this system comprises electrostatic lens and metal diaphragm, metal diaphragm wherein is used for boundary and focused beam, makes electron beam pass the surface of sample or scans on the surface, and form enlarged image; (3) one image viewing and recording systems, it generally includes photographic plate or video screen; (4) one vacuum pumps, it is used to keep microscopical condition of high vacuum degree, makes electronics depart from its moving line to avoid air molecule.
Can be divided into transmission electron microscope, sweep electron microscope, emissive type electron microscope etc. by structure and purposes.Transmission electron microscope (TEM) is usually used in observing those and uses the unresolvable trickle structure of matter of simple microscope, and electronics passes the slice of sample, and forms an image on a video screen or photographic plate; Sweep electron microscope (SEM) is mainly used in the pattern of observing solid surface, also can combine with X-ray diffractometer or electron spectrometer, constitute electron microprobe, be used for the material composition analysis, for example be used to study the three-dimensional structure of various body surfaces, from metal, ceramic to haemocyte, insect bodies etc.; Emissive type electron microscope is used for the research of self-emission electron surface.
Different types of electron microscope all is provided with a control system usually, be used with microscope, be used for being operated by the sample of imaging, yet, control system all aims at certain specific microscope usually and develops, and just is not suitable for TEM as the control system of SEM, even with a kind of microscope but the model difference, control system also can't be general mutually, lacks with dissimilar microscopical interfaces to exchange the dirigibility of using.
For this reason, Chinese invention patent is disclosed to be used for the control system (CN1662838A) of the sample executable operations studied by microscope and to be used for module controls system (CN1662839A) to the sample executable operations of being studied by microscope, is applicable to all kinds of microscopical interfaces and adapts to a plurality of operational modules of each generic operation by setting.Substantially comprise an operating platform, an interface and at least 1 operational module, interface is used for connecting with a microscope, so that the sample that is arranged in the sample chamber is carried out imaging by microscope, operational module is set on the interior operating platform of sample chamber, the sample stage that bears sample is positioned in the middle of the operational module, so that to being arranged in the sample executable operations on the sample stage.Be to realize control, a control system that links up with platform need be set control system so that each operational module according to required mode to the sample executable operations.Control system can comprise any suitable system based on processor---for example individual calculation machine (PC), and it can carry out suitable software, to control carrying out with the joining operational module of platform, as shown in Figure 1.The input of control system, output order all pass sample chamber and are connected with control circuit on the operating platform through lead, and reserving hole channel is in order to connecting on the sample chamber sidewall, and consequent problem is: 1. the sample chamber domestic demand keeps vacuum state (10
-7Torr), one packoff that can guarantee sample chamber vacuum tightness need be set in the duct that lead interts, and when operational module many more, the input of corresponding each module, output lead are also just many more, this making to packoff causes sizable difficulty, and the vacuum tightness in the sample chamber is one of key factor that influences the microscope imaging quality; 2. position, duct, the quantity reserved on the sample chamber sidewall on different types of electron microscope are inconsistent, when control system and microscope assembling, need the repacking sample chamber, again connect each control circuit, and need to keep the consistance of sample chamber build-in test environment, thereby increased test repeatedly and personalized trouble of reequiping; 3. the space in the sample chamber is limited, size such as 15cm * 15cm * 6cm, in so limited space, control system (comprising each operational module, sample stage etc.) need be set, the limited space that supplies control circuit and input, output order line to insert, so the order line that sample is carried out all kinds of complex operations to be needed inserts and the setting operation module number is all limited, the automation mechanized operation ability drop.
For solve the input of above-mentioned signal, the output order line destroys problem to the sample chamber vacuum environment, can be by means of wireless transmission medium, with cooperating of transmitter and receiver, the control operation block motion is avoided wired problem that connects.Yet, again because of being vacuum state in the sample chamber, the power supply of receiver and operational module can't use common batteries (electrolyte battery), electrolyte leakage very easily takes place in common batteries under vacuum state, this is that housing is extruded and breaks because the pressure that battery container is subjected to greater than the pressure that is subjected to, has increased an atmospheric pressure under external atmosphere pressure, the leakage of electrolytic solution will be corroded operational module, damage control system; And if adopt the power supply of the solid state battery of no electrolytic solution as receiver, then need the limited operating platform space of area occupied, when battery contains electric weight decline, if untimely replacing battery, the ability of received signal will be influenced, and the normal operation of operational module, cause detecting error, make troubles for research, surveying work.Thereby power issue is the bottleneck that controlled in wireless is adopted in restriction, needs those skilled in the art to make great efforts improved place.
Summary of the invention
The object of the invention provides a kind of wireless control system of micro-nano sample in electronic microscope, uses this control system, sample is held operation can realize controlled in wireless, is applicable to all kinds of electron microscopes, and controls simple, convenient.
For achieving the above object, the technical solution used in the present invention is: a kind of wireless control system of micro-nano sample in electronic microscope, comprise an operating platform, be arranged at least one operational module on this platform, the sample stage of carrying sample, and the control device that is connected with each operational module inner control circuit, described control device comprises and is arranged at the receiving trap in the sample chamber and is positioned at the outer emitter of sample chamber, central processing unit, described receiving trap comprises a RF module and a first microprocessor, the output terminal of this microprocessor is connected with control circuit, described emitter comprises the 2nd RF module and second microprocessor, the input end of this microprocessor is connected with described central processing unit, read steering order by central processing unit output, and be converted to radio-frequency (RF) control signal emission, through radio wave transmissions, a described RF module receives this radio-frequency (RF) control signal, and the induction current that produces via inductance-electromagnetic coupled drives each operational module operation.
In the technique scheme, described central processing unit is connected with the input end of described second microprocessor through serial line interface or USB interface or wireless channel media.Serial line interface is wired the connection with USB interface, serial line interface such as RS-232, RS-485, RS-422 etc., and the wireless channel media is a wireless connections, as WLAN wireless network etc.
Above, electron microscope generally includes electron gun, image generation system, image viewing and recording system and vacuum pump, and with the control system that microscope is used, be used for being operated by the sample of imaging.Control system comprises operating platform, the sample stage of carrying sample, the interface that connects with microscope and to the operational module of sample executable operations.Described operational module generally is made of microactuator and end effector (as probe etc.).In the technique scheme, the described control circuit (message handler) in the operational module receives the control signal by first microprocessor output in the receiving trap, drives microactuator and actuator and finishes corresponding operating; Described RF module comprises antenna and transceiver, in the RF module in the receiving trap is receiver, and be transmitter in the 2nd RF module in the emitter, realize the transmission of radio-frequency (RF) control signal between the two through antenna utilization radiowave, and operating personnel instruct to the emitter input operation by the central processing unit that is connected with emitter.
Among the present invention, enter the radio-frequency (RF) identification scope of receiving trap when emitter after, the radiowave that emitter sent (radio-frequency (RF) control signal) produces the little electric current of induction to receiving trap, receiving trap just can rely on energy that this induction current obtained as the power supply of self working and driving each operational module, thereby, need not to be provided with power supply (as battery) in the sample chamber, utilize the coupling scheme of inductance-electromagnetism to realize the transmission of signal on the one hand, realize the power supply of receiving trap and operational module on the other hand, thereby finish the transmission of the inside and outside controlled in wireless instruction of sample chamber, do not influence the vacuum tightness in the sample chamber.
Further, the aforesaid operations module can be a MEMS device, comprises actuator and signal processing circuit, and described actuator is connected with described control circuit through signal processing circuit.Described MEMS (MicroElectromechanical System) device is to integrate microsensor, actuator and signal Processing and control circuit, interface circuit, communicate by letter and the microelectromechanical systems of power supply, be prior art, because its driving electric weight that needs is less, the induction current that is produced by alternating magnetic field is enough to drive MEMS device (operational module) operate as normal.
Because the technique scheme utilization, the present invention compared with prior art has following advantage:
1. among the present invention receiving trap is installed on the sample stage that is positioned at sample chamber, the utilization radio wave transmissions media emitter outer with being positioned at sample chamber connects, the radiofrequency signal of emitter emission is finished radio-frequency (RF) control signal (input on the one hand, output order) transmission, utilize induction current that inductance-the electromagnetic coupled mode produces as receiving trap and drive the power supply of operational module on the other hand, thereby avoid in sample chamber, being provided with battery, make wireless transmission become possibility, and electric quantity of power supply produces with alternating magnetic field, need not to consider the replacing problem of battery, guarantee that accuracy of detection is not subjected to the influence of electric quantity change;
2. owing to adopt wireless realization signal transmission, and adopt the lead transmission in the past, avoid interting of lead and influence the hermetically-sealed construction of sample chamber, keep the interior vacuum tightness of sample chamber constant, be beneficial to the observation of electron microscope;
3. owing to adopt wireless realization signal transmission, control system all can directly be used under different types of electron microscope, need not sample chamber is reequiped and test repeatedly, avoid influencing vacuum tightness and measuring accuracy;
4. owing to adopt wireless realization signal transmission, make the transmission of control signal not be subjected to the limitation of sample chamber size, directly other operational module of micro/nano level to be controlled, easy operating can be finished comparatively complicated operations, reaches the operation of robotization.
Description of drawings
Fig. 1 is the structured flowchart of background technology of the present invention;
Fig. 2 is the structured flowchart of the embodiment of the invention one;
Fig. 3 is radio signal transmission in the embodiment of the invention one/energy conversion schematic block diagram;
Fig. 4 is the operating platform arrangement synoptic diagram (control circuit does not draw) of the embodiment of the invention one;
Fig. 5 is the structured flowchart of the embodiment of the invention two.
Wherein: 1, operating platform; 2, receiving trap; 3, sample stage; 4, operational module; 5, manipulater.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described:
Embodiment one: extremely shown in Figure 4 referring to Fig. 1, a kind of wireless control system of micro-nano sample in electronic microscope, comprise an operating platform 1, be arranged at 4 operational modules 4 on this platform, the sample stage 3 of carrying sample, and the control device that is connected with each operational module 4 inner control circuit, described control device comprises and is arranged at the receiving trap 2 in the sample chamber 1 and is positioned at the outer emitter of sample chamber, central processing unit, described receiving trap 2 comprises a RF module and a first microprocessor, the output terminal of this microprocessor is connected with the control circuit of control operation module 4 motions, described emitter comprises the 2nd RF module and second microprocessor, the input end of this microprocessor is through serial line interface RS-232 (or USB interface, the WLAN wireless network) is connected with described central processing unit, read steering order by central processing unit output, and be converted to radio-frequency (RF) control signal emission, through radio wave transmissions, a described RF module receives this radio-frequency (RF) control signal, and the induction current that produces via inductance-electromagnetic coupled drives each operational module.
The RF module comprises antenna and transceiver, in the RF module in the receiving trap is receiver, and be transmitter in the 2nd RF module in the emitter, transmitter utilizes the antenna emitting radio frequency signal, produce alternating magnetic field between the two, the electric wave that transmitter sends produces the little electric current of induction to receiver, and this electric current is as the power supply power of supply receiving trap 2 and operational module 4, utilize electric wave to send its radio-frequency (RF) control signal to receiver again, realize radio communication and operation.
As shown in Figure 4, the control system that is installed in the sample chamber has comprised an operating platform 1, and operating platform 1 is provided with 4 operational modules 4, respectively by the terminal actuator 5 (probe) of microactuator control, the centre of operational module is provided with sample stage 3, is used to carry sample.Control circuit is connected with each operational module 4 respectively, input end is connected with the first microprocessor output terminal, first microprocessor receives by a RF module and receives the radio-frequency (RF) control signal of launching from the outer emitter of sample chamber, and the input end of second microprocessor in the emitter is connected with computing machine (central processing unit) through the RS-232 serial line interface, read steering order by computing machine output, thereby constitute controlled in wireless, finish measurement and research the micro/nano level sample to operational module in the sample chamber 4.
Embodiment two: referring to shown in Figure 5, a kind of wireless control system of micro-nano sample in electronic microscope, comprise an operating platform, be arranged at 1 operational module on this platform, the sample stage of carrying sample, and the control device that is connected with the operational module inner control circuit, described control device comprises and is arranged at the receiving trap in the sample chamber and is positioned at the outer emitter of sample chamber, central processing unit, described receiving trap comprises a RF module and a first microprocessor, the output terminal of this microprocessor is connected with the control circuit of control operation block motion, described emitter comprises the 2nd RF module and second microprocessor, the input end of this microprocessor is connected with described central processing unit through USB interface, read steering order by central processing unit output, and be converted to radio-frequency (RF) control signal emission, through radio wave transmissions, a described RF module receives this radio-frequency (RF) control signal, and drives operational module via the induction current that inductance-electromagnetic coupled produces.
In the present embodiment, single described operational module is a MEMS device, comprise probe actuator and signal processing circuit, described actuator is connected with described control circuit through signal processing circuit, and the induction current that the power supply of this MEMS device is produced by receiving trap and emitter is to drive electric energy.
Claims (3)
1. the wireless control system of a micro-nano sample in electronic microscope, comprise an operating platform (1), be arranged at least one operational module (4) on this platform, the sample stage (3) of carrying sample, and the control device that is connected with each operational module (4) inner control circuit, it is characterized in that: described control device comprises and is arranged at the receiving trap (2) in the sample chamber and is positioned at the outer emitter of sample chamber, central processing unit, described receiving trap (2) comprises a RF module and a first microprocessor, the output terminal of this microprocessor is connected with control circuit, described emitter comprises the 2nd RF module and second microprocessor, the input end of this microprocessor is connected with described central processing unit, read steering order by central processing unit output, and be converted to radio-frequency (RF) control signal emission, through radio wave transmissions, a described RF module receives this radio-frequency (RF) control signal, and the induction current that produces via inductance-electromagnetic coupled drives each operational module operation.
2. wireless control system according to claim 1 is characterized in that: described central processing unit is connected with the input end of described second microprocessor through serial line interface or USB interface or wireless channel media.
3. wireless control system according to claim 1 is characterized in that: described operational module (4) is a MEMS device, comprises actuator and signal processing circuit, and described actuator is connected with described control circuit through signal processing circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200810020045XA CN101251464A (en) | 2008-03-19 | 2008-03-19 | Wireless control system for micro-nano sample in electronic microscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CNA200810020045XA CN101251464A (en) | 2008-03-19 | 2008-03-19 | Wireless control system for micro-nano sample in electronic microscope |
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| CNA200810020045XA Pending CN101251464A (en) | 2008-03-19 | 2008-03-19 | Wireless control system for micro-nano sample in electronic microscope |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2016063407A1 (en) * | 2014-10-24 | 2017-06-01 | 株式会社島津製作所 | Scanning probe microscope |
| CN108550514A (en) * | 2018-03-23 | 2018-09-18 | 中山大学 | A kind of separating portable small scanning electron microscope |
| CN109873740A (en) * | 2019-03-28 | 2019-06-11 | 北京科技大学 | A kind of mechanical swing radar data communication system |
| CN110032653A (en) * | 2019-03-20 | 2019-07-19 | 成都理工大学 | One kind is about ground metalliferous mineral visual m odeling technique system |
| NL2020694B1 (en) * | 2018-03-30 | 2019-10-07 | Hennyz B V | Analysis equipment with wireless connection |
-
2008
- 2008-03-19 CN CNA200810020045XA patent/CN101251464A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2016063407A1 (en) * | 2014-10-24 | 2017-06-01 | 株式会社島津製作所 | Scanning probe microscope |
| CN108550514A (en) * | 2018-03-23 | 2018-09-18 | 中山大学 | A kind of separating portable small scanning electron microscope |
| NL2020694B1 (en) * | 2018-03-30 | 2019-10-07 | Hennyz B V | Analysis equipment with wireless connection |
| CN110032653A (en) * | 2019-03-20 | 2019-07-19 | 成都理工大学 | One kind is about ground metalliferous mineral visual m odeling technique system |
| CN109873740A (en) * | 2019-03-28 | 2019-06-11 | 北京科技大学 | A kind of mechanical swing radar data communication system |
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Application publication date: 20080827 |