NL2020694B1 - Analysis equipment with wireless connection - Google Patents
Analysis equipment with wireless connection Download PDFInfo
- Publication number
- NL2020694B1 NL2020694B1 NL2020694A NL2020694A NL2020694B1 NL 2020694 B1 NL2020694 B1 NL 2020694B1 NL 2020694 A NL2020694 A NL 2020694A NL 2020694 A NL2020694 A NL 2020694A NL 2020694 B1 NL2020694 B1 NL 2020694B1
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- NL
- Netherlands
- Prior art keywords
- sample
- sample box
- analysis device
- box comprises
- analysis equipment
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/204—Means for introducing and/or outputting objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/206—Modifying objects while observing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
Abstract
The present invention is in the field of physical, biological, and/or chemical analysis in shielded environments with a wireless connection and a sample box designed for wireless connection and for analysing samples in particular with in-situ changes generated by external stimuli, and a sample box as well as a method of analysing a sample with said equipment and transferring said analysis information to the outside world. The shielded environment acts as a Faraday cage.
Description
FIELD OF THE INVENTION
The present invention is in the field of physical, biological, and/or chemical analysis in shielded environments with a wireless connection and a sample box designed for wireless connection and for analysing samples in particular with in-situ changes generated by external stimuli, and a sample box as well as a method of analysing a sample with said equipment and transferring said analysis information to the outside world. The shielded environment acts as a Faraday cage.
BACKGROUND OF THE INVENTION
The present invention is in the field of sample analysis, such as by using microscopy, specifically in the field of electron and ion beam microscopy (EM and IB), and in particular Scanning Electron Microscopy (SEM). However its application is extendable in principle to any field of microscopy and analysis, especially wherein the beam used for analysis requires a certain environment such as a vacuum, or a specimen (or sample) has to be protected from air or a user from harmful radiation.
Microscopy is a technique often used in scientific research. It is widely used in materials sciences and life sciences to obtain information in the 0.1 nm to 1 pm resolution domain. In microscopy typically a source is used to obtain an image. The source may be light, electrons, or ions. Under optimal conditions a modern microscope can image a sample with a spot size typically in the order of a few tenth of nanometers for a TEM, a nanometer for a Focused Ion Beam (FIB) and Scanning (S)EM, and a few hundred nanometers for an optical microscope.
In order to form images of the sample at a location of choice thereof (the sample typically is much larger than an image being formed) and/or at a different orientation, such as under an acute angle, a manipulation device, such as a goniometer, is typically provided in the microscope.
Electron and ion beam microscopes are typically optimized for use at ambient temperature. The microscope and elements of the microscope are therefore preferably substantially at a same temperature. With e.g. an electron microscope a resolution of about 0.1 nm can then be achieved. A sample is typically placed into a holder that -once the sample is placed- is inserted in the microscope. Typically an image is formed in one millisecond to about a second. Chemical and spectroscopic information can be obtained with a focused beam from a point or a series of points, whereby the data recording time typically depends on an intensity of the beam, a spot-size thereof, an accuracy required. It can range from several ms to a minute per point.
In many detailed analyse study tool, such as a Scanning Electron Microscopy, a specimen is placed in a vacuum because the analysis tool makes use of beams that require a vacuum. To realise a good vacuum in general a metal box is used around the actual analysis area where the beam-specimen interaction takes place. In part, this box is also used to shield of stray fields from the analysis area and to prevent that harmful irradiation (such as X-rays, β-rays, and γ-rays) is escaping, but a primary purpose is to realise a high vacuum.
In many analyses one may need to rotate and translate the specimen with respect to the beam. Thereto one mostly uses a specimen stage that allows for translations into three directions and rotations around two, with respect to one and another, preferably perpendicular directions. As such the specimen has a high degree of movability. An example is a Scanning Electron Microscope with a specimen stage that allows for very precise x,y,z shifts and rotations over two axes.
In general one may prefer to have a very stable position of the specimen with very low specimen drifts and small vibrations. Such allows for high resolution imaging that is only limited by the image performance of the analysis equipment. This does however put stringent requirements on the stability of the specimen stage. The manufacturers of this analysis equipment try to optimize for a high mechanical stability while keeping the system still easy to operate.
In case a user of such analysis equipment wants to measure the effect of certain changes on physical properties one observes during the analysis or one wants to add certain stimuli to the specimen, such as heating or an electric current, one needs to connect in some way the specimen to control or analysis hardware that is located outside of the sample area. Vacuum compatible feedthroughs are easy to realise, but the specimen stages with their five degrees of freedom are typically not provided with further elements, such as electrical connections to the specimen area. Important is in this respect also that one would like to have no restrictions in the use of the analysis equipment for standard experiments due to changes made to allow for the stimuli-addition experiments. This is in particularly the case for add-on configurations that are not provided by the company that sells the analysis equipment. Certainly the application of e.g. mechanical connections to the specimen stage can lead to a loss of the guarantee of the manufacturer of the analysis equipment, which is therefore not advisable.
The present invention therefore relates to an analysis equipment and sample box, which solve one or more of the above problems and drawbacks of the prior art, providing reliable results, without jeopardizing functionality and advantages.
SUMMARY OF THE INVENTION
The present invention relates to an analysis equipment comprising a chamber 001 for analysing samples, wherein the chamber creates a shielded environment, such as a high vacuum environment, and acts as a Faraday cage to shield electromagnetic interference from the outside of the chamber, and wherein the chamber contains an x,y,z stage 101 for receiving a sample box 201, the sample box 201 (see below) and integrated in the chamber a second wireless transceiver 003. The chamber typically also acts as a shield to prevent that harmful radiation, such as X rays, β-rays, and γ-rays, escapes to escape from the chamber. As the chamber is at least partly made of an electrically conducting metal, the chamber acts as a Faraday cage preventing electro-magnetic radiation from entering, which is an advantage when making images, and from exiting, which prevents wireless communication with transceivers located inside the chamber. In view thereof, in principle electrical wires may be provided towards e.g. the stage and sample box. It has been found that a connection with electrical wires can limit the freedom to move of the specimen stage and/or lead to a mechanical coupling that can result in the transfer of mechanical vibrations from the wall of the analysis equipment to the specimen, resulting in resolution loss. Therefore the sample box comprises a first wireless transceiver 205, and preferably a power source 203 for providing power to the transceiver 205, wherein the sample box is adapted to receive a sample 204, and the first and second wireless transceiver capable of communicating with one and another, the second transceiver connected to feed through 002.
Therewith a secure communication between the sample box and the outside world is provided, and in fact the functionality of the stage may even be improved.
In the invention a wireless connection between the sample or specimen box and for instance a control box outside of the analysis equipment by means of a sender/receiver (transceiver) on an electrical feedthrough in the wall of the equipment and a sender/receiver on a specimen box that is positioned on the specimen stage is provided. The specimen box in use is provided with a power source, such as a battery, preferably a solid state battery. Considering that the specimen box is in a vacuum and a battery typically cannot be used in said vacuum, the specimen box is provided with an enclosure 206 that is vacuum tight and in which atmospheric pressure can be maintained while the specimen box is in the vacuum. In order to minimize thermal load on and thermal expansion of the specimen box by the wireless communication, the communication can be regulated, such as that communication occurs in a small fraction of time. Also the wireless interconnection protocol may be reduced to a minimum for simple data transmission. A small thermal load due to all control and data acquisition on the specimen box is preferred to minimize the temperature related specimen drift.
The present analysis equipment provides use of wireless communication inside a Faraday cage to allow data transfer for control and read out of experiments without any wire connections between a specimen box and the wall of the Faraday cage, and the use of e.g. a battery as power source in the specimen box, and optionally an internal logic circuit for storage of commands and of measured data.
A sender/receiver 003 on the wall may be relatively large and the one on the specimen box 205 may be relatively small, in order to minimize the energy dissipation to the specimen box and the power required for sending date from the specimen box. Transceiver 003 may be 2-10 times larger than transceiver 205.
Thereby the present invention provides a solution to one or more of the above mentioned problems and drawbacks.
Advantages of the present description are detailed throughout the description.
DETAILED DESCRIPTION OF THE INVENTION
The present invention relates in a first aspect to an analysis equipment according to claim 1.
In an exemplary embodiment the present analysis equipment may be selected from selected from a TEM, a SEM, an optical microscope, Energy-dispersive X-ray spectroscope (EDX), a Secondary-ion mass spectrometer (SIMS), a Helium Ion Microscope (HIM), a FIB, and combinations thereof. These equipment typically are used to form images of a sample, directly or indirectly, or to perform chemical or spectroscopic analysis at a set of chosen positions .
In an exemplary embodiment of the present analysis equipment the sample box may comprise an isolator on a top surface thereof, and wherein the wireless transceiver is on top of the isolator. Such prevents electro-magnetic coupling of a transmitter signal to metal of the sample box.
In an exemplary embodiment of the present analysis equipment the transceiver may be circular shaped. The present transceiver is preferably wireless.
In an exemplary embodiment of the present analysis equipment the sample box may comprise a logic circuit 203. The logic circuit typically may comprise a data storage, such as a memory, software for performing various functions, such as embedded software, and electronics. The logic circuit preferably also may have a data transfer regulator, which limits periods of data transfer, stores obtained information in the data storage, retrieves data from the data storage before sending, and shuts off the circuit if no actions need to be performed. The logic circuit may perform a number of tasks, such as increasing a current, typically gradually increasing a current, make changes in tasks, adapts settings in view of data obtained or reacts thereon, etc.
In an exemplary embodiment of the present analysis equipment the sample box may comprise a sample storage chamber 211. Such a chamber provides a vacuum transfer of samples.
In an exemplary embodiment of the present analysis equipment the sample box may comprise a power source chamber 206, which is vacuum tight and in which atmospheric pressure can be maintained while the specimen box is in the vacuum.
In an exemplary embodiment of the present analysis equipment the sample box may comprise a closure 212, such as a lid. In case the specimen box contains a lid as vacuum seal for the transport of air sensitive specimens from and/or to the analysis equipment, one can apart from the movement of the lid also realize a lift of the specimen table such that the specimen is above the top surface of the specimen box. This facilitates the easy approach of specific components of the analysis equipment such as a micromanipulator or the outlet of a gas supply system. In addition an airtight closure may be provided.
In an exemplary embodiment of the present analysis equipment the sample box may comprise a motor 216 for moving the closure from an open status to a closed status, and vice versa.
In an exemplary embodiment of the present analysis equipment the sample box may comprise a lifting device 214 for lifting at least one sample. For instance, in case the sample box is a vacuum transfer box, the box may contain a mechanism that apart from opening an air tight seal, may also lift the specimen up and even above the surface of the box and which may be retracted before the seal is placed in a vacuum tight sealing position.
In an exemplary embodiment of the present analysis equipment the sample box may comprise a controller for controlling the motor .
In an exemplary embodiment of the present analysis equipment the sample box may comprise at least one valve 221.
In an exemplary embodiment of the present analysis equipment the sample box may comprise a switch 231 for activating the logic circuit, whereby the switch is controlled by the beam used by the analysis equipment, such as the electron beam or the focused ion beam. The switch may be operated by the electron or ion beam for starting a certain process (from sleep mode), or stopping a process.
In an exemplary embodiment of the present analysis equipment the sample box may comprise a contact 232 for providing electrical energy, such as to recharge a battery. It is considered that the battery may be at about 100 kPa (1 bar) inside a vacuum tight part of the box to allow that the specimen box may be in a vacuum environment for the experiments, and that the battery can under such circumstances be recharged while it is maintained in this vacuum tight part.
In an exemplary embodiment of the present analysis equipment the logic circuit may comprise a storage and software. Therewith amongst others experimentation may be supported.
In an exemplary embodiment of the present analysis equipment the sample box may comprise at least one sensor. For instance, pressure can be measured with a MENS like pressure meter, such as in the ~ 100 kPa (1 bar) range for the battery area and 11000 mPa for the specimen area in case of vacuum transfer.
In an exemplary embodiment of the present analysis equipment the sample box may comprise experimental controls, such as electrical lines, such as for in-situ experimenting. The lines may be connected to a sample, for instance.
In an exemplary embodiment of the present analysis equipment the sample box may have at least one of a width of 5-15 cm, a height of 10-40 mm, a length of 5-15 cm, a metal housing, 1-10 sample holders, and a multi sample receiver.
In an exemplary embodiment of the present analysis equipment the sample box may comprise an identifier.
In a second aspect the present invention relates to a sample box for use in a analysis equipment, comprising a first wireless transceiver 205, and preferably a power source 203 for providing power to the transceiver 205, wherein the sample box is adapted to receive a sample 204. In addition thereto one or more further elements, such as those mentioned above or in the figure description, may form part of the present sample box.
In a third aspect the present invention relates to a method of analyzing a sample, such as by obtaining an image, comprising providing an analysis equipment according to the invention, bringing a sample under vacuum, introducing the sample into the analysis equipment, analyzing the sample, and optionally recognizing the sample holder and to take out a sample from the analysis equipment under vacuum, for instance to a glovebox or another analysis equipment.
In an exemplary embodiment of the present method data may be stored, and transmitted intermittently, such as during 1-2 sec. Therewith heat generation is minimized and dissipation towards the sample as well.
The one or more of the above examples and embodiments may be combined, falling within the scope of the invention.
EXAMPLES
Exemplary workflow for transfer
Load a sample on sample stub 215 of the sample box.
Lower the sample stub in the sample storage chamber 211.
Close the lid 201.
Pump the sample storage chamber 211 through the valve 212. Remove the sample box from the glove box and place it in the analysis equipment.
Evacuate the specimen area in the analysis equipment.
Open the lid 201.
Lift the sample stub 215.
After analysis is completed, lower the sample cup and close the lid.
Vent the specimen area of the analysis equipment.
Transport the sample box to the glove box or another analysis equipment.
Exemplary workflow for electrical in-situ measurements with a MEMS device
Place a sample on a MEMS device.
Place the MEMS device on the sample box.
Place the sample box in the analysis equipment. Evacuate the specimen area in the analysis equipment.
Start the in-situ experiment, which is controlled by a control system outside of the analysis equipment by wireless communication, whereby part of the control and data storage is done by the logic circuit of the sample box.
The invention is further detailed by the accompanying figures, which are exemplary and explanatory of nature and are not limiting the scope of the invention. To the person skilled in the art it may be clear that many variants, being obvious or not, may be conceivable falling within the scope of protection, defined by the present claims.
FIGURES
The invention although described in detailed explanatory context may be best understood in conjunction with the accompanying figures .
Figs. 1-4 show exemplary details of the present analysis equipment and sample box.
DETAILED DESCRIPTION OF THE FIGURES
List of elements:
100 microscope
001 microscope chamber
002 feed through connector
003 Transmitter
101 x,y,z stage
201 sample box
202 logic circuit
203 power source
204 sample
205 first wireless transceiver
206 vacuum tight area for a battery
208 isolator
211 sample storage chamber
212 closure
214 sample lifting device
215 Sample stub
216 motor
217 belt to drive the lifting device
221 valve
231 switch
232 contact
312 rotatable lid
313 hole in the rotatable lid
314 0 ring
315 Sample area
Figure 1. Schematic representation of the analysis equipment 001 with a vacuum tight feedthrough 002, on which an antenna 003 is mounted, a specimen stage 101, which will allow free translation and rotation of the specimen 204. The specimen 204 is on top of a sample box 201, which contains is a vacuum tight volume 206, a battery 203 and a logic circuit 202. Communication to the antenna 003 is provided by an antenna 205 on the sample box.
Figure 2. Schematic representation of the top of the sample box 201, with an antenna 205 on top of an isolator 208 and a sample 204.
Figures 3a-b. Schematic representation of a sample box with a lid 212 that allows closing of a sample storage chamber 211 of the sample box, where the lid is moved from an open to closed position with a motor 212. The samples 215 can be moved from the position inside the storage chamber 211 to a position above the surface of the sample box, using a lifting device 214. The motor 216 is controlled from outside the analysis equipment and obtains its power from the battery inside a vacuum tight part 206 of the sample box. The sample storage chamber 211 can be pumped through a valve 221 to allow pumping of the sample chamber 211 when the sample box is in a glove box. The battery can be recharged using the contact 232. The activation of the logical circuit can be triggered by placing a beam of charged particles such as electrons or ions on the detector 231.
Figures 4a-b. Schematic representation of a sample box 201 with a lid 312 with a hole 313 in it. The hole can be placed over the sample area 315, and with a lifting construction the sample can be brought above the lid 312. In case the hole is placed to the side as in Figure 4b a vacuum tight closure is obtained with the 0 ring 314. The rotation of the lid can be realized with a motor as in Figure 3.
The following is a translation into English of the last section, intended to support searching of the present invention.
1. Analysis equipment (100) comprising a chamber (001) for for analysing samples, wherein the chamber is capable of creating a shielded environment for the sample and acts as a Faraday cage, in the chamber, an x,y,z stage (101) for receiving a sample box (201), the sample box (201) comprising a first wireless transceiver (205), and preferably a power source (203) for providing power to the transceiver (205), wherein the sample box is adapted to receive a sample (204), and integrated in the chamber a second wireless transceiver (003), the first and second wireless transceiver capable of communicating with one and another, the second transceiver connected to feed through (002).
2. Analysis equipment according to embodiment 1, wherein the analysis equipment is selected from selected from a TEN, a SEM, an optical microscope, an Energy-dispersive X-ray spectroscope (EDX), a Secondary-ion mass spectrometer (SIMS), a Helium Ion Microscope (HIM), a Focused Ion Beam microscope (FIB), and combinations thereof.
3. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises an isolator on a top surface thereof, and wherein the wireless transceiver is on top of the isolator.
4. Analysis equipment according to embodiment 4, wherein the transceiver (205) is circular shaped.
5. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises a logic circuit (202) .
6. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises a power source chamber (203) .
7. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises a sample storage chamber (211).
8. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises a vacuum closure (212) .
9. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises a motor (216) for moving the closure from an open status to a closed status, and vice versa.
10. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises a lifting device (214) for lifting at least one sample.
11. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises a controller.
12. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises at least one valve (221) .
13. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises a switch (231).
14. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises a contact (232), such as for providing electrical energy.
15. Analysis equipment according to any of the preceding embodiments, wherein the logic circuit comprises a storage and software.
16. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises at least one sensor.
17. Analysis equipment according to any of the preceding embodiments, wherein the sample box comprises experimental controls, such as electrical lines.
18. Analysis equipment according to any of the preceding embodiments, wherein the sample box has at least one of a width of
5-15 cm, a height of 10-40 mm, a length of 5-15 cm, a metal housing, 1-10 sample holders, a multi sample receiver, such as a carousel· or a cartridge, and a sample loader.
19. Analysis equipment according to any of the preceding em- bodiments, wherein the sample box comprises an identifier.
20. Sample box for use in an analysis equipment, comprising a first wireless transceiver (205), and optionally a power source (203) for providing power to the transceiver (205), wherein the sample box is adapted to receive a sample (204).
21. Method of analyzing a sample, comprising providing an analysis equipment according to any of embodiments 1-14, bringing a sample under vacuum, introducing the sample into the analysis equipment, analyzing the sample, and optionally recognizing the sample holder.
22. Method according to embodiment 21, wherein data is stored, and transmitted intermittently, such as during 1-2 sec.
Claims (22)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2020694A NL2020694B1 (en) | 2018-03-30 | 2018-03-30 | Analysis equipment with wireless connection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2020694A NL2020694B1 (en) | 2018-03-30 | 2018-03-30 | Analysis equipment with wireless connection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL2020694B1 true NL2020694B1 (en) | 2019-10-07 |
Family
ID=62167869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL2020694A NL2020694B1 (en) | 2018-03-30 | 2018-03-30 | Analysis equipment with wireless connection |
Country Status (1)
| Country | Link |
|---|---|
| NL (1) | NL2020694B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11796492B2 (en) | 2020-12-24 | 2023-10-24 | Inel S.A.S. | Apparatuses and methods for combined simultaneous analyses of materials |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3179846B2 (en) * | 1992-03-19 | 2001-06-25 | 株式会社日立製作所 | Intelligent sample holder and charged beam device using the same |
| CN2924811Y (en) * | 2006-03-02 | 2007-07-18 | 汉达精密电子(昆山)有限公司 | Printed circuit board antenna |
| CN101251464A (en) * | 2008-03-19 | 2008-08-27 | 苏州特尔纳米技术有限公司 | Wireless control system for micro-nano sample in electronic microscope |
| US20140085152A1 (en) * | 2012-09-24 | 2014-03-27 | Oticon A/S | Stationary communication device comprising an antenna |
| US20150255244A1 (en) * | 2012-10-29 | 2015-09-10 | Hitachi High-Technologies Corporation | Sample Storage Container, Charged Particle Beam Apparatus, and Image Acquiring Method |
-
2018
- 2018-03-30 NL NL2020694A patent/NL2020694B1/en not_active IP Right Cessation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3179846B2 (en) * | 1992-03-19 | 2001-06-25 | 株式会社日立製作所 | Intelligent sample holder and charged beam device using the same |
| CN2924811Y (en) * | 2006-03-02 | 2007-07-18 | 汉达精密电子(昆山)有限公司 | Printed circuit board antenna |
| CN101251464A (en) * | 2008-03-19 | 2008-08-27 | 苏州特尔纳米技术有限公司 | Wireless control system for micro-nano sample in electronic microscope |
| US20140085152A1 (en) * | 2012-09-24 | 2014-03-27 | Oticon A/S | Stationary communication device comprising an antenna |
| US20150255244A1 (en) * | 2012-10-29 | 2015-09-10 | Hitachi High-Technologies Corporation | Sample Storage Container, Charged Particle Beam Apparatus, and Image Acquiring Method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11796492B2 (en) | 2020-12-24 | 2023-10-24 | Inel S.A.S. | Apparatuses and methods for combined simultaneous analyses of materials |
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| MM | Lapsed because of non-payment of the annual fee |
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