CN216161686U - Electron microscope - Google Patents
Electron microscope Download PDFInfo
- Publication number
- CN216161686U CN216161686U CN202122127340.9U CN202122127340U CN216161686U CN 216161686 U CN216161686 U CN 216161686U CN 202122127340 U CN202122127340 U CN 202122127340U CN 216161686 U CN216161686 U CN 216161686U
- Authority
- CN
- China
- Prior art keywords
- voltage
- optical fiber
- power supply
- detection unit
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2441—Semiconductor detectors, e.g. diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
The utility model discloses an electron microscope, comprising: the sample table is used for placing a sample to be detected; the electron optical lens cone is used for emitting electron beams and converging the electron beams on the sample to be measured; the high-voltage detection unit is used for receiving signal electrons generated by the action of the electron beams on the sample to be detected and outputting voltage signals; and the high-voltage power supply unit is electrically connected with the high-voltage detection unit and controls the high-voltage detection unit to reach a preset level. The high-voltage power supply unit supplies power to the high-voltage detection unit, the high-voltage detection unit works under a preset level, the speed of signal electrons can be increased, the energy of the signal electrons is improved, more high-energy signal electrons are received by the high-voltage detection unit, and the imaging speed and the imaging quality of an electron microscope can be improved.
Description
Technical Field
The utility model belongs to the technical field of microscopes, and particularly relates to an electron microscope.
Background
In the prior art, an electron microscope is a commonly used microscopic analyzer, and generally, an electron beam is converged on a sample to be measured through an objective lens of the electron microscope to generate a micro beam spot, and the electron beam acts on the sample to be measured in the micro area to generate signal electrons such as Secondary Electrons (SE), backscattered electrons (BSE) and the like, so that the appearance of the surface of the sample to be measured can be observed through a detector and the components of the material can be analyzed.
Along with the continuous development of scientific technology, an electron microscope is also continuously improved, in order to simplify the structure and optimize an operation system, a sample stage of the existing partial electron microscope adopts a grounding mode, namely, the voltage value of the sample stage is zero, so that a sample to be detected is not electrified, and the voltage value of the sample to be detected is zero. And a photoelectric detector is adopted to receive signal electrons generated by the action of the electron beam on the sample to be measured.
However, although the electron microscope with the above structure can observe an uncharged sample to be measured, the imaging speed of the electron microscope is slow. Therefore, the problem of the imaging speed of the electron microscope under the condition that the sample to be detected is uncharged is urgently to be solved.
The present invention has been made in view of this situation.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, and to provide an electron microscope, wherein a high voltage detection unit operates at a preset level, so that the speed of signal electrons can be increased, the energy of the signal electrons can be increased, more high energy signal electrons are received by the high voltage detection unit, and the imaging speed and the imaging quality of the electron microscope can be improved.
In order to solve the technical problems, the utility model adopts the technical scheme that:
an electron microscope, comprising:
the sample table is used for placing a sample to be detected;
the electron optical lens cone is used for emitting electron beams and converging the electron beams on the sample to be measured;
the high-voltage detection unit is used for receiving signal electrons generated by the action of the electron beams on the sample to be detected and outputting voltage signals;
and the high-voltage power supply unit is electrically connected with the high-voltage detection unit and controls the high-voltage detection unit to reach a preset level.
Furthermore, the high-voltage detection unit comprises a semiconductor detector, a preamplifier and an optical fiber emitter which are sequentially connected by electric signals;
the high-voltage power transmission support is electrically connected with the high-voltage power supply unit;
the semiconductor detector, the preamplifier, the optical fiber emitter and the driving power supply module are all electrically connected with the high-voltage transmission support.
Further, the method also comprises the following steps:
and the low-voltage power supply unit is electrically connected with the driving power supply module, the driving power supply module is electrically connected with the optical fiber emitter, the driving power supply module is electrically connected with the preamplifier, and the preamplifier is electrically connected with the semiconductor detector.
Furthermore, the high-voltage electricity transmission support is a rectangular frame with a cross beam, the preamplifier is connected to the upper surface of the rectangular frame through a conductive screw, the optical fiber emitter is connected to the upper surface of the rectangular frame through a conductive screw, the driving power supply module comprises a high-voltage unit and a low-voltage unit, the high-voltage unit is connected to the lower surface of the rectangular frame through a conductive screw and a conductive column with a threaded hole in a matched mode, and the low-voltage unit is connected to the lower surface of the rectangular frame through an insulating column.
Furthermore, the high-voltage detection unit further comprises a support frame, the support frame is connected to the upper surface of the rectangular frame through a conductive screw, and the semiconductor detector is connected to the support frame through a conductive screw.
In some optional embodiments, the high voltage detection unit further includes an insulating bottom plate, one end of the insulating bottom plate is connected to the lower surface of the rectangular frame through an insulating column, and the other end of the insulating bottom plate is connected to the lower surface of the driving power supply module through an insulating column.
Furthermore, the high-voltage detection unit further comprises a first shielding box, and the semiconductor detector, the preamplifier, the optical fiber emitter, the driving power supply module, the high-voltage electricity transmission support and the insulating bottom plate are all arranged in the first shielding box;
the first shielding box comprises a first shell, a second shell, a front end cover and a rear end cover, wherein the front end cover is provided with an opening for signal electrons to enter, the inner side of the opening corresponds to the semiconductor detector, the outer side of the opening corresponds to the screen, and the screen is connected with the outer side wall of the front end cover.
Further, the high-voltage electricity transmission support is provided with a high-voltage wiring terminal, the low-voltage unit is provided with a low-voltage wiring terminal, and the optical fiber emitter is provided with an optical fiber emitting wiring terminal;
the rear end cover is provided with:
the first through hole corresponds to the position of the high-voltage wiring terminal;
the second through hole corresponds to the position of the low-voltage wiring terminal;
and the third through hole corresponds to the position of the optical fiber transmitting terminal.
In some optional embodiments, the high voltage detection unit further comprises:
the optical fiber receiver is connected with the optical fiber transmitter by optical signals;
and the optical fiber receiver is arranged in the second shielding box.
Further, the method also comprises the following steps:
a main amplifier electrically connected to the fiber optic receiver;
a processor communicatively coupled to the main amplifier.
After the technical scheme is adopted, compared with the prior art, the utility model has the following beneficial effects.
The high-voltage power supply unit supplies power to the high-voltage detection unit, the high-voltage detection unit works under a preset level, the speed of signal electrons can be increased, the energy of the signal electrons is improved, more high-energy signal electrons are received by the high-voltage detection unit, and the imaging speed and the imaging quality of an electron microscope can be improved.
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model, are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model without limiting the utility model to the right. It is obvious that the drawings in the following description are only some embodiments, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. In the drawings:
FIG. 1 is a schematic structural diagram of an electron microscope provided by the present invention;
FIG. 2 is a schematic structural diagram of a high voltage detection unit provided by the present invention;
fig. 3 is an exploded view of the high voltage detection unit provided by the present invention.
In the figure: 1. an electron optical lens barrel; 101. an electron source; 102. an objective lens system; 103. a deflection device; 2. an electron beam; 3. secondary electrons; 4. a sample to be tested; 5. a sample stage; 6. screening a screen; 7. a front end cover; 8. a rear end cap; 9. a first housing; 10. a second housing; 11. a semiconductor detector; 12. a support frame; 13. a high voltage electricity transmission bracket; 14. a preamplifier; 15. an optical fiber transmitter; 16. an optical fiber emission connection terminal; 17. a high-voltage wiring terminal; 18. a first shield case; 19. an optical fiber receiving terminal; 20. an integrated terminal; 21. a fiber optic receiver; 22. a low-voltage wiring terminal; 23. a second shield case; 24. a driving power supply module; 241. a low-voltage unit; 242. a high voltage unit; 25. an insulating base plate; 26. an insulating column; 27. and a conductive post.
It should be noted that the drawings and the description are not intended to limit the scope of the inventive concept in any way, but to illustrate it by a person skilled in the art with reference to specific embodiments.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and the following embodiments are used for illustrating the present invention and are not intended to limit the scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1 to 3, the present invention provides an electron microscope including: the device comprises a sample stage 5, an electron optical lens barrel 1, a high-voltage detection unit and a high-voltage power supply unit.
The sample table 5 is used for placing a sample 4 to be detected, the electron optical lens barrel 1 is used for emitting the electron beam 2 and converging the electron beam 2 on the sample 4 to be detected, the high-voltage detection unit receives signal electrons generated by the action of the electron beam 2 on the sample 4 to be detected and outputs a voltage signal, the high-voltage power supply unit is electrically connected with the high-voltage detection unit, and the high-voltage detection unit is controlled to reach a preset level.
The sample stage 5 of the electron microscope adopts a grounding mode, namely, the voltage value of the sample stage 5 is zero, the sample 4 to be measured is placed on the sample stage 5, and further, the sample 4 to be measured is not electrified, namely, the voltage value of the sample 4 to be measured is zero. The electron optical lens barrel 1 emits an electron beam 2, the electron beam 2 is converged on a sample 4 to be detected, the converged electron beam 2 acts on the sample 4 to be detected to generate signal electrons, the high-voltage power supply unit is electrically connected with the high-voltage detection unit, the high-voltage power supply unit can control the high-voltage detection unit to reach a preset level, the high-voltage detection unit works under the preset level, and can receive the signal electrons generated when the electron beam 2 acts on the sample 4 to be detected and output a voltage signal. The high-voltage detection unit is powered by the high-voltage power supply unit and works under a preset level, so that the speed of signal electrons can be increased, the energy of the signal electrons is improved, more high-energy signal electrons are received by the high-voltage detection unit, and the imaging speed and the imaging quality of an electron microscope can be improved.
Further, the high voltage detection unit comprises a semiconductor detector 11, a preamplifier 14 and a fiber optic transmitter 15 which are connected in sequence through electric signals. The electron microscope provided by the utility model also comprises a high-voltage electricity transmission bracket 13 and a driving power supply module 24 which are electrically connected with the high-voltage power supply unit.
Specifically, the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15 and the driving power supply module 24 are all electrically connected with the high-voltage transmission bracket 13. The high-voltage power supply unit can provide high voltage power, the high-voltage power supply unit is electrically connected with the high-voltage power transmission support 13, the high-voltage power transmission support 13 is respectively electrically connected with the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15 and the driving power module 24, the high voltage power provided by the high-voltage power supply unit passes through the high-voltage power transmission support 13 to provide high voltage power for the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15 and the driving power module 24, and therefore the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15 and the driving power module 24 reach preset levels.
The high-voltage power supply unit supplies power to the high-voltage detection unit, the semiconductor detector 11 works under a preset level, the speed of signal electrons can be increased, the energy of the signal electrons is improved, more high-energy signal electrons are detected and received by the semiconductor detector 11, and the imaging quality of an electron microscope can be improved.
The high-voltage detection unit adopts a semiconductor detector 11 for detection, and the basic principle of the semiconductor detector 11 is that charged particles generate electron-hole pairs in a sensitive volume of the semiconductor detector 11, and the electron-hole pairs drift under the action of an external electric field to output signals. The semiconductor detector 11 can be used to increase the detection speed, and thus the imaging speed of the electron microscope can be increased.
Furthermore, the electron microscope provided by the utility model further comprises a low-voltage power supply unit, wherein the low-voltage power supply unit is electrically connected with the driving power supply module 24, the driving power supply module 24 is electrically connected with the optical fiber emitter 15, the driving power supply module 24 is electrically connected with the preamplifier 14, and the preamplifier 14 is electrically connected with the semiconductor detector 11.
The low-voltage power supply unit can provide low voltage electricity, the low-voltage power supply unit is electrically connected with the driving power supply module 24, the low-voltage electricity provided by the low-voltage power supply unit provides the low voltage electricity for the optical fiber emitter 15 and the preamplifier 14 through the driving power supply module 24, the preamplifier 14 is electrically connected with the semiconductor detector 11, and the low-voltage electricity provided by the low-voltage power supply unit provides the low voltage electricity for the semiconductor detector 11 through the preamplifier 14.
Further, the high voltage electricity transmission bracket 13 is a rectangular frame with a beam, the preamplifier 14 is connected to the upper surface of the rectangular frame by conductive screws, the optical fiber emitter 15 is connected to the upper surface of the rectangular frame by conductive screws, the driving power module 24 includes a high voltage unit 242 and a low voltage unit 241, the high voltage unit 242 is connected to the lower surface of the rectangular frame by conductive screws and a conductive column 27 with a threaded hole, and the low voltage unit 241 is connected to the lower surface of the rectangular frame by an insulating column 26.
In order to collect more signal electrons, the high-voltage detection unit needs to keep a relatively short detection distance with an action point of the electron beam 2 acting on the sample 4 to be detected, and because the electron optical lens barrel 1 needs to converge the electron beam 2 on the sample 4 to be detected, the distance between the electron optical lens barrel 1 and the sample 4 to be detected is small, and the whole size of the high-voltage detection unit needs to be small in order to ensure the detection distance. In order to make the high voltage detector compact, the present embodiment uses the high voltage transmission bracket 13 as a rectangular frame with a beam, the preamplifier 14 is connected to the upper surface of the rectangular frame by conductive screws, the optical fiber emitter 15 is connected to the upper surface of the rectangular frame by conductive screws, the driving power module 24 includes a high voltage unit 242 and a low voltage unit 241, the high voltage unit 242 is connected to the lower surface of the rectangular frame by conductive screws and conductive columns 27 with threaded holes, and the low voltage unit 241 is connected to the lower surface of the rectangular frame by insulating columns 26. Therefore, the safety and reliability of power supply can be guaranteed, the overall structure of the high-voltage detection unit is more compact, and the overall size is reduced.
Furthermore, the high voltage detection unit further comprises a support frame 12, the support frame 12 is connected to the upper surface of the rectangular frame through a conductive screw, and the semiconductor detector 11 is connected to the support frame 12 through a conductive screw.
Specifically, the support frame 12 is integrally arranged on the side face of the rectangular frame, the support frame 12 is provided with a boss, a through hole is formed in the boss, and a conductive screw penetrates through the through hole to connect the support frame 12 to the upper surface of the rectangular frame. The semiconductor detector 11 is connected to the support frame 12 by conductive screws.
As shown in fig. 1 to 3, in some alternative embodiments, the high voltage detection unit further includes an insulating base plate 25, one end of the insulating base plate 25 is connected to the lower surface of the rectangular frame through an insulating column 26, and the other end of the insulating base plate 25 is connected to the lower surface of the driving power module 24 through an insulating column 26.
The insulating base plate 25 may provide mounting support for the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15, the driving power supply module 24, and the high voltage transmission bracket 13, and may insulate the above components from the outside.
It should be noted that all the insulating columns 26 provided by the present invention are cylinders with at least one boss on the outer side wall, and the arrangement of the boss can better perform an insulating function.
Optionally, the boss is integrally formed with the cylinder.
Optionally, the boss is provided with a plurality of, and a plurality of bosses are arranged in parallel at the outer wall of cylinder.
The material of the boss, the cylinder and the insulating base plate 25 is engineering plastic or other insulating materials, and those skilled in the art can select suitable materials.
Further, the high voltage detection unit further comprises a first shielding box 18, and the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15, the driving power module 24, the high voltage transmission support 13 and the insulating bottom plate 25 are all arranged in the first shielding box 18.
The first shielding box 18 surrounds the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15, the driving power module 24, the high voltage transmission bracket 13, and the insulating base plate 25, so as to prevent the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15, the driving power module 24, the high voltage transmission bracket 13, and the insulating base plate 25 from being interfered by external electric fields, magnetic fields, etc., and prevent the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15, the driving power module 24, the high voltage transmission bracket 13, and the insulating base plate 25 from interfering with other components of the electron microscope such as the electric fields, magnetic fields, etc.
Specifically, the first shielding box 18 includes a first housing 9, a second housing 10, a front end cover 7, and a rear end cover 8, and the front end cover 7 is provided with an opening for signal electrons to enter, the inner side of the opening corresponds to the semiconductor detector 11, the outer side of the opening corresponds to the screen 6, and the screen 6 is connected to the outer side wall of the front end cover 7.
An electric field is generated around the screen 6 by applying a voltage to the screen 6. The sample stage 5 of the electron microscope adopts a grounding mode, namely, the voltage value of the sample stage 5 is zero, the sample 4 to be measured is placed on the sample stage 5, further, the sample 4 to be measured is not electrified, and the voltage value of the sample 4 to be measured is zero. The electron optical lens barrel 1 emits an electron beam 2, the electron beam 2 is converged on a sample 4 to be detected, the converged electron beam 2 acts on the sample 4 to be detected to generate signal electrons, an electric field generated around the screen 6 can change the movement direction of the signal electrons, the generated signal electrons can be influenced by the action of the electric field and move towards the screen 6, and the signal electrons move towards the screen 6, firstly pass through the screen 6 and then pass through an opening formed in the front end cover 7 and impact on the semiconductor detector 11.
Further, the high-voltage electricity transmission bracket 13 is provided with a high-voltage connection terminal 17, the low-voltage unit 241 is provided with a low-voltage connection terminal 22, and the optical fiber emitter 15 is provided with an optical fiber emission connection terminal 16.
The rear end cover 8 is provided with a first through hole, a second through hole and a third through hole. The first through hole corresponds to the high voltage terminal 17 position, the second through hole corresponds to the low voltage terminal 22 position and the third through hole corresponds to the fiber launch terminal 16 position.
The high-voltage power supply unit is connected with the high-voltage wiring terminal 17 through a cable to supply power to the high-voltage electricity transmission bracket 13.
The low voltage power supply unit is connected with the low voltage wiring terminal 22 through a cable to supply power to the driving power supply module 24.
As shown in fig. 1 to 3, in some alternative embodiments, the high voltage detection unit further comprises a fiber optic receiver 21 and a second shielding box 23. The optical fiber receiver 21 is connected with the optical fiber transmitter 15 by optical signals, and the optical fiber receiver 21 is arranged in the second shielding box 23.
The optical fiber receiver 21 is disposed in the second shielding box 23, which can prevent the optical fiber receiver 21 from being interfered by external electric field, magnetic field, etc., and also prevent the electric field, magnetic field, etc. generated by the optical fiber receiver 21 from interfering with other components of the electron microscope.
The second shield case 23 is provided with a fourth through hole and a fifth through hole. The fiber optic receptacle 21 is provided with a fiber optic receiving terminal 19 and an integrated terminal 20. The fourth through hole corresponds to the fiber-receiving terminal 19 and the fifth through hole corresponds to the integrated terminal 20.
The fiber-optic transmission terminal 16 of the fiber-optic transmitter 15 is connected to the fiber-optic reception terminal 19 of the fiber-optic receiver 21 via an optical fiber.
Further, the electron microscope provided by the utility model also comprises a main amplifier and a processor. The main amplifier is in electrical signal connection with the fiber optic receiver 21 and the processor is in communication connection with the main amplifier.
The main amplifier is used for amplifying the input voltage electric signal. For obtaining an output voltage signal that is stronger than the input voltage signal. The main amplifier is electrically connected to a fiber optic receiver 21 via an integrated terminal 20, and the processor is communicatively connected to the main amplifier. The processor generates an image from the main amplifier output voltage signal.
The integrated terminal 20 is formed by sequentially arranging a plurality of connectors such as power supply connectors and electrical signal transmission connectors, and is not interfered with or connected to each other.
As shown in fig. 1 to 3, an electron microscope according to an embodiment of the present invention is described below. The semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15, the driving power supply module 24, the high-voltage transmission bracket 13 and the insulating bottom plate 25 are all arranged in the first shielding box 18. The high-voltage electricity transmission support 13 is provided with a high-voltage connection terminal 17, the driving power supply module 24 includes a high-voltage unit 242 and a low-voltage unit 241, the low-voltage unit 241 is provided with a low-voltage connection terminal 22, and the optical fiber emitter 15 is provided with an optical fiber emitting connection terminal 16.
The first shielding box 18 is enclosed by the first shell 9, the second shell 10, the front end cover 7 and the rear end cover 8, and the rear end cover 8 is provided with a first through hole, a second through hole and a third through hole. The first through hole corresponds to the high voltage terminal 17 position, the second through hole corresponds to the low voltage terminal 22 position and the third through hole corresponds to the fiber launch terminal 16 position.
The high-voltage power supply unit is connected with the high-voltage wiring terminal 17 through a cable to supply power to the high-voltage electricity transmission bracket 13. The high voltage power supply unit can provide high voltage power, preferably with a voltage value of 10kv as an example, the voltage value of the high voltage electricity transmission bracket 13 is 10kv, the high voltage electricity transmission bracket 13 is a rectangular frame with a beam, and the high voltage electricity transmission bracket 13 is electrically connected with the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15 and the driving power module 24 respectively.
The high-voltage electricity transmission support 13 transmits high-voltage electricity with a voltage value of 10kv to the semiconductor detector 11, and the voltage value of the semiconductor detector 11 is 10 kv.
Specifically, the high voltage detection unit further comprises a support frame 12, the support frame 12 is connected to the upper surface of the rectangular frame through a conductive screw, and the semiconductor detector 11 is connected to the support frame 12 through a conductive screw. The high-voltage electricity transmission support 13 transmits the high-voltage electricity with the voltage value of 10kv to the support frame 12 through the conductive screw, and the support frame 12 transmits the high-voltage electricity with the voltage value of 10kv to the semiconductor detector 11 through the conductive screw, so that the voltage value of the semiconductor detector 11 is 10 kv.
The high voltage electricity transmission bracket 13 transmits the high voltage electricity having a voltage value of 10kv to the preamplifier 14, and the voltage value of the preamplifier 14 is 10 kv.
Specifically, the preamplifier 14 is connected to the upper surface of the rectangular frame by a conductive screw, and the high voltage electricity transmission bracket 13 transmits the high voltage electricity with the voltage value of 10kv to the preamplifier 14 by the conductive screw, so that the voltage value of the preamplifier 14 is 10 kv.
The high voltage electricity transmission bracket 13 transmits the high voltage electricity having a voltage value of 10kv to the optical fiber transmitter 15, and the optical fiber transmitter 15 has a voltage value of 10 kv.
Specifically, the optical fiber emitter 15 is connected to the upper surface of the rectangular frame by a conductive screw, and the high voltage transmission bracket 13 transmits the high voltage with a voltage value of 10kv to the optical fiber emitter 15 by the conductive screw, so that the voltage value of the optical fiber emitter 15 is 10 kv.
The high voltage electricity transmission bracket 13 transmits the high voltage electricity having a voltage value of 10kv to the high voltage unit 242 of the driving power module 24, and the voltage value of the high voltage unit 242 is 10 kv.
Specifically, the driving power module 24 includes a high voltage unit 242 and a low voltage unit 241, the high voltage unit 242 is connected to the lower surface of the rectangular frame through a conductive screw and a conductive column 27 with a threaded hole, and the low voltage unit 241 is connected to the lower surface of the rectangular frame through an insulating column 26.
The conductive screw penetrates through the rectangular frame and is screwed into the threaded hole at one end of the conductive column 27, and the other end of the conductive column 27 is connected with the high-voltage unit 242, so that the high-voltage unit 242 is connected to the lower surface of the rectangular frame. The high-voltage electricity transmission bracket 13 transmits high-voltage electricity with a voltage value of 10kv to the high-voltage unit 242 through the conductive screw and the conductive column 27 in sequence, so that the voltage value of the high-voltage unit 242 is 10 kv.
The high voltage power supply unit supplies high voltage to the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15 and the high voltage unit 242 of the driving power module 24 through the high voltage transmission bracket 13, so that the semiconductor detector 11, the preamplifier 14, the optical fiber emitter 15 and the high voltage unit 242 of the driving power module 24 reach a preset level of 10 kv.
The low voltage power supply unit is connected to the low voltage connection terminal 22 through a cable to supply power to the low voltage unit 241 of the driving power module 24. The low voltage power supply unit may provide a low voltage, preferably with a voltage value of 24v, and the low voltage unit 241 has a voltage value of 24 v. The low voltage unit 241 transmits low voltage of 24v to the high voltage unit 242 at a preset level of 10kv, and the high voltage unit 242 outputs low voltage of 5v through a transformation process. The high voltage unit 242 supplies 5v of low voltage power to the preamplifier 14 at a preset level of 10kv and the fiber optic transmitter 15 at a preset level of 10kv, respectively, through wires. The preamplifier 14 then transmits the 5v low voltage current through a wire to the semiconductor detector 11 at a preset level of 10 kv. The low-voltage power supply unit supplies low-voltage electricity to the preamplifier 14, the optical fiber emitter 15 and the semiconductor detector 11 at the preset level of 10kv through the low-voltage unit 241 and the high-voltage unit 242 of the driving power module 24, and the low-voltage electricity can drive the preamplifier 14, the optical fiber emitter 15 and the semiconductor detector 11 at the preset level of 10kv to work.
The electron optical column 1 is used for emitting an electron beam 2 and converging the electron beam 2 on a sample 4 to be measured, and the electron optical column 1 comprises an electron source 101, an electron acceleration structure and an objective lens system 102.
The electron source 101 is for generating an emitted electron beam 2. The electron acceleration structure is an anode along the emission direction of the electron beam 2 for forming an electric field to increase the moving speed of the electron beam 2. The objective lens system 102 is used for controlling the beam current of the electron beam 2 emitted by the electron source 101 and the advancing direction of the electron beam 2.
The objective system 102 comprises an objective lens, which may be a magnetic lens, or an electric lens, or an electromagnetic compound lens, and a deflection device 103. The deflection means 103 may be magnetic deflection means or electrical deflection means. The deflection unit 103 is used to change the moving direction of the electron beam 2 emitted from the electron source 101, and can generate a scanning field of an arbitrary deflection direction.
The sample stage 5 of the electron microscope adopts a grounding mode, namely the voltage value of the sample stage 5 is 0v, the sample 4 to be measured is placed on the sample stage 5, and further the sample 4 to be measured is not electrified, namely the voltage value of the sample 4 to be measured is 0 v. The electron optical lens barrel 1 emits an electron beam 2, and converges the electron beam 2 on a sample 4 to be measured, and the converged electron beam 2 acts on the sample 4 to be measured to generate signal electrons, wherein the signal electrons comprise back scattered electrons and secondary electrons 3. Among them, the secondary electron 3 has low energy and the backscattered electron has high energy. The power supply for the mesh 6 applies a voltage to the mesh 6, and the applied voltage value is 300 v. An electric field is generated around the screen 6, the electric field generated around the screen 6 changes the moving direction of the signal electrons, and because the energy of the secondary electrons 3 in the signal electrons is low, the secondary electrons 3 are greatly influenced by the electric field generated around the screen 6, the moving direction of most of the secondary electrons 3 is greatly changed, the secondary electrons 3 change the moving direction under the action of the electric field generated around the screen 6 and move towards the screen 6, the semiconductor detector 11 is at a preset level of 10kv, and the voltage value of the screen 6 is 300 v. An accelerating electric field is formed between the screen 6 and the semiconductor detector 11, the secondary electrons 3 are attracted by the electric field of the screen 6 and move towards the screen 6 to pass through the screen 6, after passing through the screen 6, the secondary electrons 3 are attracted and accelerated by the accelerating electric field formed between the screen 6 and the semiconductor detector 11, then pass through an opening arranged on a front end cover 7 and collide onto the semiconductor detector 11, the secondary electrons 3 which are accelerated to high speed collide onto the semiconductor detector 11, the semiconductor detector 11 generates current by the collision of the secondary electrons 3, the semiconductor detector 11 is electrically connected with a preamplifier 14, the current generated by the semiconductor detector 11 is transmitted to the preamplifier 14, the preamplifier 14 converts and amplifies the current signal into a voltage signal, the preamplifier 14 is electrically connected with an optical fiber emitter 15, and the preamplifier 14 transmits the converted and amplified voltage signal to the optical fiber emitter 15, the fiber optic transmitter 15 converts the voltage signal into an optical signal. The fiber-optic transmission terminal 16 of the fiber-optic transmitter 15 is connected to the fiber-optic reception terminal 19 of the fiber-optic receiver 21 via an optical fiber. The optical fiber transmitter 15 transmits the converted optical signal to the optical fiber receiver 21, the optical fiber receiver 21 converts the optical signal into a voltage signal, the optical fiber receiver 21 is electrically connected to a main amplifier through the integrated terminal 20, the optical fiber receiver 21 transmits the voltage signal to the main amplifier, and the main amplifier amplifies the input voltage signal. For obtaining an output voltage signal that is stronger than the input voltage signal. The main amplifier transmits the amplified output voltage signal to the processor, and the processor generates an image from the main amplifier output voltage signal.
It should be noted that, in the present embodiment, the preset level is 10kv for example, the low-voltage power supply unit is 24v for example, the driving voltage of each component is 5v for example, and the applied voltage value of the screen 6 is 300v for example, in practical use, the specific voltage value of the preset level, the specific voltage value of the low-voltage power supply unit, the specific voltage value of each component, and the specific value of the applied voltage value of the screen 6 may be set by a person skilled in the art according to actual needs as long as the high-voltage detection unit is satisfied with operation.
According to the electron microscope provided by the embodiment, the high-voltage power supply unit supplies power to the high-voltage detection unit, the high-voltage detection unit works under the preset level, the speed of signal electrons can be increased, the energy of the signal electrons is improved, more high-energy signal electrons are received by the high-voltage detection unit, and the imaging quality of the electron microscope can be improved.
The high-voltage detection unit adopts a semiconductor detector 11 for detection, and the basic principle of the semiconductor detector 11 is that charged particles generate electron-hole pairs in a sensitive volume of the semiconductor detector 11, and the electron-hole pairs drift under the action of an external electric field to output signals. The semiconductor detector 11 can be used to increase the detection speed, and thus the imaging speed of the electron microscope can be increased.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the utility model as defined by the appended claims.
Claims (10)
1. An electron microscope, characterized by: the method comprises the following steps:
the sample table is used for placing a sample to be detected;
the electron optical lens cone is used for emitting electron beams and converging the electron beams on the sample to be measured;
the high-voltage detection unit is used for receiving signal electrons generated by the action of the electron beams on the sample to be detected and outputting voltage signals;
and the high-voltage power supply unit is electrically connected with the high-voltage detection unit and controls the high-voltage detection unit to reach a preset level.
2. The electron microscope of claim 1, wherein: the high-voltage detection unit comprises a semiconductor detector, a preamplifier and an optical fiber emitter which are sequentially connected by electric signals;
the high-voltage power transmission support is electrically connected with the high-voltage power supply unit;
the semiconductor detector, the preamplifier, the optical fiber emitter and the driving power supply module are all electrically connected with the high-voltage transmission support.
3. The electron microscope of claim 2, wherein: further comprising:
and the low-voltage power supply unit is electrically connected with the driving power supply module, the driving power supply module is electrically connected with the optical fiber emitter, the driving power supply module is electrically connected with the preamplifier, and the preamplifier is electrically connected with the semiconductor detector.
4. The electron microscope of claim 3, wherein: the high-voltage electricity transmission support is a rectangular frame with a cross beam, the preamplifier is connected to the upper surface of the rectangular frame through a conductive screw, the optical fiber emitter is connected to the upper surface of the rectangular frame through the conductive screw, the driving power supply module comprises a high-voltage unit and a low-voltage unit, the high-voltage unit is connected to the lower surface of the rectangular frame through the conductive screw and a conductive column with a threaded hole in a matched mode, and the low-voltage unit is connected to the lower surface of the rectangular frame through an insulating column.
5. The electron microscope of claim 4, wherein: the high-voltage detection unit further comprises a support frame, the support frame is connected to the upper surface of the rectangular frame through a conductive screw, and the semiconductor detector is connected to the support frame through a conductive screw.
6. The electron microscope of claim 4, wherein: the high-voltage detection unit further comprises an insulating bottom plate, one end of the insulating bottom plate is connected to the lower surface of the rectangular frame through an insulating column, and the other end of the insulating bottom plate is connected to the lower surface of the driving power supply module through an insulating column.
7. The electron microscope of claim 6, wherein: the high-voltage detection unit further comprises a first shielding box, and the semiconductor detector, the preamplifier, the optical fiber emitter, the driving power supply module, the high-voltage transmission support and the insulating bottom plate are all arranged in the first shielding box;
the first shielding box comprises a first shell, a second shell, a front end cover and a rear end cover, wherein the front end cover is provided with an opening for signal electrons to enter, the inner side of the opening corresponds to the semiconductor detector, the outer side of the opening corresponds to the screen, and the screen is connected with the outer side wall of the front end cover.
8. The electron microscope of claim 7, wherein: the high-voltage electricity transmission support is provided with a high-voltage wiring terminal, the low-voltage unit is provided with a low-voltage wiring terminal, and the optical fiber emitter is provided with an optical fiber emitting wiring terminal;
the rear end cover is provided with:
the first through hole corresponds to the position of the high-voltage wiring terminal;
the second through hole corresponds to the position of the low-voltage wiring terminal;
and the third through hole corresponds to the position of the optical fiber transmitting terminal.
9. The electron microscope of any one of claims 2 to 8, wherein: the high voltage detection unit further comprises:
the optical fiber receiver is connected with the optical fiber transmitter by optical signals;
and the optical fiber receiver is arranged in the second shielding box.
10. The electron microscope of claim 9, wherein: further comprising:
a main amplifier electrically connected to the fiber optic receiver;
a processor communicatively coupled to the main amplifier.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122127340.9U CN216161686U (en) | 2021-09-03 | 2021-09-03 | Electron microscope |
| PCT/CN2022/100899 WO2022199721A1 (en) | 2021-09-03 | 2022-06-23 | Electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122127340.9U CN216161686U (en) | 2021-09-03 | 2021-09-03 | Electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216161686U true CN216161686U (en) | 2022-04-01 |
Family
ID=80842104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122127340.9U Active CN216161686U (en) | 2021-09-03 | 2021-09-03 | Electron microscope |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN216161686U (en) |
| WO (1) | WO2022199721A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022199721A1 (en) * | 2021-09-03 | 2022-09-29 | Focus E-Beam Technology Pte. Ltd. | Electron microscope |
| CN117219482A (en) * | 2023-11-07 | 2023-12-12 | 国仪量子(合肥)技术有限公司 | Current detection device and scanning electron microscope |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01220352A (en) * | 1988-02-26 | 1989-09-04 | Hitachi Ltd | Scanning electron microscope and its analogous device |
| US8766183B2 (en) * | 2008-09-26 | 2014-07-01 | Hitachi High-Technologies Corporation | Charged particle beam device |
| WO2019100600A1 (en) * | 2017-11-21 | 2019-05-31 | Focus-Ebeam Technology (Beijing) Co., Ltd. | Low voltage scanning electron microscope and method for specimen observation |
| CN216161686U (en) * | 2021-09-03 | 2022-04-01 | 聚束科技（北京）有限公司 | Electron microscope |
-
2021
- 2021-09-03 CN CN202122127340.9U patent/CN216161686U/en active Active
-
2022
- 2022-06-23 WO PCT/CN2022/100899 patent/WO2022199721A1/en unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022199721A1 (en) * | 2021-09-03 | 2022-09-29 | Focus E-Beam Technology Pte. Ltd. | Electron microscope |
| CN117219482A (en) * | 2023-11-07 | 2023-12-12 | 国仪量子(合肥)技术有限公司 | Current detection device and scanning electron microscope |
| CN117219482B (en) * | 2023-11-07 | 2024-01-26 | 国仪量子(合肥)技术有限公司 | Current detection device and scanning electron microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022199721A1 (en) | 2022-09-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN216161686U (en) | Electron microscope | |
| JP3905382B2 (en) | Optical column of charged particle beam equipment | |
| JP6012191B2 (en) | Detection method used in charged particle microscope | |
| US4714833A (en) | Arrangement for detecting secondary and/or backscatter electrons in an electron beam apparatus | |
| US4292519A (en) | Device for contact-free potential measurements | |
| EP0939969A1 (en) | Scanning electron microscope | |
| US4996422A (en) | Mass spectrometer | |
| US3717761A (en) | Scanning electron microscope | |
| US6686590B2 (en) | Low-vacuum scanning electron microscope | |
| US6815678B2 (en) | Raster electron microscope | |
| GB2081501A (en) | Device for detecting secondary electrons in a scanning electron microscope | |
| JP6727193B2 (en) | High voltage feedthrough assembly, electron diffraction or imaging device, and method of operating an electrode device in a vacuum environment | |
| EP0473216B1 (en) | Charged particle beam device | |
| CN217466746U (en) | Ring-shaped electron detector and scanning electron microscope | |
| US20160379797A1 (en) | Charged Particle Beam Apparatus | |
| US6710340B2 (en) | Scanning electron microscope and method of detecting electrons therein | |
| JPH09106777A (en) | Electron multiplier for use with electron microscope | |
| US2354263A (en) | Electron microscope | |
| JP2010182596A (en) | Charged particle beam apparatus | |
| KR102280059B1 (en) | Electronic Irradiation System | |
| US4651003A (en) | Particle-accelerating electrode | |
| CN217544534U (en) | Scanning imaging lens cone | |
| CN117790272A (en) | Electron detector and electron beam detection device | |
| US3767927A (en) | Electron beam apparatus with beam-stabilization system | |
| CN219201942U (en) | Calibration device and system for electric field magnetic field parallel neutral particle analyzer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |