CN101234702A - Transfer device, guiding structure, and method for transferring and guiding substrate - Google Patents

Transfer device, guiding structure, and method for transferring and guiding substrate Download PDF

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Publication number
CN101234702A
CN101234702A CNA2008100832110A CN200810083211A CN101234702A CN 101234702 A CN101234702 A CN 101234702A CN A2008100832110 A CNA2008100832110 A CN A2008100832110A CN 200810083211 A CN200810083211 A CN 200810083211A CN 101234702 A CN101234702 A CN 101234702A
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China
Prior art keywords
rakes
load plane
correcting
substrate
conveyer
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CNA2008100832110A
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CN101234702B (en
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林集祥
詹景翔
何铭祥
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AU Optronics Corp
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AU Optronics Corp
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

The invention relates to a transferring device, a correcting structure and a method for transferring and correcting a substrate, wherein, the transferring device comprises a plurality of rollers and correcting components. A plurality of rollers forms a bearing plane and roll to transfer the substrate. The correcting components are arranged between two rollers in a plurality of rollers; the correcting components have two inclined parts crossing the bearing plane; the inclined parts are opposite and are inclined toward the opposite directions. The two inclined parts are respectively provided with a first end higher than the bearing plane and a second end lower than the baring plane, wherein, the distance between the first end of the first inclined part and the first end of the second inclined part is larger than the distance between the second end of the first inclined part and the second end of the second inclined part. The invention can correct the substrate while placing the substrate down, thus shortening the manufacture time and avoiding output loss; in addition, the invention can greatly reduce the cost and effectively decrease the following maintenance cost; besides with good correcting effect which is applied to the specification of the present machine station.

Description

The method of conveyer, correcting structure, transmission and correcting substrate
Technical field
The present invention relates to a kind of the transmission and the device and method of correcting substrate, and be particularly related to a kind of in transport process the devices and methods therefor in order to the correcting substrate.
Background technology
The entrance of conventional substrate cleaning machine can be provided with the device of conveying substrate, and substrate is placed on the feedway by mechanical arm, and substrate is through directly sending into the inlet of cleaning part behind the feedway.Because feedway itself lacks the mechanism of correcting, if mechanical arm has just produced skew when placing substrate, then in follow-up transport process, only can amplify side-play amount, add the stress of follow-up clean process, to produce bigger skew, even depart from default track to collide and cause problem such as fragmentation with board.
Based on the problems referred to above, industry develops the equipment that a cover correcting substrate, it comprises hardware and Control Software, installs guiding mechanism and servomotor on original cleaning machine additional, and by programmable logic controller (PLC) (Programmable Logic Controller; PLC) digital control software drives servomotor, with the mobile status of control guiding mechanism.Treat that mechanical arm is placed on substrate after the conveyer, digital control software can detect and judge, and drive guiding mechanism according to judged result and push substrate to the right path seriatim by the side of substrate, up to judging that at digital control software just substrate can be sent into cleaning part after substrate no longer is offset enters the mouth.
Yet the expense that installs the said equipment additional is higher, and follow-up maintenance cost is also considerable.In addition,, make original manufacturing time to elongate, certainly will cause output value loss because above-mentioned guiding mechanism is the step that fecund is given birth to one correcting in original cleaning process.
Summary of the invention
The object of the present invention is to provide a kind of devices and methods therefor of correcting substrate, it is arranged at the correcting assembly in the conveyer, can transfer the substrate of correcting simultaneously in the process in substrate.
The present invention discloses a kind of conveyer, and it comprises a plurality of roller bearings and the first correcting assembly.A plurality of roller bearings constitute a load plane, and a plurality of roller bearings roll in order to transmit substrate.The first correcting assembly is between wherein two roller bearings of a plurality of roller bearings, and the first correcting assembly has two rakes that intersect with this load plane, and these two rakes tilt relatively and respectively in the opposite direction.Aforementioned two rakes respectively have first end that is higher than this load plane and second end that is lower than this load plane, and the distance between first end of first rake and first end of second rake is greater than the distance between second end of second end of first rake and second rake.
The present invention discloses a kind of correcting structure in addition, in order to being installed in the aforementioned conveyer, and the load plane that this conveyer has base and is positioned at this base top, this correcting structure comprises the first correcting assembly and the second correcting assembly.The first correcting assembly comprises two first supports and two first rakes.First support is arranged on this base, and first rake is arranged on first support.First rake and this load plane intersect, and wherein the distance between first rake and this load plane intersection approximates the width of a slice substrate greatly.Aforementioned two first rakes tilt relatively and respectively in the opposite direction, two first rakes respectively have first end that is higher than this load plane and second end that is lower than this load plane, and wherein the distance between two first ends is greater than the distance between two second ends.The second correcting assembly comprises two second supports and two second rakes.Second support all is arranged between wherein two roller bearings of described a plurality of roller bearings of conveyer.Second rake and this load plane intersect, and wherein the distance between this second rake and this load plane intersection approximates the width of a slice substrate greatly.Two second rakes tilt relatively and respectively in the opposite direction, and two second rakes respectively have first end that is higher than this load plane and second end that is lower than this load plane, and wherein the distance between two first ends is greater than the distance between two second ends.
The present invention discloses a kind of method of correcting substrate in addition, this method is carried out by a conveyer, this conveyer comprises a plurality of roller bearings and the first correcting assembly, wherein a plurality of roller bearings are arrangement in parallel in fact, the axis direction of described a plurality of roller bearings is defined as first direction, the first correcting assembly is between wherein two roller bearings of a plurality of roller bearings, this first correcting assembly comprises two rakes, described rake protrudes in a load plane that is made of described a plurality of roller bearings, and described two rakes tilt towards this first direction and the second direction opposite with this first direction relatively and respectively; This method comprises the steps: a substrate is moved downward to described a plurality of roller bearing by the normal direction along this load plane above two rakes; And the described a plurality of roller bearing that rolls, to transmit this substrate along third direction perpendicular to this first direction.
Useful technique effect of the present invention is, the device and method of transmission of the present invention and correcting substrate, and it is provided with the correcting assembly between roller bearing, make substrate can finish correcting in the process that is put in conveyer down, shortens manufacturing time, avoids output value loss.In addition, present embodiment need not digital control software, also need not to reequip board, as long as being set simply, correcting assembly rake can bring into play the correcting effect on original board, reduce cost significantly and effectively reduce follow-up maintenance cost, and correcting is respond well, is suitable for existing board specification.
For foregoing of the present invention can be become apparent, hereinafter the spy enumerates preferred embodiment, and conjunction with figs., is described in detail below.
Description of drawings
Fig. 1 is the block diagram of the preferred embodiment of conveyer of the present invention.
Fig. 2 is the lateral plan of the preferred embodiment of conveyer of the present invention.
Fig. 3 A to Fig. 3 C is the scheme drawing of preferred embodiment of the method for correcting substrate of the present invention.
Wherein, description of reference numerals is as follows:
99: inlet 100: conveyer
101: substrate 102: base
104: lifter 106: carrier
110,110a, 110b, 110c, 110d, 110e: roller bearing
120: the first correcting assemblies
120 ': the second correcting assembly 122: slide rail
124,126: support 130,140,130 ', 140 ': rake
132,142,132 ', 142 ': first end of rake
134,144,134 ', 144 ': second end of rake
The specific embodiment
Fig. 1 is the block diagram of the preferred embodiment of conveyer of the present invention.As shown in Figure 1, conveyer 100 comprises a plurality of roller bearings 110 (comprising 110a, 110b, 110c, 110d) and the first correcting assembly 120.A plurality of roller bearings 110 (comprising 110a, 110b, 110c, 110d) constitute load plane (label A as shown in Figure 2, i.e. XY plane), and roller bearing 110 can roll, in order to transmit substrate 101.The first correcting assembly 120 is between wherein between two roller bearing 110b and the 110c.
Please be simultaneously with reference to Fig. 1 and Fig. 2, Fig. 2 is the lateral plan of the preferred embodiment of conveyer of the present invention.The first correcting assembly 120 has two rakes 130,140 that intersect with load plane A, two rakes 130,140 tilt relatively and respectively in the opposite direction, these two rakes 130,140 respectively have first end 132,142 that is higher than load plane A and are lower than distance X 1 between 134,144, two first ends 132,142 of second end of load plane greater than the distance X 2 between two second ends 134,144.
With preferred embodiment, the distance X 3 between aforementioned two rakes 130,140 and the load plane A intersection approximates the width of substrate 101 greatly.In another preferred embodiment, the angle of aforementioned two rakes 130,140 and load plane A is more than or equal to 45 degree, and thus, the inclined degree of rake just is enough to cause substrate to be subjected to gravity from line slip, makes rake bring into play the effect of correcting substrate.In most preferred embodiment, the angle of aforementioned two rakes 130,140 and load plane A is between 45 degree and 60 degree.Because rake can produce friction with substrate 101 inevitably, therefore rake 130 and 140 preferably adopts wear-resistant material, for example be engineering plastics, in preferred embodiment, two rakes 130 and 140 are that (polyaryletherketone, peek) engineering plastics of class are made by polyetheretherketone.
Please refer to Fig. 1, the first correcting assembly 120 comprises slide rail 122 and two supports 124,126.Slide rail 122 is arranged on the base 102, and two supports 124,126 are arranged on the slide rail 122, and can move in slide rail 122, and two rakes 130 and 140 are arranged at respectively on two supports 124 and 126.When two supports 124 and 126 along ± when the Y direction is slided on slide rail 122, two rakes 130 and 140 that are arranged on two supports 124 and 126 also can be along with moving, therefore, by position along slide rail 122 traversing carriages 124 and 126, just the distance X 3 between two rakes 130,140 and the load plane A intersection can be adjusted into predeterminable range, for example be the substrate width of different size.Thus, under the situation of hardware that need not be extra or software equipment, the conveyer of present embodiment promptly can be applicable to the substrate of correcting various sizes size.
Yet the method for adjusting distance between two rakes and the load plane intersection is not limited to aforesaid way, in fact also can adjust the position of two supports 124 and 126 along the normal direction of load plane (as ± Z direction).For instance, two supports 124 and 126 can be telescoping shoring columns, can carry rake 130 and 140 and move up or down.Other lifts an example, and two supports 124 and 126 can comprise the support jacking system, make two supports 124 and 126 can each normal direction along load plane (as ± Z direction) between the primary importance and the second place, move back and forth; When two supports were positioned at primary importance, these two supports and base laid respectively at the both sides of load plane; When two supports were positioned at the second place, these two supports and base were positioned at the same side of load plane.
Conveyer 100 can comprise the second correcting assembly 120 ', the structural similitude of this second correcting assembly 120 ' and the first correcting the assembly 120 but position is different, and both work in coordination with the purpose that reaches the correcting substrate.The second correcting assembly 120 ' is arranged between two other roller bearing 110d and the 110e, the second correcting assembly 120 ' comprise in addition two respectively with the crossing rake 130 ', 140 ' of load plane (XY plane), two rakes 130 ', 140 ' tilt relatively and respectively in the opposite direction in addition, in addition two rakes 130 ', 140 ' respectively have first end 132 ' that is higher than load plane, 142 ' and second end 134 ', 144 ' that is lower than load plane, and the distance between this two first ends 132 ', 142 ' is greater than the distance between two second ends 134 ', 144 '.Similarly, two rakes 130 ', 140 ' and the load plane intersection between distance approximate the width of a slice substrate greatly.
Roller bearing 110 is arrangement in parallel in fact, the axis direction of roller bearing 110 is defined as first direction (as+Y direction), along transmitting substrate perpendicular to the second direction of first direction (as+directions X), the first correcting assembly 120 and the second correcting assembly 120 ' were preferably arranged along second direction (as+directions X) when roller bearing rolled.Distance between two groups of correcting assemblies 120 and 120 ' is less than a length of substrate.Thus, when crooked substrate fell between the first correcting assembly 120 and the second correcting assembly 120 ', two groups of correcting assembly correcting simultaneously substrates quickened to transmit and the correcting process.
Conveyer 100 can comprise base 102, lifter 104 and carrier 106.Roller bearing 110, the first correcting assembly 120 and lifter 104 are arranged on the base 102, and carrier 106 is arranged on the lifter 104, in order to along the normal direction of load plane (as ± Z direction) bearing substrate 101.
Below the preferred embodiment of method of correcting substrate that detailed explanation the present invention is disclosed.Please refer to Fig. 3 A to Fig. 3 C, it is depicted as the scheme drawing of preferred embodiment of the method for transmission of the present invention and correcting substrate.Fig. 3 A is depicted as the lateral plan of conveyer of the present invention, a plurality of roller bearings 110 are arrangement in parallel in fact, the first correcting assembly 120 comprises two rakes 130 and 140, and described two rakes protrude in the load plane A that is made of a plurality of roller bearings 110, two rakes 140 and 130 tilt towards first direction (as+Y direction) and the second direction opposite with first direction (as-Y direction) relatively and respectively, the axis direction of first direction and second direction and roller bearing 110 (as ± the Y direction) parallel.
At first, substrate 101 is placed on the above-mentioned conveyer 100, makes substrate 101 move on the roller bearing 110 along the normal direction of load plane A (as-Z direction) by two rakes 130 and 140 tops.In general, the method that substrate 101 is inserted by the top has a variety of, comprise by inserting behind the mechanical arm absorption substrate, with load-transfer device substrate is imported by the top, or utilize liftable carrier bearing substrate etc., in Fig. 3 A, be that example is illustrated with the carrier, the lifter 104 that is arranged on the base 102 is risen, make that be arranged at carrier 106 on the lifter 104 is positioned at first end 132 that is higher than two rakes 130 and 140 and 142 position, carrier 106 is accepted after the substrate 101, and lifter 104 begins descend (just the normal direction along load plane moves).
Be noted that the first correcting assembly 120 of present embodiment can place process correcting substrate on the roller bearing in substrate.For instance, be partial to rake 130 as shown in Figure 3A when crooked, in the processes that substrate 101 continues to descend, can touch rake 130 earlier, shown in Fig. 3 B when substrate 101.Substrate 101 is glided along rake 130 by gravity, can slide on the roller bearing 110 at last, and between two rakes 130 and 140.
The correcting method of present embodiment can may further comprise the steps: adjust the distance between two rakes 130 and 140, make the distance between two rakes 130,140 and the load plane A intersection approximate the width of substrate greatly.Thus, when substrate 101 along two rakes 130 and after sliding to roller bearing 110 140 times, substrate 101 just can be restricted on the predeterminated position, and can not produce deflection.The method and the device of the correcting substrate that present embodiment proposes can be widely used in the small-medium size substrate, for example are 6.5 "~17 " substrates.
At last, a plurality of roller bearings 110 that roll, the roller bearing 110 of rolling can drive the substrate 101 that is positioned at roller bearing 110 tops and move, and makes that conveyer 100 can be along transmitting substrate 101 perpendicular to the third direction of first direction (as shown in Figure 1+directions X).When substrate 101 was mobile along third direction (as+directions X), substrate 101 still continued to be subjected to the rake 130 of the first correcting assembly 120 and 140 effect and continues correcting substrate 101.That is to say, the process that substrate 101 is placed the process on the roller bearing 110 and transmitted substrates 101 by roller bearing 110, two rakes 130 and 140 all continue the function of performance correcting, make substrate 101 before entering board inlet 99, can reduce the fragmentation quantity that causes because of substrate offset collisions board smoothly by correcting.Compared to traditional correcting method, the method for the correcting substrate of present embodiment can be reduced whole manufacturing time effectively, avoids output value loss.
In addition, conveyer 100 also can comprise two groups of correcting assemblies (being the above-mentioned first correcting assembly 120 and the second correcting assembly 120 '), substrate can be comprised along the step that the normal direction of load plane moves to roller bearing: substrate 101 is moved to roller bearing 110 by four rakes 130,140,130 ', 140 ' top along the normal direction of load plane A (as-Z direction), thus, substrate 101 is promptly successfully finished by correcting in this moving process, more effectively reduce whole manufacturing time, avoid output value loss.
On the other hand, with regard to the correcting effect, the transmission of present embodiment and the board device of correcting and method meet the requirement of original board for the correcting scope.For instance, when the angle of inclination of rake is 60 degree angles, the width of support is 30mm, highly is 100mm for the rake of 60mm is about, about can correcting skew 30mm with interior or deviation angle 15 degree with interior substrate, but the correcting scope that calculates is 220~350mm, it falls within the former factory rules and regulations of former machine and decides scope (in 228~349mm), and thickness is that the substrate of 0.4mm is still applicable.
The device and method of transmission that the above embodiment of the present invention is disclosed and correcting substrate, it is provided with the correcting assembly between roller bearing, make substrate can finish correcting in the process that is put in conveyer down, shortens manufacturing time, avoids output value loss.In addition, present embodiment need not digital control software, also need not to reequip board, as long as being set simply, correcting assembly rake can bring into play the correcting effect on original board, reduce cost significantly and effectively reduce follow-up maintenance cost, and correcting is respond well, is suitable for existing board specification.
In sum, though the present invention with the preferred embodiment disclosure as above, yet it is not in order to limit the present invention.The personnel that have common knowledge in the technical field of the invention without departing from the spirit and scope of the present invention, can do various changes and retouching.Therefore, protection scope of the present invention is as the criterion when looking the scope that appending claims defines.

Claims (24)

1. conveyer comprises:
A plurality of roller bearings constitute a load plane, and described a plurality of roller bearings roll in order to transmit a substrate; And
The first correcting assembly, be located between wherein two roller bearings of described a plurality of roller bearings, this first correcting assembly has two rakes that intersect with this load plane, described two rakes tilt relatively and respectively in the opposite direction, described two rakes respectively have one first end that is higher than this load plane and one second end that is lower than this load plane, and the distance between first end of described two rakes is greater than the distance between second end of described two rakes.
2. conveyer as claimed in claim 1, the distance between wherein said two rakes and this load plane intersection approximates the width of this substrate greatly.
3. conveyer as claimed in claim 1, wherein this conveyer also comprises:
One base, wherein said a plurality of roller bearings and this first correcting assembly are arranged on this base;
One lifter is arranged on this base; And
One carrier is arranged on this lifter, in order to carry this substrate.
4. conveyer as claimed in claim 1, wherein this conveyer also comprises:
The second correcting assembly, be arranged at wherein between other two roller bearings of described a plurality of roller bearings, this second correcting assembly comprises two rakes in addition that intersect with this load plane, described two rakes in addition tilt relatively and respectively in the opposite direction, described two rakes in addition respectively have one first end that is higher than this load plane and one second end that is lower than this load plane, and the distance between first end of described two rakes in addition is greater than the distance between second end of described two rakes in addition;
Distance between wherein said two rakes in addition and this load plane intersection approximates the width of this substrate greatly.
5. conveyer as claimed in claim 4, wherein the distance between this first correcting assembly and this second correcting assembly is less than the length of this substrate.
6. conveyer as claimed in claim 4, wherein said a plurality of roller bearing is arrangement in parallel in fact, the axis direction of described a plurality of roller bearings is defined as first direction, transmit this substrate along the second direction perpendicular to this first direction when described roller bearing rolls, this first correcting assembly and this second correcting assembly are arranged along this second direction.
7. conveyer as claimed in claim 1, wherein the angle of each rake and this load plane is more than or equal to 45 degree.
8. conveyer as claimed in claim 1, wherein the angle of each rake and this load plane is between 45 degree and 60 degree.
9. conveyer as claimed in claim 3, wherein this first correcting assembly comprises:
One slide rail is arranged on this base;
Two supports are arranged on this slide rail, and can move in this slide rail, and wherein said two rakes are arranged at respectively on described two supports.
10. conveyer as claimed in claim 9, each normal direction along this load plane of wherein said two supports moves back and forth between the primary importance and the second place, wherein when described two supports were positioned at this primary importance, described two supports and this base laid respectively at the both sides of this load plane.
11. conveyer as claimed in claim 9, each normal direction along this load plane of wherein said two supports moves back and forth between the primary importance and the second place, wherein when described two supports were positioned at this second place, described two supports and this base were positioned at the same side of this load plane.
12. conveyer as claimed in claim 9, wherein said two supports also comprise a support jacking system.
13. conveyer as claimed in claim 1, wherein said two rakes are made by engineering plastics.
14. a correcting structure, in order to being installed in the conveyer, the load plane that this conveyer has a base and is positioned at this base top, this correcting structure comprises:
One first correcting assembly comprises:
Two first supports, be arranged on this base and wherein two roller bearings of a plurality of roller bearings of this conveyer between; With
Two first rakes, be arranged at respectively on described two first supports, described two first rakes and this load plane intersect, distance between wherein said two first rakes and this load plane intersection approximates the width of a substrate greatly, described two first rakes tilt relatively and respectively in the opposite direction, described first rake respectively has first end that is higher than this load plane and second end that is lower than this load plane, and the distance between first end of described two first rakes is greater than the distance between second end of described two first rakes; And
One second correcting assembly comprises:
Two second supports are arranged on this base and wherein between other two roller bearings of described a plurality of roller bearings; With
Two second rakes, be arranged at respectively on described two second supports, described two second rakes and this load plane intersect, distance between wherein said two second rakes and this load plane intersection approximates the width of a substrate greatly, described two second rakes tilt relatively and respectively in the opposite direction, described second rake respectively has first end that is higher than this load plane and second end that is lower than this load plane, and the distance between first end of described two second rakes is greater than the distance between second end of described two second rakes.
15. correcting structure as claimed in claim 14, the angle of wherein said two first rakes and this load plane is more than or equal to 45 degree.
16. correcting structure as claimed in claim 14, the angle of wherein said two first rakes and this load plane is between 45 degree and 60 degree.
17. correcting structure as claimed in claim 14, wherein this first correcting assembly also comprises a slide rail, and this slide rail is arranged on this base, and described two first supports are mounted slidably on this slide rail.
18. correcting structure as claimed in claim 14, wherein said two first rakes are made by engineering plastics.
19. one kind is transmitted and the method for correcting substrate, carry out by a conveyer, this conveyer comprises a plurality of roller bearings and between described a plurality of roller bearings first correcting assembly between two roller bearings wherein, this first correcting assembly comprises two rakes, described rake protrudes in a load plane that is made of described a plurality of roller bearings, described two rakes tilt towards first direction and the second direction opposite with this first direction relatively and respectively, this first direction and this second direction are parallel with the axis direction of described a plurality of roller bearings, and this method comprises the steps:
One substrate is moved downward on described a plurality of roller bearing by the normal direction of described two rakes top along this load plane; And
The described a plurality of roller bearing that rolls makes this conveyer transmit this substrate along the third direction perpendicular to this first direction.
20. method as claimed in claim 19, wherein this conveyer also comprises the second correcting assembly, this second correcting assembly is arranged at wherein between other two roller bearings of described a plurality of roller bearings, this second correcting assembly comprises two rakes in addition, described two rakes in addition tilt relatively and respectively in the opposite direction, wherein the distance between this first correcting assembly and this second correcting assembly is less than the length of this substrate, and wherein the step that moves down of this substrate is:
This substrate is moved downward on described a plurality of roller bearing by the normal direction along this load plane above described two rakes top and described other two rakes, with this substrate of correcting.
21. method as claimed in claim 19, wherein this method also comprises:
Adjust the distance between described two rakes, make the distance between described two rakes and this load plane intersection approximate the width of this substrate greatly.
22. method as claimed in claim 19, wherein said two rakes are made by engineering plastics.
23. method as claimed in claim 19, wherein the angle of each rake and this load plane is more than or equal to 45 degree.
24. method as claimed in claim 19, wherein the angle of each rake and this load plane is between 45 degree and 60 degree.
CN2008100832110A 2008-03-04 2008-03-04 Transfer device, guiding structure, and method for transferring and guiding substrate Expired - Fee Related CN101234702B (en)

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CN102000810A (en) * 2010-11-29 2011-04-06 苏州中门子科技有限公司 Stock-supporting conveying device in copper-aluminum composite row casting system
CN103662845A (en) * 2012-09-03 2014-03-26 扬州市力神吊装设备制造有限公司 Hydraulic straightening platform
WO2014067179A1 (en) * 2012-11-02 2014-05-08 深圳市华星光电技术有限公司 Transfer apparatus and transfer method used for glass substrate
CN104016117A (en) * 2014-05-28 2014-09-03 京东方科技集团股份有限公司 Forked plate capable of automatically adjusting position of base plate and adjustment method
CN104386521A (en) * 2014-09-24 2015-03-04 江苏鑫成铜业有限公司 Copper plate collection roller way
CN107601043A (en) * 2017-08-23 2018-01-19 武汉华星光电半导体显示技术有限公司 Base plate transfer device
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CN108382814A (en) * 2018-04-25 2018-08-10 苏州工业职业技术学院 A kind of material guide device and production line
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CN110355117A (en) * 2019-06-10 2019-10-22 惠科股份有限公司 A kind of crystal liquid substrate distribution of goods method and its distribution of goods system

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FR2772358B1 (en) * 1997-12-16 2000-03-10 Materiel Arboriculture DEVICE FOR CONVEYING PRODUCTS, ESPECIALLY FRUIT, FOR SUPPLYING A SORTING UNIT FOR SAID PRODUCTS
CN2322755Y (en) * 1998-05-07 1999-06-09 张进升 Automatic corrector for electronic parts arranging machine
CN2509131Y (en) * 2001-11-15 2002-09-04 哈尔滨博实自动化设备有限责任公司 Inclined roller type leather belt aligner for belt conveyer

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CN102000810A (en) * 2010-11-29 2011-04-06 苏州中门子科技有限公司 Stock-supporting conveying device in copper-aluminum composite row casting system
CN102000810B (en) * 2010-11-29 2012-10-10 苏州中门子科技有限公司 Stock-supporting conveying device in copper-aluminum composite row casting system
CN103662845A (en) * 2012-09-03 2014-03-26 扬州市力神吊装设备制造有限公司 Hydraulic straightening platform
WO2014067179A1 (en) * 2012-11-02 2014-05-08 深圳市华星光电技术有限公司 Transfer apparatus and transfer method used for glass substrate
US9358651B2 (en) 2014-05-28 2016-06-07 Boe Technology Group Co., Ltd. System and method for automatically adjusting a position of a panel on a chuck
CN104016117A (en) * 2014-05-28 2014-09-03 京东方科技集团股份有限公司 Forked plate capable of automatically adjusting position of base plate and adjustment method
CN104016117B (en) * 2014-05-28 2017-01-18 京东方科技集团股份有限公司 Forked plate capable of automatically adjusting position of base plate and adjustment method
CN104386521A (en) * 2014-09-24 2015-03-04 江苏鑫成铜业有限公司 Copper plate collection roller way
CN107601043A (en) * 2017-08-23 2018-01-19 武汉华星光电半导体显示技术有限公司 Base plate transfer device
CN107618838A (en) * 2017-08-28 2018-01-23 台山市万通罐机工业有限公司 A kind of numerical-control feed machine
CN108382814A (en) * 2018-04-25 2018-08-10 苏州工业职业技术学院 A kind of material guide device and production line
CN108408372A (en) * 2018-04-25 2018-08-17 苏州工业职业技术学院 A kind of production ancillary equipment and production line
CN110355117A (en) * 2019-06-10 2019-10-22 惠科股份有限公司 A kind of crystal liquid substrate distribution of goods method and its distribution of goods system
CN110355117B (en) * 2019-06-10 2021-07-02 惠科股份有限公司 Liquid crystal substrate distribution method and distribution system thereof

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