CN101213462A - Electric field/magnetic field sensor and method for fabricating them - Google Patents
Electric field/magnetic field sensor and method for fabricating them Download PDFInfo
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- CN101213462A CN101213462A CNA2006800241393A CN200680024139A CN101213462A CN 101213462 A CN101213462 A CN 101213462A CN A2006800241393 A CNA2006800241393 A CN A2006800241393A CN 200680024139 A CN200680024139 A CN 200680024139A CN 101213462 A CN101213462 A CN 101213462A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/24—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
- G01R15/247—Details of the circuitry or construction of devices covered by G01R15/241 - G01R15/246
Abstract
The invention provides an electric field/ magnetic field sensor and the production method. The electric field sensor is obtained by directly forming an electric optical film with the structure of Fabry-Perot resonator on a grinding surface of the top of an optical fiber by an aerosol deposition method.
Description
Technical field
The present invention relates to electric field/magnetic field sensor and their manufacture method, particularly be applicable to the electric field/magnetic field sensor with high sensitivity, high spatial resolution in fine field of LSI chip/encapsulation and their manufacture method.
Background technology
Patent documentation 1 (the Japanese documentation spy opens clear 59-166873 communique) and patent documentation 2 (the Japanese documentation spy opens flat 2-28574 communique) disclose the sensor and the detection system that are used to detect physical quantitys such as electric field or magnetic field.
Fig. 1 is the sectional view of structure that expression utilizes the existing high spatial resolution electric-field sensor of optical tech, and Fig. 2 is the figure of an example of the expression detection system of having utilized the electric-field sensor among Fig. 1.
With reference to Fig. 1, electric-field sensor 905 is bonded in the top of fiber optics 901 by adhesive linkage 906.Electric-field sensor 905 comprises as the small electric optical crystal 907 of electric field detecting element and the dielectric multilayer reflection horizon 908 that is used to reflect the light of the bottom surface that imposes on electric optical crystal 907.
With reference to Fig. 2, detection system comprises continuous laser source 900, fibre amplifier 902,911, polarisation controller 903, light circulator 904, be arranged on electric-field sensor 905, analyzer 910, photoelectric detector 912 as circuit substrate 909 tops of measuring object, connect fiber optics 901 and optical spectrum analyser 913 between them.
The electric field of following this detection system of brief description detects principle.The light that penetrates from continuous laser source 900 amplifies by fibre amplifier 902, behind polarisation controller 903 control plane of polarisations, incides in the electric-field sensor 905 by light circulator 904.The incident light of electric-field sensor 905 turns back to fiber optics 901 after being applied in dielectric multilayer reflection horizon 908 reflection on electric optical crystal 907 bottom surfaces once more.Because by the electric field that produces from circuit substrate 909 refractive index of electric optical crystal 907 is changed, therefore the polarized condition of the laser of propagating in crystallization changes, and the intensity of acceptance and external electrical field is modulated accordingly.Light after the modulation is converted to intensity-modulated light by light circulator 904 backs by analyzer 910 once more, after being amplified by fibre amplifier 911, is converted to electric signal by photoelectric detector 912.
Electric signal is detected by optical spectrum analyser 913, and the peak value that take place this moment is taken as the signal that causes because of external electrical field.For the principle of this detection system, because signal intensity is according to the intensity of external electrical field and difference, therefore the position by the electric-field sensor 905 on the change circuit substrate 909 can obtain Electric Field Distribution.
In addition, by the electric optical crystal 907 among Fig. 1 is replaced with the magneto-optical crystallization, then the system of Fig. 2 becomes the magnetic field sensing system with high spatial resolution.For the magnetic field detection principle of this moment, can replace with " magnetic field " by " electric field " in the explanation that above-mentioned electric field is detected principle and describe.
As mentioned above, existing electric field detection system or magnetic field sensing system with high spatial resolution be characterised in that, has on the top of fiber optics 901 to be bonded with by the structure of little finished electric optical crystal or magneto-optical crystallization.
The suitable application area of electric field detection system or magnetic field sensing system and spatial resolution are subjected to the size restrictions of electric optical crystal or magneto-optical crystallization, and size is more little, can be applicable to more small field more, and spatial resolution is also high more.Spatial resolution determines that by the volume of the sensor light of propagating the more little spatial resolution of the volume of sensor light is high more in crystallization.For example, be bonded with the existing magnetic field sensor of magneto-optical crystallization, use the crystallization of planar dimension 270 μ m * 270 μ m, thickness 11 μ m, can realize having the magnetic field sensor of the spatial resolution of 10 μ m levels for top at fiber optics.
But in such structure, because the bottleneck of the micro-processing technology of crystallization, the further miniaturization, high spatial resolutionization that therefore realizes sensor be difficulty comparatively then, and the sensor in the fine field that goes for LSI chip, encapsulation can't be provided.
In addition, as mentioned above, for the sensor of existing type, owing to crystallization is bonded in the top of fiber optics, therefore the loss that can produce light at adhesive linkage, this loss will cause the muting sensitivityization of sensor, thus small electrical field or the magnetic field detected by generations such as LSI chips also become difficult.
Summary of the invention
The objective of the invention is to realize than existing electric field/magnetic field sensor miniaturization and have the sensor of high sensitivity, high spatial resolution, and the sensor in the fine field that goes for LSI chip, encapsulation is provided.
The present invention is based on following opinion and finishes, that is: for realize having high sensitivity, high-resolution electric field/magnetic field sensor, electric optical layers or magneto-optical layer are formed directly into the top of fiber optics with film.
Electric-field sensor of the present invention is characterised in that electric optical layers is formed directly into the top of fiber optics.By becoming such formation, can make electric optical layers filming, thereby can realize high resolving power.In addition, can utilize interference effect, realize high sensitivity.
The feature of electric-field sensor of the present invention also is, directly forms electric optical layers on the top of fiber optics, forms the reflection horizon on the surface of electric optical layers.Electric-field sensor of the present invention also by on the top of fiber optics with the reflection horizon on the reflection horizon of electric optical layers, bottom and top with from the direct lamination of mode of clamping this electric optical layers up and down at fiber optics formation Fabry pendant Lip river resonator, can realize high sensitivityization.
Preferably, the diameter d of electric optical layers satisfies the relation of dc≤d≤dr between the diameter d c of the core of fiber optics and metalclad diameter d r.
In addition, be t 〉=1 μ m by the thickness t that makes electric optical layers, can improve the Q value of Fabry pendant Lip river resonator, thereby realize high sensitivityization.Particularly preferably be, electric optical layers is by air supporting sedimentation film forming.According to the air supporting sedimentation,, therefore can improve sensitivity owing to can form the electric blooming of the above thickness of 1 μ m.
Electric optical layers consist of lead zirconate titanate, be added with lanthanum lead zirconate titanate, barium titanate, be added with strontium barium titanate, be added with some in the potassium niobate of tantalum.
Magnetic field sensor of the present invention is characterised in that the magneto-optical layer is formed directly into the top of fiber optics.By becoming this formation, can make the filming of magneto-optical layer, thereby can realize high resolving power.In addition, can utilize interference effect, realize high sensitivityization.
The feature of magnetic field sensor of the present invention also is, directly forms the magneto-optical layer on the top of fiber optics, forms the reflection horizon on the surface of magneto-optical layer.Magnetic field sensor of the present invention also by on the top of fiber optics with the reflection horizon on the reflection horizon of magneto-optical layer, bottom and top to constitute Fabry pendant Lip river resonator at fiber optics from the direct lamination of mode of this magneto-optical layer of clamping up and down, can realize high sensitivityization.
Preferably, the diameter d of magneto-optical layer satisfies the relation of dc≤d≤dr between the diameter d c of the core of fiber optics and metalclad diameter d r.
In addition, be t 〉=1 μ m by the thickness t that makes the magneto-optical layer, can improve the Q value of Fabry pendant Lip river resonator, thereby realize high sensitivityization.Particularly preferably be, the magneto-optical layer is by air supporting sedimentation film forming.According to the air supporting sedimentation,, therefore can improve sensitivity owing to can form the magneto-optical film of the above thickness of 1 μ m.
The magneto-optical layer is the ferrite with a certain structure in garnet structure, spinel structure, the magneto-plumbite type structure.In addition, the magneto-optical layer also can be for comprising in iron, nickel, the cobalt ferromagnetism film of any.
According to the present invention, a kind of manufacture method of electric-field sensor is provided, it is characterized in that the electric optical layers that refractive index is changed according to electric field is formed directly into the top of fiber optics.In addition, also can form the reflection horizon on the surface of electric optical layers.
According to the present invention, a kind of manufacture method of electric-field sensor also is provided, it is characterized in that, may further comprise the steps: the top that first reflection horizon is formed directly into fiber optics; The electric optical layers that refractive index is changed according to electric field is formed directly on described first reflection horizon; Second reflection horizon is formed directly on the described electric optical layers.
In addition, in above-mentioned manufacture method, replace electric optical layers according to the magneto-optical layer that magnetic field changes, the manufacture method of magnetic field sensor can be provided by forming refractive index.
In addition, according to the present invention, can provide the electric field detection system with above-mentioned electric-field sensor, magnetic field sensing system with above-mentioned magnetic field sensor.
Description of drawings
Fig. 1 is the sectional view of the structure of the existing electric-field sensor of expression;
Fig. 2 is the block diagram of structure that expression has utilized the electric field detection system of the electric-field sensor among Fig. 1;
Fig. 3 is the sectional view of structure of the electric-field sensor of expression first embodiment of the invention;
Fig. 4 is the block diagram of structure that expression has utilized the electric field detection system of the electric-field sensor among Fig. 3;
Fig. 5 is the figure that simulation illustrates the SEM photo of electric-field sensor of the present invention;
Fig. 6 is the figure of the reflectance spectrum of expression electric-field sensor of the present invention and existing electric-field sensor;
Fig. 7 represents the figure of the Electric Field Distribution of the Electric Field Distribution of electric-field sensor of the present invention and existing electric-field sensor;
Fig. 8 is illustrated in the sectional view that can further improve second embodiment of transducer sensitivity in the electric-field sensor of the present invention;
Fig. 9 is illustrated in the sectional view of comparing the 3rd embodiment that can further improve transducer sensitivity in the electric-field sensor of the present invention with second embodiment of Fig. 8;
Figure 10 is the figure of thickness correlativity of PZT of the reflectance spectrum of expression electric-field sensor of the present invention;
Figure 11 is the sectional view of the structure of expression magnetic field sensor of the present invention;
Figure 12 is the block diagram of structure of the magnetic field sensing system of the expression magnetic field sensor that utilizes Figure 11.
Embodiment
With reference to accompanying drawing embodiments of the invention are described.
Fig. 3 is the sectional view of structure of the electric-field sensor of expression first embodiment of the invention, and Fig. 4 is the block diagram of structure of the electric field detection system of the expression electric-field sensor that utilizes Fig. 3.
With reference to Fig. 3, electric-field sensor 105 comprises: constitute the core layer 106 of fiber optics 101, the clad 107 that surrounds core layer 106 and the electric optical layers 108 that is formed on the top ends of fiber optics 101.The top ends of fiber optics 101 is processed smooth by grinding, and electric optical layers 108 is formed directly on its abrasive surface.
With reference to Fig. 4, the electric field detection system comprises continuous laser source 100, fibre amplifier 102,112, polarisation controller 103, light circulator 104, be arranged on electric-field sensor 105, analyzer 111, photoelectric detector 113 as circuit substrate 109 tops of measuring object, be connected fiber optics 101 and optical spectrum analyser 114 between them.
The laser that penetrates from continuous laser source 100 amplifies by fibre amplifier 102, behind polarisation controller 103 control plane of polarisations, incides in the electric-field sensor 105 by light circulator 104.Because the electric field that takes place from circuit substrate 109 can make the refractive index of electric optical layers 108 change, so the polarized condition of reflector laser 110 changes.Emission laser 110 is converted to the light of representing polarized condition by light circulator 104 by analyzer 111, after being amplified by fibre amplifier 112, is converted to electric signal by photoelectric detector 113.The electric signal that is converted to is analyzed by optical spectrum analyser 114.
Because the resolution relevant with the variable quantity of the polarized condition that causes because of electric-field sensor 105 is determined by the thickness of electric optical layers 108, therefore preferred thin electric optical layers 108.In addition, it is long-pending that electric-field sensor 105 is output as the thickness of the electric optical coefficient of the change of refractive amount that expression causes because of electric field and electric optical layers 108.Therefore, in order to satisfy high resolving power and high output simultaneously, make the electric optical layers 108 as Sensor section have interference effect, the optical path length that prolongs on apparent is very important.
In existing example shown in Figure 1, though adopted the electric optics thin layerization that makes bulk and made its structure that is bonded in the top of fiber optics,, in such structure, make and the depth of parallelism of fiber optics end face difficulty comparatively then, can't obtain sufficient interference effect.In addition, for the thin layerization of big block part, about 10 μ m the limit in the processing, can't improve resolution.
In the present embodiment, by electric optical layers 108 usefulness films being formed directly into the top of fiber optics 101, realize having high sensitivity, high-resolution electric-field sensor.
Electric optical layers 108 forms by air supporting sedimentation (aerosol deposition), and this method applies the mechanical impact force load to the ultramicron hard brittle material and makes its pulverizing, engages then and be formed into body.Thickness is 9 microns.With Pb (Zr
0.6Ti
0.4) O
3(below, be called PZT) as material powder film forming under the following conditions, that is: be that the incident angle of carrier gas, nozzle and substrate is that 10 degree, gas flow are that distance is that 5mm, film forming speed are 0.8 μ m/min, the vibration number that adds the device that shakes is 250rpm between 12 liters/minute, nozzle plate with oxygen.
After the film forming, in atmosphere,, manifest the electric optical effect of electric optical layers 108 by in the thermal treatment of carrying out under 600 ℃ about 15 minutes.And, 200 ℃, apply under the condition of the electric field about 100Kv/cm, carry out split pole and handle.Once electric optical coefficient r
33Be 200pm/V.
Fig. 5 simulation shows the SEM photo of PZT film 202 that is formed on the end of fiber optics 201 by the air supporting sedimentation.PZT film 202 is close to the end of fiber optics 201, forms with 9 microns thickness.The air supporting sedimentation is characterised in that the thick film that can form the composite oxides of similar PZT at short notice.
After the thermal treatment, concavo-convex for the film surface of removing electric optical layers 202 (108), and it is ground to 7 microns of thickness and makes its planarization.
Fig. 6 represents the wavelength dependence of the film flattening surface back reflection amount of electric optical layers 202 (108).301 is reflectance spectrum of the present invention, can obtain the degree of modulation about 30dB.This shows that the electric optical layers by being formed by the present invention can obtain bigger resonant structure, is suitable as the EO sensor.320 expressions are used for comparison and use the reflectance spectrum of EO sensor of the EO crystallization of existing example.In existing example, degree of modulation is about 2dB, thereby can't obtain sufficient resonant structure.
In the above description, the composition of the electric optical layers when consisting of PZT is illustrated, and still, is not limited to this composition, for example, also can be the composition that has added La.
In addition, except the material of lead zirconate titanate system, the barium titanate that electric optical effect is bigger, strontium also are effective material for barium titanate, tantalum for potassium niobate etc.
In the present invention, the film forming of electric optical layers 108 use air supporting sedimentation also is one of feature of invention.It is the reasons are as follows.
One of purpose of the present invention be to provide have high sensitivity, high-resolution electric-field sensor.For this reason, the top that electric optical layers 108 usefulness films are formed directly into fiber optics 101 seems very important.In addition, in order to obtain high interference effect, the thickness of preferred electric optical layers 108 is more than the 1 μ m.Will glass, plastics, comprise high molecular resin or the dielectric formed arbitrarily on realize the strong dielectric hyaline membrane of 1 μ m, use very difficulty of sputtering method in the existing technology or sol/gel method, and use the air supporting sedimentation to realize easily.
The diameter d of electric optical layers 108 satisfies the outbalance that concerns of dc≤d≤dr between the diameter d r of the diameter d c of the core 106 of fiber optics 101 and clad 107.When diameter d is dc when following,, therefore can't obtain sufficient reflection light quantity because scattering can take place incident laser.In addition, form more than the diameter d r of clad 107 also very difficult by the film forming gimmick.
It is that the top of the three-way crooked distribution of 5 μ m uses the electric-field sensor 105 of present embodiment to measure the result of Electric Field Distribution and the result who uses existing electric-field sensor to measure that Fig. 7 is illustrated in the distribution width/space.Apply the signal of 10MHz, 15dBm to crooked distribution.Fig. 7 is configured in the position of top 10 μ m of distribution and the distribution that obtains when it is scanned with 1 μ m spacing with electric-field sensor on the direction of transversal distribution.The peak electric field of using existing sensor to observe between adjacent wiring is unclear, relative therewith, can clearly observe peak electric field by using sensor of the present invention.That is, Fig. 7 is expression electric-field sensor of the present invention has high spatial resolution than existing electric-field sensor a example.
Fig. 8 is the sectional view of formation of the electric-field sensor of the expression second embodiment of the present invention, shows the structure that can further improve transducer sensitivity.For present embodiment, on the surface of the electric optical layers 508 identical, added dielectric multilayer reflectance coating 504 with the electric optical layers 108 of the electric-field sensor of first embodiment.
In Fig. 8, for electric-field sensor 505, by core layer 506 and the top ends of surrounding the fiber optics 501 that its clad 507 constitutes be formed with electric optical layers 508.The top ends of fiber optics 501 is processed smooth by grinding, and electric optical layers 508 is formed directly on the abrasive surface of fiber optics 501.The formation of electric optical layers 508 and manufacture method are identical with first embodiment.
On the electric optical layers 508 of planarization, use ion plating method to form dielectric multilayer reflection horizon 504.Dielectric multilayer reflectance coating 504 is the SiO of 303nm by repeating film forming thickness
2Film and thickness are the Ta of 186nm
2O
5Film and constituting.When film forming, the limit is by monitor measuring light optical spectra, and the control of thickness is carried out by opening and closing the shutter on the vapor deposition source in the limit.Can when reducing, improve interference effect by using dielectric multilayer film reflection horizon 504 to the electric field effects of measuring.
Fig. 9 is the sectional view of formation of the electric-field sensor of the expression third embodiment of the present invention, shows the structure that can further improve transducer sensitivity.For present embodiment, by with from the mode of the identical electric optical layers 608 of the electric optical layers 108 of clamping up and down and the electric-field sensor of first embodiment with the dielectric multilayer film reflection horizon 604 direct laminations of the dielectric multilayer film reflection horizon 603 of downside and upside top ends at fiber optics 601, form Fabry pendant Lip river resonator structure.
For electric-field sensor 605, be formed with the dielectric multilayer film reflection horizon 603 of downside in the top ends of the fiber optics 601 that constitutes by core layer 606 and the clad 607 that surrounds it.The top ends of fiber optics 601 is processed smooth by grinding, and the dielectric multilayer film reflection horizon 603 of downside is formed directly on the abrasive surface of fiber optics 601.
The dielectric multilayer film reflection horizon 603 of downside is formed by ion plating method.The dielectric multilayer film reflection horizon 603 of downside is the SiO of 303nm by repeating film forming thickness
2Film and thickness are the Ta of 186nm
2O
5Film and constituting.When film forming, the limit is by monitor measuring light optical spectra, and the control of thickness is carried out by opening and closing the shutter on the vapor deposition source in the limit.On the dielectric multilayer film reflection horizon 603 of downside, form the dielectric multilayer film reflection horizon 604 of electric optical layers 608, upside.The formation and the manufacture method in the dielectric multilayer film reflection horizon 604 of electric optical layers 608 and upside are identical with second embodiment.
Figure 10 represents the thickness correlativity of electric optical layers PZT of the reflectance spectrum of the 3rd embodiment.Along with the thickness thickening of PZT, the half-amplitude of the resonance peak that reflectivity descends diminishes.Because in highly sensitive sensing, Q value need be more than 1000, so more than the thickness PZT needs 1 μ m.
Figure 11 is the sectional view of structure of expression magnetic field sensor of the present invention, and Figure 12 is the block diagram of formation of the magnetic field sensing system of the expression magnetic field sensor that uses Figure 11.
With reference to Figure 11, magnetic field sensor 805 comprises: constitute the core layer 806 of fiber optics 801, the clad 807 that surrounds core layer 806 and the magneto-optical layer 808 that is formed on the top ends of fiber optics 801.The top ends of fiber optics 801 is processed smooth by grinding, and magneto-optical layer 808 is formed directly on the abrasive surface of fiber optics 801.
With reference to Figure 12, magnetic field sensing system comprises continuous laser source 800, fibre amplifier 802,812, polarisation controller 803, light circulator 804, is arranged on as the electric-field sensor 805 on the circuit substrate 809 of measuring object, analyzer 811, photoelectric detector 813, connects fiber optics 801 and optical spectrum analyser 814 between them.
The laser that penetrates from continuous laser source 800 amplifies by fibre amplifier 802, behind polarisation controller 803 control plane of polarisations, incides in the electric-field sensor 805 by light circulator 804.
Owing to by the magnetic field that produces from circuit substrate 809 faraday's rotation angle of magneto-optical layer 808 is changed, so the polarized condition of reflector laser 810 changes.Emission laser 810 is converted to the light of representing polarized condition by light circulator 804 by analyzer 811, after being amplified by fibre amplifier 812, is converted to electric signal by photoelectric detector 813.The electric signal that is converted to can be analyzed by optical spectrum analyser 814.
Because the resolution relevant with the variable quantity of the polarized condition that causes because of magnetic field sensor 805 is determined by the thickness of magneto-optical layer 808, therefore preferred thin electric optical layers 808.In addition, magnetic field sensor 805 is output as the amassing of thickness of faraday's rotation angle and magneto-optical layer 808.Therefore,, make magneto-optical layer 808 have interference effect, prolong then outbalance of apparent optical path length as Sensor section in order to satisfy high resolving power and high output simultaneously.In existing example, though adopted the magneto-optical parts thin layerization that makes bulk and made its structure that is bonded in the top of fiber optics,, make and the depth of parallelism of fiber optics end face difficulty comparatively then, can't obtain sufficient interference effect.In addition, for the thin layerization of big block part, about 10 μ m the limit in the processing, can't improve resolution.
In the present embodiment, by magneto-optical layer 808 usefulness film being formed directly into the top of fiber optics 801, realize high sensitivity, high-resolution magnetic field sensor.
Magneto-optical layer 808 forms by the air supporting sedimentation, and this method applies the mechanical impact force load to the ultramicron hard brittle material and makes its pulverizing, engages then and be formed into body.Thickness is 400nm.Film forming under the following conditions: with Bi for the YIG garnet as material powder, the incident angle that with oxygen is carrier gas, nozzle and substrate is that 30 degree, gas flow are that distance is that 5mm, film forming speed are 1.0 μ m/min, the vibration number that adds the device that shakes is 250rpm between 8 liters/minute, nozzle plate.
After the film forming, in atmosphere,, manifest the magneto-optical effect of magneto-optical layer 808 by in the thermal treatment of carrying out under 600 ℃ about 15 minutes.Faraday's rotation angle is 7deg/ μ m.After the thermal treatment, concavo-convex for the film surface of removing magneto-optical layer 808, and it is ground to thickness 3600nm and makes its planarization.
In the above description, be that example has illustrated the magneto-optical layer with Bi for the YIG garnet, still, be not limited to this composition, for example, also can be for adding the composition of Ce.
In addition, except the material of YIG garnet system, the ferrite with the some structures in spinel structure, the magneto-plumbite type structure that the magneto-optical effect is bigger etc. also is effective material.
In the present invention, the film forming of magneto-optical layer use air supporting sedimentation also is one of feature of invention.It is the reasons are as follows.
One of purpose of the present invention be to provide have high sensitivity, high-resolution magnetic field sensor.For this reason, the top that the magneto-optical layer is formed directly into fiber optics with film outbalance then.In addition, in order to obtain high interference effect, preferably its thickness is more than the 1 μ m.Will glass, plastics, comprise high molecular resin or the dielectric formed arbitrarily on realize the ferromagnetism body hyaline membrane of 1 μ m, use sputtering method in the existing technology or colloidal sol, gel method to realize, and can only use the air supporting sedimentation.
The diameter d of magneto-optical layer 808 satisfies the outbalance that concerns of dc≤d≤dr between the diameter d c of the core of fiber optics 801 and metalclad diameter d r.When the diameter d of magneto-optical layer 808 is the diameter d c of core when following,, therefore can't obtain sufficient reflection light quantity because scattering can take place incident laser.In addition, use the film forming gimmick to form more than the metalclad diameter d r magneto-optical layer 808 also very difficult.
And,, can use the thin layer that comprises ferromagnetism film some in iron, nickel, the cobalt as magneto-optical layer 808.
Magnetic field sensor of the present invention is not limited to the example of Figure 11, replaces with the magneto-optical film by the electric blooming with the electric-field sensor of first embodiment to the, three embodiment, can bring into play same effect.That is, also the reflection multilayer layer can be formed on the surface of the magneto-optical layer 808 in the magnetic field sensor 805 of Figure 11.
In addition, magnetic field sensor of the present invention also can have with the structure with the mode lamination of the first reflection multilayer layer and the second reflection multilayer layer magneto-optical layer 808 from the magnetic field sensor 805 of clamping Figure 11 up and down.
By above explanation as can be known, according to the present invention, can provide have high sensitivity, high-resolution electric field/magnetic field sensor.
Claims (38)
1. physical quantity transducer is characterized in that having:
Fiber optics; With
The physical optics layer is formed directly into the top of this fiber optics, and refractive index changes according to physical quantity.
2. the manufacture method of a physical quantity transducer is characterized in that,
The physical optics layer that refractive index is changed according to physical quantity is formed directly into the top of fiber optics.
3. electric-field sensor is characterized in that having:
Fiber optics; With
Electric optical layers is formed directly into the top of this fiber optics, and refractive index changes according to electric field.
4. electric-field sensor as claimed in claim 3 is characterized in that, also has the lip-deep reflection horizon that is formed on described electric optical layers.
5. electric-field sensor is characterized in that having:
Fiber optics;
First reflection horizon is formed directly into the top of this fiber optics;
Electric optical layers is formed directly on described first reflection horizon, and refractive index changes according to electric field; And
Second reflection horizon is formed directly on the described electric optical layers.
6. as each described electric-field sensor in the claim 3 to 5, it is characterized in that,
Between the diameter d c and metalclad diameter d r of the core of the diameter d of described electric optical layers and described fiber optics, the relation of dc≤d≤dr is set up.
7. as each described electric-field sensor in the claim 3 to 5, it is characterized in that the thickness t of described electric optical layers is t 〉=1 μ m.
8. as each described electric-field sensor in the claim 3 to 5, it is characterized in that described electric optical layers forms by becoming embrane method.
9. electric-field sensor as claimed in claim 8 is characterized in that, described electric optical layers forms by air supporting sedimentation film forming.
10. as each described electric-field sensor in the claim 3 to 5, it is characterized in that,
The lead zirconate titanate, barium titanate, strontium that consist of lead zirconate titanate, be added with lanthanum of described electric optical layers is for some in the potassium niobate of barium titanate, tantalum.
11. a magnetic field sensor is characterized in that having:
Fiber optics; With
The magneto-optical layer is formed directly into the top of this fiber optics, and refractive index changes according to magnetic field.
12. magnetic field sensor as claimed in claim 11 is characterized in that, also has the lip-deep reflection horizon that is formed on described magneto-optical layer.
13. a magnetic field sensor is characterized in that having:
Fiber optics;
First reflection horizon is formed directly into the top of this fiber optics;
The magneto-optical layer is formed directly on described first reflection horizon, and refractive index changes according to magnetic field; And
Second reflection horizon is formed directly on the described magneto-optical layer.
14. as each described magnetic field sensor in the claim 11 to 13, it is characterized in that,
Between the diameter d c and metalclad diameter d r of the core of the diameter d of described magneto-optical layer and described fiber optics, the relation of dc≤d≤dr is set up.
15., it is characterized in that the thickness t of described magneto-optical layer is t 〉=1 μ m as each described magnetic field sensor in the claim 11 to 14.
16., it is characterized in that described magneto-optical layer forms by becoming embrane method as each described magnetic field sensor in the claim 11 to 13.
17. magnetic field sensor as claimed in claim 16 is characterized in that, described magneto-optical layer forms by air supporting sedimentation film forming.
18. as each described magnetic field sensor in the claim 11 to 13, it is characterized in that,
Described magneto-optical layer is the ferrite with a certain structure in garnet structure, spinel structure, the magneto-plumbite type structure.
19., it is characterized in that described magneto-optical layer is the some ferromagnetism films that comprise in iron, nickel, the cobalt as each described magnetic field sensor in the claim 11 to 13.
20. the manufacture method of an electric-field sensor is characterized in that, the electric optical layers that refractive index is changed according to electric field is formed directly into the top of fiber optics.
21. the manufacture method of electric-field sensor as claimed in claim 20 is characterized in that, the reflection horizon is formed on the surface of described electric optical layers.
22. the manufacture method of an electric-field sensor is characterized in that, may further comprise the steps:
First reflection horizon is formed directly into the top of fiber optics;
The electric optical layers that refractive index is changed according to electric field is formed directly on described first reflection horizon; And
Second reflection horizon is formed directly on the described electric optical layers.
23. the manufacture method as each described electric-field sensor in the claim 20 to 22 is characterized in that,
Form in such a way: between the diameter d c and metalclad diameter d r of the diameter d of described electric optical layers and the core of described fiber optics, the relation establishment of dc≤d≤dr.
24. the manufacture method as each described electric-field sensor in the claim 20 to 22 is characterized in that, the thickness t of described electric optical layers is t 〉=1 μ m.
25. the manufacture method as each described electric-field sensor in the claim 20 to 22 is characterized in that, forms described electric optical layers by becoming embrane method.
26. the manufacture method of electric-field sensor as claimed in claim 25 is characterized in that, described electric optical layers forms by air supporting sedimentation film forming.
27. the manufacture method as each described electric-field sensor in the claim 20 to 22 is characterized in that,
The lead zirconate titanate, barium titanate, strontium that consist of lead zirconate titanate, be added with lanthanum of described electric optical layers is for some in the potassium niobate of barium titanate, tantalum.
28. the manufacture method of a magnetic field sensor is characterized in that, the magneto-optical layer that refractive index is changed according to magnetic field is formed directly into the top of fiber optics.
29. the manufacture method of magnetic field sensor as claimed in claim 28 is characterized in that, the reflection horizon is formed on the surface of described magneto-optical layer.
30. the manufacture method of a magnetic field sensor is characterized in that, may further comprise the steps:
First reflection horizon is formed directly into the top of fiber optics;
To be formed directly on described first reflection horizon by the magneto-optical layer that magnetic field changes refractive index; And
Second reflection horizon is formed directly on the described magneto-optical layer.
31. the manufacture method as each described magnetic field sensor in the claim 28 to 30 is characterized in that,
Form in such a way: between the diameter d c and metalclad diameter d r of the diameter d of described magneto-optical layer and the core of described fiber optics, the relation establishment of dc≤d≤dr.
32. the manufacture method as each described magnetic field sensor in the claim 28 to 30 is characterized in that, the thickness t of described magneto-optical layer is t 〉=1 μ m.
33. the manufacture method as each described magnetic field sensor in the claim 28 to 30 is characterized in that, forms described magneto-optical layer by becoming embrane method.
34. the manufacture method of magnetic field sensor as claimed in claim 33 is characterized in that, described magneto-optical layer forms by air supporting sedimentation film forming.
35. the manufacture method as each described magnetic field sensor in the claim 28 to 30 is characterized in that,
Described magneto-optical layer is the ferrite with a certain structure in garnet structure, spinel structure, the magneto-plumbite type structure.
36. the manufacture method as each described magnetic field sensor in the claim 28 to 30 is characterized in that, described magneto-optical layer is to comprise ferromagnetism film some in iron, nickel, the cobalt.
37. an electric field detection system is characterized in that, has as each described electric-field sensor in the claim 3 to 5.
38. a magnetic field sensing system is characterized in that, has as each described magnetic field sensor in the claim 11 to 13.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005191806 | 2005-06-30 | ||
| JP191806/2005 | 2005-06-30 | ||
| PCT/JP2006/313446 WO2007004691A1 (en) | 2005-06-30 | 2006-06-29 | Electric field/magnetic field sensor and method for fabricating them |
Publications (2)
| Publication Number | Publication Date |
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| CN101213462A true CN101213462A (en) | 2008-07-02 |
| CN101213462B CN101213462B (en) | 2012-08-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800241393A Expired - Fee Related CN101213462B (en) | 2005-06-30 | 2006-06-29 | Electric field/magnetic field sensor and method for fabricating them |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8153955B2 (en) |
| JP (1) | JP5170387B2 (en) |
| CN (1) | CN101213462B (en) |
| WO (1) | WO2007004691A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102472786A (en) * | 2009-07-10 | 2012-05-23 | 日本电气株式会社 | Electromagnetic field measuring device, electromagnetic field measuring method used for the measuring device, and non-transitory computer-readable medium in which electromagnetic field measurement control program is stored |
| TWI734843B (en) * | 2016-10-11 | 2021-08-01 | 德商賀利氏先進傳感器技術有限公司 | Method for producing a sensor, sensor and use of a sensor |
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| JP5163850B2 (en) * | 2007-03-05 | 2013-03-13 | 日本電気株式会社 | Electromagnetic field measuring device |
| JP2008298528A (en) * | 2007-05-30 | 2008-12-11 | Nec Corp | Optical film thickness monitor and coating device using the same |
| JP5151460B2 (en) * | 2007-12-25 | 2013-02-27 | 日本電気株式会社 | Magnetic probe |
| JP5376619B2 (en) | 2008-02-06 | 2013-12-25 | 日本電気株式会社 | Electromagnetic field measuring device |
| JP5230280B2 (en) * | 2008-06-16 | 2013-07-10 | 新光電気工業株式会社 | Probe card and circuit test apparatus |
| JP5590340B2 (en) * | 2009-06-29 | 2014-09-17 | 日本電気株式会社 | Electric field / magnetic field probe |
| EP3264110B1 (en) * | 2015-02-24 | 2022-05-18 | Hitachi, Ltd. | Optical fiber sensor and measurement device using same |
| US10845402B2 (en) | 2016-03-17 | 2020-11-24 | National Institute Of Information And Communications Technology | Electromagnetic field imaging device |
| JP6815001B2 (en) * | 2016-08-19 | 2021-01-20 | シチズンファインデバイス株式会社 | Magnetic field sensor element and magnetic field sensor device |
| JP7385210B2 (en) | 2019-09-27 | 2023-11-22 | シチズンファインデバイス株式会社 | Magnetic field sensor element and magnetic field sensor device |
| KR102451464B1 (en) * | 2020-06-26 | 2022-10-07 | 한국표준과학연구원 | Electromagnetic wave probe and electromagnetic wave detecting apparatus using the same |
| KR102514006B1 (en) * | 2020-09-08 | 2023-03-24 | 한국표준과학연구원 | Electromagnetic Wave Measuring Apparatus Using A Polarization Maintaining Optical Fiber |
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- 2006-06-29 WO PCT/JP2006/313446 patent/WO2007004691A1/en active Application Filing
- 2006-06-29 US US11/993,878 patent/US8153955B2/en not_active Expired - Fee Related
- 2006-06-29 CN CN2006800241393A patent/CN101213462B/en not_active Expired - Fee Related
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102472786A (en) * | 2009-07-10 | 2012-05-23 | 日本电气株式会社 | Electromagnetic field measuring device, electromagnetic field measuring method used for the measuring device, and non-transitory computer-readable medium in which electromagnetic field measurement control program is stored |
| CN102472786B (en) * | 2009-07-10 | 2014-09-03 | 日本电气株式会社 | Electromagnetic field measuring device and electromagnetic field measuring method |
| US8941402B2 (en) | 2009-07-10 | 2015-01-27 | Nec Corporation | Electromagnetic field measuring apparatus, electromagnetic field measuring method used for the same, and non-transitory computer readable medium storing electromagnetic field measurement control program |
| TWI734843B (en) * | 2016-10-11 | 2021-08-01 | 德商賀利氏先進傳感器技術有限公司 | Method for producing a sensor, sensor and use of a sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101213462B (en) | 2012-08-29 |
| WO2007004691A1 (en) | 2007-01-11 |
| US8519323B2 (en) | 2013-08-27 |
| US20090224753A1 (en) | 2009-09-10 |
| US20120164321A1 (en) | 2012-06-28 |
| US8153955B2 (en) | 2012-04-10 |
| JPWO2007004691A1 (en) | 2009-01-29 |
| JP5170387B2 (en) | 2013-03-27 |
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