CN101213318B - 用于生长单晶金属的方法和装置 - Google Patents
用于生长单晶金属的方法和装置 Download PDFInfo
- Publication number
- CN101213318B CN101213318B CN2006800243420A CN200680024342A CN101213318B CN 101213318 B CN101213318 B CN 101213318B CN 2006800243420 A CN2006800243420 A CN 2006800243420A CN 200680024342 A CN200680024342 A CN 200680024342A CN 101213318 B CN101213318 B CN 101213318B
- Authority
- CN
- China
- Prior art keywords
- metal sample
- heating
- polycrystalline
- polycrystalline metal
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 117
- 239000002184 metal Substances 0.000 title claims abstract description 117
- 239000013078 crystal Substances 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims abstract description 56
- 150000002739 metals Chemical class 0.000 title claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims description 54
- 230000008569 process Effects 0.000 claims description 13
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 11
- 239000003870 refractory metal Substances 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- 239000011733 molybdenum Substances 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 6
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 239000010955 niobium Substances 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- 238000010008 shearing Methods 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 238000007792 addition Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000005275 alloying Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000010187 selection method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B1/00—Single-crystal growth directly from the solid state
- C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
- C30B1/04—Isothermal recrystallisation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B1/00—Single-crystal growth directly from the solid state
- C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/02—Production of homogeneous polycrystalline material with defined structure directly from the solid state
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US68027305P | 2005-05-12 | 2005-05-12 | |
US60/680,273 | 2005-05-12 | ||
PCT/US2006/016771 WO2006124266A2 (en) | 2005-05-12 | 2006-05-03 | Method and apparatus for growing single-crystal metals |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101213318A CN101213318A (zh) | 2008-07-02 |
CN101213318B true CN101213318B (zh) | 2012-10-17 |
Family
ID=37431776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006800243420A Expired - Fee Related CN101213318B (zh) | 2005-05-12 | 2006-05-03 | 用于生长单晶金属的方法和装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7922812B2 (ja) |
EP (1) | EP1888802B1 (ja) |
JP (1) | JP5106387B2 (ja) |
KR (1) | KR101009314B1 (ja) |
CN (1) | CN101213318B (ja) |
WO (1) | WO2006124266A2 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006124266A2 (en) * | 2005-05-12 | 2006-11-23 | The Board Of Regents, The University Of Texas System | Method and apparatus for growing single-crystal metals |
US11072035B2 (en) * | 2010-05-21 | 2021-07-27 | Illinois Tool Works Inc. | Auxiliary welding heating system |
ITTO20130430A1 (it) | 2013-05-28 | 2014-11-29 | Illinois Tool Works | Dispositivo per il pre-riscaldamento ad induzione e la saldatura testa a testa di lembi adiacenti di almeno un elemento da saldare |
US11076454B2 (en) | 2014-05-16 | 2021-07-27 | Illinois Tool Works Inc. | Induction heating system temperature sensor assembly |
US11197350B2 (en) | 2014-05-16 | 2021-12-07 | Illinois Tool Works Inc. | Induction heating system connection box |
US9913320B2 (en) | 2014-05-16 | 2018-03-06 | Illinois Tool Works Inc. | Induction heating system travel sensor assembly |
US11510290B2 (en) | 2014-05-16 | 2022-11-22 | Illinois Tool Works Inc. | Induction heating system |
US10863591B2 (en) | 2014-05-16 | 2020-12-08 | Illinois Tool Works Inc. | Induction heating stand assembly |
US10440784B2 (en) | 2014-10-14 | 2019-10-08 | Illinois Tool Works Inc. | Reduced-distortion hybrid induction heating/welding assembly |
US10638554B2 (en) | 2014-12-23 | 2020-04-28 | Illinois Tool Works Inc. | Systems and methods for interchangeable induction heating systems |
KR101878465B1 (ko) * | 2016-07-12 | 2018-07-13 | 기초과학연구원 | 단결정 금속포일, 및 이의 제조방법 |
WO2018012864A1 (ko) * | 2016-07-12 | 2018-01-18 | 기초과학연구원 | 단결정 금속포일, 및 이의 제조방법 |
KR102396215B1 (ko) * | 2017-11-28 | 2022-05-10 | 기초과학연구원 | 단결정 금속포일 및 이의 제조방법 |
CN108950684B (zh) * | 2018-06-08 | 2022-02-11 | 中国科学院物理研究所 | 一种制备单晶金属箔的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3507616A (en) * | 1967-08-14 | 1970-04-21 | Westinghouse Electric Corp | Preparation of large crystal refractory metal monocarbides |
US5205872A (en) * | 1988-12-10 | 1993-04-27 | Kawasaki Steel Corporation | Method of producing crystal bodies having controlled crystalline orientation |
US6110274A (en) * | 1997-07-02 | 2000-08-29 | Sharp Kabushiki Kaisha | Process and apparatus for producing polycrystalline semiconductor |
US20050121117A1 (en) * | 2001-11-05 | 2005-06-09 | Hufnagel Todd C. | Alloy and method of producing the same |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3435668A (en) * | 1966-08-26 | 1969-04-01 | Us Interior | Method of determining preferred orientation in metals |
DE2749836C3 (de) * | 1977-11-08 | 1980-07-03 | Dornier System Gmbh, 7990 Friedrichshafen | Zerstörungsfreie Prüfung der Ermüdung von Bauteilen |
US4487651A (en) * | 1983-04-06 | 1984-12-11 | Duracell Inc. | Method for making irregular shaped single crystal particles and the use thereof in anodes for electrochemical cells |
US5654246A (en) * | 1985-02-04 | 1997-08-05 | Lanxide Technology Company, Lp | Methods of making composite ceramic articles having embedded filler |
US5340655A (en) * | 1986-05-08 | 1994-08-23 | Lanxide Technology Company, Lp | Method of making shaped ceramic composites with the use of a barrier and articles produced thereby |
US5221558A (en) * | 1990-01-12 | 1993-06-22 | Lanxide Technology Company, Lp | Method of making ceramic composite bodies |
US20040047758A1 (en) * | 2000-01-05 | 2004-03-11 | Northwestern University | Method for enhancement of grain boundary cohesion in crystalline materials and compositions of matter therefor |
EP1391942A4 (en) * | 2001-05-31 | 2007-08-15 | Nat Inst Of Advanced Ind Scien | TUNNEL MAGNETIC RESISTANCE ELEMENT |
RU2213149C2 (ru) * | 2001-10-25 | 2003-09-27 | Марков Геннадий Александрович | Способ изготовления монокристаллической металлической проволоки |
US6875661B2 (en) * | 2003-07-10 | 2005-04-05 | International Business Machines Corporation | Solution deposition of chalcogenide films |
CN100490205C (zh) * | 2003-07-10 | 2009-05-20 | 国际商业机器公司 | 淀积金属硫族化物膜的方法和制备场效应晶体管的方法 |
WO2006124266A2 (en) * | 2005-05-12 | 2006-11-23 | The Board Of Regents, The University Of Texas System | Method and apparatus for growing single-crystal metals |
US20090011925A1 (en) * | 2007-07-06 | 2009-01-08 | Larry Gordon Felix | Method for producing catalytically active glass-ceramic materials, and glass-ceramics produced thereby |
GB0813112D0 (en) * | 2008-07-18 | 2008-08-27 | Rolls Royce Plc | Metal casting |
-
2006
- 2006-05-03 WO PCT/US2006/016771 patent/WO2006124266A2/en active Application Filing
- 2006-05-03 JP JP2008511166A patent/JP5106387B2/ja active Active
- 2006-05-03 KR KR1020077029075A patent/KR101009314B1/ko active IP Right Grant
- 2006-05-03 EP EP06752075.9A patent/EP1888802B1/en not_active Not-in-force
- 2006-05-03 CN CN2006800243420A patent/CN101213318B/zh not_active Expired - Fee Related
-
2007
- 2007-11-08 US US11/936,954 patent/US7922812B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3507616A (en) * | 1967-08-14 | 1970-04-21 | Westinghouse Electric Corp | Preparation of large crystal refractory metal monocarbides |
US5205872A (en) * | 1988-12-10 | 1993-04-27 | Kawasaki Steel Corporation | Method of producing crystal bodies having controlled crystalline orientation |
US6110274A (en) * | 1997-07-02 | 2000-08-29 | Sharp Kabushiki Kaisha | Process and apparatus for producing polycrystalline semiconductor |
US20050121117A1 (en) * | 2001-11-05 | 2005-06-09 | Hufnagel Todd C. | Alloy and method of producing the same |
Also Published As
Publication number | Publication date |
---|---|
JP2008540319A (ja) | 2008-11-20 |
CN101213318A (zh) | 2008-07-02 |
EP1888802A2 (en) | 2008-02-20 |
WO2006124266A3 (en) | 2007-02-08 |
KR20080019224A (ko) | 2008-03-03 |
JP5106387B2 (ja) | 2012-12-26 |
US7922812B2 (en) | 2011-04-12 |
EP1888802B1 (en) | 2013-12-18 |
EP1888802A4 (en) | 2009-07-01 |
US20090120351A1 (en) | 2009-05-14 |
WO2006124266A2 (en) | 2006-11-23 |
KR101009314B1 (ko) | 2011-01-18 |
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Owner name: INTELLECTUAL VENTURES HOLDING Free format text: FORMER OWNER: TEXAS SYSTEM UNIVERSITY COUNCIL Effective date: 20101130 |
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