CN101212117A - Single end face pump triple-frequency solid laser - Google Patents
Single end face pump triple-frequency solid laser Download PDFInfo
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- CN101212117A CN101212117A CNA200610157790XA CN200610157790A CN101212117A CN 101212117 A CN101212117 A CN 101212117A CN A200610157790X A CNA200610157790X A CN A200610157790XA CN 200610157790 A CN200610157790 A CN 200610157790A CN 101212117 A CN101212117 A CN 101212117A
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Abstract
The invention relates to a single-face pumping frequency-tripled solid-state laser, which comprises a folded resonant cavity composed of two terminal mirrors and at least one inflection mirror, a gain medium and a Q switch arranged inside the resonant cavity, a pumping light source system which is arranged outside the inflection mirror and is vertical to the head face of the gain medium to carry out pumping so as to produce the fundamental wave laser which resonates in the resonant cavity; double-frequency non-linear wafer which is arranged in the resonant cavity for carrying out frequency doubling of a part of the fundamental wave laser so as to produce secondary harmonic light; a frequency-tripled non-linear wafer which is arranged in the resonant cavity for carrying out sum frequency for the rest part of the fundamental wave laser and the secondary harmonic light so as to produce third-time harmonic light, and a light output element used for conducting the third-time harmonic light out of the resonant cavity. By adopting the way that the single-face pumping and the double frequency as well as the triple frequency are all finished in the cavity, the third-time harmonic laser is allowed to have good beam pattern and high light-light conversion effect. Furthermore, the resonant cavity of the invention has simple structure, convenient tuning, good stability and easy industrial production.
Description
[technical field]
The present invention relates to a kind of solid state laser, more specifically relate to a kind of single end face pump triple-frequency solid laser that is specially adapted to produce Ultra-Violet Laser.
[background technology]
In recent years, laser retrofit development is very rapid in the world, its market output value surpasses laser labelling, become the main laser industry that is only second to laser cutting and welding, and short wavelength's Ultra-Violet Laser has become the important development direction of laser retrofit owing to having characteristics such as high-resolution and high absorption.More and more higher to the requirement of machining accuracy in industries such as the liquid crystal display of present broad development, silicon crystal unit, flexible circuit plate-making.Ultra-Violet Laser just can utilize intrinsic advantage to play a role in these industries.
The ultraviolet laser that extensively adopts is in the majority in the profile pump mode at present.Profile pump and end pumping respectively have excellent lacking.Pumping remarkable advantage in end pumping opposite flank is: facular model is good, and pulse duration is little, the light conversion efficiency height, and the repetition rate choice is big.These advantages are all very important for the retrofit industry.So development end pumping ultraviolet laser is imperative.
[summary of the invention]
Adopt the profile pump mode in order to solve prior art medium ultraviolet laser, technical problem such as its facular model is poor, light conversion efficiency is low the present invention proposes a kind of single end face pump triple-frequency solid laser that can be used for producing Ultra-Violet Laser more.
The present invention solves prior art medium ultraviolet laser and adopts the profile pump mode more, its facular model is poor, the technical schemes that technical problem adopted such as light conversion efficiency is low are: a kind of single end face pump triple-frequency solid laser is provided, this solid state laser comprises: resonant cavity, be arranged on the gain media and the Q switching of intra resonant cavity, wherein resonant cavity is the fold resonator that comprises two end mirrors and at least one turning mirror, and this solid state laser further comprises: the end face that is arranged on a turning mirror outside vertical gain media at least one turning mirror carries out pumping to be created in a pump light source system of the fundamental wave that vibrates in the resonant cavity; Be arranged on interior being used for of resonant cavity the part of fundamental wave is carried out frequency multiplication to produce two frequency multiplication nonlinear crystals of second harmonic light; Being arranged on interior being used for of resonant cavity carries out and the frequency tripling nonlinear crystal of frequency with generation triple-frequency harmonics light the remainder and the second harmonic light of fundamental wave; Be used for the triple-frequency harmonics photoconduction is gone out the light output element of resonant cavity
According to one preferred embodiment of the present invention, resonant cavity is the V-arrangement resonant cavity that comprises first and second end mirrors and a turning mirror.
According to one preferred embodiment of the present invention, two frequency multiplication nonlinear crystals, frequency tripling nonlinear crystal and light output element are arranged between first end mirror and the turning mirror, and gain media and Q switching are arranged between second end mirror and the turning mirror.
According to one preferred embodiment of the present invention, resonant cavity is the Z-shaped resonant cavity that comprises first and second end mirrors and first and second turning mirrors.
According to one preferred embodiment of the present invention, two frequency multiplication nonlinear crystals, frequency tripling nonlinear crystal and light output element are arranged between first end mirror and first turning mirror, gain media is arranged between first turning mirror and second turning mirror, and Q switching is arranged between second turning mirror and second end mirror.
According to one preferred embodiment of the present invention, the pump light source system comprises pump light source, directs into the transmission medium that focuses on coupled system to the focusing coupled system of pump light source focusing and with pump light source.
According to one preferred embodiment of the present invention, focusing on coupled system is the compound lens group.
According to one preferred embodiment of the present invention, the light output element is the plug-in type eyeglass that the triple-frequency harmonics photoconduction is gone out resonant cavity in the reflection mode.
According to one preferred embodiment of the present invention, the plug-in type eyeglass further reflects resonant cavity with the remainder of second harmonic light, and solid state laser further comprises second harmonic light of deriving resonant cavity and the element that is in the light that triple-frequency harmonics light carries out the beam splitter of beam split and is used to stop second harmonic light.
According to one preferred embodiment of the present invention, the light output element is the turning mirror that the triple-frequency harmonics photoconduction is gone out resonant cavity with transmission mode.
According to one preferred embodiment of the present invention, the turnover eyeglass further transmits resonant cavity with the remainder of second harmonic light, and solid state laser further comprises second harmonic light of deriving resonant cavity and the element that is in the light that triple-frequency harmonics light carries out the beam splitter of beam split and is used to stop second harmonic light.
According to one preferred embodiment of the present invention, solid state laser further comprises the plug-in type eyeglass that forms the second harmonic sub resonant cavity that holds two frequency multiplication nonlinear crystals and frequency tripling nonlinear crystal with the end mirror of resonant cavity.
According to one preferred embodiment of the present invention, the frequency tripling nonlinear crystal is arranged on the thick waist position of resonant cavity
By adopting said structure, by adopting single end face pump and two frequencys multiplication, the facular model of the feasible third harmonic laser that produces of the mode that frequency tripling is all finished in the chamber is good, light-light conversion efficiency height.In addition, cavity resonator structure of the present invention is simple, and is easy to adjust, good stability, easily suitability for industrialized production.
[description of drawings]
Fig. 1 is the structural representation of single end face pump triple-frequency solid laser first embodiment of the present invention;
Fig. 2 is the structural representation of single end face pump triple-frequency solid laser second embodiment of the present invention;
Fig. 3 is the structural representation of single end face pump triple-frequency solid laser the 3rd embodiment of the present invention;
Fig. 4 is the structural representation of single end face pump triple-frequency solid laser the 4th embodiment of the present invention;
Fig. 5 is the structural representation of single end face pump triple-frequency solid laser the 5th embodiment of the present invention;
Fig. 6 is the structural representation of single end face pump triple-frequency solid laser the 6th embodiment of the present invention;
Fig. 7 is the structural representation of single end face pump triple-frequency solid laser the 7th embodiment of the present invention;
Fig. 8 is the structural representation of single end face pump triple-frequency solid laser the 8th embodiment of the present invention;
Fig. 9 is the structural representation of single end face pump triple-frequency solid laser the 9th embodiment of the present invention.
[embodiment]
Is that example is elaborated to single end face pump triple-frequency laser of the present invention below in conjunction with drawings and Examples with the ultraviolet laser of wavelength 335nm, but the apparent the present invention of those skilled in the art is equally applicable to produce the laser of other wavelength.In above-mentioned accompanying drawing, utilize identical Reference numeral to represent essentially identical element.
As shown in Figure 1, Fig. 1 is the structural representation of single end face pump triple-frequency laser first embodiment of the present invention.In the present embodiment, end mirror 6,12 and turning mirror 4,8 are formed the resonant cavity of laser.Turning mirror 4,8 is separately positioned on the corner point of resonant cavity, forms the Z-shaped resonant cavity of four eyeglass formulas thus.The pump light source system that is made up of pump light source 1, transmission medium 2 (for example, optical fiber) and focusing coupled system 3 is arranged on turning mirror 4 outsides.The pump light that pump light source 1 is produced is transmitted to through transmission medium 2 and focuses on coupled system 3, focuses on after turning mirror 4 is coupled in the resonant cavity by focusing on coupled system 3, and carries out pumping perpendicular to the end face that is arranged at the gain media 7 between turning mirror 4 and 8.Gain media 7 produces the infrared light of 1.06 μ m, and this infrared light vibrates in resonant cavity as fundamental wave, and is modulated by Q switching 5.In a preferred embodiment, focus on coupled system 3 and adopt the compound lens group, be coated with pump light anti-reflection film and fundamental wave reflectance coating on the turning mirror 4 simultaneously.
Fundamental wave carries out frequency multiplication through a part that is arranged in the 11 pairs of fundamental waves of two frequency multiplication nonlinear crystals, 11, two frequency multiplication nonlinear crystals between turning mirror 8 and the end mirror 12, produces second harmonic light.The remainder of second harmonic light and fundamental wave returns on former road after end mirror 12 total reflections, and through frequency tripling nonlinear crystal 10, nonlinear effect and frequency through frequency tripling nonlinear crystal 10 produce triple-frequency harmonics light.Fundamental wave, second harmonic light and triple-frequency harmonics light incide on the light output element 9.In the present embodiment, light output element 9 is the plug-in type eyeglass.Fundamental wave vibrates in resonant cavity after eyeglass 9 transmissions.The remainder of second harmonic light, triple-frequency harmonics light are derived from resonant cavity through eyeglass 9 reflections, carry out beam split through beam splitter 13 again.Second harmonic light transmission beam splitter 13 incides on the element 14 that is in the light.Triple-frequency harmonics light is through beam splitter 13 reflection outputs, as the output light of single end face pump triple-frequency solid laser of the present invention.
As shown in Figure 2, Fig. 2 is the structural representation of single end face pump triple-frequency laser second embodiment of the present invention.The difference part of solid state laser in the present embodiment and solid state laser shown in Figure 1 is: pump light line focus coupled system that pump light source 1 is produced 3 focuses on after be coupled in the resonant cavity and the end face of vertical gain medium 7 carries out pumping away from the turning mirror 8 of Q switching 5.
As shown in Figure 3, Fig. 3 is the structural representation of single end face pump triple-frequency laser the 3rd embodiment of the present invention.The difference part of solid state laser in the present embodiment and solid state laser shown in Figure 2 is: cancelled turning mirror 4 in the present embodiment, formed prismatic glasses formula V-arrangement resonant cavity, this moment, Q switching 5 and gain media 7 were arranged between end mirror 6 and the turning mirror 8.
As shown in Figure 4, Fig. 4 is the structural representation of single end face pump triple-frequency laser the 4th embodiment of the present invention.The difference part of solid state laser in the present embodiment and solid state laser shown in Figure 1 is: cancelled turning mirror 8 in the present embodiment, formed prismatic glasses formula V-arrangement resonant cavity.
As shown in Figure 5, Fig. 5 is the structural representation of single end face pump triple-frequency laser the 5th embodiment of the present invention.In the present embodiment, fundamental wave vibrates in resonant cavity, produces second harmonic light through two frequency multiplication nonlinear crystals 11, and second harmonic light and fundamental wave are by frequency tripling nonlinear crystal 10, nonlinear effect and frequency through frequency tripling nonlinear crystal 10 produce triple-frequency harmonics light.Former road is returned after fundamental wave, second harmonic light, 12 total reflections of triple-frequency harmonics light process end mirror, and 16 places carry out beam split at the plug-in type eyeglass.Plug-in type eyeglass 16 is with the difference of the plug-in type eyeglass 9 of the foregoing description: triple-frequency harmonics light is derived from resonant cavity through 16 reflections of plug-in type eyeglass.Second harmonic light and fundamental wave see through plug-in type eyeglass 16, continuation is transmitted in resonant cavity and is incided another plug-in type eyeglass 15, total reflection takes place in second harmonic light at plug-in type eyeglass 15 places, vibration back and forth in the second harmonic sub resonant cavity that is made of end mirror 12 and plug-in type eyeglass 15.Fundamental wave sees through plug-in type eyeglass 15, vibrates in resonant cavity.Owing to there is the sub-chamber of second harmonic light, the second harmonic light utilization efficiency is increased greatly, make output triple-frequency harmonics luminous power increase greatly.
As shown in Figure 6, Fig. 6 is the structural representation of single end face pump triple-frequency laser the 6th embodiment of the present invention.The difference part of solid state laser in the present embodiment and solid state laser shown in Figure 5 is: pump light line focus coupled system that pump light source 1 is produced 3 focuses on after be coupled in the resonant cavity and to gain media 7 away from the turning mirror 8 of Q switching 5 and carry out pumping.
As shown in Figure 7, Fig. 7 is the structural representation of single end face pump triple-frequency laser the 7th embodiment of the present invention.The difference part of solid state laser in the present embodiment and solid state laser shown in Figure 6 is: cancelled turning mirror 4 in the present embodiment, formed prismatic glasses formula V-arrangement resonant cavity.
As shown in Figure 8, Fig. 8 is the structural representation of single end face pump triple-frequency laser the 8th embodiment of the present invention.The difference part of solid state laser in the present embodiment and solid state laser shown in Figure 5 is: cancelled turning mirror 8 in the present embodiment, formed prismatic glasses formula V-arrangement resonant cavity.
As shown in Figure 9, Fig. 9 is the structural representation of single end face pump triple-frequency laser the 9th embodiment of the present invention.The difference part of solid state laser in the present embodiment and solid state laser shown in Figure 1 is: fundamental wave, second harmonic light, triple-frequency harmonics light carry out beam split at turning mirror 8 places.Fundamental wave continues vibration in the reflection of turning mirror 8 places in resonant cavity.Second harmonic light and triple-frequency harmonics light are derived from resonant cavity through the turning mirror transmission, pass through the beam split of beam splitter 13 again.Second harmonic light transmission beam splitter 13 incides on the element 14 that is in the light.Triple-frequency harmonics light is through beam splitter 13 reflection outputs, as the output light of single end face pump triple-frequency solid laser of the present invention.
Show that by experiment utilization can obtain wavelength as Fig. 1-scheme shown in Figure 9 and export greater than the triple-frequency harmonics ultraviolet of 3W for the power of 355nm, whole system light-light conversion efficiency is greater than 10%.The 355nm zlasing mode that obtains is the TEM00 mould.Long-term measured power good stability.
In the above-described embodiments, only the present invention has been carried out exemplary description, but those skilled in the art can design various execution modes according to different actual needs under the situation of the scope and spirit that do not break away from the present invention and protected.For example, according to actual needs, in solid state laser of the present invention: gain media can adopt Nd:YVO4, Nd:YAG, Nd:YLF, Nd:GDVO4, Yb:YAG or Er:YAG etc.; Q switching can adopt acoustooptic switch, electrooptical switching or saturated sharp receipts type passive Q-switch; Two frequency multiplication nonlinear crystals can adopt I class LBO, I class BBO or I class CLBO; The frequency tripling nonlinear crystal is I class LBO, I class BBO, I class CLBO, II class LBO, II class BBO or II class CLBO.Resonant cavity also can adopt low-angle refrative cavity structure, 45 refrative cavity structure, Brewster angle refrative cavity structure or other angle refrative cavity structures according to actual needs.In addition, in resonant cavity, also may add optical modules such as aperture, wave plate, polarizer, lens, prism.
Claims (13)
1. single end face pump triple-frequency solid laser, described solid state laser comprises: resonant cavity, the gain media that is arranged on described intra resonant cavity and Q switching, it is characterized in that: resonant cavity is the fold resonator that comprises two end mirrors and at least one turning mirror, and described solid state laser further comprises:
The end face that is arranged on the described gain media of a turning mirror outside vertical in described at least one turning mirror carries out pumping to be created in a pump light source system of the fundamental wave that vibrates in the described resonant cavity;
Be arranged on interior being used for of described resonant cavity the part of described fundamental wave is carried out frequency multiplication to produce two frequency multiplication nonlinear crystals of second harmonic light;
Being arranged on interior being used for of described resonant cavity carries out and the frequency tripling nonlinear crystal of frequency with generation triple-frequency harmonics light the remainder and the described second harmonic light of described fundamental wave;
Be used for described triple-frequency harmonics photoconduction is gone out the light output element of described resonant cavity.
2. solid state laser according to claim 1 is characterized in that: described resonant cavity is the V-arrangement resonant cavity that comprises first and second end mirrors and a turning mirror.
3. solid state laser according to claim 2, it is characterized in that: described two frequency multiplication nonlinear crystals, described frequency tripling nonlinear crystal and described smooth output element are arranged between described first end mirror and the described turning mirror, and described gain media and described Q switching are arranged between described second end mirror and the described turning mirror.
4. solid state laser according to claim 1 is characterized in that: described resonant cavity is the Z-shaped resonant cavity that comprises first and second end mirrors and first and second turning mirrors.
5. solid state laser according to claim 4, it is characterized in that: described two frequency multiplication nonlinear crystals, described frequency tripling nonlinear crystal and described smooth output element are arranged between described first end mirror and described first turning mirror, described gain media is arranged between described first turning mirror and described second turning mirror, and described Q switching is arranged between described second turning mirror and described second end mirror.
6. solid state laser according to claim 1 is characterized in that: described pump light source system comprises pump light source, the focusing coupled system that described pump light source is focused on and the transmission medium that described pump light source is directed into described focusing coupled system.
7. solid state laser according to claim 6 is characterized in that: described focusing coupled system is the compound lens group.
8. solid state laser according to claim 1 is characterized in that: described smooth output element is the plug-in type eyeglass that described triple-frequency harmonics photoconduction is gone out described resonant cavity in the reflection mode.
9. solid state laser according to claim 8, it is characterized in that: described plug-in type eyeglass further reflects described resonant cavity with the remainder of described second harmonic light, and described solid state laser further comprises the element that is in the light that the second harmonic light of deriving described resonant cavity and triple-frequency harmonics light are carried out the beam splitter of beam split and is used to stop second harmonic light.
10. solid state laser according to claim 1 is characterized in that: described smooth output element is the turning mirror that described triple-frequency harmonics photoconduction is gone out described resonant cavity with transmission mode.
11. solid state laser according to claim 10, it is characterized in that: described turnover eyeglass further transmits described resonant cavity with the remainder of described second harmonic light, and described solid state laser further comprises the element that is in the light that the second harmonic light of deriving described resonant cavity and triple-frequency harmonics light are carried out the beam splitter of beam split and is used to stop second harmonic light.
12. solid state laser according to claim 1 is characterized in that: described solid state laser further comprises the plug-in type eyeglass that forms the second harmonic sub resonant cavity that holds described two frequency multiplication nonlinear crystals and described frequency tripling nonlinear crystal with the end mirror of described resonant cavity.
13. solid state laser according to claim 1 is characterized in that: described frequency tripling nonlinear crystal is arranged on the thick waist position of described resonant cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200610157790XA CN101212117A (en) | 2006-12-26 | 2006-12-26 | Single end face pump triple-frequency solid laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200610157790XA CN101212117A (en) | 2006-12-26 | 2006-12-26 | Single end face pump triple-frequency solid laser |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101764348B (en) * | 2010-01-07 | 2012-06-06 | 武汉华工激光工程有限责任公司 | Semiconductor pump ultraviolet laser |
| CN108767633A (en) * | 2018-08-27 | 2018-11-06 | 深圳市格镭激光科技有限公司 | It is a kind of to can be used for the multiple of ultraviolet laser and expand resonant cavity |
| CN108963741A (en) * | 2018-09-21 | 2018-12-07 | 深圳市杰普特光电股份有限公司 | Bicrystal green (light) laser |
| CN109119875A (en) * | 2018-09-21 | 2019-01-01 | 深圳市杰普特光电股份有限公司 | Bicrystal infrared laser |
| CN111048982A (en) * | 2019-11-28 | 2020-04-21 | 北京科益虹源光电技术有限公司 | 355nm ultraviolet light output method and system |
-
2006
- 2006-12-26 CN CNA200610157790XA patent/CN101212117A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101764348B (en) * | 2010-01-07 | 2012-06-06 | 武汉华工激光工程有限责任公司 | Semiconductor pump ultraviolet laser |
| CN108767633A (en) * | 2018-08-27 | 2018-11-06 | 深圳市格镭激光科技有限公司 | It is a kind of to can be used for the multiple of ultraviolet laser and expand resonant cavity |
| CN108767633B (en) * | 2018-08-27 | 2024-02-02 | 深圳市格镭激光科技有限公司 | Multiple beam-expanding resonant cavity for ultraviolet laser |
| CN108963741A (en) * | 2018-09-21 | 2018-12-07 | 深圳市杰普特光电股份有限公司 | Bicrystal green (light) laser |
| CN109119875A (en) * | 2018-09-21 | 2019-01-01 | 深圳市杰普特光电股份有限公司 | Bicrystal infrared laser |
| CN111048982A (en) * | 2019-11-28 | 2020-04-21 | 北京科益虹源光电技术有限公司 | 355nm ultraviolet light output method and system |
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Open date: 20080702 |