CN101205603A - Ceramic vacuum coating technique - Google Patents

Ceramic vacuum coating technique Download PDF

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Publication number
CN101205603A
CN101205603A CNA2006101579623A CN200610157962A CN101205603A CN 101205603 A CN101205603 A CN 101205603A CN A2006101579623 A CNA2006101579623 A CN A2006101579623A CN 200610157962 A CN200610157962 A CN 200610157962A CN 101205603 A CN101205603 A CN 101205603A
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vacuum
produce
vacuum chamber
gas
current
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CN100554502C (en
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黄俊瑞
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Raoping County Xiangyuan Industry Co., Ltd.
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Shenzhen Xiangyuan Industry & Trade Co Ltd
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Abstract

A ceramic vacuum film coating technological method belongs to the vacuum film coating technical field, comprising the following process steps: A. a domestic ceramic device is put into a vacuum chamber hanging part of a vacuum multi-arc ion film coating machine having magnetic control function, and positive ion magnetic deposited particles are generated when the current is 40-48 ampere and the voltage is 450-490 voltampere; B. a vacuum chamber is heated to ensure the temperature of the vacuum chamber reaches the range between 200 and 350 DEG C, and when the gas in the vacuum chamber is pumped and the vacuum reaches 3x10-2Pa-5x10-3Pa, 450 ml-980ml of argon gas or nitrogen gas with the gas pressure between 1Mpa and 1.2MPa is injected; C. a multi-arc titanium target is opened; when the DC current is 70-90 ampere and the DC voltage is 450-490 voltampere, ion electrode current is generated to impact titanium target phase pulse, and reacts with argon gas or the nitrogen gas in the vacuum chamber to produce imitatively golden or imitatively silvery color deposited on the surface of the device. The present invention is simple in process, favorable for environmental protection, nontoxic and suitable for processing domestic ceramic or glass products.

Description

Ceramic vacuum coating technique
Technical field:
The present invention relates to a kind of ceramic vacuum coating technique, it belongs to technical field of vacuum plating.
Background technology:
In the prior art, the vacuum plating of pottery is technological difficulties, needs to adopt special equipment just can finish.But therefore the equipment price costliness that this class is special, makes that the price of ceramic vacuum plating product is very expensive night.And, in the existing processes, all be to adopt the metal bullion and silver to carry out plated film as raw material, on technology, this class coating technique needs earlier with printing, artificial coating again with in warm kiln burn till, produce obnoxious flavour and endanger surrounding enviroment.This type coating comes off night easily, and luminance brightness is poor, and coated membrane contain harmful HUMAN HEALTH elements such as plumbous cadmium, can not guarantee the security of using; Use the metal bullion and silver as coating raw material in addition, its cost is also than higher.
Summary of the invention:
The object of the present invention is to provide a kind of technology simple, tooling cost is low, and coating quality is good, ceramic vacuum coating technique.
The object of the present invention is achieved like this:
A kind of ceramic vacuum coating technique, it comprises following processing step:
A: the vacuum chamber suspension member of at first the domestic ceramics device being put into vacuum arc deposition film machine with magnetic control function, make magnetic titanium rod produce bias current by magnetic control means earlier, in electric current 40~48 peaces doubly, voltage 450~490 volt-ampere hours generation positive ion magnetic substance deposited particles makes domestic ceramics device top layer have the magnetosphere body;
B: when the titanium rod produced bias current, hot donut made the temperature of vacuum chamber reach between 200~350 ℃, extracted the vacuum indoor gas out and reached vacuum tightness 3 * 10 -2Pa~5 * 10 -3During Pa, put into argon gas or the nitrogen gas 450ml~980ml of air pressure at 1Mpa~1.2MPa;
C: open multi sphere titanium target doubly in galvanic current 70~95 peaces, volts DS 450~490 volt-ampere hours produce ion electrode electric current and titanium target mutually pulse impinge upon in the vacuum chamber to produce and imitate the gold color with the nitrogen gas phase reaction, produce silver color deposited particles with the argon gas phase reaction and produce rete, decontrol gas and can take out product in ceramic surface.
Described selection process step is:
A: the vacuum chamber suspension member of at first the domestic ceramics device being put into vacuum arc deposition film machine with magnetic control function, by magnetic control means carrying magnetic titanium rod will be housed earlier and produce bias current, in electric current 45 peaces doubly, voltage 480 volt-ampere hours generation positive ion magnetic substance deposited particles makes product subsurface have the magnetosphere body;
B: when the titanium rod produced bias current, hot donut made the temperature of vacuum chamber reach between room temperature 280 degree, extracts the vacuum indoor gas out and reaches vacuum tightness 4 * 10 -2During Pa, put into argon gas or the nitrogen gas 450ml~980ml of air pressure at 1Mpa~1.2MPa;
C: open multi sphere titanium target doubly in galvanic current 80 peaces, volts DS 470 volt-ampere hours produce ion electrode electric current and titanium target mutually pulse impinge upon nitrogen gas in the vacuum chamber and produce imitative gold or silver color deposited particles produces rete in ceramic surface, relieving gas can take out product.
The present invention does not use the metal bullion and silver as coating raw material, does not have any public hazards, and can make ceramic surface more wear-resisting, light, and protection against corrosion, acidproof alkali salt, chroma-luminance is smooth, is not easy to come off, and human body is not had any public hazards, and is pollution-free; Process period of the present invention is short, and easy to operate, tooling cost is low; Can disposal molding, need not other and protect assistant engineer's tool, can not produce obnoxious flavour harm surrounding enviroment.
Embodiment:
Below in conjunction with embodiment the present invention is further detailed:
Embodiment 1
In the present embodiment, process silver-plated domestic ceramics device, the present invention includes following processing step:
A: at first the domestic ceramics device is put into the vacuum chamber suspension member of the vacuum arc deposition film machine with magnetic control function, described vacuum arc deposition film machine with magnetic control function is a prior art.Make the carrying magnetic titanium rod in the vacuum arc deposition film machine produce bias current by magnetic control means earlier, in electric current 45 peaces doubly, voltage 480 volt-ampere hours produce positive ion magnetic substance deposited particles makes the top layer of domestic ceramics device have the magnetosphere body;
B: when titanium rod produced bias current, hot donut when making the temperature of vacuum chamber reach 280 ℃, was extracted the vacuum indoor gas out, makes that the vacuum tightness in the vacuum chamber reaches 4 * 10 -2During Pa, put into the argon gas 450ml~980ml of air pressure at 1Mpa~1.2MPa;
C: open multi sphere titanium target, galvanic current in the multi sphere titanium target be 80 peaces doubly, volts DS is 470 volt-ampere hours, produce the ion electrode electric current, this ion electrode electric current and titanium target pulse mutually impinge upon the argon gas in the vacuum chamber and produce imitative silver color deposited particles and produce rete in ceramic surface, decontrol gas and can take out product.
The domestic ceramics device Production Flow Chart each time that has plated film according to processing method process for processing of the present invention only needs 15~20 minutes.
Embodiment 2
In the present embodiment, process gold-plated domestic glass device, the present invention includes following processing step:
A: at first the domestic glass device is put into the vacuum chamber suspension member of the vacuum arc deposition film machine with magnetic control function, described vacuum arc deposition film machine with magnetic control function is a prior art.Make the carrying magnetic titanium rod in the vacuum arc deposition film machine produce bias current by magnetic control means earlier, in electric current 40 peaces doubly, voltage 450 volt-ampere hours produce positive ion magnetic substance deposited particles makes the top layer of domestic ceramics device have the magnetosphere body;
B: when titanium rod produced bias current, hot donut when making the temperature of vacuum chamber reach 200 ℃, was extracted the vacuum indoor gas out, makes that the vacuum tightness in the vacuum chamber reaches 5 * 10 -3Pa puts into the nitrogen gas 450ml~980ml of air pressure at 1Mpa~1.2MPa constantly;
C: open multi sphere titanium target, galvanic current in the multi sphere titanium target be 70 peaces doubly, volts DS is 450 volt-ampere hours, produce the ion electrode electric current, this ion electrode electric current and titanium target pulse mutually impinge upon the nitrogen gas in the vacuum chamber and produce imitative gold color deposited particles and produce rete in ceramic surface, decontrol gas and can take out product.
Embodiment 3
In the present embodiment, process gold-plated domestic ceramics device, the present invention includes following processing step:
A: at first the domestic ceramics device is put into the vacuum chamber suspension member of the vacuum arc deposition film machine with magnetic control function, described vacuum arc deposition film machine with magnetic control function is a prior art.Make the carrying magnetic titanium rod in the vacuum arc deposition film machine produce bias current by magnetic control means earlier, in electric current 48 peaces doubly, voltage 490 volt-ampere hours produce positive ion magnetic substance deposited particles makes the top layer of domestic ceramics device have the magnetosphere body;
B: when titanium rod produced bias current, hot donut when making the temperature of vacuum chamber reach 350 ℃, was extracted the vacuum indoor gas out, makes that the vacuum tightness in the vacuum chamber reaches 3 * 10 -2During Pa, put into the nitrogen gas 450ml~980ml of air pressure at 1Mpa~1.2MPa;
C: open multi sphere titanium target, galvanic current in the multi sphere titanium target be 95 peaces doubly, volts DS is 490 volt-ampere hours, produce the ion electrode electric current, this ion electrode electric current and titanium target pulse mutually impinge upon the nitrogen gas in the vacuum chamber and produce imitative gold color deposited particles and produce rete in ceramic surface, decontrol gas and can take out product.

Claims (2)

1. ceramic vacuum coating technique is characterized in that it comprises following processing step:
A: the vacuum chamber suspension member of at first the domestic ceramics device being put into vacuum arc deposition film machine with magnetic control function, make magnetic titanium rod produce bias current by magnetic control means earlier, in electric current 40~48 peaces doubly, voltage 450~490 volt-ampere hours generation positive ion magnetic substance deposited particles makes domestic ceramics device top layer have the magnetosphere body;
B: when the titanium rod produced bias current, hot donut made the temperature of vacuum chamber reach between 200~350 ℃, extracted the vacuum indoor gas out and reached vacuum tightness 3 * 10 -2Pa~5 * 10 -3During Pa, put into argon gas or the nitrogen gas 450ml~980ml of air pressure at 1Mpa~1.2MPa;
C: open multi sphere titanium target doubly in galvanic current 70~95 peaces, volts DS 450~490 volt-ampere hours produce ion electrode electric current and titanium target mutually pulse impinge upon in the vacuum chamber to produce and imitate the gold color with the nitrogen gas phase reaction, produce silver color deposited particles with the argon gas phase reaction and produce rete, decontrol gas and can take out product in ceramic surface.
2. the ceramic vacuum coating technique described in claim 1 is characterized in that described selection process step is:
A: the vacuum chamber suspension member of at first the domestic ceramics device being put into vacuum arc deposition film machine with magnetic control function, make magnetic titanium rod produce bias current by magnetic control means earlier, in electric current 45 peaces doubly, voltage 480 volt-ampere hours produce positive ion magnetic substance deposited particles makes domestic ceramics device top layer have the magnetosphere body
B: when the titanium rod produced bias current, hot donut made the temperature of vacuum chamber reach between room temperature 280 degree, extracts the vacuum indoor gas out and reaches vacuum tightness 4 * 10 -2During Pa, put into argon gas or the nitrogen gas 450ml~980ml of air pressure at 1Mpa~1.2MPa;
C: open multi sphere titanium target doubly in galvanic current 80 peaces, volts DS 470 volt-ampere hours produce ion electrode electric current and titanium target mutually pulse impinge upon in the vacuum chamber to produce and imitate the gold color with the nitrogen gas phase reaction, produce silver color deposited particles with the argon gas phase reaction and produce rete, decontrol gas and can take out product in ceramic surface.
CNB2006101579623A 2006-12-22 2006-12-22 Ceramic vacuum coating technique Expired - Fee Related CN100554502C (en)

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CNB2006101579623A CN100554502C (en) 2006-12-22 2006-12-22 Ceramic vacuum coating technique

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Application Number Priority Date Filing Date Title
CNB2006101579623A CN100554502C (en) 2006-12-22 2006-12-22 Ceramic vacuum coating technique

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CN101205603A true CN101205603A (en) 2008-06-25
CN100554502C CN100554502C (en) 2009-10-28

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101962271A (en) * 2010-06-17 2011-02-02 张元胜 Golden coated glass and preparation process thereof
CN101974731A (en) * 2010-11-30 2011-02-16 东莞星晖真空镀膜塑胶制品有限公司 Vacuum magnetic control coating process
CN116103612A (en) * 2023-03-02 2023-05-12 江苏富乐华功率半导体研究院有限公司 Method for manufacturing titanium nitride film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101962271A (en) * 2010-06-17 2011-02-02 张元胜 Golden coated glass and preparation process thereof
CN101974731A (en) * 2010-11-30 2011-02-16 东莞星晖真空镀膜塑胶制品有限公司 Vacuum magnetic control coating process
CN101974731B (en) * 2010-11-30 2013-02-13 东莞星晖真空镀膜塑胶制品有限公司 Vacuum magnetic control coating process
CN116103612A (en) * 2023-03-02 2023-05-12 江苏富乐华功率半导体研究院有限公司 Method for manufacturing titanium nitride film

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Assignee: Raoping County Xiangyuan Industry Co., Ltd.

Assignor: Shenzhen Xiangyuan Industry & Trade Co., Ltd.

Contract record no.: 2010440000466

Denomination of invention: Ceramic vacuum coating technique

Granted publication date: 20091028

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Owner name: RAOPING XIANGYUAN INDUSTRIAL + TRADING CO., LTD.

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Address after: 515734, Guangdong, Raoping Province three Rao Town, three Rao neighborhood committee, Chengdong Road, No. 16

Patentee after: Raoping County Xiangyuan Industry Co., Ltd.

Address before: 518002 Guangdong Province, Shenzhen City People's road Jianingna Plaza B block, room 1806

Patentee before: Shenzhen Xiangyuan Industry & Trade Co., Ltd.

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