CN101198859A - Film inspection device and film inspection method - Google Patents
Film inspection device and film inspection method Download PDFInfo
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- CN101198859A CN101198859A CNA2006800219313A CN200680021931A CN101198859A CN 101198859 A CN101198859 A CN 101198859A CN A2006800219313 A CNA2006800219313 A CN A2006800219313A CN 200680021931 A CN200680021931 A CN 200680021931A CN 101198859 A CN101198859 A CN 101198859A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
Abstract
To provide an apparatus and a method for inspecting flaws occurring during production of a film and utilizing data effectively after inspection. A film inspection apparatus (10) comprises cameras (12) each having a light source and a sensor arranged with a plurality of light receiving portions to scan a film, a means (14) for converting a charge signal obtained by scanning into a voltage signal and analyzing a defective part of the film from the voltage signal, a means (16) for storing a plurality of thresholds of magnitude for discriminating the size at the defective part of the film, and a comparator (18) for comparing an analyzed voltage signal with the plurality of thresholds of magnitude and determining with which threshold of magnitude the voltage signal matches.
Description
Technical field
The present invention relates to check the film detection apparatus and the inspection method of in film, constitute small bad, for example flake (FE) etc.
Background technology
When the manufacturing of film, be called as the small bad of flake sometimes.Flake is owing to the not fusion fully or sneaked into (with reference to patent documentation 1) that impurity takes place in this material of the material of film when making film.
According to the use of film, the function and the outward appearance of the film of flake infringement sometimes.For example, have as the incisory thin slice of semiconductor wafer and the film that uses.When in this film, having under the situation of flake, on film, can not flatly place semiconductor wafer.Might semiconductor wafer cutting failure.
The generally size of the flake of being allowed according to the use decision of film or the number of per unit area.Therefore, developed and disclose the device (with reference to patent documentation 2～7) of various inspection flakes.These devices are photographed to film with line-sensor, and the Flame Image Process of the data that obtain with line-sensor being carried out 2 values etc. detects flake.
An example of the flow process that presentation video is handled in Figure 33.If detect unusually, then calculate the length of unusual part from the direct of travel of film from the data of line-sensor.If this length is long, then be scuffing etc.Under these circumstances, be judged to be serious defect point.If whether this length is short, be the judgement of flake then.If not flake, then be judged to be noise.If flake is then obtained size, classify.
But testing fixture in the past can not calculate the size of flake sometimes exactly because of the cause of the resolution of line-sensor.For example,, then promptly enable to confirm the existence of flake, can not obtain the size of flake sometimes exactly if flake is small.Under these circumstances, can not whether be the judgement of the flake of being allowed.That is, exist the n level of the size of Figure 33 to classify by the danger that resolution restricted of line-sensor.
In addition, because the kind of film, flake is not formed on the surface of film.Inside at film forms flake, even with the naked eye also be difficult to confirm flake.Under these circumstances, be difficult to that the data that obtained with line-sensor are carried out Flame Image Process and find defect point.
If can obtain data, then also wish to utilize this data in various modes about flake.That is, if not merely can find defect point, and the user can be familiar with the position of defect point simply when the use of film, then is easily.
Patent documentation 1: the spy opens the 2001-150429 communique
Patent documentation 2: No. 3224623 communique of patent
Patent documentation 3: No. 3224624 communique of patent
Patent documentation 4: the spy opens flat 8-105842 communique
Patent documentation 5: the spy opens flat 6-82385 communique
Patent documentation 6: No. 2736521 communique of patent
Patent documentation 7: the spy opens the 2004-109069 communique
Summary of the invention
The testing fixture and the inspection method of the data after the invention provides the defect points such as flake that a kind of inspection takes place and can effectively utilize inspection when making film.
Testing fixture of the present invention is the bad device that detects film, comprises: camera has light source that sends the light that sees through above-mentioned film and the sensor that a plurality of light accepting part is arranged in, with the above-mentioned film of this sensor scan; To be transformed to voltage signal and from the unit of the bad part of this voltage signal analyzing film with the resulting charge signal of above-mentioned sensor scan; Storage is used for from the unit of a plurality of size threshold value of the size of the bad part of above-mentioned voltage signal difference film; And above-mentioned voltage signal and the above-mentioned a plurality of size threshold value of being analyzed compared, obtain this voltage signal and the corresponding to unit of which size threshold value.
Testing fixture of the present invention can comprise: the storage unit of the inspection data of the above-mentioned film that the above-mentioned film of memory scanning obtains; The picture that shows the above-mentioned film that is scanned; In above-mentioned picture, specify the regional designating unit of the arbitrary region of shown above-mentioned film; And the extracting unit that extracts the inspection data of using the specified above-mentioned zone of above-mentioned zone designating unit in the above-mentioned inspection data of from said memory cells, being stored.
Moreover testing fixture of the present invention can comprise: the unit of the above-mentioned film of reeling; The reeling condition designating unit of the kind of the state that the above-mentioned film of appointment is reeled on picture; And the above-mentioned inspection data that read out in the said memory cells to be stored, and will the positional information of defect point on above-mentioned film when the inspection of this above-mentioned film of checking in the data to be comprised be transformed to and converter unit with the specified kind corresponding position information of above-mentioned reeling condition designating unit.
Moreover testing fixture of the present invention can comprise the polaroid of the above and below that is configured in above-mentioned film respectively between above-mentioned light source and sensor.
Inspection method of the present invention is the bad method that detects film, comprises: the step that makes the above-mentioned film of light transmission; The sensor that is arranged in a plurality of light accepting parts accepts to see through the step of the light of above-mentioned film; Generate voltage signal according to the above-mentioned light that is received, and analyze the step of bad part according to this voltage signal; And obtain the above-mentioned voltage signal analyzed and which the corresponding to step in a plurality of size threshold value.
Inspection method of the present invention can comprise: the storing step of the inspection data of the above-mentioned thin slice of the view data that storage obtains so that above-mentioned film is made a video recording; The input that utilizes the operator is in the regional given step of specifying the arbitrary region on the above-mentioned film on the picture; And the extraction step that extracts the inspection data of using the specified above-mentioned zone of above-mentioned zone given step in the above-mentioned inspection data of from above-mentioned storing step, being stored.
Moreover inspection method of the present invention can comprise: the step of the above-mentioned film of reeling; The storing step of the inspection data of the above-mentioned film of the data that storage obtains so that above-mentioned film is made a video recording; Utilize operator's input on picture, to specify the reeling condition given step of the kind of the state that above-mentioned thin slice reeled; And read out in the above-mentioned inspection data of being stored in the above-mentioned storing step, and defect point the positional information on above-mentioned thin slice of the above-mentioned thin slice that will be comprised therein when checking be transformed to with above-mentioned reeling condition given step specified the shift step of kind corresponding position information.
Moreover inspection method of the present invention can be included in that the above and below at above-mentioned film disposes polaroid respectively between above-mentioned light source and the sensor, and makes the step of this polaroid of light transmission.
According to the present invention, the flake of film is used as lens utilizes like that, use the normal part and the difference detection of bad partial data to have or not flake.The value of utilizing this difference is the size of flake as can be known.In addition, utilize the number of times of the light scanned the part that sees through flake also can differentiate flake and whether become ellipse.
In addition, the input that utilizes the operator has been extracted the inspection data in this specified zone at the arbitrary region of specifying on the picture on the thin slice from check data.Thereby, can will check that data are processed as the higher data of convenience.
And then, utilize operator's input on picture, to specify the kind of the state that thin slice reeled and the positional information of defect point on sheet during with the inspection of sheet is transformed to and above-mentioned specified kind corresponding position information.Thus, can will check that data are processed as the higher data of convenience.
Description of drawings
Fig. 1 is the skeleton diagram of expression about the processing of plastic foil inspection relevant with present embodiment and inspection data.
Fig. 2 is the block diagram of expression testing fixture structure of the present invention.
There is the figure that the unusual part has taken place under the situation of bad part in Fig. 3 in signal voltage in film.
Fig. 4 is the figure that signal voltage has been carried out differential.
Fig. 5 is the figure that the signal voltage of the narrow situation of the width that is only bright, bad part that has seen through bad part has been carried out differential.
Fig. 6 is the figure that the signal voltage of the narrow situation of the width only dark, bad part that has seen through bad part has been carried out differential.
Fig. 7 is the figure that the signal voltage of the wide situation of the width that is only bright, bad part that has seen through bad part has been carried out differential.
Fig. 8 is the figure that the signal voltage of the wide situation of the width only dark, bad part that has seen through bad part has been carried out differential.
Fig. 9 is the figure that the signal voltage of the situation that noise has taken place has been carried out differential.
Figure 10 is the figure of bad part of expression film, (a) is the figure of flake, (b) is the bad figure that has been stained with color in film, (c) is the figure of the scar of the stripe-shaped that has in film, (d) is the figure of the big defect point that forms in film.
Figure 11 is the figure that judges the size of flake, (a) is the figure of the situation of size threshold value 1, (b) is the figure of the situation of size threshold value 2.
Figure 12 be the expression signal voltage according to the size of flake and different figure, (a) be the situation that 3 light accepting parts accept to have seen through the light of flake, (b) be the situation that 5 light accepting parts accept to have seen through the light of flake.
Even Figure 13 is the figure of the also identical situation of expression varying in size of flake and signal voltage, is circular flake (a), (b) be oval-shaped flake.
Figure 14 is the figure of the flow process of the expression size that is used to judge flake.
Figure 15 is the figure that has scanned the situation of flake obliquely, (a) is the situation that 5 light accepting parts acceptance have seen through the light of flake, (b) is the situation that 7 light accepting parts acceptance have seen through the light of flake.
Figure 16 is the figure of flake that expression is formed on the inside of film, (a) is sectional view, (b) is front view (FV).
Figure 17 is the figure that has disposed polaroid in the above and below of film.
Figure 18 is the figure of the structure of the configurable polaroid of expression, (a) is the figure that the plate of polaroid has been disposed in expression, (b) is the sectional view of the position relation of this plate of expression and camera.
Figure 19 is the process flow diagram that the inspection data relevant with present embodiment are processed.
Figure 20 is the figure that is illustrated in an example of picture displayed on the display of the inspection data manipulation devices relevant with present embodiment.
Figure 21 is that the inspection data relevant with present embodiment are processed the process flow diagram of (1).
Figure 22 is that the figure that checks the picture in the data processing (1) is carried out in expression.
Figure 23 is the figure that the picture after the inspection data processing (1) has been carried out in expression.
Figure 24 is the figure that is illustrated in an example of arbitrary region designated on the defective point diagram.
Figure 25 is the figure that is illustrated in another example of arbitrary region designated on the defective point diagram.
Figure 26 is the figure of expression with the film of the up-coiler coiling of Fig. 1.
Figure 27 is the figure of defective point diagram of the film of presentation graphs 9.
Figure 28 is the figure of " reeling down " and " going up coiling " in the kind of the explanation film state of being reeled.
Figure 29 is the figure of " coiling in the counter-rotating " in the kind of the explanation film state of being reeled.
Figure 30 is the figure of " counter-rotating is reeled down " in the kind of the explanation film state of being reeled.
Figure 31 is that the inspection data relevant with present embodiment are processed the process flow diagram of (2).
Figure 32 is the FBD (function block diagram) of the expression inspection data manipulation devices relevant with present embodiment.
Figure 33 is the figure of flow process that represents the inspection method of flake in the past.
The explanation of symbol
1: extruder
3: plastic foil (example of thin slice)
5: roller
7: up-coiler
9: light source
10: testing fixture
11: main frame
12: camera
13: the camera drive division
14: analytic unit
16: the storage unit of size threshold value
18: comparer
20: the storage unit of base value
22: comparing unit
24: correcting unit
26: differentiation element
28: judge storage unit with threshold value
30: identifying unit
32: the unit of measuring length
34: the identifying unit of the kind of bad part
115: check data manipulation devices
117: picture
119: the defective point diagram
121: the defect point histogram
123: mark
125: button
127: check box
129: icon
131,133,135: regional arbitrarily
137: core
139: defect point
141: core
151: storage part
153: Department of Communication Force
155: input part
157: handling part
159: efferent
161: regional specifying part
163: extracting part
165: the reeling condition specifying part
167: transformation component
169: image displaying part
171: the paper efferent
Embodiment
Use the description of drawings film detection apparatus relevant and the embodiment of inspection method with the present invention.Checked in the present invention film (or being called thin slice) is that the cutting blade with semiconductor wafer is the various films (or thin slice) of representative.Except film,, can check film arbitrarily such as cloth or sheet metal so long as the film of light transmission is got final product with formation such as resins.Film can be the coiling tubular, also can be individual shape.The present invention is used in particular for checking flake (FE), but also can check other defect point (or being called bad).Sometimes the various storage unit of having used the content representation of being stored among the figure are arranged again.In addition, each later waveform of Fig. 3 is an example, and is different with reality sometimes.
As shown in fig. 1, with the film (comprise plastic foil etc.) 3 of roller 5 guiding by extruder 1 progressive forming.Then, with up-coiler 7 coiling films 3, make reel.After the length as if regulation that film 3 has been reeled, on Width, cut off film 3, finish a reel.Then, begin the making of new reel.The camera 12 and the light source 9 of film detection apparatus 10 on the regulation position of this production line, have been disposed.Thereby, just in the process of coiling film, check film.If individual film is then checked in film transports.
Have again, in Fig. 1, represent extruder, but promptly use other machinery production film, also can use the present invention.For example, make the situation of film of heating extension, nothing extension etc.
The film detection apparatus of representing among Fig. 2 of the present invention 10 comprises: has to send and comes together sensor through the light source of the light of film and a plurality of light accepting part, and with the camera 12 of sensor scan film; To be transformed to voltage signal and from the analytic unit 14 of the bad part of voltage signal analyzing film with the resulting charge signal of sensor scan; Storage is used for the storage unit 16 according to a plurality of size threshold value of the size of the bad part of voltage signal difference film; And the voltage signal of relatively being analyzed and a plurality of size threshold value are to obtain the consistent comparer (comparing unit) 18 of voltage signal and which size threshold value.Have again, in above-mentioned record, be recited as camera 12 and have light source and sensor, but also light source can be handled as the independent parts of separating with camera.
Come work by main frame 11 controlling diaphragm testing fixtures 10 integral body.That is, 11 pairs of various unit of main frame send instruction.Can be with the inspection data that obtained with main frame, as explanation in the back, be processed as the high data of convenience.
The number of camera 12 is a plurality of, for example is 4, and these cameras are being configured to rectilinear form above the film 3 and on the Width of film 3.Be under 1 the situation at camera 12, whole on can not the Width of coverlay 3.Therefore, 4 cameras 12 are set, make each camera 12 share the part of the Width of film 3, thereby covered whole on the Width of film 3.
The storage unit 16 of storage size threshold value is the unit of the storage data of the hard disk that uses in computing machine etc. or storer etc.
For each threshold value comparer 18 is set.It is consistent with which size threshold value to obtain the voltage signal of being analyzed.Thus, can obtain the size of the bad part of film.Have, comparer 18 also can make voltage signal 2 values handle this voltage signal again.
If just can be judged as defect point with the judgement of 1 scanning shape, then in linear measure longimetry, open gate circuit, keep results relatively with comparer 18, send to correcting unit 24.The piece of gate circuit 19a among the figure, preservation circuit 19b, big or small 19c has been represented flowing of above-mentioned data.
With different in the past, can utilize voltage signal to obtain size.Also can be to classifying by the bad part size that resolution limited of camera 12.
Base value is to have scanned the number of times that sees through the light of bad part.Sometimes flake is the circular or oval identical voltage signal that all becomes.Can think that this is because voltage signal is proportional with the width of the direction of scanning flake.In this case, even varying in size of bad part also is judged to be big or small identical.Therefore, set base value, for example,, then increase the size of bad part if it is more than base value to have scanned the number of times of bad part.
The storage unit 20 of Memory Reference number is the unit of the storage data of the hard disk that uses in computing machine etc. or storer etc.
Both constitute correcting unit 24 by circuit, software or its.Correcting unit, as mentioned above, if the number of times that has for example scanned bad part more than or equal to base value, then increases the size of bad part.As an example of the method for the size that increases bad part, change to than big or small big 1 size of having obtained with comparer 18, be the size of big 1 size threshold value.
Even when the manufacturing of film, flow (even oval-shaped major axis is towards the direction of pulling out) on the pull-out direction of flake at film, also flake can be categorized as suitable size.
Make the base value difference for each size threshold value.This is different because of the size of flake because accept to have seen through the number of light accepting part of light of this flake.
The present invention is included in when making the light transmission film, makes the film conveyer that moves on the pull-out direction of film film during fabrication.The major axis of oval-shaped flake is identical direction for the moving direction with respect to film.This is owing to flow on the pull-out direction of flake at film when the manufacturing of film.Thereby, if the number of times that has scanned bad part more than or equal to base value, then correcting unit 24 carries out that the magnitude classification of bad part is improved 1 grade etc. the classification of size is increased.
Both constitute differentiation element 26 by circuit, software or its.By voltage signal is carried out differential, it is relative poor that the difference that can make normal part and bad part becomes from absolute difference.Relative poor by becoming, can not consider the difference of the light transmission that causes because of film.
Storage is judged with the storage unit 28 of threshold value same with other storage unit, is the unit of the storage data of the hard disk of use in computing machine etc. or storer etc.
Identifying unit 30 is if the abnormal signal in the voltage signal of institute's differential just is judged to be bad unit than judging with threshold value is big or little.Same with other unit, both constitute identifying unit by circuit, software or its.
The time interval of the scanning of the film of film detection apparatus 10 is constant, can obtain the length of bad part according to the translational speed of number of times that has scanned and film.Have, the number of the light accepting part of per unit length becomes the resolution of the Width of film again.In addition, the translational speed of the time interval of utilization scanning and film can be obtained the resolution of the moving direction of film.The present invention can not influence the judgement of the size of bad part because of this resolution.
Bad part not only comprises flake, and comprises different defect point of color or scar.Can be according to the waveform of the signal of institute's differential, as shown in Fig. 5～8, will badly be categorized as 4 kinds from what the signal of 1 scanning was learnt.Can judge the kind of bad part according to the length of this classification and bad part.Have again, in the storage unit arbitrarily of film detection apparatus 10, stored various waveforms in advance.
In addition, if the shape of bad part shows the most at last, defect point image generation unit 35 is set then on the display of computing machine etc.Scrambler is set, the directions X of film and the synchronizing signal of Y direction are input in the defect point image generation unit 35, generate the defect point image with this signal Synchronization ground.The directions X of film and Y direction are the Width and the direct of travels of film.
Also can store the position of the defect point on the film.Utilize film translational speed, detected the time of defect point, with which sensor defect point can obtain the position of defect point.The utilization of these data is described in the back.
Moreover, the unit that the number of the flake that has detected utilizing each above-mentioned unit is counted also can be set in film detection apparatus 10.Whether the number of the flake that differentiation has formed in film is the flake number of permissible range.Also the unit (circuit and/or program) that automatically carries out this differentiation can be set in testing fixture 10.In addition, also the unit of the number of flake being counted by per unit area (circuit and/or program) can be set in testing fixture 10.And then, also can carry out the counting of the number of above-mentioned flake to the size of every kind of flake, also can in testing fixture 10, be provided for the unit (circuit and/or program) of this purpose.
Secondly, the film inspection method that has used above-mentioned film detection apparatus 10 is described.
Inspection method comprises following (1)～(4) step.(1) makes the light transmission film.(2) sensor that is arranged in a plurality of light accepting parts accepts to have seen through the light of film.(3), analyze bad part by voltage signal according to the photogenerated voltage signal of being accepted.(4) it is consistent to obtain in the signal analyzed and a plurality of size threshold value which.
In the step of (1), Yi Bian film is moved, Yi Bian carry out this step.This is because the kind of sensor is line-sensor.Get final product so long as sensor scans film successively, removable sensor replaces moving film.
In the step of (2), accepted the light time,, outstanding part has taken place in voltage signal like that as shown in Figure 3 in the step of (3) then in film if bad part is arranged.According to this outstanding part bad part is arranged in film as can be known.
(3) analysis comprise to voltage signal carry out the step of differential and relatively institute's differential voltage signal with judge whether is the bad step of film with threshold value with judgement.
As shown in Figure 3, by voltage signal is carried out differential, the difference of bad part and the voltage of normal part is changed to relative value from absolute value.Removed other influence of optical transmission rate equal difference that the difference because of film causes.
Judge and use threshold value, as shown in Figure 4, capping value and lower limit.Judge with the higher limit of threshold value or the position of breaking lower limit if in the voltage signal of institute's differential, have to surpass, then be judged to be bad part.
Because the bad part of film is not only flake, so also be necessary bad kind is classified.Therefore, inspection method comprises according to the translational speed of number of times (scanning times), the time interval of accepting light and the film of the light of the bad part of having accepted to see through film and obtains the step of length of bad part and the step of the kind of bad part being classified according to the waveform shape of the voltage signal of the length of bad part and institute differential.
Because sensor accepts light at regular intervals, so can obtain the length of bad part according to the translational speed of the number of times of the light of having accepted bad part and film.
The waveform of the voltage signal of institute's differential is according to the kind of bad part and difference.For example, the difference of the waveform that expression causes because of the kind of bad part in Fig. 5～8.Fig. 5 has represented to see through only bright, that width the is narrow situation of bad part, if the length of bad part is short, then is flake (with reference to Figure 10 (a)).Figure 10 (a) has represented that flake 52a is arranged in film 50.If flake, then carry out the step of above-mentioned (4).
Fig. 6 has represented to see through the situation only dark, that width is narrow of bad part.This bad part is by painted bad (with reference to Figure 10 (b)) that causes that has taken place in film because of the impurity of having sneaked into when film refining.Figure 10 (b) has represented that the bad 52b that is colored is arranged in film 50.Even such is bad, also can be transferred to the step of above-mentioned (4), carry out the classification of size.
If seen through the brightness of the light of bad part is that width that become clear or dark, bad part is that length narrow, bad part is long, then is judged to be the bad 52c of the such striated of Figure 10 (c).Do not transfer to the step of above-mentioned (4), even or shifted, the size value also be decided to be invalid.This is because if striated bad, then taking place continuously in several mm under most of situation, so can not calculate area sometimes.
Fig. 7 has represented to see through only bright, that width the is wide situation of bad part.Fig. 8 has represented to see through the situation only dark, that width is wide of bad part.If seen through the brightness of the light of bad part is that width that become clear or dark, bad part length wide, bad part is long, then is judged to be bad part very big (with reference to Figure 10 (d)).Figure 10 (d) is illustrated in big defect point 52d in the film 50.Do not transfer to the step of above-mentioned (4), even or shifted, the size value also be decided to be invalid.
As shown in Figure 11 (a) and (b), consistent by obtaining the signal of in the step of above-mentioned (4), being analyzed with which size threshold value, can obtain the size of bad part.Have again, be more than the size threshold value n in the maximal value of the value of the signal voltage of institute's differential but under the situation less than n+1, be decided to be consistent with size threshold value n (n is the integer more than or equal to 1).That is the size threshold value when, obtaining bad part big or small becomes the value with certain width.If Figure 11 (a), then owing between size threshold value 1 and 2, having the signal voltage of institute's differential, so be consistent with size threshold value 1.The width of above-mentioned size threshold value and the number of size threshold value are arbitrarily.Decide the width of size threshold value and the number of size threshold value according to precision of in the inspection of flake, being obtained etc.
The situation that the brightness width bright or dark, bad part that light can not take place is wide, the length of bad part is short is arranged again.In addition, if the such waveform of Fig. 9 just is judged to be noise, ignores this signal and carry out later processing.Noise only scans with regard to decidable with 1 time, but also can judge according to the signal of scanning several times, can improve the precision that is judged to be noise.
About the step of above-mentioned (4), in storage unit 16, store a plurality of size threshold value in advance.This size threshold value has certain width as mentioned above.As shown in Figure 11 (a) and (b), the voltage signal of differential enters the scope of which size threshold value by obtaining, and can obtain the size of bad part simply.
As mentioned above, use the voltage signal of institute's differential to judge the size of bad part, and be not subjected to the influence of the resolution of sensor.Decidable is in the size of the bad part that can not judge because of the cause of the resolution of sensor in the past.
When having made film with the heating extension, flake becomes ellipse sometimes.In this case, only might carry out the judgement of size mistakenly with above-mentioned step.As shown in Figure 12 (a) and (b), voltage signal changes according to the width of the flake 52a of sensor scan.As shown in Figure 13 (a) and (b), if on the direction of sensor scan the flake 52a of identical width, then be circular might as well, be oval might as well, maximum signal voltage all is identical.Can think that this is because the size of signal voltage is subjected to the influence of Width of the scanning of flake 52a.Thereby, oval-shaped flake 52a is judged to be slight greatly than reality.Therefore, inspection method of the present invention comprises the number of light accepting part of the light of relatively having accepted to see through bad part and the step of base value after the step of above-mentioned (4).If above-mentioned number is more than base value, then become the size of big 1 size threshold value.If the flow process of the classification of expression size simply, then as shown in Figure 14.Figure 14 is the n level classification of the size of Figure 33 of having represented again to represent in the prior art.Have, in Figure 12,13, with the numeral scanning times that circle has surrounded, the longitudinal axis is a voltage again, and transverse axis is the time, has represented that each light accepting part in what kind of mode changes with arranging.The direction of scanning is the direction of the arrow among the figure, and the direct of travel of film is the vertical direction of relative arrow.
In addition, when making the light transmission film, make on the pull-out direction of film when film is made and move.By making major axis consistent with the moving direction of film, if oval, then to compare with the flake of circle, the number of times that scanning has seen through the light of flake becomes many.Thereby, utilize the step of above-mentioned comparison, the size of flake can be judged to be big 1 size.
Make the base value difference for each size threshold value.This is varying in size because of flake.
As mentioned above, the present invention can not be subjected to the influence ground of the resolution of sensor to judge the size of flake.Even flake is oval, also can classify to size.
The last image that generates bad part as required, and on the display of computing machine etc., show.To the signal that signal voltage has carried out differential be input in the image generation unit 35 as the defect point signal, synchronously generate image with the synchronizing signal of directions X and Y direction.This image as the back illustrates, also can be used as detected data and utilizes.
In addition, inspection method of the present invention also can comprise the step of counting with the number of the above-mentioned detected flake of step.This be because flake allow that number is according to the application target of film etc. and different.Also can comprise the step of the number of flake being counted by per unit area.And then, also can carry out the counting of above-mentioned flake to the size of every kind of flake.
Embodiments of the present invention more than have been described, but the present invention is not limited to above-mentioned embodiment.For example, be individual at film, when making the light transmission film, also can along inclined direction film be moved relative to the pull-out direction that heats when extending.By film is moved, make circular different with the voltage signal of oval-shaped flake.Thereby, can carry out the number of the light accepting part of the light of having accepted to see through bad part and the step that base value compares.In this case, as shown in Figure 15 (a) and (b) since in the flake of circle and oval-shaped flake the varying in size of signal voltage, do not comprise the unit or the correcting unit of comparison so can directly size be input in the main frame.
In addition, even film is wound into the situation of reel, the arrangement of the light accepting part by making camera is relatively tilted for the moving direction of film, thereby becomes identical with Figure 15.
According to the kind or the manufacture method of film, imbedded flake in the inside of film sometimes.That is, as shown in Figure 16 (a) and (b), the material of film 3 becomes inhomogeneous, as the part of the symbol 52e among the figure, and the situation of only in a part, having fixed.Under these circumstances, in visual film 3, can not discern flake 52e, and have the danger that just makes light transmission film 3 and can not detect well.Therefore, be provided with the unit that detects such flake 52e.
Secondly, the unit that is used for this detection is described.As shown in Figure 17, as this unit, between light source 9 and sensor 12s and in the above and below of film 3, dispose polaroid 60 respectively.Make the plane of polaroid 60 and the plane parallel of film 3.Polaroid 60 uses a certain polaroid that carries out rectilinearly polarized light, circularly polarized light, elliptically polarized light.The kind of 2 polaroids 60 is used identical.
The mechanism that makes polaroid 60 rotations is set at least one side's polaroid 60.This is because by film 3 and birefringent direction difference, is necessary to change the direction of the polarization axle of polaroid 60.
Also the unit that polaroid 60 is moved can be set.This is because according to the kind of film 3 and whether needs polaroid 60 these situations will change.For example, polaroid 60 and glass 62 are alternately arranged on plate 64.Glass 62 makes the light transmission of whole wavelength.In addition, can any member be set in this part yet and replace glass 62.Like that, the number of camera 12 is 4 shown in Figure 18 (b).On the position of the image angle of the lens that enter camera 12 and the position that do not enter, the mechanism that polaroid 60 is slided is set.In addition, the polaroid 60 of the downside of film 3 also is provided with the mechanism of sliding, as required configuration polaroid 60 below film 3.
Light reduces if see through 60 its light quantities of polaroid.Thereby, in order to remedy the light reduction that causes because of polaroid 60, be provided for improving the unit of light quantity.For example, the mechanism that light source is moved up and down is set.Light source 9 is near film 3 when using polaroid 60.Light source 9 is away from film 3 when not using polaroid 60.In addition, also new light source 9 can be set, when using polaroid 60, this light source 9 be slided near configuration under the film 3.
Also can utilize 1 button control to make the unit of polaroid 60 unit that moves and the light quantity that improves light source 9.When utilizing polaroid 60, when moving, polaroid 60 make light source 9 near film 3.When not utilizing polaroid 60, when moving, polaroid 60 make light source 9 away from film 3.
By utilizing polaroid 60, not measurable film also can be checked.In addition, by can selecting to have or not polaroid 60, and become the high testing fixture of versatility.
And then, if can utilize detected data in above-mentioned process, then be easily in various modes.The below utilization of these data of explanation.
Connected inspection data manipulation devices 115 on the film detection apparatus of in Fig. 1, having represented 10.To check that data send to inspection data manipulation devices 115, are processed into the higher data of convenience at this place.
But, according to the user's of film requirement, sometimes the film of having reeled with up-coiler 7 is further processed.For example, if illustrate with truncation, then reel on one side and make the film of reel, the length direction of an edge film cuts off, cuts apart film, and the film of reeling and being cut apart makes reel respectively.Thus client is provided the film of desirable width.
Do not carry out truncation on 7 the streamline of why in Fig. 1, representing, mainly according to the reason of following (1)～(3) from extruder 1 to up-coiler.(1) this is for client being provided the reel that the reel end as one man is wound into constant tension force.For this reason, need a plurality of rods or stopped the state of reeling, be shaped continuously, coiling that can not stopper film but begin film from extruder.(2) this is in order to prevent that film is lax.If the film that will be right after after extruder comes out as one man reels the reel end with constant tension force, then because of the coiling of film reason such as tie tight, film takes place lax.In order to prevent this phenomenon, for the film that comes out from extruder, ignore the skew of reeling, reel roughly, make reel, it is being carried out after the burin-in process, when truncation, the reel end is as one man reeled with constant tension force.(3) since the width of film according to client and difference, so the film of the big width of making is efficiently according to client's requirement to the practice that film carries out truncation.
The processing of truncation as film more than has been described, but in addition, for example had on film, to form new layer to form the processing of multilayer film.
Check the data of the film before data relate to handle, if the film after it in statu quo is applied to handle then for the film after handling, can not easily be grasped the position or the distribution of the defect point on the film.Therefore, in the present embodiment, use inspection data manipulation devices 115 will check that data are processed into the higher data of convenience, even, also can easily grasp the position or the distribution of the defect point on the film for the film after handling.
With the situation with film coiling tubular is example, explains the processing of checking data.Figure 19 is its process flow diagram.At first, read in inspection data (step S1).Check that data comprise production code member, batch number, inspection and begin the finish time, film width, film length, genetic defects dot information etc., make above-mentioned information for each reel.
So-called genetic defects dot information is about the film before handling, promptly with the reel information of defect point of resulting film of the up-coiler 7 of Fig. 1.Specifically, for each defect point of being found, by finding that (for example 15: 4 on the 4th February in 2005), size are (for example constantly, be categorized as a certain class in large, medium and small, minimum), the position formations such as (for example, the position 41.3mm of the position 125.8m of film length direction, film Width) on the film.
Secondly, the genetic defects dot information (step S3) in the storage inspection data in arranging A.Then, storage shows with defect point information (step S5) in arranging B.So-called demonstration is the information of using in order to show defective point diagram described later or defect point histogram on picture with defect point information.Under being right after the original state of having read in after checking data, in arranging B, in statu quo store the genetic defects dot information as showing the defect point information of using.
Then, on the monitor of the inspection data manipulation devices 115 of Fig. 1, show and comprise defective point diagram or the histogrammic picture of defect point (step S7) of having checked the data of data as having edited.Figure 20 is the figure of an example of this picture 117 of expression.Defect point Figure 119 has represented the position on the film of defect point.The longitudinal axis is that film length direction (m), transverse axis are film Width (mm).With the magnitude classification of defect point is large, medium and small, minimum.Defect point Nogata Figure 121 has represented the distribution of the defect point on the film, is made of the distribution of film Width and film length direction.
The defect point here is the defect point that is called as flake, but also can show defect point (for example, worm, pin hole) in addition.Both can show, also can show whole defect points simultaneously for every kind of defect point.Flake is owing to the not fusion fully or sneaked into (with reference to patent documentation 1) that impurity takes place in this material of the material of film when the manufacturing of film.
Mark on the picture 123, button 125 and check box 127 are utilized (step S9) in checking data processing (1), in checking data processing (2), utilize icon 129 (step S11).Secondly, the processing of inspection data (1), (2) are described.
Check that data processing (1) are so-called finishing (trimming).The defect point in zone arbitrarily on the film generates defective point diagram or defect point histogram.Use Figure 20～Figure 23 that this point is described.Figure 21 is a process flow diagram of checking data processing (1).Figure 22 is the figure that the executory picture 117 of data processing (1) is checked in expression.Figure 23 is the figure that the picture 17 after the inspection data processing (1) has been carried out in expression.
Original state is the picture of representing among Figure 20 117.Film before handling, for example width 1200mm, length 150m.With truncation this film is being carried out under the binary situation,, carrying out following operation in order to obtain editing data (defective point diagram, defect point histogram etc.) about the defect point on one of them film.
At first, operator's button click 125 shows trim settings window (not shown) on picture 117.In this window, set finishing scope, promptly regional arbitrarily.The zone arbitrarily here is and an above-mentioned zone that film is corresponding.For example, be under the situation of film Width 600mm to 1200mm, film length direction 5m to 150m in the zone, input is also determined these numerals.Thus, as shown in Figure 22, on picture 117, specify zone 131 (step T1) arbitrarily.
Thereby also available mouse drags appointment on defect point Figure 119 replaces input digit in zone 131 arbitrarily.Why having deleted the part smaller or equal to film length direction 5m, is because owing to be the part that begins to reel of film, so defect point is many, can not use.Illustrate with 5m at this, but not necessarily be limited to this.
Judge whether in defect point Figure 119 zone 131, i.e. finishing scope are carried out full frame demonstration (step T3) arbitrarily.If not showing to import in the check box 127 at finishing scope full frame chooses, check that then data processing (1) finish.Choose if imported, then from the inspection data of among the step S1 of Figure 19, having read in, extract the inspection data (step T5) in zone 131 arbitrarily.Specifically, select the genetic defects dot information in zone 131 arbitrarily in the genetic defects dot information of from the arrangement A that among Figure 19, has illustrated, being stored.
About selected genetic defects dot information, with regard to the film Width, position on defect point Figure 119 of each defect point is calculated again, its result is stored among the arrangement B that has illustrated among Figure 19 (step T7), then about the film length direction, position on the defective point diagram of each defect point is calculated again, its result is stored in arranges among the B (step T9).
The calculating again of so-called step T7 is the lower limit of position-width of the film Width of the defect point of being stored in arranging A.On the other hand, the calculating again of so-called step T9 is the lower limit of position-length of the film length direction of the defect point of being stored in arranging A.For example, zone 131 is made as the scope of film Width 600mm to 1200mm, film length direction 5m to 150m, and the position that the position of the film Width of certain defect point is made as 980.5mm, film length direction is made as 19.5m.
The position of the film Width of the defect point that calculates again is 980.5mm-600mm=380.5mm, and the position of film length direction becomes 19.5m-5m=14.5m.Have again, about determining the lower limit of width or length, owing to can at random being obtained in the zone, so in such zone 133 of for example in Figure 24, representing, the part of representing with symbol A becomes the lower limit of width, and the part of representing with symbol B becomes the lower limit of length.
Behind step T9, as shown in Figure 23, on picture 117, show as the inspection data that process with inspection data processing (1) are edited defect point Figure 119, defect point Nogata Figure 121 (step T11) of the data that obtain.In the picture 117 of Figure 23, in defect point Figure 119, full frame is carried out in zone 131 and show, shown defect point Nogata Figure 121 about the defect point on the zone 131.Have, also available paper output replaces showing on picture 117 in content displayed on the picture 117 again.
As mentioned above,, be processed as the higher data of convenience,, also can easily grasp the position or the distribution of the defect point on the film even for the film after the truncation by checking data according to checking data processing (1).In addition, about the defect point of the part (is the part of film length 0～5m at this) do not utilized as film, use processing deleted.Thereby, can obtain editing data more accurately.
On defect point Figure 119, the full frame demonstration 131 has been carried out in zone arbitrarily, but not necessarily be defined in this.For example, in Figure 22, also can specify arbitrarily zone 131, defect point Figure 119 makes defect point Nogata Figure 121 to the defect point that is present on the zone 131 arbitrarily under state as it is.
Have again, also can on picture, set a plurality of zones arbitrarily.For example, under the situation of having set four arbitrary regions,, then be converted to about this regional picture if click the mark 123 corresponding with each zone.
Can freely set the shape of arbitrary region.For example, as shown in Figure 25, zone 135 can be circular.
Secondly, inspection data processing (2) are described.In checking data processing (2), the positional information on the film of the kind defect correcting point of the state of being reeled according to film, generation defective point diagram or defect point histogram.In the kind of the state that film is reeled, reel under having, go up in coiling, the counter-rotating and reel, reverse and reel down, these kinds at first are described.
The figure of Figure 26 film 3 that to be expression reeled with the up-coiler 7 of Fig. 1, Figure 27 is the figure that represents defect point Figure 119 of this film 3.In up-coiler 7, core 137 is placed for example film 3 of width 1200mm, length 150m of reeling on the film 3, defect point 139 supposition of representing with the coordinate (1000mm, 149m) of defect point Figure 119 are present on the film 3.The positional information of defect point on film when this is the inspection of film 3 is included in and checks in the data.The film of representing among Figure 26 3 is called " reeling down ".
If the film 3 of Figure 28 (a) " reel down " is reeled, then film 3 is unfolded shown in Figure 28 (b) like that.Because the position of represented defect point is corresponding on the position (1000mm, 149m) of the defect point 139 on the film 3 and defect point Figure 119 of Figure 27, so can in statu quo use the defect point Figure 119 that represents among Figure 27.
So that the state that the film 3 that the opposite mode in the surperficial back side of film 3 will " be reeled down " repeats to pull out is the film 3 that expression among Figure 28 (c) " is gone up and reeled ".If the film 3 that will " go up and reel " reels, then film 3 is unfolded shown in Figure 28 (d) like that.Defect point 139 be positioned at (200mm, 149m).Compare with Figure 28 (b), the position change of defect point 139.So the position of the defect point 139 on the film 3 of Figure 28 (d) is not corresponding with the position of the defect point represented on defect point Figure 119 of Figure 27.Be necessary to process the defect point Figure 119 that represents among Figure 27.
As shown in Figure 29 (a), the film 3 of if core 141 is located at the below, reel " reeling down " then becomes the film 3 of " coiling in the counter-rotating ".If the state of this film 3 from Figure 29 (b) launched shown in Figure 29 (c) like that, and then because the position of defect point 139 (1000mm, 1m) different with position up to now, so be necessary to process the defect point Figure 119 that represents among Figure 27.
As shown in Figure 30 (a), core 141 is located at the top, the situation of the film 3 of reel " reeling down " is the film 3 of " counter-rotating is reeled down ".If the state of this film 3 from Figure 30 (b) launched shown in Figure 30 (c) like that, then the position of defect point 139 (200mm, 1m) different with position up to now.Even for this situation, also be necessary to process the defect point Figure 119 that represents among Figure 27.
Have again, why except " reeling down ", also have " go up and reel ", " reeling in the counter-rotating ", " counter-rotating is reeled down ", be based on following reason.For example, user's device is not corresponding with " reeling down " sometimes, but corresponding with " go up and reel ".In addition, under new cambial situation on the film,, and select " coiling in the counter-rotating " or " counter-rotating is reeled down " according to the characteristic of layer.
Figure 31 is a process flow diagram of checking data processing (2).In checking data processing (2), be benchmark with the film of " reeling down ".Be under the situation of " go up reel ", " reeling counter-rotating in ", " coiling under reversing " at film, with the positional information on the film of the above-mentioned type conversion defect point accordingly.
At first, from the icon 129 of " reeling down ", " coiling ", " reverse and reel ", " reeling under the counter-rotating ", click the corresponding icon 129 of kind of the state of being reeled in the picture 117 that the user represents in Figure 20, the kind (step U1, U3, U5) of the state that the appointment film is reeled on picture 17 with film.
Under the situation of " go up and reel ", as following, handle.If the stretch-out view of expression among the stretch-out view of expression among Figure 28 (d) " go up and reel " and Figure 28 (b) " reeling down " is compared, then the position of the film length L direction of defect point 139 is identical, but the position difference of film width W direction.Thereby, about film width W direction, the position on the defective point diagram of each defect point is calculated (conversion of positional information) again, its result is stored among the arrangement B that has illustrated among Figure 19 (step U7).The calculating again of so-called step U7 is the position of film Width of defect point of the value-stored in arranging A of film width.Behind step U7, display defect point diagram, defect point histogram (step U9) on picture.
Under the situation of " reeling in the counter-rotating ", as following, handle.If the stretch-out view of expression among the stretch-out view of expression among Figure 29 (c) " go up and reel " and Figure 28 (b) " reeling down " is compared, then the position of the film width W direction of defect point 139 does not change, but the change in location of film length L direction.Thereby, about film length L direction, the position on the defective point diagram of each defect point is calculated (conversion of positional information) again, its result is stored among the arrangement B that has illustrated among Figure 18 (step U11).The calculating again of so-called step U11 is the position of film length direction of defect point of the value-stored in arranging A of film length.Behind step U11, display defect point diagram, defect point histogram (step U9) on picture.
Under the situation of " counter-rotating reel down ", as shown in the stretch-out view of Figure 30 (c), the situation of " coiling down " of expression among Figure 28 (b) is all different with the film width W direction of defect point 39, in the film length L direction which.Thereby, in step U13, carried out the processing identical with step U7, in step U15, carried out after the processing identical display defect point diagram, defect point histogram (step U9) on picture with step U11.
As described above like that, according to checking data processing (2), by checking that data are processed as the higher data of convenience, even the film that will " reel down " makes the film of " go up and reel ", " reeling in the counter-rotating ", " counter-rotating is reeled down ", also can adjust defect point figure or defect point histogram, can easily grasp the position or the distribution of the defect point on the film.
Based on the view data of the film of the inspection data that are examined data processing (1), (2) processing are the data of making a video recording in the operation of film being carried out progressive forming, coiling with extruder and having obtained.In this operation, in general make a video recording.Its reason is, since after above-mentioned operation, carry out truncation, film form handle, change coiling length processing (for example, film with total length 100m is wound into 20m again as required) etc. the processing corresponding with the purposes of film, being the practice in source so will obtain the position unification of view data, is preferably for the easy to use of view data.
Have, view data also can be the data of making a video recording and obtaining after above-mentioned operation again.For example, be on film, to form the data of film to make a video recording in the operation that makes multilayer film.Even multilayer film is carried out truncation,, thereby, also can easily grasp the position or the distribution of the defect point on the film for the film after the truncation by the processing of application review data (1), (2).
Secondly, an example of the structure of the inspection data manipulation devices 115 relevant with present embodiment is described.The inspection data manipulation devices 115 of Figure 32 is made of storage part 151, Department of Communication Force 153, input part 155, handling part 157 and efferent 159.
In storage part 151, storage through Department of Communication Force 153 from obtaining of sending of the film detection apparatus 10 of Fig. 1 based on film is made a video recording the inspection data of film of view data.In addition, in storage part 151 storage for the processing of checking data or be compiled as necessary programs.In storage part 151, be included in the arrangement A that illustrated among Figure 18, Figure 21 and Figure 31, arrange B.Utilize hard disk, storer to wait and realize storage part 151.Utilize communication to realize Department of Communication Force 153 with hardware or program.
Utilize mouse, keyboard to wait and realize input part 155.In input part 155, be used for input in the kind of specifying arbitrary region on the film or the state that the appointment film is reeled on picture on the picture.
Handling part 157 is for example realized with CPU, carries out the processing that is used to check data processing.Regional specifying part 161 and extracting part 163 with handling part 157 are carried out the processing of checking data processing (1).Zone specifying part 161 utilizes operator's input in the zone arbitrarily of specifying on the picture on the film.Extracting part 163 extracts the inspection data in the zone of having specified with regional specifying part 161 from the inspection data of being stored storage part 151.
Reeling condition specifying part 165 and transformation component 167 with handling part 157 are carried out the processing of checking data processing (2).Reeling condition specifying part 165 utilizes operator's input to specify the kind of the state that film reeled on picture.Transformation component 167 reads out in the inspection data of having stored in the storage part 151.The positional information of defect point on film when checking the film that comprises in these data be transformed to with the specified kind corresponding position information of reeling condition specifying part 165.
Have, the inspection data job sequence relevant with present embodiment makes computing machine carry out each step of representing among Figure 19, Figure 21 and Figure 31 again.And, by the function of each piece of computing machine being played represent among Figure 32, can obtain and the inspection data manipulation devices relevant or check the same effect of data job operation with above-mentioned present embodiment.Can and be distributed to CD etc. with said procedure storage and can carry out in the storage medium that computing machine reads, also available internet waits and distributes.
If in this program, comprise the inspection data, do not carry out network and be connected even then check data manipulation devices with film detection apparatus, also can check the processing of data.
In addition, in the scope that does not break away from purport of the present invention, can implement the present invention with the form of having added various improvement, correction, change according to practitioner's knowledge.
Claims (15)
1. a bad film detection apparatus of checking film is characterized in that, comprises:
Camera has light source that sends the light that sees through above-mentioned film and the sensor that a plurality of light accepting part is arranged in, with the above-mentioned film of this sensor scan;
To be transformed to voltage signal and from the unit of the bad part of this voltage signal analyzing film with the resulting charge signal of above-mentioned sensor scan;
Storage is used for from the unit of a plurality of size threshold value of the size of the bad part of above-mentioned voltage signal difference film; And
Above-mentioned voltage signal and the above-mentioned a plurality of size threshold value analyzed are compared, obtain this voltage signal and the corresponding to unit of which size threshold value.
2. the film detection apparatus described in claim 1 is characterized in that, comprises:
Storage is used to distinguish the unit of base value of size of the bad part of above-mentioned film; And
Whether the number of times and the base value of the above-mentioned bad part of scanning, obtaining this number of times is the above unit of base value if being compared.
3. the film detection apparatus described in claim 2 is characterized in that:
The above-mentioned unit of analyzing comprises:
Above-mentioned voltage signal is carried out the unit of differential;
Storage is used to judge whether be that the judgement of bad part of above-mentioned film is with the unit of threshold value; And
The above-mentioned voltage signal of institute's differential is compared with threshold value with judgement, judge whether be the bad unit of film.
4. the film detection apparatus described in claim 3 is characterized in that, comprises:
Obtain the unit of the length of bad part according to the translational speed of number of times, sweep spacing and film of the bad part of the above-mentioned film of scanning; And
The unit of the kind of bad part being classified according to the waveform of the voltage signal of the length of above-mentioned bad part and above-mentioned institute differential.
5. the film detection apparatus described in claim 4 is characterized in that, comprises:
The storage unit of the inspection data of the above-mentioned film that the above-mentioned film of memory scanning obtains;
The picture that shows the above-mentioned film that is scanned;
In above-mentioned picture, specify the regional designating unit of the arbitrary region of shown above-mentioned film; And
Extract extracting unit in the above-mentioned inspection data of from said memory cells, being stored with the inspection data of the specified above-mentioned zone of above-mentioned zone designating unit.
6. the film detection apparatus described in claim 5 is characterized in that, comprises:
The reel unit of above-mentioned film;
The reeling condition designating unit of the kind of the state that the above-mentioned film of appointment is reeled on picture; And
The above-mentioned inspection data that read out in the said memory cells to be stored, and will the positional information of defect point on above-mentioned film when the inspection of this above-mentioned film of checking in the data to be comprised be transformed to and converter unit with the specified kind corresponding position information of above-mentioned reeling condition designating unit.
7. the film detection apparatus described in claim 6 is characterized in that:
The polaroid that between above-mentioned light source and sensor, comprises the above and below that is configured in above-mentioned film respectively.
8. a bad film inspection method of checking film is characterized in that, comprises:
Make the step of the above-mentioned film of light transmission;
The sensor that is arranged in a plurality of light accepting parts accepts to see through the step of the light of above-mentioned film;
Generate voltage signal according to the above-mentioned light that is received, and analyze the step of bad part according to this voltage signal; And
Obtain the above-mentioned voltage signal analyzed and which the corresponding to step in a plurality of size threshold value.
9. the film inspection method described in claim 8 is characterized in that, comprises:
Setting is at above-mentioned each size threshold value and different base values, and will accept to see through the number of light accepting part of light of above-mentioned bad part and the step that base value compares.
10. the film inspection method described in claim 9 is characterized in that:
Above-mentioned film utilization heating is extended and is made, be included in make when making the light transmission film film when heating is extended pull-out direction or its vergence direction on the step that moves.
11. the film inspection method described in claim 10 is characterized in that:
The above-mentioned step of analyzing comprises:
Above-mentioned voltage signal is carried out the step of differential; And
The above-mentioned voltage signal of institute's differential is compared with threshold value with judgement, judge whether be the bad step of film.
12. the film inspection method described in claim 11 is characterized in that, comprises:
According to the number of times of the light of the bad part of having accepted to see through above-mentioned film, be subjected to light at interval and the translational speed of film obtain the step of the length of bad part; And
The step of the kind of bad part being classified according to the waveform of the voltage signal of the length of above-mentioned bad part and above-mentioned institute differential.
13. the film inspection method described in claim 12 is characterized in that, comprises:
The storing step of the inspection data of the above-mentioned thin slice of the view data that storage obtains so that above-mentioned film is made a video recording;
The input that utilizes the operator is in the regional given step of specifying the arbitrary region on the above-mentioned film on the picture; And
Extract extraction step in the above-mentioned inspection data of from above-mentioned storing step, being stored with the inspection data of the specified above-mentioned zone of above-mentioned zone given step.
14. the film inspection method described in claim 13 is characterized in that, comprises:
The reel step of above-mentioned film;
The storing step of the inspection data of the above-mentioned film of the data that storage obtains so that above-mentioned film is made a video recording;
Utilize operator's input on picture, to specify the reeling condition given step of the kind of the state that above-mentioned thin slice reeled; And
Read out in the above-mentioned inspection data of being stored in the above-mentioned storing step, and defect point the positional information on above-mentioned thin slice of above-mentioned thin slice that will be comprised therein when checking be transformed to with above-mentioned reeling condition given step specified the shift step of kind corresponding position information.
15. the film inspection method described in claim 14 is characterized in that, comprises:
Above and below at above-mentioned film between above-mentioned light source and sensor disposes polaroid respectively, and makes the step of this polaroid of light transmission.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP180395/2005 | 2005-06-21 | ||
| JP2005180395A JP4829542B2 (en) | 2005-06-21 | 2005-06-21 | Film inspection apparatus and film inspection method |
| JP2005275574A JP4829578B2 (en) | 2005-09-22 | 2005-09-22 | Inspection data processing apparatus, inspection data processing method, inspection data processing program, and computer-readable storage medium storing inspection data processing program |
| JP275574/2005 | 2005-09-22 | ||
| PCT/JP2006/312293 WO2006137385A1 (en) | 2005-06-21 | 2006-06-20 | Film inspection apparatus and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101198859A true CN101198859A (en) | 2008-06-11 |
| CN101198859B CN101198859B (en) | 2012-03-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800219313A Expired - Fee Related CN101198859B (en) | 2005-06-21 | 2006-06-20 | Film inspection device and film inspection method |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101211352B1 (en) |
| CN (1) | CN101198859B (en) |
| WO (1) | WO2006137385A1 (en) |
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| CN102906561A (en) * | 2010-05-25 | 2013-01-30 | 东丽株式会社 | Film defect inspection device, defect inspection method, and release film |
| CN104359501A (en) * | 2014-10-17 | 2015-02-18 | 成都聚智工业设计有限公司 | Semi-automatic film quality testing mechanism |
| CN105910794A (en) * | 2015-02-25 | 2016-08-31 | 东友精细化工有限公司 | Apparatus and method for detecting defect of optical film |
| CN107462580A (en) * | 2016-06-02 | 2017-12-12 | 住友化学株式会社 | Defect inspecting system, film manufacturing device and defect detecting method |
| CN108362703A (en) * | 2017-12-14 | 2018-08-03 | 北京木业邦科技有限公司 | A kind of veneer detection method and detection device based on artificial intelligence |
| CN108982530A (en) * | 2018-05-24 | 2018-12-11 | 京东方科技集团股份有限公司 | A kind of detection system of backlight coiled strip |
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| CN101398435B (en) * | 2007-09-29 | 2013-08-28 | 深圳市比克电池有限公司 | Method for monitoring coiling material quality of winding machine |
| JP7218723B2 (en) * | 2018-03-15 | 2023-02-07 | 東レ株式会社 | Foreign matter inspection method, inspection device, film roll, and film roll manufacturing method |
| CN113758426A (en) * | 2021-08-17 | 2021-12-07 | 深圳新视智科技术有限公司 | Method and device for determining width of cloth, electronic equipment and readable storage medium |
| KR102342697B1 (en) * | 2021-09-30 | 2021-12-24 | 주식회사 엔비컨스 | Device for detecting pin hole |
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- 2006-06-20 WO PCT/JP2006/312293 patent/WO2006137385A1/en active Application Filing
- 2006-06-20 CN CN2006800219313A patent/CN101198859B/en not_active Expired - Fee Related
- 2006-06-20 KR KR1020087000756A patent/KR101211352B1/en not_active IP Right Cessation
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| CN102906561A (en) * | 2010-05-25 | 2013-01-30 | 东丽株式会社 | Film defect inspection device, defect inspection method, and release film |
| CN102906561B (en) * | 2010-05-25 | 2015-10-07 | 东丽株式会社 | Detecting film defect device, defect detecting method and mold release film |
| CN104359501A (en) * | 2014-10-17 | 2015-02-18 | 成都聚智工业设计有限公司 | Semi-automatic film quality testing mechanism |
| CN105910794A (en) * | 2015-02-25 | 2016-08-31 | 东友精细化工有限公司 | Apparatus and method for detecting defect of optical film |
| CN107462580A (en) * | 2016-06-02 | 2017-12-12 | 住友化学株式会社 | Defect inspecting system, film manufacturing device and defect detecting method |
| CN108362703A (en) * | 2017-12-14 | 2018-08-03 | 北京木业邦科技有限公司 | A kind of veneer detection method and detection device based on artificial intelligence |
| CN108982530A (en) * | 2018-05-24 | 2018-12-11 | 京东方科技集团股份有限公司 | A kind of detection system of backlight coiled strip |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20080028922A (en) | 2008-04-02 |
| CN101198859B (en) | 2012-03-28 |
| KR101211352B1 (en) | 2012-12-11 |
| WO2006137385A1 (en) | 2006-12-28 |
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