CN101197302A - System for eliminating static - Google Patents
System for eliminating static Download PDFInfo
- Publication number
- CN101197302A CN101197302A CNA2007101991514A CN200710199151A CN101197302A CN 101197302 A CN101197302 A CN 101197302A CN A2007101991514 A CNA2007101991514 A CN A2007101991514A CN 200710199151 A CN200710199151 A CN 200710199151A CN 101197302 A CN101197302 A CN 101197302A
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- Prior art keywords
- xelminator
- mechanical arm
- static
- eliminate
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003068 static effect Effects 0.000 title claims abstract description 47
- 239000007921 spray Substances 0.000 claims description 3
- 230000008030 elimination Effects 0.000 abstract description 3
- 238000003379 elimination reaction Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 36
- 239000000758 substrate Substances 0.000 description 35
- 238000010586 diagram Methods 0.000 description 10
- 230000009471 action Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 210000001364 upper extremity Anatomy 0.000 description 1
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- Elimination Of Static Electricity (AREA)
Abstract
A system for static elimination comprises an electric-manipulator, a grip jaw arranged in the front end of the electric-manipulator, a connecting rod set arranged on the electric-manipulator and a static eliminator arranged on the connecting rod set. The static eliminator can reciprocate in a fixed scope to eliminate static by the connecting rod set.
Description
The application is to be on April 28th, 2006 applying date, is entitled as the dividing an application of No. 200610080122.1 application for a patent for invention of " a kind of system that is used to eliminate static ".
Technical field
The present invention is about a kind of system that is used to eliminate static, particularly a kind of in conjunction with Xelminator and mechanical arm in order to eliminate the system of large-size glass substrate surface static.
Background technology
Along with light, thin, the high product trend and the demand of resolving, hanging down radiation, Plasmia indicating panel (PDP), display panels (LCD), organic luminous panel flat-panel screens such as (OLED) also are subjected to consumer's favor day by day, and in order to obtain good quality bills of materials and production capacity yields, each manufacture craft link is all extremely important.
Manufacture process with liquid crystal display panel of thin film transistor (TFT-LCD) is an example; owing to the conveying transmission of glass baseplate surface between each manufacture craft produces static through regular meeting because contact or rub; even the generation of micro-static also will cause the particle matter arround the electric field absorption and pollute.In addition, static can cause the accumulation of electric charge, so after buildup of static electricity arrives to a certain degree, produce huge sparking through regular meeting, thereby cause the damage that is arranged on the semiconductor element on the glass substrate.Therefore, in the manufacture process of glass substrate, must often carry out the elimination program of static.Moreover, because glass substrate is to deposit in the card casket (cassette), the card casket just might produce static in carrying and transport process, and in the process of production flat-panel screens, the card casket is to be placed the card casket storage area (cassette station) that is placed on the manufacture craft board, one is blocked usually corresponding two to four Ka Xiabu (cassette port) of casket storage area, and then carries out the action of getting sheet and putting sheet by mechanical arm.Usually in this process, just be very easy to induce the generation of static.Therefore, traditional prior art be around the Ka Xiabu all device one shaft-like Xelminator is arranged, no matter and this Ka Xiabu whether the card casket is arranged in manufacture craft, Xelminator all can maintain the state of startup always.
Fig. 1 is the schematic diagram of traditional shaft-like Xelminator.As shown in Figure 1, shaft-like Xelminator 2 is that ac high-voltage 4 is applied to needle electrode 6, produces ion by the corona discharge between acusector 6 and ground plane.And then by the high pressure dry gas that feeds in the bar (compressive dry air CDA), is sprayed to glass substrate 8 surfaces with the ion that acusector 6 is produced, and the mode that sees through electrically neutralization is eliminated the static on glass substrate 8 surfaces.
In conventional art, the configuration of shaft-like Xelminator depends on that the distance between glass substrate area size, shaft-like Xelminator and the glass substrate, shaft-like Xelminator contain factors such as angle.Therefore, under the situation that the glass substrate size continues to increase, the quantity of shaft-like Xelminator configuration will increase relatively, and the consumption of CDA also is directly proportional with bar footpath volume and increases simultaneously.Yet, increasing shaft-like Xelminator quantity except meeting increases cost, the configuration that also can influence space on the card casket storage area is simultaneously used.In addition, the increase of CDA consumption not only can make power consumption increase, and more will cause the difficulty on the dust free room Temperature and Humidity Control simultaneously.Therefore, the flat-panel screens industry not only is effectively to remove static for the requirement of Xelminator, more requires simultaneously to reduce cost and save the energy.
Summary of the invention
The invention relates to a kind of system that is used to eliminate static, refer in particular to a kind of in conjunction with Xelminator and mechanical arm in order to eliminate the system of large-size glass substrate surface static.
Because the problem that above-mentioned conventional art met with, the present invention discloses a kind of system that is used to eliminate static, it comprises that a mechanical arm, is arranged on the jaw of this mechanical arm front end, and is arranged on connection rod set on this mechanical arm, an and Xelminator that is arranged on this connection rod set, wherein this Xelminator can move back and forth in a fixed range by this connection rod set, to eliminate static.
The present invention also discloses a kind of system that is used to eliminate static, and it comprises that a mechanical arm, is arranged on the jaw of this mechanical arm front end, and a shaft-like formula Xelminator that is arranged on this mechanical arm.
The present invention also discloses a kind of system that is used to eliminate static, it comprises that one first mechanical arm, is arranged on the platform that the jaw of this first mechanical arm front end, one second mechanical arm, are arranged on this second mechanical arm front end, an and Xelminator that is arranged on the platform, wherein this second mechanical arm can move back and forth in a fixed range, to eliminate static.
Because the present invention is installed on Xelminator on the mechanical arm, so can significantly reduce the requirement of installing space size, effectively reduces the installation quantity and the CDA use amount of Xelminator, and can directly eliminate the surface electrostatic of large-size glass substrate fast.In addition, the present invention can remove static at bloody good time, with have at product the behavior of peeling off and most advanced and sophisticated near the time do the action that destatics, therefore can effectively reach the purpose of electrostatic defending again.
Below be detailed description of the present invention and accompanying drawing.Yet the appended accompanying drawing usefulness with explanation only for reference is not to be used for the present invention is limited.
Description of drawings
Fig. 1 is the schematic diagram of traditional shaft-like Xelminator.
Fig. 2 is the system and device schematic diagram that is used to eliminate static that first preferred embodiment of the invention proposed.
Fig. 3 is the system and device schematic diagram that is used to eliminate static that second preferred embodiment of the invention proposed.
Fig. 4 to Fig. 6 is the system and device schematic diagram that is used to eliminate static that third preferred embodiment of the invention proposed.
Fig. 7 is the system and device schematic diagram that is used to eliminate static that four preferred embodiment of the invention proposed.
The main element symbol description
2 shaft-like Xelminator 4 ac high-voltages
6 acusectors, 8 glass substrates
10 eliminate electrostatic system 12 mechanical arms
13 glass substrates, 14 jaws
15 trailing arms, 16 Xelminators
18 connection rod set, 20 pivoting points
22 first servomotors, 24 second servomotors
30 eliminate electrostatic system 32 mechanical arms
33 glass substrates, 34 jaws
35 trailing arms, 36 Xelminators
38 connection rod set, 39 servomotors
40 slide rails, 42 stationary links
50 eliminate electrostatic system 52 mechanical arms
53 glass substrates, 54 jaws
55 trailing arms, 56 Xelminators
58 holders, 62 mechanical arms
63 glass substrates, 66 Xelminators
68 holders 70 are eliminated electrostatic system
72 first mechanical arms, 73 glass substrates
74 jaws, 75 trailing arms
76 second mechanical arms, 78 platforms
80 Xelminators
Embodiment
Fig. 2 is the system and device schematic diagram that is used to eliminate static that first preferred embodiment of the invention proposed.As shown in Figure 2, eliminate electrostatic system 10 and comprise a mechanical arm 12, and mechanical arm 12 front ends have a jaw (fork) 14 that is used to pick and place glass substrate 13, Xelminator 16 then is to be erected on the mechanical arm 12 by connection rod set 18.Wherein, the employed Xelminator 16 of this preferred embodiment can be all types of Xelminator equipment such as shaft-like formula, fan-type, high frequency type, light irradiation type, and jaw 14 also comprises many trailing arms (arm) 15, is used for holding glass substrate 13.The connection rod set 18 that connects Xelminator 16 has two pivoting points 20, and first servomotor 22 and second servomotor 24 on pivoting point 20 come control link group 18, Xelminator 16 drives linearly reciprocating motion of Xelminator 16, so that can scan whole glass substrate 13.In this preferred embodiment, when mechanical arm 12 execution pick and place the sheet action, can start Xelminator 16, and scan glass substrate 13, and then eliminate the surface electrostatic of glass substrate 13 by connection rod set 18 drive Xelminators 16.
Fig. 3 is the system and device schematic diagram that is used to eliminate static that second preferred embodiment of the invention proposed.As shown in Figure 3, eliminate electrostatic system 30 and comprise a mechanical arm 32, these mechanical arm 32 front ends have one and are used to the jaw 34 that picks and places glass substrate 33 and comprise many trailing arms 35, and Xelminator 36 is to be erected on the mechanical arm 32 by connection rod set 38, and its employed Xelminator 36 also can be all types of Xelminator equipment such as shaft-like formula, fan-type, high frequency type, light irradiation type.Wherein, be with the first preferred embodiment difference: connection rod set 38 comprises the slide rail 40 on the trailing arm 35 that is separately positioned on jaw 34 both sides, the stationary links 42 that two ends are connected with Xelminator 36 with slide rail 40 respectively, and be arranged on stationary links 42 servomotor 39 on one of them.In this preferred embodiment, carry out when mechanical arm 32 and can start Xelminator 36 when picking and placeing the sheet action, and drive Xelminators 36 by connection rod set 38 and back and forth scan glass substrate 33, and then eliminate 33 surface electrostatics of glass substrate along the direction of slide rail 40.Be noted that at this: be to be example shown in the figure with three trailing arms, but trailing arm number is set not as limit; The execution mode that uses different trailing arm numbers is contained in the present invention actually.
Fig. 4 to Fig. 6 is the system and device schematic diagram that is used to eliminate static that third preferred embodiment of the invention proposed.As shown in Figure 4, eliminate electrostatic system 50 and comprise a mechanical arm 52, and mechanical arm 52 front ends have one and be used to the jaw 54 that picks and places glass substrate 53 and comprise many trailing arms, and Xelminator 56 is to set up by holder 58 to be installed on the mechanical arm 52.The employed Xelminator 56 of this preferred embodiment can be all types of Xelminator equipment such as shaft-like formula, fan-type, high frequency type, light irradiation type.With shaft-like formula Xelminator is example, when picking and placeing the sheet action, mechanical arm 52 execution can start Xelminator 56, make in the body of rod of Xelminator 56 and be connected with gases at high pressure, and apply an alternating voltage, make the interior spray point (as shown in Figure 1) of the body of rod of Xelminator 56 produce corona discharge, relend by the blowing of band negative ions gas, with in and the static on glass substrate 53 surfaces.As shown in Figure 5, effectively contain angle for control Xelminator 56, adjustable solidating reservation 58 overlaps so that the angle that gas blows produces in a special angle, and then negative ions contained to whole glass substrate 53 surfaces, so as to eliminating the surface electrostatic of glass substrate 53.In addition, contain angle demand and transparency area size according to difference, this preferred embodiment more can select the static eraser 56 of right quantity to install and adjust the position of its installation.As shown in Figure 6, optionally Xelminator 66 is set up on the holder 68 that is installed in mechanical arm 62 lower ends, make Xelminator 66 act directly on glass substrate 63 belows, eliminate the bottom surface static of glass substrate 63.Except that set-up mode shown in Figure 6, in addition Xelminator 66 can be set up simultaneously upper end and the lower end that is installed in mechanical arm 62, with the static of the surface and the bottom surface of synchronism eliminates glass substrate 63.
Fig. 7 is the system and device schematic diagram that is used to eliminate static that four preferred embodiment of the invention proposed.As shown in Figure 7, eliminate electrostatic system 70 and comprise that one first mechanical arm 72, one second mechanical arm 76, are arranged on the platform 78 of the front end of second mechanical arm 76, and at least one Xelminator 80 that is arranged on the platform.First mechanical arm, 72 front ends have one and are used to the jaw 74 that picks and places glass substrate 73 and comprise many trailing arms 75.Xelminator 80 can be the Xelminator that industries such as shaft-like formula, fan-type, high frequency type, light irradiation type are known; Therefore, the present invention is not limited to use the Xelminator of particular types.Before 72 execution of first mechanical arm pick and place the sheet action, second mechanical arm 76 can extend glass substrate 73 lower edges or upper limb earlier, carry out static and eliminate action, also or when first mechanical arm 72 carry out when picking and placeing the sheet action, second mechanical arm 76 can move with first mechanical arm 72 simultaneously, to reach the function that static is eliminated synchronously.
In sum, the present invention is used to eliminate the system of static and conventional art and compares and have following advantage at least:
1. can directly use existing static abatement apparatus and technology, for example the structure with Xelminator directly combines with mechanical arm, or on the mechanical arm main body Xelminator etc. is installed.
2. can remove static at bloody good time, for example the behavior of peeling off is arranged at product and have most advanced and sophisticated near waiting time, the action that just destatics, so can more effectively reach the purpose of electrostatic defending.
3. need not use CDA or only need use a small amount of CDA.Because static removal equipment is directly to carry out the elimination of static at generation of static electricity zone (for example surface of glass substrate and bottom surface), and distance is very near, therefore can utilize ambient windstream and need not use CDA,, and reduce power consumption with the degree of difficulty on the reduction dust free room Temperature and Humidity Control; In addition, if need eliminate static faster, then can reach better effect by supplying with a spot of CDA.
4. Xelminator directly is installed on the mechanical arm, can effectively reduces the requirement of installing space size, the space disposes the problem of using on the legacy card casket storage area to solve, and reduces the installation quantity of Xelminator, reduces cost.
The above only is a part preferred embodiment of the present invention, and is all according to equalization variation and modification that the present invention did, all should belong to the scope that the present invention is contained.
Claims (2)
1. system that is used to eliminate static, this system comprises:
One mechanical arm;
One jaw is arranged on this mechanical arm front end; And
One shaft-like formula Xelminator is arranged on this mechanical arm, and wherein special angle is fixed in this shaft-like formula Xelminator adjustment, and this shaft-like formula Xelminator comprises:
The one microscler body of rod is provided with a high-pressure gas pipeline and a supply unit in this microscler body of rod;
A plurality of spray points are arranged on this microscler body of rod, and electrically connect this supply unit; And
A plurality of nozzles are arranged on this microscler body of rod, and described nozzle is separately corresponding to described spray point,
And communicate with this high-pressure gas pipeline.
2. system according to claim 1, wherein this jaw comprises a plurality of trailing arms along the adjacent setting of horizontal plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101991514A CN100508156C (en) | 2006-04-28 | 2006-04-28 | System for eliminating static |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101991514A CN100508156C (en) | 2006-04-28 | 2006-04-28 | System for eliminating static |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100801221A Division CN100389486C (en) | 2006-04-28 | 2006-04-28 | System for eliminating static |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101197302A true CN101197302A (en) | 2008-06-11 |
| CN100508156C CN100508156C (en) | 2009-07-01 |
Family
ID=39547595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101991514A Expired - Fee Related CN100508156C (en) | 2006-04-28 | 2006-04-28 | System for eliminating static |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100508156C (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102050330A (en) * | 2010-11-05 | 2011-05-11 | 深圳市华星光电技术有限公司 | Mechanical arm and transport device provided with same |
| CN102700936A (en) * | 2012-06-11 | 2012-10-03 | 卓越（苏州）自动化设备有限公司 | Corner conveying device |
| CN103682178A (en) * | 2013-12-27 | 2014-03-26 | 京东方科技集团股份有限公司 | Packaging method of organic light emitting diode and organic light emitting diode device |
| WO2015010355A1 (en) * | 2013-07-26 | 2015-01-29 | 深圳市华星光电技术有限公司 | Static elimination device, cassette bearing apparatus and material handling system |
| CN105430857A (en) * | 2014-09-09 | 2016-03-23 | 安立股份有限公司 | Static electricity neutralizing device and static electricity neutralizing method |
| CN107611069A (en) * | 2016-07-12 | 2018-01-19 | 北京北方华创微电子装备有限公司 | Manipulator and semiconductor processing equipment |
| WO2018176918A1 (en) * | 2017-03-31 | 2018-10-04 | 京东方科技集团股份有限公司 | Conveying apparatus, conveying method, and vacuum evaporation apparatus |
| CN108657684A (en) * | 2018-06-29 | 2018-10-16 | 宁波大学 | A kind of dustbin being convenient for changing refuse bag |
| CN109196633A (en) * | 2016-06-03 | 2019-01-11 | 德国艾托特克公司 | Static discharge unit |
-
2006
- 2006-04-28 CN CNB2007101991514A patent/CN100508156C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102050330A (en) * | 2010-11-05 | 2011-05-11 | 深圳市华星光电技术有限公司 | Mechanical arm and transport device provided with same |
| CN102050330B (en) * | 2010-11-05 | 2013-02-06 | 深圳市华星光电技术有限公司 | Mechanical arm and transport device provided with same |
| CN102700936A (en) * | 2012-06-11 | 2012-10-03 | 卓越（苏州）自动化设备有限公司 | Corner conveying device |
| CN102700936B (en) * | 2012-06-11 | 2015-05-27 | 卓越（苏州）自动化设备有限公司 | Corner conveying device |
| WO2015010355A1 (en) * | 2013-07-26 | 2015-01-29 | 深圳市华星光电技术有限公司 | Static elimination device, cassette bearing apparatus and material handling system |
| CN103682178A (en) * | 2013-12-27 | 2014-03-26 | 京东方科技集团股份有限公司 | Packaging method of organic light emitting diode and organic light emitting diode device |
| CN105430857A (en) * | 2014-09-09 | 2016-03-23 | 安立股份有限公司 | Static electricity neutralizing device and static electricity neutralizing method |
| CN109196633A (en) * | 2016-06-03 | 2019-01-11 | 德国艾托特克公司 | Static discharge unit |
| CN109196633B (en) * | 2016-06-03 | 2022-03-25 | 德国艾托特克公司 | Electrostatic discharge unit |
| CN107611069A (en) * | 2016-07-12 | 2018-01-19 | 北京北方华创微电子装备有限公司 | Manipulator and semiconductor processing equipment |
| CN107611069B (en) * | 2016-07-12 | 2020-08-21 | 北京北方华创微电子装备有限公司 | Robot and semiconductor processing apparatus |
| WO2018176918A1 (en) * | 2017-03-31 | 2018-10-04 | 京东方科技集团股份有限公司 | Conveying apparatus, conveying method, and vacuum evaporation apparatus |
| CN108657684A (en) * | 2018-06-29 | 2018-10-16 | 宁波大学 | A kind of dustbin being convenient for changing refuse bag |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100508156C (en) | 2009-07-01 |
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