CN204496136U - Anti-static device and flat pannel display manufacturing equipment - Google Patents
Anti-static device and flat pannel display manufacturing equipment Download PDFInfo
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- CN204496136U CN204496136U CN201520004355.8U CN201520004355U CN204496136U CN 204496136 U CN204496136 U CN 204496136U CN 201520004355 U CN201520004355 U CN 201520004355U CN 204496136 U CN204496136 U CN 204496136U
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Abstract
The utility model discloses a kind of anti-static device and flat pannel display manufacturing equipment, relate to flat pannel display and manufacture field, can solve flat pannel display industry because of electrostatic accumulation, discharge problem display panel being caused to electrostatic damage, and cost is low, installs, uses, easy to maintenance.The anti-static device that the utility model provides comprises: adjustable air supply system, for providing pressure gas; Multiple air outlet, the pressure gas that described adjustable air supply system provides is blown to substrate by described air outlet; Spray point, is arranged in described air outlet, for being made the air ionization near described spray point needle point by electric discharge, makes described air outlet institute blowing contain ion.
Description
Technical field
The utility model relates to flat pannel display and manufactures field, particularly relates to a kind of anti-static device and flat pannel display manufacturing equipment.
Background technology
In the production run of panel display board, display panel needs to be transported frequently, transport, and uses contraposition board to realize these functions in the production line that automaticity is higher.Contraposition board is provided with vacuum cup, and in handling process, vacuum cup and display panel will carry out contacting, fitting and disengaging movement continually, and contraposition board and display panel can rub because these move to produce, thus cause electrostatic accumulation.In addition, contraposition board self runs up also can produce electrostatic accumulation, and the surface of contact of electrostatic between contraposition board and display panel of these accumulation discharges, and can cause display panel electrostatic damage most probably, affect product quality, cause damage.
The mode of current solution electrostatic problem carries out x-ray bombardment in surface, although x-ray bombardment can reach the object that electrostatic is removed, but X ray is comparatively large to human body (operation area domestic demand very important person operate) hazard ratio, and the installation of X-ray generator, use, maintenance cost are all higher.
Utility model content
Embodiment of the present utility model provides a kind of anti-static device and flat pannel display manufacturing equipment, can solve flat pannel display industry because of electrostatic accumulation, discharge problem display panel being caused to electrostatic damage, and cost is low, installs, uses, easy to maintenance.
For achieving the above object, embodiment of the present utility model adopts following technical scheme:
The utility model provides a kind of anti-static device, manufacturing field, comprising: adjustable air supply system, for providing pressure gas for flat pannel display; Multiple air outlet, the pressure gas that described adjustable air supply system provides is blown to substrate by described air outlet; Spray point, is arranged in described air outlet, for being made the air ionization near described spray point needle point by electric discharge, makes described air outlet institute blowing contain ion.
Alternatively, described air outlet is arranged on surface that described manufacturing equipment contacts with substrate.
Further, described anti-static device also comprises: control module, for by controlling the sparking voltage of described spray point, the gas flow of the gas outlet of described adjustable air supply system and/or described air outlet apart from the distance of described substrate surface, regulate the ion concentration arriving described substrate surface.
Further, described anti-static device also comprises: movable fixture, and drive and control described movable fixture motion drive control part; Described multiple air outlet is arranged on described movable fixture, and described drive control part is connected with described control module.
Alternatively, described adjustable air supply system comprises the flow-control module for controlling out airshed, and described flow-control module is connected with described control module.
Alternatively, also comprise the circuit for providing voltage of described spray point, described circuit for providing voltage comprises Voltage Regulator Module, and described Voltage Regulator Module is connected with described control module.
Preferably, in described air outlet, be provided with gas injection apparatus, or described air outlet is directly formed by described gas injection apparatus; Described gas injection apparatus comprises filtrator, air flue and shower nozzle; The inlet end of described gas injection apparatus is connected by the gas outlet of pipeline with described adjustable air supply system, and the pressure gas that described adjustable air supply system provides enters from described inlet end, sprays after described filtrator, air flue from described shower nozzle.
Preferably, the gas flow of described gas injection apparatus is also provided with: voltage operated device, for measuring and regulating the pressure from described shower nozzle ejection gas, is connected with described control module.
Preferably, described adjustable air supply system is also provided with on the gas circuit of described air outlet: the even pressure storehouse that confined space is formed; Described multiple air outlet is arranged on described even pressure storehouse, is the air outlet in described even pressure storehouse; The air inlet port in described even pressure storehouse is connected by pipeline with the gas outlet of described adjustable air supply system.
Alternatively, the air inlet port in described even pressure storehouse is the thicker pipeline of a gradual change.
Alternatively, the gas circuit between described adjustable air supply system to described air outlet is provided with solenoid valve, and described solenoid valve is connected with described control module.
Alternatively, described adjustable air supply system is provided with on the gas circuit of described air outlet: gas shunt device, its inlet end is connected with described steam line, and its outlet side is multiple, is connected respectively or directly forms described multiple air outlet with described multiple air outlet.
Alternatively, described adjustable air supply system is air compressor.
The utility model also provides a kind of flat pannel display manufacturing equipment, comprises the anti-static device described in any one.
Alternatively, described flat pannel display manufacturing equipment, also comprises: range sensor, for responding to the distance between substrate and described flat pannel display manufacturing equipment.
Alternatively, described flat pannel display manufacturing equipment is Thermocuring equipment, or needs the checkout equipment of pressurization, or contraposition/rotary machine.
Alternatively, described flat pannel display manufacturing equipment is contraposition/rotary machine, is provided with cavity in the agent structure of described contraposition/rotary machine, arranges the adjustable air supply system of described anti-static device in this cavity; Described agent structure is also formed with the surface contacted with substrate, and this is provided with motion guide groove on the surface, and the movable fixture of described anti-static device moves along described motion guide groove.
Alternatively, the drive control part of described anti-static device comprises driven wheel and toothed timing belt; The axis of described movable fixture is fixed on described toothed timing belt, and described toothed timing belt is meshed with described driven wheel, and when making described driven wheel drive described toothed timing belt to move, described movable fixture moves along described motion guide groove.
The anti-static device that the utility model embodiment provides and flat pannel display manufacturing equipment, be arranged in air outlet by spray point, the pressure gas blowing to substrate bottom surface is made to contain ion, the electrostatic caused because of friction with substrate in ion in gas, avoid electrostatic accumulation, thus avoid Electro-static Driven Comb to cause electrostatic damage to display panel, and this installation cost is low, installs, uses, easy to maintenance.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the utility model embodiment, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The principle schematic of the anti-static method in the field that manufactures for flat pannel display that Fig. 1 provides for the utility model embodiment one;
The part-structure schematic diagram of the anti-static device that Fig. 2 provides for the utility model embodiment two;
The control system schematic diagram of the anti-static device that Fig. 3 provides for the utility model embodiment two;
The schematic diagram of the air outlet of the anti-static device that Fig. 4 provides for the utility model embodiment two;
Fig. 5 is the structural representation of gas injection apparatus in the utility model embodiment two;
Fig. 6 is the structural representation of anti-static device in the utility model embodiment two;
The principle schematic of the Thermocuring equipment that Fig. 7 provides for the utility model embodiment two;
The structural representation of the Thermocuring equipment heating chamber that Fig. 8 provides for the utility model embodiment two;
The concrete structure schematic diagram of the checkout equipment test chamber that Fig. 9 provides for the utility model embodiment two;
Figure 10 is the plan structure schematic diagram of a kind of existing contraposition board in the utility model embodiment two;
The plan structure schematic diagram of the contraposition board that Figure 11 provides for the utility model embodiment two;
Figure 12 is the band screen vertical view of the contraposition board having installed anti-static device in the utility model embodiment two;
Figure 13 is the vertical view of the drives structure of anti-static device on contraposition board in the utility model embodiment two;
Figure 14 is the gas piping figure of Destaticizing device on contraposition board in the utility model embodiment two.
Reference numeral
7-positive ion, 8-negative ion, 9-display panel, 10-substrate, 101-bottom surface, 11-pressure gas,
The table top of 20-board, 21-air outlet, 22-spray point, 23-control module, 24-movable fixture,
241-drive control part, the adjustable air supply system of 25-, 251-flow-control module,
26-circuit for providing voltage, 261-Voltage Regulator Module, the even pressure storehouse of 27-, the air outlet in the even pressure storehouse of 271-,
The air inlet port in the even pressure storehouse of 272-, 28-solenoid valve, 29-gas shunt device I,
291-gas shunt device II, 292-gas shunt device III, 30-gas injection apparatus, 31-filtrator,
32-air flue, 33-shower nozzle, 34-voltage operated device, 40-heating chamber, 41-cavity, 42-heating cavities,
43-heating plate, 44-infrared temperature measurement device, 45-thermopair, 50-test chamber,
51-Low emissivity cover glass cover, 52-detects cavity, 53-polaroid, 54-diffuser plate,
55-backlight group, 56-heating plate, 60-contraposition board main part, 61-range sensor,
62-drive control part, 63-vacuum cup, 64-drive control part, 65-motion guide groove, 66-axis,
67-toothed timing belt, 68-driven wheel, the engaged wheel of 69-toothed timing belt, 70-axis,
71-connects the air supply pipe of each air outlet, the air supply pipe that 72-is total.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.
Embodiment one
The utility model embodiment provides a kind of anti-static method manufacturing field for flat pannel display, as shown in Figure 1, the method mainly comprises: the gas 11 containing ion is blown in the bottom surface 101 to substrate 10, bottom surface 101 is the surface that substrate 10 contacts with flat pannel display manufacturing equipment, as shown in fig. 1 the lower surface of substrate 10.
In flat pannel display manufacture process, flat pannel display manufacturing equipment such as contraposition board, mechanical arm etc. will carry out contacting, fitting and disengaging movement with substrate (substrate in the present embodiment is used for being referred to as display panel and semi-manufacture thereof) continually, electrostatic accumulation can be caused because of friction, for solving this problem, the present embodiment is needing under the sight removing electrostatic or pre-electrostatic prevention generation, the gas containing ion is brushed in bottom surface 101 to substrate 10, the ion on the one hand in gas can in and substrate because of the electrostatic caused that rubs; The friction of manufacturing equipment and substrate 10 bottom surface 101 can also be reduced on the other hand, thus avoid electrostatic accumulation, and then avoid Electro-static Driven Comb to cause electrostatic damage to display panel, and the method cost is low, and corresponding removal electrostatic equipment is installed, use, easy to maintenance.
Specifically, air outlet can be arranged on flat pannel display manufacturing equipment and be used for accepting substrate, on the surface contact with substrate, rubbed, when sensor detect substrate close to flat pannel display manufacturing equipment within the specific limits time, start the gas brushed to the bottom surface 101 of substrate 10 containing ion.Further preferably, to needing, the manufacturing equipment of alignment operation being carried out as contraposition board etc. to substrate 10, the mode of blowing the pressure gas containing ion to substrate 10 bottom surface 101 can also be utilized, substrate 10 is held up and carries out contraposition, avoid because friction causes electrostatic accumulation.
On above-mentioned anti-static method basis, the utility model provides a kind of anti-static device manufacturing field for flat pannel display, this device can be particularly applicable on various flat pannel display manufacturing equipment, reduce friction, in and substrate on electrostatic, thus avoid Electro-static Driven Comb to cause electrostatic damage to display panel, cost is low, easily realizes.
Embodiment two
The utility model embodiment provides a kind of anti-static device, and manufacture field for flat pannel display, as illustrated in fig. 1 and 2, this anti-static device comprises: adjustable air supply system (not shown), for providing pressure gas; Multiple air outlet 21, the pressure gas that described adjustable air supply system provides is blown by the bottom surface 101 of air outlet 21 to substrate 10, and bottom surface is the surface that substrate 10 contacts with flat pannel display manufacturing equipment; Spray point 22, is arranged in air outlet 21, for being made the air ionization near spray point 22 needle point by electric discharge, makes air outlet 21 blowings contain ion.
Electrostatic produce be generally due to substrate frequently contact with flat pannel display manufacturing equipment, fit, contraposition, the phase mutual friction in process such as to be separated time produce, the anti-static device that the utility model embodiment provides is a kind of ion wind source of the gas, by brushing the gas containing ion to the surface of contact between flat pannel display manufacturing equipment and substrate, neutralize the electrostatic because friction etc. causes, avoid electrostatic accumulation, thus eliminate electrostatic damage.Wherein, preferably, air outlet 21 is blown to the bottom surface 101 (surface that contact with flat pannel display manufacturing equipment, that easily produce electrostatic accumulation) of substrate 10, directly can blow to substrate bottom surface 101 from bottom to top from the below of substrate 10 as shown in Figure 1, also can select to blow from the side of substrate 10 to substrate bottom surface 101 and the two surface of contact according to actual conditions.During when the first is blown to substrate bottom surface 101 from bottom to top, air outlet 21 can be formed in flat pannel display manufacturing equipment and be used for accepting substrate, on the surface (table top 20 of board) contact with substrate, rubbed, air outlet 21 can be slit-shaped shown in Fig. 2, can also be the pore of discrete shape distribution.
Wherein, adjustable air supply system is used for providing pressure gas (as pressurized air), and the flow of described pressure gas and air pressure are controlled, can adjust according to actual.Usually the air pressure of required pressure gas is 3-5 atmospheric pressure, and this atmospheric pressure value belongs to comparatively low pressure in pressurized air, adopts common air compressor just can reach, and can reduce equipment investment so on the one hand, also capable of reducing energy consumption on the other hand.
Spray point 22, for discharging after connection electric discharge high pressure, by the air ionization near needle point, is generally needle-like metal.Specifically, spray point 22 can arrange according to certain geometrical rule or density, and described electric discharge high pressure can reach 5K to 50KV usually.
Air outlet 21 for blowing out described pressurized air, to form laminar winds, for the ion at spray point 22 needle point near zone being taken to the substrate surface of electrostatic accumulation.Air outlet 2 can be slit-shaped, or is long flat, a similar gas source generator.Certainly, air outlet 21 shape can design according to actual conditions, so that the electrostatic accumulation eliminating substrate surface is advisable, described in above being not limited to.In addition, air outlet 21 is in the weather of spray point 22, and namely away from one end of substrate surface, the ion that spray point 22 ionizes can blow to substrate surface by the laminar winds formed like this.
Further, described anti-static device also comprises: control module, for by the sparking voltage of controlled discharge pin 22, the gas flow of the gas outlet of adjustable air supply system and/or air outlet 21 distance apart from substrate 10 surface, regulate the ion concentration arriving substrate 10 surface.This control module can independently be arranged, and also directly can utilize flat pannel display manufacturing equipment control module inherently, as long as can realize above-mentioned control.
Specifically, as shown in Figure 3, described anti-static device also comprises: movable fixture 24 and drive and control this movable fixture motion drive control part 241, described multiple air outlets 21 are arranged on movable fixture 24, drive control part 241 is connected with control module 23, movable fixture 24 and drive control part 241 cooperatively interact, and air outlet 21 is regulated to the distance on substrate 10 surface by control module 23.Adjustable air supply system 25 comprises the flow-control module 251 for controlling out airshed, and this flow-control module 251 is connected with control module 23.The circuit for providing voltage 26 of spray point 21 comprises Voltage Regulator Module 261, and this Voltage Regulator Module 261 is connected with control module 23.Control module 23, by the sparking voltage of controlled discharge pin 22, the gas flow of adjustable air supply system 25 gas outlet and air outlet 21 distance apart from substrate 10 surface, regulates the ion concentration arriving substrate 10 surface.Further, also electrostatic measurement module can be set, result be removed to electrostatic and tests, to control whether to continue to carry out electrostatic removal to substrate ejected ion gas.
Below for the anti-static device that the present embodiment provides, its control method is simply described below: step one, spray point 22 is connected electric discharge high pressure, makes spray point 22 by needle point electric discharge by the air ionization near it; Step 2, adjustable air supply system are to air outlet 21 input compressed-air, and compressed-air actuated flow and air pressure are controlled, can be adjusted by control module 23 according to the actual requirements; Step 3, blow out described pressurized air by air outlet 21, to form laminar winds, for the ion of spray point 22 needle point near zone being taken to the substrate surface of electrostatic accumulation; Step 4, by the sparking voltage of controlled discharge pin 22, the gas flow of adjustable air supply system 25 gas outlet and air outlet 21 distance apart from substrate 10 surface, regulate and arrive the ion concentration on substrate 10 surface, to reach good electrostatic removal effect.It should be noted that: above-mentioned steps there is no sequencing, can in the use procedure of anti-static device, to the actual demand of ion concentration, can by regulating the gas flow of above-mentioned electric discharge high pressure, input port and the air outlet distance to substrate surface.
Further alternatively, under needing to carry out the sight of alignment operation to substrate, substrate holds up and carries out contraposition by the gas that anti-static device can also be utilized to spray, and avoids in contraposition process because phase mutual friction causes electrostatic accumulation.As shown in Figure 4, for reaching the object to the good control holding up substrate air-flow, be provided with gas injection apparatus 30 in air outlet 21, or air outlet 21 is directly formed by gas injection apparatus; Gas injection apparatus comprises filtrator 31, air flue 32 and shower nozzle 33 as shown in Figure 5; The inlet end of gas injection apparatus is connected with the gas outlet 21 of adjustable air supply system by pipeline, and the pressure gas that adjustable air supply system provides enters from inlet end, sprays after filter 31, air flue 32 from shower nozzle 33.Preferably, the air flue 32 of gas injection apparatus is helical intake, can spray spiral air and form air cushion, produce larger uplift force, more easily make substrate floating.
Preferably, (gas flow is herein the general designation of inlet end to outlet side of gas injection apparatus to the gas flow of gas injection apparatus, air flue 32 above only refer to from shower nozzle ejection before a bit of gas flow) be also provided with: voltage operated device 34, for measuring and regulating the pressure from shower nozzle ejection gas, be connected with control module 23.By setting up gas injection apparatus 30, adopting bottom to blow, utilizing helical intake to form air cushion and substrate is held up, making it suspension and get up to carry out contraposition, reduce friction, fundamentally eliminating the root that electrostatic produces, reduce electrostatic accumulation.To the control to the distance of substrate surface of the gas flow of input port and air outlet before gas injection apparatus 30 combines again, more can finely control the current rate of anti-static device ejection, control to match with contraposition, can realize without the contraposition that rubs.
As shown in Figure 6, one preferred embodiment in, adjustable air supply system is also provided with on the gas circuit of air outlet: confined space formed even pressure storehouse 27; Air outlet 271 piping in even pressure storehouse 27 is connected with the inlet end of gas injection apparatus 30, and the air inlet port 272 in even pressure storehouse 27 is connected by pipeline with the gas outlet of adjustable air supply system 25; The gas pressure intensity that even pressure storehouse 27 can make multiple air outlet 21 spray is consistent, avoids substrate to tilt or uneven and affect manufacturing process.Alternatively, the air inlet port 272 in even pressure storehouse 27 is the thicker pipeline of a gradual change or is provided with the devices such as baffle plate, avoid the pressure of gas to gas outlet rushed in from air inlet port 272 to have an impact, thus the gas pressure intensity that each air outlet 21 is sprayed is consistent.In addition, if do not arrange gas injection apparatus 30 in air outlet 21, the air outlet 271 in even pressure storehouse 27 also can directly be conducted with multiple air outlet 21, or multiple air outlet 21 is directly arranged on even pressure storehouse 27, and the air outlet 271 in even pressure storehouse 27 directly forms air outlet 21.
Further preferably, in the gas circuit between adjustable air supply system 25 to air outlet 21, such as on pressure gas enters before even pressure storehouse 27 gas circuit, be provided with solenoid valve 28, solenoid valve 28 is connected with control module 23.Specifically, by gas shunt device I29, adjustable air supply system 25 gas circuit is out divided into multiple branch road, a solenoid valve 28 is installed by each branch road, and then by gas shunt device II 291, each branch road is synthesized a gas circuit.Adopt and in such a way solenoid valve 28 is installed, the controllability to gas flow can be increased.
The anti-static device that the utility model embodiment provides can be particularly applicable on various flat pannel display manufacturing equipment, reduces friction, in and electrostatic on substrate, thus avoid Electro-static Driven Comb to cause electrostatic damage to display panel, cost is low, easily realizes.On the other hand, regulated and controled by the adjustable air supply system 25 of anti-static device, solenoid valve 28, gas injection apparatus 30 pairs of gases, to the control of air outlet to the distance of substrate surface before combining again, more can finely control the current rate of anti-static device ejection, control to match with contraposition, can realize without friction contraposition.
The utility model embodiment also provides a kind of flat pannel display manufacturing equipment, comprises the anti-static device described in any one.
Described anti-static device can specifically be arranged on various flat pannel display manufacturing equipment, the checkout equipment pressurizeed as electrospinning device, Thermocuring equipment, needs and contraposition/rotary machine etc., in order to reduce the phase mutual friction of substrate and equipment, in and substrate on electrostatic, thus avoid Electro-static Driven Comb to cause electrostatic damage to display panel, cost is low, easily realizes.
Alternatively, above-mentioned flat pannel display manufacturing equipment, also comprises: range sensor, for responding to the distance between substrate and described flat pannel display manufacturing equipment.Range sensor, in order to respond to the distance between substrate and described flat pannel display manufacturing equipment, realizes gas and sprays and connect, send coordinating between substrate.
In order to those skilled in the art better understand the technical scheme that the utility model embodiment provides, the anti-static device provided the utility model below by specific embodiment and the structure of flat pannel display manufacturing equipment are described in detail.
(1), electrospinning device
Electrostatic spinning is a kind of special fiber fabrication process, and polymer solution or melt carry out jet spinning in highfield.Under electric field action, the drop at syringe needle place can become taper shape (i.e. " taylor cone ") from spherical, and obtains fiber filaments from conical tip extension.This mode can produce the polymer filaments of nanometer grade diameter.Electrostatic spinning technique is also a kind of technology simply and efficiently preparing micro nanometer fiber film, due to this technology equipment needed thereby and experimental cost low, the unique advantage such as the pulp freeness prepared is large, applicability is extensive, receives much concern in recent years.In the process that liquid crystal display manufactures, this technology is utilized to prepare film such as ITO transparent conductive film etc.
In the process that liquid crystal display manufactures, in and the electrostatic accumulation of substrate surface, adopt and carry out anti-static device control.The air outlet of anti-static device is arranged in the space between each electrostatic spinning module.Wherein, sparking voltage is usually between 5k-50kv, and the gas flow of input port is usually at 500 ~ 3000m
3between/h, air outlet is selected usually apart from the distance of substrate surface between 5 ~ 40cm.Above-mentioned numerical range advantage is in actual applications: in and Static Spinning substrate surface electric charge while can not interfere with steadily carrying out of liquid crystal display manufacture.High voltage, high gas flow and little distance make neutralization better, but this also can produce disturbance, so the adjustment of above-mentioned technological parameter is the range of balance between liquid crystal display manufacture and neutralization to the carrying out of Static Spinning.
Experimental data 1
In the process that liquid crystal display manufactures, in and the electrostatic accumulation of substrate surface, adopt above-mentioned anti-static device to carry out static elimination.The spinning head ejection of liquid crystal display manufacturing equipment be the polyvinyl alcohol (PVA)/dimethyl sulphoxide solution of 10wt%.Specific experiment parameter is as follows: the sparking voltage of spray point is 5kv, and the pressure of the pressure gas that adjustable air supply system provides is 3 atmospheric pressure, and air outlet is 20cm apart from substrate surface, and the air mass flow of air outlet is 1000m
3/ h.After the above-mentioned anti-static device of employing carries out static elimination, liquid crystal display manufacturing equipment can run 48 hours continuously and not occur the situation that spinning cannot be carried out; And before the above-mentioned anti-static device of use, liquid crystal display maker is often run 3 hours and just cannot be continued stably to work.
Experimental data 2
Liquid crystal display manufacturing equipment spinning head ejection be PE melt, melt temperature is 250 DEG C.Specific experiment parameter is as follows: the sparking voltage of spray point is 30kv, and the pressure of the pressure gas that adjustable air supply system provides is 5 atmospheric pressure, and air outlet is 40cm apart from substrate surface, and the air mass flow of air outlet is 2000m
3/ h.After the above-mentioned anti-static device of employing carries out static elimination, liquid crystal display manufacturing equipment can run 48 hours continuously and not occur the situation that spinning cannot be carried out; And before the above-mentioned anti-static device of use, liquid crystal display manufacturing equipment often runs 2 hours just cannot be continued stably to work.
The utility model can by the spray point of above-mentioned anti-static device by air ionization, and by pressurized air is formed laminar winds ion blown to substrate surface with in and electrostatic accumulation, direction is accurate, and safe controlled.
(2), Thermocuring equipment
Flat pannel display (as liquid crystal display) manufacture process, will pressurize to box process, the object of pressurization with the state making liquid crystal display reach cylindrical spacer (PS) to support, this operation uses Thermocuring equipment to complete.When having certain air pressure around substrate, the contact of glue and glass is tightr, the solid state of glue is very good, and such solidification effect is better, and the gas that the Thermocuring equipment that therefore the utility model embodiment provides uses above-mentioned anti-static device to spray is as pressure box gas.
As shown in Figure 7, the Thermocuring equipment that the utility model embodiment provides, utilize in the bottom of heating chamber 40 above-mentioned anti-static device to spray the high pressure draught containing ion, utilize jet-impingement to provide pressure to substrate 10, utilize on top parallel heating plate to carry out homogeneous heating.In addition, above-mentioned anti-static device directly can also be made to spray high-temperature high-pressure air flow, while pressurization, provide heating.
Specifically, as shown in Figure 8, described heating chamber 40 comprises: the cavity 41 formed by refractory ceramics, the heating cavities 42 for holding substrate is formed in cavity 41, top/the top of heating cavities 42 is provided with heating plate 43 (such as silicon rubber heating plate) as thermal source, bottom/the bottom of heating cavities 42 is provided with infrared temperature measurement device 44 for measuring tempeature and thermopair 45, and infrared distance sensing device.Bottom/the bottom of heating cavities 42 is also provided with the gas outlet of gas injection apparatus 30 formation, adopts bottom to blow, and spiral air forms air cushion makes substrate suspend to box, the black abnormity point (black Gap) that can effectively avoid box thickness ununiformity to cause.Certainly, the gas outlet that gas injection apparatus 30 is formed also can be arranged on other positions of heating chamber 40, as long as the gas that anti-static device gas outlet can be made to spray is as pressure box gas.
(3), pressurize checkout equipment
The anti-static device that the utility model provides also can be applicable to the checkout equipment needing pressurization, removes electrostatic and provides the pressure required for detection to product to be detected.The checkout equipment that the present embodiment provides uses the gas-pressurized of gas as checkout equipment test chamber of anti-static device ejection.
Fig. 9 illustrates the concrete structure schematic diagram of test chamber.Test chamber 50 comprises: Low emissivity cover glass cover (detection window) 51, detection cavity 52, polaroid 53, diffuser plate 54, backlight group 55 and heating plate 56.Be with the difference of existing checkout equipment, the gas outlet of the anti-static device that the utility model provides by the present embodiment test chamber 50 arranges on the chamber wall of detection cavity 52, removes electrostatic and also provides the pressure required for detection to product to be detected.In addition roughly the same with the structure of existing checkout equipment, no longer describe in detail.
(3), contraposition board
The anti-static device that the utility model provides also can be applicable to contraposition/rotary machine, and specifically, contraposition/rotary machine uses the gas of anti-static device ejection that contraposition is carried out in substrate picking-up.
As shown in Figure 10, be a kind of vertical view of contraposition board of the prior art.Contraposition board comprises agent structure 60, drive control part 64, range sensor 61 and vacuum cup 63.Contraposition board agent structure 60 has some strength and thickness, hollow, inside establishes pipeline and circuit that vacuum tube, sensor conductor etc. are necessary.Range sensor 61 is arranged at the table top front end of agent structure 60, the distance on substrate and contraposition board surface can be responded to, drive control part 62 is responsible for the motion control of contraposition board and relevant electrical control, the detection signal of Binding distance sensor 61, realizes vacuum cup 63 and connects, send coordinating between substrate.
The novel contraposition board that the utility model embodiment provides is provided with the anti-static device that the utility model provides, and specific design structure exists various, only enumerates two kinds below as a reference.
The novel contraposition board that the utility model embodiment provides is except the moveable anti-static device of increase by, roughly similar with above-mentioned existing structure.As shown in Figure 11 ~ Figure 14, specifically, contraposition board is also formed with movable fixture 24, the air outlet 21 of anti-static device is arranged on this movable fixture 24, movable fixture 24 can move up and down along Y-axis under the effect of drive control part 64, because different size needs setting anti-static device to destatic position accordingly, by electrical control and movable fixture 24 along the movement of Y-axis, effectively destatic distance to all can automatically arrive in the panel handling process of different size like this.With existing contraposition board analogously, the agent structure 60 of contraposition board has some strength and thickness, inside be provided with cavity, except arranging the necessary pipeline such as vacuum tube, sensor conductor and circuit in this cavity, be also provided with the gas circuit of anti-static device as adjustable air supply system, gas pipe line and solenoid valve 28; Contraposition board front end is provided with range sensor 61, can the distance on sensitive display panel and contraposition board surface; The table top of contraposition board is arranged vacuum cup 63, vacuum cup 63 is connected with vacuum equipments such as the vacuum tubes in cavity in bottom, is fixed on contraposition board by vacuum suction by display panel; Drive control part 64, is responsible for the motion control of contraposition board and anti-static device and relevant electrical control, realizes the gas injection of anti-static device, the absorption of vacuum cup 63 and connects, send coordinating between substrate.This drive control part 64 can be regarded as the Function Extension of the drive control part 62 of existing contraposition board, it is made not only to comprise existing contraposition controlling functions, also comprise the cooperation etc. that control module function in anti-static device, the function of movable fixture 24 being carried out to drived control and those functions are mutual, in a word, the present embodiment drive control part 64 can realize connecing, sending substrate and carry out the control of each mechanical part and electric component in substrate contraposition process and cooperatively interact.
Figure 12 is the band screen vertical view that the utility model embodiment has installed the contraposition board of anti-static device, wherein: 9 is display panel, is absorbed and fixed on contraposition board by vacuum cup 63; 7 and 8 negative ions being respectively anti-static device generation are illustrated, distance Z represents the distance at anti-static device air outlet 21 and display panel 9 edge, for ensureing to destatic effect, during concrete enforcement, moved along Y-axis by the control movable fixture 24 of drive control module 62, make the distance of Z generally answer >50mm.
How movable fixture 24 realizes moving along Y-axis and how realizing the control of distance Z, and the utility model embodiment does not limit this, can be any implementation well-known to those skilled in the art.Following are only those skilled in the art to understand conveniently, enumerate a kind of implementation as example, be understandable that, this example is also not used in restriction the utility model.
Figure 13 be the utility model embodiment contraposition board on the vertical view of drives structure of anti-static device.Contraposition board agent structure 60 is also formed with the surface (table top of contraposition board) contacted with substrate, and this is provided with motion guide groove 65 on the surface, and the movable fixture 24 of anti-static device moves along motion guide groove 65.Drive control part 64 comprises driven wheel 68 and toothed timing belt 67; The axis 70 of movable fixture 24 is fixed on toothed timing belt 67, toothed timing belt 67 is meshed with driven wheel 68, when making driven wheel 68 drive toothed timing belt 67 to move, movable fixture 24 can move along motion guide groove 65, thus the air outlet 21 making to be arranged on movable fixture 24 is adjustable controlled to the distance Z at display panel 9 edge.Wherein, 69 is the engaged wheel of toothed timing belt 67.For the display panel 9 of different size, the position of anti-static device needs the corresponding value of setting, the motion of driven wheel 68 and toothed timing belt 67 is controlled by drive control part 64, like this in the panel handling process of different size, can automatically regulate movable fixture 24 air outlet 21 to the distance Z at display panel 9 edge, thus make the position that the automatic arrival of movable fixture 24 effectively destatics, and after electrostatic is removed, also automatically Destaticizing device can be removed by mobile device 24, not hinder follow-up manufacturing process or characterization processes.
Figure 14 is the gas piping figure of Destaticizing device on above-mentioned contraposition board, and wherein, 21 is the air outlet of Destaticizing device, and 71 is the air supply pipe connecting each air outlet 21 of Destaticizing device, and 72 is total air supply pipe; 292 for connecting total air supply pipe 72 and the gas shunt device III of the air supply pipe 71 of each air outlet.Specifically, the gas piping of Destaticizing device is as follows: adjustable air supply system gas circuit is out divided into multiple branch road by gas shunt device I 29, a solenoid valve 28 installed by each branch road, and then each branch road is synthesized a total feeding pneumatic by gas shunt device II 291.Then feeding pneumatic is guided on movable fixture 24 by total air supply pipe 72, movable fixture 24 is provided with multiple air outlet 21, total air supply pipe 72 is divided into multiple branch road by gas shunt device III 292, and each branch road connects an air outlet 21 by an air supply pipe.Gas shunt device III 292, air outlet 21 are arranged on movable fixture 24, can move with on movable fixture 24 along Y-axis.
Distance signal between the display panel 9 that range sensor 61 is responded to and contraposition board, when display panel 9 is apart from when the distance of contraposition board is in certain limit value, the electric power starting of Destaticizing device, when movable fixture 24 moves to distance display panel 9 edge Z (Z can be arranged according to actual conditions) along Y-axis, solenoid valve 28 is opened simultaneously, the pressure gas containing ion is sprayed in the gas outlet 21 of Destaticizing device, and the whole display panel 9 subsequently contacts with contraposition board, fit, the static elimination of mobile contraposition process implementation.After contraposition completes, Destaticizing device is closed, gas outlet 21 stops gas jet, and display panel 9 is absorbed and fixed on contraposition board by vacuum cup 63 and carries out follow-up manufacture or testing process (now, movable fixture 24 can be removed to avoid hindering to manufacture or testing process).Certainly, if necessary, also can in follow-up manufacture or testing process, Destaticizing device continues to spray the pressure gas containing ion, until display panel 9 leaves contraposition board.Display panel 9 leaves the process of contraposition board, Destaticizing device also can continue the pressure gas sprayed containing ion and eliminate electrostatic, after display panel 9 leaves, between display panel 9 and contraposition board, distance becomes large, according to the induced signal of range sensor 61, solenoid valve 28 cuts out, simultaneously the power-off of Destaticizing device.The whole requirement not only eliminated electrostatic but also taken into account economize on electricity solar term, simultaneously according to carried panel size size, control the distance Z at movable fixture 24 and display panel 9 edge, the solenoid valve 28 simultaneously opening varying number controls air output and carrys out the power that reasonable adjusting destatics ability.
The novel contraposition board of the another kind that the utility model embodiment also provides, with reference to shown in Fig. 4 and 6, on itself and the present embodiment, the difference part of a novel contraposition board is, the present embodiment contraposition board does not design movable fixture 24, but directly the air outlet 21 of Destaticizing device is arranged on the table top 20 of contraposition board, certainly, though Fig. 6 is not shown, the table top 20 of contraposition board is also provided with vacuum cup, range sensor etc. simultaneously.With air outlet 21 together with gas circuit such as even pressure storehouse 27, solenoid valve 28, gas shunt device I 291, gas shunt device II 29 and the pipeline that is connected those devices be all arranged in the cavity of contraposition board agent structure.When range sensor senses that distance between display panel and contraposition board is in certain limit value, the electric power starting of Destaticizing device, solenoid valve 28 is opened simultaneously, the pressure gas containing ion is upwards sprayed in the gas outlet 21 of Destaticizing device, mobile contraposition process subsequently holds up substrate and carries out contraposition, realizes static elimination simultaneously.After contraposition completes, Destaticizing device is closed, and gas outlet 21 stops gas jet, and display panel is absorbed and fixed on contraposition board by vacuum cup and carries out follow-up manufacture or testing process.Display panel, for leaving the process of contraposition board, first opens Destaticizing device, and air outlet 21 pressure gas sprayed containing ion eliminates electrostatic makes display panel leave contraposition board simultaneously.Between display panel and contraposition board, distance becomes greatly, and according to the induced signal of range sensor, solenoid valve 28 cuts out, simultaneously the power-off of Destaticizing device.
The contraposition board that the utility model embodiment provides is by blowing the mode of the pressure gas containing ion to substrate, reduce the friction between substrate and contraposition board, to make in the ion in gas and electrostatic in substrate simultaneously, avoid electrostatic accumulation, thus avoid Electro-static Driven Comb to cause electrostatic damage to display panel, Destaticizing device install, use, easy to maintenance.
The another kind of Novel rotary board that the utility model embodiment also provides, the gas of Destaticizing device ejection can use when mechanical arm and turner exchange substrate, also can be applied in contraposition.
In turning device, increase Destaticizing device, the gas utilizing Destaticizing device to spray accepts display base plate, makes display base plate depart from turner, and the pressure gas containing ion utilizing Destaticizing device to spray carries out contraposition, all effectively can reduce the generation of electrostatic.Destaticizing device can refer to above-mentioned contraposition board in the setting of rotary machine, no longer describes in detail herein.
The utility model embodiment utilizes on the rubbing surface of compression ion wind gas (pressure gas containing ion) between substrate and board and blows, effective like this electrostatic controlling to produce on substrate, i.e. economize energy, have the source that effectively can control electrostatic, electrostatic clearance improves greatly.Specifically can be applicable to have and pressurize on the equipment of test chamber, heated chamber etc., pressure needed for the gas-generating apparatus utilizing Destaticizing device to spray also eliminates electrostatic, also can be applicable on equipment such as relating to contraposition, friction, conveyance, reduces and rubs and eliminate electrostatic.
Each embodiment in this instructions all adopts the mode of going forward one by one to describe, between each embodiment identical similar part mutually see, what each embodiment stressed is the difference with other embodiments.
One of ordinary skill in the art will appreciate that all or part of flow process realized in above-described embodiment method, that the hardware that can carry out instruction relevant by computer program has come, described program can be stored in a computer read/write memory medium, this program, when performing, can comprise the flow process of the embodiment as above-mentioned each side method.Wherein, described storage medium can be magnetic disc, CD, read-only store-memory body (Read-Only Memory, ROM) or random store-memory body (Random Access Memory, RAM) etc.
The above; be only embodiment of the present utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the change that can expect easily or replacement, all should be encompassed within protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claim.
Claims (18)
1. an anti-static device, manufactures field for flat pannel display, it is characterized in that, comprising:
Adjustable air supply system, for providing pressure gas;
Multiple air outlet, the pressure gas that described adjustable air supply system provides is blown by the bottom surface of described air outlet to substrate, and described bottom surface is the surface that described substrate contacts with flat pannel display manufacturing equipment;
Spray point, is arranged in described air outlet, for being made the air ionization near described spray point needle point by electric discharge, makes described air outlet institute blowing contain ion.
2. anti-static device according to claim 1, is characterized in that, described air outlet is arranged on surface that described manufacturing equipment contacts with substrate.
3. anti-static device according to claim 1, is characterized in that, also comprises:
Control module, for by controlling the sparking voltage of described spray point, the gas flow of the gas outlet of described adjustable air supply system and/or described air outlet apart from the distance of described substrate surface, regulates the ion concentration arriving described substrate surface.
4. anti-static device according to claim 3, is characterized in that, also comprises: movable fixture, and drive and control described movable fixture motion drive control part;
Described multiple air outlet is arranged on described movable fixture, and described drive control part is connected with described control module.
5. anti-static device according to claim 3, is characterized in that, described adjustable air supply system comprises the flow-control module for controlling out airshed, and described flow-control module is connected with described control module.
6. anti-static device according to claim 3, is characterized in that, also comprises the circuit for providing voltage of described spray point, and described circuit for providing voltage comprises Voltage Regulator Module, and described Voltage Regulator Module is connected with described control module.
7. anti-static device according to claim 3, is characterized in that, is provided with gas injection apparatus in described air outlet, or described air outlet is directly formed by described gas injection apparatus; Described gas injection apparatus comprises filtrator, air flue and shower nozzle; The inlet end of described gas injection apparatus is connected by the gas outlet of pipeline with described adjustable air supply system, and the pressure gas that described adjustable air supply system provides enters from described inlet end, sprays after described filtrator, air flue from described shower nozzle.
8. anti-static device according to claim 7, is characterized in that, the gas flow of described gas injection apparatus is also provided with:
Voltage operated device, for measuring and regulating the pressure from described shower nozzle ejection gas, is connected with described control module.
9. anti-static device according to claim 3, is characterized in that, described adjustable air supply system is also provided with on the gas circuit of described air outlet: the even pressure storehouse that confined space is formed;
Air outlet and described multiple air outlet in described even pressure storehouse are conducted, or directly form described air outlet; The air inlet port in described even pressure storehouse is connected by pipeline with the gas outlet of described adjustable air supply system.
10. anti-static device according to claim 9, is characterized in that,
The air inlet port in described even pressure storehouse is the thicker pipeline of a gradual change.
11. anti-static devices according to claim 3 or 9, it is characterized in that, the gas circuit between described adjustable air supply system to described air outlet is provided with solenoid valve, and described solenoid valve is connected with described control module.
12. anti-static devices according to claim 1, is characterized in that, described adjustable air supply system is provided with on the gas circuit of described air outlet:
Gas shunt device, its inlet end is connected with described steam line, and its outlet side is multiple, is connected respectively or directly forms described multiple air outlet with described multiple air outlet.
13. anti-static devices according to claim 1, is characterized in that, described adjustable air supply system is air compressor.
14. 1 kinds of flat pannel display manufacturing equipments, is characterized in that, comprise the anti-static device described in any one of claim 1-13.
15. flat pannel display manufacturing equipments according to claim 14, is characterized in that, also comprise: range sensor, for responding to the distance between substrate and described flat pannel display manufacturing equipment.
16. flat pannel display manufacturing equipments according to claim 15, is characterized in that, described flat pannel display manufacturing equipment is Thermocuring equipment, or need the checkout equipment of pressurization, or contraposition/rotary machine.
17. flat pannel display manufacturing equipments according to claim 16, it is characterized in that, described flat pannel display manufacturing equipment is contraposition/rotary machine, is provided with cavity in the agent structure of described contraposition/rotary machine, arranges the adjustable air supply system of described anti-static device in this cavity;
Described agent structure is also formed with the surface contacted with substrate, and this is provided with motion guide groove on the surface, and the movable fixture of described anti-static device moves along described motion guide groove.
18. flat pannel display manufacturing equipments according to claim 17, is characterized in that, the drive control part of described anti-static device comprises driven wheel and toothed timing belt; The axis of described movable fixture is fixed on described toothed timing belt, and described toothed timing belt is meshed with described driven wheel, and when making described driven wheel drive described toothed timing belt to move, described movable fixture moves along described motion guide groove.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520004355.8U CN204496136U (en) | 2015-01-05 | 2015-01-05 | Anti-static device and flat pannel display manufacturing equipment |
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| CN201520004355.8U CN204496136U (en) | 2015-01-05 | 2015-01-05 | Anti-static device and flat pannel display manufacturing equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104483770A (en) * | 2015-01-05 | 2015-04-01 | 合肥京东方光电科技有限公司 | Anti-static device and panel display manufacturing equipment |
| CN106903116A (en) * | 2017-05-03 | 2017-06-30 | 京东方科技集团股份有限公司 | A kind of surface cleaning apparatus, thermal station system and method for cleaning surface |
-
2015
- 2015-01-05 CN CN201520004355.8U patent/CN204496136U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104483770A (en) * | 2015-01-05 | 2015-04-01 | 合肥京东方光电科技有限公司 | Anti-static device and panel display manufacturing equipment |
| WO2016110083A1 (en) * | 2015-01-05 | 2016-07-14 | 京东方科技集团股份有限公司 | Anti-static method, anti-static apparatus, and panel display manufacturing device |
| US10123404B2 (en) | 2015-01-05 | 2018-11-06 | Boe Technology Group Co., Ltd. | Anti-static method, anti-static device and flat display manufacturing equipment |
| CN106903116A (en) * | 2017-05-03 | 2017-06-30 | 京东方科技集团股份有限公司 | A kind of surface cleaning apparatus, thermal station system and method for cleaning surface |
| CN106903116B (en) * | 2017-05-03 | 2019-07-16 | 京东方科技集团股份有限公司 | A kind of surface cleaning apparatus, thermal station system and method for cleaning surface |
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Granted publication date: 20150722 |