CN101189532B - Distance measuring device - Google Patents

Distance measuring device Download PDF

Info

Publication number
CN101189532B
CN101189532B CN200680019988XA CN200680019988A CN101189532B CN 101189532 B CN101189532 B CN 101189532B CN 200680019988X A CN200680019988X A CN 200680019988XA CN 200680019988 A CN200680019988 A CN 200680019988A CN 101189532 B CN101189532 B CN 101189532B
Authority
CN
China
Prior art keywords
light
mentioned
distance measuring
range finding
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200680019988XA
Other languages
Chinese (zh)
Other versions
CN101189532A (en
Inventor
大友文夫
神酒直人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Publication of CN101189532A publication Critical patent/CN101189532A/en
Application granted granted Critical
Publication of CN101189532B publication Critical patent/CN101189532B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497Means for monitoring or calibrating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C15/00Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
    • G01C15/002Active optical surveying means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00Measuring distances in line of sight; Optical rangefinders
    • G01C3/02Details
    • G01C3/06Use of electric means to obtain final indication
    • G01C3/08Use of electric radiation detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/32Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/42Simultaneous measurement of distance and other co-ordinates

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

本发明的距离测定装置设有:将测距光(22)照射到测定对象物的光发射部;处于已知位置的基准反射部(55),设置成可相对移动以横截所照射的测距光;光检测部(7),将来自上述测定对象物的反射光作为反射测距光(22′)检测,并将来自上述基准反射部的反射光作为内部参考光(22″)检测;以及控制运算部(15),根据涉及上述反射测距光的光检测信号和涉及上述内部参考光的光检测信号来计算到测定对象物的距离。

Figure 200680019988

The distance measuring device of the present invention is provided with: a light emitting part that irradiates the distance measuring light (22) to the measuring object; Distance light: The light detection unit (7) detects the reflected light from the above-mentioned measurement object as reflected distance measuring light (22′), and detects the reflected light from the above-mentioned reference reflection unit as internal reference light (22″); And a control calculation unit (15) that calculates the distance to the object to be measured based on the light detection signal related to the reflected distance measuring light and the light detection signal related to the internal reference light.

Figure 200680019988

Description

距离测定装置distance measuring device

技术领域technical field

本发明涉及通过激光照射测定对象物并检测来自测定对象物的反射光来进行距离测定的距离测定装置。The present invention relates to a distance measuring device for performing distance measurement by irradiating a measurement object with laser light and detecting reflected light from the measurement object.

背景技术Background technique

作为距离测定装置,有用激光束照射测定对象物,利用来自测定对象物的反射光来测定至测定对象物的距离的光学距离测定装置。As the distance measuring device, there is an optical distance measuring device that irradiates the object to be measured with a laser beam, and measures the distance to the object to be measured by using the reflected light from the object to be measured.

传统的光学距离测定装置中,以一定的频率对激光束进行强度调制后作为测距光射出,检测被测定对象物反射的反射测距光,将所检测的反射测距光的强度调制的相位,跟距离测定装置内部形成的在参考光路得到的内部参考光的强度调制的相位进行比较,根据相位差测定至测定对象物的距离。In the traditional optical distance measuring device, the intensity of the laser beam is modulated at a certain frequency and emitted as distance measuring light, the reflected distance measuring light reflected by the object to be measured is detected, and the phase of the intensity modulation of the detected reflected distance measuring light is The phase of the intensity modulation of the internal reference light obtained in the reference optical path formed inside the distance measuring device is compared, and the distance to the object to be measured is measured based on the phase difference.

在上述距离测定装置进行的距离测定中,利用了上述相位差随着测距距离而变化的事实,若以Δφ表示内部参考光与反射测距光之间的相位差,D表示测距距离,f表示调制频率,C表示光速,则相位差Δφ用下式1表示。In the distance measurement carried out by the distance measuring device, the fact that the above-mentioned phase difference varies with the ranging distance is utilized. If Δφ is used to represent the phase difference between the internal reference light and the reflected ranging light, and D represents the ranging distance, f represents the modulation frequency, C represents the speed of light, and the phase difference Δφ is expressed by the following formula 1.

Δφ=4πfD/C  (式1)Δφ=4πfD/C (Formula 1)

从而,测距距离D可通过测定相位差Δφ求出,此外,由于参考光路长已知,可用内部参考光路修正求出的测定距离,从而得到正确的测定距离。Therefore, the ranging distance D can be obtained by measuring the phase difference Δφ. In addition, since the reference optical path length is known, the internal reference optical path can be used to correct the calculated measuring distance, so as to obtain the correct measuring distance.

另外,在距离测定中,距离测定装置内部的检测电路等的漂移会造成测定误差,但是通过比较内部参考光和反射测距光的相位,检测电路等漂移的影响便相互抵消,故可算出正确的距离。In addition, in the distance measurement, the drift of the detection circuit inside the distance measuring device will cause measurement errors, but by comparing the phases of the internal reference light and the reflected distance measuring light, the influence of the drift of the detection circuit will cancel each other out, so the correct calculation can be made. distance.

接着,参照图7概要说明传统的距离测定装置。Next, an outline of a conventional distance measuring device will be described with reference to FIG. 7 .

激光二极管等发光元件1发出由发光驱动电路12以预定频率作了强度调制的激光束。该激光用半反射镜2分割为测距光3和内部参考光4,透过上述半反射镜2的上述测距光3通过物镜5照射在测定对象物6(例如,隅角棱镜等的反光镜)上,该测定对象物6所反射的反射测距光3’通过上述物镜5、半反射镜8后由光敏二极管等光检测元件7检测。A light-emitting element 1 such as a laser diode emits a laser beam whose intensity is modulated at a predetermined frequency by a light-emitting drive circuit 12 . The laser light is divided into a distance measuring light 3 and an internal reference light 4 by a half mirror 2, and the above distance measuring light 3 transmitted through the half mirror 2 is irradiated on a measurement object 6 (for example, reflected light of a corner prism, etc.) through an objective lens 5. mirror), the reflected ranging light 3' reflected by the measurement object 6 passes through the above-mentioned objective lens 5 and half mirror 8, and then is detected by a photodetection element 7 such as a photodiode.

上述半反射镜2所反射的上述内部参考光4,被上述反射测距光3’的光路上的上述半反射镜8反射,由上述光检测元件7检测。该光检测元件7的光检测信号被输入光检测电路13,该光检测电路13为进行测距运算而处理从上述光检测元件7输入的信号。The internal reference light 4 reflected by the half mirror 2 is reflected by the half mirror 8 on the optical path of the reflected distance measuring light 3', and is detected by the photodetection element 7. The light detection signal of the light detection element 7 is input to the light detection circuit 13, and the light detection circuit 13 processes the signal input from the light detection element 7 for distance measurement calculation.

在上述测距光3的光路和上述内部参考光4的光路上跨接光路切换器9,另外,在上述反射测距光3’的光路上,设置光量调整器11。上述光路切换器9对上述测距光3的光路和上述内部参考光4的光路,两者择其一地截断一个,使另一个透过,由上述光检测元件7交替地检测上述反射测距光3′和上述内部参考光4。An optical path switcher 9 is bridged between the optical path of the distance measuring light 3 and the optical path of the internal reference light 4, and a light quantity adjuster 11 is provided on the optical path of the reflected distance measuring light 3'. The optical path switcher 9 alternately cuts off one of the optical path of the distance measuring light 3 and the optical path of the internal reference light 4 and transmits the other, and the optical detection element 7 alternately detects the reflected distance measuring light. Light 3' and the aforementioned internal reference light 4.

如上所述,由于使用光强度调制后的测距光3,求出从该测距光3得到的内部参考光4和反射测距光3′的相位差来进行距离运算,该反射测距光3′和上述内部参考光4的检测光量不同,会影响距离测定的精度。因而,设置了上述光量调整器11。该光量调整器11,具有浓度连续变化的振幅滤光片,通过使该振幅滤光片旋转,将上述反射测距光3′的检测光量调整到一定值。由于上述光量调整器11,即使上述测定对象物6的距离造成的反射光量变化,也可使上述光检测元件7检测的上述内部参考光4的检测光量与上述反射测距光3′的检测光量相等。As described above, since the distance measurement light 3 after light intensity modulation is used, the phase difference between the internal reference light 4 obtained from the distance measurement light 3 and the reflected distance measurement light 3' is obtained to perform distance calculation, and the reflected distance measurement light 3' differs from the detection light intensity of the internal reference light 4, which affects the accuracy of distance measurement. Thus, the above-described light quantity adjuster 11 is provided. The light quantity adjuster 11 has an amplitude filter whose density continuously changes, and adjusts the detected light quantity of the reflected distance measuring light 3' to a constant value by rotating the amplitude filter. With the light quantity adjuster 11, even if the reflected light quantity due to the distance of the measurement object 6 changes, the detected light quantity of the internal reference light 4 detected by the photodetection element 7 and the detected light quantity of the reflected distance-measuring light 3′ can be adjusted. equal.

上述光路切换器9进行的光路切换和上述光量调整器11进行的光量调整,由驱动电路14控制。The optical path switching by the optical path switcher 9 and the light amount adjustment by the light amount adjuster 11 are controlled by the drive circuit 14 .

控制运算部15控制发光驱动电路12,使从上述发光元件1射出的激光束受到预定频率的光强度调制,另外,上述驱动电路14控制上述光路切换器9的光路切换的定时。还有,上述控制运算部15根据上述光检测元件7的光检测信号,向上述驱动电路14发出使上述反射测距光3′的光量与上述内部参考光4的光量相等的控制信号。The control operation unit 15 controls the light emitting drive circuit 12 to modulate the light intensity of the laser beam emitted from the light emitting element 1 at a predetermined frequency, and the drive circuit 14 controls the timing of switching the optical path of the optical path switcher 9 . In addition, the control calculation unit 15 sends a control signal to the drive circuit 14 to make the light quantity of the reflected distance measuring light 3 ′ equal to the light quantity of the internal reference light 4 based on the light detection signal of the light detection element 7 .

上述光检测电路13对来自上述光检测元件7的信号进行放大、A/D变换等的信号处理,同时进行求出上述内部参考光4的调制频率和上述反射测距光3′的调制频率的相位差等处理,送往上述控制运算部15。该控制运算部15根据从上述光检测电路13送来的相位差,用上式1算出至上述测定对象物6的距离。The photodetection circuit 13 performs signal processing such as amplification and A/D conversion on the signal from the photodetection element 7, and at the same time obtains the modulation frequency of the internal reference light 4 and the modulation frequency of the reflected distance measuring light 3'. Processes such as phase difference are sent to the above-mentioned control calculation unit 15 . The control calculation unit 15 calculates the distance to the measurement target object 6 by using the above formula 1 based on the phase difference sent from the photodetection circuit 13 .

在上述传统的距离测定装置中,上述光路切换器9进行的上述内部参考光4和上述反射测距光3′之间的切换是机械切换。In the above conventional distance measuring device, the switching between the internal reference light 4 and the reflected distance measuring light 3' by the optical path switcher 9 is mechanical switching.

光路切换和光量调整均以机械方式进行,难以进行高速的光路切换和高速的光量调整,因此不能进行高速距离测定。因而,虽然对建筑物等测定对象物进行距离测定时不会有问题,但是在用1个测定装置连续对多个移动体(例如,推土机等建筑机械)进行距离测定等要求高速距离测定的场合,就会遇到困难。另外,在用全站仪等对建筑物等进行三维测定的场合,必须通过自动测量对多个点进行测量,要求测定速度高速化。另外,在对移动体等进行测量的情况下,会产生光路切换速度、光量调整速度跟不上移动体的移动速度、距离测定无法进行等的问题。Both optical path switching and light intensity adjustment are performed mechanically, and it is difficult to perform high-speed optical path switching and high-speed light intensity adjustment, so high-speed distance measurement cannot be performed. Therefore, although there is no problem when measuring the distance of a measurement object such as a building, there is a need for high-speed distance measurement such as continuous distance measurement of multiple moving objects (for example, construction machinery such as bulldozers) with a single measurement device. , you will encounter difficulties. In addition, in the case of three-dimensional measurement of buildings, etc., by using a total station or the like, it is necessary to measure a plurality of points by automatic measurement, and it is required to increase the measurement speed. In addition, when measuring a moving body or the like, there are problems such as that the speed of switching the optical path and the speed of adjusting the light quantity cannot keep up with the moving speed of the moving body, and that distance measurement cannot be performed.

再有,作为使测距光旋转而进行多向、多点距离测定的距离测定装置,有日本专利公报第2694647号公报、日本特开平4-31 301 3号公报所揭示的装置。In addition, as a distance measuring device that rotates the distance measuring light to perform multi-directional and multi-point distance measurement, there are devices disclosed in Japanese Patent Publication No. 2694647 and Japanese Patent Application Laid-Open No. 4-313013.

鉴于这种情况,本发明的目的在于提供一种在距离测定装置中使光路切换、光量调整高速化,实现距离测定高速化的距离测定装置。In view of such circumstances, an object of the present invention is to provide a distance measuring device that speeds up switching of optical paths and adjustment of light intensity in the distance measuring device, and realizes speeding up of distance measurement.

发明内容Contents of the invention

本发明是一种距离测定装置,具有将测距光照射在测定对象物上的光发射部;可相对移动以横截所照射的测距光的处于已知位置的基准反射部;将来自上述测定对象物的反射光作为反射测距光并将来自上述基准反射部的反射光作为内部参考光而进行光检测的光检测部;以及根据涉及上述反射测距光的光检测信号和涉及上述内部参考光的光检测信号,计算到达测定对象物的距离的控制运算部,The present invention is a distance measuring device, which has a light emitting part that irradiates distance measuring light on an object to be measured; a reference reflector at a known position that is relatively movable to cross the irradiated distance measuring light; a photodetector for optically detecting reflected light from the object to be measured as reflected distance-measuring light and reflected light from the reference reflector as internal reference light; A control calculation unit that calculates the distance to the object to be measured with reference to the light detection signal of the light,

另外,本发明是这样一种距离测定装置,在设置上述基准反射部在光路上设有使上述内部参考光的光量变化的光量调整部件,In addition, the present invention is a distance measuring device in which a light quantity adjusting member for changing the light quantity of the internal reference light is provided on the optical path provided with the above-mentioned reference reflector,

另外,本发明是这样一种距离测定装置,其上述光量调整部件是在测距光穿越方向上浓度逐渐变化的滤光片,In addition, the present invention is a distance measuring device, wherein the above-mentioned light amount adjusting member is an optical filter whose density gradually changes in the direction in which the distance measuring light passes,

另外,本发明是这样一种距离测定装置,其上述光量调整部件与上述基准反射部一体地设置,In addition, the present invention is a distance measuring device in which the light quantity adjusting member is provided integrally with the reference reflecting portion,

另外,本发明是这样一种距离测定装置,它扫描至少包含上述测距光的测定对象物测定区域,上述基准反射部处于扫描范围内,上述测距光至少扫描包含测定对象物的测定区域,上述基准反射部位于扫描范围内,且配置在不干涉来自测定对象物的反射光的位置上,In addition, the present invention is a distance measuring device that scans a measurement area of an object to be measured including at least the distance-measuring light, the reference reflector is within the scanning range, and the distance-measuring light scans at least the measurement area including the object to be measured, The above-mentioned reference reflector is located within the scanning range and arranged at a position where it does not interfere with reflected light from the object to be measured,

另外,本发明是这样一种距离测定装置,其上述控制运算部根据检测光量变化的光检测信号生成与多个检测光量强度对应的多个内部参考基准,选择与反射测距光的光量对应的内部参考基准,并根据所选择的上述内部参考基准和反射测距光的光检测信号来计算到达测定对象物的距离,In addition, the present invention is a distance measuring device, wherein the control calculation unit generates a plurality of internal reference standards corresponding to a plurality of detected light intensity intensities based on the light detection signal of the detected light amount change, and selects the internal reference standard corresponding to the light amount of the reflected distance measuring light. internal reference, and calculate the distance to the object to be measured based on the selected internal reference and the light detection signal of the reflected ranging light,

另外,本发明是这样一种距离测定装置,其检测光量的变化通过测距光穿越滤光片而得到,In addition, the present invention is such a distance measuring device, the change of the detected light quantity is obtained by passing the distance measuring light through a filter,

另外,本发明是这样一种距离测定装置,其上述基准反射部由使上述基准反射部相对上述测距光移动的移动机构部支持,该移动机构部使上述基准反射部保持在偏离于测定方向的位置上移动,In addition, the present invention is a distance measuring device, wherein the reference reflection unit is supported by a moving mechanism unit that moves the reference reflection unit relative to the distance measuring light, and the movement mechanism unit keeps the reference reflection unit at a position deviated from the measurement direction. move in position,

另外,本发明是这样一种距离测定装置,其上述移动机构部具有检测上述基准反射部的位置的位置检测装置,上述控制运算部具有与上述基准反射部的位置对应的误差数据,上述光检测部根据与检测内部参照光时上述基准反射部的位置对应的误差,修正测定结果,In addition, the present invention is a distance measuring device, wherein the moving mechanism part has a position detection device for detecting the position of the reference reflection part, the control operation part has error data corresponding to the position of the reference reflection part, and the light detection The part corrects the measurement result according to the error corresponding to the position of the above-mentioned reference reflection part when detecting the internal reference light,

本发明还是这样一种距离测定装置,上述光发射部设有:使测距光在测定方向上偏转而照射的偏转光学部件;保持该偏转光学部件并可使之旋转的回转部;设置成可与该回转部的旋转中心同心地自由旋转的基准反射棱镜;以及使该基准反射棱镜独立于上述偏转光学部件而旋转的回转驱动部。The present invention is also such a distance measuring device, wherein the above-mentioned light emitting part is provided with: a deflecting optical component for deflecting and irradiating the distance measuring light in the measuring direction; a rotating part for holding and rotating the deflecting optical component; a reference reflective prism freely rotatable concentrically with the rotation center of the rotatable unit; and a rotatable drive unit that rotates the reference reflective prism independently of the deflection optical member.

附图说明Description of drawings

图1是概略表示本发明实施例的说明图;FIG. 1 is an explanatory diagram schematically showing an embodiment of the present invention;

图2是表示本发明实施例的距离测定装置的激光束发射部的剖面图;2 is a cross-sectional view showing a laser beam emitting portion of a distance measuring device according to an embodiment of the present invention;

图3是该距离测定装置测距部的略图;Fig. 3 is a schematic diagram of the distance measuring unit of the distance measuring device;

图4(A)表示光检测元件的光检测状态;Fig. 4 (A) shows the light detection state of the light detection element;

图4(B)是光检测信号的放大图;Figure 4 (B) is an enlarged view of the light detection signal;

图5是表示上述距离测定装置中在基准反射棱镜旋转后误差的说明图;Fig. 5 is an explanatory diagram showing the error after the reference reflective prism is rotated in the above-mentioned distance measuring device;

图6该反射基准棱镜旋转后误差与旋转角的对应表数据;The corresponding table data of the error and the rotation angle after the rotation of the reflection reference prism in Fig. 6;

图7是传统距离测定装置的略图。Fig. 7 is a schematic diagram of a conventional distance measuring device.

具体实施方式Detailed ways

以下,参照附图说明本发明的最佳实施例。首先,用图1概要说明本发明实施例的测定。在图1所示的距离测定装置17中,可形成水平基准面,并测定至测定对象物16的距离。Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. First, the measurement in the example of the present invention will be schematically described with reference to FIG. 1 . In the distance measuring device 17 shown in FIG. 1 , a horizontal reference plane can be formed to measure the distance to the object 16 to be measured.

上述距离测定装置17具有基准面形成部(图中未示出)和测距部19(后述)。上述距离测定装置17使基准面形成用激光束21回转照射,同时回转照射测距光22,使得用测距光测定至多个位置处的上述测定对象物16的距离成为可能。The distance measuring device 17 has a reference plane forming unit (not shown in the figure) and a distance measuring unit 19 (described later). The distance measuring device 17 rotates and irradiates the reference surface forming laser beam 21 and simultaneously irradiates the distance measuring light 22 so that the distance to the object 16 at a plurality of positions can be measured by the distance measuring light.

上述基准面形成部回转照射上述基准面形成用激光束21,形成水平基准面23。上述基准面形成用激光束21由至少1个倾斜的多个扇状激光束组成。另外,作为回转照射一个倾斜的3个以上的扇状激光束的激光装置,有日本特开2004-212058号公报提出的旋转激光装置。The reference plane forming unit turns and irradiates the reference plane forming laser beam 21 to form a horizontal reference plane 23 . The reference plane forming laser beam 21 is composed of at least one oblique fan-shaped laser beam. Also, as a laser device that irradiates three or more oblique fan-shaped laser beams in rotation, there is a rotary laser device proposed in JP-A-2004-212058.

回转照射上述基准面形成用激光束21,测定对象物具有光检测器(图中未示出),通过求出该光检测器检测2个以上扇状激光束的时间差,根据该时间差和上述扇状激光束的倾斜角,求出相对于以上述距离测定装置17为中心的上述水平基准面23的仰角。另外,可根据仰角设定倾斜基准面。The laser beam 21 for forming the above-mentioned reference surface is irradiated in rotation, and the object to be measured has a photodetector (not shown in the figure). For the inclination angle of the beam, the elevation angle with respect to the horizontal reference plane 23 centered on the distance measuring device 17 is obtained. In addition, the inclined reference plane can be set according to the elevation angle.

图2、图3概略表示本发明实施例的距离测定装置,图2表示上述距离测定装置17的激光束发射部24,图3表示上述距离测定装置17的上述测距部19的简略结构。上述激光束发射部24由基准面形成用光发射部25和测距用光发射部26构成,上述基准面形成用光发射部25和上述测距用光发射部26可以分别独立地照射上述基准面形成用激光束21和上述测距光22。另外,在本实施例中,上述基准面形成用激光束21和上述测距光22的照射方向是相同的,但也可以不同,例如相差180°。2 and 3 schematically show a distance measuring device according to an embodiment of the present invention. FIG. Above-mentioned laser beam emitting part 24 is made up of reference plane forming light emitting part 25 and ranging light emitting part 26, and above-mentioned reference plane forming light emitting part 25 and above-mentioned distance measuring using light emitting part 26 can respectively and independently irradiate the above-mentioned standard. Surface forming laser beam 21 and distance measuring light 22 described above. In addition, in this embodiment, the irradiation directions of the reference plane forming laser beam 21 and the distance measuring light 22 are the same, but they may be different, for example, by 180°.

图2中,27表示距离测定装置17机架的顶板部,在机架的内部装入基准面形成用激光光源部(图中未示出)。在上述顶板部27的上侧,配置圆筒状的投射窗28,该投射窗28用透明玻璃等材料与上述基准面形成用光发射部25的光轴同心地设置。在上述投射窗28的上端设置上基板29,在上述投射窗28的内部设置中间基板31。In FIG. 2, 27 denotes the top plate portion of the frame of the distance measuring device 17, and a laser light source portion (not shown) for forming a reference plane is incorporated in the frame. On the upper side of the top plate portion 27 is disposed a cylindrical projection window 28 made of a material such as transparent glass concentrically with the optical axis of the reference plane forming light emitting portion 25 . An upper substrate 29 is provided on the upper end of the projection window 28 , and an intermediate substrate 31 is provided inside the projection window 28 .

与上述基准面形成用光发射部25的光轴同心地配置园筒状棱镜支架32,该棱镜支架32由轴承33、34支承在上述顶板部27的上述中间基板31上自由旋转。A cylindrical prism holder 32 is disposed concentrically with the optical axis of the reference surface forming light emitting unit 25 , and the prism holder 32 is rotatably supported on the intermediate substrate 31 of the top plate 27 by bearings 33 and 34 .

在上述棱镜支架32的内部,作为偏转光学部件设置五棱镜42,在与上述棱镜支架32的上述五棱镜相对的部分穿孔而设置第1投射孔43,从上述基准面形成用激光光源部射出的基准面形成用激光束21在上述五棱镜42上在水平方向上发生偏转,通过上述第1投射孔43照射出去。In the inside of the above-mentioned prism holder 32, a pentaprism 42 is provided as a deflecting optical component, and the first projection hole 43 is provided by perforating the part opposite to the above-mentioned pentaprism of the above-mentioned prism holder 32, and the light emitted from the laser light source part for forming the reference plane is formed. The reference plane forming laser beam 21 is deflected in the horizontal direction by the pentaprism 42 and irradiated through the first projection hole 43 .

在上述棱镜支架32的上端设置第1旋转齿轮35,上述中间基板31上装有第1回转电动机36,该第1回转电动机36的输出轴上安装的第1驱动齿轮37与上述第1旋转齿轮35啮合。通过驱动上述第1回转电动机36,上述第1驱动齿轮37经过上述第1旋转齿轮35使上述五棱镜42旋转,上述基准面形成用激光束21便在水平面内旋转。A first rotary gear 35 is arranged on the upper end of the above-mentioned prism holder 32, and a first rotary motor 36 is mounted on the above-mentioned intermediate substrate 31. engage. By driving the first rotary motor 36, the first drive gear 37 rotates the pentaprism 42 via the first rotation gear 35, and the reference plane forming laser beam 21 rotates in the horizontal plane.

另外,上述中间基板31上装有第1编码器38,该第1编码器38的输入轴上安装的第1从动齿轮39与上述第1旋转齿轮35啮合,该第1旋转齿轮35的旋转角经上述第1从动齿轮39由上述第1编码器38检测,检测出上述基准面形成用激光束21的照射方向。In addition, the first encoder 38 is installed on the above-mentioned intermediate substrate 31, and the first driven gear 39 installed on the input shaft of the first encoder 38 meshes with the above-mentioned first rotating gear 35, and the rotation angle of the first rotating gear 35 is The irradiation direction of the reference plane forming laser beam 21 is detected by the first encoder 38 via the first driven gear 39 .

反射镜支架44与上述棱镜支架32同心地设置在该棱镜支架32的上侧,该反射镜支架44保持作为偏转光学部件的反光镜45,在面向该反光镜45的反射面的部分设置第2投射孔46。上述反射镜支架44可与上述棱镜支架32一体化,使上述五棱镜42与上述反光镜45的同光轴地一起旋转。还有,以同一光轴转动时,不一体化也行。The reflector holder 44 is concentrically arranged on the upper side of the prism holder 32 with the above-mentioned prism holder 32, and the reflector holder 44 holds a reflector 45 as a deflecting optical component, and a second reflector is provided at a part facing the reflective surface of the reflector 45. Projection hole 46 . The reflector holder 44 may be integrated with the prism holder 32 so that the pentaprism 42 and the reflector 45 rotate together on the same optical axis. Also, when rotating on the same optical axis, they may not be integrated.

在上述上基板29上设置镜筒47,该镜筒47的中心和上述反射镜支架44的中心一致,另外,在上述镜筒47中保持聚焦透镜48。在上述镜筒47中,经轴承49设置可自由旋转的旋转环套50,该旋转环套50上装有第2旋转齿轮51。A lens barrel 47 is provided on the upper substrate 29 . The center of the lens barrel 47 coincides with the center of the mirror holder 44 , and a focus lens 48 is held in the lens barrel 47 . In the lens barrel 47, a freely rotatable rotating ring 50 is provided via a bearing 49, and a second rotating gear 51 is mounted on the rotating ring 50. As shown in FIG.

在上述上基板29中设置第2回转电动机52,该第2回转电动机52的输出轴上安装第2驱动齿轮53,该第2驱动齿轮53与上述第2旋转齿轮51啮合。A second rotary motor 52 is provided on the upper base plate 29 , and a second drive gear 53 is attached to an output shaft of the second rotary motor 52 . The second drive gear 53 meshes with the second rotary gear 51 .

另外,在上述旋转环套50上固定反射棱镜保持构件54,在该反射棱镜保持构件54上固定作为基准反射部的内部光路用的基准反射棱镜55。在内部光路上,例如,在基准反射棱镜55的反射面上设置振幅滤光片56。该振幅滤光片56在水平方向上连续地改变浓度,以连续地减小或连续地增加激光的透射光量。另外,上述振幅滤光片56也可分阶段地改变浓度,实际上也可在旋转扫描方向上逐渐改变浓度。In addition, a reflective prism holding member 54 is fixed to the rotating collar 50 , and a reference reflective prism 55 for an internal optical path serving as a reference reflective portion is fixed to the reflective prism holding member 54 . On the internal optical path, for example, an amplitude filter 56 is provided on the reflection surface of the reference reflection prism 55 . The amplitude filter 56 continuously changes the density in the horizontal direction to continuously reduce or continuously increase the transmitted light amount of the laser light. In addition, the above-mentioned amplitude filter 56 may also change the density stepwise, and may actually gradually change the density in the rotational scanning direction.

具体地说,将上述基准反射棱镜55设为隅角棱镜,将滤光片贴在隅角棱镜上,使中心附近的透射率高,越向周边透射率越低。Specifically, the above-mentioned reference reflective prism 55 is used as a corner prism, and a filter is attached to the corner prism so that the transmittance near the center is high, and the transmittance decreases toward the periphery.

在上述上基板29上安装第2编码器58,该第2编码器58的输入轴上装有第2从动齿轮57,该第2从动齿轮57与上述第2旋转齿轮51啮合。A second encoder 58 is attached to the upper base plate 29 , and a second driven gear 57 is attached to an input shaft of the second encoder 58 , and the second driven gear 57 meshes with the second rotation gear 51 .

通过驱动上述第2回转电动机52,上述基准反射棱镜55经由上述第2驱动齿轮53、上述第2旋转齿轮51、上述旋转环套50与上述振幅滤光片56一起旋转,另外,上述旋转环套50的旋转角,经由上述第2旋转齿轮5 1、上述第2从动齿轮57由上述第2编码器58检测。By driving the second rotary motor 52, the reference reflecting prism 55 rotates together with the amplitude filter 56 via the second driving gear 53, the second rotating gear 51, and the rotating collar 50. In addition, the rotating collar The rotation angle of 50 is detected by the above-mentioned second encoder 58 via the above-mentioned second rotating gear 51 and the above-mentioned second driven gear 57.

在上述聚焦透镜48的光轴上配置偏转反射镜62,并确定射出用光纤61的射出端位置,使之对着该偏转反射镜62的反射面。另外,在上述聚焦透镜48的光轴上,将检测光用光纤63的入射端位置确定在聚焦位置上。A deflection mirror 62 is arranged on the optical axis of the above-mentioned focusing lens 48 , and the position of the output end of the output optical fiber 61 is determined so as to face the reflection surface of the deflection mirror 62 . In addition, on the optical axis of the above-mentioned focusing lens 48, the incident end position of the optical fiber 63 for detection light is determined to be the focusing position.

上述射出用光纤61将发光元件1射出的上述测距光22引向上述偏转反射镜,上述检测光用光纤63将反射测距光22′、内部参考光22″引向光检测元件7。The output optical fiber 61 guides the distance measuring light 22 emitted from the light emitting element 1 to the deflection mirror, and the detection light optical fiber 63 guides the reflected distance measuring light 22 ′ and internal reference light 22 ″ to the photodetection element 7 .

现参照图3就测距部19进行说明。Now, the distance measuring unit 19 will be described with reference to FIG. 3 .

在图3中,与图7中所示相同者,标以相同的标记。In FIG. 3 , those that are the same as those shown in FIG. 7 are denoted by the same symbols.

在上述发光元件1的射出光轴上配置聚焦透镜59,在该聚焦透镜59的聚焦位置上配置上述射出用光纤61的入射端。该射出用光纤61,如上所述,将上述测距光22引向上述偏转反射镜62。A focus lens 59 is arranged on the output optical axis of the light emitting element 1 , and an incident end of the output optical fiber 61 is arranged at a focus position of the focus lens 59 . The output optical fiber 61 guides the distance measuring light 22 to the deflection mirror 62 as described above.

在上述聚焦透镜48的聚焦位置上,配置上述光检测用光纤63的入射端,该光检测用光纤63的射出端配置在聚焦透镜64的光轴上,从上述光检测用光纤63射出上述反射测距光22′,上述内部参考光22″通过上述聚焦透镜64聚焦在上述光检测元件7上。On the focal position of the above-mentioned focusing lens 48, the incident end of the above-mentioned light detection optical fiber 63 is arranged, and the output end of the light detection optical fiber 63 is arranged on the optical axis of the focusing lens 64, and the above-mentioned reflected light is emitted from the above-mentioned light detection optical fiber 63. The distance measuring light 22 ′ and the internal reference light 22 ″ are focused on the light detecting element 7 through the focusing lens 64 .

发光驱动电路12根据来自控制运算部15的控制信号控制上述发光元件1的驱动发光,并且光检测电路13对来自上述光检测元件7的光检测信号进行放大、A/D变换等所需的处理,处理后的信号送往上述控制运算部15。The light-emitting drive circuit 12 controls the drive light emission of the above-mentioned light-emitting element 1 according to the control signal from the control calculation unit 15, and the light-detection circuit 13 performs necessary processing such as amplification and A/D conversion on the light-detection signal from the above-mentioned light-detection element 7. , and the processed signal is sent to the above-mentioned control calculation unit 15.

该控制运算部15设有存储部65,在该存储部65中存入进行伴随距离测定的运算的测距运算程序和用以进行测定的顺序控制程序等程序,另外,上述存储部65还存储来自上述光检测元件7的光检测信号的随时间光量变化和测定中数据等。The control calculation unit 15 is provided with a storage unit 65, and the storage unit 65 stores programs such as a distance measurement calculation program for performing calculations accompanying distance measurement and a sequence control program for performing measurement. In addition, the storage unit 65 also stores Time-dependent changes in light intensity of the light detection signal from the light detection element 7, data during measurement, and the like.

上述控制运算部15根据上述顺序控制程序,向上述第1回转电动机36用的第1电动机控制部66、上述第2回转电动机52用的第2电动机控制部67发出控制信号,上述第1电动机控制部66控制上述第1回转电动机36的旋转与停止,上述第2电动机控制部67控制上述第2回转电动机52的旋转与停止。The above-mentioned control operation unit 15 sends control signals to the first motor control unit 66 for the first rotary motor 36 and the second motor control unit 67 for the second rotary motor 52 according to the sequence control program, and the first motor controls The unit 66 controls rotation and stop of the first swing motor 36 , and the second motor control unit 67 controls rotation and stop of the second swing motor 52 .

上述第1编码器38检测上述反射镜支架44的旋转角,送往上述控制运算部15,另外,上述第2编码器58检测上述基准反射棱镜55的旋转角,送往上述控制运算部15。The first encoder 38 detects the rotation angle of the mirror holder 44 and sends it to the control operation unit 15 , and the second encoder 58 detects the rotation angle of the reference reflection prism 55 and sends it to the control operation unit 15 .

以下就测定动作进行说明。The measurement operation will be described below.

上述发光元件1通过上述发光驱动电路12以一定的频率进行强度调制并发光,射出测距用的激光束。来自上述发光元件1的激光束由上述聚焦透镜59聚焦在上述射出用光纤61的入射端。引向该射出用光纤61的激光束,从射出端作为上述测距光22射出,该测距光22由上述偏转反射镜62反射到上述聚焦透镜48的光轴上,进而在该聚焦透镜48上聚焦,入射到上述反光镜45,由该反光镜45偏转,以上述投射窗28所要求的发散角在水平方向照射。The light-emitting element 1 is intensity-modulated at a constant frequency by the light-emitting drive circuit 12 to emit light, and emits a laser beam for distance measurement. The laser beam from the light emitting element 1 is focused on the incident end of the output optical fiber 61 by the focusing lens 59 . The laser beam guided to the output optical fiber 61 is emitted from the output end as the distance measuring light 22, and the distance measuring light 22 is reflected by the deflection mirror 62 onto the optical axis of the above-mentioned focusing lens 48, and then passes through the focusing lens 48. Focused upward, incident on the reflector 45, deflected by the reflector 45, and irradiated in the horizontal direction at the divergence angle required by the projection window 28.

在上述测距光22射出且上述基准面形成用激光束21射出的状态下,上述第1回转电动机36被驱动,经过上述第1驱动齿轮37、上述第1旋转齿轮35使上述五棱镜42、上述反光镜45旋转,透过上述投射窗28回转照射上述基准面形成用激光束21、上述测距光22,或者至少用上述基准面形成用激光束21和上述测距光22旋转扫描测定对象物存在的测定区域。In the state where the distance measuring light 22 is emitted and the reference plane forming laser beam 21 is emitted, the first rotary motor 36 is driven, and the pentaprism 42, The above-mentioned reflector 45 rotates, passes through the above-mentioned projection window 28 and irradiates the above-mentioned reference plane forming laser beam 21 and the above-mentioned distance measuring light 22 in rotation, or at least rotates and scans the measurement object with the above-mentioned reference plane forming laser beam 21 and the above-mentioned distance measuring light 22 The measurement area where the substance exists.

还有,在进行距离测定的状态、即照射上述测距光22的状态下,用上述第2回转电动机52使上述基准反射棱镜55旋转,使该基准反射棱镜55成为处于偏离测定对象物的方向即测距方向的状态,另外,使上述第2回转电动机52停止,并使上述基准反射棱镜55保持在不影响测定的预定位置上。Also, in the state where the distance measurement is performed, that is, the state where the distance measuring light 22 is irradiated, the reference reflective prism 55 is rotated by the second rotary motor 52 so that the reference reflective prism 55 is positioned in a direction away from the object to be measured. That is, the state in the distance-measuring direction, and the above-mentioned second rotary motor 52 is stopped, and the above-mentioned reference reflecting prism 55 is held at a predetermined position that does not affect the measurement.

还有,在有多个测定对象物,上述基准反射棱镜55保持在预定位置就会妨碍测定时,也可配合上述反光镜45的旋转而使上述基准反射棱镜55旋转,以避免测定方向与该基准反射棱镜55的位置处于重叠的状态。就是说,由于上述测定对象物所在的方向可通过上述第1编码器38检测,预先进行旋转扫描而求出测定对象物的位置,可根据来自上述第2编码器58的检测结果,使上述基准反射棱镜55移动到偏离于测定方向的位置上。Also, when there are a plurality of objects to be measured and the above-mentioned reference reflective prism 55 is held at a predetermined position and the measurement will be hindered, the above-mentioned reference reflective prism 55 can also be rotated in conjunction with the rotation of the above-mentioned reflective mirror 45, so as to avoid the direction of measurement being different from that of the reference reflective prism 55. The positions of the reference reflective prisms 55 are in an overlapping state. That is to say, since the direction in which the above-mentioned measurement object is located can be detected by the above-mentioned first encoder 38, the position of the measurement object can be obtained by performing rotary scanning in advance, and the above-mentioned reference can be set according to the detection result from the above-mentioned second encoder 58. The reflective prism 55 moves to a position deviated from the measurement direction.

回转照射上述测距光22,该测距光22通过测定对象物,从而上述测距光22被测定对象物反射。测定对象物所反射的反射测距光22’入射到上述反光镜45,由该反光镜45反射,并由上述聚焦透镜48聚焦,从入射端面入射到上述光检测用光纤63。从该光检测用光纤63射出的上述反射测距光22’经上述聚焦透镜64聚焦后,由上述光检测元件7检测。来自该光检测元件7的光检测信号经放大、A/D变换等之后,被送往上述控制运算部15,经过该控制运算部15之后存入上述存储部65。The distance-measuring light 22 is irradiated in rotation, and the distance-measuring light 22 passes through the object to be measured, so that the distance-measuring light 22 is reflected by the object to be measured. The reflected distance-measuring light 22' reflected by the object to be measured enters the mirror 45, is reflected by the mirror 45, is focused by the focusing lens 48, and enters the optical fiber 63 for light detection from the incident end surface. The reflected distance measuring light 22' emitted from the light detecting optical fiber 63 is focused by the focusing lens 64 and detected by the light detecting element 7. The photodetection signal from the photodetection element 7 is amplified, A/D converted, etc., and sent to the control computing unit 15 , and stored in the storage unit 65 after passing through the control computing unit 15 .

另外,通过回转照射上述测距光22,该测距光22也通过上述基准反射棱镜55,在通过的过程中被基准反射棱镜55反射,被反射的激光束再被上述反光镜45反射,经过上述聚焦透镜48、上述光检测用光纤63,作为内部参考光22″被上述光检测元件7检测。In addition, by rotating and irradiating the above-mentioned distance measuring light 22, the distance measuring light 22 also passes through the above-mentioned reference reflective prism 55, and is reflected by the reference reflective prism 55 in the process of passing, and the reflected laser beam is reflected by the above-mentioned reflector 45 again, and passes through the reference reflective prism 55. The focusing lens 48 and the light detection optical fiber 63 are detected by the light detection element 7 as internal reference light 22 ″.

此时,经由上述射出用光纤61、上述反光镜45、上述基准反射棱镜55、上述反光镜45、上述光检测用光纤63而到达上述光检测元件7的光路形成内部参考光路。另外,该内部参考光路的长度为设计值或通过实测而知的值。At this time, the optical path reaching the photodetection element 7 via the emission optical fiber 61 , the mirror 45 , the reference reflection prism 55 , the mirror 45 , and the photodetection optical fiber 63 forms an internal reference optical path. In addition, the length of the internal reference optical path is a design value or a value known through actual measurement.

来自上述光检测元件7的光检测信号被输入上述光检测电路13,该光检测电路13对关于上述反射测距光22’、上述内部参考光22″的光检测信号进行放大、A/D变换等所要的处理,处理后的信号被送到上述控制运算部15,经过该控制运算部15的处理后存入上述存储部65。上述控制运算部15,用存入上述存储部65的测距运算程序,根据该存储部65存储的光检测信号,计算出上述反射测距光22’和上述内部参考光22″的相位差,并根据算出的相位差和光速计算到达测定对象物的距离。The photodetection signal from the photodetection element 7 is input to the photodetection circuit 13, and the photodetection circuit 13 amplifies and A/D converts the photodetection signal related to the reflected distance measuring light 22' and the internal reference light 22". Wait for the desired processing, the processed signal is sent to the above-mentioned control computing unit 15, and is stored in the above-mentioned storage unit 65 after being processed by the control computing unit 15. The above-mentioned control computing unit 15 uses the distance measurement stored in the above-mentioned storage unit 65 The calculation program calculates the phase difference between the reflected distance measuring light 22 ′ and the internal reference light 22 ″ based on the light detection signal stored in the storage unit 65 , and calculates the distance to the object to be measured based on the calculated phase difference and the speed of light.

接着,参照图4(A)、4(B)说明上述反射测距光22’和上述内部参考光22”。Next, the above-mentioned reflected distance measuring light 22' and the above-mentioned internal reference light 22" will be described with reference to Figs. 4(A) and 4(B).

如上所述,在本发明中回转照射上述测距光22,或往复扫描预定范围来进行距离测定。例如,在回转照射上述测距光22的场合,在只有一个测定对象物时,通过将上述反光镜45旋转一圈,也就是将上述测距光22旋转一圈,上述光检测元件7检测一个来自测定对象物的上述反射测距光22’和一个上述内部参考光22″。As described above, in the present invention, the above-mentioned distance measuring light 22 is irradiated in rotation, or the distance is measured by reciprocating scanning a predetermined range. For example, when the above-mentioned range-measuring light 22 is rotated and irradiated, when there is only one object to be measured, by rotating the above-mentioned mirror 45 once, that is, by rotating the above-mentioned distance-measuring light 22 once, the above-mentioned photodetection element 7 detects one. The above-mentioned reflected distance measuring light 22' from the object to be measured and one of the above-mentioned internal reference light 22".

如上所述,在上述基准反射棱镜55的反射面上设置上述振幅滤光片56,上述测距光22在水平方向穿越上述基准反射棱镜55的过程中,上述测距光22同样穿越上述振幅滤光片56。该振幅滤光片56在水平方向上浓度逐渐变化,透过该振幅滤光片56的上述内部参考光22″的光量逐渐变化。另外,设定该内部参考光22″的光量变化量,使得它与来自处于近距离的测定对象物的反射测距光22’的光量和来自处于远距离的测定对象物的反射测距光22’之间的光量变化相等,或具有该量以上的大小。具体地说,可将上述内部参考光22″的光量变化量设为光检测部的动态范围内的最大,或者也可设定为处于动态范围内。As mentioned above, the above-mentioned amplitude filter 56 is arranged on the reflection surface of the above-mentioned reference reflective prism 55, and when the above-mentioned ranging light 22 passes through the above-mentioned reference reflecting prism 55 in the horizontal direction, the above-mentioned ranging light 22 also passes through the above-mentioned amplitude filter. Light sheet 56. The density of the amplitude filter 56 changes gradually in the horizontal direction, and the light quantity of the above-mentioned internal reference light 22 ″ that passes through the amplitude filter 56 gradually changes. In addition, the light quantity variation of the internal reference light 22 ″ is set so that This is equal to or greater than the change in light quantity between the reflected distance measuring light 22' from the short-distance measurement target object and the light reflection distance measurement light 22' from the long-distance measurement target object. Specifically, the amount of change in the light quantity of the internal reference light 22" may be set to be the maximum within the dynamic range of the photodetector, or may be set within the dynamic range.

图4(A),图4(B)表示上述光检测元件7的光检测信号,图中,71表示检测上述内部参考光22″而得到的参考信号,72表示检测上述反射测距光22′而得到的测距信号(外部信号)。Fig. 4 (A), Fig. 4 (B) represent the photodetection signal of above-mentioned photodetection element 7, among the figure, 71 represents the reference signal that detects above-mentioned internal reference light 22 " and obtains, and 72 represents detection above-mentioned reflected range-finding light 22 ' and the obtained ranging signal (external signal).

上述参考信号71分割为所要强度级。例如,如图4(B)所示,该参考信号71被分成5个强度级L1、L2、L3、L4和L5,另外,分割为与强度级L1、L2、L3、L4和L5对应的Z1、Z2、Z3、Z4和Z5等5个区。The aforementioned reference signal 71 is segmented into desired intensity levels. For example, as shown in FIG. 4(B), the reference signal 71 is divided into five intensity levels L1, L2, L3, L4, and L5. In addition, it is divided into Z1 corresponding to the intensity levels L1, L2, L3, L4, and L5. , Z2, Z3, Z4 and Z5 and other 5 districts.

在上述参考信号71中,提取并生成为具有与强度级1一致的光量的那部分光检测信号作为内部参考光Ref1、具有与强度级2一致的光量的那部分光检测信号作为内部参考光Ref2、具有与强度级3一致的光量的那部分光检测信号作为内部参考光Ref3、具有与强度级4一致的光量的那部分光检测信号作为内部参考光Ref4、具有与强度级1一致的光量的那部分光检测信号作为内部参考光Ref5,并存入上述存储部65。Of the above-mentioned reference signal 71, a part of the light detection signal having a light quantity corresponding to the intensity level 1 is extracted and generated as the internal reference light Ref1, and a part of the light detection signal having a light quantity corresponding to the intensity level 2 is extracted and generated as the internal reference light Ref2. , the part of the light detection signal having the light quantity consistent with the intensity level 3 is used as the internal reference light Ref3, the part of the light detection signal having the light quantity consistent with the intensity level 4 is used as the internal reference light Ref4, and the light quantity corresponding to the intensity level 1 is used as the internal reference light Ref4. That part of the photodetection signal is stored in the storage unit 65 as the internal reference light Ref5.

上述控制运算部15根据上述光检测元件7送来的光检测信号计算上述反射测距光22′的检测光量,并从存入上述存储部65的多个(在图4中为5个)内部参考光Ref中选择与上述反射测距光22′所具有的光量对应的内部参考光Ref。The above-mentioned control calculation unit 15 calculates the detected light quantity of the above-mentioned reflected distance measuring light 22′ based on the light detection signal sent by the above-mentioned light detection element 7, and stores it from a plurality (five in FIG. 4 ) of the above-mentioned storage unit 65. The internal reference light Ref corresponding to the light quantity of the above-mentioned reflected ranging light 22' is selected among the reference light Ref.

例如,在上述反射测距光22′的检测光量在比强度级L1大,比强度级L2小的区域Z2时,作为内部参考光Ref,选择内部参考光Ref2的光检测信号,根据该内部参考光Ref2的光检测信号和上述测距信号72,计算相位差,进而根据相位差和光速算出距离。For example, when the detected light quantity of the above-mentioned reflected ranging light 22' is in the area Z2 which is larger than the intensity level L1 and smaller than the intensity level L2, the light detection signal of the internal reference light Ref2 is selected as the internal reference light Ref, and the light detection signal of the internal reference light Ref2 is selected according to the internal reference light. A phase difference is calculated between the light detection signal of the light Ref2 and the distance measurement signal 72 , and the distance is calculated from the phase difference and the speed of light.

由于内部参考光Ref2的光检测信号与上述测距信号72的检测光量一致或大致一致,不会由于参考光和测距光的检测光量不同而产生测定误差。Since the light detection signal of the internal reference light Ref2 coincides or substantially coincides with the detected light quantity of the distance measuring signal 72 , no measurement error occurs due to the difference in the detected light quantities of the reference light and the distance measuring light.

此外,具有与上述反射测距光22′对应的光量的内部参考光Ref的选择,通过对记录于上述存储部65的数据的信号处理进行。因而,由于没有伴随内部参考光和测距光的光路切换、浓度滤光片的光量调整等的机械动作,距离测定能极高速地进行。In addition, selection of the internal reference light Ref having a light quantity corresponding to the reflected distance measuring light 22 ′ is performed by signal processing of the data recorded in the storage unit 65 . Therefore, distance measurement can be performed at an extremely high speed because there is no mechanical operation involved in switching the optical path of the internal reference light and the distance measuring light, or adjusting the light intensity of the density filter.

因而,能满足用回转照射的测距光进行的距离测定等高速测定的要求。另外,根据来自上述第1编码器38的角度信号,在测定对象物侧求出距离数据和角度数据,再用基准面形成用激光束求出仰角,便可检测出位置。Therefore, it is possible to meet the demand for high-speed measurement such as distance measurement using the distance measuring light irradiated in rotation. In addition, the position can be detected by obtaining distance data and angle data on the side of the object to be measured based on the angle signal from the first encoder 38, and obtaining the elevation angle by using the reference plane forming laser beam.

如上所述,在本发明中,上述内部参考光22″通过旋转的上述基准反射棱镜55反射求出。因此,在支持上述基准反射棱镜55的旋转机构上,有时会包含零件精度、装配精度等原因造成的误差。As mentioned above, in the present invention, the above-mentioned internal reference light 22 " is obtained by reflection by the above-mentioned reference reflective prism 55 that rotates. Therefore, on the rotating mechanism that supports the above-mentioned reference reflective prism 55, parts accuracy, assembly accuracy, etc. may be included. cause of error.

图5示意表示因上述基准反射棱镜55的旋转位置变化造成的误差。FIG. 5 schematically shows errors caused by changes in the rotational position of the reference reflective prism 55 described above.

图中,73表示在假定旋转机构没有造成误差的情况下,上述基准反射棱镜55旋转时该基准反射棱镜55反射面的基准轨迹,基准轨迹假定为真圆。另外,图中,74表示旋转机构有误差的情况下上述基准反射棱镜55的反射面的轨迹。上述基准轨迹73和上述轨迹74之间的差便是误差R。另外,为方便起见上述轨迹7 4表示为椭圆。In the figure, 73 represents the reference trajectory of the reflection surface of the reference reflection prism 55 when the above-mentioned reference reflection prism 55 rotates under the assumption that the rotation mechanism does not cause an error, and the reference trajectory is assumed to be a true circle. In addition, in the figure, 74 represents the locus of the reflection surface of the above-mentioned reference reflection prism 55 when there is an error in the rotation mechanism. The difference between the above-mentioned reference trajectory 73 and the above-mentioned trajectory 74 is the error R. In addition, the above-mentioned trajectory 74 is represented as an ellipse for convenience.

上述误差R表现为内部参考光路长度的误差,成为测定误差,因此,在实施高精度测定的场合,根据误差R修正测定结果。The above-mentioned error R appears as an error in the internal reference optical path length and becomes a measurement error. Therefore, when performing high-precision measurement, the measurement result is corrected based on the error R.

另外,上述轨迹74的轨迹是所需要的手段,例如,通过实测求出取得与上述基准反射棱镜55的旋转位置9和该基准反射棱镜55的反射面的误差R对应的数据。上述旋转位置θ通过上述第2编码器58测定,例如测定每步15°的误差,制作图6所示的数据表,并将该数据表存储在上述存储部65中。The locus of the locus 74 is a necessary means, for example, to acquire data corresponding to the rotational position 9 of the reference reflective prism 55 and the error R of the reflective surface of the reference reflective prism 55 through actual measurement. The above-mentioned rotational position θ is measured by the above-mentioned second encoder 58 , for example, an error of 15° per step is measured, a data table shown in FIG. 6 is created, and the data table is stored in the above-mentioned storage unit 65 .

因而,根据上述第2编码器58的角度信号检测取得上述参考信号71(参见图4)时的上述基准反射棱镜55的旋转位置,由上述数据表取得与所检测的角度对应的误差R,根据上述误差R修正算出的测定距离。另外,所取得的误差R,例如,假设在0°~15°为R1、15°~30°为R2等,也可以按区域判断旋转位置来求出误差R。另外,例如,对于0°~15°之间的旋转位置误差R,也可以按比例分配R1和R2来求出误差R。Therefore, the rotational position of the above-mentioned reference reflective prism 55 when the above-mentioned reference signal 71 (refer to FIG. 4 ) is detected based on the angle signal of the above-mentioned second encoder 58, the error R corresponding to the detected angle is obtained from the above-mentioned data table, according to The above error R corrects the calculated measurement distance. In addition, the acquired error R is, for example, assumed to be R1 at 0° to 15°, R2 at 15° to 30°, etc., and the error R may be obtained by judging the rotational position for each area. In addition, for example, with respect to the rotational position error R between 0° and 15°, R1 and R2 may be proportionally distributed to obtain the error R.

另外,在上述实施例中,可以固定上述测距光22的照射方向,驱动上述第2回转电动机52,转动上述基准反射棱镜55,使之横截上述测距光22。In addition, in the above-described embodiment, the irradiation direction of the distance-measuring light 22 may be fixed, the second rotary motor 52 may be driven, and the reference reflective prism 55 may be rotated so as to traverse the distance-measuring light 22 .

另外,在只有1个测定对象物时,也可省去回转照射上述测距光22的功能,只让上述基准反射棱镜55旋转,或者也可以使该反射棱镜55滑动而横截上述测距光22。另外,距离测定方式,既可为相位差方式,也可为时间差方式。In addition, when there is only one object to be measured, the function of rotating and illuminating the distance measuring light 22 may be omitted, and only the reference reflecting prism 55 may be rotated, or the reflecting prism 55 may be slid to traverse the distance measuring light. twenty two. In addition, the distance measurement method may be either a phase difference method or a time difference method.

产业上利用的可能性Possibility of industrial use

依据本发明,由于设有:光发射部,使测距光照射测定对象物;基准反射部,设置得可以相对移动以横截所照射的测距光并处于已知位置;光检测部,将来自上述测定对象物的反射光作为反射测距光,将来自上述基准反射部的反射光作为内部参考光进行检测;以及控制运算部,根据涉及上述反射测距光的光检测信号和涉及上述内部参考光的光检测信号算出到测定对象物的距离,所以没有测距光和上述内部参考光的机械光路切换,因此,可进行高速测距。According to the present invention, since it is provided with: a light emitting part, so that the distance measuring light irradiates the object to be measured; a reference reflection part, which can be relatively moved so as to cross the irradiated distance measuring light and be at a known position; a light detecting part, which will The reflected light from the measurement target object is used as the reflected distance measuring light, and the reflected light from the above reference reflecting part is detected as the internal reference light; The optical detection signal of the reference light calculates the distance to the object to be measured, so there is no mechanical optical path switching between the distance measuring light and the above-mentioned internal reference light, so high-speed distance measurement is possible.

另外,依据本发明,由于在设置上述基准反射部的光路上,设置使上述内部参考光的光量发生变化的光量调整部件,可以得到与反射测距光的光量相应的上述内部参考光,因此,可提高测定可靠性。In addition, according to the present invention, since the light quantity adjustment means for changing the light quantity of the internal reference light is provided on the optical path where the reference reflection part is provided, the internal reference light corresponding to the light quantity of the reflected distance measuring light can be obtained. Therefore, Measurement reliability can be improved.

另外,依据本发明,由于上述测距光扫描至少包含测定对象物的测定区域,上述基准反射部位于扫描范围内,且配置在不干涉来自测定对象物的反射光的位置上,因此,能够在扫描测距光的过程中进行测距,可望测定的高速化。In addition, according to the present invention, since the distance-measuring light scans at least the measurement area including the object to be measured, and the reference reflector is located within the scanning range, and is arranged at a position that does not interfere with the reflected light from the object to be measured, it is possible to The distance measurement is performed while the distance measurement light is being scanned, and it is expected to speed up the measurement.

另外,依据本发明,上述控制运算部可以根据检测光量变化的光检测信号,生成与多个检测光量强度对应的多个内部参考基准,选择对应于反射测距光光量的内部参考基准,根据所选择的内部参考基准和上述反射测距光的光检测信号计算到达测定对象物的距离,故可望测定的高速化,使在测距光扫描过程中实时地测量到测定对象物的距离成为可能。In addition, according to the present invention, the above-mentioned control calculation unit can generate a plurality of internal reference standards corresponding to a plurality of detected light intensity intensities based on the light detection signal of the detected light quantity change, select an internal reference standard corresponding to the reflected distance measuring light quantity, and then The selected internal reference standard and the light detection signal of the above-mentioned reflected distance measuring light calculate the distance to the object to be measured, so it is expected to speed up the measurement and make it possible to measure the distance to the object to be measured in real time during the scanning process of the distance measuring light .

另外,若采用本发明,由于上述基准反射部由可以相对于上述测距光移动的上述基准反射部的移动机构部支持,该移动机构部使上述基准反射部保持在偏离于测定方向的位置上移动,故上述基准反射部的存在不会妨碍测定作业。In addition, according to the present invention, since the reference reflector is supported by the movement mechanism of the reference reflector that can move relative to the distance measuring light, the movement mechanism maintains the reference reflector at a position deviated from the measuring direction. Therefore, the presence of the above-mentioned reference reflector will not hinder the measurement operation.

另外,若采用本发明,由于上述移动机构部具有检测上述基准反射部位置的位置检测装置,上述控制运算部具有对应于上述基准反射部的位置的误差数据,上述光检测部能够根据与检测内部参考光时上述基准反射部的位置对应的误差修正测定结果,故高精度的测定成为可能。In addition, according to the present invention, since the moving mechanism part has a position detection device for detecting the position of the reference reflection part, the control computation part has error data corresponding to the position of the reference reflection part, and the light detection part can detect the internal The measurement result is corrected for an error corresponding to the position of the reference reflector when the reference light is used, so that high-precision measurement becomes possible.

Claims (10)

1. Distnace determination device is provided with: the light emission part, at whole circumference rotary irradiation range finding light or shuttle-scanning preset range; The benchmark reflecting part is in known location, is arranged to simultaneously and to be arranged to by this range finding light transversal with the rotation center Concentric rotation of the range finding light of institute rotary irradiation; Optical detection part will also will detect as internal reference light from the reflected light of described benchmark reflecting part as reflection range finding light from the reflected light of measuring object; And control algorithm section, calculate the distance of determination object thing according to the light detecting signal that relates to described reflection range finding light and the light detecting signal that relates to described internal reference light,
At the state that described range finding light rotary irradiation carries out range observation, described benchmark reflecting part rotates to the position of departing from from the range finding direction.
2. Distnace determination device claimed in claim 1 is characterized in that, on the light path that is provided with described benchmark reflecting part, the light quantity adjustment component of the light quantity change that makes described internal reference light is set.
3. Distnace determination device claimed in claim 2 is characterized in that, described light quantity adjustment component is the optical filter that concentration gradually changes on the direction that range finding light passes through.
4. claim 2 or 3 described Distnace determination devices is characterized in that, described light quantity adjustment component and described benchmark reflecting part arrange integratedly.
5. Distnace determination device claimed in claim 1 is characterized in that, described range finding light scans the mensuration zone that comprises the determination object thing at least, and described benchmark reflecting part is configured in and is positioned at sweep limit and does not interfere again on the catoptrical position from the determination object thing.
6. Distnace determination device claimed in claim 2, it is characterized in that, described control algorithm section is according to the light detecting signal that detects light quantity and change, generate a plurality of internal reference benchmark corresponding with a plurality of detection light quantity grades, and select the internal reference benchmark corresponding with the light quantity of reflection range finding light, be calculated to the distance of determination object thing according to the light detecting signal of selected internal reference benchmark and described reflection range finding light.
7. Distnace determination device claimed in claim 3 is characterized in that, the variation of detection light quantity is passed through optical filter by range finding light and obtained.
8. Distnace determination device claimed in claim 1, it is characterized in that, described benchmark reflecting part is by making described benchmark reflecting part support the section of travel mechanism that described range finding light relatively moves, and this section of travel mechanism keeps described benchmark reflecting part mobile in the position that deviates from the mensuration direction.
9. Distnace determination device claimed in claim 8, it is characterized in that, section of described travel mechanism is provided with the position detecting device that detects described benchmark reflecting part position, described control algorithm section has the error information corresponding with the position of described benchmark reflecting part, and error corresponding to the position with described benchmark reflecting part that detects the internal reference light time according to described optical detection part revised measurement result.
10. Distnace determination device claimed in claim 1 is characterized in that, described smooth emission part is provided with: the deflectiometry parts make range finding light deflection and shine the mensuration direction; Rotating part keeps and rotates this deflectiometry parts; The benchmark reflecting prism is arranged to and can be rotated freely with one heart with the rotation center of this rotating part; And the revolution drive division, be independent of described deflectiometry parts ground and rotate this benchmark reflecting prism.
CN200680019988XA 2005-06-06 2006-05-10 Distance measuring device Expired - Fee Related CN101189532B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005165185A JP4819403B2 (en) 2005-06-06 2005-06-06 Distance measuring device
JP165185/2005 2005-06-06
PCT/JP2006/309772 WO2006132060A1 (en) 2005-06-06 2006-05-10 Distance measuring device

Publications (2)

Publication Number Publication Date
CN101189532A CN101189532A (en) 2008-05-28
CN101189532B true CN101189532B (en) 2013-03-27

Family

ID=37498265

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200680019988XA Expired - Fee Related CN101189532B (en) 2005-06-06 2006-05-10 Distance measuring device

Country Status (5)

Country Link
US (1) US7474388B2 (en)
EP (1) EP1914565A4 (en)
JP (1) JP4819403B2 (en)
CN (1) CN101189532B (en)
WO (1) WO2006132060A1 (en)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5020585B2 (en) * 2006-09-27 2012-09-05 株式会社トプコン Measuring system
US7697125B2 (en) * 2007-05-11 2010-04-13 Rosemount Aerospace Inc. Scanning ladar with adjustable operational parameters
JP5207665B2 (en) 2007-06-08 2013-06-12 株式会社トプコン Measuring system
JP5145011B2 (en) * 2007-10-26 2013-02-13 株式会社トプコン Laser survey system
JP4663743B2 (en) * 2008-01-31 2011-04-06 北陽電機株式会社 Scanning distance measuring device
JP5124321B2 (en) * 2008-03-21 2013-01-23 株式会社トプコン Measuring system
JP5124319B2 (en) * 2008-03-21 2013-01-23 株式会社トプコン Surveying instrument, surveying system, measuring object detection method, and measuring object detection program
JP5166087B2 (en) * 2008-03-21 2013-03-21 株式会社トプコン Surveying device and surveying system
JP5150329B2 (en) 2008-03-26 2013-02-20 株式会社トプコン Surveying device and surveying system
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
JP5616025B2 (en) * 2009-01-22 2014-10-29 株式会社トプコン Lightwave distance measuring method and lightwave distance measuring apparatus
US20100228517A1 (en) * 2009-03-09 2010-09-09 Lasercraft, Inc. Lidar devices with reflective optics
JP5280258B2 (en) * 2009-03-16 2013-09-04 株式会社トプコン Surveying system
DE102009026434A1 (en) * 2009-05-25 2010-12-09 Robert Bosch Gmbh Aiming optics device
US8659749B2 (en) 2009-08-07 2014-02-25 Faro Technologies, Inc. Absolute distance meter with optical switch
JP5263273B2 (en) * 2009-11-30 2013-08-14 株式会社デンソーウェーブ Laser measuring device
JP5456549B2 (en) 2010-04-15 2014-04-02 株式会社トプコン Surveying system and laser reference surface smoothing method in surveying system
US8422034B2 (en) 2010-04-21 2013-04-16 Faro Technologies, Inc. Method and apparatus for using gestures to control a laser tracker
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
US8537371B2 (en) 2010-04-21 2013-09-17 Faro Technologies, Inc. Method and apparatus for using gestures to control a laser tracker
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US8724119B2 (en) 2010-04-21 2014-05-13 Faro Technologies, Inc. Method for using a handheld appliance to select, lock onto, and track a retroreflector with a laser tracker
US8619265B2 (en) 2011-03-14 2013-12-31 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
DE102010032725B4 (en) * 2010-07-26 2012-04-26 Faro Technologies, Inc. Device for optically scanning and measuring an environment
EP2469221A1 (en) * 2010-12-21 2012-06-27 Universite Pierre Et Marie Curie - Paris 6 Method and system for configuring a device for correcting the effect of a medium on a light signal, method, device and system for correcting said effect.
US8902408B2 (en) 2011-02-14 2014-12-02 Faro Technologies Inc. Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector
GB2511236B (en) 2011-03-03 2015-01-28 Faro Tech Inc Target apparatus and method
US9164173B2 (en) 2011-04-15 2015-10-20 Faro Technologies, Inc. Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
DE112012001708B4 (en) 2011-04-15 2018-05-09 Faro Technologies, Inc. coordinate measuring machine
US9482529B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
USD688577S1 (en) 2012-02-21 2013-08-27 Faro Technologies, Inc. Laser tracker
CN103149567A (en) * 2011-12-07 2013-06-12 亚洲光学股份有限公司 Distance measuring device
TWI471581B (en) * 2011-12-09 2015-02-01 Asia Optical Co Inc Distance measuring device
CN104094081A (en) 2012-01-27 2014-10-08 法罗技术股份有限公司 Inspection method with barcode identification
EP2634594A1 (en) * 2012-03-01 2013-09-04 Leica Geosystems AG Method for determining a change in distance by means of interferometry
US9279679B2 (en) * 2012-09-12 2016-03-08 Kabushiki Kaisha Topcon Construction machine control method and construction machine control system
US9041914B2 (en) 2013-03-15 2015-05-26 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
CN106062511B (en) 2013-12-05 2018-12-04 特林布尔有限公司 The method of geodetic instrument and operation geodetic instrument
WO2015082217A2 (en) 2013-12-05 2015-06-11 Trimble Ab Distance measurement instrument with scanning function
US9606228B1 (en) 2014-02-20 2017-03-28 Banner Engineering Corporation High-precision digital time-of-flight measurement with coarse delay elements
JP6371985B2 (en) * 2014-04-11 2018-08-15 パナソニックIpマネジメント株式会社 Mirror drive device, beam irradiation device, and laser radar
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
JP6553999B2 (en) 2015-09-17 2019-07-31 株式会社トプコン Polygon mirror and fan beam output device and surveying system
JP6657396B2 (en) * 2016-06-02 2020-03-04 シャープ株式会社 Optical sensors, electronic equipment
JP6857979B2 (en) * 2016-07-27 2021-04-14 株式会社トプコン Laser scanner optics and surveying equipment
JP6728369B2 (en) * 2016-09-08 2020-07-22 シャープ株式会社 Optical sensor and electronic equipment
DE102017107245B4 (en) * 2017-04-04 2024-07-25 Prüftechnik Dieter Busch GmbH Device and method for measuring cavities and use of the device for determining roll alignments
JP6855316B2 (en) * 2017-05-10 2021-04-07 株式会社トプコン Surveying system
CN107167813A (en) * 2017-05-19 2017-09-15 深圳市瑞大科技有限公司 Optical radar
JP6860459B2 (en) * 2017-09-19 2021-04-14 株式会社東芝 Distance measuring device
FR3090125B1 (en) * 2018-12-18 2021-02-26 Thales Sa Compact lidar system
DE102019111852B3 (en) * 2019-05-07 2020-06-04 Sick Ag Safety laser scanner and method
JP7582320B2 (en) 2020-10-14 2024-11-13 日本電気株式会社 Optical ranging device and optical ranging method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5991011A (en) * 1996-11-14 1999-11-23 Sick Ag Laser distance finding apparatus
CN1497264A (en) * 2002-10-18 2004-05-19 ��ʽ�������տ� position measuring device
CN1545610A (en) * 2002-06-28 2004-11-10 株式会社拓普康 Position detection device
CN1573357A (en) * 2003-05-21 2005-02-02 株式会社拓普康 Distance-measuring system

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149985A (en) * 1984-01-14 1985-08-07 Asahi Optical Co Ltd Lightwave ranging device
JP2694647B2 (en) 1988-04-05 1997-12-24 株式会社ソキア Distance measuring theodolite
JPH087261B2 (en) * 1990-11-09 1996-01-29 株式会社オプテック Lightwave distance measuring method and lightwave distance meter
JPH04313013A (en) 1991-01-16 1992-11-05 Sokkia Co Ltd Plain type two-dimensional range finder
DE4219260C2 (en) * 1992-06-12 1994-07-14 Leuze Electronic Gmbh & Co Photoelectric device with a test object
US5455669A (en) * 1992-12-08 1995-10-03 Erwin Sick Gmbh Optik-Elektronik Laser range finding apparatus
DE4316348A1 (en) * 1993-05-15 1994-11-17 Wild Heerbrugg Ag Distance measuring device
JP3137307B2 (en) * 1993-12-27 2001-02-19 アステックス株式会社 Omnidirectional distance detector
US5784155A (en) * 1996-02-08 1998-07-21 Kabushiki Kaisha Topcon Laser survey instrument
DE19607345A1 (en) * 1996-02-27 1997-08-28 Sick Ag Laser distance determination device
US5988862A (en) * 1996-04-24 1999-11-23 Cyra Technologies, Inc. Integrated system for quickly and accurately imaging and modeling three dimensional objects
US6052190A (en) * 1997-09-09 2000-04-18 Utoptics, Inc. Highly accurate three-dimensional surface digitizing system and methods
JP2004512505A (en) * 2000-09-27 2004-04-22 ギガー,クルト Signal detecting device and signal detecting method in distance measuring device
JP2004212058A (en) 2002-12-26 2004-07-29 Topcon Corp Working position measuring device
JP3908226B2 (en) * 2004-02-04 2007-04-25 日本電産株式会社 Scanning range sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5991011A (en) * 1996-11-14 1999-11-23 Sick Ag Laser distance finding apparatus
CN1545610A (en) * 2002-06-28 2004-11-10 株式会社拓普康 Position detection device
CN1497264A (en) * 2002-10-18 2004-05-19 ��ʽ�������տ� position measuring device
CN1573357A (en) * 2003-05-21 2005-02-02 株式会社拓普康 Distance-measuring system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平10-20035A 1998.01.23

Also Published As

Publication number Publication date
WO2006132060A1 (en) 2006-12-14
JP4819403B2 (en) 2011-11-24
JP2006337302A (en) 2006-12-14
EP1914565A1 (en) 2008-04-23
EP1914565A9 (en) 2012-02-15
CN101189532A (en) 2008-05-28
US20070263202A1 (en) 2007-11-15
EP1914565A4 (en) 2013-01-09
US7474388B2 (en) 2009-01-06

Similar Documents

Publication Publication Date Title
CN101189532B (en) Distance measuring device
JP5150329B2 (en) Surveying device and surveying system
EP2103902B1 (en) Surveying Device and Surveying System
JP5124319B2 (en) Surveying instrument, surveying system, measuring object detection method, and measuring object detection program
EP1772749B1 (en) Distance measuring device
JP3941839B2 (en) Laser rotary irradiation device
CN100397039C (en) Laser leveling systems for pipe laying
EP2381272B1 (en) Laser scanner
US8174682B2 (en) Shape measuring instrument with light source control
JP4796834B2 (en) Distance measuring method and distance measuring device
EP1321739B1 (en) Position measuring instrument
US11598854B2 (en) Surveying system
JP6783093B2 (en) measuring device
EP3696499B1 (en) Surveying system having a rotating mirror
JP6749192B2 (en) Scanner and surveying equipment
JP4851737B2 (en) Distance measuring device
JP4074967B2 (en) Laser irradiation device
CN115685140A (en) Measuring device
JP6913422B2 (en) Surveying system
US7531772B2 (en) Apparatus for translational displacement of a lens in a laser focussing optical system
KR20070015267A (en) Displacement measuring device
JP2025006809A (en) Surveying Equipment
JP6884529B2 (en) measuring device
WO2024232359A1 (en) Surveying device and surveying system

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130327