JP5263273B2 - Laser measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser measuring device capable of correctly setting a rotation position where a laser beam is irradiated in a prescribed direction as a "reference position," and calculating a relative position of a detection object based on the reference position with higher accuracy. <P>SOLUTION: The laser measuring device 1 includes a "reference position detection means" for detecting a rotation position where a detected distance value satisfies a prescribed distance condition and a detected photoreception quantity satisfies a prescribed photoreception quantity as a "reference position," a "relative position detection means" for detecting a relative rotation position of a deflection part 41 having the "reference position" detected by the "reference position detection means" as the reference, and a "direction detection means" for detecting a direction of a detection object based on the detection result of the relative rotation position by the " relative position detection means," when a reflection light is received by a photo diode 20 (light-receiving means). <P>COPYRIGHT: (C)2012,JPO&amp;INPIT

Description

  The present invention relates to a laser measuring apparatus.

  Conventionally, for example, an apparatus as disclosed in Patent Document 1 is provided as a technique for detecting the distance and direction to a detection object using a laser beam. In the apparatus of Patent Document 1, an optical isolator that transmits laser light and reflects reflected light from a detection object toward the detection means is provided on the optical axis of the laser light from the laser light generation means. Furthermore, a concave mirror that rotates about the central axis in the optical axis direction is provided on the optical axis of the laser light that passes through the optical isolator. The concave mirror reflects the laser light toward the space and reflects it from the detection object. Reflecting light toward the optical isolator enables 360 ° horizontal scanning.

Japanese Patent No. 2789741 Japanese Patent Laid-Open No. 10-20035

  By the way, in the laser measuring apparatus as described above, there is a problem as to how to set a position (reference position) that becomes a reference for rotation of the deflecting means (concave mirror or the like). For example, a method of attaching a rotation sensor such as a rotary encoder to the rotating shaft of the deflecting means is conceivable. In this case, if a deviation occurs when assembling parts such as the deflecting means and the rotary encoder, the detection error tends to increase. There is a problem. In particular, when detecting a distant detection object, even if the angle error during assembly (for example, the angle error between the deflecting means and the rotary encoder) is small, the position error is considerably large at the distant position. There is a demand for a configuration that can eliminate the error factors resulting from such assembly as much as possible.

  In addition, in the laser measuring apparatus as described above, there is a demand to simplify the apparatus configuration and reduce the number of parts by omitting the rotary encoder, and in order to omit the rotary encoder in this way, It is necessary to be able to specify the relative orientation of the deflecting means (concave mirror or the like) by a method other than the rotary encoder. Also in this case, it is necessary to determine the rotation position of the deflecting means when the laser beam is irradiated in the specified direction as the “reference position”, and it is essential to accurately detect this “reference position”.

  The present invention has been made to solve the above-described problems, and can accurately detect the “reference position” of the rotational position at which the laser beam is irradiated in the specified direction, based on the reference position. It is an object of the present invention to provide a laser measuring apparatus capable of calculating the relative position of a detection object with higher accuracy.

  According to a first aspect of the present invention, there is provided laser light generating means for generating laser light, and when the laser light is generated by the laser light generating means, the reflected light generated by reflection of the laser light by a detection object is received. Light receiving means, and deflecting means configured to be rotatable about a predetermined central axis. The deflecting means deflects the laser light toward a space and directs the reflected light toward the light receiving means. A deflection means that deflects the rotation, a drive means that rotationally drives the deflection means of the rotation deflection means, a case that houses at least the rotation deflection means, and an inner wall of the case, the deflection A reflection surface arranged on the scanning path of the laser light from the means, and reflects the laser light from the deflection means on the reflection surface when the deflection means is in a predetermined rotation range. A reference member that causes the light receiving means to receive light via the deflecting means, a distance value calculating means that calculates a distance value to the arrival position of the laser beam for each rotation position of the deflecting means, and a rotation of the deflecting means. The received light amount detecting means for detecting the amount of light received by the light receiving means for each moving position, and the distance value detected by the distance value calculating means satisfies a predetermined distance condition and is detected by the received light amount detecting means. A relative position of a reference position detecting unit that detects a rotation position where the received light amount satisfies a predetermined light receiving amount condition as a reference position, and a relative rotation of the deflecting unit with the reference position detected by the reference position detecting unit as a reference. Relative position detection means for detecting a moving position; and when the reflected light is received by the light receiving means, the detection is performed based on a detection result of the relative rotation position by the relative position detection means. It is characterized by comprising: a direction detecting means for detecting a direction of the object.

  According to a second aspect of the present invention, in the laser measurement apparatus according to the first aspect, the reference position detection unit corresponds to the position or shape of the reference member based on a calculation result by the distance value calculation unit. Predetermined rotation range detection means for detecting a predetermined rotation range that satisfies a specified condition is provided, and the predetermined rotation range detection means detects the predetermined rotation range based on a detection result of the received light amount by the received light amount detection means. A rotation position where the amount of received light is in a specified state in the rotation range is detected as the reference position.

  According to a third aspect of the present invention, in the laser measurement apparatus according to the second aspect, the reference member has a predetermined distance from the laser beam emission position of the deflecting unit to the laser beam irradiation path of the reflecting surface. The predetermined rotation range detection unit is configured to set a rotation range in which the fluctuation of the distance value falls within a predetermined threshold based on the calculation result by the distance value calculation unit. It is detected as a range.

  According to a fourth aspect of the present invention, in the laser measurement apparatus according to the first aspect, the reference position detecting means is based on data for a plurality of circumferences of distance values obtained for each rotation position by the distance value calculating means. A predetermined rotation range detecting means for detecting a predetermined rotation range in which a distance value obtained at the plurality of rounds satisfies a predetermined statistical condition corresponding to the position or shape of the reference member, and the received light amount by the received light amount detecting means; On the basis of the detection result, a rotation position where the amount of received light is in a specified state in the predetermined rotation range detected by the predetermined rotation range detection means is detected as the reference position.

  According to a fifth aspect of the present invention, in the laser measurement apparatus according to the fourth aspect, the reference member has a predetermined distance from the laser beam emission position on the deflecting unit to the laser beam irradiation path on the reflecting surface. The predetermined rotation range detecting means is configured such that the distance value fluctuates based on data for a plurality of rounds of distance values obtained for each rotation position by the distance value calculating means. A rotation range that falls within a predetermined threshold is detected as the predetermined rotation range.

  According to a sixth aspect of the present invention, in the laser measurement apparatus according to any one of the second to fifth aspects, the reflecting surface of the reference member has the deflecting means when the deflecting means is at the reference position. The reference position detection means has a maximum amount of light received in the predetermined rotation range detected by the predetermined rotation range detection means. The rotation position is detected as the reference position.

A seventh aspect of the present invention is the laser measurement apparatus according to the sixth aspect, wherein the reference member is located at the reference position when a moving direction of the laser light incident on the reflecting surface is a width direction. The laser beam from the means is configured to enter a predetermined position in the width direction of the reflecting surface.
In addition, the reference position detection unit detects the maximum received light amount rotation position where the received light amount becomes the maximum value in the predetermined rotation range detected by the predetermined rotation range detection unit, and the detected Judgment means for judging whether or not the maximum received light amount rotational position is a corresponding rotational position corresponding to the predetermined position in the width direction is provided. When the determination means determines that the maximum received light amount rotation position corresponds to the corresponding rotation position, the maximum received light amount rotation position is detected as the reference position, and the maximum received light amount rotation is performed. When it is determined that the position does not correspond to the corresponding rotation position, the predetermined rotation range is detected again by the predetermined rotation range detection means, and the detected rotation range is detected again. The maximum received light amount rotational position is detected again, and the determination unit tries again the determination process of whether or not the detected maximum received light amount maximum rotational position corresponds to the corresponding rotational position. It is configured.

  According to an eighth aspect of the present invention, laser light generating means for generating laser light, and when the laser light is generated by the laser light generating means, the reflected light generated when the laser light is reflected by a detection object is received. And a deflection unit configured to be rotatable about a predetermined central axis. When the rotation range of the deflection unit is within a predetermined detectable range, the deflection unit is configured to emit the laser beam. A rotating deflection unit that deflects the light toward the space and deflects the reflected light toward the light receiving unit; a driving unit that rotationally drives the deflection unit of the rotating deflection unit; and at least the rotating deflection unit. A case to be accommodated and disposed on the scanning path of the laser light from the deflecting means inside the inner wall of the case, and the rotational position of the deflecting means is a predetermined position outside the detectable range. A light guide member for guiding the laser light from the deflecting means to a position deviated from the deflecting means and the light receiving means, and a turning position of the deflecting means when outside the detectable range. And having a light receiving wall surface that receives the laser light from the deflecting means when outside the predetermined rotation range, and at least part of light reflected by the laser light on the light receiving wall surface, A light receiving wall arranged so as to be received by the light receiving means, a distance value calculating means for calculating a distance value to the arrival position of the laser beam for each rotation position of the deflecting means, and a rotation of the deflecting means. The received light amount detecting means for detecting the amount of light received by the light receiving means for each moving position, and the rotation position where the received light amount detected by the received light amount detecting means satisfies a predetermined low received light amount is detected as a reference position. Reference position detection Means, relative position detection means for detecting a relative rotation position of the deflection means with reference to the reference position detected by the reference position detection means, and a rotation position of the deflection means in the detectable range. When the reflected light from the detection object is received by the light receiving means, the direction of the detection object is detected based on the detection result of the relative rotation position by the relative position detection means. And a direction detecting means.

  According to a ninth aspect of the present invention, in the laser measurement device according to the eighth aspect, the light receiving wall diffuses and reflects the laser light on the light receiving wall surface.

  A tenth aspect of the present invention is the laser measurement apparatus according to the eighth or ninth aspect, wherein the reference position detection means is configured such that the state of the received light amount detected by the received light amount detection means is from the light receiving wall. The rotation position of the deflecting means when the predetermined light reception amount state based on light and the predetermined low light reception amount state when the laser light is guided by the light guide member is detected as the reference position. ing.

  The invention of claim 11 is the laser measuring device according to any one of claims 8 to 10, wherein an attenuation member for attenuating the laser beam is provided outside the scanning path of the laser beam. The light guide member guides the laser light toward the attenuation member.

  The invention of claim 12 is the laser measurement device according to any one of claims 8 to 10, wherein the attenuation member is arranged to attenuate light incident outside the scanning path of the laser beam; And a light guiding means for guiding the laser beam guided by the light guide member to the attenuation member when the deflection position of the deflecting means is in the predetermined rotation range.

  According to a thirteenth aspect of the present invention, in the laser measurement device according to the eleventh or twelfth aspect, the attenuation member is formed of an optical fiber cable, and the laser light is incident from one end side of the optical fiber cable, and The light incident from one end side is configured to be guided to the other end side of the optical fiber cable, and the laser light is configured to attenuate within the optical fiber cable.

  A fourteenth aspect of the present invention is the laser measurement apparatus according to any one of the eighth to tenth aspects, wherein the laser measurement apparatus is configured to accommodate at least the rotation deflection unit and the light guide member, and A case in which a through hole is formed at a position off the scanning path is provided, and the light guide member guides the laser light to the outside of the case through the through hole.

  A fifteenth aspect of the present invention is the laser measurement apparatus according to any one of the eighth to tenth aspects, wherein the laser measurement apparatus is configured to accommodate at least the rotation deflection unit and the light guide member, and A case in which a through-hole is formed at a position deviating from the scanning path, and the guide guided by the light guide member when housed in the case and the turning position of the deflecting means is within the predetermined turning range. Light guiding means for guiding laser light to the outside of the case through the through hole.

  A sixteenth aspect of the present invention is the laser measurement apparatus according to any one of the eighth to fifteenth aspects, wherein the light guide member is constituted by a mirror, and the laser light is transmitted from the deflecting unit and the light receiving unit. Mirror reflection is made at the position where it is off.

  According to a seventeenth aspect of the present invention, in the laser measurement device according to any one of the eighth to fifteenth aspects, the light guide member is constituted by a prism, and the laser beam is transmitted to the deflecting unit and the light receiving unit. The light is refracted away from the means.

  The invention of claim 18 is the laser measurement device according to any one of claims 8 to 17, wherein the light guide member receives the laser light incident on the light guide member from the deflecting unit. It arrange | positions so that it may guide | induced to the direction substantially orthogonal to a direction.

According to a nineteenth aspect of the present invention, there is provided laser light generating means for generating laser light, and when the laser light is generated by the laser light generating means, the reflected light generated by reflection of the laser light from a detection object is received. Light receiving means, and deflecting means configured to be rotatable about a predetermined central axis. The deflecting means deflects the laser light toward a space and directs the reflected light toward the light receiving means. Rotating deflection means for deflecting, a driving means for rotationally driving the deflection means of the turning deflection means, and a reflecting surface arranged in the apparatus and on the scanning path of the laser beam from the deflection means And a reference part for reflecting the laser light from the deflecting means at the reflecting surface and receiving the light by the light receiving means via the deflecting means when the deflecting means is in a predetermined rotation range, Distance value calculating means for calculating a distance value to the arrival position of the laser beam for each rotation position of the deflection means, and received light amount detection means for detecting the amount of light received by the light receiving means for each rotation position of the deflection means And a rotational position where the distance value detected by the distance value calculating means satisfies a predetermined distance condition and the received light amount detected by the received light amount detecting means satisfies a predetermined received light amount condition as a reference position. A reference position detecting means for detecting, a relative position detecting means for detecting a relative rotation position of the deflecting means with reference to the reference position detected by the reference position detecting means, and the reflected light by the light receiving means. Direction detecting means for detecting the direction of the detected object based on the detection result of the relative rotation position by the relative position detecting means.
The reference unit is arranged in a range out of a detectable rotation range in which the laser light is irradiated outside the apparatus, is configured with a predetermined low reflectance, and emits the first reflected light with respect to the laser light. The reference position detecting means includes at least a low reflectance part that reflects and a high reflectance part that is configured to have a higher reflectance than the low reflectance part and reflects the second reflected light with respect to the laser light. In the rotation range of the deflection means, a first rotation range in which the received light amount detected by the received light amount detection means is in a first received light amount state corresponding to the low reflectance part, and the received light amount detection means The second rotation range in which the received light amount detected by the second reflection light amount state corresponding to the high reflectance part is specified, and the first rotation range and the second rotation range are aligned. Specify the reference area irradiation range and determine the reference area irradiation range. It is detected as a reference position location.

In the first aspect of the present invention, a reference member having a reflecting surface is disposed on the scanning path of the laser light from the deflecting means, and the laser light from the deflecting means is transmitted when the deflecting means is within a predetermined rotation range. The light is reflected by the reflecting surface of the reference member and received by the light receiving means via the deflecting means. In this way, when the deflecting means is in the predetermined rotation range, a light reception result corresponding to the reference member is obtained. Since this reference member is arranged inside the inner wall of the case, the light reception result (the amount of received light and the distance value) of the laser light reflected from this reference member is within a detectable range (laser light is irradiated outside the apparatus). This is very different from the light reception result of the laser beam in the rotation range of the deflection means at the time, and more likely to be different from the light reception result when the inner wall of the case is irradiated outside the detectable range.
On the premise of such a configuration, the rotational position where the distance value detected by the distance value calculating means satisfies a predetermined distance condition, and the received light amount detected by the received light amount detecting means satisfies the predetermined received light amount condition. Is detected as a reference position. Therefore, the “predetermined distance condition” is set so as to correspond to the distance value assumed when the reference member is irradiated with the laser beam, and corresponds to the light reception amount assumed when the reference member is irradiated with the laser beam. If the “predetermined light reception amount condition” is defined as described above, the reference position can be accurately detected based on the light reception result of the laser light actually irradiated. Further, since the reference member is arranged in the case, it is not easily affected by ambient light, and the obtained distance value and the amount of received light are easily stabilized in the rotation range in which the laser light is irradiated onto the reference member. Therefore, if the reference position is detected based on the amount of light received from such a reference member, the reference position can be detected more accurately. Further, since the reference position is accurately determined in this way, the relative rotation position of the deflecting means with reference to the reference position is detected, and the direction of the detected object is detected. Can be made smaller.

In the invention of claim 2, a predetermined rotation range detecting means for detecting a predetermined rotation range in which the distance value satisfies a specified condition corresponding to the position or shape of the reference member based on the calculation result by the distance value calculating means is provided. Yes. Then, based on the detection result of the received light amount by the received light amount detection means, the rotation position where the received light amount is in the prescribed state within the predetermined rotation range detected by the predetermined rotation range detection means is detected as the reference position. In this case, the range in which the reference member is irradiated with the laser light can be accurately detected without using a complicated configuration, and the specific rotation position in the range (predetermined rotation range) is stably determined as the reference position. be able to.
For example, when the reference position is detected using only the distance value without using the received light amount as a condition, it depends greatly on the accuracy of the distance detection, and it is difficult to ensure the stability of the distance value detection accuracy. When the accuracy is limited (for example, when the distance detection resolution of the distance detection circuit is not so high), a certain range (predetermined rotation range) corresponding to the reference position can be reduced, but a specific rotation position (reference position) It is difficult to distinguish the position to be) from other rotational positions by distance, and there is a concern that the reference position cannot be detected stably.
On the other hand, as in claim 2, after narrowing a range (predetermined rotation range) corresponding to the reference member based on the distance value, a position where the received light amount indicates a prescribed state from the predetermined rotation range If the “reference position” is detected, it becomes easy to accurately detect the specific rotation position as the “reference position” by using the characteristics of the change in the amount of received light without greatly depending only on the distance value. In particular, the amount of received light detected by the light receiving means varies greatly depending on the incident angle to the object to be irradiated with the laser light and the surface state of the object, so the incident state and surface at the reference position and other positions. If there is a difference in state, it becomes easy to detect the reference position accurately and stably.
On the other hand, if an attempt is made to detect the reference position based only on the change in the amount of received light, the amount of received light when the reference member is irradiated with laser light, and the amount of received light when the laser light is irradiated on a position other than the reference member, (For example, when the reflection state at the reference member is close to the reflection state at other parts, or when the laser beam is irradiated to a position other than the reference member, noise light close to the reflection light at the reference member In some cases, false detection may occur. With respect to such a problem, in the invention of claim 2, after specifying the rotation range (predetermined rotation range) corresponding to the position of the reference member, the amount of light received within this rotation range (predetermined rotation range). Since the rotation position where the is in the specified state is detected as the reference position, noise elements (occurrence of a light reception state close to the amount of light received at the reference position) when a laser beam is irradiated to a position other than the reference member are eliminated. This makes it easier to determine the reference position more accurately and stably.

  According to a third aspect of the present invention, the reference member is configured such that the distance from the laser beam emission position on the deflecting means to the laser beam irradiation path on the reflecting surface is within a predetermined distance range, and the predetermined rotation range detection is performed. The means detects, as the predetermined rotation range, a rotation range in which the variation of the distance value falls within a predetermined threshold based on the calculation result by the distance value calculation means. In this configuration, since the distance from the laser beam emission position on the deflecting means to the laser beam irradiation path on the reflecting surface is within the predetermined distance range, the period during which the reference member is irradiated with the laser beam is detected. The distance value is expected to be stable within a certain range. Therefore, if a threshold value is set so as to include a distance value that is assumed to be detected during the period in which the reference member is irradiated with laser light, and a rotation range that falls within this threshold value is detected, the rotation corresponding to the reference member is performed. The range can be detected more accurately.

In the invention of claim 4, based on the data for a plurality of circumferences of the distance value obtained for each rotation position by the distance value calculating means, the distance value obtained for the plurality of circumferences corresponds to the position or shape of the reference member. Predetermined rotation range detecting means for detecting a predetermined rotation range that satisfies a predetermined statistical condition is provided. Then, based on the detection result of the received light amount by the received light amount detection means, the rotation position where the received light amount is in the prescribed state within the predetermined rotation range detected by the predetermined rotation range detection means is detected as the reference position.
According to this configuration, the rotation range (predetermined rotation range) corresponding to the position of the reference member can be specified based on data for a plurality of rounds at each rotation position. Therefore, it is possible to suppress a decrease in detection accuracy due to sudden noise as much as possible, and to accurately detect the rotation range (predetermined rotation range) corresponding to the position of the reference member, and thus to accurately detect the reference position. It becomes possible. In particular, since the reference member is arranged in the case, even if noise occurs, it is highly likely that it is sudden noise (shot noise due to disturbance light, electricity, circuit noise due to magnetic disturbance, etc.) In such a configuration, the influence of noise can be greatly suppressed by calculating with a statistical method based on the distance values obtained in a plurality of rounds, and the reference position obtained by the calculation easily converges to an accurate position. . In addition, since the reference member has a predetermined shape and is stably disposed in the case (that is, the position near the deflecting means), the amount of received light is constant in the rotation range where the reference member is irradiated. It becomes easier to stabilize. Accordingly, by detecting the rotation range in which the change degree of the reference member falls within the predetermined stable range, the rotation range (predetermined rotation range) corresponding to the reference member can be detected more accurately.

  According to the fifth aspect of the present invention, the distance from the laser light emission position in the deflecting means to the laser light irradiation path on the reflecting surface of the reference member is set within a predetermined distance range. That is, no matter where the laser beam is irradiated on the reference member, the distance from the laser beam irradiation position to the laser beam emission position of the deflecting means is an approximate distance within a predetermined distance range. On the premise of such a configuration, the predetermined rotation range detection means detects that the fluctuation of the distance value is within a predetermined threshold based on the data for a plurality of rounds of the distance value obtained for each rotation position by the distance value calculation means. Is detected as a predetermined rotation range. According to this configuration, based on the characteristic that the distance value falls within the approximate range when the reference member is irradiated with the laser beam, the reference member is lasered using the amount of change in the distance value at each rotation position in a plurality of turns. The rotation range (predetermined rotation range) irradiated with light can be specified more accurately.

  In the invention of claim 6, the reflecting surface of the reference member is configured as a plane on which the laser beam from the deflecting means is incident substantially perpendicularly when the deflecting means is at the reference position. The rotation position where the amount of received light reaches the maximum value in the predetermined rotation range detected by the rotation range detection means is detected as the reference position. In this way, the “predetermined rotation range” (that is, the rotation range in which the laser beam is incident on the reference member) can be accurately detected by making use of the characteristics of the reflecting surface of the reference member, and the “predetermined rotation range”. The specific rotation position can be stably detected with a simple configuration, and the specific rotation position that is stably determined in this way can be used as the “reference position”.

According to a seventh aspect of the present invention, when the reference member has the width direction as the moving direction of the laser light incident on the reflecting surface, the laser light from the deflecting means positioned at the reference position enters the predetermined position in the width direction of the reflecting surface. It has a configuration. The reference position detection means detects the maximum received light amount rotation position at which the received light amount reaches the maximum value within the predetermined rotation range detected by the predetermined rotation range detection means, and the detected maximum received light amount rotation. Judgment means for judging whether or not the position is a corresponding rotation position corresponding to a predetermined position in the width direction is provided. When the determination unit determines that the maximum received light amount rotation position corresponds to the corresponding rotation position, the maximum received light amount rotation position is detected as the reference position. In this configuration, the rotation position of the deflecting means when entering the predetermined position in the width direction of the reference member is set as the “reference position”, and at this “reference position”, the laser light is incident on the reflecting surface substantially perpendicularly. It has become. Therefore, the rotation position (the maximum received light amount rotation position) when the received light amount reaches the maximum value is estimated as the “reference position”. However, in the invention of claim 5, the received light amount maximum rotation position is used as it is. Instead of setting it as a “reference position”, it is once confirmed whether or not it is a rotation position (corresponding rotation position) corresponding to a predetermined position in the width direction, and if it corresponds to the corresponding rotation position, it is set as the “reference position” . In this way, it is possible to effectively prevent an erroneous reference position from being set due to the influence of noise or the like, and the “reference position” can be set more accurately.
When it is determined that the maximum received light amount rotation position does not correspond to the corresponding rotation position, the predetermined rotation range detection unit performs the detection process of the predetermined rotation range again and is detected again. The light reception amount maximum rotation position in the predetermined rotation range is detected again, and it is determined whether or not the detected light reception amount maximum rotation position corresponds to the corresponding rotation position. In this case, even if the maximum received light amount rotation position does not correspond to the corresponding rotation position, the detection of the maximum received light amount maximum rotation position is performed again to check whether the corresponding rotation position is satisfied. This can increase the possibility of successful detection of the “reference position”.

In the invention of claim 8, the light guide member is arranged on the scanning path of the laser beam from the deflecting means, and the light guide member has a predetermined rotational range where the rotational position of the deflecting means is outside the detectable range. In some cases, the laser beam from the deflecting unit is guided to a position away from the deflecting unit and the light receiving unit. Further, a light receiving wall is provided having a light receiving wall for receiving laser light from the deflecting means when the turning position of the deflecting means is outside the detectable range and outside the predetermined turning range. The light receiving wall is arranged so that the light receiving means receives at least part of the light reflected by the laser light on the light receiving wall via the deflecting means. As a result, “the amount of light received by the light receiving means when the turning position of the deflecting means is within the predetermined turning range outside the detectable range” is “the amount of light received by the light receiving means is outside the detectable range. Therefore, the amount of light received by the light receiving means when it is outside the predetermined rotation range is relatively small. That is, the received light amount detected by the received light amount detecting means when the deflecting means is outside the detectable range becomes a predetermined low received light amount state when the deflecting means is within the predetermined rotation range, and is outside the predetermined rotation range. At this time, a predetermined high light reception amount state is set, and therefore a difference occurs in the light reception amount inside and outside the predetermined rotation range.
Further, on the premise of such a configuration, the reference position detecting means for detecting the rotation position where the received light amount detected by the received light amount detecting means satisfies the predetermined low received light amount condition as the reference position, and the reference position detecting means Relative position detecting means for detecting the relative rotation position of the deflecting means with reference to the reference position detected by, and reflection from the detection object by the light receiving means when the rotating position of the deflecting means is within the detectable range. Direction detection means for detecting the direction of the detected object based on the detection result of the relative rotation position by the relative position detection means when light is received is provided.
According to this configuration, the reference position can be determined more accurately based on the light reception result of the actually irradiated laser beam. In addition, since the relative rotation position of the deflecting means based on the reference position can be detected and the direction of the detected object can be detected after accurately determining the reference position in this way, the position of the detected object The error can be further reduced.

  In the invention of claim 9, the light receiving wall is configured to diffusely reflect the laser beam on the light receiving wall surface. Therefore, when the turning position of the deflecting means is outside the detectable range and outside the predetermined turning range, the amount of received light detected by the light receiving means does not easily reach the saturation light receiving amount (the maximum amount of light received that can be detected by the light receiving means). When the deflecting unit is within the predetermined rotation range, it becomes easier to detect the change in the amount of received light more accurately in the light receiving unit.

  In the tenth aspect of the invention, the reference position detecting means is configured such that the received light amount detected by the received light amount detecting means is a predetermined high received light amount state based on light from the light receiving wall, and the laser light is guided by the light guide member. The rotation position of the deflecting means when switching between the predetermined low light-receiving amount state when detected is detected as the reference position. In this way, a specific rotation position can be easily and accurately detected within the rotation range (predetermined rotation range) in which the amount of received light is reduced by irradiating the light guide member with the laser beam, and the “reference position” is detected. Can be determined as

  In the invention of claim 11, an attenuation member for attenuating the laser beam is provided outside the laser beam scanning path, and the light guide member is configured to guide the laser beam toward the attenuation member. In this case, the laser light from the deflecting means guided to a position deviated from the deflecting means and the light receiving means by the light guide member can be further attenuated, so that the laser light guided by the light guide member is another member. It is possible to suppress or prevent the light from being reflected by the light receiving means. Therefore, the difference in the amount of received light tends to occur more clearly within and outside the predetermined rotation range, and as a result, it becomes easier to set the reference position more accurately and stably.

According to the twelfth aspect of the present invention, the light guide member guides the attenuation member disposed so as to attenuate the light incident outside the scanning path of the laser light and the rotation position of the deflection unit within a predetermined rotation range. There is provided light guiding means for guiding the laser beam to the attenuation member.
In this case, the laser light from the deflecting means guided to the position deviated from the deflecting means and the light receiving means by the light guiding member can be further guided by the light guiding member and attenuated by the attenuation member. It is possible to suppress or prevent the laser light guided by the member from being reflected by another member and received by the light receiving means. Therefore, the difference in the amount of received light tends to occur more clearly within and outside the predetermined rotation range, and as a result, it becomes easier to set the reference position more accurately and stably. In addition, since the laser light guided by the light guide member is further guided by the light guiding member, the design for guiding the light to a more appropriate position compared to a configuration in which the laser light is guided by a single light guide member. The degree of freedom increases.

  In the invention of claim 13, the attenuating member is made of an optical fiber cable, the laser light is incident from one end side of the optical fiber cable, and the light incident from the one end side is guided to the other end side of the optical fiber cable. In the optical fiber cable, the laser beam is attenuated. With this configuration, the laser light from the light guide member can be effectively attenuated while suppressing leakage to other portions in the optical fiber cable.

  According to the fourteenth aspect of the present invention, there is provided a case in which a through hole is formed at a position deviated from the scanning path of the laser beam, and this case is configured to accommodate at least the rotation deflection means and the light guide member. The light guide member guides the laser beam to the outside of the case through the through hole. According to this configuration, since the laser light guided by the light guide member is emitted out of the case, a part of the laser light is deflected or received by the rotation range in which the light guide member is irradiated with the laser light. It is possible to more reliably suppress the incident light.

The invention of claim 15 is provided with a case in which a through-hole is formed at a position deviated from the scanning path of the laser beam, and this case is configured to accommodate at least the rotation deflection means and the light guide member. Further, a light guide member is accommodated in the case, and this light guide member allows the laser light guided by the light guide member to pass through the through-hole when the turning position of the deflecting means is within a predetermined turning range. Leading outside.
According to this configuration, since the laser light guided by the light guide member is further guided by the light guide member and emitted outside the case, the laser light is rotated in the rotation range in which the laser light is irradiated to the light guide member. It is possible to more reliably suppress a part of the light from entering the deflecting means and the light receiving means. Further, the laser light guided by the light guide member is further guided to the through hole by the light guiding member, and compared with the configuration in which the laser light is guided to the through hole by the single light guide member, the through hole and the light guiding path The degree of freedom in design increases.

  In the invention of claim 16, the light guide member is constituted by a mirror, and the laser beam is specularly reflected at a position deviated from the deflecting means and the light receiving means. In this way, the laser light from the deflecting means can be guided by specular reflection, and diffused reflection can be suppressed and reliably guided by the position away from the deflecting means and the light receiving means. Therefore, a part of the laser beam reflected by the light guide member can be further suppressed from being directly received by the light receiving means, and the difference in the amount of received light is more clearly generated inside and outside the predetermined rotation range. Can be made.

  In the invention of claim 17, the light guide member is constituted by a prism and refracts the laser light to a position deviated from the deflecting means and the light receiving means. In this way, even if the light guide member is constituted by a prism, the laser beam from the deflecting unit can be refracted and guided to a position away from the deflecting unit and the light receiving unit, so that the rotational position of the deflecting unit is detected. When it is within a predetermined rotation range outside the possible range, the light receiving amount received by the light receiving means can be made smaller, and the rotation position where the light receiving amount satisfies the predetermined low light receiving amount condition more accurately by the reference position detecting means. It can be detected as a “reference position”.

  In the invention of claim 18, the light guide member is arranged so as to guide the laser light incident on the light guide member from the deflecting means in a direction substantially orthogonal to the incident direction. In this way, the laser light incident on the light guide member is easily guided in a direction further away from the deflecting unit, and a situation in which a part of the laser light reflected by the light guide member returns to the deflecting unit side is more sure. It can be avoided.

In a nineteenth aspect of the present invention, a reference portion having a reflecting surface is disposed on the scanning path of the laser light from the deflecting means, and the reference portion is configured with a predetermined low reflectance and with respect to the laser light. The apparatus includes at least a low reflectance part that reflects the first reflected light and a high reflectance part that has a higher reflectance than the low reflectance part and reflects the second reflected light with respect to the laser light. Then, the reference position detecting means has a rotation position where the received light quantity detected by the received light quantity detecting means satisfies the first received light quantity condition corresponding to the low reflectance part, and the received light quantity detected by the received light quantity detecting means is high. A reference portion irradiation range including a rotation position that satisfies the second light reception amount condition corresponding to the reflectance portion is specified, and a predetermined position of the reference portion irradiation range is detected as a reference position.
According to this configuration, it becomes easy to accurately specify the rotation range when the reference portion is irradiated with the laser beam based on the light reception result of the actually irradiated laser beam. In particular, a low reflectance portion and a high reflectance portion are present at a position close to the deflecting means, and the combination of the first reflected light and the second reflected light caused by them is a rotation in which the reference portion is not irradiated with laser light. Since it is difficult to occur in the range, the rotation range corresponding to the reference portion (the rotation range when the reference portion is irradiated with laser light) is specified based on the first reflected light and the second reflected light. By doing so, it is possible to specify the rotation range more accurately, and thus to determine the reference position more accurately.
In addition, since the reference position is accurately determined in this way, the relative rotation position of the deflecting means with reference to the reference position is detected, and the direction of the detected object is detected. Can be made smaller.

FIG. 1 is a cross-sectional view schematically illustrating a laser measurement apparatus according to the first embodiment of the present invention. FIG. 2A is an explanatory diagram schematically illustrating a state in which the rotation deflection mechanism, the motor, and the reference member of the laser measurement apparatus of FIG. 1 are viewed from above, and FIG. It is explanatory drawing demonstrated. FIG. 3 is an explanatory diagram conceptually illustrating the state of laser light irradiation when the deflection unit is within a predetermined rotation range. FIG. 4 is a flowchart illustrating the flow of the reference position detection process performed by the laser measurement apparatus of FIG. FIG. 5 is a graph for explaining the relationship between the angle of the deflection unit and the detected distance value. FIG. 6A is a graph for explaining the relationship between the angle of the deflection unit in the predetermined rotation range and the detected distance value, and FIG. 6B shows the angle and detection of the deflection unit in the predetermined rotation range. It is a graph explaining the relationship with the received light amount. FIG. 7A is an explanatory view for explaining a first modification of the reference member, and FIG. 7B is an explanatory view for explaining a second modification of the reference member. FIG. 8 is an explanatory diagram for explaining a third modification of the reference member. FIG. 9A is a cross-sectional view schematically illustrating a laser measuring apparatus according to the second embodiment of the present invention, and FIG. 9B is an angle at which the concave mirror is different from FIG. 9A. FIG. FIG. 10 is a cross-sectional view schematically showing a cross section of the laser measuring apparatus of FIG. 9 cut in the horizontal direction. FIG. 11 is a graph illustrating the relationship between the angle of the deflection unit and the amount of received light detected. FIG. 12 is a flowchart illustrating the flow of the reference position detection process performed by the laser measurement apparatus of FIG. FIG. 13A is an explanatory diagram schematically illustrating a state in which the rotation deflection mechanism, the motor, and the light guide mirror of the laser measurement device of FIG. 9 are viewed from above, and FIG. It is explanatory drawing explaining a mirror. FIG. 14 is an explanatory diagram for explaining how the reference position is detected from the relationship between the angle of the deflection unit and the amount of received light detected. FIG. 15 is an explanatory diagram schematically illustrating a configuration in which a prism is employed as a light guide member, and FIG. 15A schematically illustrates a laser measurement apparatus according to a first modification of the second embodiment of the present invention. FIG. 15B is a cross-sectional view schematically showing a state in which the concave mirror is at an angle different from that in FIG. 15A. FIG. 16 is an explanatory diagram schematically illustrating a configuration in which an attenuation member is provided on the lower side of the light guide member, and FIG. 16A is a laser according to a second modification of the second embodiment of the present invention. FIG. 16B is a cross-sectional view schematically illustrating a state in which the concave mirror is at an angle different from that in FIG. 16A. FIG. 17 is an explanatory diagram schematically illustrating a configuration in which an opening is provided on the lower side of the case. FIG. 17A illustrates a laser measurement apparatus according to the second embodiment of the present invention and its modification. FIG. 17B is a cross-sectional view schematically illustrating a state in which the concave mirror is at an angle different from that in FIG. 17A. FIG. 18 is an explanatory diagram schematically illustrating a configuration in which a prism mirror is employed as a light guide member, FIG. 18 (a) is a perspective view of the prism mirror, and FIG. 18 (b) is a diagram of the present invention. It is sectional drawing which illustrates schematically the laser measuring apparatus which concerns on 2nd Embodiment and its modification. FIG. 19 is an explanatory diagram schematically illustrating an example of acquiring distance value data for a plurality of rounds in the reference position detection process in the laser measurement device according to the third embodiment. FIG. 20 is an explanatory diagram conceptually illustrating distance value data and statistical data for a plurality of rounds acquired in the reference position detection process performed by the laser measurement apparatus according to the third embodiment. FIG. 21 is an explanatory diagram for conceptually explaining statistical data obtained from the distance value data of FIG. FIG. 22 is a flowchart illustrating the flow of the reference position detection process performed in the first modification of the third embodiment. FIG. 23 is an explanatory diagram conceptually illustrating distance value data and statistical data for a plurality of rounds acquired in the reference position detection process performed in Modification 1 of the third embodiment. FIG. 24 is an explanatory diagram illustrating the reference position detection process performed in the second modification of the third embodiment. FIG. 25 is a cross-sectional view schematically illustrating a laser measurement apparatus according to the fourth embodiment of the invention. FIG. 26 is a cross-sectional view schematically illustrating a laser measurement device according to Modification 1 of the fourth embodiment. FIG. 27 is a cross-sectional view schematically illustrating a laser measurement device according to Modification 2 of the fourth embodiment. FIG. 28 is a cross-sectional view schematically illustrating a laser measurement device according to Modification 3 of the fourth embodiment. FIG. 29 is a cross-sectional view schematically illustrating a laser measurement apparatus according to the fifth embodiment of the invention. FIG. 30 is a cross-sectional view schematically illustrating a laser measurement device according to Modification 1 of the fifth embodiment. FIG. 31 is a cross-sectional view schematically illustrating a laser measurement apparatus according to the sixth embodiment of the present invention. FIG. 32A is an explanatory diagram for explaining a reference part of the laser measurement device of FIG. 31, and FIG. 32B is an explanatory diagram for explaining a modification of the reference part. FIG. 33 is a cross-sectional view schematically illustrating a laser measurement apparatus according to Modification 1 of the sixth embodiment. FIG. 34A is an explanatory diagram for explaining a reference portion of the laser measurement apparatus of FIG. 33, and FIG. 34B is an explanatory diagram for explaining a modification of the reference portion. FIG. 35 is a cross-sectional view schematically illustrating a laser measurement device according to another embodiment.

[First embodiment]
Hereinafter, a first embodiment of a laser measuring device according to the present invention will be described with reference to the drawings.
(overall structure)
First, the overall configuration of the laser measurement device 1 according to the first embodiment will be described with reference to FIG. FIG. 1 is a cross-sectional view schematically illustrating the overall configuration of the laser measurement device 1 according to the first embodiment.
As shown in FIG. 1, the laser measurement device 1 includes a laser diode 10 and a photodiode 20 that receives reflected light L2 from a detection object, and is configured as a device that detects the distance and direction to the detection object. Yes.

  The laser diode 10 corresponds to an example of “laser light generation means”, receives a pulse current from a drive circuit (not shown) under the control of the control circuit 70, and receives a pulse laser light (laser light L1) corresponding to the pulse current. ) Is emitted intermittently. In the present embodiment, laser light from the laser diode 10 to the detection object is conceptually indicated by symbol L1, and reflected light from the detection object to the photodiode is conceptually indicated by symbol L2. Yes.

  The photodiode 20 corresponds to an example of “light receiving means”. When the laser light L1 is generated from the laser diode 10 and the laser light L1 is reflected by the detection object, the reflected light L2 is received. It is converted into an electrical signal. In addition, about the reflected light from a detection object, the thing of a predetermined area | region is taken in into the deflection | deviation part 41, and FIG. 1 shows the example in which the reflected light of the area | region between two lines shown by the code | symbol L2 is taken in. ing.

  A lens 60 is provided on the optical axis of the laser light L1 emitted from the laser diode 10. The lens 60 is configured as a collimating lens, and converts the laser light L1 from the laser diode 10 into parallel light.

  A mirror 30 is provided on the optical path of the laser light L1 that has passed through the lens 60. The mirror 30 includes a reflecting surface 30 a that is inclined with respect to the optical axis of the laser beam L 1 that has passed through the lens 60, and reflects the laser beam L 1 that has passed through the lens 60 toward the rotating deflection mechanism 40. In the present embodiment, the horizontal laser beam L1 that has passed through the lens 60 is reflected by the mirror 30 in the vertical direction (a direction parallel to a central axis 42a described later), and the reflected vertical laser beam L1 is rotated. The light is incident on the deflection unit 41 of the dynamic deflection mechanism 40.

  The rotation deflection mechanism 40 corresponds to an example of a “rotation deflection unit”, and includes a deflection unit 41 formed of a mirror having a flat reflection surface 41a, a support base 43 that supports the deflection unit 41, and A shaft portion 42 connected to the support base 43 and a bearing (not shown) that rotatably supports the shaft portion 42 are provided.

  The deflecting unit 41 corresponds to an example of a “deflecting unit”, is disposed on the optical axis of the laser light L1 reflected by the mirror 30, and rotates around the central axis 42a (predetermined central axis). It is possible to move. The deflecting unit 41 is configured to deflect (reflect) the laser light L1 from the laser diode 10 toward the space and deflect (reflect) reflected light L2 from the detection object toward the photodiode 20. .

  Further, the direction of the central axis 42a serving as the rotation center of the deflection unit 41 coincides with the direction of the laser beam L1 incident on the deflection unit 41 from the mirror 30, and the incident position where the laser beam L1 enters the deflection unit 41. P1 is a position on the central axis 42a.

  In the present embodiment, the direction of the central axis 42a is the vertical direction (Y-axis direction), and the plane direction orthogonal to the central axis 42a is the horizontal direction. Further, a predetermined direction in the horizontal direction is shown as the X-axis direction.

  As shown in FIG. 1, the reflection surface 41a of the deflection unit 41 is inclined at an angle of 45 ° with respect to the vertical direction (the direction of the laser light L1 incident on the reflection surface 41a), and is incident from the mirror 30 side. The laser beam L1 is reflected in the horizontal direction. In addition, since the deflection unit 41 rotates around the central axis 42a in the direction that coincides with the direction of the incident laser beam L1, the incident angle of the laser beam L1 is always maintained at 45 ° regardless of the rotation position of the deflection unit 41. The direction of the laser beam L1 from the position P1 is configured to be constantly in the horizontal direction (the direction orthogonal to the central axis 42a).

  Further, in the laser measurement device 1 according to the present embodiment, the deflection region for deflecting the reflected light in the deflection unit 41 (the region of the reflection surface 41a in the deflection unit 41) reflects the laser beam in the mirror 30 (mirror 30). The area of the reflecting surface 30a in FIG.

  Furthermore, a motor 50 for driving the rotation deflection mechanism 40 is provided. The motor 50 corresponds to an example of “driving means”, and rotates the shaft portion 42 to rotationally drive the deflection portion 41 connected to the shaft portion 42. As a specific configuration of the motor 50, for example, a servo motor or the like may be used, or a motor that rotates regularly is used, and the pulse laser beam is output in synchronization with the timing at which the deflection unit 41 faces the direction in which the distance measurement is desired. Thus, detection of a desired direction may be possible. In the present embodiment, as shown in FIG. 1, a rotation angle position sensor 52 that detects the rotation angle position of the shaft portion 42 of the motor 50 (that is, the rotation angle position of the deflection unit 41) is provided. As the rotation angle position sensor 52, various types of sensors can be used as long as they can detect the rotation angle position of the shaft portion 42, such as a rotary encoder.

  A condensing lens 62 that condenses the reflected light toward the photodiode 20 is provided on the optical path of the reflected light L <b> 2 from the rotation deflection mechanism 40 to the photodiode 20, and the condensing lens 62 and the photodiode are provided. 20 is provided with a filter 64. The condensing lens 62 condenses the reflected light L2 from the deflecting unit 41 and guides it to the photodiode 20, and functions as a condensing unit.

  The filter 64 functions to transmit the reflected light L2 and remove light other than the reflected light L2 on the optical path of the reflected light L2 from the rotation deflection mechanism 40 to the photodiode 20. The filter 64 is constituted by a wavelength selection filter that transmits only light having a specific wavelength corresponding to the reflected light L2 (for example, light having a wavelength in a certain region) and blocks other light.

  In the present embodiment, the laser diode 10, the photodiode 20, the mirror 30, the lens 60, the rotation deflection mechanism 40, the motor 50, and the like are accommodated in the case 3, and dust protection and impact protection are achieved. A window-shaped light guide 4 that allows the laser light L1 and the reflected light L2 to pass therethrough is formed around the deflection unit 41 in the case 3 so as to surround the deflection unit 41. The light guide 4 is formed in an annular shape centering on the optical axis of the laser beam L1 incident on the deflecting unit 41 and is substantially 360 °, and the glass plate is closed in the form of closing the light guide 4. A laser light transmission plate 5 made of a material such as the like is arranged to prevent dust.

(Reference material)
Next, the reference member 80 which is one of the features of this embodiment will be described.
FIG. 2A is an explanatory diagram schematically illustrating a state in which the rotation deflection mechanism, the motor, and the reference member of the laser measurement apparatus of FIG. 1 are viewed from above, and FIG. It is explanatory drawing demonstrated. FIG. 3 is an explanatory diagram conceptually illustrating the state of laser light irradiation when the deflection unit is within a predetermined rotation range.

  As shown in FIG. 1 and FIG. 2A, the laser measurement device 1 according to the present embodiment is provided with a reference member 80 at a position where the laser light L <b> 1 from the deflection unit 41 can enter, and the deflection unit 41. Is configured so that the laser beam from the deflecting unit 41 is incident on the reference member 80. The reference member 80 is configured in a plate shape as a whole, and has a reflection surface 81 that faces the deflection unit 41 side and is disposed on the scanning path of the laser light from the deflection unit 41. The deflecting member 80 reflects the laser beam L1 deflected (reflected) by the deflecting unit 41 when the deflecting unit 41 is in a “predetermined rotation range” described later, and reflects the reflected light. At least a part of the reflected light is returned to the deflecting unit 41, and the returned reflected light is received by the photodiode 20 via the deflecting unit 41.

  Further, the reflecting surface 81 of the reference member 80 is configured as a flat surface as a whole, and in the example of this embodiment, the laser beam from the deflecting unit 41 when the deflecting unit 41 is at a predetermined “reference position”. Is configured as a plane on which light enters substantially perpendicularly. Specifically, the reflecting surface 81 is arranged so that the surface direction thereof is substantially parallel to the direction of the central axis 42a. In this configuration, as shown in FIG. 2, the rotation position of the deflecting portion 41 when the laser beam L1 from the position P1 is incident on the reflecting surface 81 of the reference member 80 substantially perpendicularly is the “reference position”. . 1 and 2, the irradiation path of the laser beam from the position P1 when the deflection unit 41 is at the “reference position” is indicated by a two-dot chain line L1 ′.

  Further, the reference member 80 is configured such that the reflectance at the reflecting surface 81 is smaller than the reflectance at the reflecting surface 41 a of the deflecting unit 41. As a configuration for suppressing the reflectance of the reflecting surface 81 to be smaller than the reflectance of the reflecting surface 41a in this way, for example, the reflecting surface 81 is configured as a black surface (for example, a matte black surface), and a deflecting unit configured as a mirror. A configuration in which the reflectance is smaller than that of the reflective surface 41a of 41 is exemplified. Alternatively, fine processing such as embossing is performed on the opposing portion (the portion constituting the plate surface 80b on the deflection portion 41 side of the two plate surfaces 80a and 80b shown in FIG. 2A) facing the deflection portion 41. A configuration in which the textured surface is a reflective surface 81 is exemplified. In this case, although there is a slight unevenness due to the embossing, the reflecting surface 81 is configured as a substantially flat surface as a whole, and the reflecting surface 81 is arranged in a configuration in which the surface direction is substantially parallel to the direction of the central axis 42a. Become. In this way, by suppressing the reflectance at the reflecting surface 81 to be low, when the reflected light reflected by the reflecting surface 81 is received by the photodiode 20 via the deflecting unit 41, the saturated received light amount (that is, the photodiode). 20, it is difficult to reach the maximum received light amount that can be detected, and the received light amount at each rotational position can be detected with higher accuracy.

(Reference position detection processing)
Next, the reference position detection process performed by the laser measurement apparatus 1 will be described. FIG. 4 is a flowchart illustrating the flow of the reference position detection process performed by the laser measurement apparatus of FIG. FIG. 5 is a graph for explaining the relationship between the angle of the deflection unit and the detected distance value. FIG. 6A is a graph for explaining the relationship between the angle of the deflection unit in the predetermined rotation range and the detected distance value, and FIG. 6B shows the angle and detection of the deflection unit in the predetermined rotation range. It is a graph explaining the relationship with received light quantity (light intensity).

  The reference position detection process shown in FIG. 4 is executed by the control circuit 70 (FIG. 1) based on a program stored in a memory (not shown). This reference position detection process is started when a predetermined start condition is satisfied (for example, when a predetermined operation or power is turned on by the user). First, distance value data and light reception for the entire circumference (360 °) are received. A process of acquiring quantity data is performed (S1).

  In this embodiment, when the rotation of the deflecting unit 41 reaches a steady state, the deflecting unit 41 rotates at a constant rotational speed. On the other hand, pulse laser light is emitted from the laser diode 10 at regular time intervals. It is like that. Accordingly, each time the deflection unit 41 rotates by a predetermined angle (for example, 1 °), the pulse laser beam is emitted at each rotation position, and the projection of the pulse laser beam is reflected at each rotation position according to the pulse laser beam. The elapsed time until light reception is calculated. A distance value to the arrival position of the laser beam (a position where reflected light is generated) is calculated for each rotation position based on each elapsed time calculated for each rotation position. In this embodiment, the distance value from a predetermined distance value calculation reference point (the origin of distance value calculation) is calculated, and for example, the position P1 can be used as the distance value calculation reference point. 5 illustrates the relationship between each rotation position (each rotation angle) of the deflection unit 41 and the detected distance value, and the horizontal axis represents the rotation angle of the deflection unit 41 from a predetermined origin, The distance value detected at each rotation angle is on the vertical axis.

Further, in S1, the amount of light received at each rotational position (that is, the amount of light received by the photodiode 20 that receives the reflected light of the pulse laser beam irradiated at each rotational position) is detected. Quantity data is generated for the entire circumference (360 °). By performing the processing as described above, the distance value to the arrival position of the laser beam (the position where the reflected light is generated) and the received light amount of the reflected light (received by the photodiode 20) for each rotation position of the deflecting unit 41. Received light amount) is detected.
In the present embodiment, the control circuit 70 that executes the process of S1 corresponds to an example of a “distance value calculation unit”, and calculates a distance value to a laser beam arrival position for each rotation position of the deflection unit 41. To function. The control circuit 70 corresponds to an example of a “light reception amount detection unit” and functions to detect the light reception amount at the photodiode 20 for each rotation position of the deflecting unit 41.

  Then, based on the data of the distance value (distance value to the laser beam arrival position) of each rotation position obtained in S1, the “predetermined rotation range” that is the range in which the laser beam L1 is irradiated onto the reference member 80 is obtained. To detect. The “predetermined rotation range” means that the laser beam L1 of the reference member 80 is out of the entire rotation range of the deflection unit 41 that rotates 360 °, as shown in FIGS. This refers to the rotation range from the rotation position when entering the one end portion 82 to the rotation position when entering the other end portion 83, and when the deflection unit 41 is in the “predetermined rotation range”, the laser The light L1 is incident on the reference member 80 without being projected onto the space outside the apparatus, and the reflected light from the reference member 80 is received by the photodiode 20. In FIG. 2A, the direction of the laser beam L1 when the laser beam L1 enters the one end portion 82 is indicated by a straight line A1, and the direction of the laser beam L1 when the laser beam L1 enters the other end portion 83. Is indicated by a straight line A2, and a scanning area that can enter the reference member 80 is indicated by a symbol AR.

  Further, the reference member 80 is an alternate long and short dash line from the emission position P1 of the laser beam L1 in the deflecting unit 41 to the irradiation path of the laser beam L1 on the reflecting surface 81 (that is, from one end 82 to the other end 83 in FIG. 2B). The distance to the route is within a predetermined distance range. Specifically, the reflecting surface 81 of the reference member 80 is configured to be flat, and the direction of the laser beam (reference numeral L1 ′ in FIG. 2) and the reflecting surface when the deflecting unit 41 is at a predetermined position (reference position). 81 is configured to be substantially orthogonal to each other, the distance values calculated at the respective rotation positions when the deflection unit 41 is in the “predetermined rotation range” are substantially the same value. Accordingly, in the process of S2, the “predetermined angle range” can be detected by detecting a rotation range in which the distance value is substantially constant over a predetermined angle range. As shown in FIG. 3, when the deflection unit 41 is in the “predetermined rotation range”, a slight error occurs in the laser beam path due to the difference in the rotation position, but this error is irradiated outside the apparatus. This level is negligible compared to the case. For example, the path length of the laser beam at the broken line 41 ′ in FIG. 3 (see the arrow in the broken line in FIG. 3) and the path length of the laser beam at the deflection unit 41 in the “reference position” (the laser beam L1 in FIG. 3). Compared with the reflected light La), the length is slightly different, but this difference in length is very small compared to the variation of the distance value when scanning the space outside the apparatus, and it can be said that it can be almost ignored. Accordingly, the “predetermined rotation range” can be detected by detecting a portion where the distance value is stably changing within a certain range.

  Specifically, for example, as shown in FIG. 5, the detected distance value is a predetermined first threshold value D1 (a threshold value slightly larger than the actual distance from the distance value calculation reference point (for example, position P1) to the reference member 80). ) And a predetermined rotation angle (rotation position) that is equal to or greater than a predetermined second threshold value D2 (threshold value slightly smaller than the actual distance from the distance value calculation reference point (for example, position P1) to the reference member 80). An angle range C (for example, an angle range from the angle θa to the angle θb: see FIG. 6A)) that is equal to or greater than the threshold angle range (for example, an angle range slightly smaller than the range AR shown in FIG. 2), This angle range C is defined as a “predetermined rotation range”.

  As shown in FIG. 1, when the reference member 80 is present at a position closest to the position P1 in the irradiation path of the laser light L1, an area where the minimum distance value is obtained is detected as a “predetermined rotation range”. Also good. In this case, for example, a rotation angle (rotation position) that does not require the second threshold value D2 or more and is not more than the first threshold value D1 shown in FIG. 5 is a predetermined threshold angle range (for example, shown in FIG. 2). A range slightly smaller than the range AR) is detected, and an angular range C (angle range from the angle θa to the angle θb: see FIG. 6A)) is detected, and this angular range C is defined as a “predetermined rotation range”. can do.

  After the process of S2, it is determined whether or not the reference member 80 has been detected by the process of S2 (that is, whether the “predetermined rotation range” irradiated to the reference member 80 has been detected) (S3). If it is determined that the “predetermined rotation range” has been detected, the process proceeds to Yes in S3, and the processes after S4 are performed. On the other hand, when the “predetermined rotation range” is not detected, the process proceeds to No in S3, and the processes after S1 are performed again.

  In the present embodiment, the control circuit 70 that executes the process of S2 corresponds to an example of the “predetermined rotation range detecting unit”, and the distance value is based on the calculation result by the “distance value calculating unit”. It functions to detect a “predetermined rotation range” that satisfies a specified condition corresponding to the position or shape. In the present embodiment, the irradiation path of the laser beam L1 on the reflecting surface 81 from the emission position P1 of the laser beam L1 in the deflecting unit 41 (that is, the path of the alternate long and short dash line from one end 82 to the other end 83 in FIG. The position and shape of the reference member 80 are set so that the distance to the distance is within the predetermined distance range, and “the variation of the distance value is within the predetermined threshold value (in the above representative example,“ first threshold value ”and“ second threshold value ”). ”Is a rotation range that falls within the range“) ”corresponds to“ a specified condition corresponding to the position or shape of the reference member 80 ”, and such a rotation range is detected as a“ predetermined rotation range ”. .

  When the process proceeds to Yes in S3, a rotation position where the amount of received light is maximized in the “predetermined rotation range” detected in S2 is detected (S4). In the present embodiment, as shown in FIG. 3, when the laser beam L <b> 1 is in a rotational position (that is, a reference position) where the laser beam L <b> 1 is incident substantially perpendicular to the reflecting surface 81, the most reflected light is deflected by the deflection unit 41. As the angle is returned to the side and the angle is further away from the “reference position”, the reflected light returned to the deflecting unit 41 decreases, and the laser light L1 is incident on the end of the reference member 80 as indicated by the broken line in FIG. At the rotation position, the reflected light returned to the deflecting unit 41 is considerably reduced. Therefore, in the “predetermined rotation range”, the received light amount (light intensity) at the photodiode 20 at the rotation position (rotation angle A1) corresponding to the “reference position” as shown in FIG. A detection result is obtained such that the received light amount (light intensity) gradually decreases as the angle is farthest from the “reference position”. In S4, in consideration of such a phenomenon, the rotation position where the amount of received light becomes the maximum in the “predetermined rotation range” detected in S2 is detected as a candidate for “reference position”.

  After the process of S4, a process of calculating the “corresponding rotation position” is performed (S5). The “corresponding rotation position” is a rotation position estimated as a “reference position” based on the shape of the reference member 80, and is calculated as follows.

  In the present embodiment, the irradiation position of the laser beam L1 is moved in accordance with the rotation of the deflection unit 41 in the reference member 80 arranged on the scanning path of the laser beam L1 (FIG. 2B). The moving direction of the irradiation position on the reflecting surface 81 (that is, the laser beam scanning direction indicated by the broken line arrow in FIG. 2B) is the “width direction” of the reference member 80. Yes. In FIG. 2, the width direction is conceptually indicated by an arrow W.

  On the other hand, as described above, the rotation position of the deflecting unit 41 when the laser light L1 is incident on the reflecting surface 81 vertically is set as the “reference position”, and as shown in FIGS. When 41 is located at this “reference position”, the laser beam L 1 from the deflection unit 41 is incident on a predetermined position in the width direction of the reflecting surface 81. Specifically, as indicated by a two-dot chain line L1 ′ in FIG. 2A, the laser light is incident on the center position P2 in the width direction of the reference member 80 when the deflection unit 41 is at the “reference position”. Thus, the laser beam L1 enters the reflecting surface 81 perpendicularly when entering the center position P2 in the width direction of the reference member 80 in this way. Based on such a configuration, in the process of S5, from the “predetermined rotation range” detected in S2, the rotation corresponding to the above-mentioned “predetermined width direction position” (width direction center position P2 in the example of FIG. 2). The movement position (corresponding rotation position) is detected. Specifically, as shown in FIG. 2A, the central rotational position where θ1 = θ2 in the irradiation range AR is estimated as the rotational position (corresponding rotational position) incident on the widthwise central position P2. Therefore, the center rotation position is detected in the “predetermined rotation range” detected in S2. For example, as shown in FIG. 6B, when the angle range C between the initial angle θa and the final angle θb is detected as the “predetermined rotation range”, it is between the initial angle θa and the final angle θb. The center angle θn is detected as the “corresponding rotation position”.

Then, the corresponding rotation position detected in S5 (the rotation position of the rotation angle θn in the example of FIG. 6A) and the maximum received light amount rotation position detected in S4 (in the example of FIG. 6B). It is determined whether or not there is a predetermined coincidence (S6). The “predetermined coincidence relationship” may be a relationship in which the “received light amount maximum rotation position” detected in S4 and the “corresponding rotation position” detected in S5 completely coincide with each other. The relationship may be such that the “maximum amount rotation position” and the “corresponding rotation position” are within a prescribed allowable range.
The control circuit 70 that executes the process of S6 corresponds to an example of a “determination unit”, and the received light amount becomes the maximum value in the “predetermined rotation range” detected by the “predetermined rotation range detection unit”. The “maximum received light amount rotation position” is detected, and it is determined whether or not the detected “maximum received light amount rotation position” is a “corresponding rotation position” corresponding to a predetermined position in the width direction.

  In the determination process of S6, when it is determined that the “maximum received light amount rotation position” detected in S4 and the “corresponding rotation position” detected in S5 do not have a predetermined coincidence, No is determined in S6. It advances and repeats the process after S1. On the other hand, if it is determined that there is a predetermined coincidence relationship, the process proceeds to Yes in S6, and the “light reception amount maximum rotation position” detected in S4 is set to the “reference position” (S7).

  In the present embodiment, the control circuit 70 that executes the processing of FIG. 4 corresponds to an example of the “reference position detection unit”, and the distance value detected by the “distance value calculation unit” satisfies a predetermined distance condition. In addition, the light receiving amount detected by the “light receiving amount detecting means” functions to detect the rotation position satisfying the predetermined light receiving amount condition as the “reference position”. Specifically, in the predetermined rotation range detected by the “predetermined rotation range detection means” (in the above representative example, the rotation range in which the variation of the distance value falls within the predetermined threshold), the amount of light received becomes the specified state. The movement position (the rotation position where the amount of received light is the maximum value in the above representative example) is detected as the “reference position”. Further, when it is determined by the “determination means” that the “maximum received light amount rotation position” corresponds to the “corresponding rotation position” (that is, in the case of Yes in S6 of FIG. 4), When “moving position” is detected as “reference position” and it is determined that “maximum received light amount rotating position” does not correspond to “corresponding rotating position” (that is, No in S6 of FIG. 4), Returning to S1, the "predetermined rotation range" is detected again by the "predetermined rotation range detecting means" (that is, S2 is executed again), and the "light receiving amount" in the "predetermined rotation range" detected again. “Maximum rotation position” is detected again (that is, S4 is executed again), and whether the “maximum received light amount rotation position” detected again by the “determination means” corresponds to the “corresponding rotation position”. It is configured to retry the determination process (ie, execute S6 again). To have.

(Object detection processing)
After the “reference position” is detected by the process of FIG. 4, the actual detection process is performed using the “reference position” as the origin of the rotation angle. Specifically, each rotation position of the deflecting unit 41 at each irradiation of the pulsed laser light irradiated intermittently can be detected as a relative rotation position based on the above-mentioned “reference position”. (That is, it is possible to detect how much each rotation position at the time of each irradiation is a rotation position with respect to the “reference position”), and at any rotation position When the reflected light from the detection object is received by the photodiode 20, it is possible to specify how much the angle of the deflection unit 41 at the time of the light reception is an angle rotated from the “reference position”. . Therefore, the irradiation direction of the laser beam L1 irradiated from the deflection unit 41 at the “reference position” (in the above representative example, the direction of the deflection unit 41 when the laser beam is perpendicularly incident on the reflection surface 81 of the reference member 80) ) As a reference direction, the direction of the detected object can be detected. Further, in the laser measuring apparatus 1 according to the present embodiment, a specified position (for example, the “reference position” in the circumferential direction of the case 3) corresponding to the direction in which the laser beam is irradiated when the “outside surface” is the “reference position”. Sometimes, a reference mark or the like may be added in advance to a position corresponding to a direction in which laser light is irradiated.

  In the present embodiment, the control circuit 70 corresponds to an example of “relative position detection means”, and detects the relative rotational position of the deflecting unit 41 based on the “reference position” detected by the “reference position detection means”. To function. The control circuit 70 corresponds to an example of a “direction detection unit”, and when the reflected light from the detection object is received by the photodiode 20, the relative rotation position is detected by the “relative position detection unit”. It functions to detect the direction of the detected object based on the result.

  In the present embodiment, for example, a drive pulse for driving the laser diode 10 is generated based on a pulse signal (reference pulse) output from a crystal oscillator, CPU, or the like, and a pulse signal output from the crystal oscillator, CPU, or the like. Is counted, so that the relative rotation angle from the “reference position” determined as described above can be detected. For example, in a configuration in which the pulse signal (reference pulse) is output N times from the CPU while the deflection unit 41 rotates once, 360 / N (°) every time a pulse is output (that is, one cycle). Will rotate. In this configuration, after the “reference position” is detected by the above-described reference position detection process, the reference position is set every N pulses, and the number of pulses is counted from the timing of the reference position, so that the relative position from the reference position is obtained. Specific rotation angle can be specified.

  In the present embodiment, for example, every time the reference pulse is output N times from a crystal oscillator, CPU, or the like (that is, every time the deflection unit 41 rotates once), the Z-phase pulse signal (outputs every rotation). A Z-phase signal generator that outputs an A-phase pulse signal each time a reference pulse is output a predetermined number of times (M times) from a crystal oscillator, a CPU, or the like. For example, the time required for the deflection unit 41 to rotate 1 ° corresponds to the reference pulse M period. Accordingly, an A-phase pulse signal is output every time the deflection unit 41 rotates 1 °, and this A-phase pulse signal is used as a drive pulse for driving the laser diode 10. Therefore, laser light is emitted from the laser diode 10 every time the deflection unit 41 rotates 1 °.

  In the above-described reference position detection process, the distance value is determined at each rotation position while the deflection unit 41 makes one round from an arbitrary timing (arbitrary rotation position) after the rotation of the deflection unit 41 reaches a steady state. The detection is performed, and the distance value is calculated every time the drive pulse is output or every time the reference pulse is output. In this case, even if the reference position has not yet been set, it is possible to specify that the deflection unit 41 has made one rotation by counting the reference pulse N times from the above arbitrary timing, and this was obtained during this one rotation period. As described above, the “predetermined rotation range” and the “reference position” may be specified based on the distance value for each rotation position.

(Main effects of this embodiment)
In the laser measurement apparatus according to the present embodiment, when the reference member 80 including the reflection surface 81 is disposed on the scanning path of the laser beam from the deflection unit 41 and the deflection unit 41 is in the “predetermined rotation range”. In addition, the laser beam from the deflection unit 41 is reflected by the reflection surface 81 of the reference member 80 and is received by the photodiode 20 (light receiving means) via the deflection unit 41.
In this way, when the deflection unit 41 is in the “predetermined rotation range”, a light reception result corresponding to the reference member 80 is obtained. On the premise of such a configuration, the distance value detected by the “distance value calculating means” satisfies a predetermined distance condition, and the received light amount detected by the received light amount detecting means satisfies the predetermined received light amount condition. The moving position is detected as the “reference position”. Accordingly, since the “reference position” can be determined based on the result of receiving the laser light that is actually irradiated, it is possible to set the correct reference position while suppressing the influence of assembly.
Since the “reference position” is accurately determined in this way, the relative rotation position of the deflecting unit 41 based on the “reference position” is detected, and the direction of the detected object is detected. The position error of the detected object can be further reduced.

In the present embodiment, the “predetermined rotation range” for detecting the “predetermined rotation range” in which the distance value satisfies the specified condition corresponding to the position or shape of the reference member 80 based on the calculation result by the “distance value calculation means”. Detection means "is provided. Then, based on the detection result of the received light amount by the “received light amount detection means”, the rotation position where the received light amount is in the specified state in the “predetermined rotation range” detected by the “predetermined rotation range detection means” ”.
In this way, the range in which the reference member 80 is irradiated with the laser light can be accurately detected without using a complicated configuration, and the specific rotation position in the range (predetermined rotation range) is stable as the “reference position”. Can be determined.

Further, in the present embodiment, the reflecting surface 81 of the reference member 80 is configured as a flat surface, and the “predetermined rotation range detecting means” is based on the calculation result by the “distance value calculating means” and the variation of the distance value is predetermined. A rotation range that falls within the threshold is detected as a “predetermined rotation range”.
In this way, the reflecting surface of the reference member 80 can be formed in a simple shape, and the “predetermined rotation range” (that is, the laser beam is emitted from the reference member 80 by utilizing the characteristics of the reflecting surface of the reference member 80). The rotation range incident on the lens can be accurately detected.

  In the reference member 80, the distance from the emission position P1 of the laser beam L1 in the deflecting unit 41 to the irradiation path of the laser beam L1 on the reflecting surface 81 (position where the laser beam L1 is irradiated on the reflecting surface 81) is within a predetermined distance range. The “predetermined rotation range detecting means” is configured to set the rotation range within which the fluctuation of the distance value falls within the predetermined threshold values D1 and D2 “predetermined times” based on the calculation result by the “distance value calculating means”. It is detected as “moving range”. According to this configuration, the rotation range (predetermined rotation range) in which the reference member 80 is irradiated with the laser light L1 can be more accurately identified using the calculation result of the distance value by the “distance value calculation unit”. Become.

In the present embodiment, the reflection surface 81 of the reference member 80 is configured as a plane on which the laser light from the deflection unit 41 is incident substantially perpendicularly when the deflection unit 41 is at the “reference position”. The “reference position detection means” detects the rotation position where the amount of received light becomes the maximum value in the “predetermined rotation range” detected by the “predetermined rotation range detection means” as the “reference position”.
In this way, the “predetermined rotation range” (that is, the rotation range in which the laser light enters the reference member 80) can be accurately detected by taking advantage of the characteristics of the reflecting surface 81 of the reference member 80, The specific rotation position within the “movement range” can be stably detected with a simple configuration, and the specific rotation position that is stably determined in this way can be used as the “reference position”.

In the present embodiment, the reference member 80 is configured such that the laser light from the deflecting unit 41 located at the “reference position” is reflected on the reflection surface 81 when the moving direction of the laser light incident on the reflection surface 81 is the width direction. It is configured to be incident on “a predetermined position in the width direction” (in the above representative example, the center position in the width direction). In addition, the “reference position detection means” detects the “light reception amount maximum rotation position” where the light reception amount becomes the maximum value in the “predetermined rotation range” detected by the “predetermined rotation range detection means”. “Determining means” for determining whether or not the detected “maximum received light amount rotation position” is a “corresponding rotation position” corresponding to the “predetermined position in the width direction”. Then, when it is determined by the “determination means” that the “maximum received light amount rotation position” corresponds to the “corresponding rotation position”, the “maximum received light amount rotation position” is detected as the “reference position”. (Yes in S6, S7).
In this configuration, the rotation position of the deflecting portion 41 when entering the “predetermined position in the width direction” of the reference member 80 is set as the “reference position”, and at this “reference position”, the laser beam is substantially applied to the reflecting surface 81. It is incident vertically. Accordingly, the rotation position (the maximum light reception amount rotation position) when the light reception amount reaches the maximum value is estimated as the “reference position”. In the present embodiment, the “light reception amount maximum rotation position” is directly used as “ Instead of setting it as the “reference position”, it is once confirmed whether or not the rotation position (corresponding rotation position) corresponds to the “predetermined position in the width direction”. It is defined as. In this way, it is possible to effectively prevent an erroneous reference position from being set due to the influence of noise or the like, and the “reference position” can be set more accurately.
In addition, when it is determined that the “maximum received light amount rotation position” does not correspond to the “corresponding rotation position” (No in S6), the “predetermined rotation range” by the “predetermined rotation range detection unit” is determined. The detection process is performed again, and the “maximum received light amount rotation position” in the “predetermined rotation range” detected again is detected again, and the “detected light amount maximum rotation position” detected again is “corresponding rotation”. It is determined whether it corresponds to “position”. In this case, even if the “maximum received light amount rotation position” does not correspond to the “corresponding rotation position”, the detection of the “maximum light reception amount rotation position” is performed again and the corresponding rotation position is met. It is possible to confirm whether or not the detection of the “reference position” is successful.

[Second Embodiment]
Next, a second embodiment will be described.
FIG. 9A is a cross-sectional view schematically illustrating a laser measuring apparatus according to the second embodiment of the present invention, and FIG. 9B is an angle at which the concave mirror is different from FIG. 9A. FIG. FIG. 10 is a cross-sectional view schematically showing a cross section of the laser measuring apparatus of FIG. 9 cut in the horizontal direction.

  Also in the laser measuring apparatus 200 according to the second embodiment, the laser diode 10 (laser light generating means) that intermittently generates the laser light L1 and the laser light is detected when the laser diode 10 generates the laser light. A photodiode 20 (light receiving means) that receives reflected light generated by reflection from an object, and a concave mirror 241 (deflecting means) configured to be rotatable about a predetermined central axis 242a are provided. When the rotation range is within a predetermined detectable range, the concave mirror 241 deflects the laser light toward the space and deflects the reflected light toward the photodiode 20 (rotation deflection means). And a motor 50 (driving means) for rotationally driving the concave mirror 241 of the rotation deflection mechanism 240 is provided.

  In the example of FIG. 10, for convenience of explanation, the rotational position of the concave mirror 241 when passing through one end portion 204a of the window portion (hereinafter also referred to as a light guide portion) 204 on the laser light scanning plane is set to 0 °. The rotation angle from the 0 ° rotation position is schematically shown. For example, the rotational position of the concave mirror 241 when passing through the other end 204b of the window 204 is 180 °, and the rotational range from the rotational position at 0 ° to the rotational position at 180 °. Is the “detectable range”. The rotational direction of the concave mirror 241 may be a clockwise direction or a counterclockwise direction. However, in the following, a configuration in which the concave mirror 241 is rotated clockwise to perform scanning will be described as a representative example. To do.

  On the other hand, the laser measurement apparatus 200 according to the present embodiment mainly uses a light guide mirror 290 and a light receiving wall instead of the reference member 80 described above, and uses a concave mirror 241 instead of the deflecting unit 41 as a deflection unit. The difference from the first embodiment is that the rotation angle position sensor 52 is omitted and the window-shaped light guide unit 204 is provided around the concave mirror 241 over about a half circumference.

  In the second embodiment, as shown in FIGS. 9 and 10, a mirror 230 is provided in the vicinity of the optical path of the laser light L1 projected from the laser diode 10 and passed through the lens 60. The mirror 230 includes a reflecting surface 230a that is inclined at a predetermined angle with respect to the optical axis of the laser light L1 from the laser diode 10 to the concave mirror 241, and a through path 232 that intersects the reflecting surface 230a. The laser light L1 from the laser diode 10 is passed through the through path 232, while the reflected light L2 from the detection object (more specifically, the reflected light reflected by the concave mirror 241) is reflected toward the photodiode 20. Yes. Note that the through-passage 232 may be configured as a hole whose opening is opened, or the opening may be closed by a half mirror or the like as shown in FIG.

  A rotation deflection mechanism 240 is provided on the optical axis of the laser beam L1 that passes through the mirror 230. The rotation deflection mechanism 240 corresponds to an example of “rotation deflection means”, and includes, for example, a concave mirror 241 provided with a concave reflection surface 241 a configured as a paraboloid, and a shaft connected to the concave mirror 241. And a bearing (not shown) that supports the shaft 242 so as to be rotatable about a central axis 242a (predetermined central axis). In this way, the deflecting means is configured as the concave mirror 241 so that the reflected light L2 from the external space can be collected more.

  In the second embodiment, as shown in FIGS. 9 and 10, a window that allows the laser light L <b> 1 and the reflected light L <b> 2 to pass around the concave mirror 241 in the case 203 so as to surround the concave mirror 241. A light guide 204 is formed. The light guide unit 204 has a semicircular arc shape centered on the optical axis of the laser beam L1 incident on the concave mirror 241 and is configured to cover approximately half a circumference around the concave mirror 241. The light guide unit 204 is blocked. A laser light transmission plate 205 made of a glass plate or the like is disposed in the form to prevent dust.

Next, the light guide mirror 290 and the light receiving wall which are one of the features of the second embodiment will be described.
In the second embodiment, as shown in FIGS. 9 and 10, the light guide mirror 290 is provided at a position where the laser beam L1 from the concave mirror 241 can enter, and the concave mirror 241 is “out of detectable range” ( That is, it is a rotation range of the concave mirror 241 when the laser beam is not irradiated to the outside through the window portion 204 but is irradiated to the inside of the case 203, and in the example of FIG. 10, a range from 180 ° to 360 °. ), The laser beam L1 from the concave mirror 241 is incident on the light guide mirror 290.

  The light guide mirror 290 corresponds to an example of a “light guide member”, and is configured in a plate shape as a whole. The light guide mirror 290 faces the concave mirror 241 side and is on the scanning path of the laser light L1 from the concave mirror 241. It has the light guide reflective surface 290a arrange | positioned. Then, the light guide mirror 290 causes the laser light L1 deflected (reflected) by the concave mirror 241 when the concave mirror 241 is in a “predetermined rotation range” described later to be incident light (light guide) on the light guide reflection surface 290a. It is configured such that it is specularly reflected in a direction orthogonal to the light incident on the reflecting surface 290a or on the side opposite to the side on which the incident light is incident (that is, the side away from the concave mirror 241).

  The light guide mirror 290 is configured to guide the reflected light reflected by the light guide reflection surface 290 a to a position away from the concave mirror 241 and the photodiode 20. As shown in FIG. 9B, the light guide mirror 290 is configured so that the laser light L1 incident on the light guide mirror 290 from the concave mirror 241 from the horizontal direction is perpendicular to the incident direction (along the central axis 242a). Direction) or a direction substantially perpendicular to each other, and the angle formed between the light guide reflection surface 290a and the central axis 242a is 45 ° or slightly larger than 45 ° or slightly smaller than 45 °. ing. In the present embodiment, as shown in FIG. 9B, the laser light L1 reflected by the light guide mirror 290 is incident on the inner lower wall portion 296b and diffusely reflected by the inner lower wall portion 296b. It has become. In the example of FIG. 9B, the position where the laser light L1 reflected by the light guide mirror 290 is incident on the inner lower wall portion 296b is closer to the concave mirror 241 than the position where the laser light L1 is incident on the light guide mirror 290. The laser beam L1 reflected from the light guide mirror 290 is incident on the inner lower wall portion 296b at a slight angle. Accordingly, the diffusely reflected light generated at the inner lower wall portion 296b is difficult to enter the light guide mirror 290.

  Since the light guide mirror 290 is arranged in this manner, when the concave mirror 241 is in the “predetermined rotation range” in the “outside detectable range”, the laser light from the concave mirror 241 is transmitted to the inner wall surface of the case 203 (the inner side described later). The rear wall portion 296d) is not directly irradiated, and the amount of laser light L1 reflected from the inner surface of the case 203 is suppressed. The light guide mirror 290 only needs to be configured so that the light guide reflection surface 290a can be mirror-reflected. For example, a thin film of metal such as aluminum or silver is formed on the surface of a plate made of glass or plastic. Etc. can be used.

Next, the light receiving wall will be described.
In the present embodiment, the light receiving wall is formed integrally with the case 203. As shown in FIGS. 9 and 10, the case 203 has an upper wall portion 205 a and a lower wall portion 205 b that are vertically opposed to each other (the upper wall portion 205 a is on the + Y axis side, and the lower wall portion 205 b is on the −Y axis side. ), The front wall part 205c and the rear wall part 205d are arranged to face each other in the front-rear direction (the front wall part 205c is on the + X side, the rear wall part 205d is on the -X side), and the side wall parts 205e and 205f are arranged to face the left and right It has a box shape. The inner upper wall portion 296a provided inside the upper wall portion 205a, the inner lower wall portion 296b provided inside the lower wall portion 205b, the inner front wall portion 296c provided inside the front wall portion 205c, and the rear wall portion. The inner rear wall portion 296d provided inside 205d and the inner side wall portions 296e and 296f provided inside the side wall portions 205e and 205f function as light receiving walls (hereinafter referred to as light receiving walls 296a to 296f), respectively.

  The wall surface (light-receiving wall surface) of these inner upper wall portion 296a, inner lower wall portion 296b, inner front wall portion 296c, inner rear wall portion 296d, inner side wall portions 296e, and 296f is a black matte finish that roughens the surface. In addition, a process for suppressing the reflectivity, such as a textured process that gives unevenness to the surface, is performed. Then, when the rotational position of the concave mirror 241 is “outside the predetermined rotational range” in “outside the detectable range”, the laser light L1 from the concave mirror 241 is received by the light receiving wall surfaces of the light receiving walls 296a to 296f and diffusely reflected. It is configured to let you. That is, only a part of the laser beam L1 received by the light receiving wall surface is received by the photodiode 20 via the concave mirror 241. More specifically, when the concave mirror 241 is “outside the detectable range” and “outside the predetermined rotation range”, it is reflected by the light receiving walls 296 a to 296 f in the case 203 and received by the photodiode 20 through the concave mirror 241. The diffuse reflection state of the light receiving walls 296a to 296f and the saturated received light amount of the photodiode 20 are set so that the received light amount of the laser light does not reach the saturated received light amount of the photodiode 20 (the maximum received light amount that can be detected by the light receiving means). Yes.

Next, a reference position detection process performed by the laser measurement apparatus 200 will be described.
FIG. 11 is a graph illustrating the relationship between the angle of the deflection unit and the amount of received light detected. FIG. 12 is a flowchart illustrating the flow of the reference position detection process performed by the laser measurement apparatus of FIG. FIG. 13A is an explanatory diagram schematically illustrating a state in which the rotation deflection mechanism, the motor, and the light guide mirror of the laser measurement device of FIG. 9 are viewed from above, and FIG. It is explanatory drawing explaining a mirror. FIG. 14 is an explanatory diagram for explaining how the reference position is detected from the relationship between the angle of the deflection unit and the amount of received light detected.

  The reference position detection process shown in FIG. 12 is executed by the control circuit 70 (FIG. 9) based on, for example, a program stored in a memory (not shown). This reference position detection process is started when a predetermined start condition is satisfied (for example, when a predetermined operation or power is turned on by the user, etc.), and first, the light reception amount data for at least the entire circumference (360 °) is acquired. (S201).

  In the present embodiment, for example, the concave mirror 241 rotates at a constant rotational speed, and pulse laser light is emitted from the laser diode 10 at a constant time interval. In step S201, the control circuit determines the amount of light received by the photodiode 20 at each rotation position (that is, the amount of light received by the photodiode 20 that reflects the pulsed laser light emitted at each rotation position). As shown in FIG. 11, data of such received light amount is generated for the entire circumference (360 °). In the example of FIG. 11, for the convenience of explanation, the amount of light received in the detectable range (range of 0 ° to 180 °) is almost 0, but the amount of received light in the detectable range is that of the laser measuring device 200. It can vary depending on the surrounding environment, and generally a certain amount of received light can be obtained. However, when there is no object around the laser measuring apparatus 200, the amount of light received in the case is sufficiently small.

  Then, based on the received light amount data (the received light amount data for the entire circumference) obtained at S201, a “predetermined rotational range” in which the laser light L1 is guided to the light guide mirror 290 is detected. To do. This “predetermined rotation range” means that, in the entire rotation range of the concave mirror 241 that rotates 360 °, as shown in FIGS. 13 (a) and 13 (b), the laser beam L 1 is at one end of the light guide mirror 290. Rotation range from the rotation position when entering 292 to the rotation position when entering the other end 293, and when the concave mirror 241 is in the “predetermined rotation range”, the laser beam L1 is The light enters the light guide mirror 290 and is reflected at a position away from the concave mirror 241 and the photodiode 20 (that is, the reflected light is suppressed from being received by the photodiode 20). .) In FIG. 13A, the direction of the laser light L1 when the laser light L1 enters the one end 292 is indicated by a straight line B1, and the direction of the laser light L1 when the laser light L1 enters the other end 293. Is indicated by a straight line B2, and a scanning area that can enter the light guide mirror 290 is indicated by a symbol AR.

  In the present embodiment, a threshold value D3 for distinguishing the inside and outside of the detectable range is stored in advance, and first, the detectable range is specified based on the threshold value D3. For example, a range in which the amount of received light is less than the threshold D3 and the rotation range is sufficiently larger than a specified rotation range corresponding to W1 (FIG. 13) is set as a detectable range. Thus, in the example of FIG. 11, it is specified that 0 ° to 180 ° is the “detectable range”, and conversely, 180 ° to 360 ° is specified to be “out of the detectable range”.

  Further, outside the detectable range specified in this way (180 ° to 360 ° in FIG. 11), a rotation range that satisfies a condition less than the threshold D4 stored in advance is defined as a “predetermined rotation range” (light guide mirror 290). Is determined (detected). In FIG. 11, the “predetermined rotation range” is indicated by a rotation range C1. In the example of FIG. 11, the threshold D3 for distinguishing the “detectable range” and the threshold D4 for distinguishing the “predetermined rotation range” are different values, but they may be the same value.

  After the process of S202 of FIG. 12, it is determined whether or not the light guide mirror 290 has been detected by the process of S202 (that is, “a predetermined rotation range” has been detected) (S203). If it is determined that the “predetermined rotation range” has been detected, the process proceeds to Yes in S203, and the processes after S204 are performed. On the other hand, when the “predetermined rotation range” is not detected, the process proceeds to No in S203, and the processes after S201 are performed again.

  When the process proceeds to Yes in S203, the rotation position satisfying the predetermined “predetermined low light reception amount condition” in the “predetermined rotation range” detected in S202 is detected as the “reference position”. To do. Specifically, in “out of the detectable range”, the amount of received light is a predetermined high received light amount state based on light from the light receiving walls 296a to 296f (a state equal to or greater than the threshold value D4), and the laser light L1 is guided. The rotational position of the concave mirror 241 at the timing of switching between a predetermined low received light amount state (a state less than the threshold value D4) when reflected by the mirror 290 to a position deviated from the concave mirror 241 and the photodiode 20 is defined as a “reference position”. Detect (S204).

  For example, as shown in FIG. 14 (an enlarged view of the vicinity of 270 ° in FIG. 11), in the “predetermined rotation range”, the received light amount state is less than the threshold value D4 from the predetermined high light reception amount state that is equal to or greater than the threshold value D4 The rotation position B1 at which switching to a predetermined low light reception amount state is detected as the “reference position”. That is, the boundary position where the laser beam L1 from the concave mirror 241 moves from the light receiving wall (specifically, the inner rear wall portion 296d) to the light guide mirror 290 is detected as the “reference position”. At this time, from the viewpoint of detection accuracy and assembly accuracy, as shown in FIG. 14, the rotation range C1 (the rotation range corresponding to the light guide mirror 290) that satisfies the condition less than the predetermined threshold D4 is at least three pulses. It is preferable to have a width of For example, when the angle resolution is 0.5 °, the distance from the central axis 242a of the concave mirror 241 to the light guide mirror 290 is 50 mm, and the width W1 of the light guide mirror 290 is 2 mm, the rotation range C1 is obtained. It can be set to contain 3 pulses. In this way, the predetermined rotation position B1 detected in S204 is set as the “reference position” in S205.

  In the present embodiment, the control circuit 70 that performs the process of S201 corresponds to an example of the “light reception amount detection unit”, and receives light at the photodiode 20 (light reception unit) for each rotation position of the concave mirror 241 (deflection unit). Works to detect the amount. The control circuit 70 that performs the processing of S204, S205, etc. corresponds to an example of a “reference position detection unit”, and the rotation position where the received light amount detected by the received light amount detection unit satisfies a predetermined low received light amount condition is a reference. It functions to detect as a position.

  After the “reference position” is detected by the process of FIG. 12, the actual detection process is performed using the “reference position” as the origin of the rotation angle, as in the first embodiment. Specifically, the concave mirror 241 rotates at a constant rotational speed, and pulse laser light is emitted from the laser diode 10 at a constant time interval. By counting the number of pulses using the pulse as a reference pulse, it is possible to accurately specify at which angle the concave mirror 241 is displaced (rotated) with respect to the reference position. Therefore, each rotation position of the concave mirror 241 at each irradiation can be detected as a relative rotation position based on the above “reference position” (that is, each rotation position at each irradiation is “reference position”). ”, And when the reflected light from the detection object is received by the photodiode 20 at any of the rotation positions, the concave mirror 241 at the time of the light reception is received. It is possible to specify how much the angle is rotated from the “reference position”. Then, the elapsed time from the projection of the pulse laser beam to the reception of the reflected light corresponding to the pulse laser beam is calculated for each rotation position, and the laser beam is calculated for each rotation position based on the calculated elapsed time. A distance value to the arrival position (position where reflected light is generated) is calculated.

  All of these processes are performed by the control circuit 70, and this control circuit 70 corresponds to an example of “distance value calculation means”. The distance value to the laser beam arrival position is calculated for each rotational position of the concave mirror 241. Works to calculate. The control circuit 70 corresponds to an example of “relative position detection means”, and determines the relative rotational position of the concave mirror 241 (deflection means) based on the reference position detected by the “reference position detection means”. It works to detect. The control circuit 70 corresponds to an example of a “direction detection unit”. When the rotational position of the concave mirror 241 (deflection unit) is in the “detectable range”, the photodiode 20 (light reception unit) detects the object from the detection object. When the reflected light is received, it functions to detect the direction of the detected object based on the detection result of the relative rotational position by the “relative position detecting means”.

(Main effects of this embodiment)
In the laser measurement apparatus 200 according to the present embodiment, the light guide mirror 290 is disposed on the scanning path of the laser light L1 from the concave mirror 241, and the light guide mirror 290 can detect the rotational position of the concave mirror 241. The laser beam L1 from the concave mirror 241 is guided to a position away from the concave mirror 241 and the photodiode 20 when in the predetermined rotation range outside. Furthermore, a light receiving wall 296 having a light receiving wall for receiving the laser beam L1 from the concave mirror 241 when the rotational position of the concave mirror 241 is outside the detectable range and outside the predetermined rotational range is provided. The light receiving wall 296 is arranged so that the photodiode 20 receives at least part of the light reflected by the light receiving wall surface of the laser light L1 through the concave mirror 241. In this way, “the amount of light received by the photodiode 20 when the rotational position of the concave mirror 241 is within the predetermined rotational range outside the detectable range” is “the amount of light received by the photodiode 20 when the rotational position of the concave mirror 241 is out of the detectable range”. The amount of light received by the photodiode 20 when it is outside the predetermined rotation range is relatively small. That is, when the concave mirror 241 is outside the detectable range, the received light amount detected by the received light amount detection means (control circuit 70) is in a predetermined low received light amount state when the concave mirror 241 is within the predetermined rotation range. Since it is in a predetermined high light reception amount state outside the predetermined rotation range, a difference occurs in the light reception amount inside and outside the predetermined rotation range.
Based on such a configuration, reference position detection means (control circuit 70) for detecting, as a reference position, a rotation position where the received light amount detected by the received light amount detection means satisfies a predetermined low light reception amount condition; The relative position detecting means (control circuit 70) for detecting the relative rotational position of the concave mirror 241 based on the reference position detected by the reference position detecting means, and the rotational position of the concave mirror 241 are within the detectable range. When the reflected light from the detection object is received by the photodiode 20 sometimes, the direction detection means (control circuit) detects the direction of the detection object based on the detection result of the relative rotation position by the relative position detection means. 70).
Therefore, it is possible to accurately determine a predetermined specific position (a rotational position satisfying a predetermined low light reception amount) in the apparatus as a reference position without using a special rotational position detection sensor (such as a rotary encoder). Thus, the relative position of the detected object can be calculated with higher accuracy based on the reference position.

  In the present embodiment, the light receiving wall 296 is configured to diffusely reflect the laser light L1 on the light receiving wall surface. Therefore, when the rotational position of the concave mirror 241 is outside the detectable range and outside the predetermined rotational range, the amount of light received detected by the photodiode 20 is unlikely to reach the saturation amount of light received (the maximum amount of light received that can be detected by the photodiode 20). Thus, when the concave mirror 241 is within the predetermined rotation range, it becomes easier to detect the change in the amount of received light in the photodiode 20 more accurately.

  Further, in the present embodiment, the reference position detection unit is configured such that the received light amount detected by the received light amount detection unit is a predetermined high received light amount state based on light from the light receiving wall 296, and the laser light L1 is a light guide mirror. The rotational position of the concave mirror 241 when switching between a predetermined low light reception amount state when guided by 290 is detected as a reference position. In this way, a specific rotation position can be easily and accurately detected within the rotation range (predetermined rotation range) in which the light guide mirror 290 is irradiated with the laser light L1 and the amount of received light is reduced, and the “reference” Can be defined as "position".

  In the present embodiment, the light guide member is constituted by the light guide mirror 290, and the laser beam L 1 is specularly reflected at a position away from the concave mirror 241 and the photodiode 20. In this way, the laser beam L1 from the concave mirror 241 can be guided by specular reflection, and can be reliably guided by a position away from the concave mirror 241 and the photodiode 20 while suppressing diffuse reflection. Therefore, a part of the laser beam L1 reflected by the light guide mirror 290 can be further suppressed from being directly received by the photodiode 20, and the amount of received light can be more clearly defined inside and outside the predetermined rotation range. A difference can be made.

  In the present embodiment, the light guide mirror 290 is arranged so as to guide the laser light L1 incident on the light guide mirror 290 from the concave mirror 241 in a direction substantially orthogonal to the incident direction. In this case, the laser light L1 incident on the light guide mirror 290 is easily guided in a direction further away from the concave mirror 241 and a part of the laser light L1 reflected by the light guide mirror 290 returns to the concave mirror 241 side. Can be avoided more reliably.

[First Modification of Second Embodiment]
Next, a first modification of the second embodiment will be described.
FIG. 15 is an explanatory diagram schematically illustrating a configuration in which a prism is used as the light guide member, and FIG. 15A is a laser measurement device according to a first modification of the second embodiment of the present invention. FIG. 15B is a cross-sectional view schematically showing a state in which the concave mirror is at an angle different from that in FIG. 15A.

  In the second embodiment described above, the light guide mirror 290 is used as the light guide member. However, in the first modification of the second embodiment, the prism 298 is used as the light guide member instead of the light guide mirror 290. The other configuration is the same as that of the laser measuring apparatus 200 according to the second embodiment except for the differences. Therefore, the same portions (laser diode 10, lens 60, mirror 230, rotation deflection mechanism 240, shaft portion 242, motor 50, etc.) are denoted by the same reference numerals as those in the second embodiment, and detailed description thereof is omitted. To do.

  In the second embodiment described above, the laser light L1 deflected (reflected) by the concave mirror 241 is opposite to the incident light (light incident on the light guide reflection surface 290a) on the light guide reflection surface 290a of the light guide mirror 290. However, in the first modification, as shown in FIG. 15 (a), the light guide mirror 290 is disposed at the position where the light guide mirror 290 is disposed. Instead of the optical mirror 290, a prism 298 is disposed. Specifically, as shown in FIG. 15B, the prism 298 refracts the laser light L1 incident from the concave mirror 241 to the incident surface 298a of the prism 298 (the surface facing the concave mirror 241) from the horizontal direction. The light is emitted from the exit surface 298b (the surface facing the inner rear wall 296d opposite to the entrance surface) to a position away from the concave mirror 241 and the photodiode 20. The incident surface 298a of the prism 298 on which the laser beam L1 is incident is provided with a anti-reflection coating so that the reflection of the laser beam L1 on the incident surface 298a is reduced as much as possible. In addition, the horizontal width of the incident surface 298a of the prism 298 is set to be approximately the same as the width W1 of the light guide mirror 209, and the relationship between the angle of the concave mirror 241 in the predetermined rotation range and the detected amount of received light is FIG. 11 shown in the second embodiment described above. Also in the first modification, the “reference position” can be detected by performing the above-described reference position detection process of FIG. 12.

  As described above, in the laser measurement device 200 according to the first modification of the second embodiment, the light guide member is configured by the prism 298, and the laser light L1 is refracted to a position away from the concave mirror 241 and the photodiode 20. I try to let them. Thus, even if the light guide member is constituted by the prism 298, the laser beam L1 from the concave mirror 241 can be refracted and guided to a position away from the concave mirror 241 and the photodiode 20, so that the rotation of the concave mirror 241 can be performed. When the position is within a predetermined rotation range outside the detectable range, the amount of light received by the photodiode 20 can be reduced, and the control circuit 70 can more accurately detect the amount of light received by satisfying a predetermined low light reception amount condition. The moving position can be detected as the “reference position”.

[Second Modification of Second Embodiment]
Next, a second modification of the second embodiment will be described.
FIG. 16 is an explanatory diagram schematically illustrating a configuration in which an attenuation member 299 is provided below the light guide mirror 209, and FIG. 16 (a) is a second modification of the second embodiment of the present invention. FIG. 16B is a cross-sectional view schematically illustrating a state in which the concave mirror is at an angle different from that of FIG. 16A.

  The second modified example of the second embodiment is different from the second embodiment described above only in that an attenuation member 299 that attenuates the laser light L1 is further provided in addition to the configuration of the second embodiment described above. These are the same as those of the laser measuring apparatus 200 according to the second embodiment. Therefore, the same portions (laser diode 10, lens 60, mirror 230, rotation deflection mechanism 240, shaft portion 242, motor 50, etc.) are denoted by the same reference numerals as those in the second embodiment, and detailed description thereof is omitted. To do.

  In the second modified example, as shown in FIG. 16A, an attenuation member 299 is provided outside the scanning path of the laser light L1 and below the light guide mirror 209. Then, as shown in FIG. 16B, the laser light L1 reflected by the light guide mirror 209 is guided toward the attenuation member 299 and attenuated. More specifically, the attenuation member 299 is provided with a light guide port 299a, and the attenuation member 299 is disposed so that the light guide port 299a faces the light guide reflection surface 290a of the light guide mirror 290. In addition, the inner wall surface 299b of the attenuation member 299 is subjected to texture processing, matting processing, or the like, so that the laser light L1 taken from the light guide port 299a is more easily attenuated. Then, when the laser light L1 reflected by the light guide mirror 209 enters the inside of the attenuation member 299 via the light guide port 299a, it is attenuated while being repeatedly reflected by the inner wall surface 299b of the attenuation member 299, and the amount of light is reduced. It has become so.

  Thus, in the laser measuring device 200 according to the second modification of the second embodiment, the attenuation member 299 that attenuates the laser light L1 is provided outside the scanning path of the laser light L1, and the light guide mirror 290 is The laser beam L1 is guided toward the attenuation member 299. In this way, the laser light L1 from the concave mirror 241 guided to the position away from the concave mirror 241 and the photodiode 20 by the light guide mirror 290 can be further attenuated, so that the laser guided by the light guide mirror 290 It is possible to suppress or prevent the light L1 from being reflected by another member and received by the photodiode 20. Therefore, the difference in the amount of received light tends to occur more clearly within and outside the predetermined rotation range, and as a result, it becomes easier to set the reference position more accurately and stably.

[Third Embodiment]
Next, a third embodiment will be described. The third embodiment differs from the first embodiment only in the reference position detection process, and is otherwise the same as the first embodiment. Therefore, only the reference position detection process will be described with emphasis, and other hardware configurations and the like will be described with reference to FIGS. 1 to 3 as appropriate, assuming that they are the same as in the first embodiment.

Hereinafter, the reference position detection process performed by the laser measurement apparatus 1 of the present embodiment will be described.
In the reference position detection process of the present embodiment, the distance value is calculated for each rotation position of the deflecting unit 41, and the distance value calculation process for each rotation position is performed a plurality of times. And the distance value data for every rotation position of the deflection | deviation part 41 is acquired for multiple turns, and the distance value obtained in the multiple turns satisfies the predetermined rotation range which satisfies the predetermined statistical condition corresponding to the position or shape of the reference member 80. Is detected.

  When the reference member 80 having a flat reflecting surface is present on the laser beam scanning path as shown in FIG. 1, the same detection waveform (see FIGS. 5 and 6) as in the first embodiment can be obtained. When such detection is performed for a plurality of rounds, a waveform corresponding to the position and shape of the reference member 80 appears every round as shown in FIG. In FIG. 19, waveforms other than the angular range corresponding to the reference member 80 are omitted in the second and third rounds. In this embodiment, paying attention to the fact that such a waveform repeatedly and stably occurs, the rotation range corresponding to this repeated waveform is detected as a “predetermined rotation range”, and the reference position is set based on this range. doing.

  FIG. 19 exemplifies a light reception waveform when a plurality of laser scans are performed using the laser radar measuring apparatus 1 shown in FIGS. 1 to 3, and an arbitrary timing (arbitrary timing when the specified rotational speed is reached) The time at the rotation position) is T0, the time at which one revolution is made from this time T0 is T1, and the time at which one revolution is made from T1 is T2. That is, from the arbitrary timing T0 to T1 is the first round, from time T1 to time T2 is the second round, and from time T2 to time T3 is the third round.

  Since the flow of the reference position detection process is basically the same as that in FIG. 4 of the first embodiment, it will be described with reference to FIG. In the present embodiment, when the distance value data for the entire circumference is acquired in S1 of FIG. 4, such data acquisition for the entire circumference is performed for a plurality of rounds. That is, as in the first embodiment, distance value data is acquired for each rotation position of the deflecting unit 41. Such data acquisition processing is performed for a plurality of rounds.

  In FIG. 20, the distance value data obtained at this time is conceptually shown. The distance value data obtained at each position on the first round is indicated by V11 to V1N, and the distance value obtained at each position on the second round. The distance value data obtained at each position of the V21 to V2N and the third round are sequentially indicated as V31 to V3N, and the distance value data obtained at each position of the specified last week (Xth round) is represented as VX1. This is indicated by VXN. Furthermore, the average value of the distance value at each rotation position is indicated as A1, A2, A3. FIG. 20 is an example in which the reference pulse is output N times from the CPU or the like while the deflecting unit 41 rotates once, and shows distance values obtained for each reference pulse.

  In this way, after calculating the average values A1, A2, A3,... AN of the distance values for each rotation position, an angle range in which the distance value does not fluctuate (more specifically, a predetermined number of consecutive rotation positions). , An angle range in which the average value of the distance values is within a predetermined width is detected. For example, when the relationship between the rotation angle (rotation position) and the average value of the distance values is as shown in FIG. 21, the region where the change width of the average value is within a predetermined range (range W) is greater than or equal to the predetermined angle range. The region AR1 that continues over the range is specified as a “predetermined rotation range” (an angle range in which the reference member is irradiated with laser light).

  After the “predetermined rotation range” is specified in this way, the process proceeds to Yes in S3 of FIG. 4 and the same processing as S4 of the first embodiment is performed. For example, a rotation position obtained on a specific circumference (any circumference during the detection of the “predetermined rotation range” or any circumference after the “predetermined rotation range” is detected) Based on the detection result of each received light amount, the rotation position where the received light amount is maximum in the “predetermined rotation range” is detected. Then, the reference position is set by the same method as S5, S6, and S7 in FIG. Note that the processing of S5 and S6 can be omitted, and the rotation position detected in S4 (that is, the rotation position where the amount of light received in the “predetermined rotation range” is maximum) is set as the reference position as it is. Also good.

  Also in this embodiment, the control circuit 70 (FIG. 1) functions as “distance value calculation means” as in the first embodiment. Also in the present embodiment, the control circuit 70 (FIG. 1) corresponds to an example of “reference position detection means”, and “predetermined rotation range detection means” based on the detection result of the received light amount by the “light reception amount detection means”. In the “predetermined rotation range” detected by the function, the rotation position where the amount of received light is in the specified state is detected as the reference position. Furthermore, the control circuit 70 (FIG. 1) corresponds to an example of “predetermined rotation range detection means”, and based on data for a plurality of circumferences of distance values obtained for each rotation position by the “distance value calculation means”, The distance value obtained in the plurality of rounds functions to detect a “predetermined rotation range” that satisfies a predetermined statistical condition corresponding to the position or shape of the reference member 80. It should be noted that here, “the region in which the variation range of the average value is within the predetermined range (range W) continues over the predetermined angular range” (that is, the angular range in which the variation of the average value of the distance value is small. )) As “predetermined statistical conditions”. Specifically, also in the present embodiment, the distance from the emission position P1 of the laser beam L1 in the deflection unit 41 to the irradiation path of the laser beam L1 in the reflection surface 81 is configured to be within a predetermined distance range. The “predetermined rotation range detection means” is based on the data of a plurality of circumferences of distance values obtained for each rotation position by the “distance value calculation means”. It functions to detect a rotation range in which the fluctuation of the average value of the distance values within a predetermined threshold value is within a predetermined threshold as a “predetermined rotation range”.

[Modification 1 of the third embodiment]
Next, Modification Example 1 of the third embodiment will be described. The modification 1 is also different from the first embodiment only in the reference position detection process, and is otherwise the same as the first embodiment. Therefore, only the reference position detection process will be described with emphasis, and other hardware configurations and the like will be described with reference to FIGS. 1 to 3 as appropriate, assuming that they are the same as in the first embodiment.

Hereinafter, the reference position detection process performed by the laser measurement apparatus 1 of the present embodiment will be described.
Even in the reference position detection process of the first modification, a process of calculating a distance value is performed for each rotation position of the deflecting unit 41, and such distance value data is acquired for a plurality of rounds. Then, based on the distance value data for a plurality of turns for each turning position, a predetermined turning range in which a distance value obtained in the plurality of turns satisfies a predetermined statistical condition corresponding to the position or shape of the reference member is detected. . Also in this modified example 1, it is assumed that a reference member having a flat reflecting surface exists on the scanning path of the laser light as shown in FIG. 1, and the position of the reference member for each circumference as shown in FIG. It is assumed that a waveform corresponding to the shape appears. A rotation range in which such a waveform repeatedly occurs is detected as a “predetermined rotation range”, and a reference position is set based on this range.

  Also in the first modification, the flow of the reference position detection process is basically the same as that in FIG. 4 of the first embodiment, and will be described with reference to FIG. In the first modification, the processes of S1 and S2 in FIG. 4 are changed as shown in FIG. In this modified example 1, in S301, distance value data for the entire circumference is acquired in the same manner as in S1 of the first embodiment, and such data acquisition for the entire circumference is performed until the specified number of rounds is reached (S302). ). If the data acquisition for all the circumferences has reached the prescribed number of revolutions, the process proceeds to Yes in S302. When the process proceeds to Yes in S302, data as shown in FIG. 23 is obtained.

  FIG. 23 conceptually shows the distance value data obtained at this time. The distance value data obtained at each position in the first round is indicated by V11 to V1N, and the distance value obtained at each position in the second round. The distance value data obtained at each position of the V21 to V2N and the third round are sequentially indicated as V31 to V3N, and the distance value data obtained at each position of the specified last week (Xth round) is represented as VX1. This is indicated by VXN.

  In the process of FIG. 22, when the process proceeds to Yes in S302, a statistical process for calculating a change amount (error) of the distance value for each rotation position is performed. In S303, the maximum value and the minimum value are obtained for each of the multiple round distance value data obtained for each rotation position (for example, V11 to VX1 at the rotation position 1 in FIG. 23, V12 to VX2 at the rotation position 2, etc.). A value width (deviation) is obtained, and this is used as a change amount (error) for each rotation position. In FIG. 23, the amount of change (deviation) at each rotation position is indicated as D1, D2, D3. FIG. 23 is an example in which the reference pulse is output N times from the CPU or the like while the deflecting unit 41 rotates once, and shows distance values obtained for each reference pulse.

  Thus, after calculating the average values D1, D2, D3... DN of the distance values for each rotation position, the rotation position where the amount of change (error) is equal to or less than a predetermined value is detected (S304). Then, based on the detection result in S304, it is determined whether or not the rotation position where the change amount (error) is equal to or less than a predetermined value is continuous within a predetermined range (an angular range corresponding to a predetermined number of angular positions) ( S305). When the rotation position where the change amount (error) is less than or equal to the predetermined value is continuous within a predetermined range (that is, the change amount (error) of the distance value is within the predetermined value at a predetermined number of consecutive rotation positions. If YES in step S305, the angle range determined to be continuous in step S305 is detected as a “predetermined angle range” (at this time, the reference member 80 is detected) (step S306).

  After the “predetermined rotation range” is specified in this way, the same processing as S3 to S7 in FIG. 4 is performed, the process proceeds to Yes in S3, and the same processing as S4 of the first embodiment is performed. For example, a rotation position obtained on a specific circumference (any circumference during the detection of the “predetermined rotation range” or any circumference after the “predetermined rotation range” is detected) Based on the detection result of each received light amount, the rotation position where the received light amount is maximum in the “predetermined rotation range” is detected. Then, the reference position is set by the same method as S5, S6, and S7 in FIG. Note that the processing of S5 and S6 can be omitted, and the rotation position detected in S4 (that is, the rotation position where the amount of light received in the “predetermined rotation range” is maximum) is set as the reference position as it is. Also good.

  Also in the first modification, the control circuit 70 (FIG. 1) functions as “distance value calculation means” as in the first embodiment. Also in the present embodiment, the control circuit 70 (FIG. 1) corresponds to an example of “reference position detection means”, and “predetermined rotation range detection means” based on the detection result of the received light amount by the “light reception amount detection means”. In the “predetermined rotation range” detected by the function, the rotation position where the amount of received light is in the specified state is detected as the reference position. Furthermore, the control circuit 70 (FIG. 1) corresponds to an example of “predetermined rotation range detection means”, and based on data for a plurality of circumferences of distance values obtained for each rotation position by the “distance value calculation means”, The distance value obtained in the plurality of rounds functions to detect a “predetermined rotation range” that satisfies a predetermined statistical condition corresponding to the position or shape of the reference member 80. Here, the “predetermined statistical condition” is “the rotation position where the change amount (error) is equal to or less than a predetermined value is continuous within a predetermined range”. Specifically, also in the present embodiment, the distance from the emission position P1 of the laser beam L1 in the deflection unit 41 to the irradiation path of the laser beam L1 in the reflection surface 81 is configured to be within a predetermined distance range. The “predetermined rotation range detection means” is based on the data of a plurality of circumferences of distance values obtained for each rotation position by the “distance value calculation means”. It functions to detect a rotation range in which the fluctuation of the average value of the distance values within a predetermined threshold value is within a predetermined threshold as a “predetermined rotation range”.

[Modification 2 of the third embodiment]
Next, a second modification of the third embodiment will be described. The modification 2 is also different from the first embodiment only in the reference position detection process, and is otherwise the same as the first embodiment. Therefore, only the reference position detection process will be described with emphasis, and other hardware configurations and the like will be described with reference to FIGS. 1 to 3 as appropriate, assuming that they are the same as in the first embodiment.

Hereinafter, the reference position detection process performed by the laser measurement apparatus 1 according to the modified example 2 will be described.
In the reference position detection process of the modification example 2, as shown in FIG. 24, the detected distance value is larger than the predetermined first threshold D1 (the actual distance from the distance value calculation reference point (for example, position P1) to the reference member 80). A rotation angle (rotation position) that is equal to or less than a predetermined second threshold value D2 (threshold value slightly smaller than the actual distance from the distance value calculation reference point (for example, position P1) to the reference member 80). ) Continues for a predetermined threshold angle range (for example, an angle range slightly smaller than the range AR shown in FIG. 2) or more (for example, an angle range from the angle θa to the angle θb: see FIG. 6A)) Is detected for each lap. When such a continuous angle range C coincides with a plurality of turns, for example, the continuous angle range C is set as a “predetermined angle range”. For example, in the example of FIG. 23, a continuous angle range in which the rotation angle (rotation position) where the distance value is equal to or smaller than the first threshold value D1 and equal to or larger than the second threshold value D2 continues for a predetermined threshold angle range or more Although indicated by C1, C2, and C3, when these angular ranges C1, C2, and C3 coincide with each other, the angular range is set as a “predetermined angular range” so that the processes in and after S4 in FIG. 4 are performed. It may be. Alternatively, in the angle ranges C1, C2, and C3, only the overlapping angle range may be set as the “predetermined angle range”, and the process from S4 in FIG. 4 may be performed.

[Fourth Embodiment]
Next, a fourth embodiment will be described with reference to FIG.
The fourth embodiment is different from the second embodiment in that a part of the laser measurement device 200 according to the second embodiment is changed. Therefore, in the following description, the same reference numerals as those in the second embodiment are given to components common to the laser measurement apparatus 200 of the second embodiment, and detailed description thereof is omitted.

  As shown in FIG. 25, the laser measurement apparatus 200 according to the fourth embodiment mainly includes only a point where a mirror 401 and an attenuation member 402 are provided, and a point where the lower wall portion 205b is arranged away from the motor 50. However, it is different from the configuration of the first embodiment, and the other parts are the same as those of the laser measurement apparatus 200 described in the second embodiment.

  In the laser measurement apparatus 200 according to the present embodiment, a mirror 401 that further reflects the laser light reflected by the light guide mirror 290 (light guide member) is provided. This mirror 401 reflects the laser beam in the vertical direction reflected by the light guide mirror 290 in the horizontal direction, and guides this laser beam to enter the attenuation member 402. The attenuation member 402 is configured in the same manner as the above-described attenuation member 299. For example, the attenuation member 402 may be configured by a low-reflectance portion seat such as poron, and the outer wall surface (incident surface 402a) is subjected to texture processing, matting processing, or the like. The incident laser beam L1 may be more easily attenuated.

  The attenuation member 402 is disposed so as to attenuate light incident outside the scanning path of the laser light. More specifically, the attenuation member 402 is opposite to the side where the photodiode 20 is provided in the vertical direction (downward). And on the opposite side (front side) to the side where the photodiode 20 is provided in the front-rear direction. In the present embodiment, the mirror 401 corresponds to an example of “light guiding means”, and the laser guided by the light guide mirror 290 (light guide member) when the rotation position of the deflecting unit 41 is within a predetermined rotation range. It functions to guide light to the attenuation member 402.

[First Modification of Fourth Embodiment]
Modification 1 shown in FIG. 26 differs from the representative example (FIG. 25) of the fourth embodiment in that the mirror 401 is changed to the attenuation member 411. Therefore, the same reference numerals are given to configurations common to the representative example of the fourth embodiment, and detailed description thereof is omitted.

  In the laser measurement device 200 according to the first modification, the attenuation member 411 is provided so as to further reflect the laser light reflected by the light guide mirror 290 (light guide member). The attenuation member 411 reflects most of the vertical laser light reflected by the light guide mirror 290 in the horizontal direction, and guides the laser light to enter the attenuation member 402. Further, the attenuation member 411 is configured in the same manner as the above-described attenuation member 402, and may be configured by, for example, a low-reflectance portion seat such as poron. The outer wall surface (incident surface 402a) is textured or matted. The structure may be such that the incident laser beam L1 is more easily attenuated by processing or the like.

[Modification 2 of the fourth embodiment]
27 is different from the representative example (FIG. 25) of the fourth embodiment in that the attenuation member 402 is changed to the attenuation member 421. Therefore, the same reference numerals are given to configurations common to the representative example of the fourth embodiment, and detailed description thereof is omitted.

  In the laser measurement apparatus 200 according to the present embodiment, a mirror 401 that further reflects the laser light reflected by the light guide mirror 290 (light guide member) is provided. The mirror 401 reflects the vertical laser beam reflected by the light guide mirror 290 in the horizontal direction, and guides the laser beam to enter the attenuation member 421.

  The attenuation member 421 is provided with a light guide port, and the attenuation member 421 is disposed so that the light guide port faces the light guide reflection surface of the mirror 401. In addition, the inner wall surface of the attenuation member 421 is subjected to texture processing, matting processing, or the like, so that the laser light L1 taken from the light guide port is more easily attenuated. Then, when the laser light L1 guided by the mirror 401 enters the attenuation member 421 through the light guide port, the light is attenuated by repeating reflection on the inner wall surface of the attenuation member 421, and the light amount is reduced. Yes.

[Modification 3 of the fourth embodiment]
28 is different from the representative example (FIG. 25) of the fourth embodiment in that a mirror 431 is disposed instead of the attenuation member 402 and an attenuation member 432 is disposed. Therefore, the same reference numerals are given to configurations common to the representative example of the fourth embodiment, and detailed description thereof is omitted.

  In the laser measurement apparatus 200 according to the present embodiment, a mirror 401 that further reflects the laser light reflected by the light guide mirror 290 (light guide member) is provided. The mirror 401 reflects the vertical laser beam reflected by the light guide mirror 290 in the horizontal direction. Furthermore, a mirror 431 is disposed on the opposite side of the mirror 401 in the front-rear direction (specifically, the side on which the laser light from the mirror 401 travels). The mirror 431 guides the laser beam reflected from the mirror 401 in the vertical direction so as to go upward. An attenuation member 432 that attenuates the laser light from the mirror 431 is provided at a position adjacent to the upper wall portion 205a. The attenuation member 432 can have the same configuration as the attenuation member 402 of FIG. In the present embodiment, the mirror 401 and the mirror 431 correspond to an example of “light guiding unit”, and the laser light guided by the light guide mirror 290 is guided to enter the attenuation member 432.

[Fifth Embodiment]
Next, a fifth embodiment will be described with reference to FIG.
The fifth embodiment is different from the second embodiment in that a part of the laser measuring apparatus 200 according to the second embodiment is changed. Therefore, in the following description, the same reference numerals as those in the second embodiment are given to components common to the laser measurement apparatus 200 of the second embodiment, and detailed description thereof is omitted.

  As shown in FIG. 29, the laser measurement apparatus 200 according to the fifth embodiment is mainly provided with a through hole 501 in the lower wall portion 205b, and the light from the light guide mirror 290 is led out of the case. The second embodiment is different from the second embodiment, and the other portions are the same as those of the laser measuring apparatus 200 described in the second embodiment.

A laser measurement apparatus 200 according to the fifth embodiment includes a case 203 as in the second embodiment, and the case 203 accommodates a rotation deflection mechanism 240, a light guide mirror 290, and the like. A through hole 501 is formed in the case 203 at a position deviating from the scanning path of the laser beam from the concave mirror 241 (specifically, a position directly below the light guide mirror 290 in the lower wall portion 205b). The light guide mirror 290 reflects the laser light toward the through hole 501, and the laser light reflected by the light guide mirror 290 is guided to the outside of the case 203 through the through hole 501. Yes.
[First Modification of Fifth Embodiment]
Next, Modification Example 1 of the fifth embodiment will be described.
The first modification of the fifth embodiment shown in FIG. 30 mainly differs from the fifth embodiment in that a through hole 511 is provided in the rear wall portion 205d instead of the lower wall portion 205b, and a mirror 512 is provided. It is different from the representative example, and other parts are the same as the laser measuring apparatus 200 (FIG. 30) described in the representative example.

  The laser measurement apparatus 200 according to the modification 1 also includes a case 203 as in the second embodiment, and the case 203 accommodates the rotation deflection mechanism 240, the light guide mirror 290, and the like. A through hole 511 is formed in the case 203 at a position deviating from the scanning path of the laser beam from the concave mirror 241 (specifically, a position just behind the mirror 512 in the rear wall portion 205d). In this configuration, the light guide mirror 290 reflects the laser light from the concave mirror 241 directly below, and the mirror 512 reflects the laser light from the light guide mirror 290 to the through hole 511 side. The laser light reflected by the light guide mirror 290 and the mirror 512 is guided to the outside of the case 203 through the through hole 511. In the first modification, the mirror 512 corresponds to an example of “light guiding means”, and the rotational position of the concave mirror 241 is in the “predetermined rotational range” (the rotational range in which the laser light enters the light guide mirror 290). Sometimes, the laser beam guided by the light guide mirror 290 functions to guide the outside of the case 203 through the through hole 511.

[Sixth Embodiment]
Next, a sixth embodiment will be described with reference to FIGS.
The fifth embodiment is different from the second embodiment in that a part of the laser measuring apparatus 200 according to the second embodiment is changed. Therefore, in the following description, the same reference numerals as those in the second embodiment are given to components common to the laser measurement apparatus 200 of the second embodiment, and detailed description thereof is omitted.

  As shown in FIG. 31, the laser measurement apparatus 200 according to the sixth embodiment is different from the second embodiment mainly in that the light guide mirror 290 is omitted and the reference portion 601 is provided. This part is the same as the laser measuring apparatus 200 described in the second embodiment.

  In the laser measurement apparatus 200 shown in FIG. 31, scanning is performed with laser light from the concave mirror 241 at a predetermined position on the rear wall portion 205d (specifically, a scanning path of laser light when the concave mirror 241 is in a predetermined rotation range). A reference unit 601 is provided that generates specific reflected light when irradiated.

  As shown in FIG. 32A, the reference portion 601 has a reflecting surface arranged on the scanning path of the laser beam from the concave mirror 241. When the concave mirror 241 is in a predetermined rotation range, the concave mirror The laser beam from 241 functions to reflect on the reflecting surface and be received by the photodiode 20 via the concave mirror 241. The reference portion 601 is configured with a predetermined low reflectance and reflects the first reflected light with respect to the laser light, and is configured to have a higher reflectance than the low reflectance portion 601a and the laser light. On the other hand, it includes at least a high reflectance part 601b that reflects the second reflected light. The low reflectivity portion 601a is configured in a bar shape (more specifically, a black bar shape) along a direction (specifically, a vertical direction) intersecting the scanning direction of the laser light, and a plurality of low reflectivity portions 601a are formed. They are arranged side by side at a predetermined interval. The high reflectivity part 601b is disposed so as to be interposed around the low reflectivity part 601a and between the low reflectivity parts 601a.

  In such a configuration, in the present embodiment, in the rotation range of the deflecting unit 41, the received light amount detected by the “received light amount detecting unit” is in the first received light amount state corresponding to the low reflectance part 601a. The rotation range and the second rotation range in which the received light amount detected by the “received light amount detection means” is in the second received light amount state according to the high reflectance part 601b are specified. Specifically, a threshold value for distinguishing between the first light receiving state and the second light receiving state is used, and the light reception waveform from the low reflectance portion 601a is lower than this threshold value, and the light reception waveform from the high reflectance portion 601b. Exceeds this threshold. Therefore, by specifying the rotation range in which the region above and below the threshold is repeated, the rotation range (predetermined rotation range) incident on the reference portion 601 can be specified, and this predetermined rotation After the range is specified, the reference position can be determined by the same method as in the second embodiment. The configuration of the reference portion is not limited to the configuration of FIG. 32A, and may include a single low reflectance portion 602a as shown in FIG.

[Modification 1 of the sixth embodiment]
Next, Modification Example 1 of the sixth embodiment will be described with reference to FIGS. 33 and 34.
The laser measuring apparatus 200 according to the modified example 1 is different from the representative example shown in FIG. 31 or the like in that a reference unit 611 is provided instead of the reference unit 601, and other than that is the same as the above representative example. In this example, as shown in FIG. 33, a slit 612a configured in a longitudinal direction (long hole shape) in a longitudinal direction (a direction along the central axis 242a) at a position away from the inner wall surface 613 in the rear wall portion 205d. However, a plurality of slit members 612 (FIG. 34A) are provided so as to be arranged at predetermined intervals in the scanning direction of the laser beam.

  The outer surface 612 b of the slit member 612 has a higher reflectance than the inner wall surface 613 of the rear wall portion 205 d of the case 203. That is, a part of the inner wall surface 613 (a position irradiated with laser light through the slit 612a) corresponds to the low reflectance part, and the outer surface of the slit member 612 (a concave mirror in the slit member 612 configured in a plate shape). 612b (outer surface facing the 241 side) corresponds to the high reflectance portion. In this configuration, the laser beam is moved in the lateral direction (direction orthogonal to the longitudinal direction of the slit) around each central position of the slit members 612 arranged side by side, and the laser beam is positioned at each slit 612a. When the laser beam passes through the slit 612a, the laser beam passed therethrough is reflected by the inner wall surface 613 disposed behind the slit 612a, and this reflected light (reflected light having a small amount of light) is received by the photodiode 20 via the concave mirror 241. Become. On the other hand, when the light is applied to the position of the outer surface 612 b of the slit member, the reflected light from the outer surface 612 b (reflected light having a larger amount of light than the reflected light from the inner wall surface 613) passes through the concave mirror 241 to the photodiode 20. Light will be received. Even in this configuration, in the rotation range of the deflecting unit 41, the amount of received light detected by the “received light amount detecting unit” corresponds to the low reflectance portion (the portion where the laser light enters through the slit 612a in the inner wall surface 613). The first rotation range in which the first received light amount state is set, and the received light amount detected by the “received light amount detecting means” is the second received light amount state corresponding to the high reflectivity portion (the outer surface 612b of the slit member 612). 2 rotation ranges are specified. Specifically, a threshold value for distinguishing between the first light receiving state and the second light receiving state is used, and the light reception waveform from the low reflectance part is lower than the threshold value, and the light reception waveform from the high reflectance part is used. Exceeds this threshold. Therefore, by specifying a rotation range in which an area exceeding and below such a threshold is repeated, a rotation range (predetermined rotation range) incident on the reference portion 611 can be specified, and this predetermined rotation After the range is specified, the reference position can be determined by the same method as in the second embodiment. Note that the configuration of the slit member of the reference portion is not limited to the configuration of FIG. 34A, and as shown in FIG. 34B, a single slit 614a is provided and the periphery thereof is configured as the outer surface 614b. There may be.

[Other Embodiments]
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention.

  In the example of FIG. 1, the window-shaped light guide 4 is provided over the entire circumference around the deflection unit 41, but the light guide is provided on one side (for example, the reference member 80 side) of the deflection unit 41. It may not be formed.

  In the first embodiment, the example using the reference member 80 provided with the flat reflecting surface 81 has been shown. However, the configuration of the reference member is not limited to this, and for example, as shown in FIGS. It may be. 7A is an explanatory diagram for explaining a first modification of the reference member, and FIG. 7B is an explanatory diagram for explaining a second modification of the reference member. In FIG. 7A, the inclination angle of the reflection surface 281a on one side in the width direction (end portion 282 side) and the inclination angle of the reflection surface on the other side in the width direction (end portion 283 side) are different. When the portion 41 is at the reference position, the laser light is incident near the boundary between the reflecting surfaces 281a and 281b. In FIG. 7B, the reflecting surface 381 is curved from one end 382 to the other end 383. In these configurations, the “predetermined rotation range” may be detected as in the first embodiment, and the “maximum received light amount rotation position” in the “predetermined rotation range” may be set as the “reference position”.

  The first embodiment exemplifies a configuration in which the reflecting surface 81 is configured to be flat and the laser beam from the deflecting unit 41 is perpendicularly incident on the center position in the width direction of the reflecting surface 81 when the deflecting unit 41 is at the reference position. However, it is not limited to this. For example, as shown in FIG. 8, the laser beam may not be perpendicularly incident on the reflection surface 481 (flat reflection surface) in the entire region of the “predetermined rotation range”. Also in this case, the “predetermined rotation range” can be detected as in the above embodiment. Further, in the above embodiment, the rotation position where the amount of received light is the maximum in the “predetermined rotation range” detected by the “predetermined rotation range detection means” is detected as the reference position, but in the example of FIG. Similarly to the above-described embodiment, the rotation position (the rotation position when the laser beam is incident near the end 483) where the amount of received light is maximum in the “predetermined rotation range” may be set as the reference position. A configuration in which the rotation position at which the amount of received light is minimum in the “rotation range” (the rotation position when the laser light enters the vicinity of the end 482) is set as the “reference position” may be adopted.

  In the first and third embodiments, the process of determining whether or not the “maximum received light amount rotation position” detected in S4 of FIG. 4 corresponds to the “corresponding rotation position” is performed. The determination process may be omitted. For example, the processing of S5 and S6 in FIG. 4 may be omitted, and the maximum received light amount rotation position detected in S4 may be set as the “reference position”.

  In the first embodiment, an area where the distance value is stable within the range between the first threshold value and the second threshold value is detected as the “predetermined rotation range”, but the present invention is not limited to this. For example, a rotation range in which the distance value is less than a predetermined threshold may be set as a “predetermined rotation range”.

  In the second embodiment and the modification thereof, the received light amount detected by the control circuit 70 is a predetermined high received light amount state based on the light from the light receiving walls 296a to 296f, and the laser light L1 is transmitted by the light guide member. Any structure can be used as long as it can detect a state of switching with a predetermined low light reception amount state when guided. For example, the light receiving wall is at least a part (for example, each of the wall portions (205a to 205f) constituting the case 203 (for example, , Only on the inner rear wall portion 296d of the rear wall portion 205d).

  In the second embodiment and the modification thereof, the rotation position at which the predetermined high light reception amount state is switched to the predetermined low light reception amount state is detected as the “reference position”. The rotation position at which the amount state is switched to the high light reception amount state may be detected as the “reference position”.

  In the first modification of the second embodiment, an attenuation member 299 may be further provided below the prism 298.

  In the second embodiment and the modifications thereof, as shown in FIGS. 17A and 17B, an opening 203 a may be further provided in the lower wall portion 205 b of the case 203. Thus, even when the opening 203a is provided in the case 203, the laser beam L1 from the concave mirror 241 is emitted to the outside of the case 203 through the opening 203a, so that the position is removed from the concave mirror 241 and the photodiode 20. The laser beam L1 can be guided to.

  In the second embodiment and the modifications thereof, the light guide member may be configured by a prism mirror 300 that is configured to be partly mirror-reflective, as shown in FIGS. As described above, the light guide member is constituted by the prism mirror 300, and the laser light L 1 is reflected and refracted by the prism reflection surface 300 a of the prism mirror 300 into the prism mirror 300, thereby causing the light from the concave mirror 241 and the photodiode 20. It is also possible to guide the laser beam L1 to the off position.

  In the second and fourth embodiments, an example of the attenuation member has been described. However, an optical fiber cable (hereinafter also referred to as an optical fiber) 701 as shown in FIG. 35 may be used as the attenuation member. In this example, in addition to the same configuration as that of the second embodiment, one end portion 702 of the optical fiber 701 is further arranged at the destination of the laser light from the light guide mirror 290. In this way, the laser light from the light guide mirror 290 is incident from one end side, and the light incident from the one end side is guided to the other end side. As the optical fiber 701, it is desirable to use a light transmission efficiency that is slightly low (for example, about 85%). Although the illustration of the end portion (other end portion) opposite to the one end portion 702 in the optical fiber 701 is omitted, it is desirable that the other end portion does not face the concave mirror 241 side. The configuration may be such that it faces the wall portion 205d, or may face the lower wall portion 296b. Further, the optical fiber 701 is configured to be long to some extent, and the rotation position (rotation angle) of the concave mirror 241 when the laser light enters the one end 702 from the light guide mirror 290 and the laser from the other end of the optical fiber 701. You may make it produce an angle difference with the rotation position (rotation angle) of the concave mirror 241 when light is derived | led-out. The other end of the optical fiber 701 is led out of the case 203 through a hole (not shown) formed in the case 203, and the laser beam is led out of the case 203 through the other end. It may be. Or you may shield the other end side of the optical fiber 701 so that light may not lead out. Further, an optical fiber 701 may be used instead of the attenuation members 402 and 432 used in the fourth embodiment.

DESCRIPTION OF SYMBOLS 1,200 ... Laser measuring apparatus 10 ... Laser diode (laser beam generation means)
20 ... Photodiode (light receiving means)
40... Turning deflection mechanism (turning deflection means)
41 ... Deflection part (deflection means)
42a, 242a ... center shaft 50 ... motor (drive means)
70: Control circuit (distance calculation means, received light amount detection means, reference position detection means, relative position detection means, direction detection means)
205a ... Upper wall portion 205b ... Lower wall portion 205c ... Front wall portion 205d ... Rear wall portion 205e, 205f ... Side wall portions 80, 280, 380, 480 ... Reference members 81, 281, 381, 481 ... Reflecting surface 241 ... Concave mirror ( Deflection means)
3, 203 ... Case 203a ... Opening 290 ... Light guide mirror (light guide member)
290a: Light guide reflection surface 296: Light receiving wall 296a: Inner upper wall (light receiving wall)
296b ... Inner lower wall (light receiving wall)
296c ... Inner front wall (light receiving wall)
296d ... Inner rear wall (light receiving wall)
296e, 296f ... Inner side wall (light receiving wall)
298 ... Prism (light guide member)
298a ... incident surface 298b ... output surface 299 ... attenuating member 299a ... light guide 299b ... inner wall surface 300 ... prism mirror 300a ... prism reflecting surface 701 ... optical fiber cable

Claims (19)

Laser light generating means for generating laser light;
A light receiving means for receiving reflected light generated when the laser light is generated by the laser light generating means and reflected by a detection object;
Rotating means comprising a deflecting means configured to be rotatable about a predetermined central axis, deflecting the laser light toward the space by the deflecting means, and deflecting the reflected light toward the light receiving means Deflection means;
Drive means for rotationally driving the deflection means of the rotation deflection means;
A case for accommodating at least the turning deflection means;
The reflective surface is disposed inside the inner wall of the case and disposed on the scanning path of the laser light from the deflecting unit, and the deflecting unit is in the predetermined rotation range when the deflecting unit is in the predetermined rotation range. A reference member that reflects laser light on the reflecting surface and receives the light on the light receiving means via the deflecting means;
Distance value calculating means for calculating a distance value to the arrival position of the laser beam for each rotation position of the deflecting means;
A received light amount detecting means for detecting a received light amount at the light receiving means for each rotation position of the deflecting means;
A rotation position in which the distance value detected by the distance value calculation means satisfies a predetermined distance condition and the light reception amount detected by the light reception amount detection means satisfies a predetermined light reception amount condition is detected as a reference position. A reference position detecting means;
A relative position detecting means for detecting a relative rotation position of the deflecting means with reference to the reference position detected by the reference position detecting means;
Direction detecting means for detecting the direction of the detection object based on the detection result of the relative rotation position by the relative position detecting means when the reflected light is received by the light receiving means;
A laser measuring apparatus comprising: The reference position detecting means includes
Based on a calculation result by the distance value calculation means, comprising a predetermined rotation range detection means for detecting a predetermined rotation range in which the distance value satisfies a specified condition corresponding to the position or shape of the reference member;
Based on the detection result of the received light amount by the received light amount detection means, a rotation position where the received light amount is in a specified state in the predetermined rotation range detected by the predetermined rotation range detection means is detected as the reference position. The laser measurement apparatus according to claim 1, wherein: The reference member is configured such that a distance from an emission position of the laser light in the deflecting unit to an irradiation path of the laser light on the reflection surface is within a predetermined distance range,
The predetermined rotation range detection means detects, based on the calculation result by the distance value calculation means, a rotation range in which the variation of the distance value falls within a predetermined threshold value as the predetermined rotation range. 2. The laser measuring device according to 2. The reference position detecting means includes
Based on the data for a plurality of circumferences of distance values obtained for each rotation position by the distance value calculating means, the distance values obtained for the plurality of circumferences satisfy a predetermined statistical condition corresponding to the position or shape of the reference member. A predetermined rotation range detecting means for detecting the predetermined rotation range;
Based on the detection result of the received light amount by the received light amount detection means, a rotation position where the received light amount is in a specified state in the predetermined rotation range detected by the predetermined rotation range detection means is detected as the reference position. The laser measurement apparatus according to claim 1, wherein: The reference member is configured such that a distance from an emission position of the laser light in the deflecting unit to an irradiation path of the laser light on the reflection surface is within a predetermined distance range,
The predetermined rotation range detecting unit is configured to determine a rotation range in which the variation of the distance value falls within a predetermined threshold based on data of a plurality of distance values obtained for each rotation position by the distance value calculating unit. The laser measuring device according to claim 4, wherein the laser measuring device is detected as a rotation range. The reflection surface of the reference member is configured as a plane on which the laser light from the deflection unit is incident substantially perpendicularly when the deflection unit is in the reference position;
3. The reference position detecting means detects, as the reference position, a turning position at which the amount of received light reaches a maximum value in the predetermined turning range detected by the predetermined turning range detecting means. The laser measurement device according to claim 5. The reference member has the laser beam from the deflecting unit positioned at the reference position incident on a predetermined position in the width direction of the reflecting surface when the moving direction of the laser beam incident on the reflecting surface is defined as the width direction. Made up of
The reference position detecting means includes
In the predetermined rotation range detected by the predetermined rotation range detection means, the received light amount maximum rotation position where the received light amount becomes the maximum value is detected, and
Determining means for determining whether the detected light reception amount maximum rotation position is a corresponding rotation position corresponding to the predetermined position in the width direction;
When the determination means determines that the light reception amount maximum rotation position corresponds to the corresponding rotation position, the light reception amount maximum rotation position is detected as the reference position;
When it is determined that the maximum received light amount rotation position does not correspond to the corresponding rotation position, the predetermined rotation range is detected again by the predetermined rotation range detection means and is detected again. Whether the light reception amount maximum rotation position in the predetermined rotation range is detected again, and whether or not the determination unit further detects the light reception amount maximum rotation position again corresponds to the corresponding rotation position. The laser measurement apparatus according to claim 6, wherein the determination process is retried. Laser light generating means for generating laser light;
A light receiving means for receiving reflected light generated when the laser light is generated by the laser light generating means and reflected by a detection object;
A deflection unit configured to be rotatable about a predetermined central axis is provided, and the laser beam is deflected toward the space by the deflection unit when the rotation range of the deflection unit is within a predetermined detectable range. Rotating deflection means for deflecting the reflected light toward the light receiving means;
Drive means for rotationally driving the deflection means of the rotation deflection means;
A case for accommodating at least the turning deflection means;
The deflection is arranged on the inner side of the inner wall of the case on the scanning path of the laser light from the deflection unit and the deflection unit is in a predetermined rotation range outside the detectable range. A light guide member for guiding the laser light from the means to a position deviated from the deflecting means and the light receiving means;
A light receiving wall surface for receiving the laser light from the deflecting means when the turning position of the deflecting means is outside the detectable range and outside the predetermined turning range; A light receiving wall arranged to cause the light receiving means to receive at least part of the light reflected by the wall surface via the deflecting means;
Distance value calculating means for calculating a distance value to the arrival position of the laser beam for each rotation position of the deflecting means;
A received light amount detecting means for detecting a received light amount at the light receiving means for each rotation position of the deflecting means;
A reference position detection means for detecting, as a reference position, a rotation position that satisfies a predetermined low light reception quantity condition based on the light reception quantity detected by the light reception quantity detection means being guided by the light guide member;
A relative position detecting means for detecting a relative rotation position of the deflecting means with reference to the reference position detected by the reference position detecting means;
Detection of the relative rotation position by the relative position detection means when the reflected light from the detection object is received by the light receiving means when the rotation position of the deflection means is in the detectable range. Direction detection means for detecting the direction of the detection object based on the result;
A laser measuring apparatus comprising:   The laser measuring apparatus according to claim 8, wherein the light receiving wall diffuses and reflects the laser light on the light receiving wall surface.   In the reference position detection means, the state of the received light amount detected by the received light amount detection means is a predetermined high received light amount state based on light from the light receiving wall, and the laser light is guided by the light guide member. 10. The laser measurement apparatus according to claim 8, wherein a rotation position of the deflecting unit when switching between the predetermined low received light amount state is detected as the reference position. 11. An attenuation member that attenuates the laser beam is provided outside the scanning path of the laser beam,
11. The laser measurement apparatus according to claim 8, wherein the light guide member guides the laser light toward the attenuation member. 11. An attenuation member arranged to attenuate light incident outside the scanning path of the laser light;
A light guiding means for guiding the laser light guided by the light guide member to the attenuation member when the rotation position of the deflection means is within the predetermined rotation range;
The laser measurement apparatus according to claim 8, further comprising: The attenuation member comprises an optical fiber cable,
The laser light is incident from one end side of the optical fiber cable, and the light incident from the one end side is guided to the other end side of the optical fiber cable,
The laser measurement device according to claim 11 or 12, wherein the laser beam is configured to attenuate within the optical fiber cable. Comprising at least the turning deflection means and the light guide member, and having a case in which a through hole is formed at a position deviating from the scanning path of the laser beam;
11. The laser measuring device according to claim 8, wherein the light guide member guides the laser light to the outside of the case through the through hole. A case in which at least the rotation deflection unit and the light guide member are accommodated, and a through hole is formed at a position off the scanning path of the laser beam;
Light that is housed in the case and guides the laser light guided by the light guide member to the outside of the case through the through-hole when the rotational position of the deflecting means is within the predetermined rotational range. Guiding means;
The laser measurement apparatus according to claim 8, further comprising:   The said light guide member is comprised by the mirror, The said laser beam is specularly reflected in the position remove | deviated from the said deflection | deviation means and the said light-receiving means, The Claim 15 characterized by the above-mentioned. Laser measuring device.   The said light guide member is comprised by the prism, and refracts the said laser beam toward the position remove | deviated from the said deflection | deviation means and the said light-receiving means, The Claim 15 characterized by the above-mentioned. Laser measuring device.   The said light guide member is arrange | positioned so that the said laser beam which injects into the said light guide member from the said deflection | deviation means may be guide | induced to the direction substantially orthogonal to an incident direction. The laser measurement device according to any one of 17. Laser light generating means for generating laser light;
A light receiving means for receiving reflected light generated when the laser light is generated by the laser light generating means and reflected by a detection object;
Rotating means comprising a deflecting means configured to be rotatable about a predetermined central axis, deflecting the laser light toward the space by the deflecting means, and deflecting the reflected light toward the light receiving means Deflection means;
Drive means for rotationally driving the deflection means of the rotation deflection means;
A reflection surface disposed in the apparatus and disposed on a scanning path of the laser beam from the deflection unit, and the laser beam from the deflection unit when the deflection unit is within a predetermined rotation range; A reference portion that is reflected by a reflecting surface and received by the light receiving means via the deflecting means;
Distance value calculating means for calculating a distance value to the arrival position of the laser beam for each rotation position of the deflecting means;
A received light amount detecting means for detecting a received light amount at the light receiving means for each rotation position of the deflecting means;
A rotation position in which the distance value detected by the distance value calculation means satisfies a predetermined distance condition and the light reception amount detected by the light reception amount detection means satisfies a predetermined light reception amount condition is detected as a reference position. A reference position detecting means;
A relative position detecting means for detecting a relative rotation position of the deflecting means with reference to the reference position detected by the reference position detecting means;
With
The reference unit is disposed in a range outside the detectable rotation range in which the laser light is irradiated outside the apparatus, is configured with a predetermined low reflectance, and reflects the first reflected light with respect to the laser light. Comprising at least a low reflectance part, and a high reflectance part configured to have a higher reflectance than the low reflectance part and reflecting the second reflected light with respect to the laser light,
The reference position detection unit includes a first rotation range in which the received light amount detected by the received light amount detection unit is in a first received light amount state corresponding to the low reflectance part in the rotation range of the deflection unit. The received light amount detected by the received light amount detecting means specifies a second rotation range in which the second received light amount state according to the high reflectance part is specified, and the first rotation range and the second rotation range. A laser measurement apparatus characterized by identifying a reference portion irradiation range in which the rotation range is aligned and detecting a predetermined position of the reference portion irradiation range as a reference position.

Images