CN101187004A - 复合多模式等离子体表面处理装置 - Google Patents
复合多模式等离子体表面处理装置 Download PDFInfo
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- CN101187004A CN101187004A CNA2007101448566A CN200710144856A CN101187004A CN 101187004 A CN101187004 A CN 101187004A CN A2007101448566 A CNA2007101448566 A CN A2007101448566A CN 200710144856 A CN200710144856 A CN 200710144856A CN 101187004 A CN101187004 A CN 101187004A
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN200710144856A CN100584991C (zh) | 2007-12-19 | 2007-12-19 | 复合多模式等离子体表面处理装置 |
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CN200710144856A CN100584991C (zh) | 2007-12-19 | 2007-12-19 | 复合多模式等离子体表面处理装置 |
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CN101187004A true CN101187004A (zh) | 2008-05-28 |
CN100584991C CN100584991C (zh) | 2010-01-27 |
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CN200710144856A Expired - Fee Related CN100584991C (zh) | 2007-12-19 | 2007-12-19 | 复合多模式等离子体表面处理装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110039247A (ko) * | 2008-06-11 | 2011-04-15 | 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. | 멀티 모드 이온 소스를 제공하기 위한 기술들 |
CN102936714A (zh) * | 2012-12-03 | 2013-02-20 | 哈尔滨工业大学 | 基于大面积强流脉冲电子束复合处理制备硬质碳化物陶瓷涂层的装置及其制备方法 |
CN111748776A (zh) * | 2019-03-28 | 2020-10-09 | 北京辰融科技有限责任公司 | 一种紧凑高效异型件超厚膜层设备 |
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2007
- 2007-12-19 CN CN200710144856A patent/CN100584991C/zh not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110039247A (ko) * | 2008-06-11 | 2011-04-15 | 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. | 멀티 모드 이온 소스를 제공하기 위한 기술들 |
CN102105966A (zh) * | 2008-06-11 | 2011-06-22 | 瓦里安半导体设备公司 | 提供多模式离子源的技术 |
CN102105966B (zh) * | 2008-06-11 | 2014-05-07 | 瓦里安半导体设备公司 | 离子植入设备、多模式离子源及多模式中的离子植入方法 |
KR101595100B1 (ko) | 2008-06-11 | 2016-02-17 | 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. | 멀티 모드 이온 소스를 제공하기 위한 기술들 |
CN102936714A (zh) * | 2012-12-03 | 2013-02-20 | 哈尔滨工业大学 | 基于大面积强流脉冲电子束复合处理制备硬质碳化物陶瓷涂层的装置及其制备方法 |
CN102936714B (zh) * | 2012-12-03 | 2014-06-11 | 哈尔滨工业大学 | 基于大面积强流脉冲电子束复合处理制备硬质碳化物陶瓷涂层的装置及其制备方法 |
CN111748776A (zh) * | 2019-03-28 | 2020-10-09 | 北京辰融科技有限责任公司 | 一种紧凑高效异型件超厚膜层设备 |
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Publication number | Publication date |
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CN100584991C (zh) | 2010-01-27 |
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Owner name: LIAONING BEIYU VACUUM TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: HARBIN INDUSTRY UNIVERSITY Effective date: 20130531 |
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Effective date of registration: 20130531 Address after: 110045, 5-2-5, Dadong Road, Shenyang, Liaoning Patentee after: Liaoning Beiyu Vacuum Technology Co., Ltd. Address before: 150001 Harbin, Nangang, West District, large straight street, No. 92 Patentee before: Harbin Institute of Technology |
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