CN100584991C - 复合多模式等离子体表面处理装置 - Google Patents
复合多模式等离子体表面处理装置 Download PDFInfo
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- CN100584991C CN100584991C CN200710144856A CN200710144856A CN100584991C CN 100584991 C CN100584991 C CN 100584991C CN 200710144856 A CN200710144856 A CN 200710144856A CN 200710144856 A CN200710144856 A CN 200710144856A CN 100584991 C CN100584991 C CN 100584991C
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Application Number | Priority Date | Filing Date | Title |
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CN200710144856A CN100584991C (zh) | 2007-12-19 | 2007-12-19 | 复合多模式等离子体表面处理装置 |
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CN200710144856A CN100584991C (zh) | 2007-12-19 | 2007-12-19 | 复合多模式等离子体表面处理装置 |
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CN101187004A CN101187004A (zh) | 2008-05-28 |
CN100584991C true CN100584991C (zh) | 2010-01-27 |
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CN200710144856A Expired - Fee Related CN100584991C (zh) | 2007-12-19 | 2007-12-19 | 复合多模式等离子体表面处理装置 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US7812321B2 (en) * | 2008-06-11 | 2010-10-12 | Varian Semiconductor Equipment Associates, Inc. | Techniques for providing a multimode ion source |
CN102936714B (zh) * | 2012-12-03 | 2014-06-11 | 哈尔滨工业大学 | 基于大面积强流脉冲电子束复合处理制备硬质碳化物陶瓷涂层的装置及其制备方法 |
CN111748776A (zh) * | 2019-03-28 | 2020-10-09 | 北京辰融科技有限责任公司 | 一种紧凑高效异型件超厚膜层设备 |
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CN101187004A (zh) | 2008-05-28 |
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Owner name: LIAONING BEIYU VACUUM TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: HARBIN INDUSTRY UNIVERSITY Effective date: 20130531 |
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Free format text: CORRECT: ADDRESS; FROM: 150001 HARBIN, HEILONGJIANG PROVINCE TO: 110045 SHENYANG, LIAONING PROVINCE |
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Effective date of registration: 20130531 Address after: 110045, 5-2-5, Dadong Road, Shenyang, Liaoning Patentee after: Liaoning Beiyu Vacuum Technology Co., Ltd. Address before: 150001 Harbin, Nangang, West District, large straight street, No. 92 Patentee before: Harbin Institute of Technology |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100127 Termination date: 20171219 |
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CF01 | Termination of patent right due to non-payment of annual fee |