CN101182132B - Low-temperature solar energy selective absorption coating and preparation method thereof - Google Patents
Low-temperature solar energy selective absorption coating and preparation method thereof Download PDFInfo
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- CN101182132B CN101182132B CN2007101904836A CN200710190483A CN101182132B CN 101182132 B CN101182132 B CN 101182132B CN 2007101904836 A CN2007101904836 A CN 2007101904836A CN 200710190483 A CN200710190483 A CN 200710190483A CN 101182132 B CN101182132 B CN 101182132B
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Abstract
A low temperature solar energy selective absorption coating includes preparing Al or Cu of 0.02-0.06*10<-6>m thick on a glass surface as a substrate, depositing Ge-C of 0.03*10<-6>m-0.15*10<-6>m thick on the substrate as an infrared antireflection layer and preparing an Al-N composite absorbing material layer on the infrared antireflection layer. The invention adds the infrared antireflection layer through the novel solar energy adsorption coating, which is prepared through a multi-target magnetron sputtering technology. The coating is provided with a perfect property of absorbing solar long spectrums within the wavelength range of 0.3-2.5 Mu m. What is more important in that the substrate of the absorption coating is provided with high adsorption rate, good reflection effect on infrared rays which are longer than 8 Mu m and high permeability on infrared rays which are shorter than 8 Mu m. And when the temperature in a vacuum tube rises to 90-100 degree Celsius, the emission rate of the membrane layer can rapidly ascend to increase the heat losses of a heat collector and avoid a system to be overheated.
Description
Technical field
The present invention relates to a kind of solar utilization technique, particularly a kind of low-temperature solar energy selective absorption coating the invention still further relates to a kind of preparation method of this coating.
Background technology
Professor Yin Zhiqiang of Tsing-Hua University had invented a kind of solar selectively absorbing coating (ZL85100142) in 1985, and solar vacuum-tube water heater obtains popularizing rapidly in China, and the solar water heater installation of China in 2006 is 1,800 ten thousand m
2, recoverable amount is 9,000 ten thousand m
2, installation in 2005 is global 75.8%, makes China become genuine solar thermal utilization big country, wherein accounting for Chinese market more than 90% is vacuum tube collector.But (except that China) in the international market, the heat collector that accounts for market 90% but is a flat plate collector, the contrast domestic and international market can find that the vacuum tube solar heating element of China is mainly used to produce the domestic hot-water.Each household 1～2m
2, join a water tank, but abroad, major part being the hot water heating composite system, each household needs tens to twenties m approximately
2Heat collector, satisfying the requirement of winter heating, but to summer, no heating demand, illumination is good again, the getable energy of total system is higher than required energy, if use vacuum tube collector, and the specific absorption height of valve tube, invention α ≈ 0.93 as the professor of the Yin Dynasty, emittance is hanged down ε ≈ 0.06 (100 ℃), and total system is very easily overheated, and the safety of user and system is caused great hidden danger.
Summary of the invention
The technical problem to be solved in the present invention is at the deficiencies in the prior art, has proposed a kind of low-temperature solar energy selective absorption coating that prevents system overheat, and when temperature was too high, the emission of rete increased the heat collector heat waste than the meeting fast rise, prevents system overheat.
Another technical problem that will solve of the present invention is a kind of preparation method who has proposed this coating.
The technical problem to be solved in the present invention is achieved through the following technical solutions, and a kind of low-temperature solar energy selective absorption coating is characterized in: be included in glass surface and prepare thickness 0.02～0.06 * 10
-6The Al of m or Cu as basic unit, in this basic unit deposit thickness 0.03 * 10
-6M～0.15 * 10
-6The Ge-C of m as the infrared anti-reflection layer, on the infrared anti-reflection layer refabrication Al-N compound absorbing material layer.
The technical problem to be solved in the present invention can also come to realize that further described Al-N compound absorbing material layer comprises absorption layer and anti-reflection layer by the following technical programs.
Another technical problem that will solve of the present invention is a kind of preparation method who discloses this coating, be characterized in: when adopting Al as basic unit, utilize two target magnetic control sputtering technology, two target electrodes of Ge and Al have been installed in a sputter vacuum chamber, between two targets isolated screen is arranged, 1, at first makes Al basic unit, under pure argon Ar environment, in Glass tubing outer wall deposition one deck Al basic unit; 2, feed CO or C by ventpipe then
2H
2Gas, flow are 30～50sccm, and C and germanium Ge are deposited on and form Ge-C infrared anti-reflection layer in the Al basic unit; 3, stop logical CO or C then
2H
2, feed N2 again and change the N2 flow gradually, on the infrared anti-reflection layer, form Al-N compound absorbing material layer.
The present invention is with the new type solar energy absorber coatings of multi-target magnetic control sputtering technology preparation, increased the infrared anti-reflection layer, compared with prior art, it is the absorption characteristic of the long spectrum excellence of the sun in 0.3～2.5 mu m range that this coating has wavelength, the basic unit that the more important thing is this absorber coatings has high specific absorption, far infrared more than the 8 μ m there is fine reflex action, but the far infrared below the 8 μ m there is very high perviousness, promptly when the temperature in the valve tube is elevated to 90 ℃～100 ℃, the emission of this absorber coatings is than the meeting fast rise, increase the heat collector heat waste, prevent system overheat.
Description of drawings
Fig. 1 is a coating structure sketch of the present invention.
Fig. 2 is the synoptic diagram of two target magnetic control sputterings.
Embodiment
A kind of low-temperature solar energy selective absorption coating is included in glass surface and prepares thickness 0.02～0.06 * 10
-6The Al of m or Cu as basic unit, in this basic unit deposit thickness 0.03 * 10
-6M～0.15 * 10
-6The Ge-C of m as the infrared anti-reflection layer, on the infrared anti-reflection layer refabrication aluminium nitrogen (Al-N) compound absorbing material layer.Aluminium nitrogen (Al-N) compound absorbing material layer comprises absorption layer and anti-reflection layer.
In the accompanying drawing: 1, glass inner tube, 2, the germanium target, 3, CO or C
2H
2Ventpipe, 4, vacuum chamber, 5, Ar and N
2Tracheae, 6, the aluminium target, 7, isolated screen, 8, anti-reflection layer, 9, absorption layer, 10, the infrared anti-reflection layer, 11, aluminum base layer, 12, glass.
A kind of preparation method of this coating is: when adopting Al as basic unit, utilize two target magnetic control sputtering technology, two target electrodes of Ge and Al have been installed in a sputter vacuum chamber, between two targets isolated screen is arranged, 1, at first make Al basic unit, under the pure argon environment, the pressure 10 that the sputter vacuum chamber is indoor
-2～10
-3P
a, the voltage of adding 300V for the Al target is in Glass tubing outer wall deposition one deck Al basic unit; 2, feed CO or C by ventpipe then
2H
2Gas, flow are 30～50sccm (standard milliliter per minute), and C and germanium Ge are deposited on and form Ge-C infrared anti-reflection layer in the Al basic unit; 3, stop logical CO or C then
2H
2, feed N again
2And change N gradually
2Flow forms the Al-N/Al coating for selective absorption, and thickness is 60～120nm, at last at pure N
2Form the Al-N anti-reflection layer under the condition, thickness is 30～80nm.
Claims (3)
1. a low-temperature solar energy selective absorption coating is characterized in that: be included in glass surface and prepare thickness 0.02～0.06 * 10
-6The Al of m or Cu as basic unit, in this basic unit deposit thickness 0.03 * 10
-6M～0.15 * 10
-6The Ge-C of m as the infrared anti-reflection layer, on the infrared anti-reflection layer refabrication Al-N compound absorbing material layer.
2. low-temperature solar energy selective absorption coating according to claim 1 is characterized in that: described Al-N compound absorbing material layer comprises absorption layer and anti-reflection layer.
3. a kind of preparation method of the described low-temperature solar energy selective absorption coating of claim 1, it is characterized in that: when adopting Al as basic unit, utilize two target magnetic control sputtering technology, two target electrodes of Ge and Al have been installed in a sputter vacuum chamber, between two targets isolated screen is arranged, 1, at first makes Al basic unit, under the pure argon environment, in Glass tubing outer wall deposition one deck Al basic unit; 2, feed CO or C by ventpipe then
2H
2Gas, C and Ge are deposited on and form Ge-C infrared anti-reflection layer in the Al basic unit; 3, stop logical CO or C then
2H
2, feed N again
2And change N gradually
2Flow forms Al-N compound absorbing material layer on the infrared anti-reflection layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101904836A CN101182132B (en) | 2007-11-27 | 2007-11-27 | Low-temperature solar energy selective absorption coating and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101904836A CN101182132B (en) | 2007-11-27 | 2007-11-27 | Low-temperature solar energy selective absorption coating and preparation method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN101182132A CN101182132A (en) | 2008-05-21 |
| CN101182132B true CN101182132B (en) | 2010-12-15 |
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| CN2007101904836A Active CN101182132B (en) | 2007-11-27 | 2007-11-27 | Low-temperature solar energy selective absorption coating and preparation method thereof |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110185728A1 (en) * | 2010-02-01 | 2011-08-04 | General Electric Company | High efficiency solar thermal receiver |
| GB201702478D0 (en) | 2017-02-15 | 2017-03-29 | Univ Of The West Of Scotland | Apparatus and methods for depositing variable interference filters |
| GB2559957A (en) | 2017-02-15 | 2018-08-29 | Univ Of The West Of Scotland | Infrared spectrophotometer |
| CN111470783A (en) * | 2020-03-30 | 2020-07-31 | 大族激光科技产业集团股份有限公司 | Glass shell manufacturing method, glass shell and laser equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4211210A (en) * | 1977-02-02 | 1980-07-08 | Exxon Research & Engineering Co. | High temperature solar absorber coating and method of applying same |
| CN1090308C (en) * | 1995-06-19 | 2002-09-04 | 澳大利亚悉尼大学 | Solar energy selective absorption surface coating |
| CN1414133A (en) * | 2001-10-25 | 2003-04-30 | 北京华瑞能科技发展有限责任公司 | Metal ceramic film |
| CN1613807A (en) * | 2004-12-10 | 2005-05-11 | 邹定国 | Metal ceramic film of embedding titanium or titanium alloy |
-
2007
- 2007-11-27 CN CN2007101904836A patent/CN101182132B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4211210A (en) * | 1977-02-02 | 1980-07-08 | Exxon Research & Engineering Co. | High temperature solar absorber coating and method of applying same |
| CN1090308C (en) * | 1995-06-19 | 2002-09-04 | 澳大利亚悉尼大学 | Solar energy selective absorption surface coating |
| CN1414133A (en) * | 2001-10-25 | 2003-04-30 | 北京华瑞能科技发展有限责任公司 | Metal ceramic film |
| CN1613807A (en) * | 2004-12-10 | 2005-05-11 | 邹定国 | Metal ceramic film of embedding titanium or titanium alloy |
Non-Patent Citations (2)
| Title |
|---|
| 宋建全等.GexC1-x薄膜在红外增透保护膜系设计和制备中的应用.红外与毫米波学报19 4.2000,19(4),266-268. |
| 宋建全等.GexC1-x薄膜在红外增透保护膜系设计和制备中的应用.红外与毫米波学报19 4.2000,19(4),266-268. * |
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| CN101182132A (en) | 2008-05-21 |
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Address after: 222243 Haining Industrial and Trade Park, Xinpu District, Lianyungang City, Jiangsu Province Patentee after: Sunrise Oriental Holdings Co., Ltd. Address before: 222243 Haining Industrial and Trade Park, Xinpu District, Lianyungang City, Jiangsu Province Patentee before: Richu Dongfang Solar Energy Co., Ltd. |