CN101178544A - Alignment unit and image recording apparatus using the same - Google Patents
Alignment unit and image recording apparatus using the same Download PDFInfo
- Publication number
- CN101178544A CN101178544A CNA2007100917877A CN200710091787A CN101178544A CN 101178544 A CN101178544 A CN 101178544A CN A2007100917877 A CNA2007100917877 A CN A2007100917877A CN 200710091787 A CN200710091787 A CN 200710091787A CN 101178544 A CN101178544 A CN 101178544A
- Authority
- CN
- China
- Prior art keywords
- camera
- aligned units
- recording medium
- mark
- image recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Disclosed is an image recording apparatus configured with: a first camera, mounted via a movement adjusting mechanism on one face side portion of a base member of an alignment unit for capturing a first mark provided on a recording medium; and a second camera, mounted via a movement adjusting mechanism on the other face side portion of the base member of the alignment unit for capturing the position of a second mark for positioning that, relative to the direction along the conveying direction, has been shifted by a predetermined small distance in the direction orthogonal to the conveying direction relative to the first mark provided on the recording medium. Further, an alignment unit that may be used in the apparatus is disclosed.
Description
Technical field
The present invention relates to comprise the aligned units and the image recording structure of a plurality of cameras, this image recording structure comes recording scheduled pattern by carrying out scan operation, when each light beam of the spatial modulator in being installed in record-header (two-dimensional light modulator) etc. is focused on by pixel ground of a pixel by optical element and is shone on the recording medium, by using this aligned units, error when the scoring table that recording medium is installed on record-header and its in the described pattern relatively moves is corrected, wherein, spatial modulator is to be used for according to view data (pattern data) device of a plurality of pixels of opening/closing optionally.
Background technology
Generally speaking, flat image recording structure (flat bed image recording apparatus) is used to the recording medium that exposes, and recording medium just for example is used for the substrate of printed circuit board (calling PWB in the following text) or flat-panel monitor (calling FPD in the following text).
In this flat image recording structure, by recording medium is installed on the scoring table, exposure-processed is carried out, and, in the main scanning direction movable recording media, by along the sliding rail moving recording platform that is placed on the platform (surface table), from the multiple beam of light source side according to always from the modulation signal that view data produced of record-header by spatial modulation and be irradiated onto on the recording medium.
In this flat image recording structure,, must improve the precision of beam flying position in order to improve resolution.
In traditional flat image recording structure, for the correcting image record position, the mark that is used to locate, (for example be arranged on the recording medium a plurality of pre-positions in advance as through hole, position at four turnings of rectangle recording medium), and camera unit is set at the image recording structure side.
In this flat image recording structure, a kind of like this proposal is arranged, promptly in scoring table when outside direction moves, under the state that scoring table is moving, the mark that is used for the recording medium location is taken (photograph) by camera unit, and, the distortion of the mark that is used to locate by prediction, even if the mark that is read into is out of shape, the relative position of recording medium and record-header also can positively be discerned, and the position misalignment about recording medium can be detected, and wherein above-mentioned deformed mark is that the shutter speed by the image-capturing element of the translational speed of scoring table and camera unit is produced.In this is proposed, treatment for correcting is being carried out in the image recording position so that after the position misalignment that correct detection arrives, in the time of moving recording platform on return path, by shining multiple beam from record-header, exposure-processed is carried out, wherein, above-mentioned multiple beam is according to the position of recording medium and by spatial modulation (for example, seeing Japanese Patent Application Publication (JP-A) 2005-132095 number).
By this way, in this image recording structure, when the mark on being formed on recording medium is taken by camera unit and is handled with respect to the position misalignment of record-header for the correction entries medium, in order to use the position of mark with high precision (micron order precision) detection and location, bear shooting by the high-resolution camera unit, position coordinates in the camera coverage is designated, and, also must specify the equivalent locations coordinate of camera unit with high precision, so that take the location mark on the recording medium that is arranged on the scoring table.
And, in this image recording structure, sometimes, be arranged in advance on the recording medium in case a plurality of location of the position misalignment being carried out treatment for correcting with mark also as the front/back of distinguishing recording medium and the mark at top/end and as distinguish the recording medium front towards mark and being used on scoring table, be provided with in the operation of position of recording medium.
In this case, for example, when each position in the precalculated position at 4 turnings of rectangle recording medium passes as each location with in the through hole of mark, the position on three summits in four summits of square or rectangle passes as the through hole of location with mark, and, pass remaining location mark in the predetermined migration position, wherein, this predetermined migration position is moved preset distance along wherein limit of square or rectangle from vertex position.
In having the recording medium of this a plurality of location with the layout structure of mark, if the operator is when remaining on recording medium in the hand, the specific corner that is arranged in four turnings of anterior-posterior/L-R with mark in the location that is in the predetermined migration position (for example, in nearside left side corner) state under recording medium is mounted to scoring table, then recording medium can be installed on the scoring table with the correct state that is provided with, wherein, the front of recording medium (record surface) up, and the back edge of recording medium is at the rear side place of scoring table.
Yet, when one of them the hole configuration that exists such location with mark, this hole configuration is during from the skew of the vertex position of square or rectangle, then be used to detect in the locational location of square or rectangle summit with the placement scope of the camera unit of mark and the location that is used to detect on the deviation post overlapped with the placement scope of the camera unit of mark, wherein above-mentioned deviation post along with the direction of scoring table carriage direction quadrature, with respect to the location marking bias on the summit, and, there is such problem, that is, the location that is used to the to detect skew camera unit with mark can not be installed in image recording structure sometimes.
In addition, also have such problem, that is, depend on the position of mark owing to physics is placed the restriction of arranging because of what camera body size etc. caused, so may become be difficult to the direction of scoring table carriage direction quadrature on read mark position.
Summary of the invention
Make the present invention according to above-mentioned situation, the invention provides a kind of new aligned units and the image recording structure of this aligned units of use, can be by means of it with the high precision document image, position misalignment in this image between recording medium and the record-header has obtained correction, wherein, the location is separately positioned on carriage direction upstream side and carriage direction downstream with mark about the carriage direction of recording medium, and, even if at the mark in upstream side and downstream when the direction with the carriage direction quadrature relative to each other is offset, take each mark by each camera unit that uses aligned units, position probing is also carried out, wherein, each camera unit of aligned units is arranged to corresponding with mark with each location.
A first aspect of the present invention is a kind of image recording structure, according to detected recording medium positional information in the outside motion process that moves the estrade that recording medium is installed with respect to photohead and aligned units, during the exposure correction of making at the relative position alignment error between photohead and the recording medium, thereby described image recording structure is by carrying out exposure-processed about described photohead and the described aligned units recording medium that is installed on the described estrade that relatively moves in the return movement process, wherein said recording medium has a plurality of marks that are used for reference, described image recording structure comprises: first camera, described first camera is installed in by the motion governor motion on the sidepiece of one side of basal component of described aligned units, so that take the position of first mark in the mark that is arranged on the described recording medium; And second camera, described second camera is installed in by the motion governor motion on the sidepiece of another side of basal component of described aligned units, so that take the position of location with second mark in the mark, described second mark along with the direction of carriage direction quadrature with respect to beginning along the predetermined small distance of the offset of carriage direction from described first mark that is arranged on the described recording medium.
Another aspect of the present invention is aligned units, and described aligned units is used to take a plurality of reference markers on the recording medium that moves with respect to image formation head, and described aligned units comprises: at least two cameras; At least two motions, described at least two motions are used for along moving described two cameras respectively with the direction of direction of relative movement quadrature at least, so that described at least two cameras can obtain at least a portion position overlapped relation when the direction of relative motion is observed; And be used for when described at least two cameras are in halted state about described motion, measuring the position of described at least two each cameras of camera and be used to carry out the mechanism that site error is proofreaied and correct; Wherein, described a plurality of reference marker is in described at least two camera that halted state also has been corrected site error.
By description taken together with the accompanying drawings subsequently, other aspects of the present invention, feature and advantage will become obvious.
Description of drawings
To describe exemplary embodiment of the present invention in detail according to accompanying drawing subsequently, wherein:
Fig. 1 is the part decomposition diagram according to exemplary embodiment of the present invention, the profile structure that shows the exposure device of aligned units of the present invention and use its image recording structure;
Fig. 2 is a plan view, shows when exposure-processed recording medium in exposure device, is formed on to finish exposed areas on the exposed;
Fig. 3 is the major part skeleton view of observing along outside direction from upstream side, shows that aligned units portion has been removed the state of exposure device;
Fig. 4 is the major part skeleton view of observing along outside direction from the downstream, shows that aligned units portion has been removed the state of exposure device;
Fig. 5 is a key diagram, shows the relation between the mark that places in the exposure device on the recording medium and the camera that is used to aim at aligned units;
Fig. 6 is a key diagram, shows the relation between the mark that is arranged in the location usefulness on the recording medium in the exposure device and offset marker and the camera that is used to aim at aligned units;
Fig. 7 is a plan view, is presented at recording medium in second exemplary embodiment of the present invention and is arranged on position relation between the camera in the aligned units of exposure device;
Fig. 8 is a plan view, is presented at recording medium in the 3rd exemplary embodiment of the present invention and is arranged on position relation between the camera in the aligned units of exposure device;
Fig. 9 is a plan view, is presented at recording medium in the 4th exemplary embodiment of the present invention and is arranged on position relation between the camera in the aligned units of exposure device;
Figure 10 is a plan view, is presented at recording medium in the 5th exemplary embodiment of the present invention and is arranged on position relation between the camera in the aligned units of exposure device;
Figure 11 is a plan view, is presented at recording medium in the 6th exemplary embodiment of the present invention and is arranged on position relation between the camera in the aligned units of exposure device;
Figure 12 A and 12B are the figure that is presented at the position relation of the camera in the aligned units that is arranged on exposure device in the 7th exemplary embodiment of the present invention.
Embodiment
＜apparatus main body 〉
Provide explanation with reference to Fig. 1 to 6 pair of exemplary embodiment about the image recording structure of aligned units of the present invention and this aligned units of use.
As shown in the outline perspective view of Fig. 1, the exposure device 10 of this exemplary embodiment can be configured to flat multi-beam exposure unit, and it comes drive controlling by not shown control module.Such exposure device 10 is configured to the recording medium 12 of FPD substrate component etc. is attached and remain on the plane surface of transfer table 14, and, be moved platform 14 when main scanning direction moves at recording medium 12, be installed in photohead 30 in the scanner 24 by use, by coming multiple beam that spatial modulation has been issued from light source side according to the modulation signal that is produced from view data by control module and this multiple beam is radiated on the recording medium 12, exposure-processed is carried out.
In exposure device 10, exist the thick plate shape of supporting that substrate 18 is installed by supporting leg 16, and, there is the linear guidance device 20 of two elongations, these two linear guidance devices 20 are placed and extend on transfer table direction of motion along transfer table direction of motion.Transfer table 14 is configured to its length direction towards transfer table direction of motion, and can be moved back and forth by linear guidance device 20.
Have door (gate) 22 in exposure device 10, door 22 stands in each side of the motion path that substrate 18 central part place transfer tables 14 are installed.Scanner 24 is disposed on the door 22, so that cross over bridge joint in door 22 side along the longitudinal, wherein, this is vertically about transfer table direction of motion, and the aligned units 25 that a plurality of cameras 26 are installed is crossed over door 22 at opposite side place along the longitudinal and is arranged, wherein, a plurality of camera 26 is as position detecting mechanism, and it is used to detect the mark that is arranged on the recording medium 12.
In exposure device 10, by the transfer table 14 that is moved out of and returns, single exposure is handled operation and is carried out.Just, in exposure device 10: the transfer table 14 that recording medium 12 is being installed is moving up to the outside motion process of motion final position from initial position below scanner 24 and the aligned units 25, and the positional information that is installed in the recording medium 12 on the transfer table 14 obtains by aligned units 25; Come the processing of the relative position error between correct scan device 24 and the recording medium 12 to be carried out according to above-mentioned positional information; Then, during transfer table 14 is moved to the return of initial position from the motion final position, carry out scan exposure by scanner 24 and handle.
Rely on the recording medium 12 that is provided with such telltale mark 11 and offset orientation mark 11A, wherein telltale mark 11 is got through hole by three vertex position places in this quadrilateral vertex position and is formed, when recording medium is maintained in operator's hand, be positioned at the left side of front and back at offset orientation mark 11A, in four turnings, right side place under the state of a predetermined corner (for example nearside turn left angle), by recording medium 12 is installed on the scoring table, can easily carry out fitting operation, wherein, the trailing edge of recording medium 12 is positioned at the rear end side place of transfer table 14 clearly under the correct state that is provided with, the front (record surface) of recording medium 12 upwards simultaneously.
In order to take and detect the telltale mark 11 that is arranged on by this way on the recording medium 12 and the position of offset orientation mark 11A, aligned units 25 is configured to as shown in Fig. 1,3 and 4.
＜aligned units 〉
In aligned units 25, exist: four cameras 26, these four cameras 26 are mounted by the motion governor motion and (depend on requirement, five or more camera can be installed) at the upstream side surface element (in transfer table 14 initial position side along carriage direction) of slab basal component 36 along outward direction, wherein, basal component 36 along and the direction of carriage direction quadrature cross between this opposite house 22; And, have at least one or a plurality of camera 26 of necessary amount, this at least one or a plurality of camera 26 be installed in the outward direction downstream (transfer table 14 is along the final position side of moving of carriage direction) of basal component 36 by the motion governor motion.
In this camera 26 structures, when stroboscopic stroboscopic light sources 26C is caused luminous the time, light is irradiated on the recording medium 12 that is installed on the transfer table 14, and, enter from lens section 26B from the reflected light here, and be imported into camera body 26A, thereby take predetermined telltale mark 11 or the offset orientation mark 11A on the recording medium 12.
For camera 26, as long as camera 26 can be taken little telltale mark 11 or offset orientation mark 11A is just enough, and camera 26 has narrow visual field usually, and the charge is small.Therefore, in aligned units 25, for the camera 26 with narrow visual field can be taken predetermined telltale mark 11 or offset orientation mark 11A, the motion governor motion be configured to make camera 26 can be moved into predetermined telltale mark 11 or offset orientation mark 11A along vertical direction up should correspondence position and be maintained at this position.
In aligned units 25, there is the paired guide rail 38 that is parallel to each other, guide rail is arranged on each surface of basal component 36 38, so that the tectonic movement governor motion.Be arranged on basal component 36 and to 38 4 cameras 26 be installed slidably at the lip-deep guide rail of outward direction upstream side, and, be arranged on the lip-deep guide rail of basal component 36 and 3 cameras 26 be installed slidably 38 in the outward direction downstream.
In addition, in aligned units 25, for each camera 26 can be conditioned in the mode of self-movement, basal component 36 is equipped with ball screw thread feeder assembly 40,42,44,46,48,50 and 52, the feeding that these ball screw thread feeder assemblies 40,42,44,46,48,50 and 52 are used to carry out each camera 26 activates, and is across to the various piece on two edge parts of basal component 36 side surfaces from the side surface center of basal component 36.
In the aligned units 25 of this structure, by control corresponding to expectation ball screw thread feeder assembly 40,42,44,46,48,50 of camera 26 or 52 driving, the camera 26 of expectation can be moved to predetermined telltale mark 11 or offset orientation mark 11A along vertical direction up should the corresponding position and camera 26 be set make it be maintained at this position so that camera 26 can not move.
And in aligned units 25, it is all measured to be arranged in the camera 26 of camera site the coordinate position of each, and detected about the information of site error.When the relative position error between scanner 24 and the recording medium 12 was carried out treatment for correcting, above-mentioned information about site error was used, and above-mentioned treatment for correcting is carried out by the unit that is used to carry out the site error treatment for correcting.
In aligned units 25, must specify the positional information of each camera 26 with the precision that reaches microstage.For this reason, in the exposure-processed operating period of recording medium 12, the camera 26 that is installed on the aligned units 25 is maintained under the stop condition, because, if recording medium 12 is being carried out exposure-processed operating period, ball screw thread feeder assembly 40,42,44,46,48,50 and 52 is fed actuating, then can not specify camera 26 that the positional information of position is set with the microstage precision.
In aligned units 25, carriage direction with respect to recording medium 12, when the carriage direction downstream at carriage direction upstream side telltale mark 11 exists when the direction with the carriage direction quadrature has been offset the telltale mark 11A of short preset distance, perhaps, when there was telltale mark 11 in the carriage direction downstream at carriage direction upstream side offset orientation mark 11A, the camera 26 that then is used for the camera 26 of detection and location mark 11 and is used to detect offset orientation mark 11A was separated and puts one in every side of basal component 36.
With such structure, when even if two cameras 26 are as far as possible arranged with drawing close therein (when since the relation of camera size and to two cameras 26 wherein be positioned with physical restriction the time), along and the direction telltale mark 11 of carriage direction quadrature and the distance between the offset orientation mark 11A situation less than the distance between the visual field of two cameras 26 wherein under, by one of them camera 26 being arranged on the side surface of basal component 36, and wherein another camera 26 is arranged on the opposite side surface of basal component 36, then the position of camera 26 can freely be provided with respect to the direction with recording medium 12 carriage direction quadratures, therefore, the state that can take telltale mark 11 or offset orientation mark 11A is arranged each camera 26.
With such structure, although do not illustrate, even if must being arranged, camera separately takes two marks and this two label placement mutual close desired locations on recording medium 12, another camera 26 is arranged on the opposite side surface of basal component 36 by inciting somebody to action wherein on the side surface that one of them camera 26 is arranged in basal component 36, along and the shooting of between camera 26, setting actual less interval of the direction of carriage direction quadrature can be carried out.
As shown in Fig. 5 and 6, in aligned units 25, be configured to the outward direction upstream side (the initial position side of transfer table 14) that camera 26 that order is used for taking and read in the final telltale mark 11 at the recording medium trailing edge side place that is arranged in recording medium 12 outward direction upstream sides (when transfer table 14 is installed the end side of substrate 18 during at initial position) or offset orientation mark 11A is disposed in aligned units 25.
By this structure, in exposure device 10, when carrying out single exposure processing operation by the to-and-fro movement of transfer table 14, the transfer table 14 that recording medium 12 is installed begins to move from initial position, and the motion final position can be set to the position when being arranged on recording medium 12 final telltale marks 11 outward direction upstream side place, that will be read or offset orientation mark 11A and being disposed in camera 26 shootings at outward direction upstream side place on the aligned units 25.
When being provided with by this way, when carrying out exposure-processed, can make the to-and-fro movement stroke of transfer table 14 short as far as possible, thereby can be shortened, and the operating efficiency of exposure-processed can be enhanced the needed time of positional information that obtains recording medium 12.
In addition, in exposure device 10, by short as far as possible at the to-and-fro movement stroke that carries out exposure-processed transfer table 14 in season, total length in the transfer table 14 on the direction of motion of installation substrate 18 can be shortened the limit that needs to minimum, thereby the compactedness of implement device integral body, and cost-effective product can be provided, wherein, substrate 18 is installed for needing the bulk object of high rigidity.
In aligned units 25, when the camera 26 that is used to take the telltale mark 11 that is arranged in recording medium 12 outward direction upstream side places or offset orientation mark 11A is disposed in the place, outward direction downstream of aligned units 25, then when the telltale mark 11 that is arranged in recording medium 12 outward direction upstream side places or offset orientation mark 11A through after being arranged in the camera 26 of outward direction upstream side in the aligned units 25, transfer table 14 must be towards outward direction downstream camera movement additional distance for shooting, so the to-and-fro movement stroke of transfer table 14 is lengthened out when carrying out exposure-processed, and this is the cause that operating efficiency reduces in the exposure-processed.
＜exposure-processed 〉
As shown in figs. 1 and 2, scanner 24 is arranged in exposure device 10, scanner 24 is arranged in the outward direction upstream side place in the aligned units 25.This scanner 24 is provided with 10 photoheads 30, and these 10 photoheads 30 are arranged in 2 * 5 matrix substantially.
Digital micro-mirror device (DMD) is installed in the inside of each photohead 30, and this digital micro-mirror device is the spatial light modulator (SLM) that is used for the spatial modulation incident beam.
Although do not illustrate, this DMD is whole to be integral type (integrating), and the lens device that it is made up of the micro mirror that is the trellis arrangement constitutes, and these micro mirrors are a plurality of (for example, 600 * 800) micro mirrors that constitute pixel.
Have highly reflective material, as aluminium by vacuum moulding machine on the micro mirror surface that is arranged in each pixel topmost place.In addition, pillar is from the umbo of the bottom surface of each micro mirror.
This DMD has from the base end part of the fulcrum of micro mirror projection, wherein, micro mirror is mounted to hinge, described hinge corresponds respectively on the sram cell of the CMOS silicon door of making on the standard semiconductor storage production line each pixel and is set up, it is configured to make micro mirror on diagonal line is that axle is mounted with the hinge, and is installed into ± 10 degree approximately that can tilt.
But this DMD is configured to drive controlling, thereby, the electrostatic force that each mirror address electrode one side that use is located in two ends of inclination micro mirror diagonal line that are configured on the SRAM or opposite side place cause because of stored charge, when micro mirror during in open mode, then it is in the situation with+10 degree inclinations, perhaps, when micro mirror in off position the time, then it is in situation about tilting with-10 degree.
In this DMD structure, when digital signal is read to SRAM, each micro mirror Be Controlled that is used for each pixel among the DMD, so that each micro mirror has arranged with+10 degree that the substrate-side of DMD tilts around diagonal line on it when open mode and tilt with-10 degree in off position the time, and, according to picture signal, the light from light source that is incident on the DMD is reflected on the vergence direction of each micro mirror.
The projection optical system that the light that is in the micro mirror reflection of open mode is modulated into exposure status and the light output side by being arranged on DMD focuses on the recording medium.Simultaneously, the light that is in the micro mirror reflection of closed condition is modulated into non-exposure status, and is incided on the light absorbing medium.
As shown in Figure 2, each that is provided with in the photohead 30 of this DMD is arranged to make rectangle (or parallelogram) zone of exposure area 32 (32A to 32J) for the tendency direction of scanning.Then, be accompanied by the motion of transfer table 14,, form banded exposure area 34 in the exposure area 32 of photohead 30 each by modulated beam of light is radiated on the recording medium 12 from each photohead 30 with the expectation sequential.These banded exposure areas 34 are formed by the point corresponding to the micro mirror two-dimensional array of DMD.
By by with upper type to arrange DMD facing to the angle of direction of scanning, can make along and the direction exposure station of the direction of scanning quadrature interval between capable narrow, and can realize high definition (definition).
Each row of the exposure area 32 (32A to 32J) that line is arranged is arranged to along orientation staggered with predetermined space, thereby overlaps with adjacent banded exposure area 34 in each banded exposure area 34.Therefore, for example, the exposure area 32A that is arranged on the first row ultra-Left side place is arranged on the exposure area 32B exposure that the part that can not be exposed between the exposure area 32C on exposure area 32A the right is set at the ultra-Left side of second row place with adjacent.In the same way, the part that can not be exposed between exposure area 32B and the exposure area 32D is exposed regional 32C exposure, wherein, and the adjacent the right that is arranged on exposure area 32B of exposure area 32D.
Then, will provide explanation to the as above operation of photohead of structure.
In exposure device 10, be input to not shown control module and be temporarily stored in the control module corresponding to the view data of exposing patterns, wherein, control module is connected to DMD.This view data is for representing the data of each image pixel density (density) of composing images with binary value (whether the existence of measuring point).
In the outside step of transfer table 14, recording medium 12 is moved along the direction of scanning under the state that is attached to transfer table 14 surfaces.In exposure device 10, when recording medium 12 through photoheads 30 times the time, the view data that is stored in the storer is called over the value of several rows.According to by aligned units 25 positional information that obtain, that be installed in the recording medium 12 on the transfer table 14 in outside step, based on the view data of reading and be used for correct scan device 24 and recording medium 12 between the correction data of the relative position error, produce the control signal (control data) that proofread and correct the drafting position (drawing position) when exposing with scanner 24 as the control device of data processing unit.
In photohead 30, each micro mirror among the DMD is controlled by on-off according to the control signal that is produced.When the never illustrated light source cell of laser beam was irradiated to by this way controlled DMD, when the micro mirror of DMD was in open mode, the laser beam that then is reflected was focused the bunchy spot on recording medium 12, and exposure is carried out.
By moving the recording medium 12 that is installed on the transfer table 14 along the direction of scanning when, exposing by photohead 30, the image that distortion in the image obtains proofreading and correct is exposed by two dimension on recording medium 12, wherein, image fault is to cause because of the relative position error between scanner 24 and the recording medium 12.
In exposure device 10, exposure-processed finishes at the time point place that the predetermined image data have been exposed on the recording medium 12, and transfer table 14 is moved to initial position once more to begin to wait for next exposure-processed.
In addition, in image recording structure according to the present invention, DMD is used as the spatial modulator in the photohead 30, but can use other device to replace DMD, for example, MEMS (micro electro mechanical system) (MEMS) type spatial modulator (Special light modulator (SLM)), utilize electrooptical effect to come the optical element (PLZT element) of light modulated transmission, or the spatial modulator except that the MEMS type, as liquid crystal shutter (FLC), or the like.
And it is a kind of that spatial modulator is not limited in that only can take open/close state, also can use the spatial modulator that can represent grade (gradation), and this spatial modulator is also taked a plurality of intermediate values except open/close state.
MEMS is used to refer to the microsystem of being made up of integrated microsize sensor, actuator and control circuit, it is by making based on the Micrometer-Nanometer Processing Technology of IC manufacturing process, and MEMS type spatial modulator is used to refer to the spatial modulator that is driven by the electromechanically that uses electrostatic force.
Multi-beam exposure unit according to this exemplary embodiment can be constructed by the DMD spatial modulator that a plurality of pixels selectivity device for switching between open/close state is replaced photohead 30.But with a plurality of pixels can be the laser beam that for example can optionally switch between the ON/OFF emission state corresponding to each pixel in selectivity device for switching between the open/close state, it is constructed by laser beam source, perhaps, in addition, thereby but by each little lasing fluorescence surface arrangement is become with each pixel corresponding formation surface-emitting laser and with each little Laser emission surface between the ON/OFF emission state optionally switching construct LASER Light Source.
＜camera is placed 〉
Fig. 7 shows the camera arrangement of second exemplary embodiment according to the present invention.
As shown in Figure 7, there are a plurality of cameras 26 to be arranged on basal component 36 places of aligned units 25, and, in these cameras 26, the camera 26E that is arranged on carriage direction (direction of arrow Y among the figure) upstream side place is arranged and is arranged on the camera 26F that the carriage direction downstream is located.
In order to distinguish the back side of recording medium 12, offset orientation mark 11A has offset with respect to one of them telltale mark 11 along the direction (the direction X among the figure) with the carriage direction quadrature, and, if for example attempting to utilize, the position camera 26 adjacent with camera 26E reads telltale mark 11 and telltale mark 11A, then when the distance between directions X telltale mark 11 and telltale mark 11A less than between two visual fields of two adjacent camera 26 apart from the time, then exist one of them mark may not fall into problem in the visual field of one of them camera.
Therefore, as mentioned above,,, also can avoid the problem that reads even if then the distance between the telltale mark 11/11A is less by stagger a plurality of camera 26E/26F and make telltale mark 11,11A be read by camera 26E/26F respectively separately along the Y direction.
In addition, in the drawings, the telltale mark 11-1 that is arranged on carriage direction upstream side place (following/nearside among the figure) can be read by carriage direction upstream side camera 26E, and the telltale mark 11A that is arranged on downstream place (among the figure on/distally) can be read by downstream camera 26F, and, can reduce the processing time.
Just, for transport recording medium 12 along the Y direction for, because the position is read process and is begun up to read carriage direction upstream side telltale mark 11-1 with camera 26E from read carriage direction downstream telltale mark 11A with camera 26F, so it is short that the move distance of recording medium 12 is arranged on along the situation on the straight line of directions X than the camera 26 that is used to read telltale mark 11/11A, thereby can effectively shorten the processing time.
Perhaps, as shown in Figure 6, the camera 26 that those camera 26 relative sides (along directions X) in basal component 36 and Fig. 7 are located can be configured to stagger.And, can be provided on the Y direction along the paired camera at each end place of directions X and to stagger.
In addition, even if adopting camera 26 as above places, when telltale mark 11/11A when reaching the degree that a camera 26 can cover staggering of directions X, then by only using nearside (upstream side, the bottom of figure) camera of locating 26 is taken telltale mark 11/11A, the move distance of transfer table 14 in the time of can reducing to take, and reduce the processing time.
＜camera and mark are placed 〉
Fig. 8 shows the camera placement of the aligned units of the 3rd exemplary embodiment according to the present invention.
As shown in Figure 8, there are a plurality of cameras 26 to be arranged on basal component 36 places of aligned units 25, and, in these cameras 26, camera 26-1, the 26-2 that is arranged on carriage direction (direction of arrow Y among the figure) upstream side place arranged and be arranged on camera 26-3, the 26-4 that the carriage direction downstream is located.
Be arranged on a plurality of telltale marks 11 on the recording medium 12 by utilizing by a plurality of cameras 26 sequential shoots of arranging with upper type, under the situation that Flame Image Process is taken time in the camera 26 when not changing shooting, telltale mark 11 can be shortened along the placement spacing of direction of measurement (above-below direction among the figure).Just, even if the placement spacing of telltale mark 11 changes, still can keep measuring speed.
Fig. 9 shows that the camera in the aligned units of the present invention's the 4th exemplary embodiment places.
As shown in Figure 9, there are a plurality of cameras 26 to be arranged on basal component 36 places of aligned units 25, and, in these cameras 26, camera 26-1, the 26-2 that is arranged on carriage direction (direction of arrow Y among the figure) upstream side place arranged and be arranged on camera 26-3, the 26-4 that the carriage direction downstream is located.
Take a plurality of telltale marks 11 that are arranged on the recording medium 12 more than 26 time by utilizing by a plurality of cameras of arranging with upper type, the shooting precision of camera 26 is improved.Just, identical telltale mark 11 is taken repeatedly (being 2 times among the figure) by a plurality of cameras (among the figure being 2), and therefore, data precision can be improved because of average effect on the whole.
Figure 10 shows that the camera in the aligned units of the present invention's the 5th exemplary embodiment places.
As shown in Figure 10, there are a plurality of cameras 26 to be arranged on basal component 36 places of aligned units 25, and, in these cameras 26, camera 26-1, the 26-2 that is arranged on carriage direction (direction of arrow Y among the figure) upstream side place arranged and be arranged on camera 26-3, the 26-4 that the carriage direction downstream is located.
Be arranged such that by visual field 26V they all are identical on the directions X of camera 26, and as shown in FIG., these visual fields form along carriage direction (above-below direction among the figure) adjacent with a plurality of cameras 26 of upper type setting through arranging.By doing like this, the visual field has obtained expansion (enlarging 2 times in the drawings) along carriage direction (above-below direction among the figure), thereby telltale mark 11 is difficult to break away from the visual field, therefore, the success ratio of shooting is improved, and, by reducing number of retries, the processing time can obtain shortening.
Figure 11 shows that the camera in the aligned units of the present invention's the 6th exemplary embodiment places.
As shown in Figure 11, there are a plurality of cameras 26 to be arranged on basal component 36 places of aligned units 25, and, in these cameras 26, camera 26-1, the 26-2 that is arranged on carriage direction (direction of arrow Y among the figure) upstream side place arranged and be arranged on camera 26-3, the 26-4 that the carriage direction downstream is located, this is just as the situation among the 3rd embodiment, and still, camera 26-1/3 and 26-2/4 are arranged to skew mutually on directions X.
Owing to be offset on the directions X of camera 26 by visual field 26V, so these visual fields are adjacent to formation along directions X (L-R direction among the figure) with a plurality of cameras 26 of upper type setting through arranging.By doing like this, the visual field obtains enlarging (enlarging 2 times in the drawings) along directions X (L-R direction among the figure), and, thereby telltale mark 11 is difficult to break away from the visual field, and therefore, the success ratio of shooting is improved, and by reducing number of retries, the processing time can obtain shortening.
The layout of＜camera and capturing element 〉
Figure 12 shows that the camera in the aligned units of the present invention's the 7th exemplary embodiment places.
As shown in Figure 12 A, in the camera 26 that is arranged on basal component 36 both sides, for reason such as easy for installation, the position of camera body 26A is in the direction that faces each other.In this case, because the image surface of taking with each camera 26 is towards direction respect to one another, for described image all is arranged on the identical direction, must the general piece image Rotate 180 ° wherein, and, in Flame Image Process, need to be used for the time that image rotates.
In this exemplary embodiment, as shown in Figure 12B, in the camera 26 that is arranged on basal component 36 both sides, camera body 26A is set at so that face each other on the position of equidirectional, thereby the visual field face of camera 26 in the same direction.
By doing like this, the photographic images that is obtained by each camera 26 promptly is aligned in photographing phase, therefore need be in Flame Image Process image rotating, the Flame Image Process time necessary can obtain shortening.
Be appreciated that from the above description, image recording structure according to aligned units of the present invention and this aligned units of use, by be provided with in carriage direction upstream side and carriage direction downstream respectively with respect to the carriage direction of recording medium be arranged to along with the direction of carriage direction quadrature about the location mark of skew toward each other, and at the apparatus main body side place by be arranged to each location with mark each in the camera unit of corresponding aligned units take each corresponding location and take position probing with mark with mark and to each location, then can reach the effect of record high precision image, the position misalignment in this high precision image between recording medium and the record-header has obtained correction.
Claims (14)
1. image recording structure, according to detected recording medium positional information in the outside motion process that moves the estrade that recording medium is installed on it with respect to photohead and aligned units, during the exposure correction of making at the relative position alignment error between described photohead and the described recording medium, described image recording structure is by carrying out exposure-processed about described photohead and the described aligned units recording medium that is installed on the described estrade that relatively moves in the return movement process, wherein said recording medium has a plurality of marks that are used for reference, and described image recording structure comprises:
First camera, described first camera are installed in by the motion governor motion on the sidepiece of one side of basal component of described aligned units, so that take the position of first mark in the mark that is arranged on the described recording medium; And
Second camera, described second camera is installed in by the motion governor motion on the sidepiece of another side of basal component of described aligned units, so that take the position of location with second mark in the mark, described second mark along with the direction of carriage direction quadrature with respect to beginning along the predetermined small distance of the offset of carriage direction from described first mark that is arranged on the described recording medium.
2. image recording structure as claimed in claim 1, wherein, the camera that is used to take second mark of described first mark of location usefulness or described skew is the camera that is arranged in described basal component outward direction upstream side, wherein, second of described first mark or described skew is marked at the trailing edge side place of described recording medium, and is read at last in described outside motion process.
3. image recording structure as claimed in claim 1, wherein, at least one camera in described a plurality of camera is disposed in the carriage direction upstream side and another camera is offset to the carriage direction downstream, and is offset along the direction with the carriage direction quadrature.
4. image recording structure as claimed in claim 2, wherein, at least one camera in described a plurality of camera is disposed in the carriage direction upstream side and another camera is offset to the carriage direction downstream, and is offset along the direction with the carriage direction quadrature.
5. aligned units, described aligned units are used to take with respect to image and form a plurality of reference markers on the recording medium that head moves, and described aligned units comprises:
At least two cameras;
At least two motions, described at least two motions are used for along moving described two cameras respectively with the direction of direction of relative movement quadrature at least, and at least a portion position overlapped concerns when direction of relative movement is observed so that described at least two cameras can obtain; And
Be used for when described at least two cameras are in halted state with respect to described motion, measuring the position of described at least two each cameras of camera and be used to carry out the mechanism that site error is proofreaied and correct; Wherein
Described a plurality of reference marker is in halted state and has been corrected described at least two camera of site error.
6. aligned units as claimed in claim 5, wherein, at least one camera in set described a plurality of cameras is positioned at carriage direction upstream side place, and at least one camera in set described a plurality of cameras is placed with towards the skew of carriage direction downstream, and is offset along the direction with the carriage direction quadrature.
7. image recording structure as claimed in claim 1, wherein, described aligned units is an aligned units as claimed in claim 5.
8. image recording structure as claimed in claim 2, wherein, described aligned units is an aligned units as claimed in claim 5.
9. image recording structure as claimed in claim 3, wherein, described aligned units is an aligned units as claimed in claim 5.
10. image recording structure as claimed in claim 4, wherein, described aligned units is an aligned units as claimed in claim 5.
11. image recording structure as claimed in claim 1, wherein, described aligned units is an aligned units as claimed in claim 6.
12. image recording structure as claimed in claim 2, wherein, described aligned units is an aligned units as claimed in claim 6.
13. image recording structure as claimed in claim 3, wherein, described aligned units is an aligned units as claimed in claim 6.
14. image recording structure as claimed in claim 4, wherein, described aligned units is an aligned units as claimed in claim 6.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006109461 | 2006-04-12 | ||
| JP2006109461 | 2006-04-12 | ||
| JP2006264370 | 2006-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101178544A true CN101178544A (en) | 2008-05-14 |
Family
ID=39404843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007100917877A Pending CN101178544A (en) | 2006-04-12 | 2007-04-11 | Alignment unit and image recording apparatus using the same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101178544A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102316713A (en) * | 2010-06-29 | 2012-01-11 | 株式会社日立高新技术 | The telltale mark recognition device of FPD assembly and the apparatus for assembling of FPD assembly |
| CN103269864A (en) * | 2010-12-30 | 2013-08-28 | 奥迪克激光应用技术股份有限公司 | Marking apparatus and method for operating a marking apparatus |
| CN106773566A (en) * | 2017-03-07 | 2017-05-31 | 无锡影速半导体科技有限公司 | Direct-write type lithography machine exposes alignment device and method |
| CN107000434A (en) * | 2014-12-05 | 2017-08-01 | 施托克印制系统集团 | Manufacture the method for the printing bar unit for print system and print bar unit |
| CN107957237A (en) * | 2016-10-17 | 2018-04-24 | 维蒂克影像国际无限责任公司 | Laser-projector with flash of light alignment |
| CN109475974A (en) * | 2016-07-14 | 2019-03-15 | 三菱电机株式会社 | Substrate measuring device and laser-processing system |
| CN109725503A (en) * | 2018-12-24 | 2019-05-07 | 无锡影速半导体科技有限公司 | A kind of multiband optical exposure device and method at times |
| CN109976112A (en) * | 2017-12-27 | 2019-07-05 | 佳能株式会社 | Alignment device, lithographic equipment and article manufacturing method |
| CN109976101A (en) * | 2017-12-28 | 2019-07-05 | 鲁道夫科技股份有限公司 | Split shaft lithography tool |
| CN117470158A (en) * | 2023-12-27 | 2024-01-30 | 湖南肆玖科技有限公司 | Edge inspection method and system for carving machine |
-
2007
- 2007-04-11 CN CNA2007100917877A patent/CN101178544A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102316713A (en) * | 2010-06-29 | 2012-01-11 | 株式会社日立高新技术 | The telltale mark recognition device of FPD assembly and the apparatus for assembling of FPD assembly |
| CN103269864A (en) * | 2010-12-30 | 2013-08-28 | 奥迪克激光应用技术股份有限公司 | Marking apparatus and method for operating a marking apparatus |
| CN103269864B (en) * | 2010-12-30 | 2015-06-24 | 奥迪克激光应用技术股份有限公司 | Marking apparatus and method for operating a marking apparatus |
| CN107000434B (en) * | 2014-12-05 | 2019-12-13 | 施托克印制系统集团 | Method for manufacturing print bar unit for printing system and print bar unit |
| CN107000434A (en) * | 2014-12-05 | 2017-08-01 | 施托克印制系统集团 | Manufacture the method for the printing bar unit for print system and print bar unit |
| CN109475974A (en) * | 2016-07-14 | 2019-03-15 | 三菱电机株式会社 | Substrate measuring device and laser-processing system |
| CN107957237A (en) * | 2016-10-17 | 2018-04-24 | 维蒂克影像国际无限责任公司 | Laser-projector with flash of light alignment |
| CN106773566A (en) * | 2017-03-07 | 2017-05-31 | 无锡影速半导体科技有限公司 | Direct-write type lithography machine exposes alignment device and method |
| CN109976112A (en) * | 2017-12-27 | 2019-07-05 | 佳能株式会社 | Alignment device, lithographic equipment and article manufacturing method |
| CN109976112B (en) * | 2017-12-27 | 2022-03-25 | 佳能株式会社 | Alignment apparatus, lithographic apparatus and article manufacturing method |
| CN109976101A (en) * | 2017-12-28 | 2019-07-05 | 鲁道夫科技股份有限公司 | Split shaft lithography tool |
| CN109725503A (en) * | 2018-12-24 | 2019-05-07 | 无锡影速半导体科技有限公司 | A kind of multiband optical exposure device and method at times |
| CN109725503B (en) * | 2018-12-24 | 2021-03-02 | 无锡影速半导体科技有限公司 | Multi-band time-division optical exposure device and method |
| CN117470158A (en) * | 2023-12-27 | 2024-01-30 | 湖南肆玖科技有限公司 | Edge inspection method and system for carving machine |
| CN117470158B (en) * | 2023-12-27 | 2024-04-23 | 湖南肆玖科技有限公司 | Edge inspection method and system for carving machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101178544A (en) | Alignment unit and image recording apparatus using the same | |
| TWI271602B (en) | A correcting method and an exposure method of exposure device, and an exposure device | |
| KR101485437B1 (en) | Apparatus and method of referential position measurement and pattern-forming apparatus | |
| JP4450739B2 (en) | Exposure equipment | |
| US8710403B2 (en) | Laser processing a multi-device panel | |
| JP4322837B2 (en) | Exposure apparatus calibration method, exposure method, and exposure apparatus | |
| JP4351694B2 (en) | Alignment unit and image recording apparatus using the same | |
| JP2005266779A (en) | Exposure apparatus and method | |
| JP4533785B2 (en) | Alignment sensor position calibration method, reference pattern calibration method, exposure position correction method, calibration pattern, and alignment apparatus | |
| US20090035669A1 (en) | Work position information obtaining method and apparatus | |
| JP2007034168A (en) | Method and device for acquiring stage position change information | |
| JP2007304546A5 (en) | ||
| JP2005003762A (en) | Method for identifying pixel location, method for correcting image deviation, and image forming apparatus | |
| JP4887165B2 (en) | Drawing apparatus and method | |
| JP2006337873A (en) | Exposure device and exposure method | |
| JP2008251797A (en) | Reference position detection apparatus and method, and drawing apparatus | |
| JP2006234921A (en) | Exposure apparatus and exposure method | |
| JP2006337878A (en) | Exposure device and exposure method | |
| JP4931041B2 (en) | Drawing point data acquisition method and apparatus, and drawing method and apparatus | |
| TW202013084A (en) | Exposure device | |
| JP2007041244A (en) | Method and device for acquiring positional fluctuation information of stage | |
| CN101408737B (en) | Platform-type exposure image detection method | |
| WO2015052618A1 (en) | Drawing device and drawing method | |
| CN104977811A (en) | Exposure device and fixing method thereof | |
| US20090033952A1 (en) | Image plotting apparatus and image plotting method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |