CN101164136A - Excimer lamp - Google Patents
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- CN101164136A CN101164136A CNA200680013295XA CN200680013295A CN101164136A CN 101164136 A CN101164136 A CN 101164136A CN A200680013295X A CNA200680013295X A CN A200680013295XA CN 200680013295 A CN200680013295 A CN 200680013295A CN 101164136 A CN101164136 A CN 101164136A
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Abstract
It is possible to provide an excimer lamp in which excimer light emission output is increased. The excimer lamp includes at least a light emission window (3) arranged in the light emission direction and a plurality of excimer discharge electrodes (2) arranged to oppose each other. An excimer discharge gas existing in a discharge space (5) formed between the opposing electrodes causes discharge to emit excimer light. The excimer discharge electrodes (2) are flat electrodes. A plurality of the discharge spaces (5) are arranged between the flat electrodes. The light emission window (3) is arranged in parallel to a discharge path of the discharge space (5).
Description
Technical field
The present invention relates to a kind of Excimer lamp of launching quasi-molecule light.
Background technology
In order to make the coating sclerosis or semiconductor wafer, glass substrate etc. to be carried out cleaning surfaces or surfaction (modification), use Excimer lamp traditionally to pending object emission quasi-molecule light.
As the launching technique of quasi-molecule light, the method for known use dielectric barrier discharge (dielectricbarrier discharge), as above-mentioned Excimer lamp, the known Excimer lamp of in TOHKEMY 2001-135279 communique, putting down in writing.
In the Excimer lamp of in TOHKEMY 2001-135279 communique, putting down in writing, form roughly coaxial dual pipe by the different hollow quartz glass tube of arranged coaxial cross-sectional diameter, charge into the gas that is used for the quasi-molecule discharge in the hollow space that between two quartz glass tubes, forms, outer surface coiling outer electrode at the outer quartz glass tube, at outer surface (surface of tube hub axle side) the coiling internal electrode of inboard quartz glass tube, between these two electrodes, apply high frequency voltage to carry out the discharge of capacitive coupling type.
Document as the Excimer lamp of public use dielectric barrier discharge, can be with reference to Kamibayashi Masanori and other four researchers' " Studies on an excimer lampas a new UV source ", 1996 the 5th time pre-original text of Japanese ozone association's year research meeting.Fig. 5 of the document discloses in the Excimer lamp according to surface discharge method (surface discharge method), and the pressure that charges into the discharge gas of arc chamber by increase increases the emissive porwer of Excimer lamp.
Summary of the invention
TOHKEMY 2001-135279 communique has been put down in writing the Excimer lamp equipment with following structure: arrange a plurality of casees, at least one above-mentioned Excimer lamp is set in each case, from the vertical table surface launching quasi-molecule light of Excimer lamp, by the side surface output quasi-molecule light of the case on the Excimer lamp longitudinal direction.
Yet the Excimer lamp equipment of putting down in writing in the above-mentioned TOHKEMY 2001-135279 communique is intended to by using a plurality of Excimer lamps to obtain higher output, but the output that each Excimer lamp arranged problem fully.
In addition, in " 1996 the 5th time pre-original text of Japanese ozone association year research meeting " disclosed Excimer lamp according to the surface discharge method.The inventor studies it, finds following situation.In luminescence unit with arc chamber that forms by dielectric substances such as for example quartz of alternately arranging with electrode, when the discharge gas that charges into arc chamber being applied high frequency voltage with the generation discharge, when the pressure of the discharge gas that charges into arc chamber increases, arc chamber chaps sometimes or is damaged, when arc chamber has the shape roughly close with box-shaped, be easy to take place this tendency.
In this case, first purpose of the present invention provides a kind of Excimer lamp that makes the emission output increase of quasi-molecule light.
Second purpose of the present invention provides a kind of emissive porwer of quasi-molecule light that makes and increases and do not cause that arc chamber chaps or the Excimer lamp of breakage.
The inventor has carried out conscientiously research, discovery can achieve the above object by following structure: the electrode that is used for the quasi-molecule discharge in the Excimer lamp is a plate electrode, be arranged alternately a plurality of discharge spaces and plate electrode as discharge space between two plate electrodes, and light emitting window be set abreast with the discharge channel of discharge space.In addition, discovery can reach above-mentioned second purpose by the Excimer lamp with following structure: luminescence unit has arc chamber, the lamp house that holds described luminescence unit in the luminescence unit outer setting, in the arc chamber of described luminescence unit, charge into discharge gas, between the inwall of the outer wall of the arc chamber of luminescence unit and lamp house, charge into inert gas, the two all is adjusted into and has 1 atmospheric pressure or bigger pressure with discharge gas and inert gas, and these two pressure are adjusted into the absolute value that guarantees the difference between these two pressure is 0.3 atmospheric pressure or littler.Based on this discovery, correspondingly finished the present invention.
That is, the invention provides:
(1) a kind of Excimer lamp, it has light emitting window and a plurality of quasi-molecule sparking electrode respect to one another that is arranged on the light emitting side at least, described Excimer lamp has following structure: the quasi-molecule discharge gas in the discharge space that forms between described electrode of opposite produces discharge, thereby emission quasi-molecule light
Described quasi-molecule sparking electrode is a plate electrode,
A plurality of described discharge spaces are set, each described discharge space between described plate electrode,
With the discharge channel of described discharge space described light emitting window (hereinafter being called " first Excimer lamp ") is set abreast.
(2) according to above-mentioned (1) described Excimer lamp, wherein, described plate electrode by dielectric toward each other.
(3) according to above-mentioned (2) described Excimer lamp, wherein, the surface coverage of described plate electrode has dielectric substance.
(4) according to above-mentioned (2) described Excimer lamp, wherein, first type surface adjacency, another first type surface of described plate and the described discharge space adjacency of described plate electrode and the plate that forms by dielectric substance.
(5) according to each described Excimer lamp in above-mentioned (1)～(4), wherein, described quasi-molecule sparking electrode has the ultraviolet reflection function.
(6) according to each described Excimer lamp in above-mentioned (2)～(4), wherein, the speculum that forms on described dielectric first type surface has the ultraviolet reflection function.
(7) a kind of Excimer lamp, it comprises:
Luminescence unit, it has the arc chamber that is used to launch quasi-molecule light; And
Lamp house, it holds described luminescence unit in inside, and described lamp house has the light output window that is arranged on the light emitting side,
Wherein, in the described arc chamber of described luminescence unit, charge into discharge gas, between the inwall of the outer wall of the described arc chamber of described luminescence unit and described lamp house, charge into inert gas,
Described discharge gas and described inert gas have 1 atmospheric pressure or bigger pressure separately, and it is 0.3 atmospheric pressure or littler (hereinafter being sometimes referred to as " second Excimer lamp ") that described discharge gas and described inert gas are adjusted into the absolute value that guarantees the difference between two pressure.
(8) according to above-mentioned (7) described Excimer lamp, wherein, described luminescence unit has the arc chamber that is made of a plurality of discharge cells that are arranged in juxtaposition,
The a plurality of plate electrodes that are used for quasi-molecule discharge, described a plurality of plate electrodes and contact with the first type surface of described discharge cell toward each other,
Described arc chamber has the light emitting window that the discharge channel with described arc chamber is provided with abreast, and
The described discharge gas that charges into described arc chamber produces discharge, thus emission quasi-molecule light.
(9) according to above-mentioned (7) described Excimer lamp, wherein, described arc chamber also has the flow of discharge gas via holes that runs through described a plurality of discharge spaces.
(10) according to each described Excimer lamp in above-mentioned (7)～(9), wherein, described luminescence unit has the discharge gas circulation flow path that is used for discharge gas is introduced from described lamp house outside described discharge space,
Described lamp house has the inert gas circulation flow path that is used for inert gas is introduced from described lamp house outside described lamp house.
According to the present invention, a kind of Excimer lamp that has increased quasi-molecule light emission power output can be provided, according to the present invention, can provide a kind of and increase quasi-molecule light emissive porwer and do not cause arc chamber be full of cracks or damaged Excimer lamp.
Description of drawings
Fig. 1 is the schematic sectional view of Excimer lamp that is used to illustrate the embodiment 1 of first Excimer lamp of the present invention.
Fig. 2 is the schematic sectional view of Excimer lamp that is used to illustrate the embodiment 2 of first Excimer lamp of the present invention.
Fig. 3 is the figure of an example of the plate electrode that uses in Excimer lamp of the present invention.
Fig. 4 is the figure of luminescence unit that the embodiment 1 of first Excimer lamp of the present invention is shown.
Fig. 5 is the figure that the method for the quasi-molecule light that produces in the discharge space that is reflected in the Excimer lamp of the present invention is shown.
Fig. 6 is the schematic sectional view of Excimer lamp that is used to illustrate the structure of second Excimer lamp of the present invention.
Fig. 7 is the schematic sectional view of method that is used for illustrating the pressure of the discharge gas of adjusting second Excimer lamp of the present invention and inert gas.
Fig. 8 is the schematic sectional view that is used for illustrating the pressure of the discharge gas of second Excimer lamp of the present invention and inert gas.
Fig. 9 is the schematic sectional view of Excimer lamp that is used to illustrate the structure of second Excimer lamp of the present invention.
Figure 10 is the schematic sectional view of Excimer lamp that is used to illustrate the structure of second Excimer lamp of the present invention.
Figure 11 is the schematic sectional view of Excimer lamp that is used to illustrate the structure of second Excimer lamp of the present invention.
Figure 12 is pressure (and pressure of inert gas) that discharge gas in the Excimer lamp of the present invention is shown and the curve chart of launching the relation between the light quantity.
Embodiment
In this manual, " Excimer lamp " used herein is meant and act as the discharge lamp that sends high-power quasi-molecule light.About this term, needn't call with unified form, sometimes, be referred to as " high power light beam generator " from the viewpoint of sending high power quasi-molecule light, be referred to as " dielectric barrier discharge lamp " from the viewpoint of " dielectric barrier ", perhaps apply the viewpoint that high frequency voltage sends quasi-molecule light, be referred to as " electrodeless discharge excimer lamp " from electrodeless state that electrode is not set in arc chamber inside and by internal electrode and the outer electrode that is provided with to arc chamber.This specification is with its unified be called " Excimer lamp ".
At first, first Excimer lamp of the present invention is described.
First Excimer lamp is to have at least at the light emitting window of light emitting side setting and the Excimer lamp of a plurality of quasi-molecule sparking electrodes respect to one another, and it has following structure: the quasi-molecule discharge gas in the discharge space that forms between the described electrode of opposite produces discharge to send quasi-molecule light.This Excimer lamp has following feature: above-mentioned quasi-molecule sparking electrode is a plate electrode, and a plurality of described discharge spaces are set, and each described discharge space and is provided with above-mentioned light emitting window with the discharge channel of described discharge space abreast between plate electrode.
Hereinafter, first Excimer lamp of the present invention is described with reference to the accompanying drawings.
In the present invention, first Excimer lamp generally comprises the embodiment shown in Fig. 1 and 2 (hereinafter being called embodiment 1 and embodiment 2).
Fig. 1 is the schematic sectional view of Excimer lamp that is used to illustrate the embodiment 1 of first Excimer lamp of the present invention.In Fig. 1, Excimer lamp 1 comprises having the light emitting window 3 that is arranged on the light emitting side and the chamber 4 of a plurality of quasi-molecule sparking electrodes 2 respect to one another.Alternately form discharge spaces 5 with above-mentioned a plurality of electrode of opposite as discharge space between two electrodes 2,2, when when high frequency electric source 6 applies voltage, the quasi-molecule discharge gas that is present in the discharge space 5 produces discharge to send quasi-molecule light.
Do not limit the form of light emitting window 3 particularly.The light emitting window that can use first type surface to have circle, shape such as square, because obtaining first type surface has round-shaped light emitting window easily, therefore preferred this light emitting window.Do not limit the material of light emitting window 3 particularly, as long as it makes the quasi-molecule light transmission that sends by discharge.When considering cost and intensity, preferred synthetic quartz glass, magnesium fluoride crystal, calcium fluoride crystal etc.As required according to the size of definite light emitting windows 3 such as quantity of sparking electrode 2.When light emitting window 3 has when round-shaped, light emitting window 3 preferably has the diameter of about 5～40cm, and preferably has the thickness of about 5～20mm.
Chamber 4 has the shape that assurance charges into the airtight construction of discharge gas therein, and chamber 4 can have different shapes such as cylinder, cube, cuboid.Owing to consider easy acquisition, light emitting window 3 preferably has round-shaped, so chamber 4 preferably has cylindrical shape.When chamber 4 had cylindrical shape, it preferably had the represented size of height of diameter and the about 10～30cm of about 10～50cm.The material of chamber 4 is preferably easy heat radiation and is not easy to produce the material of foreign gas, for example comprises stainless steel, aluminium etc.
Preferably, the coupling part between light emitting window 3 and chamber 4 is provided with sealing gasket (gasket), O shape ring etc., to guarantee air-tightness.
Fig. 2 is the schematic sectional view of Excimer lamp that is used to illustrate the embodiment 2 of first Excimer lamp of the present invention.Excimer lamp 1 among Fig. 2 also has light emitting window 3 and a plurality of quasi-molecule sparking electrode 2 respect to one another that is arranged on the light emitting side.Form discharge space 5 between above-mentioned a plurality of electrode of opposite 2 and 2, when when high frequency electric source 6 applies voltage, the quasi-molecule discharge gas that is present in the above-mentioned discharge space 5 produces discharge to send quasi-molecule light.
In embodiment shown in Figure 22, light emitting window 3, the plate 8 that is formed by dielectric substance, top board 15 etc. surround each discharge space 5, thereby form case, hermetic charge into discharge gas in each discharge space 5.Therefore, in the embodiment shown in Figure 2, not necessarily need the chamber 4 shown in the embodiment shown in Figure 1.In addition, as light emitting window 3, can use except the shape with window be restricted to the rectangular shape with the similar window of above-mentioned light emitting window.
Mainly, if desired, comparative examples 2 is illustrated the embodiment of first Excimer lamp according to the embodiment of embodiment 1 explanation first Excimer lamp of the present invention.
In Fig. 1 (or Fig. 2), in the discharge space 5 of Excimer lamp, there is the quasi-molecule discharge gas.The quasi-molecule discharge gas comprises the mist of rare gas such as xenon, argon gas, krypton gas, mercury vapour and above-mentioned rare gas or mercury vapour and halogen gass such as fluorine gas, chlorine, bromine gas or iodine gas.
Centre wavelength according to the definite quasi-molecule light that is obtained of discharge gas.When using xenon, the centre wavelength of quasi-molecule light is 172nm, when using argon gas, centre wavelength is 126nm, and when using krypton gas, centre wavelength is 146nm, when using the mist of argon gas and chlorine, centre wavelength is 175nm, and when using the mist of xenon and chlorine, centre wavelength is 308nm, when using the mist of krypton gas and chlorine, centre wavelength is 222nm, and when using the mist of mercury vapour and iodine gas, centre wavelength is 443nm, when using the mist of mercury vapour and bromine gas, centre wavelength is 503nm, and when using the mist of mercury vapour and chlorine, centre wavelength is 558nm.
The air pressure of the quasi-molecule discharge gas in the chamber is preferably 0.5～3 atmospheric pressure, more preferably about 1 atmospheric pressure.
The tool feature part of first Excimer lamp of the present invention is that quasi-molecule sparking electrode 2 is plate electrodes, and a plurality of discharge spaces 5 are set between two plate electrodes, and with the discharge channel of discharge space light emitting window 3 is set abreast.When the shape of electrode is tabular, can between quasi-molecule sparking electrode 2,2, form the wide discharge space 5 that extends to emitting side (downside among Fig. 1 (or Fig. 2)) from the side relative (upside Fig. 1 (or Fig. 2)) with the light emitting side, can pass through light emitting window 3 output high-power quasi-molecule light, will add up at the quasi-molecule light that any position produces between the quasi-molecule sparking electrode 2,2 arbitrarily simultaneously.
Fig. 3 is illustrated in an example of the plate electrode that uses in the Excimer lamp among the embodiment 1.Fig. 3 (a) is the vertical cross-section diagram of the plate electrode 2 seen in the first type surface direction of plate electrode 2, and Fig. 3 (b) is the vertical cross-section diagram of the plate electrode 2 seen in the side face directions of plate electrode 2.In Fig. 1 and Fig. 3, the shape of the plate electrode 2 shown in electrode 2 shown in Figure 1 and Fig. 3 (b) corresponds to each other.
Each plate electrode 2 preferably has the length of 2～50cm, the width of 2～50cm and the thickness of about 0.2～5.0mm.
It does not limit the material of plate electrode 2 particularly, as long as can produce quasi-molecule light between electrode.When considering after a while the ultraviolet reflection function of explanation, preferred aluminium or by form the material that aluminium film or dielectric multilayer film obtain in the metal surface.Consider electrical conductance and thermal conductance, the metal that forms aluminium film or dielectric multilayer film on the surface is copper, silver, gold etc. preferably.In addition, the dielectric multilayer film is preferably by alternately piling up the film that magnesium fluoride layer and lithium fluoride layer form.
In embodiment 2, can use and the similar plate electrode of above-mentioned plate electrode.
In first Excimer lamp of the present invention, the plate electrode that arranged alternate has opposed polarity makes it pass through dielectric substance toward each other.Make it pass through dielectric substance embodiment respect to one another as arranged alternate plate electrode 2, following embodiment is arranged: make plate electrode 2 that each surface all is coated with dielectric substance 7 as shown in Figure 3 toward each other, as shown in Figure 1.In embodiment 2, can use embodiment as shown in Figure 2, wherein, a first type surface adjacency of plate electrode 2 and the plate 8 that forms by dielectric substance, another first type surface of this plate 8 and discharge space 5 adjacency, this plate electrode of arranged alternate makes it toward each other by this way.In addition, in Fig. 1, make the surface coverage of each have plate electrode 2 structures respect to one another of dielectric substance 7 to replace: a first type surface adjacency of this plate electrode 2 and the plate 8 that forms by dielectric substance with following structure, another first type surface of this plate 8 and discharge space 5 adjacency, this plate electrode of arranged alternate makes it toward each other.When shown in Fig. 1 or 2, arranging plate electrode, the plate electrode that is arranged in can use figure outside the plate electrode of high order end and low order end applies voltage to adjacent two discharge spaces 5,5, thereby can reduce the sum of Excimer lamp middle plateform electrode 2, this can reduce cost.
Dielectric substance can be selected from known materials such as synthetic quartz glass, calcirm-fluoride, magnesium fluoride.
For example, surface coverage as shown in Figure 3 has the plate electrode 2 of dielectric substance 7 to generate by the following method: two board-like materials that each free synthetic quartz glass forms are set, deposition of aluminum on a surface of each board-like material, depositional plane is clipped in plate electrode between two board-like materials in the inboard, with inorganic bond that it is bonding.
Fig. 4 illustrates the luminescence unit of the discharge space 5 that comprises a plurality of plate electrodes 2 and alternately form as discharge space between two plate electrodes, wherein, Fig. 4 (a) illustrates the luminescence unit of being seen from the light emitting side, and Fig. 4 (b) illustrates the luminescence unit of seeing from the side relative with the light emitting side.
In embodiment 1, shown in Fig. 4 (a) and 4 (b), side plate 12 and 13 is set to form the box-shaped luminescence unit with plate electrode 2.Above-mentioned side plate 12 and 13 is preferably with making such as pottery, synthetic quartz glass.
In addition, can plate (top board) be set at that surface relative with the light emitting side (front surface of the luminescence unit shown in Fig. 4 (b)), this top board is also preferably with making such as pottery or synthetic quartz glass.
In embodiment 2, as partly illustrating in Fig. 2, each discharge space 5 surrounds by top board 15 and side plate and light emitting window 3 with by the plate 8 that dielectric substance forms, and discharge gas is charged in each discharge space airtightly.
Shown in Fig. 3 and Fig. 4 (b), each plate electrode 2 has contact site 9, constitutes the structure that contact site 9 can be electrically connected with high frequency electric source 6, shown in Fig. 4 (b).When adopting said structure,, can make discharge space 5 produce quasi-molecule light by applying voltage from high frequency electric source.
In addition, as discussing after a while, in embodiment 1, preferred Fig. 1 and plate electrode 2 shown in Figure 3 have the ultraviolet reflection function, perhaps form the speculum with ultraviolet reflection function on the first type surface of each dielectric substance 7.
In Fig. 1, any position between vertically extending in the drawings two electrodes 2 produces quasi-molecule light, quasi-molecule light for the downside from figure (quasi-molecule light emitting side) output upside (with the relative side of quasi-molecule light emitting side) is in the drawings produced need make the following lateral reflection of the quasi-molecule light that upside produced in figure in the drawings.
Thereby, preferably, shown in Fig. 5 (a), form plate electrode 2 to have the ultraviolet reflection materials with function, perhaps shown in Fig. 5 (b), on each dielectric substance 7, form speculum 10, with the quasi-molecule light of the output of the downside in figure upside generation in the drawings with ultraviolet reflection function.
In first Excimer lamp of the present invention, but the ultraviolet reflection function means the function of uv reflectance at least, and having the ultraviolet reflection materials with function can be reflect visible light, infrared ray and ultraviolet material.
The material of speculum 10 comprises dielectric multilayer film etc.The dielectric multilayer film is preferably by alternately piling up the film that magnesium fluoride film and lithium fluoride film form.
In addition, shown in Fig. 4 (a) and 4 (b),, preferably form speculum 14 on each in side plate 12 and 13 when when with plate electrode 2 side plate 12 and 13 being set and forming the box-shaped luminescence unit.
Shown in Fig. 4 (a) and 4 (b), can go up at inner surface (surfaces of discharge space 5 sides) and form speculum 14.When side plate 12 or 13 be formed by the material that can see through quasi-molecule light, formation speculum 14 on the outer surface (end face and the bottom surface of the luminescence unit shown in Fig. 4 (a) and 4 (b)) of each that can be in side plate 12 and 13.Can use and the material of above-mentioned speculum 10 identical materials as speculum 14.
As Fig. 1 and shown in Figure 5, preferably with the emitting side facing surfaces of quasi-molecule light on also form speculum 11.Utilize speculum 11, can to the reflection of the emitting side of quasi-molecule light towards with the quasi-molecule light of the emitting side facing surfaces of quasi-molecule light.
As Fig. 1 and shown in Figure 5, can go up at the inner surface (surfaces of discharge space 5 sides) of top board 15 and form speculum 11.When top board is formed by the material that can see through quasi-molecule light, can go up at the outer surface (with discharge space 5 side facing surfaces) of top board and form speculum 11.Can use and the material of above-mentioned speculum 10 identical materials as speculum 11.
In embodiment 2, preferred plate electrode 2 shown in Figure 2 also has the ultraviolet reflection function.In addition, preferably on the first type surface of the plate 8 that forms by dielectric substance, form speculum, in addition, preferably on top board 15 that surrounds discharge space 5 and in the side plate each, form speculum with ultraviolet reflection function.When forming speculum in plate 8, top board 15 and side plate each, can on plate 8, top board 15 and side plate and surface that discharge space 5 contacts, form speculum.When in plate 8, top board 15 and the side plate each be formed by the material that can see through quasi-molecule light, speculum 11 shown in the image pattern 2 is the same, each that can be in top board 15, side plate and plate 8 with surperficial facing surfaces that discharge space 5 contacts on form speculum.
The material of speculum can be selected from above-mentioned dielectric multilayer film or aluminium film.
Shown in Fig. 1 (or Fig. 2), first Excimer lamp of the present invention has the discharge space 5 that forms between plate electrode 2,2, and first Excimer lamp of the present invention has a plurality of this discharge spaces.
When making plate electrode 2 form discharge space 5 toward each other as mentioned above, can form wideer discharge space, and can be when will adding up, by the quasi-molecule light of light emitting window 3 output high-powers at the quasi-molecule light that any position between any two quasi-molecule sparking electrodes 2,2 produces.In addition, when a plurality of this discharge space 5 is set, the area of Excimer lamp is increased.
The width of each discharge space (discharge channel length) is preferably greater than 0mm but is no more than 10mm, more preferably 1～5mm.
The area that can consider pending object is determined the quantity of the discharge space 5 arranged as required between plate electrode 2,2.
Shown in Fig. 1 (or Fig. 2), in Excimer lamp of the present invention, light emitting window 3 is set abreast with the discharge channel of discharge space 5.When adopting said structure, can be when the quasi-molecule light that will produce in any position of upside (side relative with the emitting side of quasi-molecule light) between the downside (emitting side of quasi-molecule light) of figure of figure adds up, by light emitting window 3 output high-power quasi-molecule light.
According to the definite as required voltage that applies from the high frequency electric source 6 shown in Fig. 1 (or Fig. 2) of discharging condition.Usually, use the high-frequency region of about 10kHz to 20MHz and the voltage regime of counting about 0.5kVp-p to 20 kVp-p in GHz and the microwave region.
Below, second Excimer lamp of the present invention is described.
Second Excimer lamp of the present invention is following Excimer lamp, and it comprises: luminescence unit, and it has the arc chamber that is used to launch quasi-molecule light; And lamp house, it holds described luminescence unit in inside, and described lamp house has the light output window that is arranged on the light emitting side,
Wherein, in the described arc chamber of described luminescence unit, charge into discharge gas, between the inwall of the outer wall of the described arc chamber of described luminescence unit and described lamp house, charge into inert gas, described discharge gas and described inert gas have 1 atmospheric pressure or bigger pressure separately, and it is 0.3 atmospheric pressure or littler that described discharge gas and described inert gas are adjusted into the absolute value that guarantees the difference between two pressure.
Below, the embodiment of second Excimer lamp of the present invention is described with reference to the accompanying drawings.
Fig. 6 is the schematic sectional view of Excimer lamp that is used to illustrate the structure of second Excimer lamp of the present invention.In Fig. 6, Excimer lamp 101 comprises: luminescence unit 102, and it has the arc chamber 106 that is used for launching quasi-molecule light; And lamp house 104, it holds luminescence unit 102 in inside, and has light output window 103 on the light emitting side.
The arc chamber 106 that constitutes luminescence unit 102 shown in Figure 6 is formed by the discharge cell 125 of rectangular shape roughly, and in box-shaped arc chamber 106, discharge space extends from this side direction opposite side of figure, thereby forms box-formed shape.In Excimer lamp of the present invention, restriction constitutes the shape of the arc chamber of luminescence unit particularly, as long as arc chamber has the airtight construction that portion within it charges into discharge gas.Except above-mentioned rectangular shape, can also adopt for example different shapes such as regular hexahedron, cylinder, dual cylinder.In order to obtain high-power quasi-molecule light, can be at a plurality of discharge spaces of the inner formation of arc chamber.As above-mentioned arc chamber,, preferably use a plurality of discharge cells of arranged alternate and plate electrode side by side and the arc chamber of a plurality of discharge spaces is set side by side in inside as discussing after a while.
The arc chamber 106 that forms above-mentioned discharge space is formed by dielectric substance, and this dielectric substance can be from for example selecting the known materials such as synthetic quartz glass, magnesium fluoride, calcirm-fluoride.
Sealing gasket, O shape ring etc. preferably are set, to guarantee air-tightness between light output window and lamp house.
In Fig. 6, on the first type surface of arc chamber 106, be provided with the electrode 105,105 that constitutes luminescence unit 102, electrode 105,105 is electrically connected with the high frequency electric source 111 that is arranged on lamp house 104 outsides.In Fig. 6, electrode 105 has writing board shape.Yet, specifically not limiting the shape of electrode, it can have different shape according to the shape of arc chamber.
When electrode 105 has writing board shape, can adopt at the plate electrode of first Excimer lamp illustrated size and material.
In Fig. 6, in arc chamber 106, charge into discharge gas, between the inwall of the outer wall of arc chamber 106 and lamp house 104, charge into inert gas.When applying voltage from high frequency electric source 111 between electrode 105,105, the discharge gas that is charged in the arc chamber 106 produces discharge, thereby produces quasi-molecule light.
Discharge gas comprises the mist of rare gas such as xenon, argon gas, krypton gas and above-mentioned rare gas and chlorine.Inert gas also comprises rare gas such as helium, neon, argon gas, krypton gas, xenon except comprising nitrogen.When using above-mentioned rare gas as inert gas, because the ionization potential that these gases begin to discharge is low, so these gases are sometimes at the arc chamber external discharge.Therefore, the preferred distribution that will arrive electrode in advance in lamp house insulate fully.
Centre wavelength according to the definite quasi-molecule light that will obtain of discharge gas.For example, when using xenon, the centre wavelength of quasi-molecule light is 172nm, when using argon gas, centre wavelength is 126nm, and when using krypton gas, centre wavelength is 146nm, when using the mist of argon gas and chlorine, centre wavelength is 175nm, and when using the mist of xenon and chlorine, centre wavelength is 308nm, when using the mist of krypton gas and chlorine, centre wavelength is 222nm.
The tool feature part of second Excimer lamp of the present invention is, the two is 1 atmospheric pressure or bigger the pressure of above-mentioned discharge gas and the pressure of above-mentioned inert gas, and these two pressure are adjusted into the absolute value that guarantees the difference between these two pressure is 0.3 atmospheric pressure or littler.Promptly, as the conscientiously result of research that the present inventor carried out, find to be made as 1 atmospheric pressure or bigger when pressure with discharge gas, and the pressure that will be positioned at the inert gas around the arc chamber is when being adjusted to the pressure of discharge gas about equally, the emissive porwer of quasi-molecule light is increased, and arc chamber can not produce be full of cracks or damaged, has correspondingly finished the present invention according to above-mentioned discovery.
Along with the increase of the pressure of discharge gas, the emissive porwer of quasi-molecule light increases.Therefore, the pressure of discharge gas and inert gas is preferably 1.5 atmospheric pressure or bigger, more preferably 2 atmospheric pressure or bigger.Yet, when the pressure of discharge gas and inert gas is too high, need to increase each the thickness in arc chamber and the lamp house, so the pressure of discharge gas and inert gas is preferably 10 atmospheric pressure or littler.In addition, preferably the absolute value with the difference between the pressure of the pressure of discharge gas and inert gas is adjusted into 0.1 atmospheric pressure or littler, more preferably is adjusted into 0.05 atmospheric pressure.
Determine the voltage that will apply from high frequency electric source 111 as required according to discharging condition.Usually, use the high-frequency region of about 10kHz to 20MHz and the voltage regime of counting about 0.5kVp-p to 20kVp-p in GHz and the microwave region.
Below, adjust the method for the pressure of the pressure of above-mentioned discharge gas and above-mentioned inert gas with reference to figure 7 explanation.
In Fig. 7, the discharge gas circulation flow path 107 that is used for from lamp house 104 outsides discharge gas being introduced the discharge space of arc chamber 106 is connected to gas trap 108, and gas trap 108 is the sealing devices that are used for discharge gas is sealed in arc chamber 106.In addition, be used for being connected to gas trap 110 from the inert gas circulation flow path 109 that lamp house is introduced with inert gas in lamp house 104 outsides, gas trap 110 is to be used for the sealing device of inert gas seal at lamp house.
In Fig. 7, make it possible to be connected to Excimer lamp 101 by the confession/exhaust equipment 112 of gas trap 108 and gas trap 110 supplies and discharging discharge gas and inert gas.
When with discharge gas and inert gas supply arc chamber 106 and lamp house 104, at first arc chamber 106 and lamp house 104 are found time.When above-mentioned gas valve 108 and gas trap 110 are in open mode, use vacuum pump 113 to carry out vacuum exhaust and carry out this and find time.In this case, in order to prevent arc chamber 102 explosions, preferably, when opening, closing exhaust pressure control valve 115,115, use interior gas pressure P1 of differential manometer 114 inspection arc chambers and the pressure reduction between the gas pressure P2 in the lamp house, as far as possible little to guarantee above-mentioned pressure reduction.
After finding time, close exhaust pressure control valve 115,115, open supply gas pressure control valve 116,116, to supply with discharge gas and inert gas from discharge gas cylinder 117 and inert gas cylinder 118.In this case, when opening, closing supply gas pressure control valve 116,116, check pressure gauge 119,119 and differential manometer 114, with the pressure of each in assurance discharge gas and the inert gas is 1 atmospheric pressure or bigger predetermined pressure, and the absolute value of the difference between these two pressure is 0.3 atmospheric pressure or littler.
Above-mentioned confession/exhaust equipment 112 preferably has the jar 120,120 as buffer.
In addition, the device as the difference between the pressure of pressure that is used to adjust discharge gas and inert gas can be provided with volume adjustment mechanism 121 as shown in Figure 7.In Fig. 7, volume adjustment mechanism 121 is arranged in the lamp house 104 from the end of the gas stream path of discharge gas circulation flow path 107 branches.When producing pressure reduction between gas pressure P1 in arc chamber and the gas pressure P2 in the lamp house, above-mentioned volume adjustment mechanism 121 is expanded or shrink, thereby reduce poor between the pressure of the pressure of discharge gas and inert gas.In addition, as shown in Figure 8, volume adjustment mechanism 121 can be arranged on lamp house 104 outsides.In this case, the volume adjustment mechanism 121 that will have actuator 122 is arranged on from the end of the gas stream path of discharge gas circulation flow path 107 branches, and the volume adjustment mechanism 121 that will have actuator 122 is arranged on from the end of the gas stream path of inert gas circulation flow path 109 branches.In discharge gas circulation flow path 107 and inert gas circulation flow path 109, pressure gauge 119 is set, volume adjustment mechanism 121 is expanded or contraction, thereby reduce the pressure reduction shown in these two pressure gauges.This volume adjustment mechanism 121 comprises flexible capsule (bellow), piston, diaphragm etc.
After the pressure with the pressure of discharge gas and inert gas is adjusted into predetermined value, close gas trap 108 and gas trap 110, thereby can be in Excimer lamp 101 with these air seals, then, Excimer lamp 101 is separated from air feed equipment 112, and Excimer lamp 101 can use for various uses under Fig. 6 or state shown in Figure 9.Can be at the gas trap 108 and the gas trap 110 of sealing discharge gas circulation flow path 107 and inert gas circulation flow path 109 back removal Excimer lamps 101, yet preferably do not remove gas trap 108 and gas trap 110, use for the situation of introducing discharge gas and inert gas once more.When using volume adjustment mechanism 121 when introducing discharge gas and inert gas and sealing its path, preferably, Excimer lamp 101 has volume adjustment mechanism 121 behind the path of these gases of sealing.This is because during the variation of the pressure of these gases, can utilize volume adjustment mechanism 121 easily to adjust pressure reduction after the path of sealing discharge gas and inert gas.Therefore, can set in advance volume adjustment mechanism, be used for behind the path of sealing discharge gas and inert gas, adjusting pressure reduction.
Below, the preferred embodiment of luminescence unit is described.
Second Excimer lamp of the present invention preferably has following structure: above-mentioned luminescence unit has the arc chamber that is made of a plurality of discharge cells that are arranged in juxtaposition,
The a plurality of plate electrodes that are used for quasi-molecule discharge, described a plurality of plate electrodes and contact with the first type surface of described discharge cell toward each other,
Described arc chamber has the light emitting window that the discharge channel with described arc chamber is provided with abreast, and
The described discharge gas that charges into described arc chamber produces discharge, thus emission quasi-molecule light.
Figure 10 illustrates an embodiment of above-mentioned Excimer lamp.
In the above described manner, between electrode 105,105 respect to one another, arrange inner box-shaped discharge cell 125, arranged alternate a plurality of electrodes 105 respect to one another and a plurality of discharge cell 125 with hollow space.In arc chamber 106, form the discharge space of a plurality of approximate box-shapeds.Between electrode 105,105, form discharge channel (extending from left to right among Figure 10), light emitting window 123 is set abreast with discharge channel.When high frequency electric source 111 applies voltage via electrode 105, the discharge gas that charges into above-mentioned discharge space produces discharge, thus emission quasi-molecule light.
In the above-described embodiments, form electrode with writing board shape separately, thereby can between the electrode 105,105 that extends to light emitting window 123 (downside of Figure 10) from the side (upside of Figure 10) relative, form wide discharge space with light emitting window 123, making can be when the quasi-molecule light that will produce in any position of 105,105 at electrode adds up, from light emitting window 123 output high-power quasi-molecule light.In this case, preferably form plate electrode with having the ultraviolet reflection materials with function, inwall or outer wall surface at discharge cell 106 form the speculum with ultraviolet reflection function, are directed to the downside of figure with the quasi-molecule light that will produce at the upside of figure.
Mean the ability of uv reflectance about the employed ultraviolet reflection function of second Excimer lamp of the present invention, having the ultraviolet reflection materials with function can be reflect visible light, infrared ray and ultraviolet material.
The material of above-mentioned speculum comprises aluminium and dielectric multilayer film.Preferably by alternately piling up film that magnesium fluoride layer and lithium fluoride layer obtain as the dielectric multilayer film.
In the embodiment shown in fig. 10, be arranged on the left end of figure and the plate electrode plate electrode in addition of right-hand member and can apply voltage to two adjacent discharge spaces, thereby can reduce the sum of Excimer lamp middle plateform electrode 105, this can make cost reduce.
The width of discharge space (discharge channel length) is preferably 1～30mm, more preferably 3～10mm.The area that can consider pending object determines that as required picture discharge space and plate electrode between two plate electrodes 105,105 replace the quantity of the discharge space of formation.
As shown in figure 10,, discharge gas can be charged in the discharge space of arc chamber 106 during from discharge gas circulation flow path 107 when circulation flow path to discharge space branch.On the other hand, when arc chamber 106 has the discharge gas opening 124 that runs through a plurality of discharge spaces, discharge gas can be charged in the arc chamber, and not make discharge gas circulation flow path 107 to each discharge space branch.
Example
Hereinafter, reference example illustrates the present invention in further detail, but the present invention is not subjected to these example limits.
Example 1 (the manufacturing example of first Excimer lamp)
Prepare 15 made of aluminum, have a plate electrode 2 of shape shown in Figure 3 separately, each plate electrode 2 is carried out surface finish, plate electrode 2 has the length of 10cm, the width of 10cm and the thickness of 0.5mm, except contact site 9, the whole surface coverage of plate electrode 2 has synthetic quartz glass as dielectric substance.
Form top board 15 shown in Fig. 5 (a) with ceramic wafer, the above-mentioned aluminum plate electrode 2 that covers whole surface with synthetic quartz glass is arranged as with the distance between plates of 5mm from toward each other.In addition, form as Fig. 4 (a) and the vertical side plate 12 and 13 of the first type surface with plate electrode 2 shown in 4 (b), thereby generate luminescence unit with a plurality of box-shaped discharge spaces 5 with ceramic wafer.Though Fig. 4 (a) and 4 (b) show 5 plate electrodes 2, in fact use 15 plate electrodes 2.
Ox-eye that the synthetic quartz glass of diameter 14cm, thickness 10mm makes is set as light emitting window 3, it is installed to chamber 4 via sealing gasket, thereby generates Excimer lamp as shown in Figure 1.In chamber 4 charged pressure be 0.7 atmospheric xenon as the quasi-molecule discharge gas, apply the high frequency voltage of frequency 1.6MHz, voltage 4kVp-p from high frequency electric source 6, to produce quasi-molecule light.
Above-mentioned quasi-molecule light has 280mW/cm
2Output, the output that can access approximately is to have 5 times of the output of the Excimer lamp of the discharge space that roughly is equal to.
Example 2 (the manufacturing example of first Excimer lamp)
Shown in Fig. 5 (b), except forming on the first type surface of dielectric substance 7 by alternately piling up the dielectric multilayer film that magnesium fluoride thin layer and lithium fluoride thin layer form, generate Excimer lamp in the mode identical, and produce quasi-molecule light in the mode identical with example 1 with example 1.
Above-mentioned quasi-molecule light has 310mW/cm
2Output, as the result of example 1, the output that can access approximately is to have 5 times of the output of the Excimer lamp of the discharge space that roughly is equal to.
Example 3 (the manufacturing example of second Excimer lamp)
Generate the Excimer lamp 101 that comprises luminescence unit 102 as shown in Figure 6 with cuboid arc chamber 106.
At first, in order to generate luminescence unit 102, the preparation longitudinal length is that 150mm, lateral length are that 100mm, width are the box-shaped discharge cell 125 of 7mm, used as arc chamber 106.It is that 148mm, lateral length are that 98mm, width are the cavity of 5mm that arc chamber 106 has longitudinal length, should cavity formation discharge channel length be the discharge space of 5mm at interdischarge interval.With length is that 130mm, width are that 80mm, thickness are that the plate electrode 105 of 1mm is arranged as plate electrode 105 is placed on two first type surfaces of arc chamber 106, and wherein each first type surface is one.As shown in Figure 6, lamp house 104 (the diameter 200mm that is making by stainless steel, height 400mm) holds arc chamber 106 in plate electrode 105 thus arranged, the end of discharge gas circulation flow path 107 is connected to going up the hole that forms, thereby obtain luminescence unit 102 with the relative side (upside among the figure) of the light emitting side of arc chamber 106.In addition, 2 plate electrodes 105 are connected to the high frequency electric source 111 that is arranged on lamp house 104 outsides.
Above-mentioned lamp house 104 has the inert gas circulation flow path 109 that is used for inert gas is introduced lamp house 104, and the ox-eye that also has diameter 100mm, thickness 10mm is as light output window 103.This ox-eye is attached to lamp house via sealing gasket.
For discharge gas and inert gas are supplied with arc chamber 106 and lamp house 104, via gas trap 108 and gas trap 110 above-mentioned discharge gas circulation flow path 107 and above-mentioned inert gas circulation flow path 109 are connected to confession/exhaust equipment 112 respectively.
At first, under the state of opening above-mentioned gas valve 108 and gas trap 110, find time, thereby arc chamber 106 and lamp house 104 are carried out vacuum exhaust with vacuum pump 113.In order to prevent that arc chamber 106 from breaking, checking by differential manometer 114 in the arc chambers 106 in the gas pressure P1 and lamp house 104 in the pressure reduction between the gas pressure P2, during vacuum exhaust, open, close exhaust pressure control valve 115, thereby make pressure reduction as far as possible little.
After vacuum exhaust, close exhaust pressure control valve 115, then, open supply gas pressure control valve 116, to supply with discharge gas (xenon) and inert gas (nitrogen) from discharge gas cylinder 117 and inert gas cylinder 118.In this case, when checking pressure gauge 119 and differential manometer 114, open, close supply gas pressure control valve 116, thereby make xenon and nitrogen have 1 atmospheric pressure separately, and the absolute value of the difference between these two pressure is 0.3 atmospheric pressure or littler.
When above-mentioned vacuum exhaust and air feed, confession/exhaust equipment 112 is provided with jar 120, and the device of the difference between the pressure of the pressure of conduct adjustment discharge gas and inert gas, lamp house 104 inside are provided with flexible capsule 121 conducts volume adjustment mechanism as shown in Figure 7.
After the pressure with the pressure of discharge gas and inert gas is adjusted to predetermined value, close gas trap 108 and 110 to seal these gas, from confession/exhaust equipment 112 divided gas flow valves 108 and 110, thereby obtain as shown in Figure 9 Excimer lamp 101.Xenon pressure and nitrogen pressure in the Excimer lamp 101 all are 1 atmospheric pressure, and the difference between these two pressure approximately is 0.
The high frequency voltage that applies frequency 1.9MHz, voltage 3.5kVp-p from 111 pairs of Excimer lamps 101 of high frequency electric source is to produce quasi-molecule light, and be full of cracks or damaged does not take place arc chamber 106.
In addition, when obtain discharge gas pressure and inert gas pressure in the mode identical with said process is that 1.5 atmospheric pressure, 2.0 atmospheric pressure and 2.5 atmospheric pressure and pressure reduction are adjusted to about 0 atmospheric Excimer lamp 101, and make it produce the quasi-molecule light time, be full of cracks or damaged does not take place in its arc chamber 106.
The variation of emission light quantity when Figure 12 illustrates the pressure of the pressure that changes discharge gas as mentioned above and inert gas.As shown in figure 12, can see, can increase the emissive porwer of quasi-molecule light by the pressure of discharge gas and the pressure of inert gas all are set to 1 atmospheric pressure or bigger.
Example 4 (the manufacturing example of second Excimer lamp)
Generate the Excimer lamp with arc chamber 106 1 shown in Figure 10, wherein arc chamber 106 has the discharge space of a plurality of approximate box-shapeds of arranging side by side in inside.
At first, in order to generate arc chamber 106, be that the synthetic quartz glass of 1mm is made 12 box-shaped discharge cells 125 with thickness, its longitudinal length is 150mm, and lateral length is 100mm, and width is 7mm.Each discharge cell 125 has longitudinal length in inside be that 148mm, lateral length are that 98mm, width are the cavity of 5mm, should each self-forming discharge channel length of cavity be the discharge space of 5mm at interdischarge interval.Arrange this 12 discharge cells side by side, make its first type surface toward each other, thereby obtain arc chamber 106.With 13 length is that 130mm, width are that 80mm, thickness are that the aluminum plate electrode 105 of 1mm is arranged as separately with the first type surface of the discharge cell that constitutes arc chamber 106 and contacts, and one of them plate electrode contacts with a first type surface.
As shown in figure 10, in the lamp house of making by stainless steel 104 (diameter 200mm, height 400mm), hold arc chamber 106 with above-mentioned a plurality of plate electrodes 105 of being arranged, to be connected from the hole that the circulation flow path of discharge gas circulation flow path 107 branches and the side (upside of figure) relative with light emitting window 123 at discharge cell form, thereby obtain luminescence unit 102.In addition, as shown in figure 10, each plate electrode 105 is connected with the high frequency electric source 111 that is arranged on lamp house 104 outsides.
Above-mentioned lamp house 104 has the inert gas circulation flow path 109 that is used for inert gas is introduced from the outside lamp house 104, have ox-eye that the synthetic quartz glass of diameter 150mm, thickness 18mm makes as light output window 103, and this ox-eye is attached to lamp house via sealing gasket.
In the mode identical with example 3, in above-mentioned arc chamber 106 and above-mentioned lamp house 104, charge into discharge gas (xenon) and inert gas (nitrogen), be adjusted to about 0 atmospheric Excimer lamp 101 thereby obtain the pressure reduction that xenon and nitrogen has between 2 atmospheric pressure and two pressure separately.
When 111 pairs of above-mentioned Excimer lamps 101 of high frequency electric source apply the high frequency voltage of frequency 1.4MHz, voltage 5.5kVp-p, be full of cracks or damaged does not take place in arc chamber 106, and can obtain 500mW/cm
2Emission light.
Industrial applicability
According to the present invention, the Excimer lamp of the emission output that increases quasi-molecule light can be provided, and increase The emissive porwer of big quasi-molecule light and do not make arc chamber that be full of cracks and damaged Excimer lamp take place.
Claims (10)
1. Excimer lamp, it has light emitting window and a plurality of quasi-molecule sparking electrode respect to one another that is arranged on the light emitting side at least, and have such structure: the quasi-molecule discharge gas in the discharge space that forms between described electrode of opposite produces discharge, thus emission quasi-molecule light
Described quasi-molecule sparking electrode is a plate electrode,
Be provided with a plurality of described discharge spaces, each described discharge space between plate electrode,
With the discharge channel of described discharge space described light emitting window is set abreast.
2. Excimer lamp according to claim 1, wherein, described plate electrode by one or more dielectrics toward each other.
3. Excimer lamp according to claim 2, wherein, the surface coverage of described plate electrode has dielectric substance.
4. Excimer lamp according to claim 2, wherein, the first type surface adjacency of described plate electrode and the plate that forms by dielectric substance, and another first type surface of described plate and described discharge space adjacency.
5. according to each described Excimer lamp in the claim 1～4, wherein, described quasi-molecule sparking electrode has the ultraviolet reflection function.
6. according to each described Excimer lamp in the claim 2～4, wherein, the speculum that forms on described one or more dielectric first type surfaces has the ultraviolet reflection function.
7. Excimer lamp, it comprises:
Luminescence unit, it has the arc chamber that is used to launch quasi-molecule light; And
Lamp house, it holds described luminescence unit in inside, and has the light output window that is arranged on the light emitting side,
Wherein, in the described arc chamber of described luminescence unit, charge into discharge gas, between the inwall of the outer wall of the described arc chamber of described luminescence unit and described lamp house, charge into inert gas,
In described discharge gas and the described inert gas each all has 1 atmospheric pressure or bigger pressure, and to be adjusted to the absolute value that guarantees the difference between these two pressure be 0.3 atmospheric pressure or littler.
8. Excimer lamp according to claim 7, wherein, described luminescence unit has the arc chamber that is made of a plurality of discharge cells that are arranged in juxtaposition,
The a plurality of plate electrodes that are used for quasi-molecule discharge, described a plurality of plate electrodes and contact with the first type surface of described discharge cell toward each other,
Described arc chamber has the light emitting window that the discharge channel with described arc chamber is provided with abreast, and
The described discharge gas that charges into described arc chamber produces discharge, thus emission quasi-molecule light.
9. Excimer lamp according to claim 7, wherein, described arc chamber also has the discharge gas opening that runs through described a plurality of discharge spaces.
10. according to each described Excimer lamp in the claim 7～9, wherein, described luminescence unit has the discharge gas circulation flow path that is used for discharge gas is introduced from described lamp house outside described discharge space, and
Described lamp house has the inert gas circulation flow path that is used for inert gas is introduced from described lamp house outside described lamp house.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP124367/2005 | 2005-04-22 | ||
| JP2005124367A JP2006302720A (en) | 2005-04-22 | 2005-04-22 | Excimer lamp |
| JP052812/2006 | 2006-02-28 |
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| Publication Number | Publication Date |
|---|---|
| CN101164136A true CN101164136A (en) | 2008-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA200680013295XA Pending CN101164136A (en) | 2005-04-22 | 2006-03-28 | Excimer lamp |
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| CN (1) | CN101164136A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102160142A (en) * | 2008-09-22 | 2011-08-17 | 株式会社杰士汤浅国际 | Excimer lamp, excimer lamp unit, and ultraviolet irradiation device |
| CN103189959A (en) * | 2010-11-02 | 2013-07-03 | 欧司朗股份有限公司 | Radiating element for irradiating surfaces, having a socket |
| CN103415338A (en) * | 2010-09-29 | 2013-11-27 | 新技术水液规划公司 | Excimer light source |
| CN115283221A (en) * | 2022-08-22 | 2022-11-04 | 优威赛斯光电技术(湖州)有限公司 | Ultraviolet lamp tube, lamp shade and curing method for preparing micro-wrinkle paint surface |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5271762B2 (en) * | 2009-03-13 | 2013-08-21 | 株式会社オーク製作所 | Discharge lamp |
| JP5304354B2 (en) * | 2009-03-16 | 2013-10-02 | ウシオ電機株式会社 | Excimer lamp |
| CN103094057B (en) * | 2013-02-01 | 2015-07-22 | 余建军 | Double-wavelength ultraviolet lamp |
-
2005
- 2005-04-22 JP JP2005124367A patent/JP2006302720A/en active Pending
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2006
- 2006-03-28 CN CNA200680013295XA patent/CN101164136A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102160142A (en) * | 2008-09-22 | 2011-08-17 | 株式会社杰士汤浅国际 | Excimer lamp, excimer lamp unit, and ultraviolet irradiation device |
| CN103415338A (en) * | 2010-09-29 | 2013-11-27 | 新技术水液规划公司 | Excimer light source |
| US9865448B2 (en) | 2010-09-29 | 2018-01-09 | Ultraviolet Sciences, Inc. | Excimer light source |
| CN110459460A (en) * | 2010-09-29 | 2019-11-15 | 新技术水液规划公司 | Excimer light source |
| CN103189959A (en) * | 2010-11-02 | 2013-07-03 | 欧司朗股份有限公司 | Radiating element for irradiating surfaces, having a socket |
| CN103189959B (en) * | 2010-11-02 | 2016-05-25 | 欧司朗股份有限公司 | For the radiator with base of irradiating surface |
| CN115283221A (en) * | 2022-08-22 | 2022-11-04 | 优威赛斯光电技术(湖州)有限公司 | Ultraviolet lamp tube, lamp shade and curing method for preparing micro-wrinkle paint surface |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006302720A (en) | 2006-11-02 |
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